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WO2005024812A1 - Support pour substrats sous forme de disques presentant un trou interieur - Google Patents

Support pour substrats sous forme de disques presentant un trou interieur Download PDF

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Publication number
WO2005024812A1
WO2005024812A1 PCT/EP2004/009922 EP2004009922W WO2005024812A1 WO 2005024812 A1 WO2005024812 A1 WO 2005024812A1 EP 2004009922 W EP2004009922 W EP 2004009922W WO 2005024812 A1 WO2005024812 A1 WO 2005024812A1
Authority
WO
WIPO (PCT)
Prior art keywords
holder
spring arms
base
spring
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2004/009922
Other languages
German (de)
English (en)
Inventor
Waldemar Lukhaub
Klaus Philipp
Günter Eisele
Timo Weidner
Tilman Rieseweber
Manfred Zimmermann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Steag Hamatech AG
Original Assignee
Steag Hamatech AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steag Hamatech AG filed Critical Steag Hamatech AG
Priority claimed from DE102004043041A external-priority patent/DE102004043041A1/de
Publication of WO2005024812A1 publication Critical patent/WO2005024812A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B33/00—Constructional parts, details or accessories not provided for in the other groups of this subclass
    • G11B33/02—Cabinets; Cases; Stands; Disposition of apparatus therein or thereon
    • G11B33/04—Cabinets; Cases; Stands; Disposition of apparatus therein or thereon modified to store record carriers
    • G11B33/0405—Cabinets; Cases; Stands; Disposition of apparatus therein or thereon modified to store record carriers for storing discs
    • G11B33/0411—Single disc boxes
    • G11B33/0422—Single disc boxes for discs without cartridge
    • G11B33/0427—Single disc boxes for discs without cartridge comprising centre hole locking means
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
    • G11B17/02—Details
    • G11B17/022—Positioning or locking of single discs
    • G11B17/028—Positioning or locking of single discs of discs rotating during transducing operation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B17/00—Guiding record carriers not specifically of filamentary or web form, or of supports therefor
    • G11B17/02—Details
    • G11B17/022—Positioning or locking of single discs
    • G11B17/028—Positioning or locking of single discs of discs rotating during transducing operation
    • G11B17/0282—Positioning or locking of single discs of discs rotating during transducing operation by means provided on the turntable
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B23/00—Record carriers not specific to the method of recording or reproducing; Accessories, e.g. containers, specially adapted for co-operation with the recording or reproducing apparatus ; Intermediate mediums; Apparatus or processes specially adapted for their manufacture
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/24—Record carriers characterised by shape, structure or physical properties, or by the selection of the material
    • G11B7/26—Apparatus or processes specially adapted for the manufacture of record carriers
    • G11B7/266—Sputtering or spin-coating layers

Definitions

  • the present invention relates to a holder for disk-shaped substrates having an inner hole.
  • the present invention relates to a holder for holding substrates for optical data carriers in a coating device, in particular a sputtering device, or in a cooling device.
  • optical data carriers such as CDs and DVDs - with their different sub-formats - are known to produce translucent substrates in an injection molding process. These must then be cooled as homogeneously and quickly as possible to form flat, stress-free substrates.
  • Various holding devices are known for holding the substrates during cooling.
  • a holding pin for substrates in a cooling device which has a small contact surface in the area of the inner hole of the substrates, and which can be set in rotation by means of a corresponding fan wheel.
  • the substrate lies in a horizontal orientation on the small contact surface, which can cause substrates with high temperatures to bend due to their own weight. This applies, for example, to substrates for DVD-R applications because, unlike other substrates, these are manufactured with a higher injection temperature.
  • a known holder for the substrates in coating devices uses a metal pin with outwardly preloaded ball thrust pieces, wherein the metal pin can be inserted into an inner hole of the substrates.
  • the balls When placing a substrate, the balls are moved into the pin against a spring. This movement can lead to abrasion of the ball thrust pieces, in particular due to a production-related burr on the inner hole of the optical data carrier. Abrasion can cause the ball thrust pieces to jam and malfunction.
  • there may be quality defects on the data carriers e.g. particles in the data area, which lead to reading errors).
  • the construction of the metal pin with ball thrust pieces is very complex, since the ball thrust pieces must be installed individually. Furthermore, due to the geometry of such pins, a maximum of four ball thrust pieces can be provided, so that there are high punctiform forces on the inner hole of the disk. In addition, the ball thrust pieces only come into contact with an upper edge of the substrate inner hole when the substrate is fully inserted. Therefore, in order to provide sufficient holding force, it is also necessary to use a different pin for panes with different thickness formats.
  • pivotable inner hole grippers which can be pivoted, for example magnetically, in contact with an inner hole of the substrates in order to hold them.
  • these inner hole grippers are very complex to construct and require separate control of the gripping elements.
  • the present invention is therefore based on the object of providing a holder for disk-shaped substrates having an inner hole, which has a simple structure and ensures a secure hold of the substrates.
  • a holder for substrates having an inner hole which has a holding element with an essentially flat base and at least three integrally formed with the base has spring arms arranged in a circular line, which extend from the base essentially freely and essentially perpendicular to the plane of the base, the spring arms in the region of their free ends each defining an outward-pointing bevel which extends in the direction of a central axis of the
  • the base extends and the spring arms each define a section that is essentially straight in the axial direction in a region between the slope and the base, and the base lies essentially radially within the spring arms.
  • the holder according to the invention has a simple, compact and one-piece construction of the holding element and is therefore inexpensive to manufacture.
  • the bevel at the free ends of the spring arms which extends in the direction of a central axis of the base, enables the substrates to be received in a centered manner and causes the spring arms to spring in the direction of the central axis of the base when inserted into an inner hole of the substrates. Since the spring arms extend essentially freely from the base, a spring arm that is as long as possible is provided, which enables a good deflection. , The substantially straight sections of the spring arms in a region between the bevel and the base enable an inner circumferential surface of the inner hole of the substrates to be contacted and thus a secure hold of the substrates, regardless of their thickness.
  • the spring arms each have a thickening at their free ends.
  • the increased stability is advantageous in this area since the free ends most often come into contact with an inner circumference of the inner hole of the substrates, in particular into frictional contact.
  • the respective outward-pointing slope of the spring arms lies completely in the area of the thickening, since the aforementioned frictional contact occurs precisely in the area of the slope.
  • the spring arms define at least in a partial region of the thickening a larger outer diameter than the inner diameter of the inner hole of the substrates to be accommodated and as the outer diameter in the region of the straight section of the spring arms.
  • This enlarged outer diameter sees a snap effect as soon as the substrate is moved past the section with a larger outside diameter.
  • a secure hold in the axial direction of the holding element is guaranteed.
  • the transition between the different outer diameters is preferably rounded off in order to enable a controlled movement of the spring arms.
  • the entire section extending between the thickening and the base is essentially straight, which results in a simple construction of the holding element.
  • an outwardly facing projection is provided on the spring arms between the bevel and the base, the projections of the spring arms defining an outer diameter that is larger than the inner diameter of the inner hole of the substrates to be received.
  • the spring arms in the area of the straight section define an outer diameter of the holding element which, in an unloaded state of the spring arms, is larger than the inner diameter of the inner hole of the substrate.
  • the spring arms in the region of the straight section define an outer diameter of the holding element, which in an unloaded state of the spring arms is smaller than the inner diameter of the inner hole of the substrate. This ensures stress-free absorption of the substrate.
  • the spring arms are preferably arranged symmetrically to the base on a circular line.
  • the surfaces of the spring arms pointing outwards are adapted to the shape of the inner hole of the substrates at least in the area of the straight sections of the spring arms.
  • the outwardly facing surfaces form circular segments of a circle centered on a central axis of the holding element.
  • the transition between the base and the spring arms is preferably rounded.
  • Cutouts are preferably provided in the base, which lie between transitions of the base to the spring arms in order to extend the respective bending arm of the spring arms.
  • Radially within the cutouts the base preferably defines a clamping surface for engagement with a corresponding fastening element.
  • the spring arms preferably define a stepped interior, which has a smaller diameter in the area of the free ends than in an adjoining area.
  • the holder has a fastening element which can be inserted into an interior space formed by the spring arms and has a clamping surface in order to clamp the base part against a support.
  • the fastening element enables an easy fastening of the holding element in which the base part is clamped against a support. Because it can be inserted into the interior space formed by the spring arms, it lies essentially outside a range of motion of the substrate to be held and thus does not hinder the loading and unloading of the substrates.
  • the fastening element preferably extends axially over the spring arms in order to prevent misaligned substrates from pressing axially on the spring arms and damaging them. Because the fastening element extends axially over the arms, the fastening element can prevent the misaligned substrate from moving in the direction of the spring arms.
  • the fastening element has an outer diameter which is stepped in the axial direction, the fastening element having a smaller diameter than in one, at least in a region which is at least partially in the axial direction in the region of the spring fingers pointing outwards adjoining area extending to the base.
  • the fastening element in an area lying in the axial direction in the region of the straight sections of the spring fingers preferably has a larger outer diameter than the inner diameter defined by the free ends of the spring fingers. This enables a loose pre-assembly of the fastening element without the fastening element falling out of the interior space formed by the spring fingers.
  • an outer contour of the fastening element preferably follows an inward-pointing contour of the spring elements, the elements in between defining a spring space, which allow sufficient spring-in of the spring elements for receiving the substrate.
  • the fastening element preferably has an outer circumference in an area lying in the axial direction above the spring arms, which corresponds to the outer circumference defined by the free ends of the spring elements.
  • the base and the spring arms are preferably made of plastic, in particular PEEK. In order to prevent heat from being dissipated locally through the holding element, which can lead to stresses in the substrate, it is preferably made of a material with a thermal conductivity coefficient of ⁇ 0.25 W / mK.
  • the base and spring arms are preferably machined, i.e. that the base and the spring arms, in particular the inner and outer contour of the spring arms, are worked out from one piece. The fact that the base and spring arms are machined from one piece results in good durability of the element.
  • the fastener is preferably made of metal.
  • the aforementioned holder is provided for a coating device, in particular a sputtering device for coating substrates for optical data carriers.
  • the holder is provided for a cooling device, in which the spring arms of the holder extend essentially in the horizontal direction.
  • the spring arms in the area of the straight section define an outer diameter of the holding element, which in an unloaded state of the spring arms is smaller than the inner diameter of the inner hole of the substrate, stress-free absorption can be achieved.
  • the cooling device preferably has a plurality of holding elements which can be moved into different cooling positions via a movement device.
  • the cooling device preferably has a lifting device for moving the holder in the horizontal direction.
  • FIG. 1 shows a schematic sectional illustration through a holder of the present invention according to a first exemplary embodiment of the invention
  • FIG. 2 shows a perspective view of a holding element of the holder according to the invention according to FIG. 1;
  • FIG. 3 shows a side view of the holding element according to FIG. 2;
  • FIG. 4 is a bottom view of the holding element according to FIG. 2;
  • Fig. 5 is a schematic sectional view taken along the line V-V in Fig. 4;
  • FIG. 6 shows a schematic sectional view through a holder according to the invention in accordance with a second exemplary embodiment of the present invention
  • 7 is a partial perspective view of a cooling device in which a holder according to the present invention is integrated
  • Fig. 8 is a schematic side view of a movable receptacle for a holder of the present invention
  • 9 shows a schematic sectional illustration through the receptacle according to FIG. 8.
  • FIG. 1 schematically shows a sectional view of a holder 1 for a disk-shaped substrate 4 which has an inner hole.
  • the substrate 4 is a substrate for forming an optical data carrier and has a flat surface 5 which is vacuum-coated by means of a sputtering process with a reflective one Layer, in particular a metal layer is coated.
  • 1 schematically shows a support 6 for the substrate 4, which together with the holder 1 provides a holder for the substrate 4.
  • the holder 1 consists of a holding element 10 and a fastening element 12.
  • the holding element 10 is shown in different views in FIGS. 2 to 5.
  • the holding element 10 is essentially formed by a base 14 and a plurality of spring arms 16 which extend essentially perpendicular to the base.
  • a total of six spring arms 16 can be seen in FIG. 2, although a different number of spring arms 16 could also be provided. However, at least three spring arms 16 are provided.
  • the base 14 is essentially flat and has a circular center hole 18, which can best be seen in FIG. 4.
  • the base 14 also has semicircular cutouts 20 which are each formed between the transitions from the base 14 to the spring arms 16.
  • a clamping surface of the base 14 is defined in a region between the center hole 18 and the semicircular cutouts 20, as will be explained in more detail below.
  • the spring arms 16 are formed in one piece with the base 14.
  • the transition 22 between the base 14 and the spring arms 16 is round in each case both in the inner region and in the outer region, as can be clearly seen in FIG. 1.
  • the spring arms 16 each have a section 24 which is straight in the axial direction and has both a straight outer surface and a straight inner surface.
  • the individual spring arms 16 define circular segments which are centered on a central axis 32 of the holding element 10.
  • an outer circumference of the holding element 10 is adapted to the inner hole of the substrate 4.
  • the outer diameter of the holding element 10 defined by the spring fingers 16 is increased, and the inner diameter defined by the spring arms is reduced in this area.
  • the respective transitions between the straight section 24 and the thickened area are rounded.
  • an outwardly facing bevel 30 is also formed, which is inclined towards the free end of the spring arm 16 towards a central axis 32 of the holding element 10.
  • the bevels 30 of the spring fingers 16 thus form a shape tapering toward the free ends of the spring fingers 16.
  • the bevel 30 merges at its free end 33 into a flat end section 34 which extends essentially parallel to the base 14.
  • the holding element 10 has the smallest outside diameter. From there, the outer diameter widens along the bevel 30 to an end 36 of the bevel 30 that is distant from the section 34. At the end 36 of the bevel 30, the holding element has the widest outer diameter. From there, the outer diameter defined by the spring fingers 16 decreases again somewhat until it remains constant in the area of the straight section 24 of the spring fingers 16 essentially up to the transition 22 to the base 14. The transition between the bevel 30 to the straight section 24 of the spring fingers 16 is in each case rounded.
  • the spring fingers 16 define an interior stepped in the axial direction of the holding element 10, as can best be seen in FIGS. 1 and 5. In the area of the thickening 26 of the spring elements 16, this inner space has a first diameter which is smaller than a second inner diameter in the area of the straight sections 24 of the spring fingers. A transition between these two areas with different diameters is in turn rounded.
  • the holding element 10 is machined from plastic, in particular PEEK.
  • the fastening element 12 is a metal part 40 with a circular outer circumference 42. As can be seen in FIG. 1, the part 40 has a beveled edge at its ends opposite each other in the axial direction.
  • the part 40 also has a stepped central opening 44 for receiving and implementing a fastener, not shown, such as a screw.
  • the stepped central opening 44 defines a shoulder 46, which serves as a counter bearing for the fastener, in particular a screw head, not shown.
  • the central opening 44 in the fastening element 12 is smaller than the opening 18 in the holding element 10 in order to enable the holding element to be aligned radially with respect to adjacent components. In particular, this makes it possible to compensate for deviations due to production and tolerance.
  • the holding element can be aligned precisely with adjacent components using a gauge, regardless of a fastening opening for the fastener, not shown.
  • the metal part 40 extends over the flat region 34 of the spring fingers 16 when the metal part 40 is in contact with the base 14. This means that the metal part 40 has a longer axial dimension than the spring arms 16.
  • the surface of the metal part 40 which is in contact with the base 14 of the holding element 10 forms a clamping surface in order to press the base 14 against a not-shown clamped pad to clamp.
  • the metal part 40 is only in contact with the base 14 in a region between the circular cutouts 20 and the inner hole 18.
  • FIG. 6 shows an alternative embodiment of a holder 1 according to the present invention.
  • the same reference numerals are used in FIG. 6 insofar as similar or identical components are described.
  • the structure of the holder 1 is essentially the same as the structure according to the first exemplary embodiment, with the exception of the shape of the fastening element 12. That is to say that the holding element 10 has the same structure as in the first exemplary embodiment, so that it is not described again here.
  • the fastening element 12 in turn consists of a metal part 40 with a stepped central opening 44, which defines a shoulder 46, which serves as a counter bearing for a fastener, such as a screw.
  • the fastening element 12 also has an outer circumference that is stepped in the axial direction.
  • the outer circumference of the metal part 40 essentially follows an inner contour of the interior formed by the spring fingers 16.
  • the metal part 40 has a first outer diameter which lies in the axial direction in the region of the straight section 24 of the spring fingers 16. This outer diameter is larger than an inner circumference defined by the spring fingers 16 at its free end.
  • the metal part 40 has a reduced outer diameter which is smaller than an inner diameter defined by the free ends of the spring fingers 16.
  • this shape of the fastening element 12 enables the fastening element 12 to be loosely preassembled in the holding element 10 by simply inserting the metal body 40 into the interior space formed by the spring fingers 16. Due to the fact that the metal body 40 has an area with an outer diameter that is larger than an inner circumference defined by the spring fingers in the area of the free ends, the metal part 40 cannot easily fall out of the holding element 10. Due to the enlarged outer circumference in a region that lies above the spring fingers 16 in the axial direction, a separate protection against loading of the spring fingers in the axial direction is provided.
  • the metal body 40 provides two regions with an enlarged outer diameter compared to a central region with a reduced diameter, only one of the two regions with an enlarged outer diameter can also be provided.
  • the holder 1 is fastened within a vacuum sputtering system in which the holding element 10 is clamped against a base (not shown) by the fastening element 12 via a corresponding fastener, such as a screw. If a substrate 4 is now to be received by the holder 1, the substrate 4 is moved over the holder 1 by means of a corresponding handling device (not shown) such that the inner hole of the substrate 4 is aligned with the central axis 32 of the holding element 10. Then the substrate 4 is lowered until the inner hole of the substrate 4 contacts the bevels 30 of the spring fingers 16. The substrates 4 are further lowered, whereupon the spring fingers 16 deflect radially inwards, since the substrate 4 slides along the bevels 30 of the spring fingers.
  • the spring fingers 16 deflect radially inwards until the inner hole of the substrates 4 reaches the end 36 of the bevel 30. At this point, the spring fingers 16 are most strongly compressed. Since from this point on When the outer circumference of the spring fingers 16 is reduced, the spring fingers 16 spring outward again when the substrate 4 is moved further until the outer surfaces of the spring 16 engage the circumference of the inner hole of the substrates 4 in the region of the straight sections 24. This situation is shown in Fig. 1. Due to the circular segment shape of the spring fingers 16, they come flatly into engagement with the inner circumference of the inner hole of the substrate 4. In this position, the substrate 4 is held securely by the holder 1 and can be moved and coated within the coating device.
  • the spring fingers 16 initially spring inwards until the inner hole of the substrate 4 is in the region of the largest outer circumference of the spring fingers 16, and then the spring fingers 16 spring outwards again into their unloaded position.
  • the substrate 4 is misaligned with respect to the central axis 32 of the holder, a slight misalignment can be compensated for by the bevels 30, which center the substrate 4.
  • the misalignment is very large, the fact that the fastening element 12 protrudes axially beyond the spring fingers 16 prevents the substrate from pressing on the spring fingers 16 in the axial direction, since the substrate first comes into contact with the surface of the fastening element 12 and further axial movement of the substrate is thus prevented.
  • the function of the holder 1 according to FIG. 6 is essentially the same, but the fastening element 12 enables loose preassembly within the holding element 10. In addition, the holding element 12 enables even better protection of the spring fingers 16 against axial loads, as previously described.
  • FIG. 7 shows a partial perspective view of a cooling device 60 that uses a modified holder 1 according to the present invention.
  • the same reference numerals are used as in the previous figures, provided that the same or equivalent components are described.
  • the cooling device 60 has a radiator wheel 62 with eight circumferentially evenly spaced receiving units 64, of which only five can be seen in full in FIG. 7.
  • the fan wheel 62 is in a vertical orientation, and the receiving units 64 are aligned such that they also receive and hold substrates 4 in a vertical orientation.
  • the receiving units 64 have a movable receiving element 66 which can be moved in the horizontal direction via a pneumatic drive 68 in a loading position of the fan wheel 62.
  • the holder 1 according to the invention with the holding element 10 is attached to the front end of the movable receptacle 66, as can best be seen in FIGS. 8 and 9.
  • FIGS. 8 and 9 show a schematic side view and a sectional view of the movable receptacle 66 for the holding element 10.
  • the holding element 10 has essentially the same structure as the holding element 10 described above, but can be seen as in FIGS. 8 and 9 is simply attached to the receptacle 66 by means of a screw.
  • the use of an additional fastening element, such as fastening element 12, is not shown, but could also be provided.
  • the movable receptacle 66 consists of a first, cylindrical main body part 68, which can be firmly attached to the fan wheel 62 by means of corresponding fastening elements 70.
  • the cylindrical main body part 68 has a central through opening, in which sliding seals 72 are received, which define a through opening 71.
  • a shaft 75 which is displaceable along an axis of the passage opening 71, is received within the passage opening 71.
  • an attachment 77 is fastened, to which the holding element 10 can be fastened by means of a screw 78.
  • a cap 80 is fastened, which defines a cylindrical receiving space 82 facing the main body part 68.
  • the cylindrical receiving space 82 has an inner diameter that is larger than the outer diameter of the cylindrical main body part 68, so that the main body part 68 can be accommodated at least partially therein, as will be described in more detail below.
  • the cap 80 is biased by a spring 84 that extends between the main body portion 68 and the cap 80 away from the main body portion 68.
  • the end of the cap 80 facing the main body portion 68 includes one end thereof in the most distal biased position of the cap 80, as shown in FIG. 9.
  • the cap 80 may extend further over the main body portion 68 as the shaft 75 moves therethrough.
  • a horizontal movement of the holding element 10 can be moved, for example, in the direction of an injection molding machine for removing a substrate 4 therefrom.
  • the cap 80 with the shaft 75 is moved in the opposite direction by the spring preload, as a result of which the holding element 10 is also moved back.
  • the holding element 10 When used in the cooling device 60, the holding element 10 has essentially the same structure as in the previous exemplary embodiment. However, in the area of the straight sections 24, the spring arms 16 define an outer diameter of the holding element 10 which, in an unloaded state of the spring arms 16, is smaller than the inner hole diameter of the substrates to be received. At the same time, however, the spring arms 16 define a larger outside diameter in the region of the thickening 26 than the inside hole diameter of the substrates to be accommodated. Furthermore, the spring arms 16 can each have a further thickening or a projection between the bevels 30 and the base 14, the projections jointly defining an outer diameter which is greater than an inner hole diameter of the substrates to be accommodated. In this way, a contact surface can be provided for the substrates to be picked up. the. Alternatively, however, it is also possible to accommodate a contact element 90 between the attachment 77 and the holding element 10, as is shown schematically in FIG. 9. Of course, the attachment 77 itself could also serve as a contact surface.
  • the operation of the cooling device 60 is explained in more detail below with reference to FIGS. 7 to 9.
  • the cooling device 60 is moved into the position shown in FIG. 7, in which a receiving unit 64 is aligned with the pneumatic drive 68.
  • the holding element 10 fastened to the receiving unit 64 is opposite an output of an injection molding machine and is aligned with an inner hole in a substrate 4 that has just been produced.
  • the pneumatic drive 68 is actuated and the holding element 10 is inserted into the inner hole of the freshly produced substrate 4 by pressure on the shaft 75 or the cap 80.
  • the inner hole edges of the substrate 4 slide along the bevels 30, whereby the spring arms 16 spring slightly inwards.
  • the spring fingers 16 deflect radially inwards until the inner hole of the substrates 4 reaches the end 36 of the bevel 30.
  • the pneumatic drive 68 is then deactivated and the cap 80 with the shaft 75 is moved back again via the pretensioning of the spring 64.
  • the holding element 10 with the substrate 4 accommodated thereon is moved in the direction of the cooling wheel 62.
  • the cooler wheel 62 is then clocked further until the next receiving unit 64 is aligned with the pneumatic drive 68. This position is shown in FIG. 7, for example.
  • the substrate 4 is now held on the holding element 10 without tension, since the straight sections 24 of the spring fingers 16 define an outer diameter which is smaller than the inner hole diameter of the substrates.
  • the substrates thus lie essentially freely on the upper two spring arms 16 of the holding element 10. Furthermore, the substrates are held essentially exclusively by their inner hole diameter.
  • the fact that the maximum outer diameter defined by the bevels 30 of the spring fingers 16 is somewhat larger than the inner hole diameter of the substrate prevents the substrate from slipping off the horizontal lifting movement of the holding element 10.
  • the holding element 10 can have a lower spring rate in the cooling application, as in the application in a coating device, since it is not necessary to clamp the straight regions in the inner hole of the substrates for holding.
  • the reduced spring rate can be achieved, for example, by reducing the thickness of the spring arms.
  • the use of a material with a lower spring rate or a geometric change in the holding element 10 is also conceivable.

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  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'objectif de l'invention est de créer un support pour substrats en forme de disques présentant un trou intérieur qui possède une structure simple et garantisse un support sûr des substrats. Cet objectif est atteint, grâce à l'invention, avec un support pour substrats en forme de disques présentant un trou intérieur qui est destiné à soutenir lesdits substrats dans un dispositif d'application de revêtement, ce support présentant un élément de support qui comporte une base sur laquelle sont formés au moins trois doigts élastiques monoblocs qui s'étendent sensiblement verticalement par rapport au plan de la base. Ces doigts élastiques définissent, dans la zone de leur extrémité libre, respectivement, une rampe dirigée vers l'extérieur, qui s'étend en direction de l'axe central de la base, et ils définissent, dans la zone comprise entre ladite rampe et la base, respectivement, une partie sensiblement droite dans le sens axial.
PCT/EP2004/009922 2003-09-04 2004-09-06 Support pour substrats sous forme de disques presentant un trou interieur Ceased WO2005024812A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE10340889.4 2003-09-04
DE10340889 2003-09-04
DE102004043041A DE102004043041A1 (de) 2003-09-04 2004-09-06 Halter für scheibenförmige, ein Innenloch aufweisende Substrate
DE102004043041.1 2004-09-06

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WO2005024812A1 true WO2005024812A1 (fr) 2005-03-17

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PCT/EP2004/009922 Ceased WO2005024812A1 (fr) 2003-09-04 2004-09-06 Support pour substrats sous forme de disques presentant un trou interieur

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB189523486A (en) * 1895-12-07 1896-04-11 William Foster Fletcher An Improved Candlestick or Candle Holder.
GB153859A (en) * 1920-06-01 1920-11-18 Thomas John Whale Improvements in candle holders
JPH01298162A (ja) * 1988-05-26 1989-12-01 Nec Corp 光ディスク用スパッタ治具
EP0589416A1 (fr) * 1992-09-21 1994-03-30 Nissin Electric Company, Limited Appareillage pour la formation de couches
US5485328A (en) * 1994-05-04 1996-01-16 Seagate Technology, Inc. System for removing a clamp from a disc drive hub assembly
US5637200A (en) * 1995-02-08 1997-06-10 Nobler Technologies, Inc. Compact disk locking apparatus
US6089384A (en) * 1997-03-25 2000-07-18 Watson; Kalvin Compact disc holder
US6241089B1 (en) * 1998-05-20 2001-06-05 U.S. Philips Corporation Holding device arranged on a base plate including clamping noses
DE10100428A1 (de) * 2001-01-08 2002-07-18 Steag Hamatech Ag Verfahren und Vorrichtung zum Kühlen von Substraten

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB189523486A (en) * 1895-12-07 1896-04-11 William Foster Fletcher An Improved Candlestick or Candle Holder.
GB153859A (en) * 1920-06-01 1920-11-18 Thomas John Whale Improvements in candle holders
JPH01298162A (ja) * 1988-05-26 1989-12-01 Nec Corp 光ディスク用スパッタ治具
EP0589416A1 (fr) * 1992-09-21 1994-03-30 Nissin Electric Company, Limited Appareillage pour la formation de couches
US5485328A (en) * 1994-05-04 1996-01-16 Seagate Technology, Inc. System for removing a clamp from a disc drive hub assembly
US5637200A (en) * 1995-02-08 1997-06-10 Nobler Technologies, Inc. Compact disk locking apparatus
US6089384A (en) * 1997-03-25 2000-07-18 Watson; Kalvin Compact disc holder
US6241089B1 (en) * 1998-05-20 2001-06-05 U.S. Philips Corporation Holding device arranged on a base plate including clamping noses
DE10100428A1 (de) * 2001-01-08 2002-07-18 Steag Hamatech Ag Verfahren und Vorrichtung zum Kühlen von Substraten

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 014, no. 080 (C - 0689) 15 February 1990 (1990-02-15) *

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