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WO2004114424A1 - Organe piezo-electrique a elements de raccordement electriques et utilisation de cet organe - Google Patents

Organe piezo-electrique a elements de raccordement electriques et utilisation de cet organe Download PDF

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Publication number
WO2004114424A1
WO2004114424A1 PCT/EP2004/050767 EP2004050767W WO2004114424A1 WO 2004114424 A1 WO2004114424 A1 WO 2004114424A1 EP 2004050767 W EP2004050767 W EP 2004050767W WO 2004114424 A1 WO2004114424 A1 WO 2004114424A1
Authority
WO
WIPO (PCT)
Prior art keywords
carbon nanotubes
actuator body
piezoelectric component
piezoelectric
electrode layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2004/050767
Other languages
German (de)
English (en)
Inventor
Carsten Schuh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Publication of WO2004114424A1 publication Critical patent/WO2004114424A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/007—Piezoelectric stacks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H10N30/878—Conductive materials the principal material being non-metallic, e.g. oxide or carbon based
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M63/00—Other fuel-injection apparatus having pertinent characteristics not provided for in groups F02M39/00 - F02M57/00 or F02M67/00; Details, component parts, or accessories of fuel-injection apparatus, not provided for in, or of interest apart from, the apparatus of groups F02M39/00 - F02M61/00 or F02M67/00; Combination of fuel pump with other devices, e.g. lubricating oil pump
    • F02M63/0012—Valves
    • F02M63/0014—Valves characterised by the valve actuating means
    • F02M63/0015—Valves characterised by the valve actuating means electrical, e.g. using solenoid
    • F02M63/0026—Valves characterised by the valve actuating means electrical, e.g. using solenoid using piezoelectric or magnetostrictive actuators

Definitions

  • Piezoelectric component with electrical connection elements and use of the component
  • the invention relates to a piezoelectric component with at least one piezo element, which has at least two electrode layers arranged one above the other and at least one piezoelectric layer arranged between the electrode layers, and with at least two electrical connection elements for electrically controlling the electrode layers of the piezo element, at least one of the connection elements being carbon fibers having.
  • the piezoelectric layer and the electrode layers of the piezo element are connected to one another in such a way that an electrical field is coupled into the piezoelectric layer by means of an electrical control of the electrode layers. Due to the injected electric field, the piezoelectric layer is deflected and thus the piezo element is deflected.
  • the use of the component is specified.
  • the piezoelectric component is, for example, a piezoelectric actuator.
  • the piezoelectric actuator consists, for example, of a multiplicity of stacked piezo elements.
  • a piezo actuator with an actuator body in a monolithic multilayer construction can be seen, for example, from US Pat. No. 6,236,146 B1.
  • a multiplicity of electrode layers, which are referred to as internal electrodes, and piezoelectric layers made of a piezo ceramic are alternately stacked on top of one another and sintered together to form the monolithic actuator body.
  • adjacent electrode layers are alternately guided on two lateral surface sections of the actuator body that are electrically insulated from one another. On These surface sections each have a strip-shaped metallization.
  • each of the piezo elements is piezoelectrically inactive. Due to the alternating guidance of the electrode layers to the surface sections, an electrical field is coupled into a piezoelectrically inactive region of the piezoceramic layer, which field differs significantly from the electrical field which is coupled into a piezoelectrically active region of the piezoceramic layer.
  • the piezoelectrically active area of the piezoceramic layer is located between the electrode layers of the piezo element.
  • connection element in the form of a flexible, electrical contact tab is attached to each of the metallizations in the known piezo actuator.
  • the contact tab is, for example, a metal foil made of copper.
  • the contact lug is attached to a metallization of the actuator body via one of its edges along a height of the actuator such that one of the
  • Actuator body protruding area of the contact tab remains.
  • the contact flag is attached so that it fits into the Metallization-extending polarity crack can spread into the contact tab.
  • the contact lug is designed in such a way that the formation of cracks in the contact lug comes to a standstill.
  • a polarity crack can therefore be bridged electrically by the contact tab.
  • This ensures that the electrode layers of the actuator body remain in electrical contact despite the occurrence of a polarity crack.
  • the known piezo actuator is used, for example, to control an injection valve of an engine of a motor vehicle.
  • the automotive industry requires a number of cycles of over 10 0 for this application.
  • the activation of the electrode layers leads to expansion and contraction of the actuator body within one cycle.
  • the wire mesh consists, for example, of steel wires, which have a high elasticity or resilience.
  • the wire mesh can consist of carbon fibers. These carbon fibers are characterized by good electrical conductivity with low material fatigue in continuous operation.
  • carbon fibers are presented in the form of carbon nanotubes. Such carbon fibers have a tube diameter in the nanometer range.
  • the carbon nanotubes are characterized by high electrical conductivity, high thermal conductivity and high elasticity and thus flexibility.
  • the object of the present invention is to provide a piezo actuator which has a connection element for making electrical contact with the electrode layers of the actuator body which is more reliable than the known prior art.
  • a piezoelectric component with at least one piezo element which has at least two electrode layers arranged one above the other and at least one piezoelectric layer arranged between the electrode layers, and with at least two electrical connection elements for electrically controlling the electrode layers of the piezo element, at least one of the connection elements being specified has carbon fibers.
  • the piezoelectric component is characterized in that the carbon fibers have carbon nanotubes.
  • the carbon nanotubes have a tube diameter that ranges from a few n up to 100 nm.
  • a tube length of the carbon nanotubes can be up to several mm.
  • the carbon nanotubes are available as single-walled nanotubes (SWNTs) or multi-walled nanotubes (multi-walled nanotubes, MWNTs).
  • the carbon nanotubes have an electrical conductivity that is comparable to that of metals. In addition, they are characterized by very high elasticity. As a result, a flexible electrical connection element with a high current carrying capacity is accessible with the help of the carbon nanotubes. Despite the deflection of the piezo element and the mechanical stress caused on the connection element, the Carbon nanotubes ensure reliable contacting of the electrode layers of the piezo element.
  • the carbon nanotubes can be isolated. It is also conceivable that the carbon nanotubes are connected to one another to form at least one fiber bundle.
  • the fiber bundle consists of several individual carbon nanotubes.
  • the carbon nanotubes are essentially aligned along a common preferred direction and connected to one another with the aid of a connecting means.
  • the connecting means is, for example, a wrapping or a covering of the carbon nanotubes.
  • the carbon nanotubes are connected to one another to form a fiber fabric.
  • the carbon nanotubes or fiber bundles from the carbon nanotubes are interwoven or interwoven.
  • the fiber fabric is a fleece made of carbon nanotubes.
  • the fiber fabric like the carbon nanotubes themselves, is characterized by a high elasticity or flexibility. Since the carbon nanotubes touch each other in the fiber fabric, electrical contact is ensured across the fiber fabric.
  • connection element has a composite material which, together with the carbon nanotubes, forms a composite material.
  • the composite material acts as a matrix in which the carbon nanotubes are embedded.
  • the composite material can also be embedded in the cavities of the carbon nanotubes. On In this way, the electrical and mechanical properties of the carbon nanotubes and thus the electrical and mechanical properties of the composite material can be influenced.
  • the carbon nanotubes are particularly suitable for use in one
  • Carbon nanotubes and composite material are affected.
  • the composite material can be an electrically conductive or an electrically non-conductive material.
  • the carbon nanotubes are embedded in a flexible, electrically conductive film made of a metal.
  • the composite material consists of the metal and the carbon nanotubes.
  • the metal forms a matrix for the carbon nanotubes.
  • the metal foil is a copper foil.
  • a copper foil Such a film can be produced from a fiber fabric made of carbon nanotubes by electrochemical deposition of copper on the carbon nanotubes.
  • carbon nanotubes or a fiber fabric from the carbon nanotubes can be placed on a plastic carrier film.
  • the metal is then deposited on the carbon nanotubes in a vapor deposition process, for example CVD (Chemical Vapor Deposition) or PVD (Physical Vapor Deposition).
  • the matrix is formed from the metal.
  • the composite material can also be a dielectric.
  • the dielectric is, for example, an electrically insulating plastic. This plastic forms a polymer matrix in which the carbon nanotubes are embedded.
  • the composite material consists of the plastic and the
  • Carbon nanotubes In order to ensure the electrical conductivity of the composite material, a correspondingly high degree of fullness of the carbon nanotubes in the plastic is necessary. The degree of fullness of the carbon nanotubes is chosen so high that a so-called percolation limit is reached or exceeded. The carbon nanotubes touch each other at the percolation limit. This ensures the electrical conductivity from carbon nanotubes to carbon nanotubes and thus across the entire composite.
  • the plastic can be any thermoplastic or thermosetting plastic.
  • the plastic is preferably an elastomeric plastic.
  • the elastomeric plastic for example a silicone elastomer, is characterized by high elasticity or flexibility.
  • the piezo element has, for example, a square or rectangular one
  • the side surface section can be located at a corner of the piezo element. This Surface section can also extend along an entire lateral extent of the piezo element. It is also conceivable that the surface section is formed by almost an entire side of the piezo element.
  • the electrical connection element is fastened to the surface section of the piezo element with an electrically conductive connecting means.
  • This electrically conductive connection means is, for example, a conductive adhesive.
  • the connection element is glued to the surface section using the conductive adhesive.
  • the conductive adhesive has an electrically conductive material.
  • the electrically conductive material is in the form of beads, for example. The size and density of the beads is selected so that electrical contacting with a necessary current carrying capacity is ensured.
  • the conductive adhesive is suitable for fastening a connection element with a fiber fabric made of the carbon nanotubes or with a composite material made of a plastic and the carbon nanotubes.
  • connection element with a composite material made of a metal and the carbon nanotubes, it is advisable to use a solder as the electrically conductive connecting means.
  • the connection element is soldered to the surface section of the actuator body.
  • the piezoelectric component is, for example, a piezoelectric bending transducer.
  • the bending transducer is, for example, a so-called bimorph bending transducer.
  • the bending transducer can be constructed from several piezo elements.
  • the piezoelectric layers can consist of piezoelectric plastic, for example polyvinylidene fluoride (PVDF), or piezoelectric ceramic, for example lead zirconate titanate (Pb (Ti, Zr) 0 3 , PZT).
  • the piezoelectric component is a multilayer actuator, in which a multiplicity of piezo elements are arranged to form a stack-shaped actuator body with a stacking direction.
  • the actuator body can consist of piezo elements glued together.
  • the piezoelectric layers of the piezo elements consist, for example, of a piezoelectric plastic.
  • the actuator body is preferably produced in a monolithic multilayer construction.
  • the piezoelectric layers consist of a piezoceramic.
  • the piezoceramic is, for example, a lead zirconate titanate.
  • An electrode material of the electrode layers is, for example, a silver-palladium alloy.
  • ceramic green foils are used with the
  • Piezoceramic and electrode layers made of the electrically conductive material are alternately stacked and sintered together. It is also conceivable to stack ceramic green foils printed with electrode material.
  • the piezo elements are arranged in relation to the stack-shaped actuator such that adjacent piezo elements have a common electrode layer, the electrode layers of the piezo elements in the stacking direction of the actuator body are alternately guided on at least two lateral surface sections of the actuator body that are electrically insulated from one another and at least one of the surface sections of the Actuator body is electrically conductively connected to an electrical connection element with carbon fibers.
  • polarity cracks can occur in such an actuator body.
  • the electrical control of the electrode layers leads to particularly large deflections at the polarity cracks.
  • the electrical connection element is subjected to high mechanical loads. It is therefore particularly advantageous to control the electrode layers of the actuator body with the electrical connection element with the flexible carbon nanotubes use.
  • the use of a fiber fabric made of the carbon nanotubes is particularly advantageous here. The fiber fabric contributes to increased flexibility of the connection element.
  • connection element with simultaneously efficient electrical contacting is achieved in that at least some of the carbon nanotubes of the connection element are oriented essentially transversely to the stacking direction of the actuator body.
  • the carbon nanotubes aligned transversely to the stacking direction are electrically contacted, for example, by a metal pin aligned parallel to the stacking direction and connected to the carbon nanotubes.
  • the carbon nanotubes are aligned in a plastic that has not yet or only partially crosslinked and has a correspondingly low viscosity. Alignment of the carbon nanotubes in the plastic that has not yet been crosslinked is done mechanically, for example, with the aid of a comb. After alignment, the plastic is cross-linked.
  • a matrix is formed from the plastic, in which the carbon nanotubes are aligned essentially parallel to one another along a common preferred direction. This essentially means that there is a distribution around the common preferred direction with regard to the alignment.
  • the surface section which is electrically conductively connected to the electrical connection element with the carbon nanotubes has a metallization applied to the actuator body.
  • the metallization that consists of several
  • Layers with different material can exist on the side of the actuator body at least over a height of applied to the electrode layers to be contacted.
  • the metallization ensures that the electrode layers guided on the surface section are connected in parallel.
  • the electrical connection element is attached to the metallization in an electrically conductive manner.
  • the metallization is in the form of a relatively narrow metallization strip.
  • the lateral surface section of the actuator body to be contacted can, however, also extend over almost the entire lateral surface of the actuator body.
  • the metallization is applied over a large area to the side of the actuator body. It makes sense to connect the electrical connection element electrically and mechanically to the metallization over a large area.
  • a fiber fabric made of the carbon nanotubes is glued onto the metallization over a large area.
  • a large-area electrical contact via the carbon nanotubes leads to another advantage: Due to the high thermal conductivity of the carbon nanotubes, the electrical connection element can also be used as a
  • Temperature control body act. By driving the electrode layers, the piezoelectric layer is deflected. The electrical energy fed in is partially lost in the form of heat (loss heat).
  • the piezo actuator with a monolithic actuator body used in an injection valve is controlled with a high repetition rate. Due to the resulting relatively high heat loss, the piezo actuator can heat up undesirably. However, the heat loss can be efficiently dissipated through the electrical connection element with the carbon nanotubes.
  • the connection element is thermal with any heat sink conductively connected. The likelihood of undesired heating of the piezoelectric component, for example heating above the Curie temperature of the piezoelectric material of the piezoelectric layer, is significantly reduced.
  • the electrical connection element with the carbon nanotubes is an electrical contact tab, which is connected to the surface section of the actuator body such that a region of the contact tab projecting from the actuator body remains.
  • a contact tab is, for example, electrically conductively connected to the electrode layers of the actuator body via one of its edges by means of the relatively narrow metallization path described above.
  • the contact tab can only consist of carbon nanotubes or a fiber fabric made of the carbon nanotubes.
  • a contact flag with a metal foil is also conceivable.
  • the metal foil is, for example, a copper foil.
  • a film thickness is advantageously 50 ⁇ m and less. For example, the film thickness is 25 ⁇ m.
  • the carbon nanotubes can be applied to this metal foil.
  • the metal foil can also consist of a composite material made of a metal and the carbon nanotubes.
  • the contact tab is preferably multilayered.
  • the contact tab consists of several layers. At least one of the layers is electrically conductive.
  • This electrically conductive layer is formed by the carbon nanotubes, a fiber fabric with the carbon nanotubes or a metal foil with the carbon nanotubes.
  • An electrically conductive layer with an electrically conductive composite material made of a plastic and the carbon nanotubes is also conceivable.
  • the electrically conductive Layer of the multilayer contact tab is applied to an electrically non-conductive layer, for example a layer made of an electrically insulating plastic.
  • the electrically insulating layer can function as a carrier layer for the electrically conductive layer.
  • the layer with the carbon nanotubes can also be embedded between two layers made of an electrically insulating plastic.
  • connection element for example a bonding wire
  • connection element in the form of a contact lug the protruding region of the contact lug is connected to a rigid electrical connection for the electrical contacting of the connection element.
  • the rigid electrical connection is, for example, a metal pin.
  • the piezo actuator is supplied with electrical voltage via the rigid electrical connection. Mechanical stresses can occur precisely between the rigid connection and the actuator body due to the deflection of the actuator body. The flexible carbon nanotubes ensure that these mechanical stresses in the electrical connection element are largely reduced.
  • the piezoelectric component in particular the piezoelectric component in the form of the piezo actuator with a monolithic actuator body, is used to actuate a valve, in particular an injection valve of an internal combustion engine.
  • the internal combustion engine is, for example, an engine of a passenger car.
  • the carbon nanotubes lead to a flexible, stretchable electrical connection element of a piezoelectric component.
  • the piezoelectric component is characterized by high reliability.
  • a piezo actuator with an actuator body in a monolithic multilayer construction for example, in the case of a piezo actuator with an actuator body in a monolithic multilayer construction
  • the electrical connection element is suitable for efficient cooling of the piezoelectric component.
  • Figure 1 shows a piezoelectric component in the form of a piezo actuator with an actuator body in monolithic
  • FIG. 2 shows a further piezoelectric component in the form of a piezo actuator with a further actuator body in a monolithic multilayer construction from the side.
  • FIG. 3 shows a piezo element of a piezoelectric component in a lateral cross section.
  • FIGS. 4A and 4B each show a green foil with piezoceramic printed with electrode material from above, which are used to produce the actuator bodies according to FIGS. 1 and 2.
  • FIGS. 5A to 5C show different embodiments of the connection element in the form of an electrical one
  • Figure 6 shows a section of a carbon nanotube from the side.
  • FIG. 7 shows a fiber fabric made of carbon nanotubes.
  • the piezoelectric component 1 is a piezo actuator with an actuator body 20 in a monolithic multilayer construction with a square base area (FIGS. 1 and 2).
  • a multiplicity of piezo elements 10 are stacked one above the other along the stacking direction 21 and firmly connected.
  • a piezo element 10 consists of a piezoelectric layer 13 made of a piezo ceramic (FIG. 3).
  • the piezoceramic is a lead zirconate titanate.
  • the piezoelectric layer 13 is located between an electrode layer 11 and a further electrode layer 12 of the piezo element 10.
  • the electrode material of the electrode layers 11 and 12 is a silver-palladium alloy.
  • the electrode layers 11 and 12 are arranged on the main surfaces of the piezoelectric layer 13 in such a way that the
  • Electrode layers 11 and 12 an electric field is generated in the piezoelectric layer 13, so that the piezoelectric layer 13 is deflected and thus the piezo element 10 is deflected.
  • the electrode layers 11 and 12 are guided on two surface sections 14 and 15 which are electrically insulated from one another. At these points, the two electrode layers 11 and 12 each have an electrical one (not shown in FIG. 3)
  • each piezo element 10 has a piezoelectrically active region 16 and at least two piezoelectrically inactive regions 17.
  • a relatively high, absolute stroke along the stacking direction 21 of the actuator body 20 can be achieved with a relatively low control voltage.
  • Adjacent piezo elements 10 each have a common electrode layer, so that in the actuator body 20
  • Electrode layers 22, 23 and piezoelectric layers 24 are arranged alternately one above the other.
  • green ceramic foils 50 which are printed with electrode material 51 (FIGS. 4A and 4B), are stacked one above the other and sintered together.
  • the actuator body 20 is produced in a monolithic multilayer construction.
  • the electrode layers 22 and 23 of the actuator body 20 are on two electrically insulated, lateral ones
  • the surface sections 25 and 26 guided. According to a first embodiment, the surface sections 25 and 26 are located at the corners of the actuator body 20 (FIG. 1). To produce such an actuator body 20, ceramic green foils with square base areas are used, each of which is free of electrode material 51 at one corner 52 (FIG. 4A). Extend according to a second embodiment the surface sections 25 and 26 over two sides of the actuator body 20 ( Figure 2). Ceramic green foils 50, which are free of electrode material 51 along one of their edges 53, are used to produce this actuator body 20.
  • a metallization 27 and 28 is attached to each of the two surface sections 25 and 26, so that the electrode layers 23 and 24 are alternately electrically contacted.
  • the metallization is applied over a large area on almost the entire sides of the actuator body 20, which form the surface sections 25 and 26 to be contacted ,
  • An electrical connection element 30 or 31 with carbon nanotubes 33 is electrically and mechanically contacted to the metallizations.
  • the average tube diameter 34 of the carbon nanotubes 33 is a few nm.
  • a tube length of the carbon nanotubes is a few mm.
  • the piezo actuator 1 has an actuator body 20 according to the first embodiment (FIG. 1).
  • the electrical connection element 30 and the further electrical connection element 31 are each an electrical contact lug 35. These contact lugs are arranged between rigid electrical connections in the form of metal pins 41 and 42 and the respective metallization 27 and 28. Each of the contact lugs 35 is connected via one of its edges to the corresponding metallization 27 and 28 in such a way that an area 36 protruding from the actuator body 20 is present.
  • Each of the contact tabs 35 consists of a fiber fabric 37 made of carbon nanotubes 33. The fiber fabric 37 is both on the metallization 27 or 28 applied to the respective surface section 25 or 26 and on the respective rigid metal pin 41 or 42 with the aid of a conductive adhesive 29 glued.
  • each of the contact lugs 35 of the electrical connection element 30 or 31 consists of a copper foil 351 (FIG. 5A) with a foil thickness of approximately 25 ⁇ m.
  • Carbon nanotubes 33 are arranged on this copper foil 351 in such a way that the carbon nanotubes 33 are aligned essentially transversely to the stacking direction 21 of the actuator body 20 after the contact tab 35 has been attached to the actuator body 20.
  • the copper foil 351 is electrically and mechanically conductively connected with the aid of solder 29 both to the respective surface section 25 or 26 and to the rigid metal pin 41 or 42.
  • Example 3 The contact tabs 35 of the connection elements 30 and 31 are each copper foils in which carbon nanotubes 33 are embedded.
  • the copper foil consists of a composite material made of copper and the carbon nanotubes. This composite material is produced on the basis of a fiber fabric 37 made of carbon nanotubes 33 by electrochemical deposition of copper.
  • connection elements 30 and 31 each have a multilayer contact tab 35.
  • Plastic film 352 On an electrically insulating layer that acts as a carrier layer Plastic film 352 has an electrically conductive layer 353 applied with carbon nanotubes 33 (FIG. 5B). In an alternative to this, the electrically conductive layer 353 is located between two plastic films 352 (FIG. 5C). These contact tabs 35 are glued to the metallization 27 and 28 with the aid of a conductive adhesive 29.
  • Example 5 The piezo actuator 1 has an actuator body 20 according to the second embodiment (FIG. 2).
  • the surface sections 25 and 26 to be contacted extend along two sides of the actuator body 20.
  • the connection elements 30 and 31 are attached to the large-area metallizations 27 and 28 of the surface sections 25 and 26.
  • Connection elements 30 and 31 each have a fiber fabric 37 made of carbon nanotubes 33.
  • the connection elements 30 and 31 are glued to the metallization 27 and 28 with the aid of a conductive adhesive 29.
  • each of the connection elements 30 and 31 consists of a composite material which is formed from a plastic and carbon nanotubes 33.
  • the plastic of the composite material is a silicone elastomer plastic.
  • the composite material is largely glued to the respective metallization with the aid of a conductive adhesive 29.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Fuel-Injection Apparatus (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention concerne un organe piézo-électrique (1) doté d'au moins un élément piézo-électrique (10) comportant au moins deux couches d'électrodes superposées (11, 12, 22, 23) et au moins une couche piézo-électrique (13, 24) placée entre les couches d'électrodes, ainsi que d'au moins deux éléments de raccordement électriques (30, 31) pour exciter électriquement les couches d'électrodes de l'élément piézo-électrique, un des éléments de raccordement étant doté de fibres de carbone. Ces fibres de carbone contiennent des nanotubes de carbone (33) caractérisés par une grande conductibilité électrique et par une grande élasticité, ce qui se traduit par un élément de raccordement flexible. L'organe piézo-électrique est notamment un actionneur piézo-électrique dont le corps (20) est de conception multicouche monolithique. L'élément de raccordement flexible permet de court-circuiter de manière fiable des ruptures de polarité du corps de l'actionneur. Des nombres de cycles supérieurs à 10<9 >sont ainsi possibles, d'où l'utilisation de cet actionneur piézo-électrique dans l'industrie automobile pour l'actionnement de la soupape d'injection d'un moteur.
PCT/EP2004/050767 2003-06-24 2004-05-12 Organe piezo-electrique a elements de raccordement electriques et utilisation de cet organe Ceased WO2004114424A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10328374.9 2003-06-24
DE10328374A DE10328374A1 (de) 2003-06-24 2003-06-24 Piezoelektrisches Bauteil mit elektrischen Anschlusselementen und Verwendung des Bauteils

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WO2004114424A1 true WO2004114424A1 (fr) 2004-12-29

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005124884A1 (fr) * 2004-06-15 2005-12-29 Robert Bosch Gmbh Actionneur piezoelectrique pourvu d'une electrode externe souple et plane servant a la mise en contact d'un contact de connexion
WO2007118878A1 (fr) * 2006-04-19 2007-10-25 Robert Bosch Gmbh Actionneur piézoélectrique doté d'électrodes internes à contact externe d'un élément piézoélectrique
WO2008015168A1 (fr) * 2006-08-03 2008-02-07 Basf Se Procédé pour appliquer une couche métallique sur un substrat
WO2008111728A1 (fr) * 2007-03-15 2008-09-18 Top Nanosys, Inc. Haut-parleur ultramince
US7981266B2 (en) * 2006-11-22 2011-07-19 Drägerwerk AG & Co. KGaA Electrochemical gas sensor containing electric connection lines or housing contact bridges comprising carbon nanotubes
DE102012000063A1 (de) 2012-01-03 2013-07-04 Festo Ag & Co. Kg Piezoelektrische Baugruppe und Verfahren zu ihrer Herstellung

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008039757A1 (de) * 2008-08-20 2010-02-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Aktorelement sowie seine Verwendung
DE102020113700B4 (de) 2020-05-20 2024-06-06 Deutsches Zentrum für Luft- und Raumfahrt e.V. Piezoelektrisches Funktionsnetzwerk

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19930585A1 (de) * 1998-08-06 2000-02-10 Siemens Matsushita Components Piezoaktor mit verbesserter elektrischer Kontaktierung und Verwendung eines derartigen Piezoaktors
US6376971B1 (en) * 1997-02-07 2002-04-23 Sri International Electroactive polymer electrodes

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10051784C1 (de) * 2000-10-19 2002-08-14 Deutsch Zentr Luft & Raumfahrt Elektromechanisches Funktionsmodul
US6682677B2 (en) * 2000-11-03 2004-01-27 Honeywell International Inc. Spinning, processing, and applications of carbon nanotube filaments, ribbons, and yarns

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6376971B1 (en) * 1997-02-07 2002-04-23 Sri International Electroactive polymer electrodes
DE19930585A1 (de) * 1998-08-06 2000-02-10 Siemens Matsushita Components Piezoaktor mit verbesserter elektrischer Kontaktierung und Verwendung eines derartigen Piezoaktors

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
BAUGHMAN R H ET AL: "Carbon Nanotubes - the Route Toward Appplications", SCIENCE, AMERICAN ASSOCIATION FOR THE ADVANCEMENT OF SCIENCE, USA, vol. 297, 2 August 2002 (2002-08-02), pages 787 - 792, XP002244531, ISSN: 0036-8075 *
NIU C ET AL: "HIGH POWER ELECTROCHEMICAL CAPACITORS BASED ON CARBON NANOTUBE ELECTRODES", APPLIED PHYSICS LETTERS, AMERICAN INSTITUTE OF PHYSICS, NEW YORK, USA, vol. 70, no. 11, 17 March 1997 (1997-03-17), pages 1480 - 1482, XP000689060, ISSN: 0003-6951 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005124884A1 (fr) * 2004-06-15 2005-12-29 Robert Bosch Gmbh Actionneur piezoelectrique pourvu d'une electrode externe souple et plane servant a la mise en contact d'un contact de connexion
WO2007118878A1 (fr) * 2006-04-19 2007-10-25 Robert Bosch Gmbh Actionneur piézoélectrique doté d'électrodes internes à contact externe d'un élément piézoélectrique
WO2008015168A1 (fr) * 2006-08-03 2008-02-07 Basf Se Procédé pour appliquer une couche métallique sur un substrat
US7981266B2 (en) * 2006-11-22 2011-07-19 Drägerwerk AG & Co. KGaA Electrochemical gas sensor containing electric connection lines or housing contact bridges comprising carbon nanotubes
WO2008111728A1 (fr) * 2007-03-15 2008-09-18 Top Nanosys, Inc. Haut-parleur ultramince
DE102012000063A1 (de) 2012-01-03 2013-07-04 Festo Ag & Co. Kg Piezoelektrische Baugruppe und Verfahren zu ihrer Herstellung

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