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WO2004030210A1 - Actionneur a nanotubes, notamment a nanotubes de carbone, couches de nanotubes de carbone, fabrication et utilisation associees - Google Patents

Actionneur a nanotubes, notamment a nanotubes de carbone, couches de nanotubes de carbone, fabrication et utilisation associees Download PDF

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Publication number
WO2004030210A1
WO2004030210A1 PCT/EP2003/010158 EP0310158W WO2004030210A1 WO 2004030210 A1 WO2004030210 A1 WO 2004030210A1 EP 0310158 W EP0310158 W EP 0310158W WO 2004030210 A1 WO2004030210 A1 WO 2004030210A1
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WO
WIPO (PCT)
Prior art keywords
nanotubes
actuator
layer
layers
electrolyte
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2003/010158
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German (de)
English (en)
Inventor
Ivica Kolaric
Uwe Vohrer
Jerome Fraysse
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority to AU2003277854A priority Critical patent/AU2003277854A1/en
Publication of WO2004030210A1 publication Critical patent/WO2004030210A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/008—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for characterised by the actuating element
    • F03G7/012—Electro-chemical actuators
    • F03G7/0121—Electroactive polymers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/025—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for characterised by its use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03G—SPRING, WEIGHT, INERTIA OR LIKE MOTORS; MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOT OTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISE PROVIDED FOR
    • F03G7/00—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for
    • F03G7/029—Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for characterised by the material or the manufacturing process, e.g. the assembly
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
    • H02N11/006—Motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2250/00—Geometry
    • F05B2250/80—Size or power range of the machines
    • F05B2250/84—Nanomachines

Definitions

  • the present invention relates to actuators based on nanotubes, in particular micromechanical actuators made of carbon nanotubes, layers made of nanotubes (bucky paper), their manufacture and use.
  • actuators or microactuators ie the smallest systems for converting electrical into mechanical energy (“artificial muscles”), which are based on new materials such as ceramic systems, piezoelectric polymers.
  • ren ren, electrostrictive polymers, polyelectrolytic polymers, conductive polymers and nanotubes.
  • Actuators generally comprise at least two electrodes and at least one layer which changes their expansion in at least one dimension due to the influence of electrical energy.
  • SWNT single-wall nanotubes
  • Single-wall nanotubes are perfect carbon tubes with a diameter of a few nanometers and a length in the micro to millimeter range. The changes in length and diameter of the nanotubes are based on the change in the length of the carbon-carbon bond as a function of the amount of charge injected as a result of quantum mechanical processes.
  • a change in length of approx. 1% can be achieved with nanotubes by applying a voltage.
  • Carbon nanotubes are characterized by excellent mechanical and thermal properties. In contrast to polymer actuators, which show no actuation even at temperatures of 70 ° C, they are stable up to 750 ° C or even up to 2,800 ° C in a vacuum. It is also assumed that they are biocompatible, which enables their use in medical technology. In addition, far greater forces can be generated with carbon nanotubes than is the case with the previously known polymer and piezo actuators. In principle, carbon nanotubes can also be operated with a very low supply voltage of 1 volt, whereas supply voltages of 70-300 V are required for polymer actuators and supply voltages of up to 1000 V are required for piezo actuators. Furthermore, the carbon nanotubes show no overshoot behavior.
  • bucky paper a suspension of nanotubes on a PTFE filter is subjected to vacuum filtration and then the dried nanotube paper (bucky paper) is removed from the filter.
  • Bucky papers with a statistical arrangement of the nanotubes are obtained by this method.
  • the previously known nanotube actuators have an insufficient actuation amplitude, i.e. too little change in the longitudinal and transverse axis of the nanotubes in the bucky paper and too little force. So far, developments in the field of bucky paper and nanotubes have essentially been limited to basic research.
  • the object of the present invention is to provide actuators with better actuation characteristics, in particular larger actuation sample situations and higher actuation speeds, and to specify methods of their production and use.
  • the invention therefore provides for the nanotubes to be arranged essentially at least partially in a preferred direction in the paper plane with respect to their longitudinal axis in relation to the preferred direction of the nanotubes in the be oriented essentially at an angle of less than 90 °, preferably less than 60 ° and particularly preferably 'less than 45 °, up to the parallel arrangement.
  • Carbon nanotubes in particular single-wall nanotubes made of carbon, are preferably used in the context of the present invention.
  • multi-wall carbon nanotubes or even nanotubes made of other elements or compounds such as boron nitride (BN), metal sulfides (MoS 2 , WS 2 ) or metal oxides (eg V 2 O 5 ) use.
  • BN boron nitride
  • MoS 2 , WS 2 metal sulfides
  • WS 2 metal oxides
  • all tube-shaped materials can be used that show mechanical deflection when electrical quantities, such as voltage or current, are applied.
  • bucky papers As far as the term “bucky papers” is used below, it includes not only layers made of carbon nanotubes, but also layers made of other nanotubes.
  • a further improvement in the actuation behavior of actuators made of carbon nanotubes can be achieved if the bucky paper is largely free of impurities such as fullerenes, graphite particles and catalyst additives, since these impurities contribute to poor actuation behavior.
  • the impurities can be removed by hydrothermal oxidative processes and subsequent treatment in acids.
  • the purity of the nanotube paper should be at least 60%, preferably at least 80%.
  • the alignment of the nanotubes in the bucky paper can take place during the manufacture of the bucky paper by aligning the nanotubes using physical or chemical methods.
  • the nanotubes can be aligned in a surfactant suspension by an electrical, magnetic and / or electromagnetic field and / or under the influence of ultrasound. Sedimentation carried out under these conditions or transfer to a suitable substrate, based on the Langmuir-Blodgett technique, enables a higher degree of alignment.
  • the alignment of the nanotubes can also be carried out by rotation methods, in which the nanotubes in a suspension are aligned by rotation essentially along their longitudinal axis and the aligned nanotube layer is then skimmed off or transferred to a carrier and dried.
  • the actuation amplitude and the actuation speed can be increased by suitable selection of the electrolytes.
  • Electrolytes with large anions are preferably used if the bucky papers are connected to the positive pole and electrolytes with large cations if the bucky papers are connected to the negative pole.
  • the type of electrolyte also has an influence on the actuation speed.
  • fast ioneri i.e. highly charged, smaller ions, the actuation speed can be increased.
  • the electrolytes from the group of the alkali and alkaline earth salts, but also aluminum salts or metal salts of the halides, nitrates, sulfates, phosphates, hydrogen phosphates, dihydrogen phosphates, halogenates and perhalates, hydroxides, acetates, oxalates or - to the extent that they are stable - theirs Acids selected such as LiCl, NaCI, KCI or the corresponding fluorides, NaNO 3 / Na 2 S0 4 , Na 3 P0 4 , NaCIO 3 , NaCIO 4 or the corresponding lithium or potassium salts or alkaline earth salts.
  • Electrolyte mixtures can also be used for optimization.
  • Gel-like, highly viscous electrolytes such as polyelectrolytes, ionomers or hydrogels swollen with electrolyte, can also be used to adjust the viscosity, for example.
  • the concentration of the electrolyte in the solvent is preferably between 0.1 and 5 mol / l, particularly preferably 0.2 to 2 mol / l.
  • the Na 2 SO 4 concentration in the aqueous solution is preferably between 0.5 and 2 mol / l, particularly preferably about 1 mol / l.
  • the phosphate concentration in the aqueous solution is preferably between 0.1 and 1 mol / l, particularly preferably about 0.5 mol / l.
  • the solubility can be varied if necessary by adjusting the pH.
  • the phosphates for example Na 2 HP0 4 , additionally have a higher viscosity in aqueous solution, so that sealing problems when using the in-case technology in multilayers are reduced at the point of the plunger. Particularly good results were achieved with an approximately 1 m aqueous Na 2 SO 4 as the electrolyte.
  • the chemical reactivity, in particular the corrosion, of Na 2 S0 4 as electrolyte is reduced compared to saline.
  • a preferred embodiment of an actuator provides for stacking several thin layers comprising nanotubes, preferably very thin layers of the bucky paper, into multilayers until the desired actuator thickness is reached.
  • Very thin layers of the bucky paper are layers of at least one monolayer, preferably several monolayers, preferably in the range between 100 nm and 100 ⁇ m. Thicknesses down to the millimeter range are also possible.
  • Multilayers are understood to mean at least two, preferably at least 5 and particularly preferably at least 10, nanotube layers stacked one above the other. In principle, there is no restriction regarding the maximum thickness of the actuator.
  • a preferably porous contacting layer can be provided between the bucky paper layers, also to allow the electrolyte to pass through quickly. Without a contacting layer, the efficiency of the multilayer stack is reduced since the bucky paper itself yields under load at first.
  • the rigid contact layer serves as a counter bearing for the actuation.
  • an advantage of contacting is faster actuation, since the entire surface of the bucky paper is contacted.
  • Areas of application for multilayers with a contacting layer are, for example: Fast and powerful actuators, such as B. Actuators.
  • the contacting layer can consist of an electrically conductive material.
  • electrically conductive materials are metals such as, in particular, noble metals such as silver, gold, platinum, copper, but also aluminum, electrically conductive polymers and others.
  • the materials can be rolled or glued onto the bucky paper as a film. It is also possible to sputter, evaporate, CVD or PVD the metal layer
  • the bucky paper can also be grown on a metal layer.
  • the thickness of the contacting layer is preferably between 1 Dm and 100 Dm, preferably about 5 to 10 Dm, in order to meet the requirements of both a thin and a rigid layer, which of course depends on the respective properties of the contact material.
  • the multilayer technique can be used both in the previously known and in the bucky paper according to the invention, the latter being preferred.
  • the actuation force can be multiplied by the number of individual layer layers of the bucky papers.
  • a preferred embodiment provides for contacting each individual contacting film in the multilayer at its end which extends beyond the individual bucky paper layers.
  • Another embodiment provides for the multilayer stack to be built up concentrically or according to the onion principle. This achieves great strength and rapid actuation, so that specific use of actuation through multilayer technology, e.g. B. radial, axial, linear.
  • Such an actuator in a multi-layer arrangement can be controlled without electrolyte by direct electrical contacting, it being preferred, but not absolutely necessary, to connect the bucky paper layer to the minus and the contacting layer to the positive pole.
  • An actuator based on the multilayer technology can also be used in an electrolyte, preferably the electrolyte according to the invention.
  • the contacting layers - like the bucky paper layers - are preferably porous.
  • the application of the actuator based on the multilayer technology is preferably based on the in-case (envelope) technology.
  • Bucky paper and the contacting layers are integrated in an electrolyte to form an actuator strand in a casing.
  • the individual bucky paper layers can be contacted using bonding technology.
  • the shell can preferably be changed in at least one dimension, in particular in a main direction of movement of the actuator.
  • the sheath can be designed, for example, as a sealing tube made of polymeric, electrolyte-resistant material, in particular as a polymer housing.
  • the liquid electrolyte should not have a viscosity that is not too low to prevent it from running out of the plug where the force is taken off. Leakage problems can thus be reduced by suitable selection of the electrolyte. Adequate tightness was achieved, for example, with saturated NaH 2 P0 4 .
  • actuators for short distances can be provided.
  • the conversion from electrical to mechanical energy can also be reversed, so that the actuators based on the multilayer technology can also be used, for example, as a load cell, that is to say that a force acting on the stack causes a change in voltage, which is measured and from which the force is generated is determined.
  • the bucky paper can be kept free of ions during the relaxation phase if an additional relaxation electrode is used. Both the force and the speed of the actuator can thus be positively influenced.
  • the actuation characteristic of the actuators also depends on the type of electrical actuation of the actuator.
  • the actuator is preferably controlled by changing the voltage. In principle, however, it is also possible to provide a current-controlled control.
  • the current-controlled control has the advantage that a greater force can be achieved.
  • the actuation amplitude can also be increased by an electrical polarity corresponding to the electrolyte. This can be achieved by a specific change in the electrical polarity on the software side or also by means of a flip-flop circuit.
  • Bucky paper with round geometries is preferably used.
  • Elongated or streaked Shaped geometries of the bucky paper are less suitable, but their use is possible in principle.
  • the actuator is provided in a protective housing, the protective housing absorbing shear forces and shear forces on the actuator being avoided.
  • protective housings can be made, for example, of stainless steel or high-performance polymers, such as PEEK.
  • the amplitude of the acuations and the maximum force are preferably additionally increased using special kinematics.
  • Lever geometries or special geometries and arrangements of the bucky paper in space, such as folding or spiral form, can be used to increase the path or force.
  • the actuation characteristic can be further improved by increasing the ion velocity by choosing a geometrically close arrangement of the electrodes and their insulation.
  • the electrolyte pools can be designed in the form of Venturi tubes. It is also possible to generate electric fields in a targeted manner, on the orbits of which the ions move particularly quickly.
  • the actuator according to the invention is considerably lighter than alloys. It also has a high temperature resistance, the raw material carbon is inexpensive. The dimensions are also small and the efficiency is high.
  • Areas of application of the actuator according to the invention include robotics, medical technology, micropositioning technology, the automotive industry, aerospace, precision engineering, production technology and measurement technology.
  • FIG. 3 shows a schematic illustration of a bucky paper multilayer
  • S4341b.doc 4 shows a schematic illustration of a bucky paper multilayer in in-case technology
  • FIG. 5 shows a schematic illustration of a bucky paper
  • SWNT single-wall nanotubes made of carbon, which are shown schematically in FIG. 1, are perfect carbon tubes with a diameter of a few nanometers and a length in the micrometer range. Manufacturing processes for these nanotubes are known in the prior art (e.g., Science 1340 (1999) with further references).
  • the nanotubes are not arranged statistically in the layer of the bucky paper, but instead have a preferred orientation in the layer averaged over the nanotube arrangements, as the schematic plan view of the bucky paper according to the invention in FIG. 2 shows.
  • the angle between the longitudinal axes of the nanotubes and the preferred direction is essentially less than 90 °, preferably less than 60 ° and particularly preferably less than 45 °, up to a particularly preferred arrangement in which the longitudinal axes are oriented essentially parallel to the preferred direction are.
  • the layer preferably comprises additives which, for example, increase the adhesion and / or flexibly embed the nanotubes.
  • the arrangement of the bucky paper in the form of multilayers according to the invention is shown in FIG. 3.
  • the bucky paper 11, which preferably each consist of a few monolayer-thick layer of the essentially aligned nanotubes shown in FIG. 2, are stacked to the desired actuator thickness d.
  • Contacting layers 12 made of electrically conductive materials are located between the individual bucky paper layers.
  • FIG. 4 The use of the actuators in multilayer technology with electrolyte in the in-case technology is shown in FIG. 4.
  • the multilayer of the bucky paper 11 and the contacting layers 12 already described in FIG. 3 is integrated together with the electrolyte 13 and the counter electrode 18 in a sleeve 14 made of a polymeric material.
  • FIG. 5 shows the additional use of a relaxation electrode 19 in the system described in FIG. 4.
  • the actuation force and the actuation speed can be increased by the relaxation electrode 19.
  • the greatest maximum forces are achieved in 1 m KCI and 1 m Na 2 S0 4 . Only about half of the maximum force with 1 m KCI is achieved with 1 m K 2 S0 4 . The maximum force drops significantly at low electrolyte concentrations.
  • the graph according to FIG. 8 shows the change in force / volume with positive connection (area 1), subsequent disconnection (area 2), subsequent negative connection (area 3) and final disconnection (area 4), each of the bucky paper layers. If the bucky paper layers are connected negatively, a far greater change in force is observed.
  • Fig. 9 shows the change in force as a function of time for multilayers with different contacts.
  • the graph shows that the best arrangement in the multilayer bucky paper / contacting layer / bucky paper / contacting
  • the multi-layer actuator 21 (instead of the multi-layer actuator, depending on the force required, a single-layer bucky paper can also be used) is located on both sides of the artificial lens 22 of an eye and is connected to the lens by clamping.
  • An electrical control device 23 changes the length of the bucky papers, which changes the lens - as shown in the right figure - compared to the state in the left figure and thus enables the light to be focused on the optic nerve.
  • IPMC and IPM are polymer actuators
  • shape memory alloys are shape memory metals
  • the Nanotube actuators are characterized by extreme temperature resistance and the lowest supply voltage of all previously known systems. The expansion of the nanotube is small compared to other systems. However, the comparatively small expansion of the nanotube system due to the lever laws causes a far greater force than that which is observed in systems with high expansion, such as polymers.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Nanotechnology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
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  • General Health & Medical Sciences (AREA)
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Abstract

L'invention concerne un actionneur électromécanique pourvu d'au moins une couche comportant des nanotubes qui, dans la couche et pour l'ensemble de leur agencement, présentent en moyenne une orientation préférentielle. Cette invention porte également sur des électrolytes pour actionneurs, sur des actionneurs en couches multiples, sur des dispositions géométriques des couches de nanotubes, sur des actionneurs comportant une commande améliorée, une cinématique spéciale, un désaccouplement de la force de cisaillement, des électrodes de relâchement et des moyens pour augmenter la vitesse des ions. Enfin, la présente invention concerne des procédés de fabrication et l'utilisation de ces actionneurs.
PCT/EP2003/010158 2002-09-23 2003-09-12 Actionneur a nanotubes, notamment a nanotubes de carbone, couches de nanotubes de carbone, fabrication et utilisation associees Ceased WO2004030210A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003277854A AU2003277854A1 (en) 2002-09-23 2003-09-12 Actuator comprising nanotubes, especially carbon nanotubes, layers of carbon nanotubes, and the production and use of the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10244312.2 2002-09-23
DE10244312A DE10244312A1 (de) 2002-09-23 2002-09-23 Aktuator mit Nanotubes, insbesondere Carbon-Nanotubes, Schichten aus Kohlenstoff-Nanotubes sowie ihre Herstellung und Anwendung

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WO2004030210A1 true WO2004030210A1 (fr) 2004-04-08

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DE (1) DE10244312A1 (fr)
WO (1) WO2004030210A1 (fr)

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EP1930588A3 (fr) * 2006-12-05 2011-11-16 Electronics and Telecommunications Research Institute Actuator à base d'une membrane à hétérojonction

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DE102004025603A1 (de) * 2004-05-25 2005-12-22 Forschungszentrum Karlsruhe Gmbh Aktor auf der Basis geometrisch anisotroper Nanopartikel
DE102005034323B4 (de) * 2005-07-22 2011-07-21 Deutsches Zentrum für Luft- und Raumfahrt e.V., 51147 Aktuator mit Nanotubes
DE102005038542A1 (de) 2005-08-16 2007-02-22 Forschungszentrum Karlsruhe Gmbh Künstliches Akkommodationssystem
DE102007008374B4 (de) 2007-02-21 2008-11-20 Forschungszentrum Karlsruhe Gmbh Implantierbares System zur Bestimmung des Akkommodationsbedarfes durch Messung der Augapfelorientierung unter Nutzung eines externen Magnetfelds
DE102007031114B4 (de) 2007-06-29 2013-10-10 Eberhard-Karls-Universität Tübingen Universitätsklinikum Hörimplantat mit multidirektional wirkendem Aktor
DE102008039757A1 (de) 2008-08-20 2010-02-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Aktorelement sowie seine Verwendung
DE102009059229A1 (de) 2009-12-18 2011-06-22 Karlsruher Institut für Technologie, 76131 Implantierbares System zur Bestimmung des Akkommodationsbedarfs
DE102010030034B4 (de) 2010-06-14 2016-02-18 Deutsches Zentrum für Luft- und Raumfahrt e.V. Aktuator mit Nanotubes
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DE10244312A1 (de) 2004-04-01

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