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WO2004093147A3 - Wafer carrier cleaning system - Google Patents

Wafer carrier cleaning system Download PDF

Info

Publication number
WO2004093147A3
WO2004093147A3 PCT/US2004/011159 US2004011159W WO2004093147A3 WO 2004093147 A3 WO2004093147 A3 WO 2004093147A3 US 2004011159 W US2004011159 W US 2004011159W WO 2004093147 A3 WO2004093147 A3 WO 2004093147A3
Authority
WO
WIPO (PCT)
Prior art keywords
carrier
door
robot
cleaning system
wafer carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2004/011159
Other languages
French (fr)
Other versions
WO2004093147A2 (en
WO2004093147B1 (en
Inventor
Yasukatsu Nishikata
Kenji Ishii
Kazufumi Otsuki
Katsuhiro Kurusu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Priority to EP04749998A priority Critical patent/EP1615735A2/en
Publication of WO2004093147A2 publication Critical patent/WO2004093147A2/en
Publication of WO2004093147A3 publication Critical patent/WO2004093147A3/en
Publication of WO2004093147B1 publication Critical patent/WO2004093147B1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H10P72/0414—
    • H10P72/3402—
    • H10P72/3404—
    • H10P72/3406—
    • H10P72/7602—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

Disclosed is a system and method for automating the handling of wafer carriers (1) for a washing procedure. The system according to one embodiment comprises disposing a robot (20) between a loading and unloading section (10) and the washing apparatus (6). The robot (1) includes a hand (21) that may comprise a first engaging component (23) and a second engaging component (30) for operably engaging the carrier door. In one embodiment, the robot removes the carrier door from the carrier body and grasps the body while maintaining possession of the door. The carrier door and carrier body are then placed in respective positions within the washing apparatus. This procedure is reversed for retrieval of the clean wafer container components.
PCT/US2004/011159 2003-04-10 2004-04-12 Wafer carrier cleaning system Ceased WO2004093147A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP04749998A EP1615735A2 (en) 2003-04-10 2004-04-12 Wafer carrier cleaning system

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US46242803P 2003-04-10 2003-04-10
US60/462,428 2003-04-10
US82064604A 2004-04-08 2004-04-08
US10/820,646 2004-04-08

Publications (3)

Publication Number Publication Date
WO2004093147A2 WO2004093147A2 (en) 2004-10-28
WO2004093147A3 true WO2004093147A3 (en) 2005-01-27
WO2004093147B1 WO2004093147B1 (en) 2005-03-17

Family

ID=33303086

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2004/011159 Ceased WO2004093147A2 (en) 2003-04-10 2004-04-12 Wafer carrier cleaning system

Country Status (2)

Country Link
EP (1) EP1615735A2 (en)
WO (1) WO2004093147A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7520286B2 (en) * 2005-12-05 2009-04-21 Semitool, Inc. Apparatus and method for cleaning and drying a container for semiconductor workpieces
JP5730297B2 (en) * 2009-06-17 2015-06-10 ダイナミック マイクロシステムズ セミコンダクター イクイップメント ゲーエムベーハー Integrated cleaner and dryer system
CN105702601B (en) 2011-06-23 2020-02-07 布鲁克斯Ccs有限公司 Cleaning system and method
US10714364B2 (en) * 2017-08-31 2020-07-14 Taiwan Semiconductor Manufacturing Co., Ltd. Apparatus and method for inspecting wafer carriers
CN110369400A (en) * 2018-04-12 2019-10-25 津伦（天津）精密机械股份有限公司 A kind of Full-automatic plasma cleaning equipment
US11813649B2 (en) * 2020-05-29 2023-11-14 Taiwan Semiconductor Manufacturing Company Limited Semiconductor arrangement and method for making
TWI762273B (en) 2021-04-16 2022-04-21 科嶠工業股份有限公司 Material transfer box cleaning method and equipment
CN114194776B (en) * 2021-12-15 2023-04-21 上海世禹精密设备股份有限公司 Apparatus for transferring wafer carrier cassettes

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4627785A (en) * 1984-05-14 1986-12-09 Monforte Robotics, Inc. Exchangeable multi-function end effector tools
WO1999033726A1 (en) * 1997-12-24 1999-07-08 Asyst Technologies, Inc. Smif pod door and port door removal and return system
US20010020480A1 (en) * 1998-03-23 2001-09-13 Kabushiki Kaisha Toshiba Pod and method of cleaning it
US6412502B1 (en) * 1999-07-28 2002-07-02 Semitool, Inc. Wafer container cleaning system

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4627785A (en) * 1984-05-14 1986-12-09 Monforte Robotics, Inc. Exchangeable multi-function end effector tools
WO1999033726A1 (en) * 1997-12-24 1999-07-08 Asyst Technologies, Inc. Smif pod door and port door removal and return system
US6704998B1 (en) * 1997-12-24 2004-03-16 Asyst Technologies, Inc. Port door removal and wafer handling robotic system
US20010020480A1 (en) * 1998-03-23 2001-09-13 Kabushiki Kaisha Toshiba Pod and method of cleaning it
US6412502B1 (en) * 1999-07-28 2002-07-02 Semitool, Inc. Wafer container cleaning system

Also Published As

Publication number Publication date
EP1615735A2 (en) 2006-01-18
WO2004093147A2 (en) 2004-10-28
WO2004093147B1 (en) 2005-03-17

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