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WO2003033399A1 - Drive device - Google Patents

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Info

Publication number
WO2003033399A1
WO2003033399A1 PCT/JP2002/010575 JP0210575W WO03033399A1 WO 2003033399 A1 WO2003033399 A1 WO 2003033399A1 JP 0210575 W JP0210575 W JP 0210575W WO 03033399 A1 WO03033399 A1 WO 03033399A1
Authority
WO
WIPO (PCT)
Prior art keywords
flow passage
working fluid
pressure
damping chamber
inner pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/010575
Other languages
English (en)
French (fr)
Inventor
Yukihisa Takeuchi
Nobuo Takahashi
Yuki Bessho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP2003536148A priority Critical patent/JP4322117B2/ja
Publication of WO2003033399A1 publication Critical patent/WO2003033399A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B7/00—Systems in which the movement produced is definitely related to the output of a volumetric pump; Telemotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0092—Inkjet printers

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)
PCT/JP2002/010575 2001-10-15 2002-10-11 Drive device Ceased WO2003033399A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003536148A JP4322117B2 (ja) 2001-10-15 2002-10-11 駆動デバイス

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001-317277 2001-10-15
JP2001317277 2001-10-15
JP2002268205 2002-09-13
JP2002-268205 2002-09-13

Publications (1)

Publication Number Publication Date
WO2003033399A1 true WO2003033399A1 (en) 2003-04-24

Family

ID=26623906

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/010575 Ceased WO2003033399A1 (en) 2001-10-15 2002-10-11 Drive device

Country Status (2)

Country Link
JP (1) JP4322117B2 (ja)
WO (1) WO2003033399A1 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005005043A1 (ja) * 2003-07-11 2007-09-20 日本碍子株式会社 マイクロリアクター
CN103003571A (zh) * 2010-10-06 2013-03-27 学校法人庆应义塾 泵装置以及使用该泵装置的内窥镜装置
WO2023105565A1 (ja) * 2021-12-06 2023-06-15 日本電信電話株式会社 マイクロダイアフラムポンプ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5431821B2 (ja) * 2009-07-30 2014-03-05 株式会社ジェイテクト 液体供給ポンプ、転動装置用潤滑油供給ポンプ、及びこれを用いた転動装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05346105A (ja) * 1992-06-11 1993-12-27 Aisin Seiki Co Ltd マイクロアクチュエータ
JP2609998B2 (ja) * 1994-06-14 1997-05-14 三菱電線工業株式会社 光アクチュエータ装置
JP2000087862A (ja) * 1998-09-11 2000-03-28 Citizen Watch Co Ltd マイクロポンプ及びその製造方法
JP2000320504A (ja) * 1999-05-11 2000-11-24 Ckd Corp 流体圧シリンダ及びそのエンドカバー
JP2606641Y2 (ja) * 1993-03-12 2000-12-18 エヌオーケー株式会社 流体圧シリンダ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05346105A (ja) * 1992-06-11 1993-12-27 Aisin Seiki Co Ltd マイクロアクチュエータ
JP2606641Y2 (ja) * 1993-03-12 2000-12-18 エヌオーケー株式会社 流体圧シリンダ
JP2609998B2 (ja) * 1994-06-14 1997-05-14 三菱電線工業株式会社 光アクチュエータ装置
JP2000087862A (ja) * 1998-09-11 2000-03-28 Citizen Watch Co Ltd マイクロポンプ及びその製造方法
JP2000320504A (ja) * 1999-05-11 2000-11-24 Ckd Corp 流体圧シリンダ及びそのエンドカバー

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005005043A1 (ja) * 2003-07-11 2007-09-20 日本碍子株式会社 マイクロリアクター
EP1645329A4 (en) * 2003-07-11 2010-05-19 Ngk Insulators Ltd MICRO REACTOR
CN103003571A (zh) * 2010-10-06 2013-03-27 学校法人庆应义塾 泵装置以及使用该泵装置的内窥镜装置
WO2023105565A1 (ja) * 2021-12-06 2023-06-15 日本電信電話株式会社 マイクロダイアフラムポンプ
JPWO2023105565A1 (ja) * 2021-12-06 2023-06-15

Also Published As

Publication number Publication date
JP4322117B2 (ja) 2009-08-26
JPWO2003033399A1 (ja) 2005-02-03

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