[go: up one dir, main page]

WO2003033399A1 - Drive device - Google Patents

Drive device Download PDF

Info

Publication number
WO2003033399A1
WO2003033399A1 PCT/JP2002/010575 JP0210575W WO03033399A1 WO 2003033399 A1 WO2003033399 A1 WO 2003033399A1 JP 0210575 W JP0210575 W JP 0210575W WO 03033399 A1 WO03033399 A1 WO 03033399A1
Authority
WO
WIPO (PCT)
Prior art keywords
flow passage
working fluid
pressure
damping chamber
inner pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/010575
Other languages
French (fr)
Japanese (ja)
Inventor
Yukihisa Takeuchi
Nobuo Takahashi
Yuki Bessho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Priority to JP2003536148A priority Critical patent/JP4322117B2/en
Publication of WO2003033399A1 publication Critical patent/WO2003033399A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B7/00—Systems in which the movement produced is definitely related to the output of a volumetric pump; Telemotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0055—Operating means specially adapted for microvalves actuated by fluids
    • F16K99/0057—Operating means specially adapted for microvalves actuated by fluids the fluid being the circulating fluid itself, e.g. check valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0084—Chemistry or biology, e.g. "lab-on-a-chip" technology
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0082—Microvalves adapted for a particular use
    • F16K2099/0092—Inkjet printers

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Details Of Reciprocating Pumps (AREA)

Abstract

A drive device (10), comprising ceramic pumps (18a) and (18b), wherein working fluid (100) in a flow passage (13a) is alternately pressurized and depressurized by the ceramic pumps on the left and right sides of a movable body (110) to move the movable body (110) in the flow passage (13a), the flow passage (13a) is allowed to communicate with an inner pressure damping chamber (15a) having compressible gas stored therein through fine flow passages (16a1) and (16b1), since the fine flow passages provides a large flow passage resistance when the pressure of the working fluid (100) is rapidly increased or decreased by the ceramic pumps, the pressure inside the flow passage is not released to the inner pressure damping chamber (15a) and, therefore, the mobile body (110) surely moves in the flow passage, whereas, since the fine flow passages provide a small flow passage resistance against the gentle rise of pressure of the working fluid (100) due to expansion, the working fluid (100) is led into the inner pressure damping chamber (15a) to suppress the rise of pressure of the working fluid (100), whereby, even when the working fluid is thermally expanded, a pump chamber or a seal is not damaged.
PCT/JP2002/010575 2001-10-15 2002-10-11 Drive device Ceased WO2003033399A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2003536148A JP4322117B2 (en) 2001-10-15 2002-10-11 Drive device

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2001-317277 2001-10-15
JP2001317277 2001-10-15
JP2002268205 2002-09-13
JP2002-268205 2002-09-13

Publications (1)

Publication Number Publication Date
WO2003033399A1 true WO2003033399A1 (en) 2003-04-24

Family

ID=26623906

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/010575 Ceased WO2003033399A1 (en) 2001-10-15 2002-10-11 Drive device

Country Status (2)

Country Link
JP (1) JP4322117B2 (en)
WO (1) WO2003033399A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005005043A1 (en) * 2003-07-11 2007-09-20 日本碍子株式会社 Microreactor
CN103003571A (en) * 2010-10-06 2013-03-27 学校法人庆应义塾 Pump device and endoscope device using the pump device
WO2023105565A1 (en) * 2021-12-06 2023-06-15 日本電信電話株式会社 Micro diaphragm pump

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5431821B2 (en) * 2009-07-30 2014-03-05 株式会社ジェイテクト Liquid supply pump, lubricating oil supply pump for rolling device, and rolling device using the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05346105A (en) * 1992-06-11 1993-12-27 Aisin Seiki Co Ltd Micro actuator
JP2609998B2 (en) * 1994-06-14 1997-05-14 三菱電線工業株式会社 Optical actuator device
JP2000087862A (en) * 1998-09-11 2000-03-28 Citizen Watch Co Ltd Micropump and its manufacture
JP2000320504A (en) * 1999-05-11 2000-11-24 Ckd Corp Fluid pressure cylinder and its end cover
JP2606641Y2 (en) * 1993-03-12 2000-12-18 エヌオーケー株式会社 Fluid pressure cylinder

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05346105A (en) * 1992-06-11 1993-12-27 Aisin Seiki Co Ltd Micro actuator
JP2606641Y2 (en) * 1993-03-12 2000-12-18 エヌオーケー株式会社 Fluid pressure cylinder
JP2609998B2 (en) * 1994-06-14 1997-05-14 三菱電線工業株式会社 Optical actuator device
JP2000087862A (en) * 1998-09-11 2000-03-28 Citizen Watch Co Ltd Micropump and its manufacture
JP2000320504A (en) * 1999-05-11 2000-11-24 Ckd Corp Fluid pressure cylinder and its end cover

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005005043A1 (en) * 2003-07-11 2007-09-20 日本碍子株式会社 Microreactor
EP1645329A4 (en) * 2003-07-11 2010-05-19 Ngk Insulators Ltd Microreactor
CN103003571A (en) * 2010-10-06 2013-03-27 学校法人庆应义塾 Pump device and endoscope device using the pump device
WO2023105565A1 (en) * 2021-12-06 2023-06-15 日本電信電話株式会社 Micro diaphragm pump
JPWO2023105565A1 (en) * 2021-12-06 2023-06-15

Also Published As

Publication number Publication date
JP4322117B2 (en) 2009-08-26
JPWO2003033399A1 (en) 2005-02-03

Similar Documents

Publication Publication Date Title
WO2002016766A3 (en) Reciprocating motor with unidirectional fluid flow
WO2002057632A3 (en) High pressure water pump
EP1760312A3 (en) High pressure pump
CA2473904A1 (en) Needle free medical connector with expanded valve mechanism and method of fluid flow control
EP1101975A3 (en) Pressure relief valve and dual path vent disc for hydraulic tensioner.
PT1501586E (en) Needle-free medical connector with expandable valve mechanism and method
CA2529429A1 (en) Fluid handling device and method of making same
WO2002004046A3 (en) Infusion pump cassette
CA2353022A1 (en) Fluid pumping system for particulate material
JP5117406B2 (en) Fluidic device with lubrication pump
DE50002656D1 (en) HYDROPNEUMATIC PRESSURE STORAGE
WO2002084118A1 (en) Micro pump
EP0999344A3 (en) A remotely controllable apparatus for use in a subterranean well
TW200519304A (en) Adjustable-length compression spring
ATE248994T1 (en) VEHICLE BRAKE SYSTEM WITH A GAS PRESSURE STORAGE
WO2002034491A3 (en) Valve for injection molding
TW200606337A (en) Pump apparatus
CA2481757A1 (en) Well tool protection system and method
DE69937501D1 (en) COMPACT, RESISTOR-CONTROLLED MULTI-OUTPUT HYDRAULIC UNIT AND SEALING VALVE
WO2003033399A1 (en) Drive device
CA2454232A1 (en) Pulsation damping assembly and method
WO2005010363A3 (en) Pump valve with controlled stroke
WO2001087495A8 (en) Pump provided with a decompression device
ATE411477T1 (en) LINEAR DRIVE DEVICE
WO2006044387A3 (en) Fluid pump

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BY BZ CA CH CN CO CR CU CZ DE DM DZ EC EE ES FI GB GD GE GH HR HU ID IL IN IS JP KE KG KP KR LC LK LR LS LT LU LV MA MD MG MN MW MX MZ NO NZ OM PH PL PT RU SD SE SG SI SK SL TJ TM TN TR TZ UA UG UZ VN YU ZA ZM

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): GH GM KE LS MW MZ SD SL SZ UG ZM ZW AM AZ BY KG KZ RU TJ TM AT BE BG CH CY CZ DK EE ES FI FR GB GR IE IT LU MC PT SE SK TR BF BJ CF CG CI GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 2003536148

Country of ref document: JP

122 Ep: pct application non-entry in european phase