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WO2003077383A1 - Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device - Google Patents

Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device Download PDF

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Publication number
WO2003077383A1
WO2003077383A1 PCT/JP2003/002905 JP0302905W WO03077383A1 WO 2003077383 A1 WO2003077383 A1 WO 2003077383A1 JP 0302905 W JP0302905 W JP 0302905W WO 03077383 A1 WO03077383 A1 WO 03077383A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
light source
amplifying
source device
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2003/002905
Other languages
English (en)
French (fr)
Inventor
Masaaki Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002077744A external-priority patent/JP2003283012A/ja
Priority claimed from JP2002138861A external-priority patent/JP2003332653A/ja
Priority claimed from JP2002142247A external-priority patent/JP2003332654A/ja
Priority claimed from JP2003053891A external-priority patent/JP2003338646A/ja
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to AU2003221350A priority Critical patent/AU2003221350A1/en
Publication of WO2003077383A1 publication Critical patent/WO2003077383A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/1215—Splitter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12183—Ion-exchange
    • G02B2006/12185—Ion-exchange field-assisted ion-exchange

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Optical Integrated Circuits (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lasers (AREA)
PCT/JP2003/002905 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device Ceased WO2003077383A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003221350A AU2003221350A1 (en) 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2002069050 2002-03-13
JP2002-069050 2002-03-13
JP2002077744A JP2003283012A (ja) 2002-03-20 2002-03-20 光増幅装置およびその製造方法、光増幅装置を用いた光源装置、光源装置を用いた光治療装置、並びに光源装置を用いた露光装置
JP2002-077744 2002-03-20
JP2002138861A JP2003332653A (ja) 2002-05-14 2002-05-14 光増幅装置、光増幅装置を用いた光源装置、光源装置を用いた光治療装置および光源装置を用いた露光装置
JP2002-138861 2002-05-14
JP2002-142247 2002-05-17
JP2002142247A JP2003332654A (ja) 2002-05-17 2002-05-17 光増幅装置、光増幅装置を用いた光源装置、光源装置を用いた光治療装置および光源装置を用いた露光装置
JP2003053891A JP2003338646A (ja) 2002-03-13 2003-02-28 光増幅装置およびその製造方法、光増幅装置を用いた光源装置、光源装置を用いた光治療装置、並びに光源装置を用いた露光装置
JP2003-053891 2003-02-28

Publications (1)

Publication Number Publication Date
WO2003077383A1 true WO2003077383A1 (en) 2003-09-18

Family

ID=27808862

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/002905 Ceased WO2003077383A1 (en) 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device

Country Status (3)

Country Link
AU (1) AU2003221350A1 (ja)
TW (1) TW200403463A (ja)
WO (1) WO2003077383A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011013480A1 (ja) * 2009-07-30 2011-02-03 古河電気工業株式会社 集積型半導体レーザ素子および半導体レーザモジュールならびに光伝送システム
CN109597162A (zh) * 2018-12-27 2019-04-09 华为技术有限公司 平面光波导、plc芯片、光束整形结构及wss
CN111025471A (zh) * 2019-12-30 2020-04-17 浙江大学绍兴微电子研究中心 一种电压分段式的玻璃基掩埋式光波导连续生产方法
CN111175891A (zh) * 2019-12-30 2020-05-19 浙江大学 一种连续式电场辅助离子迁移制作光波导的方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9726820B2 (en) * 2014-08-14 2017-08-08 Raytheon Company End pumped PWG with tapered core thickness
CN107783360A (zh) * 2016-08-25 2018-03-09 深圳市光峰光电技术有限公司 光源装置及显示系统

Citations (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329986A (ja) * 1986-07-23 1988-02-08 Hoya Corp 光導波形レ−ザ−
JPH01109789A (ja) * 1987-10-22 1989-04-26 Mitsubishi Electric Corp 光増幅器
JPH02221937A (ja) * 1989-02-22 1990-09-04 Hitachi Cable Ltd 双方向伝送用ガラス導波路増幅器
JPH02222182A (ja) * 1989-02-22 1990-09-04 Hitachi Cable Ltd 希土類元素添加長尺ガラス導波路およびその製造方法
JPH0335203A (ja) * 1989-06-30 1991-02-15 Hitachi Cable Ltd 希土類元素添加ガラス導波路の製造方法
EP0426221A1 (en) * 1989-10-30 1991-05-08 PIRELLI CAVI S.p.A. Low-noise optical amplification unit with reflection of the pumping power
JPH0351422U (ja) * 1989-09-26 1991-05-20
JPH03135081A (ja) * 1989-10-20 1991-06-10 Nec Corp 光増幅器
EP0433859A1 (de) * 1989-12-18 1991-06-26 Forschungszentrum Jülich Gmbh Optisches Bauelement und Verfahren zu dessen Herstellung
JPH03252628A (ja) * 1990-03-02 1991-11-11 Fujitsu Ltd 光分岐装置
JPH04144177A (ja) * 1990-10-05 1992-05-18 Nippon Telegr & Teleph Corp <Ntt> 光ファイバ増幅器
JPH04199032A (ja) * 1990-11-29 1992-07-20 Furukawa Electric Co Ltd:The 光増幅機能を有する光カプラ
US5134672A (en) * 1989-04-19 1992-07-28 Hitachi Cable, Ltd. Optical waveguide type star coupler
JPH0553026A (ja) * 1991-08-26 1993-03-05 Nippon Telegr & Teleph Corp <Ntt> 光回路の製造方法
JPH0563257A (ja) * 1991-08-30 1993-03-12 Hitachi Cable Ltd 単一モード伝送用機能性ガラス導波路
JPH0567845A (ja) * 1991-03-15 1993-03-19 Tokyo Inst Of Technol 光増幅器
JPH05136491A (ja) * 1991-11-11 1993-06-01 Nippon Telegr & Teleph Corp <Ntt> 光回路の製造方法
US5260822A (en) * 1992-01-31 1993-11-09 Massachusetts Institute Of Technology Tapered semiconductor laser gain structure with cavity spoiling grooves
JPH05299733A (ja) * 1992-04-16 1993-11-12 Hitachi Cable Ltd 希土類元素添加マルチコアファイバ及びそれを用いた光増幅器
JPH06194533A (ja) * 1992-12-25 1994-07-15 Nippon Sheet Glass Co Ltd 光増幅用導波路素子
US5473722A (en) * 1991-02-01 1995-12-05 Pirelli Cavi S.P.A. Rare-earth-doped lithium niobate waveguide structures
JPH08242030A (ja) * 1995-03-02 1996-09-17 Matsushita Electric Ind Co Ltd 光集積回路素子およびその製造方法
EP0734105A2 (en) * 1995-03-20 1996-09-25 Fujitsu Limited Optical fiber amplifier and dispersion compensating fiber module for optical fiber amplifier
WO1996041404A1 (en) * 1995-06-07 1996-12-19 Mcdonnell Douglas Corporation Fiber optic laser system and associated lasing method
JPH10341061A (ja) * 1997-06-09 1998-12-22 Fuji Photo Film Co Ltd 半導体光増幅素子
US5974216A (en) * 1997-02-13 1999-10-26 Nec Corporation Optical waveguide electrically controlled variable attenuator
EP1063742A1 (en) * 1998-03-11 2000-12-27 Nikon Corporation Ultraviolet laser apparatus and exposure apparatus comprising the ultraviolet laser apparatus
WO2001020397A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Laser device and exposure method
WO2001020398A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Exposure device with laser device
JP2001133649A (ja) * 1999-11-05 2001-05-18 Fdk Corp 光導波路グレーティングの製造方法
EP1113540A1 (en) * 1996-01-19 2001-07-04 SDL, Inc. Optical amplifiers providing high peak powers with high energy levels
JP2001221926A (ja) * 1999-11-30 2001-08-17 Fdk Corp 光導波路素子の製造方法
WO2001078632A1 (en) * 2000-04-13 2001-10-25 Nikon Corporation Laser therapy apparatus
JP2001337356A (ja) * 2000-05-29 2001-12-07 Nikon Corp 光源装置

Patent Citations (34)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6329986A (ja) * 1986-07-23 1988-02-08 Hoya Corp 光導波形レ−ザ−
JPH01109789A (ja) * 1987-10-22 1989-04-26 Mitsubishi Electric Corp 光増幅器
JPH02221937A (ja) * 1989-02-22 1990-09-04 Hitachi Cable Ltd 双方向伝送用ガラス導波路増幅器
JPH02222182A (ja) * 1989-02-22 1990-09-04 Hitachi Cable Ltd 希土類元素添加長尺ガラス導波路およびその製造方法
US5134672A (en) * 1989-04-19 1992-07-28 Hitachi Cable, Ltd. Optical waveguide type star coupler
JPH0335203A (ja) * 1989-06-30 1991-02-15 Hitachi Cable Ltd 希土類元素添加ガラス導波路の製造方法
JPH0351422U (ja) * 1989-09-26 1991-05-20
JPH03135081A (ja) * 1989-10-20 1991-06-10 Nec Corp 光増幅器
EP0426221A1 (en) * 1989-10-30 1991-05-08 PIRELLI CAVI S.p.A. Low-noise optical amplification unit with reflection of the pumping power
EP0433859A1 (de) * 1989-12-18 1991-06-26 Forschungszentrum Jülich Gmbh Optisches Bauelement und Verfahren zu dessen Herstellung
JPH03252628A (ja) * 1990-03-02 1991-11-11 Fujitsu Ltd 光分岐装置
JPH04144177A (ja) * 1990-10-05 1992-05-18 Nippon Telegr & Teleph Corp <Ntt> 光ファイバ増幅器
JPH04199032A (ja) * 1990-11-29 1992-07-20 Furukawa Electric Co Ltd:The 光増幅機能を有する光カプラ
US5473722A (en) * 1991-02-01 1995-12-05 Pirelli Cavi S.P.A. Rare-earth-doped lithium niobate waveguide structures
JPH0567845A (ja) * 1991-03-15 1993-03-19 Tokyo Inst Of Technol 光増幅器
JPH0553026A (ja) * 1991-08-26 1993-03-05 Nippon Telegr & Teleph Corp <Ntt> 光回路の製造方法
JPH0563257A (ja) * 1991-08-30 1993-03-12 Hitachi Cable Ltd 単一モード伝送用機能性ガラス導波路
JPH05136491A (ja) * 1991-11-11 1993-06-01 Nippon Telegr & Teleph Corp <Ntt> 光回路の製造方法
US5260822A (en) * 1992-01-31 1993-11-09 Massachusetts Institute Of Technology Tapered semiconductor laser gain structure with cavity spoiling grooves
JPH05299733A (ja) * 1992-04-16 1993-11-12 Hitachi Cable Ltd 希土類元素添加マルチコアファイバ及びそれを用いた光増幅器
JPH06194533A (ja) * 1992-12-25 1994-07-15 Nippon Sheet Glass Co Ltd 光増幅用導波路素子
JPH08242030A (ja) * 1995-03-02 1996-09-17 Matsushita Electric Ind Co Ltd 光集積回路素子およびその製造方法
EP0734105A2 (en) * 1995-03-20 1996-09-25 Fujitsu Limited Optical fiber amplifier and dispersion compensating fiber module for optical fiber amplifier
WO1996041404A1 (en) * 1995-06-07 1996-12-19 Mcdonnell Douglas Corporation Fiber optic laser system and associated lasing method
EP1113540A1 (en) * 1996-01-19 2001-07-04 SDL, Inc. Optical amplifiers providing high peak powers with high energy levels
US5974216A (en) * 1997-02-13 1999-10-26 Nec Corporation Optical waveguide electrically controlled variable attenuator
JPH10341061A (ja) * 1997-06-09 1998-12-22 Fuji Photo Film Co Ltd 半導体光増幅素子
EP1063742A1 (en) * 1998-03-11 2000-12-27 Nikon Corporation Ultraviolet laser apparatus and exposure apparatus comprising the ultraviolet laser apparatus
WO2001020397A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Laser device and exposure method
WO2001020398A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Exposure device with laser device
JP2001133649A (ja) * 1999-11-05 2001-05-18 Fdk Corp 光導波路グレーティングの製造方法
JP2001221926A (ja) * 1999-11-30 2001-08-17 Fdk Corp 光導波路素子の製造方法
WO2001078632A1 (en) * 2000-04-13 2001-10-25 Nikon Corporation Laser therapy apparatus
JP2001337356A (ja) * 2000-05-29 2001-12-07 Nikon Corp 光源装置

Non-Patent Citations (11)

* Cited by examiner, † Cited by third party
Title
BAUMANN I. ET AL.: "Er-doped integrated optical devices in LiNb 03", TOPICS IN QUANTUM ELECTRONICS, vol. 2, no. 2, 1996, pages 355 - 366, XP000685246 *
BJARKLEV A. ET AL.: "New tapered active fibres for very low noise amplifier applications", ELECTRONICS LETTERS, vol. 28, no. 1, 1992, pages 34 - 36, XP002969500 *
GILES C.R. ET AL.: "Gain enhancement in reflected-pump erbium-doped fiber amplifiers", OSA PROCEEDINGS OF THE TOPICAL MEETING ON OPTICAL AMPLIFIERS AND THEIR APPLICATIONS, vol. 13, 1992, pages 148 - 151, XP002969903 *
KINTZER E.S. ET AL.: "High-power, strained-layer amplifiers and lasers with tapered gain regions", IEEE PHOTONICS TECHNOLOGY LETTERS, vol. 5, no. 6, 1993, pages 605 - 608, XP000384041 *
KITAGAWA T. ET AL.: "Guided-wave laser based on erbium-doped silica planar lightwave circuit", ELECTRONICS LETTERS, vol. 27, no. 4, 1991, pages 334 - 335, XP000219839 *
KUNINORI HATTORI ET AL.: "Er tenka sekiei-kei doharokei ring kyoshinki", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS C-I, vol. J77-C-I, no. 5, 1994, pages 214 - 221, XP002969901 *
NAOMASA SHIMOJO ET AL.: "Reiki hikari hanshaki ni yoru hikari zofukuki tokusei no kaizen", 1998 NEN THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, TSUSHIN SOCIETY TAIKAI KOEN RONBUNSHU 2, 7 September 1998 (1998-09-07), pages 480, XP002969904 *
SOCCOLICH C.E. ET AL.: "Gain enhancement in EDFAs by using fiber-grating pump reflectors", OPTICAL FIBER COMMUNICATION CONFERENCE, OFC'94, TECHNICAL DIGEST, 1994, pages 277 - 278, XP000858817 *
TAKU SOMA ET AL.: "Er tenka garnet kessho usumaku o mochiita shuseki-gata hikari zofuku soshi no tokusei", 1997 NEN THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, ELECTRONICS SOCIETY, TAIKAI KOEN RONBUNSHU 1, 13 August 1997 (1997-08-13), pages 308 - 309, XP002969902 *
VANCE R.W.C. ET AL.: "State-space description of optimal erbium amplifier tapers", APPLIED OPTICS, vol. 33, no. 30, 1994, pages 6992 - 7001, XP000476199 *
WALPOLE J.N.: "Semiconductor amplifiers and lasers with tapered gain regions", OPTICAL AND QUANTUM ELECTRONICS, vol. 28, no. 6, 1996, pages 623 - 645, XP002969499 *

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011013480A1 (ja) * 2009-07-30 2011-02-03 古河電気工業株式会社 集積型半導体レーザ素子および半導体レーザモジュールならびに光伝送システム
JP2011035060A (ja) * 2009-07-30 2011-02-17 Furukawa Electric Co Ltd:The 集積型半導体レーザ素子および半導体レーザモジュールならびに光伝送システム
US8457169B2 (en) 2009-07-30 2013-06-04 Furukawa Electric Co., Ltd. Integrated semiconductor laser element, semiconductor laser module, and optical transmission system
CN109597162A (zh) * 2018-12-27 2019-04-09 华为技术有限公司 平面光波导、plc芯片、光束整形结构及wss
CN109597162B (zh) * 2018-12-27 2021-04-09 华为技术有限公司 平面光波导、plc芯片、光束整形结构及wss
CN111025471A (zh) * 2019-12-30 2020-04-17 浙江大学绍兴微电子研究中心 一种电压分段式的玻璃基掩埋式光波导连续生产方法
CN111175891A (zh) * 2019-12-30 2020-05-19 浙江大学 一种连续式电场辅助离子迁移制作光波导的方法
CN111175891B (zh) * 2019-12-30 2020-10-23 浙江大学 一种连续式电场辅助离子迁移制作光波导的方法
CN111025471B (zh) * 2019-12-30 2021-04-13 浙江大学绍兴微电子研究中心 一种电压分段式的玻璃基掩埋式光波导连续生产方法

Also Published As

Publication number Publication date
AU2003221350A1 (en) 2003-09-22
TW200403463A (en) 2004-03-01

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