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WO2003077383A1 - Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device - Google Patents

Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device Download PDF

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Publication number
WO2003077383A1
WO2003077383A1 PCT/JP2003/002905 JP0302905W WO03077383A1 WO 2003077383 A1 WO2003077383 A1 WO 2003077383A1 JP 0302905 W JP0302905 W JP 0302905W WO 03077383 A1 WO03077383 A1 WO 03077383A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
light source
amplifying
source device
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2003/002905
Other languages
French (fr)
Japanese (ja)
Inventor
Masaaki Doi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002077744A external-priority patent/JP2003283012A/en
Priority claimed from JP2002138861A external-priority patent/JP2003332653A/en
Priority claimed from JP2002142247A external-priority patent/JP2003332654A/en
Priority claimed from JP2003053891A external-priority patent/JP2003338646A/en
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to AU2003221350A priority Critical patent/AU2003221350A1/en
Publication of WO2003077383A1 publication Critical patent/WO2003077383A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/067—Fibre lasers
    • H01S3/06708—Constructional details of the fibre, e.g. compositions, cross-section, shape or tapering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12147—Coupler
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/1215—Splitter
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12183—Ion-exchange
    • G02B2006/12185—Ion-exchange field-assisted ion-exchange

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Light Guides In General And Applications Therefor (AREA)
  • Optical Integrated Circuits (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Lasers (AREA)

Abstract

A light amplifying device, comprising a light amplifying waveguide path (3) extending with a specified cross sectional shape provided in a glass substrate (2), the light amplifying waveguide path (3) further comprising a first waveguide path (3a) extending from an inlet part (4a) to a first intermediate part (A) with a specified cross sectional shape and a second waveguide path (3b) having a cross sectional shape divergently extending from the first intermediate part (A) to an outlet part (4b).
PCT/JP2003/002905 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device Ceased WO2003077383A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003221350A AU2003221350A1 (en) 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device

Applications Claiming Priority (10)

Application Number Priority Date Filing Date Title
JP2002069050 2002-03-13
JP2002-069050 2002-03-13
JP2002077744A JP2003283012A (en) 2002-03-20 2002-03-20 Optical amplifying device and manufacturing method thereof, light source device using optical amplifying device, phototherapy device using light source device, and exposure device using light source device
JP2002-077744 2002-03-20
JP2002138861A JP2003332653A (en) 2002-05-14 2002-05-14 Optical amplification device, light source device using optical amplification device, phototherapy device using light source device, and exposure device using light source device
JP2002-138861 2002-05-14
JP2002-142247 2002-05-17
JP2002142247A JP2003332654A (en) 2002-05-17 2002-05-17 Optical amplification device, light source device using optical amplification device, phototherapy device using light source device, and exposure device using light source device
JP2003053891A JP2003338646A (en) 2002-03-13 2003-02-28 Optical amplifying device and manufacturing method thereof, light source device using optical amplifying device, phototherapy device using light source device, and exposure device using light source device
JP2003-053891 2003-02-28

Publications (1)

Publication Number Publication Date
WO2003077383A1 true WO2003077383A1 (en) 2003-09-18

Family

ID=27808862

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2003/002905 Ceased WO2003077383A1 (en) 2002-03-13 2003-03-12 Light amplifying device and method of manufacturing the device, light source device using the light amplifying device, light treatment device using the light source device, and exposure device using the light source device

Country Status (3)

Country Link
AU (1) AU2003221350A1 (en)
TW (1) TW200403463A (en)
WO (1) WO2003077383A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011013480A1 (en) * 2009-07-30 2011-02-03 古河電気工業株式会社 Integrated-type semiconductor laser element, semiconductor laser module, and optical transmission system
CN109597162A (en) * 2018-12-27 2019-04-09 华为技术有限公司 Planar optical waveguide, PLC chip, light beam reshaping structure and WSS
CN111025471A (en) * 2019-12-30 2020-04-17 浙江大学绍兴微电子研究中心 A voltage segmented glass-based buried optical waveguide continuous production method
CN111175891A (en) * 2019-12-30 2020-05-19 浙江大学 Method for manufacturing optical waveguide by continuous electric field assisted ion migration

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9726820B2 (en) * 2014-08-14 2017-08-08 Raytheon Company End pumped PWG with tapered core thickness
CN107783360A (en) * 2016-08-25 2018-03-09 深圳市光峰光电技术有限公司 Light supply apparatus and display system

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JPH0335203A (en) * 1989-06-30 1991-02-15 Hitachi Cable Ltd Glass waveguide added with rare earth element and production thereof and glass waveguide laser and device using this waveguide
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WO2001020397A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Laser device and exposure method
WO2001020398A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Exposure device with laser device
JP2001133649A (en) * 1999-11-05 2001-05-18 Fdk Corp Manufacturing method of optical waveguide grating
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WO2001078632A1 (en) * 2000-04-13 2001-10-25 Nikon Corporation Laser therapy apparatus
JP2001337356A (en) * 2000-05-29 2001-12-07 Nikon Corp Light source device

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JPS6329986A (en) * 1986-07-23 1988-02-08 Hoya Corp Light-waveguide type laser
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JPH02221937A (en) * 1989-02-22 1990-09-04 Hitachi Cable Ltd Amplifier for glass waveguide for bidirectional transmission
JPH02222182A (en) * 1989-02-22 1990-09-04 Hitachi Cable Ltd Rare earth element added long size glass waveguide and manufacture thereof
US5134672A (en) * 1989-04-19 1992-07-28 Hitachi Cable, Ltd. Optical waveguide type star coupler
JPH0335203A (en) * 1989-06-30 1991-02-15 Hitachi Cable Ltd Glass waveguide added with rare earth element and production thereof and glass waveguide laser and device using this waveguide
JPH0351422U (en) * 1989-09-26 1991-05-20
JPH03135081A (en) * 1989-10-20 1991-06-10 Nec Corp Optical amplifier
EP0426221A1 (en) * 1989-10-30 1991-05-08 PIRELLI CAVI S.p.A. Low-noise optical amplification unit with reflection of the pumping power
EP0433859A1 (en) * 1989-12-18 1991-06-26 Forschungszentrum Jülich Gmbh Optical element and method for its production
JPH03252628A (en) * 1990-03-02 1991-11-11 Fujitsu Ltd Optical branching device
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WO2001020397A1 (en) * 1999-09-10 2001-03-22 Nikon Corporation Laser device and exposure method
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JP2001337356A (en) * 2000-05-29 2001-12-07 Nikon Corp Light source device

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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011013480A1 (en) * 2009-07-30 2011-02-03 古河電気工業株式会社 Integrated-type semiconductor laser element, semiconductor laser module, and optical transmission system
JP2011035060A (en) * 2009-07-30 2011-02-17 Furukawa Electric Co Ltd:The Integrated-type semiconductor laser element, semiconductor laser module, and optical transmission system
US8457169B2 (en) 2009-07-30 2013-06-04 Furukawa Electric Co., Ltd. Integrated semiconductor laser element, semiconductor laser module, and optical transmission system
CN109597162A (en) * 2018-12-27 2019-04-09 华为技术有限公司 Planar optical waveguide, PLC chip, light beam reshaping structure and WSS
CN109597162B (en) * 2018-12-27 2021-04-09 华为技术有限公司 Planar optical waveguide, PLC chip, beam shaping structure and WSS
CN111025471A (en) * 2019-12-30 2020-04-17 浙江大学绍兴微电子研究中心 A voltage segmented glass-based buried optical waveguide continuous production method
CN111175891A (en) * 2019-12-30 2020-05-19 浙江大学 Method for manufacturing optical waveguide by continuous electric field assisted ion migration
CN111175891B (en) * 2019-12-30 2020-10-23 浙江大学 Method for fabricating optical waveguide by continuous electric field-assisted ion migration
CN111025471B (en) * 2019-12-30 2021-04-13 浙江大学绍兴微电子研究中心 Voltage-segmented glass-based buried optical waveguide continuous production method

Also Published As

Publication number Publication date
AU2003221350A1 (en) 2003-09-22
TW200403463A (en) 2004-03-01

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