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WO2002008484A3 - Vacuum module for applying coatings - Google Patents

Vacuum module for applying coatings Download PDF

Info

Publication number
WO2002008484A3
WO2002008484A3 PCT/EA2001/000002 EA0100002W WO0208484A3 WO 2002008484 A3 WO2002008484 A3 WO 2002008484A3 EA 0100002 W EA0100002 W EA 0100002W WO 0208484 A3 WO0208484 A3 WO 0208484A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrates
opening
processing device
applying coatings
common
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EA2001/000002
Other languages
French (fr)
Other versions
WO2002008484A2 (en
Inventor
Uladzimir Shyrypau
Mikalai Leuchuk
Aliaksandr Khakhlou
Sergei Maryshev
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to KR1020037000087A priority Critical patent/KR100737035B1/en
Priority to JP2002513962A priority patent/JP4766821B2/en
Priority to AU6896001A priority patent/AU6896001A/en
Publication of WO2002008484A2 publication Critical patent/WO2002008484A2/en
Publication of WO2002008484A3 publication Critical patent/WO2002008484A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/012—Coating
    • H01J2209/015—Machines therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

A module and variants thereof for vacuum deposition of thin-film multi-layer coatings on substrates are described. A module system for applying coatings to the substrates, e.g. CRT and flat displays, is used for deposition of different thin-films to substrates of different sizes. A vacuum module for applying coatings to a substrate comprises a vacuum chamber (1) with an opening (2, 8) for positioning a substrate (3, 3'); a sealing (12, 12') member and a processing device (5) for applying coatings; a valve gate (6) mounted in the plane parallel to the said opening to separate the processing device from the opening. A processing device from the opening. A processing device-transporting mechanism moves reciprocally parallel to the substrate surface. A system of modules comprises several modules having a common evacuation system (27, 28, 29) and a common evacuation control system, a common handling device-control system for automatically positioning and removing the substrates. Several modules are disposed within the operation zone of one common manipulator.
PCT/EA2001/000002 2000-07-05 2001-05-22 Vacuum module for applying coatings Ceased WO2002008484A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020037000087A KR100737035B1 (en) 2000-07-05 2001-05-22 Module system and vacuum module for coating coating on substrate
JP2002513962A JP4766821B2 (en) 2000-07-05 2001-05-22 Vacuum module (and its variants) and module system for coating substrates
AU6896001A AU6896001A (en) 2000-07-05 2001-05-22 Vacuum module (variants thereof) and system of modules for applying coatings to a substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EA200000807 2000-07-05
EA200000807A EA003148B1 (en) 2000-07-05 2000-07-05 Vacuum module (variants thereof) and a system of modules for applying coatings to a substrate

Publications (2)

Publication Number Publication Date
WO2002008484A2 WO2002008484A2 (en) 2002-01-31
WO2002008484A3 true WO2002008484A3 (en) 2002-07-04

Family

ID=8161557

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EA2001/000002 Ceased WO2002008484A2 (en) 2000-07-05 2001-05-22 Vacuum module for applying coatings

Country Status (7)

Country Link
JP (1) JP4766821B2 (en)
KR (1) KR100737035B1 (en)
CN (1) CN100348773C (en)
AU (1) AU6896001A (en)
EA (1) EA003148B1 (en)
MY (1) MY137307A (en)
WO (1) WO2002008484A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006526125A (en) 2003-05-13 2006-11-16 アプライド　マテリアルズ　インコーポレイテッド Method and apparatus for sealing an opening in a processing chamber
EA007701B1 (en) * 2005-07-18 2006-12-29 Владимир Яковлевич ШИРИПОВ Vacuum cluster for applying coating on a substrate
EA200601327A1 (en) * 2006-05-15 2007-12-28 Владимир Яковлевич ШИРИПОВ METHOD OF APPLYING SILICON NITRIDE FILMS IN VACUUM (OPTIONS)
EA034967B1 (en) 2018-05-04 2020-04-13 Общество С Ограниченной Ответственностью "Изовак Технологии" TECHNOLOGICAL LINE FOR FORMING THIN FILM COATINGS IN VACUUM (OPTIONS)
CN110592550A (en) * 2019-10-28 2019-12-20 上海映晓电子科技有限公司 A kind of magnetron sputtering and electron beam evaporation double-chamber coating device and using method thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2008156A (en) * 1977-11-19 1979-05-31 Hunt C J L Vacuum Metallising Hollow Bodies
WO1997039160A1 (en) * 1996-04-18 1997-10-23 Kabushiki Kaisha Toshiba Method of producing a cathode-ray tube and apparatus therefor

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5489369A (en) * 1993-10-25 1996-02-06 Viratec Thin Films, Inc. Method and apparatus for thin film coating an article

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2008156A (en) * 1977-11-19 1979-05-31 Hunt C J L Vacuum Metallising Hollow Bodies
WO1997039160A1 (en) * 1996-04-18 1997-10-23 Kabushiki Kaisha Toshiba Method of producing a cathode-ray tube and apparatus therefor
US6325901B1 (en) * 1996-04-18 2001-12-04 Kabushiki Kaisha Toshiba Method of producing a cathode-ray tube and apparatus therefor

Also Published As

Publication number Publication date
EA200000807A1 (en) 2002-02-28
JP4766821B2 (en) 2011-09-07
KR20030024771A (en) 2003-03-26
CN100348773C (en) 2007-11-14
MY137307A (en) 2009-01-30
JP2004504495A (en) 2004-02-12
KR100737035B1 (en) 2007-07-09
EA003148B1 (en) 2003-02-27
AU6896001A (en) 2002-02-05
WO2002008484A2 (en) 2002-01-31
CN1617947A (en) 2005-05-18

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