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EA200000807A1 - VACUUM MODULE (ITS OPTIONS) AND SYSTEM OF MODULES FOR APPLYING COATINGS ON A SUBSTRATE - Google Patents

VACUUM MODULE (ITS OPTIONS) AND SYSTEM OF MODULES FOR APPLYING COATINGS ON A SUBSTRATE

Info

Publication number
EA200000807A1
EA200000807A1 EA200000807A EA200000807A EA200000807A1 EA 200000807 A1 EA200000807 A1 EA 200000807A1 EA 200000807 A EA200000807 A EA 200000807A EA 200000807 A EA200000807 A EA 200000807A EA 200000807 A1 EA200000807 A1 EA 200000807A1
Authority
EA
Eurasian Patent Office
Prior art keywords
vacuum
substrate
substrates
modules
technological device
Prior art date
Application number
EA200000807A
Other languages
Russian (ru)
Other versions
EA003148B1 (en
Inventor
Владимир Яковлевич ШИРИПОВ
Николай Евгеньевич Левчук
Александр Евгеньевич Хохлов
Сергей Павлович МАРЫШЕВ
Original Assignee
Владимир Яковлевич ШИРИПОВ
Николай Евгеньевич Левчук
Александр Евгеньевич Хохлов
Сергей Павлович МАРЫШЕВ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Владимир Яковлевич ШИРИПОВ, Николай Евгеньевич Левчук, Александр Евгеньевич Хохлов, Сергей Павлович МАРЫШЕВ filed Critical Владимир Яковлевич ШИРИПОВ
Priority to EA200000807A priority Critical patent/EA003148B1/en
Priority to AU6896001A priority patent/AU6896001A/en
Priority to JP2002513962A priority patent/JP4766821B2/en
Priority to KR1020037000087A priority patent/KR100737035B1/en
Priority to CNB018121780A priority patent/CN100348773C/en
Priority to PCT/EA2001/000002 priority patent/WO2002008484A2/en
Priority to MYPI20013177A priority patent/MY137307A/en
Publication of EA200000807A1 publication Critical patent/EA200000807A1/en
Publication of EA003148B1 publication Critical patent/EA003148B1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/012—Coating
    • H01J2209/015—Machines therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Предлагается модуль и варианты его выполнения, предназначенные для использования в области вакуумного напыления материалов на подложки, с целью создания тонкопленочных многослойных покрытий на их фронтальной поверхности. Кроме того, предлагается вакуумная система модулей, предназначенная для нанесения покрытий на подложки, например кинескопы, плоские дисплеи, которая может быть использована в качестве непрерывно действующей системы, осуществляющей напыление различных тонкопленочных покрытий на подложки одинаковых или различных типоразмеров. В вакуумном модуле для нанесения покрытий на подложку, выполненном по первому варианту и включающем вакуумную камеру, снабженную отверстием, предназначенным для установки подложки, уплотнительным элементом и технологическим устройством, предназначенным для нанесения покрытий, вакуумный затвор, установленный в плоскости, параллельной плоскости отверстия вакуумной камеры, и предназначенный для отделения части объема камеры с технологическим устройством от отверстия, и механизм перемещения технологического устройства, новым является то, что механизм перемещения технологического устройства установлен с возможностью возвратно-поступательного движения параллельно поверхности подложки. По второму варианту - вакуумная камера снабжена, по меньшей мере, двумя отверстиями для установки подложек. По третьему варианту - вакуумная камера дополнительно снабжена крышкой, предназначенной для установки подложки. Предложена также вакуумная система для нанесения покрытий на подложку, содержащая, по меньшей мере, два вакуумных модуля с единой системой вакуумной откачки, вA module and variants of its implementation are proposed for use in the field of vacuum deposition of materials onto substrates in order to create thin-film multilayer coatings on their frontal surface. In addition, modules are proposed for coating on substrates, such as kinescopes, flat displays, which can be used as a continuously operating system that sputters various thin film coatings on substrates of the same or different sizes. In the vacuum module for applying coatings on a substrate made in the first embodiment and including a vacuum chamber equipped with an opening for mounting the substrate, a sealing element and a technological device for coating, a vacuum seal installed in a plane parallel to the plane of the opening of the vacuum chamber and designed to separate part of the volume of the chamber with the technological device from the hole, and the mechanism for moving the technological device, is new the fact that the mechanism for moving the technological device is installed with the possibility of reciprocating motion parallel to the surface of the substrate. In the second embodiment, the vacuum chamber is provided with at least two holes for the installation of substrates. According to the third variant - the vacuum chamber is additionally equipped with a lid for mounting the substrate. A vacuum system for applying coatings to a substrate, containing at least two vacuum modules with a single vacuum pumping system, is also proposed.

EA200000807A 2000-07-05 2000-07-05 Vacuum module (variants thereof) and a system of modules for applying coatings to a substrate EA003148B1 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
EA200000807A EA003148B1 (en) 2000-07-05 2000-07-05 Vacuum module (variants thereof) and a system of modules for applying coatings to a substrate
AU6896001A AU6896001A (en) 2000-07-05 2001-05-22 Vacuum module (variants thereof) and system of modules for applying coatings to a substrate
JP2002513962A JP4766821B2 (en) 2000-07-05 2001-05-22 Vacuum module (and its variants) and module system for coating substrates
KR1020037000087A KR100737035B1 (en) 2000-07-05 2001-05-22 Module system and vacuum module for coating coating on substrate
CNB018121780A CN100348773C (en) 2000-07-05 2001-05-22 Vacuum module (variants thereof) and system of modules for applying coatings to a substrate
PCT/EA2001/000002 WO2002008484A2 (en) 2000-07-05 2001-05-22 Vacuum module for applying coatings
MYPI20013177A MY137307A (en) 2000-07-05 2001-07-03 Vacuum module (variants thereof) and system of modules for applying coatings to a substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EA200000807A EA003148B1 (en) 2000-07-05 2000-07-05 Vacuum module (variants thereof) and a system of modules for applying coatings to a substrate

Publications (2)

Publication Number Publication Date
EA200000807A1 true EA200000807A1 (en) 2002-02-28
EA003148B1 EA003148B1 (en) 2003-02-27

Family

ID=8161557

Family Applications (1)

Application Number Title Priority Date Filing Date
EA200000807A EA003148B1 (en) 2000-07-05 2000-07-05 Vacuum module (variants thereof) and a system of modules for applying coatings to a substrate

Country Status (7)

Country Link
JP (1) JP4766821B2 (en)
KR (1) KR100737035B1 (en)
CN (1) CN100348773C (en)
AU (1) AU6896001A (en)
EA (1) EA003148B1 (en)
MY (1) MY137307A (en)
WO (1) WO2002008484A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100408902C (en) 2003-05-13 2008-08-06 应用材料股份有限公司 Method and apparatus for sealing an opening of a processing chamber
EA200501183A1 (en) * 2005-07-18 2006-12-29 Владимир Яковлевич ШИРИПОВ VACUUM CLUSTER FOR APPLYING COATINGS ON A SUBSTRATE (OPTIONS)
EA200601327A1 (en) * 2006-05-15 2007-12-28 Владимир Яковлевич ШИРИПОВ METHOD OF APPLYING SILICON NITRIDE FILMS IN VACUUM (OPTIONS)
EA034967B1 (en) 2018-05-04 2020-04-13 Общество С Ограниченной Ответственностью "Изовак Технологии" TECHNOLOGICAL LINE FOR FORMING THIN FILM COATINGS IN VACUUM (OPTIONS)
CN110592550A (en) * 2019-10-28 2019-12-20 上海映晓电子科技有限公司 A kind of magnetron sputtering and electron beam evaporation double-chamber coating device and using method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2008156B (en) * 1977-11-19 1982-06-23 Hunt C J L Vacuum metallising of hollow articles
US5489369A (en) * 1993-10-25 1996-02-06 Viratec Thin Films, Inc. Method and apparatus for thin film coating an article
KR100318724B1 (en) * 1996-04-18 2002-04-22 니시무로 타이죠 Method for manufacturing cathode ray tube and its device

Also Published As

Publication number Publication date
KR100737035B1 (en) 2007-07-09
JP4766821B2 (en) 2011-09-07
WO2002008484A2 (en) 2002-01-31
CN100348773C (en) 2007-11-14
CN1617947A (en) 2005-05-18
JP2004504495A (en) 2004-02-12
WO2002008484A3 (en) 2002-07-04
KR20030024771A (en) 2003-03-26
MY137307A (en) 2009-01-30
AU6896001A (en) 2002-02-05
EA003148B1 (en) 2003-02-27

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MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): AM AZ KZ KG MD TJ TM

QB4A Registration of a licence in a contracting state
QZ4A Registered corrections and amendments in a licence
QB4A Registration of a licence in a contracting state
QZ4A Registered corrections and amendments in a licence
QZ4A Registered corrections and amendments in a licence
MM4A Lapse of a eurasian patent due to non-payment of renewal fees within the time limit in the following designated state(s)

Designated state(s): RU

QZ4A Registered corrections and amendments in a licence
MK4A Patent expired

Designated state(s): BY