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WO2002067293A3 - Microelectromechanical systems (mems) device including an analog or a digital - Google Patents

Microelectromechanical systems (mems) device including an analog or a digital Download PDF

Info

Publication number
WO2002067293A3
WO2002067293A3 PCT/US2002/004824 US0204824W WO02067293A3 WO 2002067293 A3 WO2002067293 A3 WO 2002067293A3 US 0204824 W US0204824 W US 0204824W WO 02067293 A3 WO02067293 A3 WO 02067293A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems
analog
digital
actuator
created
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2002/004824
Other languages
French (fr)
Other versions
WO2002067293A2 (en
WO2002067293A9 (en
Inventor
Jeffrey R Annis
Ernst H Dummermuth
Richard D Harris
Patrick C Herbert
Michael J Knieser
Robert J Kretschmann
Henric Larsson
Winfred L Morris
Jun J Yao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rockwell Automation Technologies Inc
Original Assignee
Rockwell Automation Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/788,928 external-priority patent/US6583374B2/en
Priority claimed from US09/804,817 external-priority patent/US6798312B1/en
Priority claimed from US09/805,410 external-priority patent/US6617750B2/en
Priority claimed from US10/001,412 external-priority patent/US6803755B2/en
Priority to EP02724965A priority Critical patent/EP1386347A4/en
Application filed by Rockwell Automation Technologies Inc filed Critical Rockwell Automation Technologies Inc
Priority to JP2002566525A priority patent/JP4464607B2/en
Priority to AU2002255563A priority patent/AU2002255563A1/en
Publication of WO2002067293A2 publication Critical patent/WO2002067293A2/en
Anticipated expiration legal-status Critical
Publication of WO2002067293A3 publication Critical patent/WO2002067293A3/en
Publication of WO2002067293A9 publication Critical patent/WO2002067293A9/en
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/04—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode
    • H01G5/14—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of effective area of electrode due to longitudinal movement of electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)

Abstract

The microelectromechanical system (MEMS) analog isolator (10) or digital isolator (210) may be created in which an actuator (12, 212) such as an electrostatic motor (66, 68) drives a beam (20, 220) against an opposing force set or predefined force set, for example, by another electrostatic motor. Motion of the beam may be sensed by a sensor (18, 218) also attached to the beam. The beam itself is electrically isolated between the locations of the actuator and the sensor. The structure may be incorporated into integrated circuits to provide on-chip isolation. In a MEMS device, a specific beam (312) is supported by transverse arms (314, 316, 318) which have flexible terminations resulting in either the selective biasing to the beam or mechanical advantage in the sensing of beam structure. Additionally, a MEMS device may be created to have reduced noise sensitivity.
PCT/US2002/004824 2001-02-20 2002-02-20 Microelectromechanical systems (mems) device including an analog or a digital Ceased WO2002067293A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU2002255563A AU2002255563A1 (en) 2001-02-20 2002-02-20 Microelectromechanical systems (mems) device including an analog or a digital
JP2002566525A JP4464607B2 (en) 2001-02-20 2002-02-20 Micro electro mechanical system (MEMS) equipment
EP02724965A EP1386347A4 (en) 2001-02-20 2002-02-20 Microelectromechanical system (mens) device

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US09/788,928 US6583374B2 (en) 2001-02-20 2001-02-20 Microelectromechanical system (MEMS) digital electrical isolator
US09/788,928 2001-02-20
US09/805,410 US6617750B2 (en) 1999-09-21 2001-03-13 Microelectricalmechanical system (MEMS) electrical isolator with reduced sensitivity to inertial noise
US09/804,817 US6798312B1 (en) 1999-09-21 2001-03-13 Microelectromechanical system (MEMS) analog electrical isolator
US09/805,410 2001-03-13
US09/804,817 2001-03-13
US10/001,412 2001-10-25
US10/001,412 US6803755B2 (en) 1999-09-21 2001-10-25 Microelectromechanical system (MEMS) with improved beam suspension

Publications (3)

Publication Number Publication Date
WO2002067293A2 WO2002067293A2 (en) 2002-08-29
WO2002067293A3 true WO2002067293A3 (en) 2003-11-27
WO2002067293A9 WO2002067293A9 (en) 2004-04-01

Family

ID=27485089

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/004824 Ceased WO2002067293A2 (en) 2001-02-20 2002-02-20 Microelectromechanical systems (mems) device including an analog or a digital

Country Status (4)

Country Link
EP (1) EP1386347A4 (en)
JP (1) JP4464607B2 (en)
AU (1) AU2002255563A1 (en)
WO (1) WO2002067293A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6690178B2 (en) * 2001-10-26 2004-02-10 Rockwell Automation Technologies, Inc. On-board microelectromechanical system (MEMS) sensing device for power semiconductors
JP4643192B2 (en) * 2004-07-16 2011-03-02 アオイ電子株式会社 Gripper
US7205867B2 (en) * 2005-05-19 2007-04-17 Robert Bosch Gmbh Microelectromechanical resonator structure, and method of designing, operating and using same
US7227432B2 (en) * 2005-06-30 2007-06-05 Robert Bosch Gmbh MEMS resonator array structure and method of operating and using same
CN120185330B (en) * 2025-05-22 2025-08-19 启元实验室 Displacement control system of electromagnetic MEMS actuator integrated with magnetic sensor and preparation method

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
US6060336A (en) * 1998-12-11 2000-05-09 C.F. Wan Incorporated Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
US6094102A (en) * 1999-04-30 2000-07-25 Rockwell Science Center, Llc Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method
US6144545A (en) * 1997-09-25 2000-11-07 Samsung Electronics Co., Ltd. Microactuator and method for controlling resonant frequency thereof
US6307169B1 (en) * 2000-02-01 2001-10-23 Motorola Inc. Micro-electromechanical switch
US6384353B1 (en) * 2000-02-01 2002-05-07 Motorola, Inc. Micro-electromechanical system device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739686A (en) * 1996-04-30 1998-04-14 Naughton; Michael J. Electrically insulating cantilever magnetometer with mutually isolated and integrated thermometry, background elimination and null detection
JP4126833B2 (en) * 1999-03-12 2008-07-30 株式会社デンソー Angular velocity sensor device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5359893A (en) * 1991-12-19 1994-11-01 Motorola, Inc. Multi-axes gyroscope
US5536988A (en) * 1993-06-01 1996-07-16 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US6144545A (en) * 1997-09-25 2000-11-07 Samsung Electronics Co., Ltd. Microactuator and method for controlling resonant frequency thereof
US5959516A (en) * 1998-01-08 1999-09-28 Rockwell Science Center, Llc Tunable-trimmable micro electro mechanical system (MEMS) capacitor
US6060336A (en) * 1998-12-11 2000-05-09 C.F. Wan Incorporated Micro-electro mechanical device made from mono-crystalline silicon and method of manufacture therefore
US6094102A (en) * 1999-04-30 2000-07-25 Rockwell Science Center, Llc Frequency synthesizer using micro electro mechanical systems (MEMS) technology and method
US6307169B1 (en) * 2000-02-01 2001-10-23 Motorola Inc. Micro-electromechanical switch
US6384353B1 (en) * 2000-02-01 2002-05-07 Motorola, Inc. Micro-electromechanical system device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1386347A4 *

Also Published As

Publication number Publication date
WO2002067293A2 (en) 2002-08-29
AU2002255563A1 (en) 2002-09-04
EP1386347A4 (en) 2005-05-25
JP4464607B2 (en) 2010-05-19
WO2002067293A9 (en) 2004-04-01
JP2005503267A (en) 2005-02-03
EP1386347A2 (en) 2004-02-04

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