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WO2000012640A1 - Fluide de revetement pour preparer un film de revetement a base de silice a faible permittivite et substrat avec film de revetement a faible permittivite - Google Patents

Fluide de revetement pour preparer un film de revetement a base de silice a faible permittivite et substrat avec film de revetement a faible permittivite Download PDF

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Publication number
WO2000012640A1
WO2000012640A1 PCT/JP1999/004050 JP9904050W WO0012640A1 WO 2000012640 A1 WO2000012640 A1 WO 2000012640A1 JP 9904050 W JP9904050 W JP 9904050W WO 0012640 A1 WO0012640 A1 WO 0012640A1
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Prior art keywords
silica
coating
dielectric constant
low dielectric
forming
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PCT/JP1999/004050
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English (en)
Japanese (ja)
Inventor
Akira Nakashima
Michio Komatsu
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JGC Catalysts and Chemicals Ltd
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Catalysts and Chemicals Industries Co Ltd
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Priority to EP99933134.1A priority Critical patent/EP1026213B1/fr
Priority to US09/530,437 priority patent/US6639015B1/en
Priority to KR1020007004584A priority patent/KR100618301B1/ko
Publication of WO2000012640A1 publication Critical patent/WO2000012640A1/fr
Anticipated expiration legal-status Critical
Priority to US10/649,575 priority patent/US6893726B2/en
Ceased legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/04—Polysiloxanes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C08J7/04—Coating
    • C08J7/0427—Coating with only one layer of a composition containing a polymer binder
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D125/00—Coating compositions based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by an aromatic carbocyclic ring; Coating compositions based on derivatives of such polymers
    • C09D125/02—Homopolymers or copolymers of hydrocarbons
    • C09D125/04—Homopolymers or copolymers of styrene
    • C09D125/06—Polystyrene
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/31058—After-treatment of organic layers
    • H10P95/08—
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J2383/00—Characterised by the use of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen, or carbon only; Derivatives of such polymers
    • C08J2383/04—Polysiloxanes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
    • H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
    • H01L21/02214—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen
    • H01L21/02216—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound comprising silicon and oxygen the compound being a molecule comprising at least one silicon-oxygen bond and the compound having hydrogen or an organic group attached to the silicon or oxygen, e.g. a siloxane
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • H10P14/6342—
    • H10P14/665—
    • H10P14/6686—
    • H10P14/6922—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S525/00—Synthetic resins or natural rubbers -- part of the class 520 series
    • Y10S525/903—Interpenetrating network
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31652—Of asbestos
    • Y10T428/31663—As siloxane, silicone or silane

Definitions

  • the present invention has a low relative dielectric constant of 3 or less, and has an oxygen-resistant plasma property.
  • the present invention relates to a substrate with a low dielectric constant coating having a low-density film.
  • the interlayer insulating film used for the above purposes is generally formed on a substrate by a vapor deposition method such as a CVD method or a coating method of forming an insulating film using a coating liquid for forming a film.
  • the relative dielectric constant of the obtained silica-based film in a vapor phase growth method such as the CVD method is limited to 3.5 of a fluorine-doped silica film. Is difficult There is.
  • CVD films such as polyaryl resins, fluorine-containing polyimide resins, and fluorine-based resins, and films formed using these coating solutions have a relative dielectric constant of about 2, but have a relative dielectric constant of about 2.
  • problems such as poor adhesiveness with a resist material used for microfabrication, poor chemical resistance and oxygen plasma resistance.
  • a coating liquid having a relative dielectric constant of about 2.5 can be obtained with a coating liquid for forming a silica-based coating, which is composed of a partially hydrolyzed product of alkoxysilane, which has been conventionally used. There is a problem that the adhesion is poor.
  • a coating formed using a coating liquid for forming a low dielectric constant silica-based coating containing a reaction product of silica fine particles and a halogenated silane or a hydrolyzate thereof has a relative dielectric constant of 3 or less.
  • it was excellent in chemical resistance such as adhesion to the surface to be coated, mechanical strength, and alkali resistance, and at the same time was excellent in crack resistance. (See Japanese Patent Application Laid-Open No. Hei 9-31 158 12).
  • a method for producing an insulating film having a relative dielectric constant of 3 or less by making a coating porous is disclosed.
  • the relative dielectric constant is as small as 3 or less, and it has excellent adhesion to the substrate, excellent film strength, and excellent process compatibility such as oxygen plasma resistance and etching processability. It has been desired to develop a coating solution for forming a low dielectric constant silica-based film capable of forming a low-density insulating film.
  • the present invention is intended to solve the above-mentioned problems in the prior art, and has a low relative dielectric constant of 3 or less, and a low density having excellent oxygen plasma resistance and other process compatibility.
  • An object of the present invention is to provide a coating solution for forming a low dielectric constant silica-based film capable of forming a film, and a substrate having a low dielectric constant film having a silica-based low-density film having such characteristics. Disclosure of the invention
  • the coating solution for forming a low dielectric constant silica-based film according to the present invention comprises:
  • X represents a hydrogen atom, a fluorine atom, or an alkyl group having 1 to 8 carbon atoms, a fluorine-substituted alkyl group, an aryl group or a vinyl group
  • R represents a hydrogen atom or a carbon atom.
  • the polymer composition is an interpenetrating polymer composition in which the polysiloxane and the easily decomposable resin are entangled at a molecular chain level.
  • silica fine particles those obtained by hydrolyzing one or more of the alkoxysilanes represented by the general formula (I), or hydrolyzing and then ripening are preferable.
  • the polysiloxane is preferably one obtained by reacting one or more hydrolysates of the alkoxysilane represented by the general formula (I) with the surface of the silica fine particles.
  • the easily decomposable resin may be decomposed or decomposed by heat treatment at a temperature of 500 ° C. or lower, or irradiation with ultraviolet rays, infrared rays, electron beams, X-rays, or oxygen plasma.
  • a volatile resin is preferable, and such an easily decomposable resin preferably has a number average molecular weight of 50,000 to 500,000 in terms of polystyrene.
  • the polymer composition comprises: (a) silica fine particles having an average particle size of 5 to 50 nm,
  • the weight ratio (AZB) between the polysiloxane (A) and the easily decomposable resin (B) in the polymer composition is 95Z5 to 50Z50 (polysiloxane is Si it is preferable to O 2 is converted).
  • the substrate with a low dielectric constant film according to the present invention is the substrate with a low dielectric constant film according to the present invention.
  • a heat treatment is performed at a temperature of 500 ° C or less, or an ultraviolet, infrared, or electron
  • a heat treatment is performed at a temperature of 500 ° C or less, or an ultraviolet, infrared, or electron
  • the easily decomposable resin constituting the polymer composition or the interpenetrating polymer composition contained in the coating is decomposed or volatilized. It is characterized by having a silica-based low-density film.
  • the average pore diameter of the pores contained in the silica-based low-density film formed by the above method is preferably 5 dragons or less.
  • the coating liquid for forming a low dielectric constant silica-based film and the substrate with a low dielectric constant film according to the present invention will be specifically described.
  • the coating solution for forming low dielectric constant silica-based film comprises:
  • It contains a polymer composition or an interpenetrating polymer composition comprising (i) a specific polysiloxane and (ii) an easily decomposable resin.
  • a reaction product of silica fine particles and one or more hydrolysates of an alkoxysilane represented by the following general formula (I) is used as the polysiloxane.
  • X represents a hydrogen atom, a fluorine atom, or an alkyl group having 1 to 8 carbon atoms, a fluorine-substituted alkyl group, an aryl group or a vinyl group
  • R represents a hydrogen atom or a carbon atom.
  • the silica fine particles can be obtained by a method in which one or more of the alkoxysilanes represented by the general formula (I) are hydrolyzed and polycondensed in the presence of water, an organic solvent and ammonia.
  • a method for preparing such silica fine particles the method described in the above-mentioned Japanese Patent Application Laid-Open No. Hei 9-315158 or a conventionally known method can be adopted.
  • alkoxysilane represented by the above general formula (I) include tetramethyl Sisilane, Tetraethoxysilane, Tetrisopropoxysilane, Tetrabutoxysilane, Tetraoctylsilane, Methyltrimethoxysilane, Methyltriethoxysilane, Methyltrisopropoxysilane, Ethyltrimethoxysilane, Ethyl triethoxysilane, ethyl triisopropoxy silane, octyl trimethoxy silane, octyl triethoxy silane, vinyl trimethoxy silane, vinyl triethoxy silane, phenyl trimethoxy silane, phenyl triethoxy silane, ethoxy Limethoxysilane, triethoxysilane, triisopropoxysilane, fluorotrimethoxysilane, fluorotriethoxysilane, fluo
  • Examples of the organic solvent include alcohols, ketones, ethers, and esters, and more specifically, for example, alcohols such as methanol, ethanol, propanol, and butanol, and methylethyl ketone.
  • ketones such as methylisobutylketone
  • glycol ethers such as methylcellosolve, ethylcellosolve, and propylene glycol monopropylether
  • dalicol such as ethylene glycol, propylene glycol and hexylene glycol.
  • esters such as methyl acetate, ethyl acetate, methyl lactate and ethyl lactate.
  • the method for preparing silica fine particles will be described in more detail. For example, while stirring a water-alcohol mixed solvent, alkoxysilane and ammonia water are added to the mixed solvent to cause a hydrolysis reaction of the alkoxylan. There is a method to make it.
  • water is used in such an amount as to be 0.5 to 50 mol, preferably 1 to 25 mol, per 1 mol of Si—OR group constituting the alkoxysilane.
  • Ammonia is used in such an amount that, when the alkoxysilane is converted to SiO 2, the amount becomes 0.01 to 1 mol, preferably 0.05 to 0.8 mol, per mol of the alkoxysilane. It is desirable to be blended.
  • the hydrolysis reaction of the alkoxylan is preferably carried out at 180 ° C. or higher, preferably at 200 ° C. or higher, using a heat-resistant and pressure-resistant container such as a photoclave. Furthermore, after this, aging can be performed at the same temperature or a higher temperature. The higher the above reaction temperature and / or aging temperature, the more the polycondensation of alkoxysilane is promoted, and the inside of the silica fine particles becomes dense. When the reaction and / or aging is performed at such a temperature, the silica fine particles become more dense, the hygroscopicity of the particles themselves decreases, and the residual functional groups on the particle surface also decrease.
  • a high-boiling solvent such as ethylene glycol may be added to a water-alcohol mixed solvent under stirring to hydrolyze the alkoxysilane to generate and grow silica fine particles. If such a high-boiling solvent is added during the hydrolysis of alkoxysilane, transesterification of the alkoxy group will occur, and the high-boiling solvent will be contained in the silica particles. And the porous silica fine particles are obtained.
  • silica fine particles a silica sol obtained by ion exchange or hydrolysis of an alkali metal silicate or the like is also used. Further, fine particles made of porous zeolite obtained by removing aluminum from zeolite made of aluminosilicate can also be used.
  • the silica fine particles used in the present invention preferably have an average particle diameter of 5 to 50 nm, preferably 10 to 50 nm. As long as the fine particles have a particle diameter falling within this range, they may have a uniform particle diameter or a mixture of two or more kinds of fine particles having different particle diameters. Further, it may be spherical or irregular. If the particle size is less than 5 nm, the stability of the coating solution to be produced over time will be poor. On the other hand, if it exceeds 50 nm, the coating film obtained from the coating solution to be produced will have a poor stability. Defects are more likely to occur during microfabrication than on a crophotolithograph.
  • the polysiloxane used in the present invention is obtained by mixing the above silica fine particles and one or more of alkoxysilanes represented by the following general formula (I) in an organic solvent, and mixing them in the presence of water and a catalyst. It is obtained by causing a hydrolysis reaction of alkoxysilane.
  • X represents a hydrogen atom, a fluorine atom, or an alkyl group having 1 to 8 carbon atoms, a fluorine-substituted alkyl group, an aryl group or a vinyl group
  • R represents a hydrogen atom or a 1 to 8 carbon atom.
  • n is an integer of 0 to 3.
  • the alkoxysilane used for the hydrolysis may be the same as or different from the one used during the preparation of the silica fine particles.
  • organic solvent examples include those similar to those exemplified in the preparation of silica fine particles, and hydrocarbons such as hexane, cyclohexane, and octane, and aromatic hydrocarbons such as toluene, xylene, and mesitylene. Is mentioned.
  • the catalyst examples include inorganic acids such as hydrochloric acid, nitric acid, and sulfuric acid; organic acids such as acetic acid, oxalic acid, and toluenesulfonic acid; and compounds that show acidity in an aqueous solution such as metal soap.
  • inorganic acids such as hydrochloric acid, nitric acid, and sulfuric acid
  • organic acids such as acetic acid, oxalic acid, and toluenesulfonic acid
  • compounds that show acidity in an aqueous solution such as metal soap.
  • the water required for the hydrolysis reaction of the alkoxysilane is usually 1 mole per mole of Si-OR groups constituting the alkoxysilane. It is preferably used in an amount of from 5 to 5 mol, preferably from 0.1 to 2 mol.
  • the catalyst is preferably added in an amount of 0.001-1 mol per mol of alkoxysilane.
  • Weight when the mixing ratio of the alkoxysilane represented by the above-described one general formula (I) with the silica fine particles (A) used in the preparation of the polysiloxane (B) (A / B) includes a monitor and S i 0 2 converted It is desirable that the ratio be in the range of 1/99 to L0 / 90, preferably 1/99 to 5Z95. If the mixing ratio (A / B) is less than 1/99, the hydrolysis reaction may proceed on other than the surface of the silica fine particles, and the stability over time of the obtained polysiloxane may be poor. When the mixing ratio (A / B) is more than 10/90, the bonding strength of the obtained polysiloxane is weakened, There is a tendency that sufficient film strength cannot be maintained.
  • reaction conditions in this step are not particularly limited, but are generally at a temperature of about 100 ° C. or lower, preferably 80 ° C. or lower, with stirring, usually for 0.5 to 5 hours, preferably 0.5 to 3 hours is recommended.
  • the method for preparing this polysiloxane is not limited to the above, and it is also possible to use a polysiloxane produced by a method described in Japanese Patent Application Laid-Open No. Hei 9-315182.
  • the catalytic hydrolysis method using silica fine particles, alkoxysilane and an easily decomposable resin directly relates to the present invention without going through a process for preparing a polysiloxane.
  • a polymer composition can be produced.
  • the easily decomposable resin used in the present invention is a resin which is decomposed or volatilized by heat treatment at a temperature of 500 ° C. or lower or irradiation of ultraviolet rays, infrared rays, electron beams, X-rays or oxygen plasma. It is. Specific examples include a cellulose resin, a polyamide resin, a polyester resin, an acrylic resin, a polyether resin, a polyolefin resin, a polyol resin, and an epoxy resin.
  • the number average molecular weight of such an easily decomposable resin is desirably 500 to 500,000, preferably 500 to 300,000 in terms of molecular weight in terms of polystyrene. This number average molecular weight is greater than 50,000 After decomposition, relatively large pores are formed in the coating film, resulting in poor adhesion to the base material, reduced film strength, stains of the etching gas components, and deterioration of the film quality due to plasma irradiation. On the other hand, if the number average molecular weight is less than 50,000, it is difficult to reduce the density, and it becomes difficult to lower the relative dielectric constant.
  • a composition comprising (i) a polysiloxane and (ii) a readily decomposable resin.
  • such a polymer composition is preferably an interpenetrating polymer composition in which the siloxane and the easily decomposable resin are entangled at the molecular chain level, and the composition is uniform.
  • the weight ratio (A / B) of the polysiloxane (A) to the easily decomposable resin (B) in such a polymer composition is from 95/5 to 50/50, preferably 90/50. It is preferably 10 to 50/50 (polysiloxane is converted to SiO 2 ).
  • the polymer composition preferably has a polystyrene-equivalent number average molecular weight in the range of 500 to 500,000, preferably 100 to 300.
  • Such a polymer composition comprises the above (i) polysiloxane and (ii) easily decomposable resin in an organic solvent such as ketones, ethers, esters, hydrocarbons, and aromatic hydrocarbons. It can be prepared by mixing with. In this case, if necessary, one or more of the alkoxysilanes represented by the above general formula (I) may be contained in the organic solvent. Can be added.
  • the organic solvent in which the polysiloxane and the easily decomposable resin are mixed is stirred at a temperature of 20 to 60 ° C. for 1 to 6 hours in the presence of a small amount of water and an acid catalyst.
  • the secondary hydrolysis reaction of the polysiloxane proceeds in the easily decomposable resin skeleton, and a polymer composition in which the polysiloxane and the easily decomposable resin are uniformly entangled is obtained.
  • a uniformly entangled polymer composition may not be obtained depending on the kind of the easily decomposable resin.
  • the polymer composition can be prepared by subjecting silica fine particles, alkoxysilane, and easily decomposable resin to a catalytic hydrolysis reaction using an incompatible organic solvent and water. According to this adjustment method, an interpenetrating polymer composition can be easily formed.
  • silica fine particles, alkoxysilane, and easily decomposable resin to a catalytic hydrolysis reaction using an incompatible organic solvent and water. According to this adjustment method, an interpenetrating polymer composition can be easily formed.
  • the mixing ratio (A / B) of the silica fine particles (A) and the alkoxysilane (B) represented by the general formula (I) is, as described above, the weight when converted into SiO 2. It is desirable that the ratio be in the range of lZ99 to 10/90, preferably 1/99 to 5/95, and it is easy to use other components.
  • the decomposable resin is desirably mixed so that the weight ratio of the polysiloxane and the easily decomposable resin can be constituted in the polymer composition.
  • this preparation method uses an organic solvent and water that are incompatible with each other as a solvent, and uses the alkoxysilane represented by the general formula (I) at the interface between the organic solvent and water.
  • the hydrolysis reaction is performed, and the hydrolysis product as a reaction product is extracted into an organic solvent layer in which the easily decomposable resin is dissolved.
  • the silica fine particles when the silica fine particles are dispersed in the organic solvent layer in advance, the hydrolysis of the alkoxysilane can efficiently proceed on the surface of the silica fine particles.
  • the silica fine particles the unpurified silica fine particles obtained by the above-described method may be used as they are, but they should be purified by means such as ultrafiltration or distillation in advance. Is desirable.
  • the organic solvent used to dissolve the easily decomposable resin is not particularly limited as long as it is incompatible with water, but usually ketones, ethers, esters, and hydrocarbons , Aromatic hydrocarbons and the like are used. Specifically, ketones such as methylethyl ketone and methyl isobutyl ketone; ethers such as ethyl ether and butyl ether; esters such as methyl acetate, ethyl acetate, methyl lactate, and ethyl lactate; hexane; Examples include hydrocarbons such as rohexane and octane, and aromatic hydrocarbons such as toluene, xylene and mesitylene.
  • the amount of the organic solvent may vary depending on the type of the solvent and the easily decomposable resin as long as it is sufficient to completely dissolve the easily decomposable resin.
  • an acrylic resin having oxidative decomposability is used as the easily decomposable resin and methylisobutylketone is used as the organic solvent
  • 1 to 10 parts by weight per 1 part by weight of the acrylic resin is used.
  • methyl isobutyl ketone is desirable to add methyl isobutyl ketone.
  • the organic solvent may be heated to a temperature lower than its boiling point in order to facilitate the dissolution of the easily decomposable resin.
  • the silica fine particles used are mixed in a state of being monodispersed in an organic solvent such as methylisobutylketone / methylethylketone.
  • the alkoxysilane can be mixed as it is, but may also be mixed in a state dissolved in an organic solvent such as methylisobutylketone.
  • the organic solvent used for dispersing the silica fine particles, dissolving the alkoxysilane, and dissolving the easily decomposable resin may be different or different as long as it does not cause phase separation. .
  • the amount of water used for the catalytic hydrolysis is 0.1 part by weight with respect to 1 part by weight of a mixed solution composed of silica fine particles, the alkoxysilane represented by the general formula (I), the easily decomposable resin, and the organic solvent. To 2 parts by weight, preferably 0.5 to 1.5 parts by weight. If the amount of water is less than 0.1 part by weight, the hydrolysis reaction will be extremely slow, and if it is more than 2 parts by weight, the hydrolysis reaction will be fast. The resulting polysiloxane tends to have poor stability over time.
  • an acid catalyst that is acidic in an aqueous solution
  • specific examples include inorganic acids such as hydrochloric acid, nitric acid, and sulfuric acid, organic acids such as acetic acid, oxalic acid, and toluenesulfonic acid, and metal soaps.
  • the amount of the acid catalyst varies depending on the type of the selected catalyst.
  • the water and the acid catalyst may be added separately under the above conditions, but it is preferable to mix them to form an acid catalyst-containing aqueous solution and then add them. In this case, when the temperature rises due to the heat of mixing of water and the acid catalyst, it is preferable to use the catalyst after cooling it to the operating temperature or lower of the catalytic hydrolysis reaction.
  • water and an acid catalyst or an aqueous solution containing an acid catalyst are added to a mixture of the silica fine particles as described above, the alkoxysilane represented by the general formula U), and the easily decomposable resin solution. It is desirable to carry out the reaction at a temperature of about 80 ° C. or less, preferably 50 ° C. or less, for 0.5 to 5 hours, preferably 0.5 to 3 hours under stirring conditions.
  • the water and the acid catalyst or the aqueous solution containing the acid catalyst are added little by little over the above-mentioned time. It may be added, but it is desirable to add the whole amount at once to the mixture.
  • an interpenetrating polymer composition comprising a polysiloxane having a hydrolyzate of alkoxysilane bonded to the surface of silica fine particles and a readily decomposable resin is formed.
  • the coating liquid for forming a low dielectric constant silica-based coating film according to the present invention comprises the polymer composition or the interpenetrating polymer composition as described above in an organic solvent in an amount of 5 to 30% by weight, preferably 10 to 30% by weight. It is contained in an amount of 25% by weight.
  • organic solvents such as ketones, ethers, esters, hydrocarbons, and aromatic hydrocarbons can be used without any particular limitation.
  • the solution containing the polymer composition or the interpenetrating polymer composition obtained by the above method may be used as a coating solution as it is.
  • -Solvent replacement with methyl isobutyl ketone, etc. again using evaporator, etc. to remove the alcohol, dissolved water, acid catalyst, etc. generated by the hydrolysis reaction, and then proceed with the interpenetrating polymer composition It is desirable to use the substance after adjusting its concentration.
  • the coating solution for forming a low dielectric constant silica-based film according to the present invention may contain a filler, and the filler may be a porous alumina, a myriki, or a kaolin. , Talc and the like.
  • the coated substrate according to the present invention is obtained by applying the above-described coating solution for forming a low dielectric constant silica-based coating on a substrate and then heating the coated solution to form the polymer composition or the above-mentioned polymer composition contained in the coating. It is obtained by decomposing or volatilizing the easily decomposable resin constituting the intrusion type polymer composition.
  • a general method such as a spray method, a spin coat method, a dip coat method, a roll coat method, and a transfer printing method can be employed.
  • the heating temperature after coating is preferably in the range of 50 to 200 ° C., and more preferably in the range of 80 to 150 ° C. This heating is preferably performed in an atmosphere of an inert gas such as nitrogen over a period of 1 to 10 minutes, although it varies depending on the thickness of the film.
  • the flatness of the obtained film is improved.
  • a coating is formed using the coating solution for forming a low dielectric constant silica-based coating according to the present invention, reflow properties due to low viscosity can be maintained up to about 150 ° C. For this reason, a coating film with further improved flatness of the substrate surface can be obtained.
  • the thickness of the low-dielectric-constant silica-based coating formed in this manner varies depending on the base material on which the coating is formed and its purpose.
  • the thickness of the silicon-based coating on a silicon substrate in a semiconductor device is usually 100 to 1000 ⁇ m. It is about 250 OA, and it is usually 300 to 100 A in the case of a multilayer wiring.
  • the decomposition or volatilization of the easily decomposable resin constituting the interpenetrating polymer composition contained in the coating is performed by heat treatment or ultraviolet, infrared, electron beam, It is performed by irradiating X-rays or oxygen plasma.
  • the decomposition of the easily decomposable resin may be oxidative decomposition or thermal decomposition.
  • the heat treatment is performed at a temperature of 500 ° C. or less and a temperature at which the easily decomposable resin volatilizes or decomposes.
  • the heat treatment is desirably performed at a temperature equal to or higher than the temperature at which the coated film is heated. Further, this heat treatment is preferably performed over 10 to 30 minutes, although it depends on the type of the easily decomposable resin, the film thickness of the coating, and the like. In this case, if the heat treatment temperature exceeds 500 ° C., the aluminum wiring and copper wiring constituting the semiconductor substrate may be oxidized or melted, which may damage the wiring layer. It is desirable that the temperature be kept at 500 ° C. or lower.
  • the easily decomposable resin When the easily decomposable resin is oxidatively decomposed by the heat treatment, it is usually preferable to perform the heat treatment in an oxygen-containing gas atmosphere.
  • the heat treatment may be performed under an inert gas atmosphere, such as nitrogen, even in an oxygen-containing gas atmosphere as long as the temperature is at or above the temperature at which the easily decomposable resin is volatilized. It may be below.
  • a low-density low-dielectric-constant silica-based coating film having no pores with a diameter of 1 ⁇ (10 OA) or more is formed.
  • Such a silica-based coating is resistant to stains into the vacancies of the etching gas component during etching and does not deteriorate the film quality due to plasma irradiation, and has the characteristics of high film strength. are doing.
  • the substrate with a low dielectric constant silica-based coating includes a semiconductor device, a liquid crystal display device, and a photomask with a phase shifter. It is used as a substrate on which a low-dielectric-constant coating is formed on a circuit board, between wiring layers having a multilayer wiring structure, on the element surface, or at the PN junction.
  • a low-density insulating film having a small relative dielectric constant of 3 or less and excellent in etching workability and the like can be formed.
  • silica-based coating Like the conventional coating solution, even when a silica-based coating was formed from one containing a hydrolyzate of alkoxysilane or halogenated silane or silica-based fine particles as a coating-forming component, it was bonded to Si atoms. hydrogen Although low cross-linking density of Si-O-Si bonds in the coating due to interatomic pores of atoms, fluorine atoms, organic groups, or silica fine particles, a low dielectric constant coating can be obtained. Silica-based coatings having functional groups have poor plasma resistance, so film quality deteriorates during etching, and a stable low-dielectric-constant coating may not be obtained. It also has the disadvantage of poor adhesion to the surface to be coated.
  • the film quality is deteriorated by oxygen plasma during plasma etching or resist stripping, and the coating is deteriorated. It is possible to prevent stains of the etching gas component from entering the surface.
  • tetraethoxyethoxysilane ethyl silicate-28, manufactured by Tama Chemical Industry
  • methanol 298.85 g water / methanol weight ratio of 2Z8 One mixed solution (2,450 g) plus tetraethoxysilane (5,3,2.5 g)) and a 0.25 wt. 596.4 g of ammonia water was added simultaneously over 52 hours. After the addition was completed, the mixture was further aged at this temperature for 3 hours. Then, ultrafiltration was used to remove unreacted tetraethoxysilane, methanol and ammonia, and at the same time pure water was added for purification.
  • tetraethoxyethoxysilane ethyl silicate-28, manufactured by Tama Chemical Industry
  • a condensation reaction was carried out in an autoclave at a temperature of 300 ° C for 10 hours, and then an amphoteric ion exchange resin (AG-501, Bio-Rad) To obtain a silica fine particle dispersion having an average particle diameter of 30 nm.
  • MIBK methylisobutyl ketone
  • MIBK dispersion of silica fine particles obtained as described above and triethoxysilane are mixed in a MIBK solution of an acrylic resin in which MIBK is dissolved at a predetermined ratio as shown in Table 1.
  • the mixture was mixed to obtain 100 g of a mixed solution.
  • the number average molecular weight of this acrylic resin was 2190.
  • a coating solution for forming a film (a reaction of silica fine particles and a hydrolyzate of triethoxysilane) according to the method of Example 1 of Japanese Patent Application Laid-Open No. Hei 9-315158 Example of Kaihei 8 — 3 3 0 3 0
  • a coating solution for film formation (a material for organic SOG made by Hitachi Chemical Co., Ltd. to which a gas-generating substance consisting of 3,3'-dimethoxy-4,4'-diazidodiphenyl) was prepared by the method of 1. . -1
  • X is the weight of the silica fine particles
  • ⁇ is Alkoki
  • Z represents the weight of the acrylic resin.
  • a 6-inch silicon wafer (substrate) was applied by spin coating, and heated at 150 ° C for 3 minutes in a nitrogen gas atmosphere. Then, the film was heat-treated at a temperature of 400 ° C. for 30 minutes in an oxygen-containing gas (nitrogen gas to which 5% by volume of oxygen was added) to form a film. The thickness of each of the obtained films was 500 OA.
  • Coating liquid 9 2.5 Multi 21 15 As is evident from Table 2, when the coating liquids 5 to 5 according to the present invention were used, a film having a relative dielectric constant of 3 or less was obtained, and the amount of water adsorbed on the film after oxygen plasma irradiation was also reduced. It was at a fairly low level.
  • a coating film having pores having a relatively large diameter is formed for the coating solution ⁇ ⁇ containing a large amount of easily decomposable resin, and a coating film ⁇ ⁇ having a relatively large diameter is formed for the coating solution ⁇ ⁇ containing a large amount of silica fine particles.
  • a film having pores composed of and having a weak bonding force of polysiloxane was formed, so that the strength of the film was reduced in any case, but the water adsorption amount was at a low level.
  • coating solutions I and II were used, a film having a relative dielectric constant of 3 or less was obtained, but the amount of water adsorbed on the film after oxygen plasma irradiation was at a considerably high level.
  • the porosity of the coating film obtained by using the coating liquids ⁇ ⁇ ⁇ to 5 according to the present invention was evaluated by the SEM method and the BJH method, the porosity having a diameter of 10 nm or more was present. I knew it wasn't. However, in the coating films obtained by using the coating solutions I and II according to the present invention, voids having a diameter of 10 nm or more were observed. The average pore diameter of the pores contained in the coating was measured by the BJH method. Indicated.
  • the use of the coating solution for forming a low dielectric constant silica-based film according to the present invention provides a substrate with a low dielectric constant film having a low density film having excellent oxygen plasma resistance and other process compatibility. It turned out to be possible.

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Abstract

La présente invention concerne un fluide de revêtement capable de former un film de revêtement à base de silice présentant une permittivité relative de faible niveau, égal ou inférieur à 3, et une faible densité, ainsi qu'une excellente résistance au plasma d'oxygène, et convenant à d'autres traitements; cette invention concernant également un substrat avec film de revêtement présentant de tels propriétés. Le fluide de revêtement est caractérisé en ce qu'il renferme une composition polymère contenant (i) un polysiloxane, produit de réaction de fines particules de silice avec un hydrolysat d'au moins un alcoxysilane représenté par la formule générale (I) XnSi(OR)4-n, et (ii) une résine facilement décomposable. Dans cette formule, X représente hydrogène, fluorine, C1-8 alkyle, fluoroalkyle, aryle, ou vinyle; R représente hydrogène, C1-8 alkyle, aryle, ou vinyle; et n représente un nombre entier compris entre 0 et 3.
PCT/JP1999/004050 1998-09-01 1999-07-28 Fluide de revetement pour preparer un film de revetement a base de silice a faible permittivite et substrat avec film de revetement a faible permittivite Ceased WO2000012640A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP99933134.1A EP1026213B1 (fr) 1998-09-01 1999-07-28 Fluide de revetement pour preparer un film de revetement a base de silice a faible permittivite et substrat avec film de revetement a faible permittivite
US09/530,437 US6639015B1 (en) 1998-09-01 1999-07-28 Coating liquid for forming a silica-containing film with a low-dielectric constant
KR1020007004584A KR100618301B1 (ko) 1998-09-01 1999-07-28 낮은 유전상수를 지니는 실리카-포함 필름을 형성하기위한 코팅 액체 및 그의 필름으로 코팅된 기질
US10/649,575 US6893726B2 (en) 1998-09-01 2003-08-26 Substrate coated with silica-containing film with low-dielectric constant

Applications Claiming Priority (4)

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JP10/247430 1998-09-01
JP24743098 1998-09-01
JP9636799 1999-04-02
JP11/96367 1999-04-02

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US09530437 A-371-Of-International 1999-07-28
US10/649,575 Division US6893726B2 (en) 1998-09-01 2003-08-26 Substrate coated with silica-containing film with low-dielectric constant

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