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WO2000068973A3 - Anlage zur bearbeitung von wafern - Google Patents

Anlage zur bearbeitung von wafern Download PDF

Info

Publication number
WO2000068973A3
WO2000068973A3 PCT/DE2000/001451 DE0001451W WO0068973A3 WO 2000068973 A3 WO2000068973 A3 WO 2000068973A3 DE 0001451 W DE0001451 W DE 0001451W WO 0068973 A3 WO0068973 A3 WO 0068973A3
Authority
WO
WIPO (PCT)
Prior art keywords
wafers
units
measuring units
cassettes
manufacturing cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2000/001451
Other languages
English (en)
French (fr)
Other versions
WO2000068973A2 (de
Inventor
Michael Goetzke
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Infineon Technologies AG
Original Assignee
Infineon Technologies AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies AG filed Critical Infineon Technologies AG
Priority to EP00940170A priority Critical patent/EP1177573A2/de
Publication of WO2000068973A2 publication Critical patent/WO2000068973A2/de
Publication of WO2000068973A3 publication Critical patent/WO2000068973A3/de
Priority to US10/015,150 priority patent/US6809510B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H10P72/0612—
    • H10P72/0468—
    • H10P72/3216—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • General Factory Administration (AREA)

Abstract

Die Erfindung betrifft eine Anlage zur Bearbeitung von Wafern in wenigstens einem Reinraum (3) mit einer Anordnung von Fertigungseinheiten (1) und Meßeinheiten (2), welche über ein Transportsystem zum Transport von Kassetten mit Wafern verbunden sind. Mehrere funktionell zugeordnete Fertigungs (1) und/oder Meßeinheiten (2) sind zu einer Fertigungszelle (4) zusammengefaßt, welche eine Be- und Entladestation (7) zur An- und Ablieferung von Kassetten mit Wafern aufweist. Innerhalb der Fertigungszelle (4) sind den Fertigungs- (1) und/oder Meßeinheiten (2) einzelne Wafer zur Bearbeitung zuführbar.
PCT/DE2000/001451 1999-05-07 2000-05-05 Anlage zur bearbeitung von wafern Ceased WO2000068973A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP00940170A EP1177573A2 (de) 1999-05-07 2000-05-05 Anlage zur bearbeitung von wafern
US10/015,150 US6809510B2 (en) 1999-05-07 2001-11-07 Configuration in which wafers are individually supplied to fabrication units and measuring units located in a fabrication cell

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19921245.7 1999-05-07
DE19921245A DE19921245C2 (de) 1999-05-07 1999-05-07 Anlage zur Bearbeitung von Wafern

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/015,150 Continuation US6809510B2 (en) 1999-05-07 2001-11-07 Configuration in which wafers are individually supplied to fabrication units and measuring units located in a fabrication cell

Publications (2)

Publication Number Publication Date
WO2000068973A2 WO2000068973A2 (de) 2000-11-16
WO2000068973A3 true WO2000068973A3 (de) 2001-03-15

Family

ID=7907411

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/001451 Ceased WO2000068973A2 (de) 1999-05-07 2000-05-05 Anlage zur bearbeitung von wafern

Country Status (5)

Country Link
US (1) US6809510B2 (de)
EP (1) EP1177573A2 (de)
DE (1) DE19921245C2 (de)
TW (1) TW497116B (de)
WO (1) WO2000068973A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10163477B4 (de) * 2001-12-21 2004-01-08 Siemens Ag Transportmodul
JP4170864B2 (ja) * 2003-02-03 2008-10-22 大日本スクリーン製造株式会社 基板処理装置および基板処理装置における基板搬送方法および基板処理方法
DE10326338A1 (de) * 2003-06-05 2004-12-30 Infineon Technologies Ag Halbleiter-Bauelement-Test-Verfahren, sowie Test-System zum Testen von Halbleiter-Bauelementen
DE10328709A1 (de) * 2003-06-24 2005-01-27 Infineon Technologies Ag Halbleiter-Bauelement-Test-Verfahren, sowie Test-System zum Testen von Halbleiter-Bauelementen
JP4670808B2 (ja) * 2006-12-22 2011-04-13 ムラテックオートメーション株式会社 コンテナの搬送システム及び測定用コンテナ
US8108989B2 (en) * 2007-06-28 2012-02-07 Crown Equipment Corporation Manufacturing cell and elements of the cell
CN110745530A (zh) * 2018-07-24 2020-02-04 深圳市矽电半导体设备有限公司 一种物料传输自动线及其自动进出料方法
US20210020635A1 (en) * 2019-07-17 2021-01-21 Nanya Technology Corporation Semiconductor structure and method of formation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0359525A2 (de) * 1988-09-14 1990-03-21 Fujitsu Limited System zum kontinuierlichen Behandeln von Halbleitersubstraten
US5164905A (en) * 1987-08-12 1992-11-17 Hitachi, Ltd. Production system with order of processing determination
US5202716A (en) * 1988-02-12 1993-04-13 Tokyo Electron Limited Resist process system
US5536128A (en) * 1988-10-21 1996-07-16 Hitachi, Ltd. Method and apparatus for carrying a variety of products

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5495417A (en) * 1990-08-14 1996-02-27 Kabushiki Kaisha Toshiba System for automatically producing different semiconductor products in different quantities through a plurality of processes along a production line
JPH0616206A (ja) * 1992-07-03 1994-01-25 Shinko Electric Co Ltd クリーンルーム内搬送システム
JPH07297258A (ja) * 1994-04-26 1995-11-10 Tokyo Electron Ltd 板状体の搬送装置
JP3185595B2 (ja) * 1995-04-03 2001-07-11 株式会社ダイフク 基板仕分け装置を備えた荷保管設備
DE19514037C2 (de) * 1995-04-13 1997-09-04 Leybold Ag Transportvorrichtung
US5777876A (en) * 1995-12-29 1998-07-07 Bull Hn Information Systems Inc. Database manufacturing process management system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5164905A (en) * 1987-08-12 1992-11-17 Hitachi, Ltd. Production system with order of processing determination
US5202716A (en) * 1988-02-12 1993-04-13 Tokyo Electron Limited Resist process system
EP0359525A2 (de) * 1988-09-14 1990-03-21 Fujitsu Limited System zum kontinuierlichen Behandeln von Halbleitersubstraten
US5536128A (en) * 1988-10-21 1996-07-16 Hitachi, Ltd. Method and apparatus for carrying a variety of products

Also Published As

Publication number Publication date
EP1177573A2 (de) 2002-02-06
DE19921245A1 (de) 2000-11-16
DE19921245C2 (de) 2003-04-30
US6809510B2 (en) 2004-10-26
US20020064954A1 (en) 2002-05-30
TW497116B (en) 2002-08-01
WO2000068973A2 (de) 2000-11-16

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