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WO1999004481A1 - Unite d'excitation, moteur lineaire ou plan utilisant l'unite, dispositif a etage utilisant le moteur et dispositif d'alignement utilisant le dispositif - Google Patents

Unite d'excitation, moteur lineaire ou plan utilisant l'unite, dispositif a etage utilisant le moteur et dispositif d'alignement utilisant le dispositif Download PDF

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Publication number
WO1999004481A1
WO1999004481A1 PCT/JP1998/002761 JP9802761W WO9904481A1 WO 1999004481 A1 WO1999004481 A1 WO 1999004481A1 JP 9802761 W JP9802761 W JP 9802761W WO 9904481 A1 WO9904481 A1 WO 9904481A1
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WO
WIPO (PCT)
Prior art keywords
unit
magnetic
magnetic pole
stage
permanent magnets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP1998/002761
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English (en)
Japanese (ja)
Inventor
Keiichi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP50686099A priority Critical patent/JP3829335B2/ja
Priority to AU80370/98A priority patent/AU8037098A/en
Publication of WO1999004481A1 publication Critical patent/WO1999004481A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2201/00—Specific aspects not provided for in the other groups of this subclass relating to the magnetic circuits
    • H02K2201/18—Machines moving with multiple degrees of freedom
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N15/00—Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for

Definitions

  • the present invention relates to a linear motor that can move linearly on a plane or a planar motor that can move two-dimensionally, a stage device using the same, and an exposure device using the same.
  • Prior art disclosing structures moving on the X-Y plane include, for example, those disclosed in Japanese Patent Application Laid-Open No. 62-110413 and U.S. Pat. No. 4,742,286. No. 5,867,597, US Pat. No. 4,867,597 and US Pat. There is an electromagnetic alignment device disclosed in US Pat. No. 4,835,378 and US Pat. No. 4,535,275. There is a disclosed two-dimensional drive. In these, the mover floats on an air bearing or the like and moves on the XY plane. Further, as a structure in which the mover is magnetically levitated and moves on the XY plane, a structure disclosed in Japanese Patent Application Laid-Open No. 2-359709 and U.S. Pat.
  • Japanese Patent Publication No. 51-492833 discloses a projection having a stator and an armature coil in which the N and S poles of a permanent magnet are arranged densely or at regular intervals.
  • a planar motor including a mover having a plurality of teeth.
  • planar motors are mainly applied to stage devices that move two-dimensionally in the XY plane, and are used to place a predetermined object on the mover and move in the XY plane.
  • a stage device using such a planar motor has a possibility of being applied to a stage system of an exposure device used for manufacturing a semiconductor device or the like (here, an exposure device is a semiconductor device). It is used in the photolithography process when manufacturing liquid crystal display devices or thin-film magnetic heads, etc., and is a device for accurately transferring a circuit pattern to a photosensitive substrate.
  • a projection exposure apparatus that projects and exposes a circuit pattern formed on a reticle onto a semiconductor wafer or a glass plate (hereinafter, referred to as a wafer) via a projection optical system is mainly used.
  • a projection optical system that projects and exposes a circuit pattern formed on a reticle onto a semiconductor wafer or a glass plate (hereinafter, referred to as a wafer) via a projection optical system.
  • a projection optical system There are various methods, for example, in the case of semiconductor device manufacturing, an image file that can project the entire reticle circuit pattern at once.
  • a projection exposure system that exposes the wafer in a step-and-repetitive manner through a projection optical system that has a ⁇
  • a flat type pallet that moves in one plane with one drive unit without separating each axial drive part
  • the armature coil is provided on the mover side, so that it becomes heavy, and there is a limit to moving the mover at high speed.
  • the mover moves on the stator while being supported by air floating or a support guide mechanism. Therefore, there is also a problem that a complicated mechanism for lifting or supporting is required.
  • An object of the present invention is to provide a linear or flat motor capable of obtaining a high thrust, having a light weight and capable of moving at a high speed.
  • Another object of the present invention is to provide a planar motor capable of moving a two-dimensional plane while giving a floating force to the mover.
  • an object of the present invention is to provide a planar motor capable of controlling the position and posture of the mover in three directions of X, YZ and the rotational directions of those axes, for a total of six degrees of freedom.
  • an object of the present invention is to provide a stage device using a planar motor capable of obtaining a high thrust, having a light weight and capable of moving at a high speed, and an exposure apparatus using the same.
  • Another object of the present invention is to move a two-dimensional plane while giving a floating force to the mover. It is an object of the present invention to provide a stage device using a flat-type motor and an exposure apparatus using the same.
  • an object of the present invention is to provide a stage device using a planar motor capable of controlling the position and orientation of the mover in three directions of X, Y, and ⁇ ⁇ ⁇ and a total of six degrees of freedom in the directions of rotation of those axes,
  • An object of the present invention is to provide an exposure apparatus using the same. Disclosure of the invention
  • the above-mentioned object is to form a pair with a magnetic pole unit having a plurality of permanent magnets arranged with the magnetic poles being alternately reversed, and to be used in a linear motor, and to form two substantially linearly formed arms.
  • a magnetic member having three protruding teeth formed at a distal end of each arm and a base end to which each arm is connected so as to face a plurality of permanent magnets of the magnetic pole unit; This is achieved by an excitation unit characterized by having two armature coils wound around each of the coils.
  • the above-mentioned object is to provide a linear motor having a plurality of permanent magnets arranged alternately with their magnetic poles reversed in a linear motor driven linearly, and the above-mentioned excitation unit. Achieved by a mold motor.
  • the plurality of permanent magnets of the magnetic pole unit have a width of 1 in the linear direction, and the centers of the permanent magnets are linearly spaced apart by a distance of 21. It is characterized in that the two protruding teeth of the portion are displaced from the protruding tooth of the base end by a distance of 1 ⁇ 2 relative to the linear direction.
  • the above-mentioned object is used in a plane type motor in combination with a magnetic pole unit having a plurality of permanent magnets arranged on the X- ⁇ plane by alternately reversing the directions of the magnetic poles.
  • Four arms, each of which has a substantially cross shape in the direction, are formed at the distal end of each arm and the base end where each arm is connected so as to face the plurality of permanent magnets of the pole unit.
  • the present invention is attained by an excitation unit having a magnetic member having five protruding teeth and four armature coils wound around each arm.
  • the object is to provide a magnetic field unit having a plurality of permanent magnets arranged on a plane by alternately reversing the directions of magnetic poles in a planar motor driven by a plane drive, and the excitation unit described above.
  • C achieved by a planar motor characterized by comprising
  • the plurality of permanent magnets of the magnetic pole unit have a width of 1 in the X and Y directions in the XY plane, and the centers of the permanent magnets are separated by a distance of 21 in the X and Y directions, respectively.
  • the two protruding teeth of the two arms extending in the X direction of the excitation unit are displaced relative to the protruding teeth of the base end by 1/2 of the soil in the X direction.
  • the two protruding teeth of the two arms extending in the direction are characterized by being displaced from the protruding teeth of the base end by 1/2 of the soil relative to the Y direction.
  • the permanent magnet whose magnetic axis is oriented in the direction of the magnetic pole of the permanent magnet is embedded between the plurality of permanent magnets in which the magnetic poles of the magnetic pole unit are reversed.
  • the plurality of permanent magnets spaced apart in the X direction of the magnetic pole unit between the plurality of permanent magnets spaced apart in the X direction of the magnetic pole unit, permanent magnets whose magnetic axes are oriented in the X direction are embedded, and a plurality of permanent magnets spaced in the Y direction are embedded.
  • the permanent magnets whose magnetic axes are oriented in the Y direction are embedded between the permanent magnets, and are surrounded by permanent magnets whose magnetic axes are oriented in the X direction and permanent magnets whose magnetic axes are oriented in the Y direction.
  • a conductor and a non-magnetic member are embedded in the region.
  • a conductor and a non-magnetic member are embedded in a region surrounded by a permanent magnet whose magnetic axis is oriented in the X direction and a permanent magnet whose magnetic axis is oriented in the Y direction.
  • a magnetic flux passes through a non-magnetic member, an eddy current is generated in the member, and the eddy current generates a magnetic flux in a direction to cancel the magnetic flux. That is, it is possible to efficiently form a magnetic flux loop by reducing the leakage of magnetic flux between the magnetic pole unit and the excitation unit.
  • a plurality of excitation units are fixed at predetermined positions to form a stator, and a magnetic pole unit is movable with respect to the stator. It is characterized by being used.
  • each excitation unit of the stator is disposed below the mover with the teeth facing upward, and the mover is configured with the plurality of permanent magnets facing downward. It is characterized by being arranged to face the protruding teeth. This makes it possible to obtain a small, lightweight, planar mover, and to drive the mover with less power.
  • each excitation unit of the stator is disposed below the mover with five protruding teeth facing upward, and the mover is configured such that a plurality of permanent magnets face downward and protrude. You may make it arrange
  • a pair of at least two excitation units arranged at a distance of 1 relative to each other in the X and Y directions is provided, and a predetermined current flowing through the four armature coils of each excitation unit is switched.
  • a thrust for relatively moving the magnetic pole unit in a predetermined direction in the XY plane is generated, or a magnetic repulsive force for magnetically levitating in the Z direction is generated.
  • a predetermined amount distance 1
  • the stator has a drive unit configured by combining at least two of the sets, and the drive unit causes the mover to move in a predetermined direction in the XY plane. It is characterized by generating a thrust to move and a magnetic repulsion to magnetically levitate in the Z direction. With such a drive unit, it becomes possible to generate a thrust for moving in the XY plane and at the same time to relatively float the magnetic pole unit.
  • the five teeth of the stator are arranged above the mover with the downward facing, and the mover is arranged so that a plurality of permanent magnets face upward with the permanent teeth, and the four electric motors of the stator are arranged.
  • the movable member may be floated by magnetic attraction between the plurality of permanent magnets of the mover and the five teeth of the stator. In this way, the drive of the mover can be controlled with less power, and the mover can be easily and accurately moved.
  • the stator has at least three drive units distributed in a plane, and the three drive units rotate in the X, Y, ⁇ axis directions and around each axis with respect to the stator.
  • the position and orientation of the mover are controlled with 6 degrees of freedom.
  • the stage can be displaced in the X, ⁇ , and ⁇ axis directions and rotated around those axes.
  • Position and attitude can be controlled with 6 degrees of freedom.
  • the teeth at the tips of the protruding teeth are formed in a sharp shape.
  • the tip of the tip of these teeth it is possible to obtain a thrust characteristic that changes sinusoidally in a non-excited state, and the tip of a plurality of excitation units in the drive unit is given a tip.
  • the thrust can be smoothed.
  • the object is to provide a stage device having a stage on which a substrate is mounted and a drive system for driving the stage, wherein the drive system controls the position of the stage in the X and ⁇ axis directions.
  • the magnetic pole units for the linear motor are arranged in the X and ⁇ directions, and the excitation unit for the linear motor is arranged in the X and ⁇ directions as a drive system so as to face the magnetic pole unit.
  • a stage device characterized in that It also has a stage on which the substrate is placed, and a drive system for driving the stage.
  • the drive system allows the stage position and orientation with six degrees of freedom in the X, ⁇ , and ⁇ axis directions and rotation around each axis.
  • a stage device for controlling a stage wherein a movable element of any of the above-mentioned planar motors is used as a stage, and a stator of any of the above-mentioned planar motors is used as a drive system. This is achieved by the device. Further, the above object is achieved by the above stage device of the present invention, further comprising a cooling mechanism for cooling the excitation unit.
  • the above object is achieved by an exposure apparatus for transferring an image of a pattern onto a substrate, the exposure apparatus having the above-mentioned stage apparatus as a stage apparatus for mounting and moving the substrate.
  • the exposure apparatus of the present invention includes a column that supports a projection optical system that projects a pattern image on a substrate via a vibration isolation mechanism, and a fixed frame that supports a drive system of the stage device. It is characterized in that the force does not reach the projection optical system.
  • the above object is also achieved by forming the excitation unit in a substantially linear shape in the method of assembling the excitation unit.
  • a magnetic body portion having two arms and three protruding teeth formed at a distal end of each arm and a base end to which each arm is connected so as to face a plurality of permanent magnets of the magnetic pole unit.
  • This is achieved by a method of assembling an excitation unit, which comprises assembling a material and two armature coils wound around respective arms.
  • the above object is also achieved by assembling the excitation unit by forming four arms each having a substantially cross shape in the X-Y direction as a whole, and forming a tip end of each arm and a base end to which each arm is connected.
  • This is achieved by a method of assembling an excitation unit, which comprises assembling a magnetic member having five protruded teeth and four armature coils wound around each arm.
  • the object is to provide a method of assembling a linear motor, in which two arms formed in a substantially straight line and a front end of each arm and each arm are opposed to a plurality of permanent magnets of a magnetic pole unit.
  • a magnetic member having three protruding teeth formed at the base end where the parts are connected, and an excitation unit assembling two armature coils wound around each arm, and alternately magnetic poles This is achieved by a method of assembling a linear motor, which comprises assembling a magnetic pole unit having a plurality of permanent magnets arranged in a reversed direction.
  • the object is to provide a method of assembling a planar motor, comprising: a magnetic pole unit having a plurality of permanent magnets arranged on an XY plane by alternately reversing the directions of magnetic poles; Four cross-shaped arms and five protruding teeth formed at the distal end of each arm and at the base end where each arm is connected so as to face the multiple permanent magnets of the pole unit And an excitation unit having four armature coils wound around each of the arm portions, and assembling the same.
  • the above object has a stage on which a substrate is placed, and a drive system for driving the stage, and the drive system controls the stage in six degrees of freedom of rotation in X, ⁇ , and Z axis directions and around each axis.
  • the movable element of the planar motor of the present invention is assembled as a stage
  • the stator of the planar motor of the present invention is assembled as a drive system. This is achieved by a method of assembling the stage device.
  • FIG. 1 is a perspective view showing a schematic structure of a planar motor according to a first embodiment of the present invention.
  • FIG. 2 is a diagram showing a schematic structure of an excitation unit of the flat motor according to the first embodiment of the present invention.
  • FIG. 3 is a plan view showing a schematic structure of a magnetic pole unit of the flat motor according to the first embodiment of the present invention.
  • FIG. 4 is a cross-sectional view of a plane type module cut along line AA in FIG. 3 according to the first embodiment of the present invention.
  • FIG. 5 is a perspective view for explaining a positional relationship between five protruding teeth of the excitation unit 6 facing the magnetic pole unit 14 in the first embodiment of the present invention.
  • FIG. 6 is a view for explaining a moving operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 7 is a diagram illustrating a moving operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 8 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 9 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 10 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 11 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 12 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 13 is a view for explaining the moving operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 14 is a view showing the movement of the mover in the planar motor according to the first embodiment of the present invention. It is a figure explaining a dynamic operation.
  • FIG. 15 is a diagram showing an example of arrangement of exemplary units in the planar motor according to the first embodiment of the present invention.
  • FIG. 16 is a diagram illustrating a floating operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 17 is a view for explaining the floating operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 18 is a diagram illustrating the floating operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 19 is a view for explaining the floating operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 20 is a diagram illustrating a floating operation of the mover in the planar motor according to the first embodiment of the present invention.
  • FIG. 21 is a diagram illustrating an operation of controlling the mover with six degrees of freedom in the planar motor according to the first embodiment of the present invention.
  • FIG. 22 is a perspective view showing a schematic structure of a planar motor according to the second embodiment of the present invention.
  • FIG. 23 is a partial cross-sectional view of a planar motor according to the second embodiment of the present invention.
  • FIG. 24 is a perspective view for explaining a positional relationship between five protruding teeth of the excitation unit 6 facing the magnetic pole unit 14 in the second embodiment of the present invention.
  • FIG. 25 is a view for explaining the moving operation of the mover in the planar motor according to the second embodiment of the present invention.
  • FIG. 26 is a view for explaining the moving operation of the mover in the planar motor according to the second embodiment of the present invention.
  • FIG. 27 is a view for explaining the moving operation of the mover in the planar motor according to the second embodiment of the present invention.
  • FIG. 28 is a diagram showing the structure of the excitation unit 6 in the planar motor according to the third embodiment of the present invention.
  • FIG. 29 shows an excitation unit in a planar motor according to the third embodiment of the present invention.
  • FIG. 9 is a diagram for explaining the operation of the step 6.
  • FIG. 30 is a diagram for explaining the operation of the excitation unit 6 in the planar motor according to the third embodiment of the present invention.
  • FIG. 31 is a diagram showing a modification of the excitation unit 6 in the third embodiment of the present invention.
  • FIG. 32 is a diagram illustrating a schematic structure of an exposure apparatus according to a fourth embodiment of the present invention.
  • FIG. 33 is a diagram illustrating a schematic structure of a stage device according to a fourth embodiment of the present invention.
  • FIG. 34 is a diagram illustrating a schematic structure of a stage device according to a fourth embodiment of the present invention.
  • a planar motor according to a first embodiment of the present invention will be described with reference to FIGS. 1 to 21.
  • a plurality of excitation units are fixed at predetermined positions to form a stator, and the magnetic pole unit is used as a movable element movable with respect to the stator.
  • Each excitation unit of the stator is arranged below the mover with five teeth facing upward, and the mover is arranged with a plurality of permanent magnets facing downward to face the teeth.
  • FIG. 1 is a perspective view of a flat type module according to the present embodiment.
  • the configuration of the planar module according to the present embodiment is roughly divided into a stator unit 2 and a mover 4.
  • the stator unit 2 a plurality of excitation units 6 are fixed on a flat base 8 extending in the XY plane, and a planar sliding member 10 is provided on the upper surface thereof.
  • the mover 4 has a magnetic pole unit 14 composed of a plurality of permanent magnets arranged in a matrix on an XY plane, and is fixed to the upper surface of the magnetic pole unit 14 to be a non-magnetic and non-conductive material.
  • a substrate 12 is a substrate 12.
  • the movable element 4 on the sliding member 10 is Floating in the Z direction and sliding member 10 above
  • the substrate 12 can also be leveled.
  • FIG. 2A is a plan view of the excitation unit 6 as viewed from the + Z direction to the 1Z direction in the coordinate system shown in FIG. Fig. 2 (b) is the side view, and Fig. 2 (c) is the front view.
  • the excitation unit 6 in the present embodiment has four arms 20, 22, 24, 26, each of which has a substantially cross shape in the X-Y direction as a whole. Five protruding teeth 28, 30, 30 protruding in the + Z direction from the base end (the center of the cross) to which the tip of 20 to 26 and each arm 20 to 26 are connected.
  • each armature coil 38 to 44 is connected to a current source, and each armature coil 38 of each excitation unit 6 is controlled by a command sent from the control system (not shown) to the current source.
  • a predetermined current can be supplied to ⁇ 44.
  • FIG. 3 is a plan view of the magnetic pole unit 14 seen from one direction toward the + Z direction in the coordinate system shown in FIG. This plan view shows a surface of the magnetic pole unit 14 facing each tooth of the excitation unit 6.
  • the magnetic pole unit 14 according to the present embodiment has a cubic permanent magnet 50 N, 50 S whose magnetic poles are reversed with respect to each other to form a matrix on the XY plane. Multiple are arranged in a shape.
  • the permanent magnet 5 ON has an N pole on the side facing each tooth of the excitation unit 6, and the permanent magnet 5 OS has an S pole on the side facing each tooth of the excitation unit 6.
  • the plurality of permanent magnets 50 N, 50 S of the magnetic pole unit 14 have a square shape having a width of 1 in the X and Y directions in the XY plane, and are adjacent to each other.
  • the centers of 0 S are arranged at a distance of 21 in the X and Y directions, respectively.
  • a cubic permanent magnet 54 whose magnetic axis is oriented in the X direction is embedded between the plurality of permanent magnets 50 N and 5 OS that are separated in the X direction.
  • the magnetic poles of the stones 50N and 50S are arranged so that the magnetic poles face each other.
  • cubic permanent magnets 56 whose magnetic axes are oriented in the Y direction are embedded, respectively, and the magnetic poles are similar to those in the X direction.
  • the magnetic poles of the permanent magnets 50N and 50S face the same poles.
  • a cubic region surrounded by a permanent magnet 54 whose magnetic axis is oriented in the X direction and a permanent magnet 56 whose magnetic axis is oriented in the Y direction is embedded with a conductive and non-magnetic member 60.
  • the member 60 copper or aluminum can be used.
  • the magnetic axis is oriented in the X or Y direction between the permanent magnets 50 N and 5 OS arranged in a matrix at a distance.
  • the thrust given to the mover 4 or the magnetic flux given to the levitation force can be used with high efficiency. Also, by embedding a member 60 which is a conductor and a non-magnetic material in a region surrounded by the permanent magnets 54 and 56, the magnetic flux passing through the member 60 is canceled by the magnetic flux of the generated eddy current. Therefore, the leakage of magnetic flux between the magnetic pole unit 14 and the excitation unit 6 can be reduced, and a magnetic flux loop can be formed efficiently.
  • FIG. 4 is a cross-sectional view of the planar module according to the present embodiment, taken along a line AA in FIG. 3 showing the magnetic pole unit 14.
  • FIG. 5 is a perspective view for explaining the positional relationship between the five protruding teeth of the excitation unit 6 facing the magnetic pole unit 14.
  • a plurality of permanent magnets 50 N, 50 S of a magnetic pole unit 14 each having a width 1 and a lateral permanent magnet 54 whose magnetic axis is oriented in the X or Y direction are opposed to each other.
  • the two protruding teeth 28, 32 at the end of each of the excitation units 6 extending in the X direction are relatively positioned in the X direction relative to the protruding tooth 36 at the base end. — Offset by 1/2 and +1/2.
  • the two protruding teeth 3 0 and 3 4 of the two arms 2 2 and 2 6 extending in the Y direction are also 1/1 / relative to the protruding teeth 36 of the base end in the Y direction. 2, + 1/2 They are staggered. Therefore, as shown in FIG. 5, when the position of the tooth portion T5 of the protruding tooth 36 at the base end coincides with and faces the permanent magnet 50N (N pole) of the magnetic pole unit 14, The teeth T 1, T 2, ⁇ 3, ⁇ 4 of the projecting teeth 28 to 34 of the four arms are respectively connected to the permanent magnets 50 S (S pole) of the magnetic pole unit 14 facing each other. It overlaps in the direction or Y direction by 1/2.
  • the direction of the magnetic axes of the permanent magnets 54 and 56 of the magnetic pole unit 14 is partially shown by arrows or omitted.
  • FIGS. 6A to 8A are plan views showing the positions of the teeth of the excitation unit 6 with respect to the magnetic pole unit 14 of the mover 4, and the tooth portions T1 to T of the teeth 28-36 are shown. The position of 5 is shown.
  • (B) in FIGS. 6 to 8 shows a cross section in the X direction including the tooth portion T 5 of the excitation unit 6.
  • (C) shows a cross section in the Y direction including the tooth portion T5 of the excitation unit 6.
  • the tooth portion T1 also generates a thrust due to the magnetic repulsive force on the permanent magnet 50S.
  • Fig. 7 (c) only magnetic repulsion occurs in the Y direction, and the resultant forces are balanced and no thrust is generated in the Y direction.
  • the teeth T2 and T4 in the Y direction also generate magnetic attraction repulsive force to generate thrust.
  • Fig. 9 (b) specifies the direction of the current flowing through the armature coils 38 to 44 of the excitation unit 6. The-mark in the drawing indicates the direction from the page to the front of the page, and the X indicates the direction from the front of the page.
  • FIG. 10 shows the current application schedule of the current flowing through the armature coils 38 to 44 of the excitation unit 6 and the change in the polarity excited in each tooth.
  • the currents flowing through the armature coils 38, 40, 42, and 44 are the currents C1, C2, C3, and C4, respectively, as shown in FIG. 9B.
  • the vertical axis indicates the polarity excited in the tooth portion T 1 of the tooth 28.
  • Fig. 10 (e) shows the result of energizing each armature coil 38-44 as shown in Figs. 10 (a)-(d), which is generated at the tooth T5 of the tooth 36 at the base end. The change of the magnetic pole is shown.
  • the suction force acts to generate thrust.
  • Fig. 11 shows the thrust generated by each tooth.
  • FIG. 11 (f) shows the resultant force of the thrusts F ⁇ 1 to F ⁇ 5, that is, the thrust at each moving position with the position shown in FIG. 9 (a) as a base point.
  • the waveform shown by the solid line shows the change in thrust in the non-excited state
  • the waveform shown by the broken line is generated by the excited state, that is, by the conduction schedule shown in Fig. 10. Thrust.
  • the sine wave changes with almost 21 periods so that it approaches 0 at each position slightly past.
  • the unit 14 faces the permanent magnet 56 between the permanent magnet 50 N (N pole) in the Y direction and the permanent magnet 50 S in the Y direction.
  • the initial state is a state in which the excitation unit 6 is relatively moved by 1 in the + Y direction from the state shown in FIG.
  • Fig. 13 (e) shows the excitation of the tooth T5 of the protruding tooth 36 at the base end as a result of energizing each of the armature coils 38 to 44 as shown in Figs. 13 (a) to 13 (d). The change is shown.
  • FIG. 14 shows the thrust generated by each tooth.
  • Fig. 14 (f) shows the resultant of the thrusts FT1 to FT5, that is, the thrust generated at each moving point with the position shown in Fig. 12 as a base point.
  • Figs. 14 (a) to 14 (f) the waveform shown by the solid line shows the change in thrust in the non-excitation state, and the waveform shown by the broken line is generated by the excitation state, that is, the energization schedule shown in Fig. Thrust.
  • At least two excitation units 6 may be arranged so as to be relatively shifted by one in the Y direction.
  • at least two excitation units 6 are used as shown in FIG.
  • the excitation units 6 may be arranged so that the positions of the excitation units 6 are relatively shifted by 1 in the X and Y directions.
  • FIG. 16 shows a cross section in the X direction showing the positions of the teeth T1 to T5 of the teeth 28 to 36 of the excitation unit 6 with respect to the magnetic pole unit 14 of the mover 4. I have. (B) shows a cross section in the Y direction including the tooth portion T5 of the excitation unit 6.
  • FIG. 16 it is assumed that the tooth portion T 5 of the protruding tooth 36 at the base end of the excitation unit 6 faces the permanent magnet 50 N (N pole) of the magnetic pole unit 14 as an initial state. .
  • the tooth portion ⁇ 5 is excited to the ⁇ pole.
  • FIGS. 16 (a) and 16 (b) magnetic repulsion is generated against the magnetic pole unit 14 at all the teeth T1 to t5, and the magnetic pole unit 14 is generated.
  • a levitation force is generated to make the levitation in the + Z direction. Due to the levitation force, the magnetic pole unit 14 floats with respect to the excitation unit 6.
  • the floating force cannot be maintained at all positions where the mover 4 moves two-dimensionally in the XY plane.
  • the position of the tooth portion T5 of the excitation unit 6 is as shown in FIG. 12 with the movement of the movable element in the X-Y direction, the movable element 4 is lifted up. You will not be able to get enough buoyancy. That is, the levitation force also changes depending on the relative position between the excitation unit 6 and the magnetic pole unit 14. This point will be described in detail with reference to FIGS. 17 to 20 taking movement in the X direction as an example.
  • the direction of the current flowing through the armature coils 38 to 44 of the excitation unit 6 is the same as the rule in Fig. 9 (b).
  • 34 shows the polarity excited to the teeth T2 to T4.
  • FIG. 17 (e) shows the excitation generated in the tooth portion T5 of the protruding tooth 36 at the base end as a result of energizing the armature coils 38-44 as shown in Figs. 17 (a)-(d). Shows the change.
  • Figure 18 shows the levitation force generated by each tooth.
  • FIGS. 18 (a) to 18 (f) shows the resultant force of the levitation forces F 1 to FT5, that is, the levitation force at each moving position with the position shown in FIG. 9 (a) as a base point.
  • the waveforms shown by the solid lines show changes in the levitation force in the non-excited state. In the non-excited state, only the magnetic attraction force acts, so the levitation force in the Z direction is all negative.
  • the waveform shown by the broken line is the excited state, that is, the levitation force generated by the energization schedule shown in FIG.
  • the levitation force generated by the excitation unit 6 when moving from the position shown in Fig.
  • the initial state is set at the position where each tooth of the excitation unit is moved relative to the position shown in FIG. 12 by 1 in the + Y direction from the state shown in FIG. 9 in the + Y direction.
  • the floating force in the case will be described.
  • the direction of the current flowing through the armature coils 38 to 44 of the excitation unit 6 and the sign of the current flowing through each armature coil 38 to 44 are the same as those shown in FIG.
  • the conduction schedule of the current flowing through the armature coils 38 to 44 of the excitation unit 6 Fig. 19 shows the change in the polarity of the yule and the polarity excited by each tooth.
  • the vertical axis of the upper graph represents the current C1 flowing through the armature coil 38.
  • Fig. 19 (e) shows the tooth T5 of the protruding tooth 36 at the base end as a result of energizing each armature coil 38-44 as shown in Figs. 19 (a)-(d). The change in excitation is shown.
  • a magnetic repulsive force acts between the permanent magnets 50N and 50S of the magnetic pole unit 14 facing the magnetic pole unit 14 and a levitation force is generated.
  • Fig. 20 shows the levitation force generated by each tooth.
  • FIGS. 20 (a) to 20 (f) shows the resultant force of the levitation forces F T1 to F T5, that is, the levitation force generated at each moving point with the position shown in FIG. 12 as a base point.
  • the waveforms shown by the solid lines show changes in the levitation force in the non-excited state. In the unexcited state, only the magnetic attraction acts, so the levitation force in the Z direction is all negative.
  • the waveform shown by the broken line is the excited state, that is, the levitation force generated by the energization schedule shown in FIG.
  • the levitation force generated in the excitation unit 6 when moving from the position shown in FIG. 12 changes sinusoidally in approximately 21 cycles in the excitation state.
  • At least two excitation units 6 may be arranged so as to be shifted by one relatively in the Y direction.
  • two excitation units are used as illustrated in FIG. 15 used for reducing the thrust unevenness described above. It is sufficient to use a set of exciters 6 and arrange a set of excitation units 6 whose mutual positions are relatively shifted by 1 in the X and Y directions, respectively.
  • the set of the excitation unit 6 shown in FIG. 15 is used for the two-dimensional movement of the mover 4 in the XY plane, and the excitation unit also shown in FIG. If a set of magnets 6 is prepared and used for floating the mover 4, that is, at least two sets of the excitation unit 6 are used, and the magnetic pole unit is relatively moved in a predetermined direction in the XY plane. By constructing a drive unit that generates a thrust to be generated and a magnetic repulsion for magnetically levitating in the Z direction, the mover 4 can move and levitate at the same time.
  • the magnetic pole unit 14 of the square mover 4 is divided into, for example, square areas A to D, and the area below the areas A to D is divided.
  • a different predetermined current may be supplied to each of the armature coils 38 to 44 of the set of the excitation unit 6.
  • the direction in the X-Y plane as a whole is Not only can you move, but you can also rotate around the Z axis.
  • Fig. 21 (b) by changing the levitation force in the Z direction of each of the regions A to D, it becomes possible to perform rotation about the X axis or the Y axis.
  • the leveling of the plane of the mover 4 can be adjusted.
  • planar motor of the present embodiment a plurality of sets of excitation units can be provided on the stator side, so that a high thrust can be obtained. Since it can be configured with a simple planar structure composed of the conductor member 60, the conductor member 60, and the substrate 12, it can be moved at a high speed with a light weight. Further, according to the planar motor according to the present embodiment, it becomes possible to move the two-dimensional plane while giving a floating force to the mover 4. Further, it is possible to realize a planar motor that can control the position and posture of the mover 4 in three axes directions of X, Y, and ⁇ ⁇ ⁇ and a total of six degrees of freedom in the rotation directions of those axes.
  • planar motor according to a second embodiment of the present invention will be described with reference to FIGS.
  • a plurality of excitation units are fixed at predetermined positions to form a stator, and the magnetic pole unit is used as a movable element movable with respect to the stator.
  • each excitation unit of the stator is arranged above the mover with five protruding teeth facing downward, and the mover faces the protruding teeth with a plurality of permanent magnets facing upward. The point is that it is arranged to be.
  • FIG. 1 a schematic configuration of the planar motor according to the present embodiment will be described with reference to FIG.
  • FIG. 22 is a perspective view of the flat motor according to the present embodiment.
  • the configuration of the planar motor according to the present embodiment is roughly divided into a stator unit 2 and a mover 4.
  • the stator unit 2 has a plurality of excitation units 6 fixed to the lower surface of a flat base 8 extending in an X-plane, and a flat sliding member 10 provided on the lower surface.
  • the mover 4 has a magnetic pole unit 14 composed of a plurality of permanent magnets arranged in a matrix on a ⁇ - ⁇ plane, and is fixed to the lower surface of the magnetic pole unit 14, and is made of a non-magnetic material and non-conductor. There is a certain substrate 12.
  • the mover 4 is located below the stator unit 2, and even if the respective excitation units 6 of the stator unit 2 are not excited, the plurality of permanent magnets of the mover 4 Through a predetermined gap with respect to the stator unit 2 Then, the mover 4 can be floated in the air.
  • the movable element 4 below the sliding member 10 is slid.
  • the movable member 10 can be moved two-dimensionally in the XY plane below the movable member 10, and the leveling of the mover 4 itself can be adjusted.
  • the excitation unit 6 of the stator unit 2 has the same configuration as the excitation unit 6 in the first embodiment described with reference to FIG. 2, and has five teeth 2 in the Z direction in a use state. The only difference is that 8, 30, 32, 34, and 36 are arranged so that the illustration and description of the configuration are omitted. Also, the structure of the magnetic pole unit 14 of the stator 4 of the planar motor according to the present embodiment is the same as the magnetic pole unit in the first embodiment described with reference to FIG. Is omitted.
  • FIG. FIG. 23 shows a cross section of a flat motor according to the present embodiment
  • FIG. 24 is a perspective view for explaining a positional relationship between five protruding teeth of an excitation unit 6 facing the magnetic pole unit 14.
  • the plurality of permanent magnets 50 N, 5 OS of the magnetic pole unit 14 each having a width 1 and the horizontal permanent magnet 54 whose magnetic axis is oriented in the X or Y direction are opposed to each other.
  • each of the excitation units 6 have two protruding teeth 28 and 32 at the end thereof relative to the protruding teeth 36 at the base end in the X direction. — Offset by 1/2 and +1/2.
  • the two protruding teeth 30 and 34 of the two arms 2 2 and 26 extending in the Y direction are also relatively smaller in the Y direction than the protruding teeth 36 of the base end. They are offset by 2, + 1/2. Therefore, as shown in FIG. 24, when the position of the tooth portion T5 of the protruding tooth 36 at the base end coincides with and faces the permanent magnet 50N (N pole) of the magnetic pole unit 14
  • the teeth T 1, T 2, ⁇ 3, ⁇ 4 of the four teeth 28-34 are permanent magnets 5 of the opposing magnetic pole unit 14, 5 OS (S pole) in the X direction Alternatively, they overlap by 1/2 in the Y direction.
  • FIG. 25 to 27 is a plan view showing the position of each tooth of the excitation unit 6 with respect to the magnetic pole unit 14 of the mover 4, and the tooth portion T of each tooth 28 to 36 is shown. 1 to T5 are shown.
  • (B) in FIGS. 25 to 27 shows a cross section in the X direction including the tooth portion T5 of the excitation unit 6.
  • (C) shows a cross section in the Y direction including the tooth portion T5 of the excitation unit 6.
  • the tooth T5 of the tooth 36 at the base end of the excitation unit 6 faces the permanent magnet 50N (N pole) of the magnetic pole unit 14 as an initial state.
  • the excitation unit by the plurality of permanent magnets 50 N and 50 S of the magnetic pole unit 14 is used.
  • the magnetic attraction between the teeth T 1 to T 5 of the box 6 is balanced, and the magnetic pole unit 14 floats in the air via a predetermined gap with respect to the excitation unit 6.
  • the N pole relatively strong at the tooth T1 (hereinafter, referred to as N + pole), and relatively weak at the teeth T2 to T4
  • the N-pole (hereinafter referred to as the N-pole) supplies a predetermined current to the four armature coils 38 to 44 so that the S-pole is excited in the tooth T5.
  • the magnetic attraction at the tooth T1 is stronger than that in the balanced state. Thrust is generated to move the pole unit 14 in the X direction (rightward in the figure).
  • the magnetic attraction force is weaker than in the balanced state, and as a result, the mover 4 starts moving in the X direction.
  • the magnetic attraction force is weaker than in the balanced state, and as a result, the mover 4 starts moving in the X direction.
  • Fig. 26 (c) in the Y direction, while the state of balance of the magnetic attraction force is maintained, only the magnetic attraction force as a whole changes, so the thrust in the Y direction is Does not occur.
  • the position of the excitation unit 6 with respect to the magnetic pole unit 14 is shifted in the Y direction.
  • At least two excitation units 6 may be arranged so as to be relatively shifted by one in the Y direction. That is, in order to move the mover 2 two-dimensionally in the XY plane while reducing the thrust unevenness, at least two movers are required as shown in FIG. 15 as in the first embodiment. It is sufficient to use the excitation unit 6 and arrange them so that their mutual positions are relatively shifted by 1 in the X and Y directions, respectively. Therefore, the set of the excitation unit 6 shown in FIG.
  • the excitation unit 6 shown in FIG. 15 is used for the two-dimensional movement of the mover 4 in the XY plane, and the excitation unit 6 shown in FIG. If a set of the magnets 6 is prepared and used for leveling the mover 4, that is, at least two sets of the excitation unit 6 are used, and the magnetic pole unit is oriented in a predetermined direction in the XY plane.
  • a driving unit that generates a thrust to move relative to the motor and changes the magnetic attraction force that is magnetically levitated in the Z direction, the movement of the mover 4 in the XY direction and the movement in the Z direction Movement can be performed simultaneously.
  • the magnetic pole unit 14 of the square mover 4 is moved to, for example, square areas A to D. It may be divided into four, and different predetermined currents may be supplied to the armature coils 38 to 44 of the set of the excitation units 6 above the regions A to D, respectively.
  • the direction of thrust in each of the areas A to D as shown in Fig. 21 (a)
  • Fig. 21 (b) by changing the levitation force in each of the areas A to D in the Z direction, rotation around the X axis or Y axis can be performed.
  • the leveling of the plane of the mover 4 can be adjusted.
  • a plurality of sets of the excitation units 6 can be provided on the stator unit 2 side, so that a high thrust can be obtained. Since it can be configured with a simple planar structure composed of the permanent magnet 50, the conductor member 60, and the substrate 12, it can be moved at a high speed with light weight.
  • the magnetic pole unit 6 of the mover 2 is required to float the mover 4.
  • the magnetic attraction force acting between the permanent magnets 50 N, 50 S of the stator unit 2 and the protruding teeth 28 to 36 of the excitation unit 6 of the stator unit 2 is canceled, and the floating of the movable element 4 is equal to or more than its own weight. It is necessary to generate an upward force. For this reason, a large current needs to flow through each of the armature coils 38 to 44, and the heat generated from the stator unit 2 due to energization of the coils increases.
  • planar motor of the present embodiment since the mover 4 is located below the stator unit 2 and the mover 4 floats in the space due to magnetic attraction even in a non-excited state. On the other hand, the position and orientation control of the mover 4 requires only a small amount of coil current, so that the heat generated from the stator unit 2 can be reduced, which is advantageous in that it is efficient.
  • a planar motor according to a third embodiment of the present invention will be described with reference to FIGS.
  • the planar motor according to the present embodiment has a shape of the tip of the five protruding teeth 28 to 36 of the excitation unit 6 in the planar motor according to the first and second embodiments. It has a characteristic in shape. Other configurations are the same as those of the first and second embodiments, so that illustration and description are omitted.
  • FIG. 28 shows a magnetic member having five protruding teeth of the excitation unit 6 according to the present embodiment, and armature coils 38 to 44 wound around arms thereof.
  • FIG. 28 (a) is a perspective view of the excitation unit 6 according to the present embodiment
  • FIG. 28 (b) is a partially enlarged view of the tip of each tooth of the excitation unit 6,
  • FIG. () Is a partial cross-sectional view of the tip of each tooth of the excitation unit 6.
  • a predetermined chamfer 6 2 is provided on each of the four end portions T 5 to T 5 of the five protruding teeth 28 to 36 of the excitation unit 6.
  • a to 62 d are applied, and the tooth portions at the tips of the five protruding teeth are formed in a sharp shape.
  • the flat portions and the chamfers 62 in the moving direction of the XY plane of the tooth portions T1 to D5 of the respective protruding teeth 28 to 36 are shown.
  • the length ratio of the 6 2d is set to about 2: 1: 1.
  • FIG. 29 shows the tooth part ⁇ 5 of the protruding tooth 36 as an example
  • the tooth part ⁇ 5 in the present embodiment is shown on the right side of the figure
  • the tooth part ⁇ 5 without chamfering is shown as a comparative example. Shown on the left.
  • each tooth portion of the present embodiment and the comparative example has a width substantially equal to the width 1 of the permanent magnet 50 of the magnetic pole unit 14, and the permanent magnet 50 S Shall be opposed to.
  • the shape of the tip portion of the tooth portion of the present embodiment is composed of the end face and the chamfers 62 to 62 d as already described with reference to FIG. 28, and the tip portion of the tooth portion of the comparative example is
  • the chamfers 6 2a to 6 2d provided on the tooth portions of the form (1) have a shape of only the end face.
  • the end surfaces of any of the teeth are located at a predetermined gap from the magnetic pole unit 14.
  • the magnetic attractive force acting between the tooth portion T5 of the present embodiment and the permanent magnet 50S of the magnetic pole unit 14 is denoted by Ft, and the breaking perpendicular to the direction in which the magnetic attractive force Ft acts.
  • Ft the magnetic attractive force acting between the tooth portion T5 of the present embodiment and the permanent magnet 50S of the magnetic pole unit 14
  • the breaking perpendicular to the direction in which the magnetic attractive force Ft acts Let At be the size of the area.
  • the magnetic attraction acting on the tooth portion T5 of the comparative example is F f
  • a f is the size of the cross-sectional area perpendicular to the direction in which the magnetic attraction F f acts.
  • the magnitude of the magnetic attraction force F is inversely proportional to the square of the distance between the two magnetic materials, and proportional to the surface area of the opposing magnetic materials.
  • the magnetic attraction force Ft of the tooth portion T5 of the present embodiment having a region where the distance of the action of the tooth portion is long ⁇ is smaller than the magnetic attraction force F
  • FIGS. 29 (b) to 29 (d) show the component force in the moving direction of the magnetic attraction forces Ft and Ff.
  • thrust components ft and ff are generated.
  • FIG. 30 (a) shows the thrust characteristics at the tooth portion of the comparative example
  • FIG. 30 (b) shows the thrust characteristics at the tooth portion according to the present embodiment.
  • the horizontal axis represents the moving distance.
  • the vertical axes in both figures show the cross-sectional areas A t and A f from the origin position to the upper side, and the magnitudes of the magnetic attraction forces F t and F f and the magnitudes of the thrusts ft and ff to the lower side Is shown.
  • the positions of a to d shown on the horizontal axis in the figure correspond to the movement amounts of the magnetic pole unit 14 shown in FIGS. 29 (a) to (d).
  • the cross-sectional area A f monotonously decreases with the movement of the magnetic pole unit 14. . Therefore, the magnetic attractive force F f also decreases monotonically.
  • Fig. 30 (a) The curve of the thrust ff shown by the solid line shows the thrust characteristics when only the permanent magnet 50S is considered, and the curve of the thrust ff shown by the broken line shows the This is the thrust characteristic when the effect of the permanent magnet 50 N next to S is considered.
  • the magnitude of the thrust ff at the moving position of the magnetic pole unit 14 is uneven, cogging occurs.
  • FIG. 30 (b) is the same as that of the comparative example in FIG. 30 (a).
  • the above-described sinusoidal thrust characteristics can be smoothed, so that cogging can be achieved. This makes it possible to realize a planar motor in which the load is extremely reduced.
  • the ratio of the end face of each tooth T1 to T5 of the excitation unit 6 to the chamfer is set to about 2: 1: 1 as described above, but of course, this is only an example. 'It is also possible to use other ratios.For example, as shown in Fig. 31, instead of chamfers 6 2a to 6 2d, there is no flat part as shown in Fig. A tooth portion at the tip of each protruding tooth may be formed to make it more sharp.
  • the width of each protruding tooth T1 to D5 of the excitation unit 6 of the stator unit 2, the width of the permanent magnet 50 of the mover 4, or the distance between the stator unit 2 and the mover 4 may be formed in an optimum tip shape.
  • the excitation unit 6 has four arms each having a substantially cross shape in the X-Y direction, and a base to which the tip of each arm and each of the arms are connected. It consisted of a magnetic member having five protruding teeth formed at the end, and four armature coils wound around each arm.
  • the excitation unit is composed of a magnetic member having two substantially linear arms, and a distal end of each arm and three protruding teeth formed at a base end to which the arms are connected.
  • a linear excitation unit formed of two armature coils wound around each arm may be used.
  • the mover moves straight through the plane. Move in a shape. If such linear excitation units are provided in the X and Y directions, the mover can be moved along the XY plane.
  • FIG. 32 shows an overall schematic configuration of an exposure apparatus according to the present embodiment.
  • the exposure apparatus of the present embodiment scans the reticle one-dimensionally and one-dimensionally scans the wafer at a speed synchronized with the reticle (a speed multiplied by the projection magnification). This is a so-called step-and-scan projection method.
  • An exposure apparatus In FIG. 32, a first column 230 made of invar (an alloy having a low expansion coefficient) is placed on a base 100 via an anti-vibration damper 112. The first column 230 fixes the projection optical system PL.
  • a laser interferometer 135 for measuring the position of the reticle scanning stage 180 is mounted on the first column 230, and a second column holding the illumination optical system 130 is also provided. Column 170 is fixed.
  • a stage device using the planar motor described in the second embodiment is provided inside the first column 230.
  • This stage device is composed of a stage drive unit 300 corresponding to the stator unit 2 in the second embodiment and a wafer stage WST corresponding to the mover 4.
  • a wafer W as a substrate is mounted.
  • a plurality of permanent magnets each having a magnetic axis oriented in a predetermined direction are arranged (the stage driving unit 300 is connected to the base 100 via the frame 124).
  • the wafer stage WST has a magnetic attraction force even when the plurality of excitation units 6 in the stage drive unit 300 are in a non-excited state.
  • the wafer stage WST is accordingly turned on by the projection optical system.
  • the direction perpendicular to the optical axis of the PL horizontal plane
  • the direction perpendicular to the paper plane in Figure 32 Y direction
  • the X direction perpendicular to the Y axis in the horizontal plane
  • the wafer W The optical axis of the projection optical system PL Position the wafer W in the Z direction
  • (C) The inclination of W with respect to the image plane of the projection optical system PL can also be adjusted.
  • the stage drive unit 300 When the wafer stage WST moves in the X, Y, and Z directions, the stage drive unit 300 Generates a reaction force in the opposite direction. Escaped to base 100 via 124. On the other hand, since the projection optical system PL is held by the first column 230 via the anti-vibration dam 12, the reaction force generated in the stage drive unit 300 exerts vibration on the projection optical system PL. None.
  • a second column 110 composed of a member is fixed on the first column 230, and a reticle scanning stage 180 slidable in the X direction is mounted on the upper part of the second column 170, and the reticle A reticle R having a transfer pattern formed thereon is held on a scanning stage 180.
  • the reticle scanning stage 180 is specifically a stage driven by a linear motor described in Japanese Patent Application Laid-Open No. 8-63231, and has a structure in which a reaction force due to driving is canceled. I have. Therefore, the reaction force generated on the reticle scanning stage 180 and the reaction force generated on the stage drive unit 300 do not cause vibration to the projection optical system PL, and also cause vibration to the illumination optical system 130. There is no.
  • the illumination optical system 130 includes a blind mechanism, a fly-eye lens, a condenser lens, and the like, and illumination light formed in a predetermined area irradiates the reticle R.
  • reticle R that has received the illumination light defined in a predetermined shape is held on reticle scanning stage 180 that can move at least in X direction at a constant speed on second column 170.
  • the reticle scanning stage 180 performs a one-dimensional scanning movement in the X direction, a minute rotation movement for bowing correction, and the like by a drive system 134.
  • a movable mirror 1336 that reflects the measurement beam from the laser interferometer 135 is fixed, and the X direction position of the reticle R is adjusted by the laser interferometer 135. Measured in real time.
  • the image of the pattern formed on the reticle R is reduced to, for example, 1/4 by the projection optical system PL and formed on the wafer W.
  • the wafer W is mounted on a wafer stage WST that can move in the X, Y, and Z directions.
  • the pattern on the reticle R is illuminated with the exposure light IL, and the projection image on the reticle R is projected and exposed on the wafer W via the projection optical system PL.
  • the illumination area on the reticle R is, for example, a rectangular slit, and the entire pattern area on the reticle R is not illuminated by the illumination area alone. Therefore, at the time of exposure, reticle scanning stage 180 is driven to scan reticle R with respect to the illumination area at a constant speed V1 in the X direction, which is a direction perpendicular to the longitudinal direction of the illumination area.
  • the wafer W is scanned at a constant speed V2 in the X direction with respect to the reticle image in the illumination area.
  • V 2 the velocity V 2 is / 5 ⁇ V 1.
  • the wafer stage WST is driven by the stage drive unit 300 to move the scanning start position of the next exposure area on the wafer W into the exposure field of the projection optical system PL. I do.
  • a moving mirror 1339X that reflects the measuring beam from the laser interferometer 1338X is fixed to one end surface of the wafer stage WST in the X direction, and the coordinate position of the wafer stage WST in the X direction is fixed. Is measured in real time by the laser interferometer 1 3 8 X.
  • a moving mirror 1339Y that reflects the measuring beam from the laser interferometer 1338Y is also fixed to one end surface of the wafer stage WST in the Y direction, and the YST of the wafer stage WST is fixed. Is measured in real time by the laser interferometer 1338Y.
  • the stage drive unit 300 of the scanning exposure apparatus is connected to a refrigerant supply port 310 at the end of a pipe drawn from a cooler (not shown).
  • the refrigerant controlled at a predetermined temperature through the stage 0 is introduced into the stage drive unit 300, circulates through the stage drive unit 300, and flows through the armature coils 38 to 44. After the plurality of excitation units 6 that have generated heat are cooled, they are discharged from the cooling medium discharge ports 312.
  • the scanning exposure apparatus is provided with a wafer stage transfer system 320 for loading or unloading wafer stage WST from opening 330 on the side surface of first column 230.
  • the wafer stage transfer system 320 has the same configuration as the stage drive unit 300, and can move the wafer stage WST on which the wafer W is mounted by floating it with magnetic attraction.
  • the transfer of the wafer W is The wafer stage WS is transported together with the stage WST.
  • the control of the exposure operation in the present scanning type exposure apparatus is totally managed by the main control unit 141.
  • the basic operation of the main controller 14 1 is based on the scan exposure based on the position information from the laser interferometers 13 5 and 13 8 and the speed information from the drive systems 13 4 and 13 7. While maintaining a predetermined speed ratio (a value corresponding to the projection magnification of the projection optical system PL) between the reticle scanning stage 180 and the wafer stage WS ⁇ ⁇ , a predetermined alignment of the relative positional relationship between the reticle pattern and the wafer pattern is performed. The relative movement is to be performed with the error kept within.
  • FIG. 33 is an exploded perspective view showing a part of stage drive unit 300 and wafer stage W S # according to the present embodiment.
  • FIG. 34 is a plan view showing the arrangement of the excitation unit 6 in the stage drive unit 300 and the arrangement of the magnetic pole units 14 provided on the wafer stage WS.
  • the stage drive unit 300 has a plurality of excitation units 6 fixed to the lower surface of a flat base 8, and a flat sliding member 10 on the lower surface. Is provided. An opening is provided substantially at the center of the stage drive unit 300, and the light exit side end of the lens barrel of the projection optical system is located in this opening. Therefore, the base 8 has a mortar-shaped slope in conformity with the shape of the light exit end of the lens barrel of the projection optical system, and is connected to the sliding member 10 at the opening at the bottom of the slope. ing.
  • the wafer stage WST has a substantially square planar shape, a circular wafer mounting surface on which the wafer W is mounted, and a plurality of permanent magnets around the wafer mounting surface.
  • Magnetic pole units formed in a matrix on a plane are provided divided into four regions A to D.
  • a nonmagnetic and nonconductive substrate 12 is fixed to the lower surface of the magnetic pole unit 14 and below the wafer mounting surface.
  • movable mirrors 1339X and 1339Y for measuring the positions in the X and Y directions with a laser interferometer are attached to two adjacent sides of the wafer stage WST. And You.
  • wafer stage WST serving as a mover is located below stage drive unit 300 serving as a stator unit, and stage drive unit 300 is provided. Even when each excitation unit 6 of the wafer stage WST is in a non-excited state, the magnetic force of the plurality of permanent magnets 50 N and 50 S of the wafer stage WST causes the stage drive unit 300 to pass through a predetermined gap through a predetermined gap. They can float in the air.
  • the plurality of excitation units 6 of the stage drive unit 300 located above the respective areas A to D are the excitation units already described with reference to FIG.
  • the six sets are arranged so that they function sequentially in groups of two.Each area A to D of the magnetic pole unit generates a thrust for relative movement in a predetermined direction in the XY plane, and a magnetic force is generated in the Z direction.
  • the wafer stage WS can be moved in the X and Y directions and in the Z direction at the same time.
  • the magnetic pole unit 14 of the wafer stage WST is divided into four areas A to D, the armature coils 38 to 44 of the set of the excitation unit 6 above the areas A to D are respectively provided for each area.
  • the actuators By supplying different predetermined currents to the actuators, for example, by changing the direction of thrust in each of the areas A to D, not only can the entire body move in one direction in the XY plane, but also rotate around the Z axis. Will be able to do it.
  • the rotation around the X axis or the Y axis can be performed, and the leveling of the wafer W plane of the wafer stage WST can be performed. Can be adjusted.
  • the four arms and the protruding teeth at the leading and trailing ends of the arms may be integrally formed of a magnetic material, or each part may be manufactured separately. And then assemble it.
  • the armature coil is wound around the arm of the manufactured magnetic member to connect the wires and pipes, and comprehensive adjustments (electrical adjustment, operation confirmation, etc.) are performed.
  • the mover of the planar motor according to the above-described embodiment is incorporated as a stage for mounting a substrate, and the stator is driven for driving the stage.
  • the system is incorporated as a system and comprehensively adjusted so that the position and orientation of the stage can be achieved with six degrees of freedom of rotation around the X, ⁇ , and ⁇ axes.
  • the illumination system and the projection optical system composed of a plurality of lenses are incorporated into the exposure apparatus main body to perform optical adjustment, and the step according to the above-described embodiment including a large number of mechanical parts is performed.
  • a lithographic apparatus as a reticle stage or wafer stage
  • attaching it to the main body of the exposure apparatus connecting wiring and piping, and performing comprehensive adjustments (electrical adjustment, operation confirmation, etc.). It is desirable to manufacture the exposure equipment in a clean room where the temperature and cleanliness are controlled.
  • the set of the excitation units 6 is defined by the arrangement shown in FIG. 15, but the present invention is not limited to this.
  • ⁇ 1, m 1 (n , M is a positive integer) and may be composed of at least two excitation units 6 separated by a distance.
  • the arrangement position of the pair of the excitation units 6 is not limited to the example shown in FIG. 15 and various modifications are possible.
  • the drive unit is divided into four regions A to D as shown in FIGS. 21 and 34 in order to give the mover 4 a movement with six degrees of freedom.
  • the invention is not limited to this, and the magnetic pole unit 14 is divided into areas A to C in which a line connecting the centers of the respective areas on the XY plane forms a triangle, and the excitation unit below the areas A to C is divided. Even if a predetermined current that is different for each region is supplied to each of the six sets of armature coils 38 to 44, the mover 4 can be given a movement with six degrees of freedom. Therefore, the number of divided regions may be three or more.
  • the one provided with the magnetic pole unit 14 is used for the mover 4, and the one provided with the excitation unit 6 is used for the stator unit 2, but the present invention is not limited to this.
  • the magnetic pole unit 14 may be used as the stator unit 2 and the exciting unit 6 may be used as the mover 4.
  • the number of excitation units 6 is not very large. This is effective if wiring for supplying current to the sub coils 38 to 44 can be simplified.
  • the stage apparatus and the exposure apparatus using the planar motor according to the second embodiment have been described.
  • the planar motor according to the first embodiment may be replaced with a stage apparatus.
  • exposure equipment
  • the stage apparatus using the planar motor of the present invention has been described as being applied to the wafer stage WST side.
  • the present invention is not limited to this, and for example, the reticle scanning stage 180 side And the reticle scanning stage 180 may be controlled with six degrees of freedom.
  • the excitation unit 6 is not limited to the shape shown in the above-described embodiment, but can be variously modified depending on the mounting space at the mounting stage and other components.
  • the excitation unit 6 in the above embodiment is formed in a cross shape in which an angle between two adjacent arms of each of the arms 20 to 26 is approximately 90 °.
  • the present invention is not limited to this, and the angle between two adjacent arms may be different.
  • the angle between the arm 20 and the arm 22 and the angle between the arm 24 and the arm 26 are both 120 °, and the arm 22 and the arm 24 It is a matter of course that the angle between the arm 26 and the arm 20 and the angle between the arm 20 may both be 60 ° (in the present invention, these are also referred to as substantially cross-shaped).
  • the width in the X and Y directions of the plurality of permanent magnets arranged in the X and Y directions of the pole unit may be appropriately changed.
  • the present invention is applied to a step-and-scan type projection exposure apparatus using a conventional ultra-high pressure mercury lamp as a light source, but the present invention is not limited to this.
  • the present invention can of course be applied to a projection exposure apparatus for exposing a wafer by a step-and-repeat method via a projection optical system having an image field capable of projecting the entire reticle circuit pattern at one time. Also, Since it does not require the intervention of air unlike a static pressure gas bearing, it can be used even in a vacuum, and is particularly suitable for use in an exposure apparatus using an excimer laser or another charged particle beam as a radiation source. Industrial applicability
  • the mover is lightweight and can move at high speed. Also, it is possible to realize a planar motor that moves a two-dimensional plane while giving a floating force to the mover. Furthermore, it is possible to realize a planar motor that can control the position and orientation of the mover in a total of six degrees of freedom in the three axis directions of X, Y, and ⁇ ⁇ ⁇ and the rotation directions of those axes.
  • the stage device for mounting and moving a wafer is sealed in a vacuum or He atmosphere, the stage that can move the mover to the target position at a high speed and can perform ultra-precision positioning An apparatus and an exposure apparatus using the same can be realized.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Linear Motors (AREA)

Abstract

Un moteur plan mobile dans deux dimensions dans un plan pouvant produire une forte poussée peut déplacer un dispositif de mouvement dans un plan bidimensionnel tandis que le moteur donne une flottabilité au dispositif de mouvement, et il peut commander la position et l'attitude du dispositif de mouvement dans six degrés de liberté. Le moteur plan comprend un dispositif de mouvement (4) présentant une unité (14) à pôles magnétiques dans laquelle une pluralité d'aimants permanents (50N et 50S) sont agencés en une matrice dans un plan X-Y, leurs pôles magnétiques étant inversés de manière alternée; un noyau en fer comportant quatre parties de bras (20-26) formant globalement une croix dans le sens X-Y, et cinq extrémités saillantes (28-36) formées dans la partie du côté de la base du noyau où les parties de bras (20-26) se croisent et dans les parties extrêmes avant des parties de bras (20-26), en une disposition telle que les extrémités (20-36) puissent se trouver en face des aimants (50N et 50S) de l'unité (14); et une unité d'excitation (6) présentant quatre bobines d'induit (38-44) lesquelles sont enroulées respectivement autour des parties de bras (20-26).
PCT/JP1998/002761 1997-07-18 1998-06-22 Unite d'excitation, moteur lineaire ou plan utilisant l'unite, dispositif a etage utilisant le moteur et dispositif d'alignement utilisant le dispositif Ceased WO1999004481A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP50686099A JP3829335B2 (ja) 1997-07-18 1998-06-22 励磁ユニットおよびそれを用いた平面型モータ、およびそれを用いたステージ装置、およびそれを用いた露光装置
AU80370/98A AU8037098A (en) 1997-07-18 1998-06-22 Exciting unit, linear or planar motor using the unit, stage device using the motor, and aligner using the device

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP21003497 1997-07-18
JP9/210034 1997-07-18
JP9/361912 1997-12-10
JP36191297 1997-12-10

Publications (1)

Publication Number Publication Date
WO1999004481A1 true WO1999004481A1 (fr) 1999-01-28

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Country Status (3)

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JP (1) JP3829335B2 (fr)
AU (1) AU8037098A (fr)
WO (1) WO1999004481A1 (fr)

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* Cited by examiner, † Cited by third party
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WO2001018944A1 (fr) * 1999-09-02 2001-03-15 Koninklijke Philips Electronics N.V. Dispositif de deplacement
JP2003052164A (ja) * 2001-08-06 2003-02-21 Univ Nihon 磁気浮上式ｘｙ面リニア同期モータ
JP2003534761A (ja) * 2000-05-23 2003-11-18 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 変位装置
JP2006294793A (ja) * 2005-04-08 2006-10-26 Canon Inc ステージ装置および露光装置
JP2007214449A (ja) * 2006-02-10 2007-08-23 Ushio Inc ＸＹθ移動ステージ
JP2008091892A (ja) * 2006-09-11 2008-04-17 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
JP2008141165A (ja) * 2006-09-20 2008-06-19 Asml Netherlands Bv ステージ装置およびリソグラフィ装置
CN101800460B (zh) * 2009-12-23 2012-07-11 哈尔滨工业大学 集成绕组结构短行程直流平面电机
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
JP5446865B2 (ja) * 2007-09-04 2014-03-19 株式会社安川電機 磁気浮上システム
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
CN108475979A (zh) * 2016-01-22 2018-08-31 Tdk株式会社 致动器
JP2020202746A (ja) * 2020-09-18 2020-12-17 株式会社神戸製鋼所 電動機
US11002566B2 (en) 2007-06-27 2021-05-11 Brooks Automation, Inc. Position feedback for self bearing motor
IT202000014239A1 (it) 2020-06-15 2021-12-15 Biometic S R L Tomografo computerizzato a tunnel e metodo per l’esecuzione di una tomografia computerizzata di un oggetto
US20220037070A1 (en) * 2019-02-01 2022-02-03 Zaber Technologies Inc. Adjustable magnetic counterbalance

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KR101488249B1 (ko) * 2014-01-27 2015-01-30 연세대학교 산학협력단 공심코일을 이용한 무선 이족 보행 장치

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JPS6289467A (ja) * 1985-06-25 1987-04-23 Yaskawa Electric Mfg Co Ltd サ−フエイスパルスモ−タ

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001018944A1 (fr) * 1999-09-02 2001-03-15 Koninklijke Philips Electronics N.V. Dispositif de deplacement
US6531793B1 (en) 1999-09-02 2003-03-11 Koninklijke Philips Electronics N.V. Displacement device
JP2003509992A (ja) * 1999-09-02 2003-03-11 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 変位装置
US6879063B2 (en) 1999-09-02 2005-04-12 Asml Netherlands B.V. Displacement device
JP2003534761A (ja) * 2000-05-23 2003-11-18 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 変位装置
JP2003052164A (ja) * 2001-08-06 2003-02-21 Univ Nihon 磁気浮上式ｘｙ面リニア同期モータ
JP2006294793A (ja) * 2005-04-08 2006-10-26 Canon Inc ステージ装置および露光装置
JP2007214449A (ja) * 2006-02-10 2007-08-23 Ushio Inc ＸＹθ移動ステージ
JP2008091892A (ja) * 2006-09-11 2008-04-17 Asml Netherlands Bv リソグラフィ装置およびデバイス製造方法
JP2008141165A (ja) * 2006-09-20 2008-06-19 Asml Netherlands Bv ステージ装置およびリソグラフィ装置
US11002566B2 (en) 2007-06-27 2021-05-11 Brooks Automation, Inc. Position feedback for self bearing motor
US8283813B2 (en) 2007-06-27 2012-10-09 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
US9752615B2 (en) 2007-06-27 2017-09-05 Brooks Automation, Inc. Reduced-complexity self-bearing brushless DC motor
US8823294B2 (en) 2007-06-27 2014-09-02 Brooks Automation, Inc. Commutation of an electromagnetic propulsion and guidance system
US9024488B2 (en) 2007-06-27 2015-05-05 Brooks Automation, Inc. Robot drive with magnetic spindle bearings
JP5446865B2 (ja) * 2007-09-04 2014-03-19 株式会社安川電機 磁気浮上システム
CN101800460B (zh) * 2009-12-23 2012-07-11 哈尔滨工业大学 集成绕组结构短行程直流平面电机
CN108475979A (zh) * 2016-01-22 2018-08-31 Tdk株式会社 致动器
CN108475979B (zh) * 2016-01-22 2020-03-20 Tdk株式会社 致动器
US20220037070A1 (en) * 2019-02-01 2022-02-03 Zaber Technologies Inc. Adjustable magnetic counterbalance
US11915863B2 (en) * 2019-02-01 2024-02-27 Zaber Technologies Inc. Adjustable magnetic counterbalance
IT202000014239A1 (it) 2020-06-15 2021-12-15 Biometic S R L Tomografo computerizzato a tunnel e metodo per l’esecuzione di una tomografia computerizzata di un oggetto
EP3926333A1 (fr) 2020-06-15 2021-12-22 Biometic S.r.l. Scanner ct et procédé permettant d'effectuer un d'examen ct d'un objet
US11609189B2 (en) 2020-06-15 2023-03-21 Biometic S.R.L. CT scanner and method for performing a CT examination of an object
JP2020202746A (ja) * 2020-09-18 2020-12-17 株式会社神戸製鋼所 電動機
JP7044844B2 (ja) 2020-09-18 2022-03-30 株式会社神戸製鋼所 電動機
JP2022069672A (ja) * 2020-09-18 2022-05-11 株式会社神戸製鋼所 電動機

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