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WO1998009077A1 - Pompe a vide a piston avec admission et evacuation - Google Patents

Pompe a vide a piston avec admission et evacuation

Info

Publication number
WO1998009077A1
WO1998009077A1 PCT/EP1997/004282 EP9704282W WO9809077A1 WO 1998009077 A1 WO1998009077 A1 WO 1998009077A1 EP 9704282 W EP9704282 W EP 9704282W WO 9809077 A1 WO9809077 A1 WO 9809077A1
Authority
WO
WIPO (PCT)
Prior art keywords
inlet
piston
outlet
pump
compression chambers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP1997/004282
Other languages
German (de)
English (en)
Inventor
Jürgen Meyer
Rudolf Bahnen
Hans-Josef Burghard
Wolfgang Giebmanns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Priority to DE59705578T priority Critical patent/DE59705578D1/de
Priority to EP97936688A priority patent/EP0922163B1/fr
Publication of WO1998009077A1 publication Critical patent/WO1998009077A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F04B25/02—Multi-stage pumps of stepped piston type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps

Definitions

  • the invention relates to a piston vacuum pump with the features of the preamble of claim 1.
  • a piston vacuum pump of this type is known from US-A-48 54 825.
  • two cylindrical compression chambers of two of the four stepped cylinders are connected in parallel on the inlet side and form a first pump stage.
  • the cylindrical compression chamber of a third cylinder forms the second stage of the pump.
  • the annular compression chambers of the three cylinders, the cylindrical compression chambers of which form the first and second pump stages, are not equipped with inlets; they have no pump function.
  • the cylindrical compression chamber of the fourth cylinder forms a third stage of the vacuum pump. Its outlet is directly connected to the outlet of the pump.
  • the annular compression chamber of this stepped cylinder also has a pumping function; however, together with its inlet and outlet, it merely forms a bypass to the gases flowing directly from the third pump stage, ie that only a part of the gases emerging from the outlet of the third pump stage reaches the outlet of the pump via this annular compression chamber.
  • This ring-shaped compression chamber does not form a real fourth pump stage.
  • the present invention has for its object to provide a piston vacuum pump with the features of the preamble of claim 1 with improved pumping speed and with improved compression.
  • the outlets of the four compression chambers, which form the first pump stage, are directly connected to the outlet of the pump via a check valve. Overpressures occurring in the first pumping phase open this check valve and deliver the gases directly to the outlet of the pump.
  • the drive motor of the vacuum pump is regulated in such a way that it only reaches its full speed when there is no longer any risk of overpressures in the pump.
  • a differential pressure controlled valve is located upstream of the pump inlet.
  • valves of this type are simple and robust.
  • FIGS. 1 and 2 Further advantages and details of the invention will be explained with reference to exemplary embodiments schematically shown in FIGS. 1 and 2.
  • Figure 1 shows an exemplary embodiment of a piston vacuum pump according to the invention
  • the piston vacuum pump 1 shown in Figure 1 comprises the housing 2, the inlet 3 and the outlet 4. Inside the housing are four cylinder-piston systems 11, 21, 31 and 41, which are essentially identical. They are arranged in pairs opposite one another - preferably in one plane - in such a way that their pistons can be driven via a common crankshaft 5.
  • the drive motor is designated 6.
  • the cylinder-piston system 11 has the cylinder 12 and the piston 13. Both are stepped so that they form a cylindrical compression chamber 14 and an annular compression chamber 15 in a manner known per se.
  • the cylindrical compression chamber 14 has the inlet 16 and the outlet 17, the annular compression chamber 15 has the inlet 18 and the outlet 19.
  • the inlets 16 and 18 are formed as annular grooves in the wall of the cylinder 12 so that the movement of the piston 13 causes the inlets to open and close.
  • the outlets 17 and 19 are equipped with valves, not shown in detail.
  • the cylinder-piston system 21, 31 and 41 are designed accordingly and provided with corresponding reference numerals.
  • the inlet 3 via the line 51 - for example with the valve 52 - with the inlets 16, 18, 26, 28 of the compression chambers 14, 15, 24 and 25, which are components of the piston-cylinder systems 11 and 21 , connected.
  • the lines adjoining the outlets 17, 19, 27 and 29 of the compression chambers of the first stage all open into the line 55, which are connected to the inlets 36, 38 of the compression chambers 34, 35. These are components of the piston-cylinder system 31.
  • the compression chambers 34, 35 which are also connected in parallel, form the second pump stage of the piston vacuum pump 1, indicated by the dash-dotted line 57.
  • the lines connected to the outlets 37, 39 of the compression chambers 34, 35 mouth into line 59, which is connected to the inlet 46 of the cylindrical compression chamber 44, which is part of the cylinder-piston system 41.
  • This compression chamber 44 forms the third pumping stage of the piston vacuum pump 1 (see dash-dotted line 61).
  • the outlet 47 of the compression chamber 44 is connected via line 62 to the inlet 48 of the annular compression chamber 45, which is also part of the piston-cylinder system 41.
  • the outlet 49 of the annular compression chamber 45 communicates with the outlet 4 of the piston vacuum pump 1.
  • the compression chamber 45 forms the fourth pumping stage of the piston vacuum pump 1 (dashed line 63).
  • a nozzle 64 is also indicated in FIG. 1, via which the compression space 45 is connected to the interior of the housing 2 of the pump 1.
  • the size of the nozzle 64 is selected so that a vacuum of a few hundred milibars is established in the housing 2. The requirements for the sealing quality of the gap between the pistons and the cylinders in their areas adjacent to the interior of the housing can thereby be further reduced.
  • FIG. 2 again shows the piston-cylinder system 11 with its compression chambers 14 and 15.
  • the inlets 16 and 18 of these chambers are (together with the inlets 26, 28 of the second piston-cylinder system 21) via the valve 52 with the inlet 3 of the vacuum pump in connection.
  • the valve 52 fulfills the function of retaining the relatively large amounts of gas occurring in a first pumping phase to such an extent that overpressures do not occur in the pump 1.
  • the valve 52 has a chamber 65 with an inlet opening 66 and an outlet opening 67. On the outlet side, the chamber is conical.
  • a closure body 68 with a central bore 69.
  • the closure body 68 With the aid of two axially arranged springs, preferably compression springs 70 and 71, the closure body 68, which is spherical on the outlet side, is guided against rotation. Without gas flow, the compression springs keep the breech in suspension.
  • the closure body 68 bears against the conical section of the chamber 65 (upper illustration of the valve 52). Only gas passing through the bore 69 enters the pump 1. The size and length of the bore 69 are selected so that overpressures do not occur in the pump 1.
  • the closure body 68 lifts off its seat, so that gases can flow around it.
  • the flow cross section in the area of the valve 52 increases drastically, so that the pumping speed of the pump 1 is no longer limited by the valve 52.
  • the differential pressure at which the closure body 68 is lifted from its seat can be adjusted.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne une pompe à vide à piston (1) comprenant une admission (3), une évacuation (4) et quatre cylindres (12, 22, 32, 42) étagés. Chacun des cylindres forme, respectivement avec un piston (13, 23, 33, 43) étagé, une chambre de compression cylindrique (14, 24, 34, 44) et une chambre de compression annulaire (15, 25, 35, 45). Afin d'obtenir un pouvoir d'aspiration et une compression élevés, la pompe (1) possède, en mode de fonctionnement normal, quatre niveaux (54, 57, 61, 63) de pompage montés en série et le premier niveau de pompage est constitué de huit chambres de compression montées en parallèle.
PCT/EP1997/004282 1996-08-27 1997-08-06 Pompe a vide a piston avec admission et evacuation Ceased WO1998009077A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE59705578T DE59705578D1 (de) 1996-08-27 1997-08-06 Kolbenvakuumpumpe mit eintritt und austritt
EP97936688A EP0922163B1 (fr) 1996-08-27 1997-08-06 Pompe a vide a piston avec admission et evacuation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19634519.7 1996-08-27
DE19634519A DE19634519A1 (de) 1996-08-27 1996-08-27 Kolbenvakuumpumpe mit Eintritt und Austritt

Publications (1)

Publication Number Publication Date
WO1998009077A1 true WO1998009077A1 (fr) 1998-03-05

Family

ID=7803766

Family Applications (2)

Application Number Title Priority Date Filing Date
PCT/EP1997/004282 Ceased WO1998009077A1 (fr) 1996-08-27 1997-08-06 Pompe a vide a piston avec admission et evacuation
PCT/EP1997/004509 Ceased WO1998009079A1 (fr) 1996-08-27 1997-08-19 Soupape d'admission a effet d'etranglement et pompe a faire le vide a piston a etages multiples

Family Applications After (1)

Application Number Title Priority Date Filing Date
PCT/EP1997/004509 Ceased WO1998009079A1 (fr) 1996-08-27 1997-08-19 Soupape d'admission a effet d'etranglement et pompe a faire le vide a piston a etages multiples

Country Status (3)

Country Link
EP (2) EP0922163B1 (fr)
DE (3) DE19634519A1 (fr)
WO (2) WO1998009077A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10127082A1 (de) * 2001-06-02 2002-12-05 Leybold Vakuum Gmbh Mehrstufige Kolbenvakuumpumpe und Verfahren zum Betrieb dieser Pumpe
US6776588B1 (en) 1999-12-22 2004-08-17 Leybold Vakuum Gmbh Dry compressing vacuum pump having a gas ballast device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
DE19921711A1 (de) * 1999-05-12 2000-11-16 Leybold Vakuum Gmbh Kolbenvakuumpumpe
DE19926186A1 (de) * 1999-06-09 2000-12-14 Leybold Vakuum Gmbh Kolbenvakuumpumpe mit Auslassventil
DE19955688A1 (de) 1999-11-19 2001-05-23 Leybold Vakuum Gmbh Kolben-Vakuumpumpe
DE10048210B4 (de) * 2000-09-28 2007-02-15 Singulus Technologies Ag Vorrichtung und Verfahren zum Einschleusen eines Werkstücks über eine Vorvakuumkammer in eine Hochvakuumkammer und deren Verwendung

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2032429A (en) * 1934-07-26 1936-03-03 Ingersoll Rand Co Load controlling apparatus for compressors
US3122162A (en) * 1963-06-20 1964-02-25 Asa D Sands Flow control device
DE1403963A1 (de) * 1963-07-02 1968-11-21 Kurt Braetsch Kompressor mit wenigstens drei Stufen
DE1910848A1 (de) * 1969-03-04 1970-09-17 Kurt Braetsch Kompressor
GB1258333A (fr) * 1968-04-08 1971-12-30
US4854825A (en) 1987-02-27 1989-08-08 Commonwealth Scientific And Industrial Research Organization Multi-stage vacuum pump
EP0607687A2 (fr) * 1992-12-21 1994-07-27 Commonwealth Scientific And Industrial Research Organisation Pompe à vide multi-étagée

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2246932A (en) * 1939-09-21 1941-06-24 Chicago Pneumatic Tool Co Combination single and two stage vacuum pump
US2269620A (en) * 1940-06-15 1942-01-13 Chicago Pneumatic Tool Co Compressor regulator
US2765976A (en) * 1952-03-14 1956-10-09 Pennsylvania Pump & Compressor Two stage compressor
GB1089694A (en) * 1964-02-24 1967-11-01 J & E Hall Ltd Improvements in or relating to gas and vapour compressors
US4171188A (en) * 1976-08-03 1979-10-16 Chicago Pneumatic Tool Company Rotary air compressors with intake valve control and lubrication system
US4396345A (en) * 1981-05-07 1983-08-02 Ingersoll-Rand Company Unloader valve having bypass valving means
WO1983000539A1 (fr) * 1981-08-13 1983-02-17 Balkau, Guenter, Karl, Willi Machine a piston et cylindre a mouvement alternatif
JPS6085280A (ja) * 1983-10-18 1985-05-14 Shinku Kiko Kk ダイヤフラム形真空ポンプの逆流防止装置
JPH02102385A (ja) * 1988-10-08 1990-04-13 Toyo Eng Corp 排気装置
JP3505233B2 (ja) * 1994-09-06 2004-03-08 サンデン株式会社 圧縮機
DE4432263C2 (de) * 1994-09-10 1996-07-11 Walterscheid Gmbh Gkn Kombinationsventil für sauggedrosselte Hydraulikpumpen

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2032429A (en) * 1934-07-26 1936-03-03 Ingersoll Rand Co Load controlling apparatus for compressors
US3122162A (en) * 1963-06-20 1964-02-25 Asa D Sands Flow control device
DE1403963A1 (de) * 1963-07-02 1968-11-21 Kurt Braetsch Kompressor mit wenigstens drei Stufen
GB1258333A (fr) * 1968-04-08 1971-12-30
DE1910848A1 (de) * 1969-03-04 1970-09-17 Kurt Braetsch Kompressor
US4854825A (en) 1987-02-27 1989-08-08 Commonwealth Scientific And Industrial Research Organization Multi-stage vacuum pump
EP0607687A2 (fr) * 1992-12-21 1994-07-27 Commonwealth Scientific And Industrial Research Organisation Pompe à vide multi-étagée

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6776588B1 (en) 1999-12-22 2004-08-17 Leybold Vakuum Gmbh Dry compressing vacuum pump having a gas ballast device
DE10127082A1 (de) * 2001-06-02 2002-12-05 Leybold Vakuum Gmbh Mehrstufige Kolbenvakuumpumpe und Verfahren zum Betrieb dieser Pumpe

Also Published As

Publication number Publication date
DE59712067D1 (de) 2004-12-09
DE59705578D1 (de) 2002-01-10
WO1998009079A1 (fr) 1998-03-05
EP0922165A1 (fr) 1999-06-16
DE19634519A1 (de) 1998-03-05
EP0922163B1 (fr) 2001-11-28
EP0922165B1 (fr) 2004-11-03
EP0922163A1 (fr) 1999-06-16

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