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WO1996030797A1 - Sonde micro-optique pour microscope a balayage - Google Patents

Sonde micro-optique pour microscope a balayage Download PDF

Info

Publication number
WO1996030797A1
WO1996030797A1 PCT/EP1996/001322 EP9601322W WO9630797A1 WO 1996030797 A1 WO1996030797 A1 WO 1996030797A1 EP 9601322 W EP9601322 W EP 9601322W WO 9630797 A1 WO9630797 A1 WO 9630797A1
Authority
WO
WIPO (PCT)
Prior art keywords
micro
optical
optical waveguide
probe according
piezoelectric exciter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP1996/001322
Other languages
German (de)
English (en)
Inventor
Manfred Weihnacht
Karlheinz Bartzke
Günter Martin
Wolfgang Richter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Carl Zeiss Jena GmbH
Original Assignee
VEB Carl Zeiss Jena GmbH
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19531465A external-priority patent/DE19531465C2/de
Application filed by VEB Carl Zeiss Jena GmbH, Carl Zeiss Jena GmbH filed Critical VEB Carl Zeiss Jena GmbH
Priority to EP96911945A priority Critical patent/EP0763215A1/fr
Publication of WO1996030797A1 publication Critical patent/WO1996030797A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders

Definitions

  • the invention relates to a micro-optical probe for scanning microscopes
  • a tip in a range of less than 1 nm is brought to a conductive sample surface using piezo positioning technology. If an electrical voltage is applied between the tip and the sample surface, a tunnel current of the order of magnitude begins to flow. A change in the gap between the tip and the sample surface of z. B. 0.1 nm causes a change in the tunnel current by an order of magnitude. This strong distance dependency is used to track the needle by means of the piezo positioning technique. /G. Binning, H. Rohrer, "Scanning tunneling microscopy - from birth to adokescence", Rev. Mod. Phys. 49 (1982) 1, 57-61 /.
  • Crystal corner metal coated and the tip is exposed again, for example by ion etching.
  • the light emerging from the aperture shines through the object or turns on reflected by it and detected by a light-sensitive detector as a measurement signal.
  • the probe is guided mechanically over the object surface using a stylus, such as with a profilometer, or interferometrically
  • Another near-field optical microscopy method is. become known from EP 0 545 538.
  • a single-mode glass fiber is drawn out to a fine tip and coated with metal using vapor deposition techniques.
  • An aperture for the passage of light is kept clear at the tip of the fiber.
  • the probe is guided over the object surface in that the glass fiber tip is set into lateral vibrations by a piezo tube, these vibrations are damped by the proximity of the object surface, and the vibration damping is measured by an additional optical system.
  • the measurement signals of the optical system are used for probe guidance.
  • a photosensitive detector detects the light transmitting or reflecting the object and forms the measurement signal.
  • Light intensities are relatively low and therefore lead to slow scanning times of an image.
  • the invention is based on the object with a new one
  • the optical waveguide is enclosed by the piezoelectric exciter in a wide range.
  • an optical system for coupling light in / out of the light source / light receiver downstream of the optical system is attached to the side of the optical waveguide facing away from the object.
  • the optical system consists of a lenticular part facing the optical waveguide, a fiber core and an optical fiber.
  • the optical waveguide has the geometric shape of a bar on the side facing away from the object.
  • the optical waveguide consists of silicon carbide (SiC).
  • the piezoelectric exciter is made of aluminum nitride (A1N).
  • the piezoelectric exciter has the geometric shape of a bar clamped in the middle.
  • the piezoelectric exciter has the geometric shape of a beam clamped on one side.
  • the piezoelectric exciter consists of a material which is transparent to the light wavelength used and has a refractive index which is lower than that of the optical waveguide and that the piezoelectric exciter forms a cladding for the optical waveguide.
  • the end of the optical waveguide facing away from the object is optically coupled to a semiconductor diode which can emit or receive light.
  • the optical waveguide consists of a doped semiconductor material and the end of the optical waveguide facing away from the object is provided with an electrical contact.
  • optical waveguide itself is designed as a piezoelectric exciter.
  • a high light intensity is achieved with the solution according to the invention, which shortens the times for scanning a micro-optical image.
  • the cross section of the optical waveguide can be very small, which means that local illumination of an object with high light intensity or local detection 5 the light intensity in the near field of an object with low optical losses is possible.
  • micro-optical probe according to the invention will be explained in more detail below using an exemplary embodiment.
  • An optical waveguide 4 a thin-film waveguide, consists of the silicon carbide (SiC) material, which is transparent and particularly highly refractive for the wavelength used.
  • a micro-probe tip 2 of the optical waveguide 4 facing the object 1 has in each of the two directions perpendicular to the light propagation a width which is approximately equal to half the wavelength of the light used, divided by the refractive index n of the material of the optical waveguide 4.
  • the optical waveguide 4 is mechanically coupled to a piezoelectric exciter 3.
  • the end of the optical waveguide 4 facing away from the object is optically coupled to a light source 5 via an optical fiber 6.
  • An optical system consisting of the optical fiber 6 with a fiber core 8, is provided with a lens-shaped part 7 to avoid major coupling losses.
  • the piezoelectric exciter 3 has the geometric shape of a bar, which is held in its central part in the region of the vibration node. It is formed by the two layers 9, 10, which are made of aluminum nitride (A1N) exist.
  • the A1N has a lower refractive index than the SiC and therefore forms a cladding for the optical waveguide.
  • the optical waveguide 4 is arranged within the piezoelectric exciter 3 between the piezoelectric layers 9, 10 and, outside the piezoelectric exciter 3, has a taper 11 on the object side, which converts the light into the micro-probe tip 2.
  • the piezoelectric exciter 3 is excited to vibrate by means of the electrodes 12, 13.
  • the length L of the piezoelectric exciter 3 is selected so that it corresponds approximately to a quarter wavelength of the acoustic wave of the piezoelectric exciter 3 for a given excitation frequency. In this way, a longitudinal resonance of the piezoelectric exciter 3 parallel to the direction of propagation of the light is made possible.
  • the electrical leads 14, 15 for the electrodes 12, 13 of the piezoelectric exciter 3 are connected via contact islands 16. The entire arrangement is located on a substrate 17 made of silicon (Si).
  • the substrate 17 can have, for example, an area of approximately 1 mm and a thickness of approximately 300 ⁇ m.
  • the optical fiber 6 is fixed on the Si substrate 17 by means of a V-shaped groove etched into the substrate.
  • the piezoelectric exciter 3 and the part of the optical waveguide 2, 11 facing the object consist of self-supporting layers to ensure the free oscillation of the piezoresonator.

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Cette sonde micro-optique est conçue de telle façon que la face du guide d'ondes optique orientée vers l'objet est constituée d'une pointe de contact microscopique présentant une réfraction optique élevée, et elle possède, dans les deux directions perpendiculaires à la propagation de la lumière vers l'objet, des dimensions proches de B = μ/2n, μ représentant la longueur d'onde dans le vide de la lumière utilisée et n l'indice de réfraction du guide d'ondes optique couplé mécaniquement à un élément d'excitation piézoélectrique.
PCT/EP1996/001322 1995-03-30 1996-03-26 Sonde micro-optique pour microscope a balayage Ceased WO1996030797A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP96911945A EP0763215A1 (fr) 1995-03-30 1996-03-26 Sonde micro-optique pour microscope a balayage

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19511612 1995-03-30
DE19511612.7 1995-03-30
DE19531465.4 1995-08-26
DE19531465A DE19531465C2 (de) 1995-03-30 1995-08-26 Rastersonde für die optische Nahfeldmikroskopie

Publications (1)

Publication Number Publication Date
WO1996030797A1 true WO1996030797A1 (fr) 1996-10-03

Family

ID=26013880

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1996/001322 Ceased WO1996030797A1 (fr) 1995-03-30 1996-03-26 Sonde micro-optique pour microscope a balayage

Country Status (2)

Country Link
EP (1) EP0763215A1 (fr)
WO (1) WO1996030797A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3260619B2 (ja) 1996-03-19 2002-02-25 セイコーインスツルメンツ株式会社 光導波路プロ−ブおよび光システム

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4385798A (en) * 1980-09-16 1983-05-31 Yevick George J Piezoelectric light beam deflector
US4604520A (en) * 1982-12-27 1986-08-05 International Business Machines Corporation Optical near-field scanning microscope
EP0480645A1 (fr) * 1990-10-09 1992-04-15 Canon Kabushiki Kaisha Capteur du type cantilever, microscope à effet tunnel et dispositif de traitement d'information utilisant ce capteur
EP0545538A1 (fr) * 1991-11-04 1993-06-09 AT&T Corp. Microscope à balayage comportant un moyen de détection d'une force
US5288998A (en) * 1990-11-19 1994-02-22 At&T Bell Laboratories Manufacturing method including photoresist processing using a near-field optical probe
US5354985A (en) * 1993-06-03 1994-10-11 Stanford University Near field scanning optical and force microscope including cantilever and optical waveguide
WO1995003561A1 (fr) * 1993-07-22 1995-02-02 British Technology Group Limited Detecteur intelligent pour dispositif optique a champ proche

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4385798A (en) * 1980-09-16 1983-05-31 Yevick George J Piezoelectric light beam deflector
US4604520A (en) * 1982-12-27 1986-08-05 International Business Machines Corporation Optical near-field scanning microscope
EP0480645A1 (fr) * 1990-10-09 1992-04-15 Canon Kabushiki Kaisha Capteur du type cantilever, microscope à effet tunnel et dispositif de traitement d'information utilisant ce capteur
US5288998A (en) * 1990-11-19 1994-02-22 At&T Bell Laboratories Manufacturing method including photoresist processing using a near-field optical probe
EP0545538A1 (fr) * 1991-11-04 1993-06-09 AT&T Corp. Microscope à balayage comportant un moyen de détection d'une force
US5354985A (en) * 1993-06-03 1994-10-11 Stanford University Near field scanning optical and force microscope including cantilever and optical waveguide
WO1995003561A1 (fr) * 1993-07-22 1995-02-02 British Technology Group Limited Detecteur intelligent pour dispositif optique a champ proche

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
WEINMANN M ET AL: "MEASURING PROFILE AND POSITION BY MEANS OF VIBRATING QUARTZ RESONATORS USED AS TACTILE AND NONTACTILE SENSORS", SENSORS AND ACTUATORS A, vol. A37/A38, 1 June 1993 (1993-06-01), pages 715 - 722, XP000411470 *
XIAO TANG ET AL: "OPTICAL WAVEGUIDE FORMED BY CUBIC SILICON CARBIDE ON SAPPHIRE SUBSTRATES", APPLIED PHYSICS LETTERS, vol. 58, no. 9, 4 March 1991 (1991-03-04), pages 917 - 918, XP000208514 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3260619B2 (ja) 1996-03-19 2002-02-25 セイコーインスツルメンツ株式会社 光導波路プロ−ブおよび光システム

Also Published As

Publication number Publication date
EP0763215A1 (fr) 1997-03-19

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