UY24183A1 - Conjunto de espejos accionados de pelicula delgada para ser utilizados en un sistema de proyeccion optica - Google Patents
Conjunto de espejos accionados de pelicula delgada para ser utilizados en un sistema de proyeccion opticaInfo
- Publication number
- UY24183A1 UY24183A1 UY24183A UY24183A UY24183A1 UY 24183 A1 UY24183 A1 UY 24183A1 UY 24183 A UY24183 A UY 24183A UY 24183 A UY24183 A UY 24183A UY 24183 A1 UY24183 A1 UY 24183A1
- Authority
- UY
- Uruguay
- Prior art keywords
- thin
- film
- thin film
- projection system
- mirrors
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 6
- 230000003287 optical effect Effects 0.000 title abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Lenses (AREA)
- Projection Apparatus (AREA)
- Optical Elements Other Than Lenses (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Liquid Crystal (AREA)
Abstract
Conjunto de MxN espejos accionados de película delgada que incluye una matriz activa, una capa aisladora, una capa de detención de grabado químico, y un conjunto de MxN estructuras actuadoras. Cada una presenta una punta en el extremo distal y una abertura de grabado que la atraviesa completamente, también incluye un primer electrodo de película delgada con una raya o línea horizontal, un miembro electromovible de película delgada, un segundo electrodo de película delgada, un miembro elástico y un conducto. La raya o línea horizontal, la punta y la abertura, están creadas para incrementar la eficiencia óptica de cada uno de los espejos accionados.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950009398A KR0177250B1 (ko) | 1995-04-21 | 1995-04-21 | 광로 조절 장치 |
| KR1019950009394A KR0154923B1 (ko) | 1995-04-21 | 1995-04-21 | 광로 조절 장치의 제조방법 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| UY24183A1 true UY24183A1 (es) | 1996-06-21 |
Family
ID=36955856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| UY24183A UY24183A1 (es) | 1995-04-21 | 1996-03-18 | Conjunto de espejos accionados de pelicula delgada para ser utilizados en un sistema de proyeccion optica |
Country Status (16)
| Country | Link |
|---|---|
| US (1) | US5757539A (es) |
| EP (1) | EP0741310B1 (es) |
| JP (1) | JP3734271B2 (es) |
| CN (1) | CN1082770C (es) |
| AR (1) | AR001107A1 (es) |
| AU (1) | AU698094B2 (es) |
| BR (1) | BR9608226A (es) |
| CA (1) | CA2218655A1 (es) |
| CZ (1) | CZ328097A3 (es) |
| DE (1) | DE69621516T2 (es) |
| HU (1) | HUP9801824A3 (es) |
| PL (1) | PL179925B1 (es) |
| RU (1) | RU2166784C2 (es) |
| TW (1) | TW305943B (es) |
| UY (1) | UY24183A1 (es) |
| WO (1) | WO1996033576A1 (es) |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6969635B2 (en) * | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| US6849471B2 (en) * | 2003-03-28 | 2005-02-01 | Reflectivity, Inc. | Barrier layers for microelectromechanical systems |
| GB2313451A (en) * | 1996-05-23 | 1997-11-26 | Daewoo Electronics Co Ltd | Method for manufacturing a thin film actuated mirror array |
| KR100212539B1 (ko) * | 1996-06-29 | 1999-08-02 | 전주범 | 박막형 광로조절장치의 엑츄에이터 및 제조방법 |
| US5991064A (en) * | 1996-06-29 | 1999-11-23 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array and a method for the manufacture thereof |
| WO1998008127A1 (en) * | 1996-08-21 | 1998-02-26 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array for use in an optical projection system |
| US6136390A (en) * | 1996-12-11 | 2000-10-24 | Daewoo Electronics Co., Ltd. | Method for manufacturing a thin film actuatable mirror array having an enhanced structural integrity |
| US5949568A (en) * | 1996-12-30 | 1999-09-07 | Daewoo Electronics Co., Ltd. | Array of thin film actuated mirrors having a levelling member |
| WO1998038801A1 (en) * | 1997-02-26 | 1998-09-03 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| AU722330B2 (en) * | 1997-02-26 | 2000-07-27 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| WO1998039922A1 (en) * | 1997-03-05 | 1998-09-11 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| US5815305A (en) * | 1997-03-10 | 1998-09-29 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| US5917645A (en) * | 1997-03-28 | 1999-06-29 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| US6104525A (en) * | 1997-04-29 | 2000-08-15 | Daewoo Electronics Co., Ltd. | Array of thin film actuated mirrors and method for the manufacture thereof |
| US5937271A (en) * | 1997-05-23 | 1999-08-10 | Daewoo Electronics Co., Inc. | Method for manufacturing a thin film actuated mirror array |
| GB2341693B (en) * | 1997-05-27 | 2001-11-14 | Daewoo Electronics Co Ltd | Method for manufacturing a thin film actuated mirror array |
| RU2187212C2 (ru) * | 1997-05-27 | 2002-08-10 | Дэу Электроникс Ко., Лтд. | Способ изготовления матрицы управляемых тонкопленочных зеркал |
| KR19990004774A (ko) * | 1997-06-30 | 1999-01-25 | 배순훈 | 박막형 광로 조절 장치의 제조 방법 |
| KR19990004787A (ko) * | 1997-06-30 | 1999-01-25 | 배순훈 | 박막형 광로 조절 장치 |
| EP1033037B1 (en) * | 1997-06-30 | 2006-12-13 | Daewoo Electronics Corporation | Thin film actuated mirror including a seeding member and an electrodisplacive member made of materials having the same crystal structure and growth direction |
| JP2001522072A (ja) * | 1997-10-31 | 2001-11-13 | テーウー エレクトロニクス カンパニー リミテッド | 薄膜型光路調節装置の製造方法 |
| US5920421A (en) * | 1997-12-10 | 1999-07-06 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| GB2332750B (en) * | 1997-12-23 | 2000-02-23 | Daewoo Electronics Co Ltd | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| US6523961B2 (en) | 2000-08-30 | 2003-02-25 | Reflectivity, Inc. | Projection system and mirror elements for improved contrast ratio in spatial light modulators |
| US7167297B2 (en) * | 2000-08-30 | 2007-01-23 | Reflectivity, Inc | Micromirror array |
| US7027418B2 (en) | 2001-01-25 | 2006-04-11 | Bandspeed, Inc. | Approach for selecting communications channels based on performance |
| US7023606B2 (en) * | 2001-08-03 | 2006-04-04 | Reflectivity, Inc | Micromirror array for projection TV |
| KR100394020B1 (ko) * | 2001-10-18 | 2003-08-09 | 엘지전자 주식회사 | Ｄｍｄ 패널의 제조 방법 |
| US6965468B2 (en) | 2003-07-03 | 2005-11-15 | Reflectivity, Inc | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array |
| US20040006490A1 (en) * | 2002-07-08 | 2004-01-08 | Gingrich Mark A. | Prescription data exchange system |
| US7042622B2 (en) * | 2003-10-30 | 2006-05-09 | Reflectivity, Inc | Micromirror and post arrangements on substrates |
| US7281808B2 (en) * | 2003-06-21 | 2007-10-16 | Qortek, Inc. | Thin, nearly wireless adaptive optical device |
| US20050070049A1 (en) * | 2003-09-29 | 2005-03-31 | Cheng S. J. | Method for fabricating wafer-level chip scale packages |
| CN101038582B (zh) * | 2007-04-02 | 2010-05-12 | 中国科学院光电技术研究所 | 用于自适应光学波前复原运算的脉动阵列处理方法及电路 |
| US8447252B2 (en) * | 2009-01-21 | 2013-05-21 | Bandspeed, Inc. | Adaptive channel scanning for detection and classification of RF signals |
| US8849213B2 (en) * | 2009-01-21 | 2014-09-30 | Bandspeed, Inc. | Integrated circuit for signal analysis |
| RU2510975C2 (ru) * | 2009-12-01 | 2014-04-10 | Шарп Кабусики Кайся | Подложка активной матрицы и устройство отображения |
| JP6613593B2 (ja) | 2015-04-01 | 2019-12-04 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の製造方法、および電子機器 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
| US4662746A (en) * | 1985-10-30 | 1987-05-05 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4793699A (en) * | 1985-04-19 | 1988-12-27 | Canon Kabushiki Kaisha | Projection apparatus provided with an electro-mechanical transducer element |
| US5172262A (en) * | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
| SU1439518A1 (ru) * | 1987-04-21 | 1988-11-23 | Каунасский Политехнический Институт Им.Антанаса Снечкуса | Сканирующее устройство |
| US5099353A (en) * | 1990-06-29 | 1992-03-24 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
| US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
| US5481396A (en) * | 1994-02-23 | 1996-01-02 | Aura Systems, Inc. | Thin film actuated mirror array |
| CN1062664C (zh) * | 1994-06-22 | 2001-02-28 | 大宇电子株式会社 | 改进的制造薄膜可致动反射镜阵列的方法 |
-
1996
- 1996-02-15 TW TW085101898A patent/TW305943B/zh active
- 1996-02-16 US US08/602,928 patent/US5757539A/en not_active Expired - Lifetime
- 1996-02-23 EP EP96102744A patent/EP0741310B1/en not_active Expired - Lifetime
- 1996-02-23 DE DE69621516T patent/DE69621516T2/de not_active Expired - Fee Related
- 1996-02-28 AR AR33557696A patent/AR001107A1/es not_active Application Discontinuation
- 1996-03-07 HU HU9801824A patent/HUP9801824A3/hu unknown
- 1996-03-07 RU RU97119085/28A patent/RU2166784C2/ru not_active IP Right Cessation
- 1996-03-07 WO PCT/KR1996/000033 patent/WO1996033576A1/en not_active Ceased
- 1996-03-07 JP JP53163696A patent/JP3734271B2/ja not_active Expired - Fee Related
- 1996-03-07 CN CN96193409A patent/CN1082770C/zh not_active Expired - Fee Related
- 1996-03-07 PL PL96322906A patent/PL179925B1/pl unknown
- 1996-03-07 AU AU49570/96A patent/AU698094B2/en not_active Ceased
- 1996-03-07 BR BR9608226A patent/BR9608226A/pt not_active IP Right Cessation
- 1996-03-07 CZ CZ973280A patent/CZ328097A3/cs unknown
- 1996-03-07 CA CA002218655A patent/CA2218655A1/en not_active Abandoned
- 1996-03-18 UY UY24183A patent/UY24183A1/es not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| RU2166784C2 (ru) | 2001-05-10 |
| DE69621516T2 (de) | 2003-01-16 |
| HUP9801824A3 (en) | 2002-07-29 |
| DE69621516D1 (de) | 2002-07-11 |
| CA2218655A1 (en) | 1996-10-24 |
| EP0741310B1 (en) | 2002-06-05 |
| HUP9801824A2 (hu) | 1998-11-30 |
| AR001107A1 (es) | 1997-09-24 |
| TW305943B (es) | 1997-05-21 |
| WO1996033576A1 (en) | 1996-10-24 |
| EP0741310A1 (en) | 1996-11-06 |
| JP3734271B2 (ja) | 2006-01-11 |
| CN1182519A (zh) | 1998-05-20 |
| BR9608226A (pt) | 1998-12-29 |
| CZ328097A3 (cs) | 1998-04-15 |
| JPH11503843A (ja) | 1999-03-30 |
| PL322906A1 (en) | 1998-03-02 |
| US5757539A (en) | 1998-05-26 |
| AU698094B2 (en) | 1998-10-22 |
| CN1082770C (zh) | 2002-04-10 |
| PL179925B1 (pl) | 2000-11-30 |
| AU4957096A (en) | 1996-11-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| VENC | Patent expired |
Effective date: 20160318 |