AR001107A1 - Un conjunto de M x N espejos accionados de película delgada y método para fabricarlo - Google Patents
Un conjunto de M x N espejos accionados de película delgada y método para fabricarloInfo
- Publication number
- AR001107A1 AR001107A1 AR33557696A AR33557696A AR001107A1 AR 001107 A1 AR001107 A1 AR 001107A1 AR 33557696 A AR33557696 A AR 33557696A AR 33557696 A AR33557696 A AR 33557696A AR 001107 A1 AR001107 A1 AR 001107A1
- Authority
- AR
- Argentina
- Prior art keywords
- thin film
- mirrors
- tip
- making
- powered mirrors
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title abstract 7
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000013078 crystal Substances 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000011159 matrix material Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S359/00—Optical: systems and elements
- Y10S359/904—Micromirror
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
- Optical Elements Other Than Lenses (AREA)
- Lenses (AREA)
- Projection Apparatus (AREA)
- Transforming Electric Information Into Light Information (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
Abstract
Un conjunto de M x N espejos accionados de película delgada, y método para su fabricación, en donde el conjunto incluye una matriz activa, una capaaisladora, una capa de detención de grabado químico, y un conjunto de M x N estructuras actuadoras, cada una de las cuales presenta una punta en el extremodistal de la misma y una abertura de grabado que la atraviesa completamente, y además incluye un primer electrodo de película delgada con una raya o líneahorizontal, un miembro electromoviblede película delgada, un segundo electrodo de película delgada, un miembro elástico y un conducto. La raya olínea horizontal, la punta y la abertura de grabado están creadas con el objeto de incrementar la eficiencia óptica de cada uno de los espejos accionados depelícula delgada, facilitar la remoción del enjuague y permitir la remoción fácil de la película de sacrificio de película delgada, respectivamente.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950009394A KR0154923B1 (ko) | 1995-04-21 | 1995-04-21 | 광로 조절 장치의 제조방법 |
| KR1019950009398A KR0177250B1 (ko) | 1995-04-21 | 1995-04-21 | 광로 조절 장치 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AR001107A1 true AR001107A1 (es) | 1997-09-24 |
Family
ID=36955856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AR33557696A AR001107A1 (es) | 1995-04-21 | 1996-02-28 | Un conjunto de M x N espejos accionados de película delgada y método para fabricarlo |
Country Status (16)
| Country | Link |
|---|---|
| US (1) | US5757539A (es) |
| EP (1) | EP0741310B1 (es) |
| JP (1) | JP3734271B2 (es) |
| CN (1) | CN1082770C (es) |
| AR (1) | AR001107A1 (es) |
| AU (1) | AU698094B2 (es) |
| BR (1) | BR9608226A (es) |
| CA (1) | CA2218655A1 (es) |
| CZ (1) | CZ328097A3 (es) |
| DE (1) | DE69621516T2 (es) |
| HU (1) | HUP9801824A3 (es) |
| PL (1) | PL179925B1 (es) |
| RU (1) | RU2166784C2 (es) |
| TW (1) | TW305943B (es) |
| UY (1) | UY24183A1 (es) |
| WO (1) | WO1996033576A1 (es) |
Families Citing this family (38)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6849471B2 (en) * | 2003-03-28 | 2005-02-01 | Reflectivity, Inc. | Barrier layers for microelectromechanical systems |
| US6969635B2 (en) * | 2000-12-07 | 2005-11-29 | Reflectivity, Inc. | Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates |
| GB2313451A (en) * | 1996-05-23 | 1997-11-26 | Daewoo Electronics Co Ltd | Method for manufacturing a thin film actuated mirror array |
| KR100212539B1 (ko) * | 1996-06-29 | 1999-08-02 | 전주범 | 박막형 광로조절장치의 엑츄에이터 및 제조방법 |
| US5991064A (en) * | 1996-06-29 | 1999-11-23 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array and a method for the manufacture thereof |
| WO1998008127A1 (en) * | 1996-08-21 | 1998-02-26 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array for use in an optical projection system |
| US6136390A (en) * | 1996-12-11 | 2000-10-24 | Daewoo Electronics Co., Ltd. | Method for manufacturing a thin film actuatable mirror array having an enhanced structural integrity |
| US5949568A (en) * | 1996-12-30 | 1999-09-07 | Daewoo Electronics Co., Ltd. | Array of thin film actuated mirrors having a levelling member |
| WO1998038801A1 (en) * | 1997-02-26 | 1998-09-03 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| EP0962101A1 (en) * | 1997-02-26 | 1999-12-08 | Daewoo Electronics Co., Ltd | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| AU741296B2 (en) * | 1997-03-05 | 2001-11-29 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| US5815305A (en) * | 1997-03-10 | 1998-09-29 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| US5917645A (en) * | 1997-03-28 | 1999-06-29 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| GB2324882B (en) * | 1997-04-29 | 2001-05-23 | Daewoo Electronics Co Ltd | Array of thin film actuated mirrors and method for the manufacture thereof |
| US5937271A (en) * | 1997-05-23 | 1999-08-10 | Daewoo Electronics Co., Inc. | Method for manufacturing a thin film actuated mirror array |
| DE19782276T1 (de) * | 1997-05-27 | 2000-05-25 | Daewoo Electronics Co Ltd | Verfahren für die Herstellung einer Dünnfilm-Stellspiegelanordnung |
| RU2187212C2 (ru) * | 1997-05-27 | 2002-08-10 | Дэу Электроникс Ко., Лтд. | Способ изготовления матрицы управляемых тонкопленочных зеркал |
| KR19990004774A (ko) * | 1997-06-30 | 1999-01-25 | 배순훈 | 박막형 광로 조절 장치의 제조 방법 |
| CN1169375C (zh) * | 1997-06-30 | 2004-09-29 | 株式会社大宇电子 | 薄膜致动反射镜阵列及其制造方法 |
| KR19990004787A (ko) * | 1997-06-30 | 1999-01-25 | 배순훈 | 박막형 광로 조절 장치 |
| JP2001522072A (ja) * | 1997-10-31 | 2001-11-13 | テーウー エレクトロニクス カンパニー リミテッド | 薄膜型光路調節装置の製造方法 |
| US5920421A (en) * | 1997-12-10 | 1999-07-06 | Daewoo Electronics Co., Ltd. | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| GB2332750B (en) * | 1997-12-23 | 2000-02-23 | Daewoo Electronics Co Ltd | Thin film actuated mirror array in an optical projection system and method for manufacturing the same |
| US6523961B2 (en) | 2000-08-30 | 2003-02-25 | Reflectivity, Inc. | Projection system and mirror elements for improved contrast ratio in spatial light modulators |
| US7018052B2 (en) * | 2000-08-30 | 2006-03-28 | Reflectivity, Inc | Projection TV with improved micromirror array |
| US7027418B2 (en) | 2001-01-25 | 2006-04-11 | Bandspeed, Inc. | Approach for selecting communications channels based on performance |
| US7023606B2 (en) * | 2001-08-03 | 2006-04-04 | Reflectivity, Inc | Micromirror array for projection TV |
| KR100394020B1 (ko) * | 2001-10-18 | 2003-08-09 | 엘지전자 주식회사 | Ｄｍｄ 패널의 제조 방법 |
| US6965468B2 (en) | 2003-07-03 | 2005-11-15 | Reflectivity, Inc | Micromirror array having reduced gap between adjacent micromirrors of the micromirror array |
| US20040006490A1 (en) * | 2002-07-08 | 2004-01-08 | Gingrich Mark A. | Prescription data exchange system |
| US7042622B2 (en) * | 2003-10-30 | 2006-05-09 | Reflectivity, Inc | Micromirror and post arrangements on substrates |
| US7281808B2 (en) * | 2003-06-21 | 2007-10-16 | Qortek, Inc. | Thin, nearly wireless adaptive optical device |
| US20050070049A1 (en) * | 2003-09-29 | 2005-03-31 | Cheng S. J. | Method for fabricating wafer-level chip scale packages |
| CN101038582B (zh) * | 2007-04-02 | 2010-05-12 | 中国科学院光电技术研究所 | 用于自适应光学波前复原运算的脉动阵列处理方法及电路 |
| US8849213B2 (en) * | 2009-01-21 | 2014-09-30 | Bandspeed, Inc. | Integrated circuit for signal analysis |
| US8447252B2 (en) * | 2009-01-21 | 2013-05-21 | Bandspeed, Inc. | Adaptive channel scanning for detection and classification of RF signals |
| BR112012013123A2 (pt) * | 2009-12-01 | 2017-03-14 | Sharp Kk | substrato de matriz ativa e dispositivo de exibição. |
| JP6613593B2 (ja) | 2015-04-01 | 2019-12-04 | セイコーエプソン株式会社 | 電気光学装置、電気光学装置の製造方法、および電子機器 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4441791A (en) * | 1980-09-02 | 1984-04-10 | Texas Instruments Incorporated | Deformable mirror light modulator |
| US4662746A (en) * | 1985-10-30 | 1987-05-05 | Texas Instruments Incorporated | Spatial light modulator and method |
| US4793699A (en) * | 1985-04-19 | 1988-12-27 | Canon Kabushiki Kaisha | Projection apparatus provided with an electro-mechanical transducer element |
| US5172262A (en) * | 1985-10-30 | 1992-12-15 | Texas Instruments Incorporated | Spatial light modulator and method |
| SU1439518A1 (ru) * | 1987-04-21 | 1988-11-23 | Каунасский Политехнический Институт Им.Антанаса Снечкуса | Сканирующее устройство |
| US5099353A (en) * | 1990-06-29 | 1992-03-24 | Texas Instruments Incorporated | Architecture and process for integrating DMD with control circuit substrates |
| US5247222A (en) * | 1991-11-04 | 1993-09-21 | Engle Craig D | Constrained shear mode modulator |
| US5481396A (en) * | 1994-02-23 | 1996-01-02 | Aura Systems, Inc. | Thin film actuated mirror array |
| CN1062664C (zh) * | 1994-06-22 | 2001-02-28 | 大宇电子株式会社 | 改进的制造薄膜可致动反射镜阵列的方法 |
-
1996
- 1996-02-15 TW TW085101898A patent/TW305943B/zh active
- 1996-02-16 US US08/602,928 patent/US5757539A/en not_active Expired - Lifetime
- 1996-02-23 EP EP96102744A patent/EP0741310B1/en not_active Expired - Lifetime
- 1996-02-23 DE DE69621516T patent/DE69621516T2/de not_active Expired - Fee Related
- 1996-02-28 AR AR33557696A patent/AR001107A1/es not_active Application Discontinuation
- 1996-03-07 CN CN96193409A patent/CN1082770C/zh not_active Expired - Fee Related
- 1996-03-07 CA CA002218655A patent/CA2218655A1/en not_active Abandoned
- 1996-03-07 PL PL96322906A patent/PL179925B1/pl unknown
- 1996-03-07 BR BR9608226A patent/BR9608226A/pt not_active IP Right Cessation
- 1996-03-07 RU RU97119085/28A patent/RU2166784C2/ru not_active IP Right Cessation
- 1996-03-07 HU HU9801824A patent/HUP9801824A3/hu unknown
- 1996-03-07 JP JP53163696A patent/JP3734271B2/ja not_active Expired - Fee Related
- 1996-03-07 WO PCT/KR1996/000033 patent/WO1996033576A1/en not_active Ceased
- 1996-03-07 AU AU49570/96A patent/AU698094B2/en not_active Ceased
- 1996-03-07 CZ CZ973280A patent/CZ328097A3/cs unknown
- 1996-03-18 UY UY24183A patent/UY24183A1/es not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN1082770C (zh) | 2002-04-10 |
| HUP9801824A2 (hu) | 1998-11-30 |
| AU4957096A (en) | 1996-11-07 |
| JPH11503843A (ja) | 1999-03-30 |
| CN1182519A (zh) | 1998-05-20 |
| TW305943B (es) | 1997-05-21 |
| CZ328097A3 (cs) | 1998-04-15 |
| EP0741310B1 (en) | 2002-06-05 |
| PL322906A1 (en) | 1998-03-02 |
| CA2218655A1 (en) | 1996-10-24 |
| HUP9801824A3 (en) | 2002-07-29 |
| RU2166784C2 (ru) | 2001-05-10 |
| UY24183A1 (es) | 1996-06-21 |
| BR9608226A (pt) | 1998-12-29 |
| DE69621516T2 (de) | 2003-01-16 |
| AU698094B2 (en) | 1998-10-22 |
| PL179925B1 (pl) | 2000-11-30 |
| DE69621516D1 (de) | 2002-07-11 |
| JP3734271B2 (ja) | 2006-01-11 |
| US5757539A (en) | 1998-05-26 |
| WO1996033576A1 (en) | 1996-10-24 |
| EP0741310A1 (en) | 1996-11-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FA | Abandonment or withdrawal |