[go: up one dir, main page]

US3723791A - Electrical high voltage apparatus equipped with a movable air lock device for exchanging the filament of an electron gun - Google Patents

Electrical high voltage apparatus equipped with a movable air lock device for exchanging the filament of an electron gun Download PDF

Info

Publication number
US3723791A
US3723791A US00224789A US3723791DA US3723791A US 3723791 A US3723791 A US 3723791A US 00224789 A US00224789 A US 00224789A US 3723791D A US3723791D A US 3723791DA US 3723791 A US3723791 A US 3723791A
Authority
US
United States
Prior art keywords
tank
vessel
air lock
expandable member
wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00224789A
Other languages
English (en)
Inventor
F Stocklein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Application granted granted Critical
Publication of US3723791A publication Critical patent/US3723791A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/028—Replacing parts of the gun; Relative adjustment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Definitions

  • An electric high-voltage apparatus such as an electron accelerator or the like includes a tank having a wall and a tank access located in the wall for making the interior of the tank accessible.
  • An electrical discharge vessel is disposed in the tank and contains replaceable parts.
  • the vessel has a wall and is insulatingly spaced from the tank wall.
  • a vessel access is located in the vessel wall for making the replaceable parts accessible.
  • a tube-like air lock device having a longitudinal axis is movable in the tank transversely to this axis from a given rest position to an operative position located between the tank access and said vessel access.
  • the device includes expansion structure for defining a gas-tight passage between the vessel access and the tank access when the device is in the operative position thereof.
  • the invention is especially adaptable for an electron accelerator which can for instance serve as the beam source for an electron microscope.
  • an electron accelerator which can for instance serve as the beam source for an electron microscope.
  • a tubular air lock is situated within the tank of a high voltage apparatus of the type mentioned above.
  • the air lock remains within the tank during the operation of the discharge vessel.
  • the air lock device has a longitudinal axis and is movable into the transfer or operative position in a direction transversely to this axis.
  • the air lock device includes expansion means for defining a gastight passage between an access means located in the wall of the tank and an access means in the wall of the vessel when the air lock device is in the operative position.
  • the gas-tight seal is formed with the sealing surfaces of the vessel and the tank sealing flanges of the expansion means.
  • the linkage means of the tubular air lock device advantageously includes a set of rails upon which a carriage moves for carrying the expandable member.
  • a drive means is operatively connected to the carriage for moving it and the expandable member laterally to the operative position.
  • the carriage includes means operatively connected to the drive means and to the knee lever for extending the expandable member at the operative position in response to a further actuation of the drive means.
  • the tubular air lock may be situated in any given part of the tank at which it disturbs the field distribution between the tank and the discharge vessel as little as possible.
  • a lateral pocket or enclosure which receives the tubular air lock during the operation of the vessel. This pocket is closed off advantageously by a metal plate when the tubular air lock is moved into the pocket, so that the inner wall of the tank has no projecting parts which would cause discharges.
  • FIG. 1 is an elevation view, in section, of an electron accelerator equipped with a tubular air lock shown in the rest position;
  • FIG. 2 an elevation view of the electron accelerator of FIG. 1 showing the tubular air lock in the transfer position
  • FIG. 3 is a plan view of the tubular air lock and its guidance members with the cover of the vessel removed;
  • FIG. 4 is a side view of the tubular air lock guidance members taken along line lVlV of FIG. 3;
  • FIG. 5 is another embodiment of the air lock.
  • the wall of the discharge vessel is designated with reference numeral 1.
  • the wall 1 con sists of insulating material such as ceramic.
  • the discharge vessel is closed off in a vacuum-tight manner by means of a metal lid 2 which carries the cathode 3.
  • vessel access means comprising an opening in the lid 2 and a threaded insert 4 that closes off the opening vacuum tight is provided.
  • the discharge vessel is located in a metal tank 5 which is closed by a lid 6 in a pressuretight manner.
  • the lid 6 of the tank has tank access means comprising an opening above the cathode 3 and an insert 7 which closes the opening vacuum-tight.
  • the space 8 between the discharge vessel 1, 2 and the tank 5, 6 is filled with an electro-negative gas, for instance, sulfur hexafluoride, SF at a pressure of 4 atmospheres.
  • an electro-negative gas for instance, sulfur hexafluoride, SF at a pressure of 4 atmospheres.
  • the lid 2 with the cathode 3 is at high negative potential, for instance, several hundred kilovolts, while the tank 5, 6 is at ground potential.
  • the inserts 4 and 7 In order to replace the cathode 3, the inserts 4 and 7 must be removed while maintaining the gas filling in the space 8 as far as possible.
  • an expandable tubular air lock member designated by reference numeral 9 is provided, which in the illustrated embodiment is configured as a metal bellows that can expand along its longitudinal direction.
  • the tubular air lock 9 is provided at the upper and lower edge with sealing flanges l0 and II, respectively.
  • Seal rings 12 and 13 are inserted into flanges l0 and 11 respectively, and are pressed against the sealing surfaces 14 and 15 of the tank lid 6 and the lid 2 of the discharge vessel in the transfer or operating position as shown in FIG. 2.
  • a threaded ring 16 and I7 are attached at each sealing flange.
  • Pressure rings 18 and 19 engage the threaded rings 16 and 17 which are pushed apart by two k'riee levers 20a and 20b when the tubular air lock is moved into the transfer position; this action is explained later in more detail.
  • the sealing flanges 10 and 11 are pushed via the threaded rings 16 and 17 against the lid 2 of the discharge vessel and the lid 6 of the tank, this being especially evident in FIG, 2.
  • the spacing of the sealing flanges 10 .and 11 can be matched to the spacing between the lid of the discharge vessel 2 and the tank lid 6 in such a manner that the sealing rings 12 and 13 are under a suitable pressure in the transfer position.
  • Tension springs 21 and 22 are located between the pressure rings 18 and 19 which cause the knee levers 20a and 20b to fold and thereby initiate the shortening of the tubular airlock when it is moved away from the operating position.
  • the tubular air lock 9 is supported on a carriage 23, which is movable in a direction perpendicular to the axis of the tubular air lock.
  • the knee levers 20a and 20b are linked to this carriage 23 and are connected by joints at their outer ends to the pressure rings 18 and 19.
  • the carriage 23 runs on two guide rails 24 and 25 by means of support rails 26 and 27 of which one (27) is configured as a toothed rack member.
  • a pinion 28 is provided which engages with the rack 27 and can be operated from the outside by a crank 29.
  • the drive for moving the carriage 23 with the tubular airlock 9 operates as follows:
  • the carriage 23 is in its rest position in an enclosure in the form of a lateral pocket 5a of the tank wall 5.
  • the pocket 5a is here closed on the inside by a metal plate 31 which is connected with the carriage 23. If the crank 29 is now turned, the carriage 23 slides on the guide rails 24 and 25 to the left into the operating position.
  • the pressure rings 18 and 19 with projections 18a and 19a, respectively meet the fixed counter surfaces 32, 33 of the tank lid 6 and the vessel lid 2 respectively. These stops prevent a further movement of the tubular air lock 9 perpendicular to its axis.
  • the carriage 23 moves further to the left and, with the tubular air lock 9 held fixed, the knee levers 20a and 20b are now spread and the sealing flanges l0 and 11 are tensioned via the pressure rings 18 and 19 against the sealing surfaces 14, 15 of the tank lid 6 and the vessel lid 2 respectively.
  • the knee levers 20a and 20b are here pushed beyond dead center so that they exert no return force on the transfer gear.
  • Their end position is defined by a projection 23a of the carriage 23 which makes contact with the pressure ring 18; this position is shown in FIG. 2.
  • the range of displacement of the carriage 23 between the arrest of the tubular air lock 9 in the transfer position and the' impact of the carriage at the pressure ring 18 is noted by a slight increase of the torque at the crank 29. The end of the movement can clearly be felt by the hard stop.
  • the center joints of the knee levers 20a and 20b are supported on the carriage 23 in such a way that there is clearance in the direction of the tubular air lock axis.
  • lack of parallelism perpendicular to the plane of the drawing of FIGS. 1 and 2
  • this manner of support ensures that the same pressure automatically adjusts itself at the upper and lower seal.
  • the insert 7 can be removed from the tank lid 6 and the filler can be removed from the tubular air lock 9.
  • the insert 4 can be threadedly disengaged from the tank lid 2 so that the cathode 3 is accessible and can be exchanged by means of a suitable tool.
  • tubular air lock 9 After closing the air lock in the reverse sequence, the tubular air lock is run back into its rest position by turning the crank 29 in the opposite direction.
  • tubular air lock 9 is at first held in the operating position by the adhesion of the sealing rings 12 and 13 at the sealing surfaces 14 and 15.
  • the carriage 23 moves away from the tubular air lock 9 to the right and pulls the knee arms 20a and 20b beyond dead center.
  • the distance between the pressure rings 18 and 19 is shortened under the influence of the tension springs 21, 22.
  • the tubular air lock 9 is also allowed to become shorter thereby under the influence of the longitudinal spring loading, and after leaving the self-locking range in the knee lever linkage, the pressure rings 18 and 19 make contact with the carriage 23.
  • the sealing rings 12 and 13 have then separated from the respective sealing surfaces 14 and 15.
  • the parts can also be so disposed that the tension springs 21, 22, in addition to acting on the pressure rings 18 and 19, also act on the sealing flanges l0 and 11 in the sense of shortening the tubular air lock 9, for instance, by providing corresponding stops between the pressure rings 18 and 19 on the one hand, and the sealing flanges 10 and 11 on the other hand.
  • the carriage 23 with the tubular air lock 9 is then run into the pocket by 5a.
  • the pocket 5a is closed by the plate 31 in such a manner that the inner surface of the tank 5 has an essentially smooth surface at this location.
  • FIG. 5 illustrates another embodiment of the expandable tubular air lock. It consists of two tubes 34 and 35 mutually telescoped which are sealed with respect to each other.
  • the sealing flanges are again designated by reference numerals l0 and 1 l.
  • the tubular air lock moves in a rectilinear direction.
  • the invention is not limited to this form of motion; for instance, a rotating motion with circular-arc guidance can be provided.
  • This motion of the tubular air lock is also perpendicular to its axis.
  • Electric high-voltage apparatus such as an electo said axis from a given rest position to an operative position located between said tank ⁇ access means and said vessel access means, said device comprising expansion means for defining a gas-tight passage between said vessel. access means and said tank access means when said device is in said operative position thereof.
  • the apparatus of claim 1 comprising sealing surfaces formed on said walls respectively in surrounding relation to corresponding ones of said access means, and said expansion means comprising an expandable member having sealing flanges at respective ends thereof, and linkage means connected to said expandable member for extending the latter to press said sealing flanges gas-tight against said sealing surfaces respectively.
  • said expandable member being at least two tubular members telescopically connected with each other.
  • said linkage means comprising a knee lever having elongated members pivotally joined with each other at a pivot connection to form an acute angle, each of said elongated members having an end pivotally connected to said expandable member, and means for moving said linkage members angularly with respect to each other at said operative position so that the pivot connection moves laterally to cause said acute angle to become an obtuse angle.
  • said expandable member having rings threadably engaging respective ones of said sealing flanges for adjusting the positions of the latter, said elongated members being in operative connection with said rings.
  • said linkage means comprising a set of rails, and a carriage mounted on said rails for carrying said expandable member, and a drive means connected to said carriage for moving said carriage and said expandable member laterally from said rest position to said operative position, said carriage including means operatively connected to said drive means and to said knee lever for extending said expandable member at said operative position in response to a further actuation of said drive means.
  • said tank being formed with a lateral enclosure for accommodating said air lock device in said rest position, said carriage having a metal plate for closing said enclosure when said air lock device is in said rest position.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Electron Sources, Ion Sources (AREA)
US00224789A 1971-02-26 1972-02-09 Electrical high voltage apparatus equipped with a movable air lock device for exchanging the filament of an electron gun Expired - Lifetime US3723791A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2110130A DE2110130C3 (de) 1971-02-26 1971-02-26 Vorrichtung zum Auswechseln der Kathode in einem Elektronenstrahlerzeugungssystem

Publications (1)

Publication Number Publication Date
US3723791A true US3723791A (en) 1973-03-27

Family

ID=5800413

Family Applications (1)

Application Number Title Priority Date Filing Date
US00224789A Expired - Lifetime US3723791A (en) 1971-02-26 1972-02-09 Electrical high voltage apparatus equipped with a movable air lock device for exchanging the filament of an electron gun

Country Status (4)

Country Link
US (1) US3723791A (de)
DE (1) DE2110130C3 (de)
GB (1) GB1322475A (de)
NL (1) NL7114883A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555666A (en) * 1979-03-29 1985-11-26 Martin Frederick W Energy-stable accelerator with needle-like source and focused particle beam
US4721918A (en) * 1984-07-19 1988-01-26 High Voltage Engineering Europa B.V. Process and apparatus for the exchange of emission sources
US6252339B1 (en) * 1998-09-17 2001-06-26 Nikon Corporation Removable bombardment filament-module for electron beam projection systems
US20120288800A1 (en) * 2011-05-09 2012-11-15 Canon Kabushiki Kaisha Electron beam drawing apparatus and method of manufacturing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3470412A (en) * 1962-06-13 1969-09-30 Shimadzu Corp Apparatus for exchanging the filament of an electron gun

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3470412A (en) * 1962-06-13 1969-09-30 Shimadzu Corp Apparatus for exchanging the filament of an electron gun

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555666A (en) * 1979-03-29 1985-11-26 Martin Frederick W Energy-stable accelerator with needle-like source and focused particle beam
US4721918A (en) * 1984-07-19 1988-01-26 High Voltage Engineering Europa B.V. Process and apparatus for the exchange of emission sources
US6252339B1 (en) * 1998-09-17 2001-06-26 Nikon Corporation Removable bombardment filament-module for electron beam projection systems
US20120288800A1 (en) * 2011-05-09 2012-11-15 Canon Kabushiki Kaisha Electron beam drawing apparatus and method of manufacturing device

Also Published As

Publication number Publication date
DE2110130B2 (de) 1973-12-06
DE2110130A1 (de) 1972-08-31
NL7114883A (de) 1972-08-29
GB1322475A (en) 1973-07-04
DE2110130C3 (de) 1974-07-04

Similar Documents

Publication Publication Date Title
US3145969A (en) Gate valve having fluid pressure seal and limit stop means
US3723791A (en) Electrical high voltage apparatus equipped with a movable air lock device for exchanging the filament of an electron gun
US10553377B2 (en) Arrangement and method for guiding a switch rod of a high-voltage circuit breaker
US5952635A (en) Generator circuit breaker
US3814882A (en) Hybrid circuit interrupter
AR245540A1 (es) Disposicion de montaje de un conjunto de control para un interruptor de recierre electronico.
GB966110A (en) Circuit interrupter
US4234771A (en) Vacuum switch
US3601649A (en) Electron beam generating system for high beam potentials
GB2011184A (en) Earthing switch for high voltage metal-clad switchgear
GB516530A (en) Improvements in or relating to electric circuit-breaking devices of the gas-blast type
US3594524A (en) Vacuum-type electric circuit breaker
DE3004856A1 (de) Gasisolierte mittelspannungsschaltanlage
US3470412A (en) Apparatus for exchanging the filament of an electron gun
US2886672A (en) Air blast circuit breaker
JPS6293669A (ja) 高圧金属被覆装置の電圧測定装置
US3688061A (en) Improved compressed-gas circuit interrupter with split current-transformer housing for ready disassembly
US3586812A (en) Maintenance of a workpiece at a pressure other than ambient atmospheric pressure
US3476972A (en) Device for exchanging electron sources in electrical discharge devices
JPS6231460B2 (de)
US3268759A (en) Device for exchanging electron sources in electrical discharge devices
US1308262A (en) sipher
US4721918A (en) Process and apparatus for the exchange of emission sources
US3624326A (en) Compressed-gas circuit breaker with readily removable terminal bushing means
KR102256452B1 (ko) 가스 절연 개폐 장치용 레버 구동 구조