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GB1322475A - Air locks for use in electrical high tension apparatus - Google Patents

Air locks for use in electrical high tension apparatus

Info

Publication number
GB1322475A
GB1322475A GB641572A GB641572A GB1322475A GB 1322475 A GB1322475 A GB 1322475A GB 641572 A GB641572 A GB 641572A GB 641572 A GB641572 A GB 641572A GB 1322475 A GB1322475 A GB 1322475A
Authority
GB
United Kingdom
Prior art keywords
lock
air
sealing
housing
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB641572A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Original Assignee
Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft zur Foerderung der Wissenschaften eV filed Critical Max Planck Gesellschaft zur Foerderung der Wissenschaften eV
Publication of GB1322475A publication Critical patent/GB1322475A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • H01J3/028Replacing parts of the gun; Relative adjustment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/18Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

1322475 Discharge tubes MAX-PLANCK-GES ZUR FORDERUNG DER WISSENSCHAFTEN EV 11 Feb 1972 [26 Feb 1971] 6415/72 Heading H1D An air-lock, to permit access to a discharge tube 1, 2 mounted within an evacuated or gasfilled housing 5, 6 without substantial loss of the vacuum or gas filling, is located within the housing in a rest position, Fig. 7, during operation of the tube, and is movable into a sealing position, Fig. 2, to provide a sealed channel between opposed closable openings 4 and 7 in the walls of the tube and the housing, the movement being in a plane at right angles to the axis of the air-lock, and extension means being provided to operate when the air-lock reaches its sealing position, to cause it to extend axially to form a gas-tight seal between sealing surfaces of the housing and the tube. The air-lock is formed by an extensible metal bellows 9 having at its ends sealing flanges 10 and 11 which are provided with projections 18a and 19a, and are coupled to toggle levers 20a which are pivoted on a carriage which, by means of crank 29, may be moved along guide rails from the rest position of Fig. 1 to the sealing position of Fig. 2. Towards the end of the movement, the projections 18a and 19a encounter fixed surfaces 32 and 33 which retain the air-lock in a position aligned with the openings 4 and 7, while continued movement of the carriage, to a position determined by a projection 23a on the carriage, causes the toggle levers to pivot and thrust the sealing flanges against mating sealing surfaces. The sealing flanges are each provided with a threaded ring, to permit adjustment of their distance apart in the sealing position, and the interior space of the air-lock is normally filled with a removable filler plug 30, to reduce the loss of gas filling from the housing during operation of the lock. Reference is made to movement of the air-lock in a circular rather than a rectilinear path, and in a modified arrangement (Fig. 5, not shown) telescopic tubes rather than extensible bellows are employed. As described, the air-lock is employed for replacing the cathode 3 of an electron microscope;
GB641572A 1971-02-26 1972-02-11 Air locks for use in electrical high tension apparatus Expired GB1322475A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2110130A DE2110130C3 (en) 1971-02-26 1971-02-26 Device for changing the cathode in an electron gun

Publications (1)

Publication Number Publication Date
GB1322475A true GB1322475A (en) 1973-07-04

Family

ID=5800413

Family Applications (1)

Application Number Title Priority Date Filing Date
GB641572A Expired GB1322475A (en) 1971-02-26 1972-02-11 Air locks for use in electrical high tension apparatus

Country Status (4)

Country Link
US (1) US3723791A (en)
DE (1) DE2110130C3 (en)
GB (1) GB1322475A (en)
NL (1) NL7114883A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555666A (en) * 1979-03-29 1985-11-26 Martin Frederick W Energy-stable accelerator with needle-like source and focused particle beam
NL8402284A (en) * 1984-07-19 1986-02-17 High Voltage Eng Europ METHOD AND APPARATUS FOR EXCHANGING EMISSION SOURCES.
US6252339B1 (en) * 1998-09-17 2001-06-26 Nikon Corporation Removable bombardment filament-module for electron beam projection systems
JP2012238624A (en) * 2011-05-09 2012-12-06 Canon Inc Electron beam lithography apparatus and device manufacturing method

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3470412A (en) * 1962-06-13 1969-09-30 Shimadzu Corp Apparatus for exchanging the filament of an electron gun

Also Published As

Publication number Publication date
DE2110130A1 (en) 1972-08-31
NL7114883A (en) 1972-08-29
DE2110130C3 (en) 1974-07-04
DE2110130B2 (en) 1973-12-06
US3723791A (en) 1973-03-27

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee