GB1322475A - Air locks for use in electrical high tension apparatus - Google Patents
Air locks for use in electrical high tension apparatusInfo
- Publication number
- GB1322475A GB1322475A GB641572A GB641572A GB1322475A GB 1322475 A GB1322475 A GB 1322475A GB 641572 A GB641572 A GB 641572A GB 641572 A GB641572 A GB 641572A GB 1322475 A GB1322475 A GB 1322475A
- Authority
- GB
- United Kingdom
- Prior art keywords
- lock
- air
- sealing
- housing
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
- H01J3/028—Replacing parts of the gun; Relative adjustment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Particle Accelerators (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Electron Sources, Ion Sources (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
1322475 Discharge tubes MAX-PLANCK-GES ZUR FORDERUNG DER WISSENSCHAFTEN EV 11 Feb 1972 [26 Feb 1971] 6415/72 Heading H1D An air-lock, to permit access to a discharge tube 1, 2 mounted within an evacuated or gasfilled housing 5, 6 without substantial loss of the vacuum or gas filling, is located within the housing in a rest position, Fig. 7, during operation of the tube, and is movable into a sealing position, Fig. 2, to provide a sealed channel between opposed closable openings 4 and 7 in the walls of the tube and the housing, the movement being in a plane at right angles to the axis of the air-lock, and extension means being provided to operate when the air-lock reaches its sealing position, to cause it to extend axially to form a gas-tight seal between sealing surfaces of the housing and the tube. The air-lock is formed by an extensible metal bellows 9 having at its ends sealing flanges 10 and 11 which are provided with projections 18a and 19a, and are coupled to toggle levers 20a which are pivoted on a carriage which, by means of crank 29, may be moved along guide rails from the rest position of Fig. 1 to the sealing position of Fig. 2. Towards the end of the movement, the projections 18a and 19a encounter fixed surfaces 32 and 33 which retain the air-lock in a position aligned with the openings 4 and 7, while continued movement of the carriage, to a position determined by a projection 23a on the carriage, causes the toggle levers to pivot and thrust the sealing flanges against mating sealing surfaces. The sealing flanges are each provided with a threaded ring, to permit adjustment of their distance apart in the sealing position, and the interior space of the air-lock is normally filled with a removable filler plug 30, to reduce the loss of gas filling from the housing during operation of the lock. Reference is made to movement of the air-lock in a circular rather than a rectilinear path, and in a modified arrangement (Fig. 5, not shown) telescopic tubes rather than extensible bellows are employed. As described, the air-lock is employed for replacing the cathode 3 of an electron microscope;
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2110130A DE2110130C3 (en) | 1971-02-26 | 1971-02-26 | Device for changing the cathode in an electron gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1322475A true GB1322475A (en) | 1973-07-04 |
Family
ID=5800413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB641572A Expired GB1322475A (en) | 1971-02-26 | 1972-02-11 | Air locks for use in electrical high tension apparatus |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3723791A (en) |
| DE (1) | DE2110130C3 (en) |
| GB (1) | GB1322475A (en) |
| NL (1) | NL7114883A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4555666A (en) * | 1979-03-29 | 1985-11-26 | Martin Frederick W | Energy-stable accelerator with needle-like source and focused particle beam |
| NL8402284A (en) * | 1984-07-19 | 1986-02-17 | High Voltage Eng Europ | METHOD AND APPARATUS FOR EXCHANGING EMISSION SOURCES. |
| US6252339B1 (en) * | 1998-09-17 | 2001-06-26 | Nikon Corporation | Removable bombardment filament-module for electron beam projection systems |
| JP2012238624A (en) * | 2011-05-09 | 2012-12-06 | Canon Inc | Electron beam lithography apparatus and device manufacturing method |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3470412A (en) * | 1962-06-13 | 1969-09-30 | Shimadzu Corp | Apparatus for exchanging the filament of an electron gun |
-
1971
- 1971-02-26 DE DE2110130A patent/DE2110130C3/en not_active Expired
- 1971-10-28 NL NL7114883A patent/NL7114883A/xx unknown
-
1972
- 1972-02-09 US US00224789A patent/US3723791A/en not_active Expired - Lifetime
- 1972-02-11 GB GB641572A patent/GB1322475A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2110130A1 (en) | 1972-08-31 |
| NL7114883A (en) | 1972-08-29 |
| DE2110130C3 (en) | 1974-07-04 |
| DE2110130B2 (en) | 1973-12-06 |
| US3723791A (en) | 1973-03-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB1355365A (en) | Electron guns | |
| GB596568A (en) | Improvements in or relating to electron discharge devices | |
| GB1322475A (en) | Air locks for use in electrical high tension apparatus | |
| GB1055729A (en) | Cathode ray tubes | |
| GB815526A (en) | High frequency electron discharge device | |
| US3601649A (en) | Electron beam generating system for high beam potentials | |
| US4092516A (en) | Sealing device for a vacuum enclosure | |
| GB1394042A (en) | Electron collector having means for reducing secondary electron interference in a linear beam microwave tube | |
| US2845540A (en) | Apparatus for use with corpuscular rays | |
| US3572877A (en) | Apparatus for manufacturing discharge tubes | |
| US3470412A (en) | Apparatus for exchanging the filament of an electron gun | |
| US3268759A (en) | Device for exchanging electron sources in electrical discharge devices | |
| GB1206174A (en) | Method and apparatus for use in repairing electron tubes | |
| US4721918A (en) | Process and apparatus for the exchange of emission sources | |
| ES335304A1 (en) | Nonevaporative getter | |
| ES286217A1 (en) | A method of filling with gas and hermetically closing an electric lamp of incandescence (Machine-translation by Google Translate, not legally binding) | |
| GB1284388A (en) | Connector device for evacuating or filling a scaled enclosure | |
| US2995658A (en) | Mass spectrometers | |
| US3140734A (en) | Exhaust apparatus and head therefor | |
| US3476972A (en) | Device for exchanging electron sources in electrical discharge devices | |
| US3460879A (en) | Cathode ray tubes | |
| US3754156A (en) | Sealing device for electrified particle accelerator | |
| GB2015816A (en) | X-ray tubes | |
| GB957895A (en) | Vacuum apparatus for processing a plurality of articles | |
| GB668141A (en) | Improvements relating to magnetrons |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |