US20200400382A1 - Vapor chamber and method for fabricating the same - Google Patents
Vapor chamber and method for fabricating the same Download PDFInfo
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- US20200400382A1 US20200400382A1 US16/837,125 US202016837125A US2020400382A1 US 20200400382 A1 US20200400382 A1 US 20200400382A1 US 202016837125 A US202016837125 A US 202016837125A US 2020400382 A1 US2020400382 A1 US 2020400382A1
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- cover
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- pressure welding
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2029—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
- H05K7/20336—Heat pipes, e.g. wicks or capillary pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K20/00—Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0233—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes the conduits having a particular shape, e.g. non-circular cross-section, annular
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0258—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with means to remove contaminants, e.g. getters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/0283—Means for filling or sealing heat pipes
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
- F28D15/046—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F3/00—Plate-like or laminated elements; Assemblies of plate-like or laminated elements
- F28F3/12—Elements constructed in the shape of a hollow panel, e.g. with channels
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/2029—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant with phase change in electronic enclosures
- H05K7/20309—Evaporators
-
- H10W40/73—
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2240/00—Spacing means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2275/00—Fastening; Joining
- F28F2275/04—Fastening; Joining by brazing
- F28F2275/045—Fastening; Joining by brazing with particular processing steps, e.g. by allowing displacement of parts during brazing or by using a reservoir for storing brazing material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
- F28F2275/00—Fastening; Joining
- F28F2275/06—Fastening; Joining by welding
Definitions
- the present disclosure relates to a vapor chamber and a method for fabricating the same, more particularly to a vapor chamber having a post and a method for fabricating the same.
- the vapor chamber includes a main body and a capillary structure, the main body has a chamber that can accommodate working fluid, and the capillary structure is disposed in the chamber.
- the main body can be divided into two parts—an evaporation part and a condensation part.
- the working fluid absorbs heat and will be vaporized to gaseous form in the evaporation part, the working fluid in gaseous form diffuses into the condensation part and will be condensed into liquid state and then returns to the evaporation part via the capillary structure and thus forming a cooling cycle of the working fluid.
- the main body of the vapor chamber is too thin to have a sufficient structural strength.
- the vapor chamber is often heated over 90° C., and the high temperature will evaporate most of the working fluid and thus increasing the internal pressure of the vapor chamber to exceed a limit. By that time, the vapor chamber will be deformed or even cracked by the internal pressure.
- some put support posts in the chamber to reinforce the structural strength of the vapor chamber. And the posts also can enhance the heat conduction of the vapor chamber.
- the vapor chamber with the supporting posts is easily cracked during the manufacturing process.
- the present disclosure provides a vapor chamber and a method for fabricating the same that are able to improve the fabrication quality and heat transfer of the vapor chamber.
- a method for fabricating a vapor chamber includes the following steps. Positioning a capillary structure on a first cover. Forming an accommodation space, a flow channel, and a plurality of posts on a first surface of a second cover. Covering the first cover with the second cover. Positioning the first cover and the second cover such that the plurality of posts are spaced apart from the capillary structure by a distance. Pressure welding the first cover and the second cover so as to form a chamber between the first cover and second cover and a passage connected to the chamber and to pressure weld the plurality of posts with the capillary structure.
- a vapor chamber includes an upper cover, a lower cover and a capillary structure.
- the upper cover includes a cover part and a plurality of posts.
- the cover part has an accommodation space.
- the plurality of posts are located in the accommodation space and protrude from the cover part.
- the lower cover and the cover part of the upper cover are in contact with each other so as to form a chamber therebetween.
- the capillary structure is located in the chamber and disposed on the lower cover.
- the plurality of posts are pressure welded to the capillary structure which is disposed on the lower cover.
- the plurality of posts are pressure welded to the capillary structure such that the heat can be conducted not only via the capillary structure but also via the posts, thereby enhancing the heat conduction of the vapor chamber.
- the pressure welding can be performed at a certain temperature and pressure so as to ensure that the posts to be fully pressure welded to the capillary structure and can accurately control the change in thickness of the posts. Therefore, the vapor chamber is prevented from being cracked during pressure welding and thus enhancing the fabrication quality of the vapor chamber.
- FIG. 1 is a perspective view of a vapor chamber according to a first embodiment of the present disclosure
- FIG. 2 is an exploded view of the vapor chamber in FIG. 1 ;
- FIG. 3 is a cross-sectional view of the vapor chamber in FIG. 1 ;
- FIG. 4 to FIG. 13 shows a fabricating process of the vapor chamber in FIG. 1 .
- FIG. 1 is a perspective view of a vapor chamber according to a first embodiment of the present disclosure
- FIG. 2 is an exploded view of the vapor chamber in FIG. 1
- FIG. 3 is a cross-sectional view of the vapor chamber in FIG. 1 .
- the vapor chamber 20 is, for example, in a thin-plate shape and has a thickness of, for example, less than 0.5 millimeters.
- the vapor chamber 20 includes an upper cover 22 , a lower cover 26 , and a capillary structure 28 .
- the upper cover 22 and the lower cover 26 may be made of oxygen-free copper, copper alloy containing silicon, or copper alloy plate containing aluminum.
- the upper cover 22 includes a cover part 23 and a plurality of posts 25 .
- the cover part 23 has an accommodation space 24 .
- the posts 25 are located in the accommodation space 24 and protrude from the cover part 23 .
- the lower cover 26 and the cover part 23 of the upper cover 22 are in contact with each other by pressure welding so as to form a chamber S therebetween, wherein the pressure welding includes, for example, resistance-welding, friction welding, cold welding, and diffusion bonding.
- the capillary structure 28 is, for example, copper mesh or copper fiber paper and is located in the chamber S.
- each post 25 is pressure welded to the capillary structure 28 , which is disposed on the lower cover 26 , such that the posts 25 are able to reinforce the structural strength of the vapor chamber 20 .
- a sealing structure 30 located at an edge of the vapor chamber 20 for preventing working fluid from leaking from the chamber S.
- the sealing structure 30 is formed by pressure welding. The processes of fabricating the vapor chamber 20 are described below.
- FIG. 4 to FIG. 13 shows a fabricating process of the vapor chamber in FIG. 1 .
- the capillary structure 28 is positioned and pressure welded on a first cover 100 where the first cover 100 is in a plate shape.
- the second cover 200 has a first surface 210 , a second surface 220 , an accommodation space 230 , a flow channel 240 , a groove 250 , and a plurality of posts 260 .
- the first surface 210 and the second surface 220 are opposite to each other.
- the accommodation space 230 , the flow channel 240 , the groove 250 , and the plurality of posts 260 are formed on the first surface 210 by, for example, etching, sand blasting, or stamping process.
- the accommodation space 230 , the flow channel 240 , the groove 250 , and the plurality of posts 260 may be formed by the same or different etching, sand blasting, or stamping processes.
- the groove 250 is formed along the contour of the edge of the second cover 200 .
- a solder 300 is injected into the groove 250 .
- the solder 300 is, for example, a cooper paste, tin paste, or similar substance.
- the first cover 100 is covered by the second cover 200 , and the second cover 200 is positioned on the first cover 100 .
- the second cover 200 is stacked on the first cover 100 with the solder 300 in between.
- the first cover 100 is pressure welded to the first surface 210 of the second cover 200 , meanwhile, the posts 260 are also pressure welded to the capillary structure 28 .
- the first cover 100 and the second cover 200 are in contact with each other and form a chamber S therebetween and a passage C connected to the chamber S, and the capillary structure 28 is located between and in direct contact with the posts 260 and the first cover 100 at the same time; in such a case, the posts 260 are able to maintain the gap between the capillary structure 28 and the second cover 200 . That is, the posts 260 are able to reinforce the structural strength of the first cover 100 and the second cover 200 .
- the first cover 100 and the second cover 200 are very thin, such that, if the pressure welding was not performed under some specific conditions, the first cover 100 and the second cover 200 may be cracked and the posts 260 may not be fully pressure welded to the capillary structure 28 .
- the posts 260 may not be fully pressure welded to the capillary structure 28 . In such a case, the posts 260 will not be able to perfectly maintain the gap between the first cover 100 and the second cover 200 .
- the pressure welding is not properly controlled to cause a large change in thickness of the first cover 100 and the second cover 200 , the first cover 100 and the second cover 200 may experience too large stress and got penetrated or damage by the posts 260 .
- the change in thickness refers to the amount of compressing a post 260 which has been heated.
- the pressure welding is performed at a temperature of 680° C. and at a pressure of 25 kg/cm 2 .
- the pressure welding is performed at a temperature of 700° C. and at a pressure of 20 kg/cm 2 .
- the pressure welding is performed at a temperature of 750° C. and at a pressure of 18 kg/cm 2 .
- the pressure welding is performed at a temperature of 800° C. and at a pressure of 15 kg/cm 2 .
- the pressure welding is performed at a temperature of 850° C. and at a pressure of 10 kg/cm 2 .
- the pressure welding can be performed at a temperature and pressure by referring to different parameters.
- the pressure welding can be performed at a temperature of 680° C. (shown in parameters set 1) and a pressure of 18 kg/cm 2 (shown in parameters set 3) or a pressure of 10 kg/cm 2 (shown in parameters set 5).
- the pressure welding can be performed at a pressure of 10 kg/cm 2 (shown in parameters set 5) and a temperature of 680° C. (shown in parameters set 1) or a temperature of 800° C. (shown in parameters set 4).
- the predetermined change of 0.03 mm in thickness is also exemplary and the disclosure is either not limited thereto. In some other embodiments, the change in thickness of the first cover 100 and the second cover 200 can be altered according to different requirements.
- the first period refers to the duration which the pressure welding is performed at a constant temperature
- the second period refers to the duration which the pressure welding is performed at a constant pressure and decreasing temperature
- the third period refers to the duration which the pressure welding is performed at a decreasing temperature and pressure.
- the first period the pressure welding is performed at a temperature of 680° C. and a pressure of 25 kg/cm 2 , wherein the 680° C. must be constant for 300 seconds.
- the second period the pressure is fixed but the temperature is decreased down to a range between 300° C. and 400° C.
- the third period is performed after the second period.
- the aperture size of the passage C is enlarged.
- the passage C has been enlarged to a passage C′, and then a degassing tube 400 is inserted into the passage C′.
- Part of volume of the degassing tube 400 can be removed by, for example, turning process, or the degassing tube 400 can be partially deformed to a smaller volume by, for example, a pressing process, such that the degassing tube 400 can be easily inserted into the passage C′.
- the part of the degassing tube 400 that is inserted into the passage C′ is pressure welded to the first cover 100 and the second cover 200 by the solder 300 .
- a leak detection process may be performed on the degassing tube 400 , the first cover 100 , and the second cover 200 , after they had been pressure welded together, in order to ensure the quality of pressure welding.
- an annealing process may be performed on the degassing tube 400 , the first cover 100 , and the second cover 200 , after they had been pressure welded together, in order to release the stress caused by the pressure welding process and to enhance their mechanical reliability.
- the degassing tube 400 can be connected to a degassing equipment for drawing gas from the chamber S, and then the degassing tube 400 can be connected to an injecting equipment for injecting working fluid into the chamber S.
- a joint between the chamber S and the passage C′ is pressure welded so as to form a depressed structure 500 to seal the chamber S.
- part of the depressed structure 500 is cut off so that part of the first cover 100 (shown in FIG. 12 ) and the second cover (shown in FIG. 12 ) where the passage C′ are disposed are also cut off.
- the vapor chamber 20 is completed.
- the remained part of the first cover 100 is the lower cover 26 of the vapor chamber 20
- the remained part of the second cover 200 is the upper cover 22 of the vapor chamber 20 .
- the plurality of posts are pressure welded to the capillary structure, such that the heat can be conducted not only via the capillary structure but also via the posts, thereby enhancing the heat conduction of the vapor chamber.
- the pressure welding performed under the conditions provided above can ensure that the posts to be fully pressure welded to the capillary structure and can accurately control the change in thickness of the posts. Therefore, the vapor chamber is prevented from being cracked during pressure welding and thus enhancing the fabrication quality of the vapor chamber.
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- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
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Abstract
Description
- This non-provisional application claims priority under 35 U.S.C. § 119(a) on Patent Application No(s). 201910528348.0 filed in China, P.R.C. on Jun. 18, 2019, the entire contents of which are hereby incorporated by reference.
- The present disclosure relates to a vapor chamber and a method for fabricating the same, more particularly to a vapor chamber having a post and a method for fabricating the same.
- A vapor chamber and a heat pipe can be applied to dissipate heat. Thermal conduction of a heat pipe occurs in one dimension while thermal conduction of a vapor chamber occurs in two dimensions. Therefore, the vapor chamber is a more effective heat dissipation device to dissipate heat generated by a heat source in an electronic product. Generally, the vapor chamber includes a main body and a capillary structure, the main body has a chamber that can accommodate working fluid, and the capillary structure is disposed in the chamber. The main body can be divided into two parts—an evaporation part and a condensation part. The working fluid absorbs heat and will be vaporized to gaseous form in the evaporation part, the working fluid in gaseous form diffuses into the condensation part and will be condensed into liquid state and then returns to the evaporation part via the capillary structure and thus forming a cooling cycle of the working fluid.
- However, with the increasing demand for lightweight and small electronic products, the internal space for accommodating electrical components is very limited. Therefore, how to develop a vapor chamber that can catch up the trend is an important topic in the field. Conventionally, the main body of the vapor chamber is too thin to have a sufficient structural strength. The vapor chamber is often heated over 90° C., and the high temperature will evaporate most of the working fluid and thus increasing the internal pressure of the vapor chamber to exceed a limit. By that time, the vapor chamber will be deformed or even cracked by the internal pressure. To prevent this, some put support posts in the chamber to reinforce the structural strength of the vapor chamber. And the posts also can enhance the heat conduction of the vapor chamber. However, the vapor chamber with the supporting posts is easily cracked during the manufacturing process.
- The present disclosure provides a vapor chamber and a method for fabricating the same that are able to improve the fabrication quality and heat transfer of the vapor chamber.
- According to one aspect of the present disclosure, a method for fabricating a vapor chamber includes the following steps. Positioning a capillary structure on a first cover. Forming an accommodation space, a flow channel, and a plurality of posts on a first surface of a second cover. Covering the first cover with the second cover. Positioning the first cover and the second cover such that the plurality of posts are spaced apart from the capillary structure by a distance. Pressure welding the first cover and the second cover so as to form a chamber between the first cover and second cover and a passage connected to the chamber and to pressure weld the plurality of posts with the capillary structure.
- According to another aspect of the present disclosure, a vapor chamber includes an upper cover, a lower cover and a capillary structure. The upper cover includes a cover part and a plurality of posts. The cover part has an accommodation space. The plurality of posts are located in the accommodation space and protrude from the cover part. The lower cover and the cover part of the upper cover are in contact with each other so as to form a chamber therebetween. The capillary structure is located in the chamber and disposed on the lower cover. The plurality of posts are pressure welded to the capillary structure which is disposed on the lower cover.
- According to the vapor chamber and the method for fabricating the same discussed above, the plurality of posts are pressure welded to the capillary structure such that the heat can be conducted not only via the capillary structure but also via the posts, thereby enhancing the heat conduction of the vapor chamber.
- Furthermore, the pressure welding can be performed at a certain temperature and pressure so as to ensure that the posts to be fully pressure welded to the capillary structure and can accurately control the change in thickness of the posts. Therefore, the vapor chamber is prevented from being cracked during pressure welding and thus enhancing the fabrication quality of the vapor chamber.
- The present disclosure will become more fully understood from the detailed description given hereinbelow and the accompanying drawings which are given by way of illustration only and thus are not intending to limit the present disclosure and wherein:
-
FIG. 1 is a perspective view of a vapor chamber according to a first embodiment of the present disclosure; -
FIG. 2 is an exploded view of the vapor chamber inFIG. 1 ; -
FIG. 3 is a cross-sectional view of the vapor chamber inFIG. 1 ; and -
FIG. 4 toFIG. 13 shows a fabricating process of the vapor chamber inFIG. 1 . - In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the disclosed embodiments. It will be apparent, however, that one or more embodiments may be practiced without these specific details. In other instances, well-known structures and devices are schematically shown in order to simplify the drawing.
- Please refer to
FIG. 1 toFIG. 3 , whichFIG. 1 is a perspective view of a vapor chamber according to a first embodiment of the present disclosure,FIG. 2 is an exploded view of the vapor chamber inFIG. 1 , andFIG. 3 is a cross-sectional view of the vapor chamber inFIG. 1 . - This embodiment provides a
vapor chamber 20. Thevapor chamber 20 is, for example, in a thin-plate shape and has a thickness of, for example, less than 0.5 millimeters. Thevapor chamber 20 includes anupper cover 22, alower cover 26, and acapillary structure 28. - The
upper cover 22 and thelower cover 26 may be made of oxygen-free copper, copper alloy containing silicon, or copper alloy plate containing aluminum. Theupper cover 22 includes acover part 23 and a plurality ofposts 25. Thecover part 23 has anaccommodation space 24. Theposts 25 are located in theaccommodation space 24 and protrude from thecover part 23. Thelower cover 26 and thecover part 23 of theupper cover 22 are in contact with each other by pressure welding so as to form a chamber S therebetween, wherein the pressure welding includes, for example, resistance-welding, friction welding, cold welding, and diffusion bonding. Thecapillary structure 28 is, for example, copper mesh or copper fiber paper and is located in the chamber S. Further, one end of eachpost 25 is pressure welded to thecapillary structure 28, which is disposed on thelower cover 26, such that theposts 25 are able to reinforce the structural strength of thevapor chamber 20. Furthermore, there is asealing structure 30 located at an edge of thevapor chamber 20 for preventing working fluid from leaking from the chamber S. Thesealing structure 30 is formed by pressure welding. The processes of fabricating thevapor chamber 20 are described below. - Please refer to
FIG. 4 toFIG. 13 , which shows a fabricating process of the vapor chamber inFIG. 1 . - As shown in
FIG. 4 , first is to cut acapillary structure 28 to make it fit anaccommodation space 230 of thesecond cover 200. And then is to anneal thecapillary structure 28. - Then, as shown in
FIG. 5 , thecapillary structure 28 is positioned and pressure welded on afirst cover 100 where thefirst cover 100 is in a plate shape. - Then, as shown in
FIG. 6 , asecond cover 200 is provided. Thesecond cover 200 has afirst surface 210, asecond surface 220, anaccommodation space 230, aflow channel 240, agroove 250, and a plurality ofposts 260. Thefirst surface 210 and thesecond surface 220 are opposite to each other. Theaccommodation space 230, theflow channel 240, thegroove 250, and the plurality ofposts 260 are formed on thefirst surface 210 by, for example, etching, sand blasting, or stamping process. Theaccommodation space 230, theflow channel 240, thegroove 250, and the plurality ofposts 260 may be formed by the same or different etching, sand blasting, or stamping processes. Thegroove 250 is formed along the contour of the edge of thesecond cover 200. Then, asolder 300 is injected into thegroove 250. Thesolder 300 is, for example, a cooper paste, tin paste, or similar substance. - Then, as shown in
FIG. 7 , thefirst cover 100 is covered by thesecond cover 200, and thesecond cover 200 is positioned on thefirst cover 100. In detail, thesecond cover 200 is stacked on thefirst cover 100 with thesolder 300 in between. - Then, as shown in
FIG. 8 andFIG. 9 , thefirst cover 100 is pressure welded to thefirst surface 210 of thesecond cover 200, meanwhile, theposts 260 are also pressure welded to thecapillary structure 28. By doing so, thefirst cover 100 and thesecond cover 200 are in contact with each other and form a chamber S therebetween and a passage C connected to the chamber S, and thecapillary structure 28 is located between and in direct contact with theposts 260 and thefirst cover 100 at the same time; in such a case, theposts 260 are able to maintain the gap between thecapillary structure 28 and thesecond cover 200. That is, theposts 260 are able to reinforce the structural strength of thefirst cover 100 and thesecond cover 200. - The
first cover 100 and thesecond cover 200 are very thin, such that, if the pressure welding was not performed under some specific conditions, thefirst cover 100 and thesecond cover 200 may be cracked and theposts 260 may not be fully pressure welded to thecapillary structure 28. In detail, if thefirst cover 100 and thesecond cover 200 have a too small change in thickness during the pressure welding or if the chamber S is expanded outward by a large external force, theposts 260 may not be fully pressure welded to thecapillary structure 28. In such a case, theposts 260 will not be able to perfectly maintain the gap between thefirst cover 100 and thesecond cover 200. On the contrary, if the pressure welding is not properly controlled to cause a large change in thickness of thefirst cover 100 and thesecond cover 200, thefirst cover 100 and thesecond cover 200 may experience too large stress and got penetrated or damage by theposts 260. - Therefore, in order to improve the quality of the pressure welding, in this embodiment, some conditions are given below:
-
Factor Time (s) Change in Temperature Pressure First Second Third thickness Parameter (° C.) (kg/cm2) period period period (mm) Parameters 680 25 300 240 180 0.030 Set 1 Parameters 700 20 260 220 180 0.030 Set 2 Parameters 750 18 260 220 180 0.030 Set 3 Parameters 800 15 220 200 240 0.030 Set 4 Parameters 850 10 220 200 240 0.030 Set 5 - Assume that a predetermined change in thickness is 0.03 mm, the change in thickness refers to the amount of compressing a
post 260 which has been heated. In parameters set 1, the pressure welding is performed at a temperature of 680° C. and at a pressure of 25 kg/cm2. In parameters set 2, the pressure welding is performed at a temperature of 700° C. and at a pressure of 20 kg/cm2. In parameters set 3, the pressure welding is performed at a temperature of 750° C. and at a pressure of 18 kg/cm2. In parameters set 4, the pressure welding is performed at a temperature of 800° C. and at a pressure of 15 kg/cm2. In parameters set 5, the pressure welding is performed at a temperature of 850° C. and at a pressure of 10 kg/cm2. - It is noted that the parameters sets 1 to 5 are exemplary and the disclosure is not limited thereto. In some other embodiments, the pressure welding can be performed at a temperature and pressure by referring to different parameters. For example, the pressure welding can be performed at a temperature of 680° C. (shown in parameters set 1) and a pressure of 18 kg/cm2 (shown in parameters set 3) or a pressure of 10 kg/cm2 (shown in parameters set 5). Alternatively, the pressure welding can be performed at a pressure of 10 kg/cm2 (shown in parameters set 5) and a temperature of 680° C. (shown in parameters set 1) or a temperature of 800° C. (shown in parameters set 4).
- The predetermined change of 0.03 mm in thickness is also exemplary and the disclosure is either not limited thereto. In some other embodiments, the change in thickness of the
first cover 100 and thesecond cover 200 can be altered according to different requirements. - In addition, in the above table, the first period refers to the duration which the pressure welding is performed at a constant temperature, the second period refers to the duration which the pressure welding is performed at a constant pressure and decreasing temperature, and the third period refers to the duration which the pressure welding is performed at a decreasing temperature and pressure. For example, in the first period, the pressure welding is performed at a temperature of 680° C. and a pressure of 25 kg/cm2, wherein the 680° C. must be constant for 300 seconds. Then, in the second period, the pressure is fixed but the temperature is decreased down to a range between 300° C. and 400° C. And then, the third period is performed after the second period.
- Then, the aperture size of the passage C is enlarged. As shown in
FIG. 10 , the passage C has been enlarged to a passage C′, and then adegassing tube 400 is inserted into the passage C′. Part of volume of thedegassing tube 400 can be removed by, for example, turning process, or thedegassing tube 400 can be partially deformed to a smaller volume by, for example, a pressing process, such that thedegassing tube 400 can be easily inserted into the passage C′. And then the part of thedegassing tube 400 that is inserted into the passage C′ is pressure welded to thefirst cover 100 and thesecond cover 200 by thesolder 300. - Preferably, a leak detection process may be performed on the
degassing tube 400, thefirst cover 100, and thesecond cover 200, after they had been pressure welded together, in order to ensure the quality of pressure welding. In addition, an annealing process may be performed on thedegassing tube 400, thefirst cover 100, and thesecond cover 200, after they had been pressure welded together, in order to release the stress caused by the pressure welding process and to enhance their mechanical reliability. - Then, the
degassing tube 400 can be connected to a degassing equipment for drawing gas from the chamber S, and then thedegassing tube 400 can be connected to an injecting equipment for injecting working fluid into the chamber S. - Then, as shown in
FIG. 11 , another part of thedegassing tube 400 which is outside the passage C′ is squeezed by a stamping process and then the squeezed part of thedegassing tube 400 is sealed by a pressure welding process, such that the working fluid is prevented from leaking from the chamber S and the low pressure in the chamber S is secured. - Then, as shown in
FIG. 12 , a joint between the chamber S and the passage C′ is pressure welded so as to form adepressed structure 500 to seal the chamber S. - Then, as shown in
FIG. 13 , part of thedepressed structure 500 is cut off so that part of the first cover 100 (shown inFIG. 12 ) and the second cover (shown inFIG. 12 ) where the passage C′ are disposed are also cut off. By the above steps, thevapor chamber 20 is completed. The remained part of thefirst cover 100 is thelower cover 26 of thevapor chamber 20, and the remained part of thesecond cover 200 is theupper cover 22 of thevapor chamber 20. - According to the vapor chamber and the method for fabricating the same discussed above, the plurality of posts are pressure welded to the capillary structure, such that the heat can be conducted not only via the capillary structure but also via the posts, thereby enhancing the heat conduction of the vapor chamber.
- Furthermore, the pressure welding performed under the conditions provided above can ensure that the posts to be fully pressure welded to the capillary structure and can accurately control the change in thickness of the posts. Therefore, the vapor chamber is prevented from being cracked during pressure welding and thus enhancing the fabrication quality of the vapor chamber.
- The embodiments are chosen and described in order to best explain the principles of the present disclosure and its practical applications, to thereby enable others skilled in the art best utilize the present disclosure and various embodiments with various modifications as are suited to the particular use being contemplated. It is intended that the scope of the present disclosure is defined by the following claims and their equivalents.
Claims (22)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US18/134,526 US11927400B2 (en) | 2019-06-18 | 2023-04-13 | Method for fabricating vapor chamber |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910528348.0 | 2019-06-18 | ||
| CN201910528348.0A CN112105219B (en) | 2019-06-18 | 2019-06-18 | Vapor chamber and manufacturing method thereof |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US18/134,526 Division US11927400B2 (en) | 2019-06-18 | 2023-04-13 | Method for fabricating vapor chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| US20200400382A1 true US20200400382A1 (en) | 2020-12-24 |
Family
ID=73749163
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US16/837,125 Abandoned US20200400382A1 (en) | 2019-06-18 | 2020-04-01 | Vapor chamber and method for fabricating the same |
| US18/134,526 Active US11927400B2 (en) | 2019-06-18 | 2023-04-13 | Method for fabricating vapor chamber |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US18/134,526 Active US11927400B2 (en) | 2019-06-18 | 2023-04-13 | Method for fabricating vapor chamber |
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| Country | Link |
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| US (2) | US20200400382A1 (en) |
| CN (1) | CN112105219B (en) |
| TW (1) | TWI788604B (en) |
Cited By (4)
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|---|---|---|---|---|
| US11206746B1 (en) * | 2020-06-09 | 2021-12-21 | Chia-Hsing Liu | Fluid heat dissipation device |
| US20220243992A1 (en) * | 2021-01-29 | 2022-08-04 | Advanced Semiconductor Engineering, Inc. | Heat transfer element, method for forming the same and semiconductor structure comprising the same |
| US20220299273A1 (en) * | 2021-03-16 | 2022-09-22 | Fujitsu Limited | Cooling device |
| CN116412709A (en) * | 2021-12-30 | 2023-07-11 | 创新服务股份有限公司 | Heat conduction plate and manufacturing method thereof |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113437034B (en) * | 2021-08-25 | 2022-02-22 | 中兴通讯股份有限公司 | Temperature equalization plate and electronic equipment |
| TWI813277B (en) * | 2022-05-06 | 2023-08-21 | 邁萪科技股份有限公司 | Vapor chamber with improved fixed structure of exhaust pipe |
| FR3147121B1 (en) * | 2023-03-27 | 2025-12-26 | Commissariat Energie Atomique | METHOD FOR MANUFACTURING A STRUCTURE COMPRISING CAVITIES |
| TWI874126B (en) * | 2024-01-18 | 2025-02-21 | 高柏科技股份有限公司 | Vapor chamber sealing structure and manufacturing method thereof |
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- 2019-11-27 TW TW108143277A patent/TWI788604B/en active
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Also Published As
| Publication number | Publication date |
|---|---|
| TW202100938A (en) | 2021-01-01 |
| US11927400B2 (en) | 2024-03-12 |
| CN112105219A (en) | 2020-12-18 |
| US20230251044A1 (en) | 2023-08-10 |
| TWI788604B (en) | 2023-01-01 |
| CN112105219B (en) | 2023-06-09 |
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