[go: up one dir, main page]

US20170153125A1 - Magnetic sensor device and method for producing same - Google Patents

Magnetic sensor device and method for producing same Download PDF

Info

Publication number
US20170153125A1
US20170153125A1 US15/314,827 US201515314827A US2017153125A1 US 20170153125 A1 US20170153125 A1 US 20170153125A1 US 201515314827 A US201515314827 A US 201515314827A US 2017153125 A1 US2017153125 A1 US 2017153125A1
Authority
US
United States
Prior art keywords
magnetic
sensor device
conveyance path
magnetic sensor
path side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US15/314,827
Inventor
Hideki Matsui
Tatsuya Kunieda
Tomokazu Ogomi
Masaaki Okada
Sadaaki YOSHIOKA
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Assigned to MITSUBISHI ELECTRIC CORPORATION reassignment MITSUBISHI ELECTRIC CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KUNIEDA, TATSUYA, MATSUI, HIDEKI, OGOMI, TOMOKAZU, OKADA, MASAAKI, YOSHIOKA, SADAAKI
Publication of US20170153125A1 publication Critical patent/US20170153125A1/en
Abandoned legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/16Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/091Constructional adaptation of the sensor to specific applications

Definitions

  • the present disclosure relates to a magnetic sensor device and a method for producing the same.
  • Patent Literature 1 discloses a magnetic sensor device that is equipped with a magnet and a magnetoresistance effect element for detection of an object to be detected that is conveyed through a conveyance path.
  • a magnetic pole is disposed at one surface side of the magnet where the object to be detected is conveyed, and the magnet generates an intersection magnetic field that intersects the object to be detected.
  • the magnetoresistance effect element is arranged between the magnet and the object to be detected.
  • the magnetoresistance effect element has an output terminal and outputs as a change of resistance value a change of a conveyance direction component of the intersection magnetic field due to a magnetic component of the object to be detected conveyed through the intersection magnetic field.
  • Patent Literature 1 discloses, as a configuration of a magnetic circuit for generation of the intersection magnetic field, a configuration that disposes the object to be detected between opposing magnets, and a configuration that disposes a magnet at one surface of the object to be detected and disposes a magnetic body opposing another surface of the object to be detected.
  • Patent Literature 2 mentions a magnetic sensor that is characterized in that the magnetic sensor is equipped with a magnetoresistance element, a conductor layer and a resistance.
  • the magnetoresistance element has an element board and pairs of magnetosensitive parts arranged parallel to one another at a fixed spacing on the element board.
  • the conductor layer is disposed at a position equidistance with each of pairs of the magnetosensitive part.
  • the resistance is connected electrically in series with the conductor layer.
  • the component that emits the most heat in the magnetic sensor device is the magnetoresistance effect element.
  • the resolution and number of magnetoresistance effect elements are low in conventional magnetic sensor devices such as those in Patent Literature 1 and Patent Literature 2. Thus the amount of heat generation is low, and consideration of heat dissipation is not required in the construction of such conventional magnetic sensor devices.
  • a large number of magnetoresistance effect elements are arranged in order to make a magnetic sensor device that has high resolution. Thus a large amount of heat is generated, and the magnetic sensor device tends to become hot. The magnet used in the magnetic sensor device demagnetizes when the magnetic sensor device becomes hot, and thus the performance of the magnetic sensor device is likely to decline.
  • the object of the present disclosure is to solve the aforementioned type of problem and to obtain a magnetic sensor device, and production method thereof, that has excellent heat dissipation and is capable of suppressing the lowering of performance that is caused by heat generation by the magnetoresistance effect elements.
  • the magnetic sensor device of the present disclosure is equipped with a magnetic circuit for forming a magnetic field, magnetoresistance effect elements and a heat dissipator.
  • the magnetoresistance effect elements output a change of magnetic field as a change of resistance value, and are arranged on a surface on an object-to-be-detected conveyance path side of the magnetic circuit.
  • the heat dissipator is arranged in close contact with the magnetic circuit at a surface other than the conveyance path side surface of the heat dissipator.
  • the heat dissipator is arranged in close contact with the heat dissipator at a surface of the magnetic circuit other than that of the conveyance path side.
  • heat increase of the magnetic sensor device is suppressed, which enables suppression of the demagnetization of the magnet by heat.
  • This has the effect of enabling the obtaining of the magnetic sensor device, and a production method thereof, that are capable of suppressing lowering of performance of the magnetoresistance effect elements.
  • FIG. 1 is a cross-sectional drawing of a magnetic sensor device of Embodiment 1 of this disclosure
  • FIG. 2A is a perspective view of the magnetic sensor device of Embodiment 1, with a cover side oriented upward;
  • FIG. 2B is a perspective view of the magnetic sensor device of Embodiment 1, with a signal processing board side oriented upward;
  • FIG. 2C is a cross-sectional drawing of a case of Embodiment 1;
  • FIG. 3A is a perspective view of a metallic carrier in the magnetic sensor device of Embodiment 1;
  • FIG. 3B is a cross-sectional drawing of the metallic carrier in the magnetic sensor device of Embodiment 1;
  • FIG. 4A is a perspective view illustrating a state of assembly of a sensor board, carrier, magnetoresistance effect elements and signal amplification ICs in the magnetic sensor device of Embodiment 1;
  • FIG. 4B is a perspective view illustrating a state of assembly of the sensor board, carrier, magnetoresistance effect element and signal amplification IC in the magnetic sensor device of Embodiment 1;
  • FIG. 4C is a plan view of the sensor board of the magnetic sensor device of Embodiment 1;
  • FIG. 5 is a perspective view illustrating a state of contact between a permanent magnet and a yoke in the magnetic sensor device of Embodiment 1;
  • FIG. 6 is a cross-sectional drawing illustrating the state in which the carrier and a permanent magnet are attached and integrated together in the state of FIG. 4 of the magnetic sensor device of Embodiment 1;
  • FIG. 7 is a cross-sectional drawing illustrating a state of attachment of components of the FIG. 6 state to the case in the magnetic sensor device of Embodiment 1;
  • FIG. 8 is a cross-sectional drawing illustrating a state of attachment of the heat dissipator in the state of FIG. 7 for the magnetic sensor device of Embodiment 1;
  • FIG. 9 is a cross-sectional drawing illustrating a state of attachment of the cover in the state of FIG. 8 for the magnetic sensor device of Embodiment 1;
  • FIG. 10 is a cross-sectional drawing of the case in the magnetic sensor device of Embodiment 1;
  • FIG. 11 is a cross-sectional drawing of a magnetic sensor device of a comparative example
  • FIG. 12 is a cross-sectional drawing of a magnetic sensor device of Embodiment 2 of this disclosure.
  • FIG. 13A is a perspective view illustrating in partial cross section of the case of a magnetic sensor device of Embodiment 3 of this disclosure.
  • FIG. 13B is a cross-sectional drawing of the case of the magnetic sensor device of Embodiment 3.
  • FIG. 14 is a cross-sectional drawing of the magnetic sensor device of Embodiment 3.
  • FIG. 15 is a perspective view of a case of a magnetic sensor device of Embodiment 4 of this disclosure.
  • FIG. 16 is a cross-sectional drawing of the magnetic sensor device of Embodiment 4.
  • FIG. 17 is a perspective view of a heat dissipator in a magnetic sensor device of Embodiment 5 of this disclosure.
  • FIG. 18 is a cross-sectional drawing of the magnetic sensor device of Embodiment 5.
  • FIG. 19 is a perspective view of the heat dissipator of a magnetic sensor device of Embodiment 6 of this disclosure.
  • FIG. 20 is a cross-sectional drawing of the magnetic sensor device of Embodiment 6.
  • FIG. 21 is a cross-sectional drawing of a magnetic sensor device of Embodiment 7 of this disclosure.
  • a magnetic sensor device, and a production method thereof, of Embodiment 1 of this disclosure are described below. Furthermore, in all the embodiments, the expression “conveyance of the object to be detected”, in addition to the case of conveyance of the object to be detected, is taken to further include the case of moving the magnetic sensor device in the conveyance direction (Y direction of FIG. 1 ) without moving the object to be detected. Furthermore, the X direction is termed the “reading-width direction”.
  • the three axes labeled X, Y and Z in the drawings are three orthogonal axes.
  • the X axis indicates the reading-width direction (longitudinal direction of the magnetic sensor device) of the magnetic sensor device.
  • the Y axis indicates the conveyance direction (conveyance direction of the conveyed object to be detected, transverse direction of the magnetic sensor device) of the magnetic sensor device.
  • the Z axis indicates the height direction of the magnetic sensor device.
  • the locations of conveyance of the object to be detected in the conveyance direction are termed the “conveyance path of the object to be detected”.
  • the origin of the X axis is the center of X-axis direction length of the magnetic sensor device, and the direction of the arrow within the figures is the + direction (positive direction).
  • the origin of the Y axis is the center of Y-axis direction length of the magnetic sensor device, and the direction of the arrow within the figures is the + direction (positive direction).
  • the origin of the Z axis is the center of Z-axis direction length of the magnetic sensor device, and the direction of the arrow within the figures is the + direction (positive direction).
  • identical reference signs indicate the same or equivalent components.
  • FIG. 1 is a cross-sectional drawing at the Z-Y plane of the magnetic sensor device of Embodiment 1 of this disclosure.
  • the magnetic sensor device 100 illustrated in FIG. 1 for example, is used in a magnetic card reader or in an identification apparatus for printed articles (such as paper currency and the like) printed using magnetic ink.
  • the magnetic sensor device 100 along the Z direction perpendicular to the conveyance direction 21 (Y direction) of the object to be detected 20 such as paper currency and the like, is equipped with a magnetic circuit 30 and a heat dissipator 11 .
  • the magnetic circuit 30 is equipped with a magnet 9 , a yoke 10 and a metallic carrier 7 carrying magnetoresistance effect elements 4 , having a magnetic carrier 7 a , and a non-magnetic carrier 7 b .
  • the magnet 9 and the magnetic carrier 7 a constituting the magnetic circuit 30 form a magnetic field by magnetic flux from one pole of the magnet 9 passing through the magnetic carrier 7 a , overflowing to a space at the conveyance path side, turning back, passing through the yoke 10 , and returning to the other pole of the magnet 9 .
  • the object to be detected 20 is conveyed through the conveyance path in a manner so as to pass through the void (space) where the magnetic field is formed.
  • the magnetic sensor device 100 is equipped with a cover 1 , a case 2 , a sensor board 3 , a signal amplification integrated circuit (referred to throughout the present disclosure as “IC”) 5 , a wire 6 , a fastener 8 and a signal processing board 13 .
  • IC signal amplification integrated circuit
  • conveyance direction 21 in FIG. 1 is the +Y direction
  • the ⁇ Y direction may also be used.
  • FIG. 2A and FIG. 2B are perspective views of the magnetic sensor device of Embodiment 1 of this disclosure.
  • FIG. 2A is a perspective view with the cover 1 oriented upward.
  • FIG. 2B is a perspective view with the signal processing board 13 oriented upward.
  • the cover 1 is a component constituting the object-to-be-examined conveyance surface of the magnetic sensor device 100 .
  • the cover 1 extends in the X direction.
  • the cover 1 is arranged at the conveyance path side of the case 2 .
  • the cover 1 has a conveyance surface 1 b , which extends along the conveyance path, and tapers 1 a .
  • the tapers 1 a are tilted toward a direction opposite to the conveyance path side, and are continuous with an upper and a lower end of the conveyance surface 1 b in the conveyance direction 21 .
  • the cover 1 is shaped so as to cover the magnetoresistance effect elements 4 .
  • the case 2 is formed from a housing as illustrated in FIG. 1 . Holes 2 b and 2 c for containing and holding the various components constituting the magnetic sensor device 100 , holes for positioning, and a board mounting surface 2 f are formed in the case 2 .
  • the sensor board 3 is arranged between the cover 1 and a metallic carrier 7 .
  • the sensor board 3 has a structure that laminates in the Z direction a non-conductive member 3 a and a conductive member 3 b , which forms a wiring pattern.
  • the non-conductive member 3 a is fixed by double-sided tape, adhesive and the like to the cover 1 .
  • the conductive member 3 b is fixed by double-sided tape, adhesive and the like to the metallic carrier 7 .
  • the magnetoresistance effect element 4 is arranged at the conveyance path side (+Z side) of the magnet 9 . Further, the magnetoresistance effect element 4 is fixed by adhesive and the like to the +Z side (conveyance path side) surface of the magnetic carrier 7 a . The magnetoresistance effect element 4 is electrically connected through the wire 6 to the conductive member 3 b of the sensor board 3 .
  • the signal amplification IC 5 is fixed by adhesive and the like to a +Z side (conveyance path side) surface of the non-magnetic carrier 7 b .
  • the signal amplification IC 5 is electrically connected through the wire 6 to the conductive member 3 b of the sensor board 3 .
  • the signal amplification IC 5 is electrically connected to the magnetoresistance effect elements 4 .
  • FIG. 3A is a perspective view of the metallic carrier
  • FIG. 3B is a cross-sectional drawing of the metallic carrier.
  • the metallic carrier 7 is in close contact with the conveyance path side surface of the magnet 9 (+Z side surface of the magnet 9 ) and carries the magnetoresistance effect element 4 .
  • the metallic carrier 7 is integrally formed by contact between the magnetic carrier 7 a and the non-magnetic carrier 7 b in the Y direction (conveyance direction 21 ).
  • the metallic carrier 7 is fitted from a hole 2 b opening (conveyance path side opening) of the case 2 , and is fixed using adhesive and the like.
  • the magnet 9 is constituted by a permanent magnet.
  • the magnet 9 is fixed by adhesive and the like to a surface of the metallic carrier 7 of the side thereof opposite to the surface contacting the sensor board 3 (fixed to the ⁇ Z side surface of the metallic carrier 7 ).
  • the yoke 10 is close attached to a surface of the side opposite to the surface ( ⁇ Z side surface of the magnet 9 ) of the magnet 9 closely attached to the metallic carrier 7 .
  • the yoke 10 is fixed by adhesive and the like to the surface ( ⁇ Z side surface of the magnet 9 ) of the magnet 9 opposite to the surface contacting the metallic carrier 7 .
  • the yoke 10 is a plate of a magnetic metal.
  • the heat dissipator 11 is in close contact with a surface ( ⁇ Z side surface of the yoke 10 ) of the yoke 10 that is opposite to the surface of close contact with the magnet 9 .
  • This heat dissipator 11 is a component for release of internal heat of the magnetic sensor device 100 to the external air.
  • the heat dissipator 11 is fitted into a hole 2 e opening (opening of the side opposite to the conveyance path side) of the case 2 , and is fixed using adhesive and the like to the surface ( ⁇ Z side surface of the yoke 10 ) of the yoke 10 of the side opposite to the surface contacting the magnet 9 .
  • the heat dissipator 11 has fins 11 b projecting at the side thereof opposite to the conveyance path side.
  • the fins 11 b are arranged in rows in the Y direction and are integrally formed with the main body of the heat dissipator 11 .
  • the heat dissipator 11 is in close contact with the surface of the magnetic circuit 30 opposite to the conveyance path side, which is a surface other than the conveyance path side surface of the magnetic circuit 30 .
  • the signal processing board 13 is electrically connected through a cable 3 c to the sensor board 3 .
  • the signal processing board 13 is attached to the side ( ⁇ Z side of the case 2 ) of the case 2 opposite to the side contacting the cover 1 .
  • the signal processing board 13 covers the heat dissipator 11 by this means.
  • the cover 1 is a component comprising the object-to-be-examined conveyance surface of the magnetic sensor device 100 .
  • the cover 1 is produced by bending a thin metal sheet.
  • the cover 1 has tapers 1 a from the conveyance path side of the object to be detected 20 tilted toward the direction ( ⁇ Z direction) opposite to this conveyance path side.
  • the tapers 1 a function as conveyance guides. During conveyance, due to these tapers 1 a , the object to be detected 20 moves along the tapers 1 a . This configuration enables prevention of the object to be detected 20 from moving in a direction other than the conveyance direction (Y direction).
  • the cover 1 has a role of protecting the magnetic sensor device 100 from shock and wear due to collision, chafing and the like during conveyance of the object to be detected 20 upon the magnetic sensor device 100 . Further, noise generation occurs in the signal amplification IC 5 in reaction to light, and thus the cover 1 has a role of blocking external light so that the external light does not reach the signal amplification IC 5 .
  • This cover 1 is arranged between the object to be detected 20 and the magnetoresistance effect elements 4 .
  • the material of the cover 1 is preferably non-magnetic in order not to influence magneto-sensitivity of the magnetic sensor device 100 .
  • the cover 1 is produced by bending a thin metal sheet.
  • the aforementioned material and production method are not limiting. As long as the cover 1 has the aforementioned roles, the cover 1 may be produced by a method other than thin metal sheet bending.
  • FIG. 2C is a cross-sectional drawing of the case of the magnetic sensor device.
  • the case 2 is a component for internal containment of other components.
  • the case 2 is formed from a black resin.
  • the step 2 a , the holes 2 b , 2 c and 2 e , the board mounting surface 2 f , and the board mounting hole 2 g are formed in the case 2 .
  • the step 2 a is used for Z-direction support of the metallic carrier 7 assembled together with the sensor board 3 , magnetoresistance effect elements 4 , signal amplification IC 5 and wire 6 .
  • the step 2 a is arranged at the conveyance path side of the case 2 .
  • the hole 2 b has an opening end in the +Z side surface and is used for X-Y direction positioning of the metallic carrier 7 integrated together with the sensor board 3 , magnetoresistance effect element 4 , signal amplification IC 5 and wire 6 .
  • the hole 2 b is arranged in the conveyance path side (+Z side) of the case 2 , and the step 2 a is used as a bottom portion of the hole 2 b.
  • the hole 2 c is used for arrangement and X-Y direction positioning of the integrated magnet 9 and yoke 10 .
  • the hole 2 c is a through hole that penetrates from the hole 2 b to the hole 2 e.
  • the hole 2 e has an opening formed in the ⁇ Z side surface, and is used for X-Y direction positioning of the heat dissipator 11 during attachment of the heat dissipator 11 to the yoke 10 .
  • the hole 2 e is arranged at the surface of the case 2 of the side ( ⁇ Z side) opposite to the conveyance path side.
  • the board mounting surface 2 f is arranged at the surface of the side ( ⁇ Z side) opposite to the side of the conveyance path of the object to be detected 20 .
  • the board mounting surface 2 f is used for attachment of the signal processing board 13 .
  • the board mounting hole 2 g is used for positioning of the signal processing board 13 and for fixing thereof to the case 2 .
  • Noise generation occurs in the signal amplification IC 5 in reaction to light, and thus the case 2 has a role of blocking external light so that the external light does not reach the signal amplification IC 5 .
  • the case 2 is formed from the black resin.
  • use of the above material is not limiting. As long as the case 2 has the aforementioned role, formation is possible using a material other than the black resin.
  • the sensor board 3 has the non-conductive member 3 a and the conductive member 3 b .
  • the non-conductive member 3 a is used for arranging a space such that the cover 1 does not contact the magnetoresistance effect element 4 , signal amplification IC 5 , and wire 6 .
  • Wiring for transmitting electrical signals of the magnetoresistance effect element 4 and the signal amplification IC 5 is arranged in the conductive member 3 b .
  • the cable 3 c is used for transmission of electrical signals from the sensor board 3 to the signal processing board 13 .
  • the sensor board 3 is attached to the surface of the +Z side (side of the conveyance path of the object to be detected 20 ) of the metallic carrier 7 .
  • the sensor board 3 is positioned by contact with the metallic carrier 7 .
  • positioning holes 3 d are formed in the sensor board 3 .
  • the positioning holes 3 d are formed in the vicinities of both X-direction end portions of the sensor board 3 .
  • positioning holes 7 c are formed in the metallic carrier 7 .
  • the positioning holes 7 c are formed in the vicinities of both X-direction end portions of the metallic carrier 7 .
  • the positioning holes 3 d and 7 c are coaxially stacked, and thus the sensor board 3 is positioned relative to the metallic carrier 7 .
  • the positioning holes 3 d and the positioning holes 7 c are each formed in at least two locations.
  • the magnetoresistance effect element 4 is fixed by adhesive and the like to the same surface of the magnetic carrier 7 a as that used for attachment of the sensor board 3 .
  • Z-direction position of the magnetoresistance effect element 4 is determined by contact with the magnetic carrier 7 a .
  • the magnetoresistance effect element 4 is arranged within the opening 3 e used for the magnetoresistance effect element 4 of the sensor board 3 .
  • the magnetoresistance effect element 4 is arranged on a virtual line L 2 parallel to a straight line L 1 interconnecting the positioning holes 3 d at both ends of the sensor board 3 .
  • the Y-direction position for fixing the magnetoresistance effect elements 4 is not limited to that of this configuration.
  • the virtual line L 2 may be offset parallel to both the X direction and Y direction.
  • the magnetoresistance effect element 4 detects the change of the conveyance direction component of the magnetic field that occurs due to conveyance in the conveyance direction 21 of the object to be detected 20 , such as paper currency and the like, which includes a magnetic component. Specifically, the resistance value of the magnetoresistance effect element 4 changes with the change of the magnetic field. Based on this change of the resistance value, the magnetoresistance effect element 4 detects the change of the magnetic field. Then the magnetoresistance effect element 4 outputs a signal corresponding to the amount of change of the magnetic field.
  • the signal amplification IC 5 is fixed by adhesive and the like to a surface of the non-magnetic carrier 7 b that is the same as the surface of attachment of the sensor board 3 .
  • Z-direction position of the signal amplification IC 5 is determined by contact with the non-magnetic carrier 7 b .
  • the signal amplification IC 5 is positioned in the X-Y plane of the signal amplification IC 5 by arrangement in the vicinity of the X-Y plane center of the opening 3 f used for the signal amplification IC 5 .
  • the signal amplification IC 5 amplifies the signal output from the magnetoresistance effect element 4 .
  • the wire 6 electrically connects together the magnetoresistance effect element 4 and the signal amplification IC 5 to the conductive member 3 b of the sensor board 3 .
  • the metallic carrier 7 has the magnetic carrier 7 a and the non-magnetic carrier 7 b .
  • Z-direction position of the metallic carrier 7 is determined by causing one Z-direction surface of the metallic carrier 7 (surface of the side opposite to the conveyance path of the object to be detected 20 , ⁇ Z side surface) to contact the step 2 a of the case 2 .
  • the metallic carrier 7 supports the sensor board 3 in the Z direction.
  • the magnetic carrier 7 a has a role of directing the magnetic field of the magnet 9 in the Z direction.
  • the X-direction sizes of the magnet 9 and yoke 10 are equal, and the Y-direction sizes are also equal.
  • the integrated magnet 9 and yoke 10 are arranged parallel to the magnetoresistance effect element 4 .
  • the surface (conveyance path side surface of the magnet 9 ) of the magnet 9 opposite to the surface of contact between the magnet 9 and the yoke 10 and the surface (surface of the metallic carrier 7 at the side opposite to the conveyance path side) of the metallic carrier 7 opposite to the surface of contact of the sensor board 3 of the metallic carrier 7 are fixed by adhesion.
  • Z-direction position of the magnet 9 is determined by securing together this surface of the magnet 9 and the surface of the metallic carrier 7 . Further, the position of the magnet 9 in the X-Y plane relative to the magnetoresistance effect elements 4 is also determined. The magnetic forces imparted to the magnetoresistance effect elements 4 and the object to be detected 20 change when the Y-direction position of the magnet 9 changes, and thus the Y-direction position of the magnet 9 is preferably finely adjusted according to the performance of the magnetic sensor device 100 .
  • the magnet 9 has a role of generating the magnetic field and imparting magnetic force to the object to be detected 20 .
  • the yoke 10 has a role of strengthening the magnetic field generated by the magnet 9 .
  • the heat dissipator 11 is fixed by adhesive and the like to the surface of the yoke 10 opposite to the surface contacting the magnet 9 .
  • the Z-direction position of the heat dissipator 11 is determined by this means. Further, the position of the heat dissipator 11 in the X-Y directions is determined by causing the heat dissipator 11 to contact each of the X-Y direction surfaces within the inner perimeter surface of the hole 2 e of the case 2 .
  • the heat dissipator 11 radiates to the exterior of the magnetic sensor device 100 the heat generated mainly by the magnetoresistance effect element 4 and the signal amplification IC 5 .
  • the heat dissipator 11 has a role of suppressing high temperature in the magnetic sensor device 100 in itself.
  • the signal processing board 13 is electrically connected through the cable 3 c to the sensor board 3 .
  • the Z-direction position of the signal processing board 13 is determined by causing contact between one Z-direction surface (surface of the side of the conveyance path of the object to be detected 20 ) of the signal processing board 13 and the board mounting surface 2 f of the case 2 . Due to use of the fasteners 8 to fix the signal processing board 13 in a state in which the axis of the board mounting hole 2 g of the case 2 and the axis of the board mounting hole 13 a of the signal processing board 13 overlap, X-Y direction position of the signal processing board 13 relative to the case 2 is determined.
  • the fastener 8 for example, is a screw.
  • this configuration is not limiting, and a component other than a screw may be used as the fastener 8 , as long as the fastener 8 is a means, such as caulking and the like, that enables fixing of the signal processing board 13 to the case 2 .
  • the method of production of the magnetic sensor device of Embodiment 1 of this disclosure is explained below using FIG. 3A to FIG. 4B and FIG. 5 to FIG. 10 .
  • the production method of the magnetic sensor device 100 includes a carrier assembly step, a sensor board assembly step, a permanent magnet assembly step, and a final assembly step. Among these steps, the carrier assembly step is performed prior to the sensor board assembly step, and the final assembly step is performed after the other steps.
  • the carrier assembly step is explained using FIGS. 3A and 3B .
  • the carrier assembly step is a step of assembly of the metallic carrier 7 by fixing the magnetic carrier 7 a to the opening 7 d of the non-magnetic carrier 7 b .
  • the magnetic carrier 7 a is fixed, for example, by adhesion using a resin adhesive, bonding using caulking, and the like. If thicknesses are different between the magnetic carrier 7 a and the non-magnetic carrier 7 b at this time, one of the Z-direction surfaces is taken to be a standard, and the other surface is arranged to form a single surface free of a step.
  • the sensor board assembly step is explained using FIGS. 4A and 4B .
  • the sensor board assembly step is a step for attaching the sensor board 3 and the like to one surface of the metallic carrier 7 .
  • the magnetoresistance effect elements 4 are arranged parallel to the X axis direction on the magnetic carrier 7 a
  • the signal amplification ICs 5 are arranged parallel to the X axis direction on the non-magnetic carrier 7 b portion, of the metallic carrier 7 .
  • the magnetoresistance effect elements 4 and the signal amplification ICs 5 are electrically connected to the conductive member 3 b of the sensor board 3 through the wires 6 .
  • the surface used for attachment to the metallic carrier (+Z side surface of the metallic carrier 7 ) is a surface that has no step between the magnetic carrier 7 a and the non-magnetic carrier 7 b.
  • the magnetoresistance effect elements 4 When the magnetoresistance effect elements 4 are attached to the magnetic carrier 7 a , the magnetoresistance effect elements 4 are attached so that the magnetoresistance effect elements 4 do not protrude in the +Z direction from the opening 3 e of the sensor board 3 .
  • the signal amplification ICs 5 when the signal amplification ICs 5 are attached to the non-magnetic carrier 7 b , the signal amplification ICs 5 are attached so that the signal amplification ICs 5 do not protrude in the +Z direction from the openings 3 f of the sensor board 3 .
  • the magnet assembly step is explained using FIG. 5 .
  • the magnet assembly step is a step integrating together the magnet 9 and the yoke 10 .
  • the magnet 9 is not necessarily a single component, and a plurality of magnets 9 separated from one another in the X direction (longitudinal direction) may be integrated together.
  • the position of the magnet 9 relative to the yoke 10 is determined by attaching the magnets 9 to a +Z side surface of the yoke 10 , and aligning side surfaces in each of the X and Y directions of the magnet 9 and yoke 10 . At this time, all the S pole and N pole directions of all the magnets 9 are aligned in the same direction.
  • the magnets 9 are fixed to the yoke 10 using an adhesive and the like.
  • the final assembly step is described using FIGS. 6 to 10 .
  • the final assembly step has procedures such as those described below.
  • the magnet 9 is fixed to the metallic carrier 7 as illustrated in FIG. 6 .
  • This metallic carrier 7 with the affixed magnet 9 , is fixed to the case 2 as illustrated in FIG. 7 .
  • the heat dissipator 11 is fixed to the yoke 10 as illustrated in FIG. 8 .
  • the cover 1 is fixed to the sensor board 3 as illustrated in FIG. 9 .
  • FIG. 10 illustrates the magnetic sensor device with the signal processing board 13 fixed to the case 2 and with the signal processing board 13 electrically connected to the sensor board 3 .
  • the surface (surface of the +Z side) of the magnet 9 opposite to the surface of fixing of the yoke 10 is attached to the surface (surface of the ⁇ Z side) of the metallic carrier 7 opposite to the surface attached to the sensor board 3 .
  • the magnet 9 is arranged along the magnetic carrier 7 a , and the X-direction centers of the magnet 9 and the magnetic carrier 7 a are aligned. Further, position of the magnet 9 affects the performance of the magnetic sensor device, and thus a jig may be separately used for adjustment of the fixing position of the magnet 9 .
  • the surface (surface of the ⁇ Z side) of the side of the metallic carrier 7 opposite to the surface of attachment of the sensor board 3 is contacted against the step 2 a of the case 2 .
  • the metallic carrier 7 is fitted into the hole 2 b from the opening thereof.
  • the magnet 9 is arranged within the hole 2 c of the case 2 .
  • the heat dissipator 11 is attached to the surface (surface of the ⁇ Z side) of the side of the yoke 10 opposite to the surface of attachment of the magnet 9 . At this time, position of the heat dissipator 11 in the X-Y directions is determined by fitting the heat dissipator 11 into the hole 2 e of the case 2 .
  • the surface (surface of the ⁇ Z side) of the side of the cover 1 opposite to the conveyance surface 1 b is attached to the surface (surface of the +Z side of the sensor board 3 ) of the side of the sensor board 3 opposing the surface contacting the metallic carrier 7 .
  • the cover 1 is attached so as to partially cover the +Y side and ⁇ Y side surfaces (surfaces parallel to the X-Z plane) of the case 2 .
  • Position of the cover 1 is determined in the X direction by aligning the X-direction center of the cover 1 with the X-direction center of the case 2 .
  • the signal processing board 13 is attached to the case 2 from the ⁇ Z side, and the surface (one surface in the Z direction) of the +Z side of the signal processing board 13 is made to contact the board mounting surface 2 f of the case 2 . Also, the board mounting hole 13 a of the signal processing board 13 and the board mounting hole 2 g of the case 2 are made to overlap, and the fastener 8 is screwed into the board mounting hole 13 a and the board mounting hole 2 g .
  • the signal processing board 13 is positioned relative to the case 2 by this means.
  • the cable 3 c is electrically connected to the signal processing board 13 .
  • FIG. 1 is used to describe the path of heat transmitted from the interior of the magnetic sensor device 100 to the exterior air.
  • the main sources of heat in the magnetic sensor device 100 are the magnetoresistance effect element 4 and the signal amplification IC 5 .
  • the heat generated by the magnetoresistance effect element 4 and the signal amplification IC 5 is transmitted to the metallic carrier 7 that contacts the magnetoresistance effect element 4 and the signal amplification IC 5 .
  • the metallic carrier 7 contacts the sensor board 3 , the case 2 , and the magnet 9 .
  • the non-conductive member 3 a of the sensor board 3 is formed from glass epoxy and does not include metal for conduction. Thus the heat conduction coefficient of the non-conductive member 3 a is relatively low (heat conduction coefficient of general glass epoxy is 0.4 W/m ⁇ K).
  • the heat conduction coefficient of the case 2 is relatively low (heat conduction coefficient of general polycarbonate resin is 0.24 W/m ⁇ K).
  • the magnet 9 is formed as a neodymium sintered magnet (heat conduction coefficient of general neodymium sintered magnet is 6.5 W/m ⁇ K), and the heat conduction coefficient of the magnet 9 is higher than the heat conduction coefficients of the metallic carrier 7 and the case 2 . Thus most of the heat from the metallic carrier 7 is transmitted to the magnet 9 (heat conduction coefficient of general neodymium sintered magnet is 6.5 W/m ⁇ K).
  • the magnet 9 contacts the metallic carrier 7 .
  • the metallic carrier 7 contacts the yoke 10 , to which is attached the heat dissipator 11 .
  • the heat transmitted to the magnet 9 is transmitted to the metallic carrier 7 and the yoke 10 , and is radiated from the heat dissipator 11 .
  • the heat dissipator 11 is arranged in close contact with the ⁇ Z side (side opposite to the conveyance path) of the magnetic circuit 30 .
  • temperature rise of the magnetic sensor device 100 is suppressed, which enables the suppression of demagnetization of the magnet 9 by heat, and enables the obtaining of stable output without lowering of sensitivity.
  • the heat generated by the magnetoresistance effect elements 4 and the signal amplification ICs 5 are transmitted from the magnetoresistance effect elements 4 and the signal amplification ICs 5 , in order, to the metallic carrier 7 , magnet 9 , and yoke 10 .
  • heat from the yoke 10 is unable to be transmitted to the exterior of the magnetic sensor device 200 except by thermal radiation.
  • heat radiation efficiency is low.
  • the heat dissipator 11 is arranged in close contact with the magnetic circuit 30 in the magnetic sensor device 100 of the present Embodiment 1, and thus rise of temperature of the magnetic sensor device 100 is suppressed, the demagnetization of the magnet 9 due to heat can be suppressed, and stable output is obtained without lowering of sensitivity.
  • the case 2 of the magnetic sensor device 100 is formed from resin.
  • the case 2 may be formed from a material that has a high heat transfer coefficient, such as a metal and the like. Such configuration enables radiation of heat through the case 2 to the exterior air, thereby enabling further increase of heat dissipation efficiency.
  • the magnetic sensor device is described in which the heat dissipator 11 closely contacts the surface of the magnetic circuit 30 of the side opposite to the surface of the conveyance path side.
  • a magnetic sensor device is described in which the heat dissipator 11 closely contacts a surface of the magnetic circuit 30 other than surface of the side opposite to the surface of the conveyance path side.
  • FIG. 12 is used for description of the configuration of the magnetic sensor device of Embodiment 2 of the present disclosure.
  • FIG. 12 is a cross-sectional drawing of a magnetic sensor device 100 A.
  • constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • the heat dissipator 11 of the magnetic sensor device 100 A is exposed to the exterior. Further, in order to determine the position of the heat dissipator 11 , the hole 2 e is formed in the case 2 of the magnetic sensor device 100 A. The opening of the hole 2 e is formed in a ⁇ Y direction side surface of the case 2 . X-Z direction positions of the heat dissipator 11 are determined by fitting the heat dissipator 11 into the case 2 from the hole 2 e opening. Further, position of the heat dissipator 11 in the Y-axis direction is determined by attachment of the heat dissipator 11 to the ⁇ Y side surface of the yoke 10 and the magnet 9 constituting the magnetic circuit 30 .
  • the heat dissipator 11 closely contacts the Y-direction side surface of the magnetic circuit 30 , which is the surface of the magnetic circuit 30 other than the conveyance path-side surface of the magnetic circuit 30 .
  • the heat generated by the magnetoresistance effect element 4 and the signal amplification IC 5 is transmitted, in order, to the metallic carrier 7 and the magnet 9 , and is radiated to the exterior from the magnet 9 through the heat dissipator 11 . Due to radiation of the heat to the exterior without traversing the yoke 10 , thermal resistance up until radiation to the exterior can be made small, and the efficiency of thermal radiation can be improved. Moreover, in contrast to the magnetic sensor device 100 of the present Embodiment 1, the heat dissipator 11 is exposed to the exterior, and thus the release of heat to the exterior is not impeded by the signal processing board 13 . Thus the present Embodiment 2 enables further improvement of the heat dissipation efficiency.
  • the heat dissipator 11 is in close contact with the Y-direction side surface of the magnetic circuit 30 .
  • a configuration may be used in which the heat dissipator 11 is in close contact with both the Y-direction side surface of the magnetic circuit 30 and the surface of the magnetic circuit 30 of the side opposite to the surface of the conveyance direction side.
  • FIG. 13A is a perspective view of a cross-sectioned portion of the case 2 of the magnetic sensor device.
  • the FIG. 13B is a cross-sectional drawing of the case 2 of the magnetic sensor device.
  • FIG. 14 is a cross-sectional drawing of the magnetic sensor device.
  • constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • the heat dissipator 11 of the magnetic sensor device 100 B is insert-molded in the case 2 .
  • the heat dissipator 11 has a plurality of fins 11 b projecting toward the side ( ⁇ Z side) opposite to the conveyance path side.
  • the plurality of fins 11 b for example, is arranged in the Y direction.
  • the heat dissipator 11 is held by the case 2 by embedding of both end portions of the +Y side and ⁇ Y side of the heat dissipator 11 in the case 2 .
  • the heat dissipator 11 in the present Embodiment 3 is insert-molded in the case 2 .
  • the number of components of the magnetic sensor device 100 B decreases. Further, the operation of attaching the heat dissipator 11 to the yoke 10 during the final assembly step becomes unnecessary.
  • the heat dissipator 11 due to formation of the heat dissipator 11 from a metal, which generally has a high heat transfer coefficient, toughness of the case 2 can be increased by insert-molding of the heat dissipator 11 in the case 2 . Further, in Embodiment 3, the heat dissipator 11 is insert-molded in the case 2 . However, this configuration is not limiting. The heat dissipator 11 may be integrally formed with the case 2 by a method other than insert-molding.
  • FIG. 15 is a perspective view of the magnetic sensor device of Embodiment 4 with the board mounting surface of the case oriented upward.
  • FIG. 16 is a cross-sectional drawing of the magnetic sensor device of Embodiment 4.
  • constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • an offset surface 2 h is formed that is offset in the +Z direction from the board mounting surface 2 f .
  • space in the vicinity of the heat dissipator 11 communicates with the exterior due to formation of the offset surface 2 h . This has the effect of enabling improvement of heat radiation efficiency.
  • FIG. 17 is a perspective view of the heat dissipator of the magnetic sensor device of Embodiment 5.
  • FIG. 18 is a cross-sectional drawing of the magnetic sensor device of Embodiment 5.
  • constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • the heat dissipator 11 of the magnetic sensor device 100 D has a plate-shaped base 11 c having fins 11 b formed on the surface of the ⁇ Z side, and a pair of projections 11 a (sidewalls) for determining the Y-direction positions of the magnet 9 and the yoke 10 .
  • the projections 11 a are arranged projecting in the +Z direction from both Y-direction end portions of the base 11 c of the heat dissipator 11 .
  • the heat dissipator 11 has the projections 11 a .
  • the jig which is necessary in the permanent magnet assembly step of the magnetic sensor device 100 of Embodiment 1 for fixing the magnet 9 and the yoke 10 , can become unnecessary.
  • insertion of the magnet 9 and the yoke 10 between the projections 11 a enables omission of the step in which the heat dissipator 11 is attached to the magnet 9 and the yoke 10 .
  • contact surface area between the magnet 9 and the heat dissipator 11 increases due to contact of the +Y side and ⁇ Y side surfaces of the magnet 9 with the projections 11 a . Heat radiation efficiency can be increased by this configuration.
  • FIG. 19 is a perspective view of the heat dissipator of the magnetic sensor device of Embodiment 6.
  • FIG. 20 is a cross-sectional drawing of the magnetic sensor device of Embodiment 6.
  • constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • the heat dissipator 11 is formed as a C-shaped channel that has: a plate-shaped base 11 c for formation of fins 11 b on the ⁇ Z side surface, and two of the fins 11 b formed extending from the +Y side and ⁇ Y side end portions of the base 11 c.
  • the heat dissipator 11 of the present Embodiment 6 has two fins 11 b .
  • the shape of the heat dissipator 11 can be simplified, and fabrication cost of the heat dissipator 11 can be decreased.
  • the heat dissipator 11 of the magnetic sensor device 100 illustrated in Embodiment 1 generally is molded by extrusion molding due to the large number of fins 11 b .
  • the present Embodiment 6 enables production by bending of sheet material and enables selection of a suitable production method. Moreover, setting the dimensions of the C-shaped channel to those of a standard product enables decrease of the fabrication cost.
  • FIG. 21 is a cross-sectional drawing of the magnetic sensor device of Embodiment 7.
  • the magnetic sensor device 100 F enables detection only in the case in which the object to be detected 20 is magnetic.
  • constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • the metallic carrier 7 of the magnetic sensor device 100 F is configured from a single sheet of non-magnetic plate.
  • the magnetic carrier 7 a has a role of arranging the direction of the magnetic field of the magnet 9 in the Z direction.
  • the magnetic carrier 7 a may be omitted from the metallic carrier 7 . Heat dissipation efficiency can be improved due to the metallic carrier 7 in Embodiment 7 of the present disclosure not having the magnetic carrier 7 a.
  • the magnetic carrier 7 a is formed from iron (general heat transfer coefficient is 84 W/m ⁇ K), and the non-magnetic carrier 7 b is formed from copper (general heat transfer coefficient is 398 W/m ⁇ K).
  • heat dissipation efficiency can be increased due to formation of the metallic carrier 7 from only the non-magnetic carrier 7 b , which has a high heat transfer coefficient.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)
  • Inspection Of Paper Currency And Valuable Securities (AREA)
  • Geophysics And Detection Of Objects (AREA)

Abstract

A magnetic sensor device includes: a magnetic circuit for forming a magnetic field, a magnetoresistance effect element, and a heat dissipator. The magnetoresistance effect element outputs changes in the magnetic field as changes in a resistance value, and is arranged on a surface (of a +Z side) of the magnetic circuit at a conveyance path side thereof. The heat dissipator is arranged in close contact with the magnetic circuit at the opposite side thereof (−Z side) from the conveyance path.

Description

    TECHNICAL FIELD
  • The present disclosure relates to a magnetic sensor device and a method for producing the same.
  • BACKGROUND ART
  • Patent Literature 1 discloses a magnetic sensor device that is equipped with a magnet and a magnetoresistance effect element for detection of an object to be detected that is conveyed through a conveyance path. A magnetic pole is disposed at one surface side of the magnet where the object to be detected is conveyed, and the magnet generates an intersection magnetic field that intersects the object to be detected. The magnetoresistance effect element is arranged between the magnet and the object to be detected. The magnetoresistance effect element has an output terminal and outputs as a change of resistance value a change of a conveyance direction component of the intersection magnetic field due to a magnetic component of the object to be detected conveyed through the intersection magnetic field. Further, Patent Literature 1 discloses, as a configuration of a magnetic circuit for generation of the intersection magnetic field, a configuration that disposes the object to be detected between opposing magnets, and a configuration that disposes a magnet at one surface of the object to be detected and disposes a magnetic body opposing another surface of the object to be detected.
  • Patent Literature 2 mentions a magnetic sensor that is characterized in that the magnetic sensor is equipped with a magnetoresistance element, a conductor layer and a resistance. The magnetoresistance element has an element board and pairs of magnetosensitive parts arranged parallel to one another at a fixed spacing on the element board. The conductor layer is disposed at a position equidistance with each of pairs of the magnetosensitive part. The resistance is connected electrically in series with the conductor layer.
  • CITATION LIST Patent Literature
    • Patent Literature 1: Unexamined Japanese Patent Application Kokai Publication No. 2012-255770
    • Patent Literature 2: Unexamined Japanese Patent Application Kokai Publication No. H08-201493
    SUMMARY OF INVENTION Technical Problem
  • In a magnetic sensor device, the component that emits the most heat in the magnetic sensor device is the magnetoresistance effect element. The resolution and number of magnetoresistance effect elements are low in conventional magnetic sensor devices such as those in Patent Literature 1 and Patent Literature 2. Thus the amount of heat generation is low, and consideration of heat dissipation is not required in the construction of such conventional magnetic sensor devices. However, a large number of magnetoresistance effect elements are arranged in order to make a magnetic sensor device that has high resolution. Thus a large amount of heat is generated, and the magnetic sensor device tends to become hot. The magnet used in the magnetic sensor device demagnetizes when the magnetic sensor device becomes hot, and thus the performance of the magnetic sensor device is likely to decline.
  • The object of the present disclosure is to solve the aforementioned type of problem and to obtain a magnetic sensor device, and production method thereof, that has excellent heat dissipation and is capable of suppressing the lowering of performance that is caused by heat generation by the magnetoresistance effect elements.
  • Solution to Problem
  • In order to achieve the aforementioned object, the magnetic sensor device of the present disclosure is equipped with a magnetic circuit for forming a magnetic field, magnetoresistance effect elements and a heat dissipator. The magnetoresistance effect elements output a change of magnetic field as a change of resistance value, and are arranged on a surface on an object-to-be-detected conveyance path side of the magnetic circuit. The heat dissipator is arranged in close contact with the magnetic circuit at a surface other than the conveyance path side surface of the heat dissipator.
  • Advantageous Effects of Invention
  • According to the present disclosure, the heat dissipator is arranged in close contact with the heat dissipator at a surface of the magnetic circuit other than that of the conveyance path side. Thus heat increase of the magnetic sensor device is suppressed, which enables suppression of the demagnetization of the magnet by heat. This has the effect of enabling the obtaining of the magnetic sensor device, and a production method thereof, that are capable of suppressing lowering of performance of the magnetoresistance effect elements.
  • BRIEF DESCRIPTION OF DRAWINGS
  • FIG. 1 is a cross-sectional drawing of a magnetic sensor device of Embodiment 1 of this disclosure;
  • FIG. 2A is a perspective view of the magnetic sensor device of Embodiment 1, with a cover side oriented upward;
  • FIG. 2B is a perspective view of the magnetic sensor device of Embodiment 1, with a signal processing board side oriented upward;
  • FIG. 2C is a cross-sectional drawing of a case of Embodiment 1;
  • FIG. 3A is a perspective view of a metallic carrier in the magnetic sensor device of Embodiment 1;
  • FIG. 3B is a cross-sectional drawing of the metallic carrier in the magnetic sensor device of Embodiment 1;
  • FIG. 4A is a perspective view illustrating a state of assembly of a sensor board, carrier, magnetoresistance effect elements and signal amplification ICs in the magnetic sensor device of Embodiment 1;
  • FIG. 4B is a perspective view illustrating a state of assembly of the sensor board, carrier, magnetoresistance effect element and signal amplification IC in the magnetic sensor device of Embodiment 1;
  • FIG. 4C is a plan view of the sensor board of the magnetic sensor device of Embodiment 1;
  • FIG. 5 is a perspective view illustrating a state of contact between a permanent magnet and a yoke in the magnetic sensor device of Embodiment 1;
  • FIG. 6 is a cross-sectional drawing illustrating the state in which the carrier and a permanent magnet are attached and integrated together in the state of FIG. 4 of the magnetic sensor device of Embodiment 1;
  • FIG. 7 is a cross-sectional drawing illustrating a state of attachment of components of the FIG. 6 state to the case in the magnetic sensor device of Embodiment 1;
  • FIG. 8 is a cross-sectional drawing illustrating a state of attachment of the heat dissipator in the state of FIG. 7 for the magnetic sensor device of Embodiment 1;
  • FIG. 9 is a cross-sectional drawing illustrating a state of attachment of the cover in the state of FIG. 8 for the magnetic sensor device of Embodiment 1;
  • FIG. 10 is a cross-sectional drawing of the case in the magnetic sensor device of Embodiment 1;
  • FIG. 11 is a cross-sectional drawing of a magnetic sensor device of a comparative example;
  • FIG. 12 is a cross-sectional drawing of a magnetic sensor device of Embodiment 2 of this disclosure;
  • FIG. 13A is a perspective view illustrating in partial cross section of the case of a magnetic sensor device of Embodiment 3 of this disclosure;
  • FIG. 13B is a cross-sectional drawing of the case of the magnetic sensor device of Embodiment 3;
  • FIG. 14 is a cross-sectional drawing of the magnetic sensor device of Embodiment 3;
  • FIG. 15 is a perspective view of a case of a magnetic sensor device of Embodiment 4 of this disclosure;
  • FIG. 16 is a cross-sectional drawing of the magnetic sensor device of Embodiment 4;
  • FIG. 17 is a perspective view of a heat dissipator in a magnetic sensor device of Embodiment 5 of this disclosure;
  • FIG. 18 is a cross-sectional drawing of the magnetic sensor device of Embodiment 5;
  • FIG. 19 is a perspective view of the heat dissipator of a magnetic sensor device of Embodiment 6 of this disclosure;
  • FIG. 20 is a cross-sectional drawing of the magnetic sensor device of Embodiment 6; and
  • FIG. 21 is a cross-sectional drawing of a magnetic sensor device of Embodiment 7 of this disclosure.
  • DESCRIPTION OF EMBODIMENTS Embodiment 1
  • A magnetic sensor device, and a production method thereof, of Embodiment 1 of this disclosure are described below. Furthermore, in all the embodiments, the expression “conveyance of the object to be detected”, in addition to the case of conveyance of the object to be detected, is taken to further include the case of moving the magnetic sensor device in the conveyance direction (Y direction of FIG. 1) without moving the object to be detected. Furthermore, the X direction is termed the “reading-width direction”.
  • Further, the three axes labeled X, Y and Z in the drawings are three orthogonal axes. The X axis indicates the reading-width direction (longitudinal direction of the magnetic sensor device) of the magnetic sensor device. The Y axis indicates the conveyance direction (conveyance direction of the conveyed object to be detected, transverse direction of the magnetic sensor device) of the magnetic sensor device. The Z axis indicates the height direction of the magnetic sensor device. Further, the locations of conveyance of the object to be detected in the conveyance direction are termed the “conveyance path of the object to be detected”. Here, the origin of the X axis is the center of X-axis direction length of the magnetic sensor device, and the direction of the arrow within the figures is the + direction (positive direction). The origin of the Y axis is the center of Y-axis direction length of the magnetic sensor device, and the direction of the arrow within the figures is the + direction (positive direction). The origin of the Z axis is the center of Z-axis direction length of the magnetic sensor device, and the direction of the arrow within the figures is the + direction (positive direction). Within the figures, identical reference signs indicate the same or equivalent components.
  • FIG. 1 is a cross-sectional drawing at the Z-Y plane of the magnetic sensor device of Embodiment 1 of this disclosure. The magnetic sensor device 100 illustrated in FIG. 1, for example, is used in a magnetic card reader or in an identification apparatus for printed articles (such as paper currency and the like) printed using magnetic ink. The magnetic sensor device 100, along the Z direction perpendicular to the conveyance direction 21 (Y direction) of the object to be detected 20 such as paper currency and the like, is equipped with a magnetic circuit 30 and a heat dissipator 11. The magnetic circuit 30 is equipped with a magnet 9, a yoke 10 and a metallic carrier 7 carrying magnetoresistance effect elements 4, having a magnetic carrier 7 a, and a non-magnetic carrier 7 b. The magnet 9 and the magnetic carrier 7 a constituting the magnetic circuit 30 form a magnetic field by magnetic flux from one pole of the magnet 9 passing through the magnetic carrier 7 a, overflowing to a space at the conveyance path side, turning back, passing through the yoke 10, and returning to the other pole of the magnet 9. The object to be detected 20 is conveyed through the conveyance path in a manner so as to pass through the void (space) where the magnetic field is formed.
  • Further, the magnetic sensor device 100 is equipped with a cover 1, a case 2, a sensor board 3, a signal amplification integrated circuit (referred to throughout the present disclosure as “IC”) 5, a wire 6, a fastener 8 and a signal processing board 13.
  • Although the conveyance direction 21 in FIG. 1 is the +Y direction, the −Y direction may also be used.
  • FIG. 2A and FIG. 2B are perspective views of the magnetic sensor device of Embodiment 1 of this disclosure. FIG. 2A is a perspective view with the cover 1 oriented upward. FIG. 2B is a perspective view with the signal processing board 13 oriented upward. As illustrated in FIGS. 2A and 2B, the cover 1 is a component constituting the object-to-be-examined conveyance surface of the magnetic sensor device 100. The cover 1 extends in the X direction. The cover 1 is arranged at the conveyance path side of the case 2. The cover 1 has a conveyance surface 1 b, which extends along the conveyance path, and tapers 1 a. The tapers 1 a are tilted toward a direction opposite to the conveyance path side, and are continuous with an upper and a lower end of the conveyance surface 1 b in the conveyance direction 21. The cover 1 is shaped so as to cover the magnetoresistance effect elements 4.
  • The case 2 is formed from a housing as illustrated in FIG. 1. Holes 2 b and 2 c for containing and holding the various components constituting the magnetic sensor device 100, holes for positioning, and a board mounting surface 2 f are formed in the case 2.
  • The sensor board 3 is arranged between the cover 1 and a metallic carrier 7. The sensor board 3 has a structure that laminates in the Z direction a non-conductive member 3 a and a conductive member 3 b, which forms a wiring pattern. The non-conductive member 3 a is fixed by double-sided tape, adhesive and the like to the cover 1. The conductive member 3 b is fixed by double-sided tape, adhesive and the like to the metallic carrier 7.
  • The magnetoresistance effect element 4 is arranged at the conveyance path side (+Z side) of the magnet 9. Further, the magnetoresistance effect element 4 is fixed by adhesive and the like to the +Z side (conveyance path side) surface of the magnetic carrier 7 a. The magnetoresistance effect element 4 is electrically connected through the wire 6 to the conductive member 3 b of the sensor board 3.
  • The signal amplification IC 5 is fixed by adhesive and the like to a +Z side (conveyance path side) surface of the non-magnetic carrier 7 b. The signal amplification IC 5 is electrically connected through the wire 6 to the conductive member 3 b of the sensor board 3. By this means, the signal amplification IC 5 is electrically connected to the magnetoresistance effect elements 4.
  • FIG. 3A is a perspective view of the metallic carrier, and FIG. 3B is a cross-sectional drawing of the metallic carrier. As illustrated in FIGS. 3A and 3B, the metallic carrier 7 is in close contact with the conveyance path side surface of the magnet 9 (+Z side surface of the magnet 9) and carries the magnetoresistance effect element 4. The metallic carrier 7 is integrally formed by contact between the magnetic carrier 7 a and the non-magnetic carrier 7 b in the Y direction (conveyance direction 21). The metallic carrier 7 is fitted from a hole 2 b opening (conveyance path side opening) of the case 2, and is fixed using adhesive and the like.
  • The magnet 9, as illustrated in FIG. 1, is constituted by a permanent magnet. The magnet 9 is fixed by adhesive and the like to a surface of the metallic carrier 7 of the side thereof opposite to the surface contacting the sensor board 3 (fixed to the −Z side surface of the metallic carrier 7).
  • The yoke 10 is close attached to a surface of the side opposite to the surface (−Z side surface of the magnet 9) of the magnet 9 closely attached to the metallic carrier 7. The yoke 10 is fixed by adhesive and the like to the surface (−Z side surface of the magnet 9) of the magnet 9 opposite to the surface contacting the metallic carrier 7. The yoke 10 is a plate of a magnetic metal.
  • The heat dissipator 11 is in close contact with a surface (−Z side surface of the yoke 10) of the yoke 10 that is opposite to the surface of close contact with the magnet 9. This heat dissipator 11 is a component for release of internal heat of the magnetic sensor device 100 to the external air. The heat dissipator 11 is fitted into a hole 2 e opening (opening of the side opposite to the conveyance path side) of the case 2, and is fixed using adhesive and the like to the surface (−Z side surface of the yoke 10) of the yoke 10 of the side opposite to the surface contacting the magnet 9. The heat dissipator 11 has fins 11 b projecting at the side thereof opposite to the conveyance path side. The fins 11 b are arranged in rows in the Y direction and are integrally formed with the main body of the heat dissipator 11.
  • That is to say, the heat dissipator 11 is in close contact with the surface of the magnetic circuit 30 opposite to the conveyance path side, which is a surface other than the conveyance path side surface of the magnetic circuit 30.
  • The signal processing board 13 is electrically connected through a cable 3 c to the sensor board 3. The signal processing board 13 is attached to the side (−Z side of the case 2) of the case 2 opposite to the side contacting the cover 1. The signal processing board 13 covers the heat dissipator 11 by this means.
  • As illustrated in FIGS. 2A and 2B, the cover 1 is a component comprising the object-to-be-examined conveyance surface of the magnetic sensor device 100. The cover 1 is produced by bending a thin metal sheet. The cover 1 has tapers 1 a from the conveyance path side of the object to be detected 20 tilted toward the direction (−Z direction) opposite to this conveyance path side. The tapers 1 a function as conveyance guides. During conveyance, due to these tapers 1 a, the object to be detected 20 moves along the tapers 1 a. This configuration enables prevention of the object to be detected 20 from moving in a direction other than the conveyance direction (Y direction).
  • The cover 1 has a role of protecting the magnetic sensor device 100 from shock and wear due to collision, chafing and the like during conveyance of the object to be detected 20 upon the magnetic sensor device 100. Further, noise generation occurs in the signal amplification IC 5 in reaction to light, and thus the cover 1 has a role of blocking external light so that the external light does not reach the signal amplification IC 5. This cover 1 is arranged between the object to be detected 20 and the magnetoresistance effect elements 4. Thus the material of the cover 1 is preferably non-magnetic in order not to influence magneto-sensitivity of the magnetic sensor device 100.
  • In Embodiment 1 of this disclosure, the cover 1 is produced by bending a thin metal sheet. However, the aforementioned material and production method are not limiting. As long as the cover 1 has the aforementioned roles, the cover 1 may be produced by a method other than thin metal sheet bending.
  • FIG. 2C is a cross-sectional drawing of the case of the magnetic sensor device. As illustrated in FIGS. 2A to 2C, the case 2 is a component for internal containment of other components. The case 2 is formed from a black resin. The step 2 a, the holes 2 b, 2 c and 2 e, the board mounting surface 2 f, and the board mounting hole 2 g are formed in the case 2.
  • The step 2 a is used for Z-direction support of the metallic carrier 7 assembled together with the sensor board 3, magnetoresistance effect elements 4, signal amplification IC 5 and wire 6. The step 2 a is arranged at the conveyance path side of the case 2.
  • The hole 2 b has an opening end in the +Z side surface and is used for X-Y direction positioning of the metallic carrier 7 integrated together with the sensor board 3, magnetoresistance effect element 4, signal amplification IC 5 and wire 6. The hole 2 b is arranged in the conveyance path side (+Z side) of the case 2, and the step 2 a is used as a bottom portion of the hole 2 b.
  • The hole 2 c is used for arrangement and X-Y direction positioning of the integrated magnet 9 and yoke 10. The hole 2 c is a through hole that penetrates from the hole 2 b to the hole 2 e.
  • The hole 2 e has an opening formed in the −Z side surface, and is used for X-Y direction positioning of the heat dissipator 11 during attachment of the heat dissipator 11 to the yoke 10. The hole 2 e is arranged at the surface of the case 2 of the side (−Z side) opposite to the conveyance path side.
  • The board mounting surface 2 f is arranged at the surface of the side (−Z side) opposite to the side of the conveyance path of the object to be detected 20. The board mounting surface 2 f is used for attachment of the signal processing board 13.
  • The board mounting hole 2 g is used for positioning of the signal processing board 13 and for fixing thereof to the case 2.
  • Noise generation occurs in the signal amplification IC 5 in reaction to light, and thus the case 2 has a role of blocking external light so that the external light does not reach the signal amplification IC 5.
  • In Embodiment 1 of this disclosure, the case 2 is formed from the black resin. However, use of the above material is not limiting. As long as the case 2 has the aforementioned role, formation is possible using a material other than the black resin.
  • As illustrated in FIG. 1, the sensor board 3 has the non-conductive member 3 a and the conductive member 3 b. The non-conductive member 3 a is used for arranging a space such that the cover 1 does not contact the magnetoresistance effect element 4, signal amplification IC 5, and wire 6. Wiring for transmitting electrical signals of the magnetoresistance effect element 4 and the signal amplification IC 5 is arranged in the conductive member 3 b. The cable 3 c is used for transmission of electrical signals from the sensor board 3 to the signal processing board 13.
  • The sensor board 3 is attached to the surface of the +Z side (side of the conveyance path of the object to be detected 20) of the metallic carrier 7. The sensor board 3 is positioned by contact with the metallic carrier 7. As shown in FIGS. 4A and 4B, positioning holes 3 d are formed in the sensor board 3. The positioning holes 3 d are formed in the vicinities of both X-direction end portions of the sensor board 3. As illustrated in FIGS. 3A and 3B, positioning holes 7 c are formed in the metallic carrier 7. The positioning holes 7 c are formed in the vicinities of both X-direction end portions of the metallic carrier 7. As illustrated in FIGS. 3A, 3B, 4A and 4B, pins are inserted in the positioning holes 3 d and 7 c. By this means, the positioning holes 3 d and 7 c are coaxially stacked, and thus the sensor board 3 is positioned relative to the metallic carrier 7. The positioning holes 3 d and the positioning holes 7 c are each formed in at least two locations.
  • As illustrated in FIG. 1, the magnetoresistance effect element 4 is fixed by adhesive and the like to the same surface of the magnetic carrier 7 a as that used for attachment of the sensor board 3. Z-direction position of the magnetoresistance effect element 4 is determined by contact with the magnetic carrier 7 a. Moreover, the magnetoresistance effect element 4 is arranged within the opening 3 e used for the magnetoresistance effect element 4 of the sensor board 3. As illustrated in FIG. 4C, the magnetoresistance effect element 4 is arranged on a virtual line L2 parallel to a straight line L1 interconnecting the positioning holes 3 d at both ends of the sensor board 3. However, the Y-direction position for fixing the magnetoresistance effect elements 4 is not limited to that of this configuration. In response to the position of the object to be detected 20, the virtual line L2 may be offset parallel to both the X direction and Y direction.
  • The magnetoresistance effect element 4 detects the change of the conveyance direction component of the magnetic field that occurs due to conveyance in the conveyance direction 21 of the object to be detected 20, such as paper currency and the like, which includes a magnetic component. Specifically, the resistance value of the magnetoresistance effect element 4 changes with the change of the magnetic field. Based on this change of the resistance value, the magnetoresistance effect element 4 detects the change of the magnetic field. Then the magnetoresistance effect element 4 outputs a signal corresponding to the amount of change of the magnetic field.
  • As illustrated in FIG. 1, the signal amplification IC 5 is fixed by adhesive and the like to a surface of the non-magnetic carrier 7 b that is the same as the surface of attachment of the sensor board 3. Z-direction position of the signal amplification IC 5 is determined by contact with the non-magnetic carrier 7 b. Further, the signal amplification IC 5 is positioned in the X-Y plane of the signal amplification IC 5 by arrangement in the vicinity of the X-Y plane center of the opening 3 f used for the signal amplification IC 5.
  • The signal amplification IC 5 amplifies the signal output from the magnetoresistance effect element 4.
  • The wire 6 electrically connects together the magnetoresistance effect element 4 and the signal amplification IC 5 to the conductive member 3 b of the sensor board 3.
  • The metallic carrier 7 has the magnetic carrier 7 a and the non-magnetic carrier 7 b. Z-direction position of the metallic carrier 7 is determined by causing one Z-direction surface of the metallic carrier 7 (surface of the side opposite to the conveyance path of the object to be detected 20, −Z side surface) to contact the step 2 a of the case 2.
  • The metallic carrier 7 supports the sensor board 3 in the Z direction. The magnetic carrier 7 a has a role of directing the magnetic field of the magnet 9 in the Z direction.
  • One surface in the Z direction (−Z side surface, surface opposite to the side of the conveyance path of the object to be detected 20) of the magnet 9 contacts the yoke 10. The X-direction sizes of the magnet 9 and yoke 10 are equal, and the Y-direction sizes are also equal. The integrated magnet 9 and yoke 10 are arranged parallel to the magnetoresistance effect element 4. The surface (conveyance path side surface of the magnet 9) of the magnet 9 opposite to the surface of contact between the magnet 9 and the yoke 10 and the surface (surface of the metallic carrier 7 at the side opposite to the conveyance path side) of the metallic carrier 7 opposite to the surface of contact of the sensor board 3 of the metallic carrier 7 are fixed by adhesion. Z-direction position of the magnet 9 is determined by securing together this surface of the magnet 9 and the surface of the metallic carrier 7. Further, the position of the magnet 9 in the X-Y plane relative to the magnetoresistance effect elements 4 is also determined. The magnetic forces imparted to the magnetoresistance effect elements 4 and the object to be detected 20 change when the Y-direction position of the magnet 9 changes, and thus the Y-direction position of the magnet 9 is preferably finely adjusted according to the performance of the magnetic sensor device 100.
  • The magnet 9 has a role of generating the magnetic field and imparting magnetic force to the object to be detected 20. The yoke 10 has a role of strengthening the magnetic field generated by the magnet 9.
  • The heat dissipator 11 is fixed by adhesive and the like to the surface of the yoke 10 opposite to the surface contacting the magnet 9. The Z-direction position of the heat dissipator 11 is determined by this means. Further, the position of the heat dissipator 11 in the X-Y directions is determined by causing the heat dissipator 11 to contact each of the X-Y direction surfaces within the inner perimeter surface of the hole 2 e of the case 2.
  • The heat dissipator 11 radiates to the exterior of the magnetic sensor device 100 the heat generated mainly by the magnetoresistance effect element 4 and the signal amplification IC 5. The heat dissipator 11 has a role of suppressing high temperature in the magnetic sensor device 100 in itself.
  • The signal processing board 13 is electrically connected through the cable 3 c to the sensor board 3. The Z-direction position of the signal processing board 13 is determined by causing contact between one Z-direction surface (surface of the side of the conveyance path of the object to be detected 20) of the signal processing board 13 and the board mounting surface 2 f of the case 2. Due to use of the fasteners 8 to fix the signal processing board 13 in a state in which the axis of the board mounting hole 2 g of the case 2 and the axis of the board mounting hole 13 a of the signal processing board 13 overlap, X-Y direction position of the signal processing board 13 relative to the case 2 is determined. Here, the fastener 8, for example, is a screw. However, this configuration is not limiting, and a component other than a screw may be used as the fastener 8, as long as the fastener 8 is a means, such as caulking and the like, that enables fixing of the signal processing board 13 to the case 2.
  • The method of production of the magnetic sensor device of Embodiment 1 of this disclosure is explained below using FIG. 3A to FIG. 4B and FIG. 5 to FIG. 10. The production method of the magnetic sensor device 100 includes a carrier assembly step, a sensor board assembly step, a permanent magnet assembly step, and a final assembly step. Among these steps, the carrier assembly step is performed prior to the sensor board assembly step, and the final assembly step is performed after the other steps.
  • The carrier assembly step is explained using FIGS. 3A and 3B. The carrier assembly step is a step of assembly of the metallic carrier 7 by fixing the magnetic carrier 7 a to the opening 7 d of the non-magnetic carrier 7 b. The magnetic carrier 7 a is fixed, for example, by adhesion using a resin adhesive, bonding using caulking, and the like. If thicknesses are different between the magnetic carrier 7 a and the non-magnetic carrier 7 b at this time, one of the Z-direction surfaces is taken to be a standard, and the other surface is arranged to form a single surface free of a step.
  • The sensor board assembly step is explained using FIGS. 4A and 4B. The sensor board assembly step is a step for attaching the sensor board 3 and the like to one surface of the metallic carrier 7. In the sensor board assembly step, the magnetoresistance effect elements 4 are arranged parallel to the X axis direction on the magnetic carrier 7 a, and the signal amplification ICs 5 are arranged parallel to the X axis direction on the non-magnetic carrier 7 b portion, of the metallic carrier 7. Then the magnetoresistance effect elements 4 and the signal amplification ICs 5 are electrically connected to the conductive member 3 b of the sensor board 3 through the wires 6.
  • During attachment of the sensor board 3, the magnetoresistance effect elements 4, and the signal amplification ICs 5 to the metallic carrier 7, the surface used for attachment to the metallic carrier (+Z side surface of the metallic carrier 7) is a surface that has no step between the magnetic carrier 7 a and the non-magnetic carrier 7 b.
  • When the magnetoresistance effect elements 4 are attached to the magnetic carrier 7 a, the magnetoresistance effect elements 4 are attached so that the magnetoresistance effect elements 4 do not protrude in the +Z direction from the opening 3 e of the sensor board 3. In the same manner, when the signal amplification ICs 5 are attached to the non-magnetic carrier 7 b, the signal amplification ICs 5 are attached so that the signal amplification ICs 5 do not protrude in the +Z direction from the openings 3 f of the sensor board 3.
  • The magnet assembly step is explained using FIG. 5. The magnet assembly step is a step integrating together the magnet 9 and the yoke 10. Further, the magnet 9 is not necessarily a single component, and a plurality of magnets 9 separated from one another in the X direction (longitudinal direction) may be integrated together. The position of the magnet 9 relative to the yoke 10 is determined by attaching the magnets 9 to a +Z side surface of the yoke 10, and aligning side surfaces in each of the X and Y directions of the magnet 9 and yoke 10. At this time, all the S pole and N pole directions of all the magnets 9 are aligned in the same direction. The magnets 9 are fixed to the yoke 10 using an adhesive and the like.
  • The final assembly step is described using FIGS. 6 to 10. The final assembly step has procedures such as those described below. The magnet 9 is fixed to the metallic carrier 7 as illustrated in FIG. 6. This metallic carrier 7, with the affixed magnet 9, is fixed to the case 2 as illustrated in FIG. 7. Further, the heat dissipator 11 is fixed to the yoke 10 as illustrated in FIG. 8. Moreover, the cover 1 is fixed to the sensor board 3 as illustrated in FIG. 9. FIG. 10 illustrates the magnetic sensor device with the signal processing board 13 fixed to the case 2 and with the signal processing board 13 electrically connected to the sensor board 3.
  • As shown in FIG. 6, the surface (surface of the +Z side) of the magnet 9 opposite to the surface of fixing of the yoke 10 is attached to the surface (surface of the −Z side) of the metallic carrier 7 opposite to the surface attached to the sensor board 3. At this time, the magnet 9 is arranged along the magnetic carrier 7 a, and the X-direction centers of the magnet 9 and the magnetic carrier 7 a are aligned. Further, position of the magnet 9 affects the performance of the magnetic sensor device, and thus a jig may be separately used for adjustment of the fixing position of the magnet 9.
  • As illustrated in FIG. 7, the surface (surface of the −Z side) of the side of the metallic carrier 7 opposite to the surface of attachment of the sensor board 3 is contacted against the step 2 a of the case 2. By causing the side surface of the metallic carrier 7 to contact the inner surface of the hole 2 b of the case 2, the metallic carrier 7 is fitted into the hole 2 b from the opening thereof. By this means, the magnet 9 is arranged within the hole 2 c of the case 2.
  • As illustrated in FIG. 8, the heat dissipator 11 is attached to the surface (surface of the −Z side) of the side of the yoke 10 opposite to the surface of attachment of the magnet 9. At this time, position of the heat dissipator 11 in the X-Y directions is determined by fitting the heat dissipator 11 into the hole 2 e of the case 2.
  • As illustrated in FIG. 9, the surface (surface of the −Z side) of the side of the cover 1 opposite to the conveyance surface 1 b is attached to the surface (surface of the +Z side of the sensor board 3) of the side of the sensor board 3 opposing the surface contacting the metallic carrier 7. At this time, the cover 1 is attached so as to partially cover the +Y side and −Y side surfaces (surfaces parallel to the X-Z plane) of the case 2. Position of the cover 1 is determined in the X direction by aligning the X-direction center of the cover 1 with the X-direction center of the case 2.
  • As illustrated in FIG. 10, the signal processing board 13 is attached to the case 2 from the −Z side, and the surface (one surface in the Z direction) of the +Z side of the signal processing board 13 is made to contact the board mounting surface 2 f of the case 2. Also, the board mounting hole 13 a of the signal processing board 13 and the board mounting hole 2 g of the case 2 are made to overlap, and the fastener 8 is screwed into the board mounting hole 13 a and the board mounting hole 2 g. The signal processing board 13 is positioned relative to the case 2 by this means. Moreover, the cable 3 c is electrically connected to the signal processing board 13.
  • Next, FIG. 1 is used to describe the path of heat transmitted from the interior of the magnetic sensor device 100 to the exterior air.
  • The main sources of heat in the magnetic sensor device 100 are the magnetoresistance effect element 4 and the signal amplification IC 5. The heat generated by the magnetoresistance effect element 4 and the signal amplification IC 5 is transmitted to the metallic carrier 7 that contacts the magnetoresistance effect element 4 and the signal amplification IC 5. The metallic carrier 7 contacts the sensor board 3, the case 2, and the magnet 9. The non-conductive member 3 a of the sensor board 3 is formed from glass epoxy and does not include metal for conduction. Thus the heat conduction coefficient of the non-conductive member 3 a is relatively low (heat conduction coefficient of general glass epoxy is 0.4 W/m·K). Further, due to formation of the case 2 from resin, the heat conduction coefficient of the case 2 is relatively low (heat conduction coefficient of general polycarbonate resin is 0.24 W/m·K). On the other hand, the magnet 9 is formed as a neodymium sintered magnet (heat conduction coefficient of general neodymium sintered magnet is 6.5 W/m·K), and the heat conduction coefficient of the magnet 9 is higher than the heat conduction coefficients of the metallic carrier 7 and the case 2. Thus most of the heat from the metallic carrier 7 is transmitted to the magnet 9 (heat conduction coefficient of general neodymium sintered magnet is 6.5 W/m·K).
  • The magnet 9 contacts the metallic carrier 7. The metallic carrier 7 contacts the yoke 10, to which is attached the heat dissipator 11. Thus the heat transmitted to the magnet 9 is transmitted to the metallic carrier 7 and the yoke 10, and is radiated from the heat dissipator 11.
  • As described above, in the magnetic sensor device 100 of the present Embodiment 1, the heat dissipator 11 is arranged in close contact with the −Z side (side opposite to the conveyance path) of the magnetic circuit 30. Thus temperature rise of the magnetic sensor device 100 is suppressed, which enables the suppression of demagnetization of the magnet 9 by heat, and enables the obtaining of stable output without lowering of sensitivity.
  • For example, in the case of a magnetic sensor device 200, as illustrated in the comparative example of FIG. 11, that has no heat dissipator 11 and in which the opening of the hole 2 e is not formed in the case 2, the heat generated by the magnetoresistance effect elements 4 and the signal amplification ICs 5 are transmitted from the magnetoresistance effect elements 4 and the signal amplification ICs 5, in order, to the metallic carrier 7, magnet 9, and yoke 10. Then heat from the yoke 10 is unable to be transmitted to the exterior of the magnetic sensor device 200 except by thermal radiation. Moreover, even though heat is transmitted to the case 2 by thermal radiation, due to formation of the case 2 from resin, heat radiation efficiency is low.
  • Thus transmission of the heat generated by the magnetoresistance effect element 4 and the signal amplification IC 5 to the exterior air tends to be difficult, and the temperature of the magnetic sensor device 200 tends to be high. When the temperature of the magnet 9 becomes high, the magnetism field applied to the object to be detected becomes weak, and performance of the magnetic sensor device 200 declines due to demagnetization.
  • In contrast, the heat dissipator 11 is arranged in close contact with the magnetic circuit 30 in the magnetic sensor device 100 of the present Embodiment 1, and thus rise of temperature of the magnetic sensor device 100 is suppressed, the demagnetization of the magnet 9 due to heat can be suppressed, and stable output is obtained without lowering of sensitivity.
  • Further, the case 2 of the magnetic sensor device 100 is formed from resin. However, this configuration is not limiting. The case 2 may be formed from a material that has a high heat transfer coefficient, such as a metal and the like. Such configuration enables radiation of heat through the case 2 to the exterior air, thereby enabling further increase of heat dissipation efficiency.
  • Embodiment 2
  • In Embodiment 1 of the present disclosure, the magnetic sensor device is described in which the heat dissipator 11 closely contacts the surface of the magnetic circuit 30 of the side opposite to the surface of the conveyance path side. In Embodiment 2, a magnetic sensor device is described in which the heat dissipator 11 closely contacts a surface of the magnetic circuit 30 other than surface of the side opposite to the surface of the conveyance path side.
  • FIG. 12 is used for description of the configuration of the magnetic sensor device of Embodiment 2 of the present disclosure. FIG. 12 is a cross-sectional drawing of a magnetic sensor device 100A. In FIG. 12, constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • As illustrated in FIG. 12, the heat dissipator 11 of the magnetic sensor device 100A is exposed to the exterior. Further, in order to determine the position of the heat dissipator 11, the hole 2 e is formed in the case 2 of the magnetic sensor device 100A. The opening of the hole 2 e is formed in a −Y direction side surface of the case 2. X-Z direction positions of the heat dissipator 11 are determined by fitting the heat dissipator 11 into the case 2 from the hole 2 e opening. Further, position of the heat dissipator 11 in the Y-axis direction is determined by attachment of the heat dissipator 11 to the −Y side surface of the yoke 10 and the magnet 9 constituting the magnetic circuit 30.
  • That is to say, the heat dissipator 11 closely contacts the Y-direction side surface of the magnetic circuit 30, which is the surface of the magnetic circuit 30 other than the conveyance path-side surface of the magnetic circuit 30.
  • As described above, in the present Embodiment 2, the heat generated by the magnetoresistance effect element 4 and the signal amplification IC 5 is transmitted, in order, to the metallic carrier 7 and the magnet 9, and is radiated to the exterior from the magnet 9 through the heat dissipator 11. Due to radiation of the heat to the exterior without traversing the yoke 10, thermal resistance up until radiation to the exterior can be made small, and the efficiency of thermal radiation can be improved. Moreover, in contrast to the magnetic sensor device 100 of the present Embodiment 1, the heat dissipator 11 is exposed to the exterior, and thus the release of heat to the exterior is not impeded by the signal processing board 13. Thus the present Embodiment 2 enables further improvement of the heat dissipation efficiency.
  • In the magnetic sensor is described in Embodiment 2, the heat dissipator 11 is in close contact with the Y-direction side surface of the magnetic circuit 30. A configuration may be used in which the heat dissipator 11 is in close contact with both the Y-direction side surface of the magnetic circuit 30 and the surface of the magnetic circuit 30 of the side opposite to the surface of the conveyance direction side.
  • Embodiment 3
  • Configuration of a magnetic sensor device of Embodiment 3 of the present disclosure is described next using FIGS. 13A, 13B and 14. FIG. 13A is a perspective view of a cross-sectioned portion of the case 2 of the magnetic sensor device. The FIG. 13B is a cross-sectional drawing of the case 2 of the magnetic sensor device. FIG. 14 is a cross-sectional drawing of the magnetic sensor device. In FIGS. 13A, 13B and 14, constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • As illustrated in FIGS. 13A, 13B and 14, the heat dissipator 11 of the magnetic sensor device 100B is insert-molded in the case 2. The heat dissipator 11 has a plurality of fins 11 b projecting toward the side (−Z side) opposite to the conveyance path side. The plurality of fins 11 b, for example, is arranged in the Y direction. The heat dissipator 11 is held by the case 2 by embedding of both end portions of the +Y side and −Y side of the heat dissipator 11 in the case 2.
  • As described above, the heat dissipator 11 in the present Embodiment 3 is insert-molded in the case 2. Thus the number of components of the magnetic sensor device 100B decreases. Further, the operation of attaching the heat dissipator 11 to the yoke 10 during the final assembly step becomes unnecessary.
  • Moreover, due to formation of the heat dissipator 11 from a metal, which generally has a high heat transfer coefficient, toughness of the case 2 can be increased by insert-molding of the heat dissipator 11 in the case 2. Further, in Embodiment 3, the heat dissipator 11 is insert-molded in the case 2. However, this configuration is not limiting. The heat dissipator 11 may be integrally formed with the case 2 by a method other than insert-molding.
  • Embodiment 4
  • Configuration of a magnetic sensor device of Embodiment 4 of the present disclosure is described next using FIGS. 15 and 16. FIG. 15 is a perspective view of the magnetic sensor device of Embodiment 4 with the board mounting surface of the case oriented upward. FIG. 16 is a cross-sectional drawing of the magnetic sensor device of Embodiment 4. In FIGS. 15 and 16, constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • In the surface of the −Z side of the case 2 of the magnetic sensor device 100C illustrated in FIG. 15, in addition to the board mounting surface 2 f, an offset surface 2 h is formed that is offset in the +Z direction from the board mounting surface 2 f. As illustrated in FIG. 16, space in the vicinity of the heat dissipator 11 communicates with the exterior due to formation of the offset surface 2 h. This has the effect of enabling improvement of heat radiation efficiency.
  • Embodiment 5
  • Configuration of a magnetic sensor device of Embodiment 5 of the present disclosure is described next using FIGS. 17 and 18. FIG. 17 is a perspective view of the heat dissipator of the magnetic sensor device of Embodiment 5. FIG. 18 is a cross-sectional drawing of the magnetic sensor device of Embodiment 5. In FIGS. 17 and 18, constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • As illustrated in FIGS. 17 and 18, in the present Embodiment 5, the heat dissipator 11 of the magnetic sensor device 100D has a plate-shaped base 11 c having fins 11 b formed on the surface of the −Z side, and a pair of projections 11 a (sidewalls) for determining the Y-direction positions of the magnet 9 and the yoke 10. The projections 11 a are arranged projecting in the +Z direction from both Y-direction end portions of the base 11 c of the heat dissipator 11.
  • As described above, in the present Embodiment 5, the heat dissipator 11 has the projections 11 a. Thus the jig, which is necessary in the permanent magnet assembly step of the magnetic sensor device 100 of Embodiment 1 for fixing the magnet 9 and the yoke 10, can become unnecessary. Further, insertion of the magnet 9 and the yoke 10 between the projections 11 a enables omission of the step in which the heat dissipator 11 is attached to the magnet 9 and the yoke 10. Moreover, contact surface area between the magnet 9 and the heat dissipator 11 increases due to contact of the +Y side and −Y side surfaces of the magnet 9 with the projections 11 a. Heat radiation efficiency can be increased by this configuration.
  • Embodiment 6
  • Configuration of a magnetic sensor device of Embodiment 6 of the present disclosure is described next using FIGS. 19 and 20. FIG. 19 is a perspective view of the heat dissipator of the magnetic sensor device of Embodiment 6. FIG. 20 is a cross-sectional drawing of the magnetic sensor device of Embodiment 6. In FIGS. 19 and 20, constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • In Embodiment 6, the heat dissipator 11 is formed as a C-shaped channel that has: a plate-shaped base 11 c for formation of fins 11 b on the −Z side surface, and two of the fins 11 b formed extending from the +Y side and −Y side end portions of the base 11 c.
  • As described above, the heat dissipator 11 of the present Embodiment 6 has two fins 11 b. Thus the shape of the heat dissipator 11 can be simplified, and fabrication cost of the heat dissipator 11 can be decreased.
  • The heat dissipator 11 of the magnetic sensor device 100 illustrated in Embodiment 1 generally is molded by extrusion molding due to the large number of fins 11 b. In contrast, the present Embodiment 6 enables production by bending of sheet material and enables selection of a suitable production method. Moreover, setting the dimensions of the C-shaped channel to those of a standard product enables decrease of the fabrication cost.
  • Embodiment 7
  • Configuration of a magnetic sensor device of Embodiment 7 of the present disclosure is described next using FIG. 21. FIG. 21 is a cross-sectional drawing of the magnetic sensor device of Embodiment 7. The magnetic sensor device 100F enables detection only in the case in which the object to be detected 20 is magnetic. In FIG. 21, constituent elements that are the same or equivalent to those of FIG. 1 are assigned the same reference signs.
  • As illustrated in FIG. 21, in contrast to the metallic carrier 7 of the magnetic sensor device 100 of the present Embodiment 1, the metallic carrier 7 of the magnetic sensor device 100F is configured from a single sheet of non-magnetic plate. The magnetic carrier 7 a has a role of arranging the direction of the magnetic field of the magnet 9 in the Z direction. However, in the case in which the object to be detected 20 is magnetized, the magnetic carrier 7 a may be omitted from the metallic carrier 7. Heat dissipation efficiency can be improved due to the metallic carrier 7 in Embodiment 7 of the present disclosure not having the magnetic carrier 7 a.
  • For example, in Embodiment 1 of the present disclosure and Embodiment 7 of the present disclosure, the magnetic carrier 7 a is formed from iron (general heat transfer coefficient is 84 W/m·K), and the non-magnetic carrier 7 b is formed from copper (general heat transfer coefficient is 398 W/m·K). Thus in Embodiment 7 of the present disclosure, heat dissipation efficiency can be increased due to formation of the metallic carrier 7 from only the non-magnetic carrier 7 b, which has a high heat transfer coefficient.
  • The foregoing describes some example embodiments for explanatory purposes. Although the foregoing discussion has presented specific embodiments, persons skilled in the art will recognize that changes may be made in form and detail without departing from the broader spirit and scope of the invention. Accordingly, the specification and drawings are to be regarded in an illustrative rather than a restrictive sense. This detailed description, therefore, is not to be taken in a limiting sense, and the scope of the invention is defined only by the included claims, along with the full range of equivalents to which such claims are entitled.
  • This application claims the benefit of Japanese Patent Application No. 2014-125159 including the specification, the claims, the figures and the abstract, filed on Jun. 18, 2014. The entire specification, claims, and drawings of Japanese Patent Application No. 2014-125159 are incorporated by reference herein.
  • REFERENCE SIGNS LIST
      • 1 Cover
      • 1 a Taper
      • 1 b Conveyance surface
      • 2 Case (housing)
      • 2 a Step
      • 2 b, 2 c, 2 e Hole
      • 2 f Board mounting surface
      • 2 g Board mounting hole
      • 2 h Offset surface
      • 3 Sensor board
      • 3 a Non-conductive member
      • 3 b Conductive member
      • 3 c Cable
      • 3 d Positioning hole
      • 3 e, 3 f Opening
      • 4 Magnetoresistance effect element
      • 5 Signal amplification IC (signal processor)
      • 6 Wire
      • 7 Metallic carrier
      • 7 a Magnetic carrier (magnetic body)
      • 7 b Non-magnetic carrier (non-magnetic body)
      • 7 c Positioning hole
      • 7 d Opening
      • 8 Fastener
      • 9 Magnet
      • 10 Yoke
      • 11 Heat dissipator
      • 11 a Projection (sidewall)
      • 11 b Fin
      • 13 Signal processing board
      • 13 a Board mounting hole
      • 20 Object to be detected
      • 21 Conveyance direction
      • 30 Magnetic circuit
      • 100, 100A, 100B, 100C, 100D, 100E, 100F, 200 Magnetic sensor device

Claims (16)

1: A magnetic sensor device comprising:
a magnetic circuit forming a magnetic field;
a magnetoresistance effect element, mounted on a surface of a conveyance path side of an object to be detected of the magnetic circuit, and configured to output a change of the magnetic field as a change of a resistance value; and
a heat dissipator disposed in close contact with a surface of the magnetic circuit other than the surface of the conveyance path side of the magnetic circuit; wherein
the magnetic circuit comprises:
a magnet, a metallic carrier, having one surface in close contact with the surface of the conveyance path side of the magnet, and carrying the magnetoresistance effect element on another surface, and a yoke having one surface closely contacting a surface of the magnet of a side opposite to the conveyance path side, and having another surface closely contacting the heat dissipator, and
the heat dissipator is disposed in close contact with the surface of the magnetic circuit of a side opposite to the conveyance path side of the magnetic circuit, and comprises a pair of sidewalls, extending in a direction parallel to the surface of the conveyance path side of the heat dissipator, and extending in a direction perpendicular to a conveyance direction of the object to be detected, and the yoke and the magnet are disposed between the pair of sidewalls.
2-3. (canceled)
4: A magnetic sensor device comprising:
a magnetic circuit forming a magnetic field;
a magnetoresistance effect element, mounted on a surface of a conveyance path side of an object to be detected of the magnetic circuit, and configured to output a change of the magnetic field as a change of a resistance value; and
a heat dissipator disposed in close contact with a surface of the magnetic circuit other than the surface of the conveyance path side of the magnetic circuit; wherein
the heat dissipator is disposed in close contact with the surface of the magnetic circuit of a side opposite to the conveyance path side of the magnetic circuit,
the magnetic circuit comprises, a magnet, a metallic carrier, having one surface in close contact with the surface of the conveyance path side of the magnet, and carrying the magnetoresistance effect element on another surface, and a yoke having one surface closely contacting a surface of the magnet opposite to the conveyance path side, and having another surface closely contacting the heat dissipator,
the metallic carrier comprises:
a magnetic body upon which is disposed the magnetoresistance effect element; and
a non-magnetic body bonded to the magnetic body and to carry a signal processor electrically connected to the magnetoresistance effect element.
5-6. (canceled)
7: The magnetic sensor device according to claim 4, wherein
the heat dissipator comprises:
a base that is plate-like; and
a pair of fins extending from both conveyance-direction ends of the base.
8: The magnetic sensor device according to claim 1, wherein the magnetic sensor device further comprises a housing in which a hole is formed that penetrates in a direction orthogonal to the surface of the conveyance path side of the housing and orthogonal to the conveyance direction; and
the hole contains the magnetic circuit, the magnetoresistance effect element, and the heat dissipator.
9: The magnetic sensor device according to claim 8, wherein
in a surface of the housing opposite to the conveyance path side are formed:
a board mounting surface for mounting of a board; and
an offset surface offset from the board mounting surface toward the conveyance path side.
10: The magnetic sensor device according to claim 8, wherein
the heat dissipator contacts an inner circumferential surface of the hole.
11: The magnetic sensor device according to claim 8, wherein
the heat dissipator is insert-molded in the housing.
12-16. (canceled)
17: The magnetic sensor device according to claim 4, wherein the magnetic sensor device further comprises a housing in which a hole is formed that penetrates in a direction orthogonal to the surface of the conveyance path side of the housing and orthogonal to a conveyance direction; and
the hole contains the magnetic circuit, the magnetoresistance effect element, and the heat dissipator.
18: The magnetic sensor device according to claim 17, wherein
in a surface of the housing opposite to the conveyance path side are formed:
a board mounting surface for mounting of a board; and
an offset surface offset from the board mounting surface toward the conveyance path side.
19: The magnetic sensor device according to claim 17, wherein
the heat dissipator contacts an inner circumferential surface of the hole.
20: The magnetic sensor device according to claim 17, wherein
the heat dissipator is insert-molded in the housing.
21: A magnetic sensor device comprising:
a magnetic circuit forming a magnetic field;
a magnetoresistance effect element, mounted on a surface of a conveyance path side of an object to be detected of the magnetic circuit, and configured to output a change of the magnetic field as a change of a resistance value;
a heat dissipator disposed in close contact with a surface of the magnetic circuit other than the surface of the conveyance path side of the magnetic circuit; and
a housing in which a hole is formed that penetrates in a direction orthogonal to the surface of the conveyance path side of the housing and orthogonal to a conveyance direction,
the hole contains the magnetic circuit, the magnetoresistance effect element, and the heat dissipator, and
the heat dissipator is insert-molded in the housing.
22: A magnetic sensor device comprising:
a magnetic circuit forming a magnetic field;
a magnetoresistance effect element, mounted on a surface of a conveyance path side of an object to be detected of the magnetic circuit, and configured to output a change of the magnetic field as a change of a resistance value;
a heat dissipator disposed in close contact with a surface of the magnetic circuit other than the surface of the conveyance path side of the magnetic circuit; and
a housing in which a hole is formed that penetrates in a direction orthogonal to the surface of the conveyance path side of the housing and orthogonal to a conveyance direction, wherein
the hole contains the magnetic circuit, the magnetoresistance effect element, and the heat dissipator, and
in a surface of the housing opposite to the conveyance path side are formed:
a board mounting surface for mounting of a board; and
an offset surface offset from the board mounting surface toward the conveyance path side.
US15/314,827 2014-06-18 2015-06-17 Magnetic sensor device and method for producing same Abandoned US20170153125A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014125159 2014-06-18
JP2014-125159 2014-06-18
PCT/JP2015/067520 WO2015194605A1 (en) 2014-06-18 2015-06-17 Magnetic sensor device and method for producing same

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2015/067520 A-371-Of-International WO2015194605A1 (en) 2014-06-18 2015-06-17 Magnetic sensor device and method for producing same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US16/156,939 Continuation US10620015B2 (en) 2014-06-18 2018-10-10 Magnetic sensor device with heat dissipater

Publications (1)

Publication Number Publication Date
US20170153125A1 true US20170153125A1 (en) 2017-06-01

Family

ID=54935585

Family Applications (2)

Application Number Title Priority Date Filing Date
US15/314,827 Abandoned US20170153125A1 (en) 2014-06-18 2015-06-17 Magnetic sensor device and method for producing same
US16/156,939 Active US10620015B2 (en) 2014-06-18 2018-10-10 Magnetic sensor device with heat dissipater

Family Applications After (1)

Application Number Title Priority Date Filing Date
US16/156,939 Active US10620015B2 (en) 2014-06-18 2018-10-10 Magnetic sensor device with heat dissipater

Country Status (5)

Country Link
US (2) US20170153125A1 (en)
JP (1) JP6049948B2 (en)
CN (1) CN106461742B (en)
DE (1) DE112015002893B4 (en)
WO (1) WO2015194605A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190360838A1 (en) * 2016-11-25 2019-11-28 Mitsubishi Electric Corporation Magnetic sensor device

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6574710B2 (en) * 2016-01-15 2019-09-11 株式会社ヴィーネックス Magnetic sensor device
DE112018003717T5 (en) * 2017-07-19 2020-04-02 Mitsubishi Electric Corporation MAGNETIC SENSOR DEVICE
JP6699635B2 (en) * 2017-08-18 2020-05-27 Tdk株式会社 Magnetic sensor
CN107993332A (en) * 2017-12-07 2018-05-04 威海华菱光电股份有限公司 Magnetic image sensor
JP2019204927A (en) * 2018-05-25 2019-11-28 日本ゼオン株式会社 Thermoelectric conversion module and power generation system

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4518919A (en) * 1981-01-16 1985-05-21 Tokyo Shibaura Denki Kabushiki Kaisha Detecting device for detecting a magnetic strip embedded in a sheet
US5315245A (en) * 1992-02-27 1994-05-24 General Motors Corporation Sensor assembly having embedded wires within a powder metal core and a method therefor
JP2000039472A (en) * 1998-07-23 2000-02-08 Murata Mfg Co Ltd Magnetic sensor and method for regulating characteristics of magnetic sensor
US20060279280A1 (en) * 2004-02-27 2006-12-14 Murata Manufacturing Co., Ltd. Long magnetic sensor
US20130073238A1 (en) * 2011-09-19 2013-03-21 Denso Corporation Current sensor and attachment structure of the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS587891A (en) * 1981-07-07 1983-01-17 Denki Onkyo Co Ltd magnetic sensor device
JP3603360B2 (en) 1995-01-26 2004-12-22 株式会社村田製作所 Method of manufacturing magnetic sensor and magnetic sensor
JP3749649B2 (en) * 1999-04-16 2006-03-01 日本電産サンキョー株式会社 Magnetoresistive element
US7009812B2 (en) * 2003-09-29 2006-03-07 Hitachi Global Storage Technologies Netherlands B.V. Magnetic transducer for perpendicular magnetic recording with single pole write head with trailing shield
US8253210B2 (en) * 2009-04-30 2012-08-28 Infineon Technologies Ag Semiconductor device including a magnetic sensor chip
US10107875B2 (en) * 2009-11-30 2018-10-23 Infineon Technologies Ag GMR sensor within molded magnetic material employing non-magnetic spacer
JP5867235B2 (en) 2011-05-16 2016-02-24 三菱電機株式会社 Magnetic sensor device
US9880232B2 (en) * 2012-03-14 2018-01-30 Seagate Technology Llc Magnetic sensor manufacturing
DE102013016433A1 (en) 2012-10-04 2014-06-26 Dmg Mori Seiki Co., Ltd. Position detection device
JP5928822B2 (en) 2012-12-27 2016-06-01 トヨタ紡織株式会社 Exhaust structure for vehicles
EP2955535B1 (en) * 2013-02-07 2018-08-08 Mitsubishi Electric Corporation Magnetic sensor device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4518919A (en) * 1981-01-16 1985-05-21 Tokyo Shibaura Denki Kabushiki Kaisha Detecting device for detecting a magnetic strip embedded in a sheet
US5315245A (en) * 1992-02-27 1994-05-24 General Motors Corporation Sensor assembly having embedded wires within a powder metal core and a method therefor
JP2000039472A (en) * 1998-07-23 2000-02-08 Murata Mfg Co Ltd Magnetic sensor and method for regulating characteristics of magnetic sensor
US20060279280A1 (en) * 2004-02-27 2006-12-14 Murata Manufacturing Co., Ltd. Long magnetic sensor
US20130073238A1 (en) * 2011-09-19 2013-03-21 Denso Corporation Current sensor and attachment structure of the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20190360838A1 (en) * 2016-11-25 2019-11-28 Mitsubishi Electric Corporation Magnetic sensor device
US10663320B2 (en) 2016-11-25 2020-05-26 Mitsubishi Electric Corporation Magnetic sensor device

Also Published As

Publication number Publication date
US20190086237A1 (en) 2019-03-21
DE112015002893B4 (en) 2024-04-25
DE112015002893T5 (en) 2017-03-09
JP6049948B2 (en) 2016-12-21
US10620015B2 (en) 2020-04-14
JPWO2015194605A1 (en) 2017-04-20
CN106461742A (en) 2017-02-22
CN106461742B (en) 2019-05-28
WO2015194605A1 (en) 2015-12-23

Similar Documents

Publication Publication Date Title
US10620015B2 (en) Magnetic sensor device with heat dissipater
US10969410B2 (en) Current sensor device
US9244135B2 (en) Magnetic sensor device
EP2955535B1 (en) Magnetic sensor device
EP3376244B1 (en) Magnetic sensor
US8947083B2 (en) Current detecting apparatus
CN109073716B (en) Magnetic sensor device
CN106910730A (en) Manufacturing method of current sensor and current sensor
US20130076341A1 (en) High current sensors
JP5074461B2 (en) Core grounding member and current sensor
US10607925B2 (en) Integrated circuit package having a raised lead edge
US20170199253A1 (en) Magnetic sensor device and method of manufacture thereof
US10162018B2 (en) Magnetic sensor device
JP6494895B1 (en) Magnetic sensor device
CN109983355A (en) Magnet sensor arrangement
CN103369929A (en) Power supply module
JP2014106012A (en) Magnetic sensor apparatus
JP2015125042A (en) Current detector
JP2018054588A (en) Current sensor
JP2007292692A (en) Magnetic device
JP2015165207A (en) temperature sensor
JPH0937520A (en) Heat radiation structure of ic

Legal Events

Date Code Title Description
AS Assignment

Owner name: MITSUBISHI ELECTRIC CORPORATION, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:MATSUI, HIDEKI;KUNIEDA, TATSUYA;OGOMI, TOMOKAZU;AND OTHERS;REEL/FRAME:040455/0273

Effective date: 20161019

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION