US20130180767A1 - Method of production of multilayer circuit board - Google Patents
Method of production of multilayer circuit board Download PDFInfo
- Publication number
- US20130180767A1 US20130180767A1 US13/876,495 US201113876495A US2013180767A1 US 20130180767 A1 US20130180767 A1 US 20130180767A1 US 201113876495 A US201113876495 A US 201113876495A US 2013180767 A1 US2013180767 A1 US 2013180767A1
- Authority
- US
- United States
- Prior art keywords
- curing agent
- resin
- board
- resin layer
- circuit board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 64
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 229920005989 resin Polymers 0.000 claims abstract description 199
- 239000011347 resin Substances 0.000 claims abstract description 199
- 239000000203 mixture Substances 0.000 claims abstract description 54
- 238000010438 heat treatment Methods 0.000 claims abstract description 36
- 239000003795 chemical substances by application Substances 0.000 claims description 124
- 229920000642 polymer Polymers 0.000 claims description 64
- -1 polyol compound Chemical class 0.000 claims description 62
- 125000002723 alicyclic group Chemical group 0.000 claims description 32
- 150000001875 compounds Chemical class 0.000 claims description 27
- 229920000098 polyolefin Polymers 0.000 claims description 26
- 125000003118 aryl group Chemical group 0.000 claims description 17
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 claims description 17
- 239000004593 Epoxy Substances 0.000 claims description 14
- 239000007864 aqueous solution Substances 0.000 claims description 11
- 238000007598 dipping method Methods 0.000 claims description 9
- 229920000768 polyamine Polymers 0.000 claims description 9
- 239000003822 epoxy resin Substances 0.000 claims description 8
- 229920000647 polyepoxide Polymers 0.000 claims description 8
- 125000001931 aliphatic group Chemical group 0.000 claims description 7
- 229920000570 polyether Polymers 0.000 claims description 6
- 239000004642 Polyimide Substances 0.000 claims description 5
- 239000004643 cyanate ester Substances 0.000 claims description 5
- 229920001721 polyimide Polymers 0.000 claims description 5
- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical compound C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 claims description 4
- 239000004925 Acrylic resin Substances 0.000 claims description 4
- 229920000178 Acrylic resin Polymers 0.000 claims description 4
- 239000004641 Diallyl-phthalate Substances 0.000 claims description 4
- 229920000106 Liquid crystal polymer Polymers 0.000 claims description 4
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 claims description 4
- PEEHTFAAVSWFBL-UHFFFAOYSA-N Maleimide Chemical compound O=C1NC(=O)C=C1 PEEHTFAAVSWFBL-UHFFFAOYSA-N 0.000 claims description 4
- 239000004952 Polyamide Substances 0.000 claims description 4
- 150000001412 amines Chemical class 0.000 claims description 4
- 150000004982 aromatic amines Chemical class 0.000 claims description 4
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical compound C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 claims description 4
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 claims description 4
- 150000001990 dicarboxylic acid derivatives Chemical class 0.000 claims description 4
- 229920002647 polyamide Polymers 0.000 claims description 4
- 229920005862 polyol Polymers 0.000 claims description 4
- 229920001021 polysulfide Polymers 0.000 claims description 3
- 239000005077 polysulfide Substances 0.000 claims description 3
- 150000008117 polysulfides Polymers 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 192
- 238000001723 curing Methods 0.000 description 129
- 239000000178 monomer Substances 0.000 description 47
- 239000000243 solution Substances 0.000 description 44
- 239000010408 film Substances 0.000 description 31
- RDOXTESZEPMUJZ-UHFFFAOYSA-N anisole Chemical compound COC1=CC=CC=C1 RDOXTESZEPMUJZ-UHFFFAOYSA-N 0.000 description 26
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 20
- JRZJOMJEPLMPRA-UHFFFAOYSA-N olefin Natural products CCCCCCCC=C JRZJOMJEPLMPRA-UHFFFAOYSA-N 0.000 description 17
- 239000003960 organic solvent Substances 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 15
- 239000002184 metal Substances 0.000 description 15
- 238000006116 polymerization reaction Methods 0.000 description 15
- 238000007142 ring opening reaction Methods 0.000 description 15
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 14
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Substances CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 14
- 238000005984 hydrogenation reaction Methods 0.000 description 13
- UZKWTJUDCOPSNM-UHFFFAOYSA-N methoxybenzene Substances CCCCOC=C UZKWTJUDCOPSNM-UHFFFAOYSA-N 0.000 description 13
- 239000002966 varnish Substances 0.000 description 12
- LIKMAJRDDDTEIG-UHFFFAOYSA-N 1-hexene Chemical compound CCCCC=C LIKMAJRDDDTEIG-UHFFFAOYSA-N 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 10
- 239000000835 fiber Substances 0.000 description 10
- 239000004615 ingredient Substances 0.000 description 10
- 239000002904 solvent Substances 0.000 description 10
- 239000010409 thin film Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 9
- 229920002554 vinyl polymer Polymers 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- 238000007747 plating Methods 0.000 description 8
- 238000003825 pressing Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 8
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical compound NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 7
- 150000001244 carboxylic acid anhydrides Chemical group 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 238000007334 copolymerization reaction Methods 0.000 description 6
- NIHNNTQXNPWCJQ-UHFFFAOYSA-N fluorene Chemical compound C1=CC=C2CC3=CC=CC=C3C2=C1 NIHNNTQXNPWCJQ-UHFFFAOYSA-N 0.000 description 6
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 5
- 238000005266 casting Methods 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000004090 dissolution Methods 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 238000004817 gas chromatography Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- VXNZUUAINFGPBY-UHFFFAOYSA-N 1-Butene Chemical compound CCC=C VXNZUUAINFGPBY-UHFFFAOYSA-N 0.000 description 4
- KWKAKUADMBZCLK-UHFFFAOYSA-N 1-octene Chemical compound CCCCCCC=C KWKAKUADMBZCLK-UHFFFAOYSA-N 0.000 description 4
- 239000004215 Carbon black (E152) Substances 0.000 description 4
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 4
- 239000012964 benzotriazole Substances 0.000 description 4
- 239000011889 copper foil Substances 0.000 description 4
- 239000011888 foil Substances 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000005227 gel permeation chromatography Methods 0.000 description 4
- 229930195733 hydrocarbon Natural products 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- YWAKXRMUMFPDSH-UHFFFAOYSA-N pentene Chemical compound CCCC=C YWAKXRMUMFPDSH-UHFFFAOYSA-N 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- XBTRYWRVOBZSGM-UHFFFAOYSA-N (4-methylphenyl)methanediamine Chemical compound CC1=CC=C(C(N)N)C=C1 XBTRYWRVOBZSGM-UHFFFAOYSA-N 0.000 description 3
- XZKLXPPYISZJCV-UHFFFAOYSA-N 1-benzyl-2-phenylimidazole Chemical class C1=CN=C(C=2C=CC=CC=2)N1CC1=CC=CC=C1 XZKLXPPYISZJCV-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 3
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 230000003712 anti-aging effect Effects 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 150000001993 dienes Chemical class 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 229920001971 elastomer Polymers 0.000 description 3
- 238000007772 electroless plating Methods 0.000 description 3
- 125000004185 ester group Chemical group 0.000 description 3
- 150000002430 hydrocarbons Chemical class 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 150000002460 imidazoles Chemical class 0.000 description 3
- RGSFGYAAUTVSQA-UHFFFAOYSA-N pentamethylene Natural products C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 3
- 125000003367 polycyclic group Chemical group 0.000 description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 description 3
- 239000005020 polyethylene terephthalate Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 229910052707 ruthenium Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- 150000003512 tertiary amines Chemical class 0.000 description 3
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 3
- OJOWICOBYCXEKR-KRXBUXKQSA-N (5e)-5-ethylidenebicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(=C/C)/CC1C=C2 OJOWICOBYCXEKR-KRXBUXKQSA-N 0.000 description 2
- FYGHSUNMUKGBRK-UHFFFAOYSA-N 1,2,3-trimethylbenzene Chemical compound CC1=CC=CC(C)=C1C FYGHSUNMUKGBRK-UHFFFAOYSA-N 0.000 description 2
- MYRTYDVEIRVNKP-UHFFFAOYSA-N 1,2-Divinylbenzene Chemical compound C=CC1=CC=CC=C1C=C MYRTYDVEIRVNKP-UHFFFAOYSA-N 0.000 description 2
- XWJBRBSPAODJER-UHFFFAOYSA-N 1,7-octadiene Chemical compound C=CCCCCC=C XWJBRBSPAODJER-UHFFFAOYSA-N 0.000 description 2
- AFFLGGQVNFXPEV-UHFFFAOYSA-N 1-decene Chemical compound CCCCCCCCC=C AFFLGGQVNFXPEV-UHFFFAOYSA-N 0.000 description 2
- CRSBERNSMYQZNG-UHFFFAOYSA-N 1-dodecene Chemical compound CCCCCCCCCCC=C CRSBERNSMYQZNG-UHFFFAOYSA-N 0.000 description 2
- GQEZCXVZFLOKMC-UHFFFAOYSA-N 1-hexadecene Chemical compound CCCCCCCCCCCCCCC=C GQEZCXVZFLOKMC-UHFFFAOYSA-N 0.000 description 2
- HFDVRLIODXPAHB-UHFFFAOYSA-N 1-tetradecene Chemical compound CCCCCCCCCCCCC=C HFDVRLIODXPAHB-UHFFFAOYSA-N 0.000 description 2
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 2
- 238000005160 1H NMR spectroscopy Methods 0.000 description 2
- SDJHPPZKZZWAKF-UHFFFAOYSA-N 2,3-dimethylbuta-1,3-diene Chemical compound CC(=C)C(C)=C SDJHPPZKZZWAKF-UHFFFAOYSA-N 0.000 description 2
- LLPKQRMDOFYSGZ-UHFFFAOYSA-N 2,5-dimethyl-1h-imidazole Chemical compound CC1=CN=C(C)N1 LLPKQRMDOFYSGZ-UHFFFAOYSA-N 0.000 description 2
- QKVROWZQJVDFSO-UHFFFAOYSA-N 2-(2-methylimidazol-1-yl)ethanamine Chemical class CC1=NC=CN1CCN QKVROWZQJVDFSO-UHFFFAOYSA-N 0.000 description 2
- WSSSPWUEQFSQQG-UHFFFAOYSA-N 4-methyl-1-pentene Chemical compound CC(C)CC=C WSSSPWUEQFSQQG-UHFFFAOYSA-N 0.000 description 2
- KNDQHSIWLOJIGP-UHFFFAOYSA-N 826-62-0 Chemical compound C1C2C3C(=O)OC(=O)C3C1C=C2 KNDQHSIWLOJIGP-UHFFFAOYSA-N 0.000 description 2
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 description 2
- RRHGJUQNOFWUDK-UHFFFAOYSA-N Isoprene Chemical compound CC(=C)C=C RRHGJUQNOFWUDK-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- 239000007983 Tris buffer Substances 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 238000012644 addition polymerization Methods 0.000 description 2
- XXROGKLTLUQVRX-UHFFFAOYSA-N allyl alcohol Chemical compound OCC=C XXROGKLTLUQVRX-UHFFFAOYSA-N 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 2
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 150000001924 cycloalkanes Chemical group 0.000 description 2
- MGNZXYYWBUKAII-UHFFFAOYSA-N cyclohexa-1,3-diene Chemical compound C1CC=CC=C1 MGNZXYYWBUKAII-UHFFFAOYSA-N 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- HGCIXCUEYOPUTN-UHFFFAOYSA-N cyclohexene Chemical compound C1CCC=CC1 HGCIXCUEYOPUTN-UHFFFAOYSA-N 0.000 description 2
- ZSWFCLXCOIISFI-UHFFFAOYSA-N cyclopentadiene Chemical compound C1C=CC=C1 ZSWFCLXCOIISFI-UHFFFAOYSA-N 0.000 description 2
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 description 2
- LPIQUOYDBNQMRZ-UHFFFAOYSA-N cyclopentene Chemical compound C1CC=CC1 LPIQUOYDBNQMRZ-UHFFFAOYSA-N 0.000 description 2
- GYZLOYUZLJXAJU-UHFFFAOYSA-N diglycidyl ether Chemical compound C1OC1COCC1CO1 GYZLOYUZLJXAJU-UHFFFAOYSA-N 0.000 description 2
- 125000003700 epoxy group Chemical group 0.000 description 2
- FJKIXWOMBXYWOQ-UHFFFAOYSA-N ethenoxyethane Chemical compound CCOC=C FJKIXWOMBXYWOQ-UHFFFAOYSA-N 0.000 description 2
- 239000003365 glass fiber Substances 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000013007 heat curing Methods 0.000 description 2
- NAQMVNRVTILPCV-UHFFFAOYSA-N hexane-1,6-diamine Chemical compound NCCCCCCN NAQMVNRVTILPCV-UHFFFAOYSA-N 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- TVMXDCGIABBOFY-UHFFFAOYSA-N n-Octanol Natural products CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 2
- VAMFXQBUQXONLZ-UHFFFAOYSA-N n-alpha-eicosene Natural products CCCCCCCCCCCCCCCCCCC=C VAMFXQBUQXONLZ-UHFFFAOYSA-N 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- CCCMONHAUSKTEQ-UHFFFAOYSA-N octadec-1-ene Chemical compound CCCCCCCCCCCCCCCCC=C CCCMONHAUSKTEQ-UHFFFAOYSA-N 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- ZQBAKBUEJOMQEX-UHFFFAOYSA-N phenyl salicylate Chemical compound OC1=CC=CC=C1C(=O)OC1=CC=CC=C1 ZQBAKBUEJOMQEX-UHFFFAOYSA-N 0.000 description 2
- 229920006290 polyethylene naphthalate film Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 150000003254 radicals Chemical class 0.000 description 2
- 238000007151 ring opening polymerisation reaction Methods 0.000 description 2
- 239000005060 rubber Substances 0.000 description 2
- YGSDEFSMJLZEOE-UHFFFAOYSA-N salicylic acid Chemical compound OC(=O)C1=CC=CC=C1O YGSDEFSMJLZEOE-UHFFFAOYSA-N 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000003381 stabilizer Substances 0.000 description 2
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 2
- 239000004711 α-olefin Substances 0.000 description 2
- KJYSXRBJOSZLEL-UHFFFAOYSA-N (2,4-ditert-butylphenyl) 3,5-ditert-butyl-4-hydroxybenzoate Chemical compound CC(C)(C)C1=CC(C(C)(C)C)=CC=C1OC(=O)C1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 KJYSXRBJOSZLEL-UHFFFAOYSA-N 0.000 description 1
- AHAREKHAZNPPMI-AATRIKPKSA-N (3e)-hexa-1,3-diene Chemical compound CC\C=C\C=C AHAREKHAZNPPMI-AATRIKPKSA-N 0.000 description 1
- LCSLWNXVIDKVGD-KQQUZDAGSA-N (3e,7e)-deca-3,7-diene Chemical compound CC\C=C\CC\C=C\CC LCSLWNXVIDKVGD-KQQUZDAGSA-N 0.000 description 1
- ARVUDIQYNJVQIW-UHFFFAOYSA-N (4-dodecoxy-2-hydroxyphenyl)-phenylmethanone Chemical compound OC1=CC(OCCCCCCCCCCCC)=CC=C1C(=O)C1=CC=CC=C1 ARVUDIQYNJVQIW-UHFFFAOYSA-N 0.000 description 1
- JBVMSEMQJGGOFR-FNORWQNLSA-N (4e)-4-methylhexa-1,4-diene Chemical compound C\C=C(/C)CC=C JBVMSEMQJGGOFR-FNORWQNLSA-N 0.000 description 1
- PRBHEGAFLDMLAL-GQCTYLIASA-N (4e)-hexa-1,4-diene Chemical compound C\C=C\CC=C PRBHEGAFLDMLAL-GQCTYLIASA-N 0.000 description 1
- PMJHHCWVYXUKFD-SNAWJCMRSA-N (E)-1,3-pentadiene Chemical compound C\C=C\C=C PMJHHCWVYXUKFD-SNAWJCMRSA-N 0.000 description 1
- LLPLOWFYJGZIBV-UHFFFAOYSA-N 1,2,3,4,4a,5,8,8a-octahydro-1,4:5,8-dimethanonaphthalene-2-methanol Chemical compound C1C(C23)C=CC1C3C1CC2CC1CO LLPLOWFYJGZIBV-UHFFFAOYSA-N 0.000 description 1
- FMZITCJWMYHQFG-UHFFFAOYSA-N 1,2,3,4,4a,5,8,8a-octahydro-2-methyl-1,4:5,8-dimethanonaphthalene Chemical compound C1C(C23)C=CC1C3C1CC2CC1C FMZITCJWMYHQFG-UHFFFAOYSA-N 0.000 description 1
- RELMFMZEBKVZJC-UHFFFAOYSA-N 1,2,3-trichlorobenzene Chemical compound ClC1=CC=CC(Cl)=C1Cl RELMFMZEBKVZJC-UHFFFAOYSA-N 0.000 description 1
- RCJMVGJKROQDCB-UHFFFAOYSA-N 1,3-dimethyl-1,3-butadiene Natural products CC=CC(C)=C RCJMVGJKROQDCB-UHFFFAOYSA-N 0.000 description 1
- WZCQRUWWHSTZEM-UHFFFAOYSA-N 1,3-phenylenediamine Chemical compound NC1=CC=CC(N)=C1 WZCQRUWWHSTZEM-UHFFFAOYSA-N 0.000 description 1
- PRBHEGAFLDMLAL-UHFFFAOYSA-N 1,5-Hexadiene Natural products CC=CCC=C PRBHEGAFLDMLAL-UHFFFAOYSA-N 0.000 description 1
- YZFOQJOYMTZTRH-UHFFFAOYSA-N 1-(2-methylbutyl)cyclohexene Chemical compound CCC(C)CC1=CCCCC1 YZFOQJOYMTZTRH-UHFFFAOYSA-N 0.000 description 1
- LHXNVCCLDTYJGT-UHFFFAOYSA-N 1-(oxiran-2-ylmethoxy)propan-2-ol Chemical compound CC(O)COCC1CO1 LHXNVCCLDTYJGT-UHFFFAOYSA-N 0.000 description 1
- OQZDJLFNMXRJHZ-UHFFFAOYSA-N 1-benzyl-2-ethylimidazole Chemical class CCC1=NC=CN1CC1=CC=CC=C1 OQZDJLFNMXRJHZ-UHFFFAOYSA-N 0.000 description 1
- FBHPRUXJQNWTEW-UHFFFAOYSA-N 1-benzyl-2-methylimidazole Chemical class CC1=NC=CN1CC1=CC=CC=C1 FBHPRUXJQNWTEW-UHFFFAOYSA-N 0.000 description 1
- 229940106006 1-eicosene Drugs 0.000 description 1
- FIKTURVKRGQNQD-UHFFFAOYSA-N 1-eicosene Natural products CCCCCCCCCCCCCCCCCC=CC(O)=O FIKTURVKRGQNQD-UHFFFAOYSA-N 0.000 description 1
- OZCMOJQQLBXBKI-UHFFFAOYSA-N 1-ethenoxy-2-methylpropane Chemical compound CC(C)COC=C OZCMOJQQLBXBKI-UHFFFAOYSA-N 0.000 description 1
- SDRZFSPCVYEJTP-UHFFFAOYSA-N 1-ethenylcyclohexene Chemical compound C=CC1=CCCCC1 SDRZFSPCVYEJTP-UHFFFAOYSA-N 0.000 description 1
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical class C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 1
- MEZZCSHVIGVWFI-UHFFFAOYSA-N 2,2'-Dihydroxy-4-methoxybenzophenone Chemical compound OC1=CC(OC)=CC=C1C(=O)C1=CC=CC=C1O MEZZCSHVIGVWFI-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- ZXDDPOHVAMWLBH-UHFFFAOYSA-N 2,4-Dihydroxybenzophenone Chemical compound OC1=CC(O)=CC=C1C(=O)C1=CC=CC=C1 ZXDDPOHVAMWLBH-UHFFFAOYSA-N 0.000 description 1
- DSAYAFZWRDYBQY-UHFFFAOYSA-N 2,5-dimethylhexa-1,5-diene Chemical compound CC(=C)CCC(C)=C DSAYAFZWRDYBQY-UHFFFAOYSA-N 0.000 description 1
- STMDPCBYJCIZOD-UHFFFAOYSA-N 2-(2,4-dinitroanilino)-4-methylpentanoic acid Chemical compound CC(C)CC(C(O)=O)NC1=CC=C([N+]([O-])=O)C=C1[N+]([O-])=O STMDPCBYJCIZOD-UHFFFAOYSA-N 0.000 description 1
- ZMWRRFHBXARRRT-UHFFFAOYSA-N 2-(benzotriazol-2-yl)-4,6-bis(2-methylbutan-2-yl)phenol Chemical compound CCC(C)(C)C1=CC(C(C)(C)CC)=CC(N2N=C3C=CC=CC3=N2)=C1O ZMWRRFHBXARRRT-UHFFFAOYSA-N 0.000 description 1
- WXHVQMGINBSVAY-UHFFFAOYSA-N 2-(benzotriazol-2-yl)-4-tert-butylphenol Chemical compound CC(C)(C)C1=CC=C(O)C(N2N=C3C=CC=CC3=N2)=C1 WXHVQMGINBSVAY-UHFFFAOYSA-N 0.000 description 1
- CUGZWHZWSVUSBE-UHFFFAOYSA-N 2-(oxiran-2-ylmethoxy)ethanol Chemical compound OCCOCC1CO1 CUGZWHZWSVUSBE-UHFFFAOYSA-N 0.000 description 1
- DZRLZBYMIRXJGO-UHFFFAOYSA-N 2-[2-(oxiran-2-ylmethoxy)ethoxy]ethanol Chemical compound OCCOCCOCC1CO1 DZRLZBYMIRXJGO-UHFFFAOYSA-N 0.000 description 1
- ACKPSZGIQNQZLW-UHFFFAOYSA-N 2-[2-[2-(oxiran-2-ylmethoxy)ethoxy]ethoxy]ethanol Chemical compound OCCOCCOCCOCC1CO1 ACKPSZGIQNQZLW-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- SVONRAPFKPVNKG-UHFFFAOYSA-N 2-ethoxyethyl acetate Chemical compound CCOCCOC(C)=O SVONRAPFKPVNKG-UHFFFAOYSA-N 0.000 description 1
- UINDRJHZBAGQFD-UHFFFAOYSA-N 2-ethyl-1-methylimidazole Chemical compound CCC1=NC=CN1C UINDRJHZBAGQFD-UHFFFAOYSA-N 0.000 description 1
- PQAMFDRRWURCFQ-UHFFFAOYSA-N 2-ethyl-1h-imidazole Chemical class CCC1=NC=CN1 PQAMFDRRWURCFQ-UHFFFAOYSA-N 0.000 description 1
- YTWBFUCJVWKCCK-UHFFFAOYSA-N 2-heptadecyl-1h-imidazole Chemical compound CCCCCCCCCCCCCCCCCC1=NC=CN1 YTWBFUCJVWKCCK-UHFFFAOYSA-N 0.000 description 1
- DRWYRROCDFQZQF-UHFFFAOYSA-N 2-methylpenta-1,4-diene Chemical compound CC(=C)CC=C DRWYRROCDFQZQF-UHFFFAOYSA-N 0.000 description 1
- ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 2-phenyl-1h-imidazole Chemical class C1=CNC(C=2C=CC=CC=2)=N1 ZCUJYXPAKHMBAZ-UHFFFAOYSA-N 0.000 description 1
- FUOZJYASZOSONT-UHFFFAOYSA-N 2-propan-2-yl-1h-imidazole Chemical compound CC(C)C1=NC=CN1 FUOZJYASZOSONT-UHFFFAOYSA-N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- JOVGLRSLWFSVNB-UHFFFAOYSA-N 3,4-dimethylcyclopentene Chemical compound CC1CC=CC1C JOVGLRSLWFSVNB-UHFFFAOYSA-N 0.000 description 1
- UIDDPPKZYZTEGS-UHFFFAOYSA-N 3-(2-ethyl-4-methylimidazol-1-yl)propanenitrile Chemical class CCC1=NC(C)=CN1CCC#N UIDDPPKZYZTEGS-UHFFFAOYSA-N 0.000 description 1
- OLGHJTHQWQKJQQ-UHFFFAOYSA-N 3-ethylhex-1-ene Chemical compound CCCC(CC)C=C OLGHJTHQWQKJQQ-UHFFFAOYSA-N 0.000 description 1
- YPVPQMCSLFDIKA-UHFFFAOYSA-N 3-ethylpent-1-ene Chemical compound CCC(CC)C=C YPVPQMCSLFDIKA-UHFFFAOYSA-N 0.000 description 1
- YHQXBTXEYZIYOV-UHFFFAOYSA-N 3-methylbut-1-ene Chemical compound CC(C)C=C YHQXBTXEYZIYOV-UHFFFAOYSA-N 0.000 description 1
- UZPWKTCMUADILM-UHFFFAOYSA-N 3-methylcyclohexene Chemical compound CC1CCCC=C1 UZPWKTCMUADILM-UHFFFAOYSA-N 0.000 description 1
- LDTAOIUHUHHCMU-UHFFFAOYSA-N 3-methylpent-1-ene Chemical compound CCC(C)C=C LDTAOIUHUHHCMU-UHFFFAOYSA-N 0.000 description 1
- SUJVAMIXNUAJEY-UHFFFAOYSA-N 4,4-dimethylhex-1-ene Chemical compound CCC(C)(C)CC=C SUJVAMIXNUAJEY-UHFFFAOYSA-N 0.000 description 1
- KLCNJIQZXOQYTE-UHFFFAOYSA-N 4,4-dimethylpent-1-ene Chemical compound CC(C)(C)CC=C KLCNJIQZXOQYTE-UHFFFAOYSA-N 0.000 description 1
- QTPFGTKLGUJTLV-UHFFFAOYSA-N 4,4a,4b,5,8,8a,9,9a-octahydro-1,4:5,8-dimethano-1h-fluorene Chemical compound C12CC3C(C=C4)CC4C3C1C1C=CC2C1 QTPFGTKLGUJTLV-UHFFFAOYSA-N 0.000 description 1
- XUFPYLQWLKKGDQ-UHFFFAOYSA-N 4,4a,9,9a-tetrahydro-1,4-methano-1h-fluorene Chemical compound C12CC3=CC=CC=C3C1C1C=CC2C1 XUFPYLQWLKKGDQ-UHFFFAOYSA-N 0.000 description 1
- ASWUWXYCFUEMPP-UHFFFAOYSA-N 4-bicyclo[2.2.1]hept-2-enyl 2-methyloctanoate Chemical compound C1CC2C=CC1(OC(=O)C(C)CCCCCC)C2 ASWUWXYCFUEMPP-UHFFFAOYSA-N 0.000 description 1
- UJVBTBOHZPZUNA-UHFFFAOYSA-N 4-bicyclo[2.2.1]hept-2-enyl 2-methylpropanoate Chemical compound C1CC2C=CC1(OC(=O)C(C)C)C2 UJVBTBOHZPZUNA-UHFFFAOYSA-N 0.000 description 1
- OPMUAJRVOWSBTP-UHFFFAOYSA-N 4-ethyl-1-hexene Chemical compound CCC(CC)CC=C OPMUAJRVOWSBTP-UHFFFAOYSA-N 0.000 description 1
- SUWJESCICIOQHO-UHFFFAOYSA-N 4-methylhex-1-ene Chemical compound CCC(C)CC=C SUWJESCICIOQHO-UHFFFAOYSA-N 0.000 description 1
- CTYFNFVTLJWRDC-UHFFFAOYSA-N 4-octyl-2-phenoxybenzoic acid Chemical compound CCCCCCCCC1=CC=C(C(O)=O)C(OC=2C=CC=CC=2)=C1 CTYFNFVTLJWRDC-UHFFFAOYSA-N 0.000 description 1
- KSEUIMCJKBBLJV-UHFFFAOYSA-N 4-propylbicyclo[2.2.1]hept-5-en-2-ol Chemical compound C1C(O)C2C=CC1(CCC)C2 KSEUIMCJKBBLJV-UHFFFAOYSA-N 0.000 description 1
- DBOSBRHMHBENLP-UHFFFAOYSA-N 4-tert-Butylphenyl Salicylate Chemical compound C1=CC(C(C)(C)C)=CC=C1OC(=O)C1=CC=CC=C1O DBOSBRHMHBENLP-UHFFFAOYSA-N 0.000 description 1
- ISAVYTVYFVQUDY-UHFFFAOYSA-N 4-tert-Octylphenol Chemical compound CC(C)(C)CC(C)(C)C1=CC=C(O)C=C1 ISAVYTVYFVQUDY-UHFFFAOYSA-N 0.000 description 1
- YRIYXMAKROEVBQ-UHFFFAOYSA-N 5,5-dimethylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(C)(C)CC1C=C2 YRIYXMAKROEVBQ-UHFFFAOYSA-N 0.000 description 1
- JGLIHSMBVDZMSA-UHFFFAOYSA-N 5-(cyclohexen-1-yl)bicyclo[2.2.1]hept-2-ene Chemical compound C1=CC2CC1CC2C1=CCCCC1 JGLIHSMBVDZMSA-UHFFFAOYSA-N 0.000 description 1
- UWSMKYBKUPAEJQ-UHFFFAOYSA-N 5-Chloro-2-(3,5-di-tert-butyl-2-hydroxyphenyl)-2H-benzotriazole Chemical compound CC(C)(C)C1=CC(C(C)(C)C)=CC(N2N=C3C=C(Cl)C=CC3=N2)=C1O UWSMKYBKUPAEJQ-UHFFFAOYSA-N 0.000 description 1
- LUMNWCHHXDUKFI-UHFFFAOYSA-N 5-bicyclo[2.2.1]hept-2-enylmethanol Chemical compound C1C2C(CO)CC1C=C2 LUMNWCHHXDUKFI-UHFFFAOYSA-N 0.000 description 1
- YSWATWCBYRBYBO-UHFFFAOYSA-N 5-butylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(CCCC)CC1C=C2 YSWATWCBYRBYBO-UHFFFAOYSA-N 0.000 description 1
- LVXDMUDXBUNBQY-UHFFFAOYSA-N 5-cyclohexylbicyclo[2.2.1]hept-2-ene Chemical compound C1=CC2CC1CC2C1CCCCC1 LVXDMUDXBUNBQY-UHFFFAOYSA-N 0.000 description 1
- DGBJYYFKBCUCNY-UHFFFAOYSA-N 5-cyclopentylbicyclo[2.2.1]hept-2-ene Chemical compound C1CCCC1C1C(C=C2)CC2C1 DGBJYYFKBCUCNY-UHFFFAOYSA-N 0.000 description 1
- INYHZQLKOKTDAI-UHFFFAOYSA-N 5-ethenylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(C=C)CC1C=C2 INYHZQLKOKTDAI-UHFFFAOYSA-N 0.000 description 1
- QHJIJNGGGLNBNJ-UHFFFAOYSA-N 5-ethylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(CC)CC1C=C2 QHJIJNGGGLNBNJ-UHFFFAOYSA-N 0.000 description 1
- WMWDGZLDLRCDRG-UHFFFAOYSA-N 5-hexylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(CCCCCC)CC1C=C2 WMWDGZLDLRCDRG-UHFFFAOYSA-N 0.000 description 1
- TYOXIFXYEIILLY-UHFFFAOYSA-N 5-methyl-2-phenyl-1h-imidazole Chemical class N1C(C)=CN=C1C1=CC=CC=C1 TYOXIFXYEIILLY-UHFFFAOYSA-N 0.000 description 1
- PCBPVYHMZBWMAZ-UHFFFAOYSA-N 5-methylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(C)CC1C=C2 PCBPVYHMZBWMAZ-UHFFFAOYSA-N 0.000 description 1
- VSQLAQKFRFTMNS-UHFFFAOYSA-N 5-methylhexa-1,4-diene Chemical compound CC(C)=CCC=C VSQLAQKFRFTMNS-UHFFFAOYSA-N 0.000 description 1
- WTQBISBWKRKLIJ-UHFFFAOYSA-N 5-methylidenebicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(=C)CC1C=C2 WTQBISBWKRKLIJ-UHFFFAOYSA-N 0.000 description 1
- MDLZXSCRAIESJZ-UHFFFAOYSA-N 5-octadecylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(CCCCCCCCCCCCCCCCCC)CC1C=C2 MDLZXSCRAIESJZ-UHFFFAOYSA-N 0.000 description 1
- GOLQZWYZZWIBCA-UHFFFAOYSA-N 5-octylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(CCCCCCCC)CC1C=C2 GOLQZWYZZWIBCA-UHFFFAOYSA-N 0.000 description 1
- PGNNHYNYFLXKDZ-UHFFFAOYSA-N 5-phenylbicyclo[2.2.1]hept-2-ene Chemical compound C1=CC2CC1CC2C1=CC=CC=C1 PGNNHYNYFLXKDZ-UHFFFAOYSA-N 0.000 description 1
- CJQNJRMLJAAXOS-UHFFFAOYSA-N 5-prop-1-enylbicyclo[2.2.1]hept-2-ene Chemical compound C1C2C(C=CC)CC1C=C2 CJQNJRMLJAAXOS-UHFFFAOYSA-N 0.000 description 1
- ULKLGIFJWFIQFF-UHFFFAOYSA-N 5K8XI641G3 Chemical class CCC1=NC=C(C)N1 ULKLGIFJWFIQFF-UHFFFAOYSA-N 0.000 description 1
- IXDGHAZCSMVIFX-UHFFFAOYSA-N 6-(dibutylamino)-1h-1,3,5-triazine-2,4-dithione Chemical compound CCCCN(CCCC)C1=NC(=S)NC(=S)N1 IXDGHAZCSMVIFX-UHFFFAOYSA-N 0.000 description 1
- CSRQAJIMYJHHHQ-UHFFFAOYSA-N 9-ethylidenetetracyclo[6.2.1.13,6.02,7]dodec-4-ene Chemical compound C1C(C23)C=CC1C3C1CC2CC1=CC CSRQAJIMYJHHHQ-UHFFFAOYSA-N 0.000 description 1
- YBDYLROECWPRDH-UHFFFAOYSA-N 9-methylidenetetracyclo[6.2.1.13,6.02,7]dodec-4-ene Chemical compound C1C(C23)C=CC1C3C1CC2CC1=C YBDYLROECWPRDH-UHFFFAOYSA-N 0.000 description 1
- LUZRCAIWLRPMQK-UHFFFAOYSA-N 9-phenyltetracyclo[6.2.1.13,6.02,7]dodec-4-ene Chemical compound C1C(C23)C=CC1C3C1CC2CC1C1=CC=CC=C1 LUZRCAIWLRPMQK-UHFFFAOYSA-N 0.000 description 1
- HRPVXLWXLXDGHG-UHFFFAOYSA-N Acrylamide Chemical compound NC(=O)C=C HRPVXLWXLXDGHG-UHFFFAOYSA-N 0.000 description 1
- OSDWBNJEKMUWAV-UHFFFAOYSA-N Allyl chloride Chemical compound ClCC=C OSDWBNJEKMUWAV-UHFFFAOYSA-N 0.000 description 1
- 229910015900 BF3 Inorganic materials 0.000 description 1
- ADLKAPPZYIHSPB-UHFFFAOYSA-N C(C)C=1N(C=C(N1)C)CCC=1N(NN=CC1N)N Chemical class C(C)C=1N(C=C(N1)C)CCC=1N(NN=CC1N)N ADLKAPPZYIHSPB-UHFFFAOYSA-N 0.000 description 1
- FCVMAJSEZDNJNX-UHFFFAOYSA-N C1C(C23)C=CC1C3C1CC2CC1C1=CCCCC1 Chemical compound C1C(C23)C=CC1C3C1CC2CC1C1=CCCCC1 FCVMAJSEZDNJNX-UHFFFAOYSA-N 0.000 description 1
- YDPDXLQMBGNCFQ-UHFFFAOYSA-N C1C(C23)C=CC1C3C1CC2CC1C1CCCCC1 Chemical compound C1C(C23)C=CC1C3C1CC2CC1C1CCCCC1 YDPDXLQMBGNCFQ-UHFFFAOYSA-N 0.000 description 1
- APQJRJLAJMKHPW-UHFFFAOYSA-N C1C(C23)C=CC1C3C1CC2CC1C=C Chemical compound C1C(C23)C=CC1C3C1CC2CC1C=C APQJRJLAJMKHPW-UHFFFAOYSA-N 0.000 description 1
- MAOGOJRJEJTKSC-UHFFFAOYSA-N C1C(C23)C=CC1C3C1CC2CC1C=CC Chemical compound C1C(C23)C=CC1C3C1CC2CC1C=CC MAOGOJRJEJTKSC-UHFFFAOYSA-N 0.000 description 1
- HKCLQRLKCIWCRW-UHFFFAOYSA-N C1C2C3C(C4)CC=C4C3C1C1C2C=CC1 Chemical compound C1C2C3C(C4)CC=C4C3C1C1C2C=CC1 HKCLQRLKCIWCRW-UHFFFAOYSA-N 0.000 description 1
- CYGXFAMQODORLV-UHFFFAOYSA-N C1CCCC1C1C(C2C3C4CC2C=C4)CC3C1 Chemical compound C1CCCC1C1C(C2C3C4CC2C=C4)CC3C1 CYGXFAMQODORLV-UHFFFAOYSA-N 0.000 description 1
- KXDHJXZQYSOELW-UHFFFAOYSA-N Carbamic acid Chemical compound NC(O)=O KXDHJXZQYSOELW-UHFFFAOYSA-N 0.000 description 1
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229920001651 Cyanoacrylate Polymers 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- AVXURJPOCDRRFD-UHFFFAOYSA-N Hydroxylamine Chemical compound ON AVXURJPOCDRRFD-UHFFFAOYSA-N 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- MWCLLHOVUTZFKS-UHFFFAOYSA-N Methyl cyanoacrylate Chemical compound COC(=O)C(=C)C#N MWCLLHOVUTZFKS-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- ZHXKCYZGHNRAMR-UHFFFAOYSA-M N.[SH-].Cl.[K+] Chemical compound N.[SH-].Cl.[K+] ZHXKCYZGHNRAMR-UHFFFAOYSA-M 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000005708 Sodium hypochlorite Substances 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- HVGFUFSGNGVHMD-UHFFFAOYSA-N [2-[[2-(2-hydroxy-4-methoxybenzoyl)phenyl]methyl]phenyl]-(2-hydroxy-4-methoxyphenyl)methanone Chemical compound OC1=CC(OC)=CC=C1C(=O)C1=CC=CC=C1CC1=CC=CC=C1C(=O)C1=CC=C(OC)C=C1O HVGFUFSGNGVHMD-UHFFFAOYSA-N 0.000 description 1
- IGHHPVIMEQGKNE-UHFFFAOYSA-N [3-(hydroxymethyl)-2-bicyclo[2.2.1]hept-5-enyl]methanol Chemical compound C1C2C=CC1C(CO)C2CO IGHHPVIMEQGKNE-UHFFFAOYSA-N 0.000 description 1
- YJOLYFYTSAVBML-UHFFFAOYSA-N ac1l4f97 Chemical compound C1C(C23)C=CC1C3C1CC2CC1CC YJOLYFYTSAVBML-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000008065 acid anhydrides Chemical class 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 125000003545 alkoxy group Chemical group 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- XYLMUPLGERFSHI-UHFFFAOYSA-N alpha-Methylstyrene Chemical compound CC(=C)C1=CC=CC=C1 XYLMUPLGERFSHI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 229940111121 antirheumatic drug quinolines Drugs 0.000 description 1
- 239000002216 antistatic agent Substances 0.000 description 1
- 150000004984 aromatic diamines Chemical class 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- BMAXQTDMWYDIJX-UHFFFAOYSA-N bicyclo[2.2.1]hept-2-ene-5-carbonitrile Chemical compound C1C2C(C#N)CC1C=C2 BMAXQTDMWYDIJX-UHFFFAOYSA-N 0.000 description 1
- NIDNOXCRFUCAKQ-UHFFFAOYSA-N bicyclo[2.2.1]hept-5-ene-2,3-dicarboxylic acid Chemical compound C1C2C=CC1C(C(=O)O)C2C(O)=O NIDNOXCRFUCAKQ-UHFFFAOYSA-N 0.000 description 1
- SODJJEXAWOSSON-UHFFFAOYSA-N bis(2-hydroxy-4-methoxyphenyl)methanone Chemical compound OC1=CC(OC)=CC=C1C(=O)C1=CC=C(OC)C=C1O SODJJEXAWOSSON-UHFFFAOYSA-N 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 description 1
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 229920001795 coordination polymer Polymers 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 150000001925 cycloalkenes Chemical group 0.000 description 1
- CFBGXYDUODCMNS-UHFFFAOYSA-N cyclobutene Chemical compound C1CC=C1 CFBGXYDUODCMNS-UHFFFAOYSA-N 0.000 description 1
- ZXIJMRYMVAMXQP-UHFFFAOYSA-N cycloheptene Chemical compound C1CCC=CCC1 ZXIJMRYMVAMXQP-UHFFFAOYSA-N 0.000 description 1
- URYYVOIYTNXXBN-UPHRSURJSA-N cyclooctene Chemical compound C1CCC\C=C/CC1 URYYVOIYTNXXBN-UPHRSURJSA-N 0.000 description 1
- 239000004913 cyclooctene Substances 0.000 description 1
- 238000004925 denaturation Methods 0.000 description 1
- 230000036425 denaturation Effects 0.000 description 1
- 125000003963 dichloro group Chemical group Cl* 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- 229960004132 diethyl ether Drugs 0.000 description 1
- HANKSFAYJLDDKP-UHFFFAOYSA-N dihydrodicyclopentadiene Chemical compound C12CC=CC2C2CCC1C2 HANKSFAYJLDDKP-UHFFFAOYSA-N 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- ZZTCPWRAHWXWCH-UHFFFAOYSA-N diphenylmethanediamine Chemical compound C=1C=CC=CC=1C(N)(N)C1=CC=CC=C1 ZZTCPWRAHWXWCH-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 229940069096 dodecene Drugs 0.000 description 1
- MCPKSFINULVDNX-UHFFFAOYSA-N drometrizole Chemical compound CC1=CC=C(O)C(N2N=C3C=CC=CC3=N2)=C1 MCPKSFINULVDNX-UHFFFAOYSA-N 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000003480 eluent Substances 0.000 description 1
- 239000003995 emulsifying agent Substances 0.000 description 1
- 239000003623 enhancer Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- LDLDYFCCDKENPD-UHFFFAOYSA-N ethenylcyclohexane Chemical compound C=CC1CCCCC1 LDLDYFCCDKENPD-UHFFFAOYSA-N 0.000 description 1
- FCCGTJAGEHZPBF-UHFFFAOYSA-N ethyl bicyclo[2.2.1]hept-2-ene-5-carboxylate Chemical compound C1C2C(C(=O)OCC)CC1C=C2 FCCGTJAGEHZPBF-UHFFFAOYSA-N 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 150000008282 halocarbons Chemical class 0.000 description 1
- GEAWFZNTIFJMHR-UHFFFAOYSA-N hepta-1,6-diene Chemical compound C=CCCCC=C GEAWFZNTIFJMHR-UHFFFAOYSA-N 0.000 description 1
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 description 1
- PYGSKMBEVAICCR-UHFFFAOYSA-N hexa-1,5-diene Chemical compound C=CCCC=C PYGSKMBEVAICCR-UHFFFAOYSA-N 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 150000002473 indoazoles Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000012784 inorganic fiber Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical group 0.000 description 1
- 150000002537 isoquinolines Chemical class 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- UMCSHTKHXAMMQM-UHFFFAOYSA-N methyl 4-methyltetracyclo[6.2.1.13,6.02,7]dodec-9-ene-4-carboxylate Chemical compound C1C(C23)C=CC1C3C1CC2CC1(C)C(=O)OC UMCSHTKHXAMMQM-UHFFFAOYSA-N 0.000 description 1
- AEBDJCUTXUYLDC-UHFFFAOYSA-N methyl 5-methylbicyclo[2.2.1]hept-2-ene-5-carboxylate Chemical compound C1C2C(C(=O)OC)(C)CC1C=C2 AEBDJCUTXUYLDC-UHFFFAOYSA-N 0.000 description 1
- ZDFOSSPNFAQIOM-UHFFFAOYSA-N methyl 8-tetracyclo-[4.4.0.12,5.17,10]dodecene-3-carboxylate Chemical compound C1C(C23)C=CC1C3C1CC2CC1C(=O)OC ZDFOSSPNFAQIOM-UHFFFAOYSA-N 0.000 description 1
- RMAZRAQKPTXZNL-UHFFFAOYSA-N methyl bicyclo[2.2.1]hept-2-ene-5-carboxylate Chemical compound C1C2C(C(=O)OC)CC1C=C2 RMAZRAQKPTXZNL-UHFFFAOYSA-N 0.000 description 1
- 229940043265 methyl isobutyl ketone Drugs 0.000 description 1
- 125000002950 monocyclic group Chemical group 0.000 description 1
- QOHMWDJIBGVPIF-UHFFFAOYSA-N n',n'-diethylpropane-1,3-diamine Chemical compound CCN(CC)CCCN QOHMWDJIBGVPIF-UHFFFAOYSA-N 0.000 description 1
- MXHTZQSKTCCMFG-UHFFFAOYSA-N n,n-dibenzyl-1-phenylmethanamine Chemical compound C=1C=CC=CC=1CN(CC=1C=CC=CC=1)CC1=CC=CC=C1 MXHTZQSKTCCMFG-UHFFFAOYSA-N 0.000 description 1
- TXIYCNRKHPXJMW-UHFFFAOYSA-N nickel;1-octyl-2-(2-octylphenyl)sulfanylbenzene Chemical compound [Ni].CCCCCCCCC1=CC=CC=C1SC1=CC=CC=C1CCCCCCCC TXIYCNRKHPXJMW-UHFFFAOYSA-N 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 125000003518 norbornenyl group Chemical group C12(C=CC(CC1)C2)* 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 229920006284 nylon film Polymers 0.000 description 1
- QUAMTGJKVDWJEQ-UHFFFAOYSA-N octabenzone Chemical compound OC1=CC(OCCCCCCCC)=CC=C1C(=O)C1=CC=CC=C1 QUAMTGJKVDWJEQ-UHFFFAOYSA-N 0.000 description 1
- 150000002902 organometallic compounds Chemical class 0.000 description 1
- DXGLGDHPHMLXJC-UHFFFAOYSA-N oxybenzone Chemical compound OC1=CC(OC)=CC=C1C(=O)C1=CC=CC=C1 DXGLGDHPHMLXJC-UHFFFAOYSA-N 0.000 description 1
- 125000005740 oxycarbonyl group Chemical group [*:1]OC([*:2])=O 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- HVAMZGADVCBITI-UHFFFAOYSA-M pent-4-enoate Chemical compound [O-]C(=O)CCC=C HVAMZGADVCBITI-UHFFFAOYSA-M 0.000 description 1
- QYZLKGVUSQXAMU-UHFFFAOYSA-N penta-1,4-diene Chemical compound C=CCC=C QYZLKGVUSQXAMU-UHFFFAOYSA-N 0.000 description 1
- 229960000969 phenyl salicylate Drugs 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- PMJHHCWVYXUKFD-UHFFFAOYSA-N piperylene Natural products CC=CC=C PMJHHCWVYXUKFD-UHFFFAOYSA-N 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920006289 polycarbonate film Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000002685 polymerization catalyst Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000012286 potassium permanganate Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- HJWLCRVIBGQPNF-UHFFFAOYSA-N prop-2-enylbenzene Chemical compound C=CCC1=CC=CC=C1 HJWLCRVIBGQPNF-UHFFFAOYSA-N 0.000 description 1
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 150000003216 pyrazines Chemical class 0.000 description 1
- 150000003222 pyridines Chemical class 0.000 description 1
- 150000003230 pyrimidines Chemical class 0.000 description 1
- 150000003248 quinolines Chemical class 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 229940116351 sebacate Drugs 0.000 description 1
- CXMXRPHRNRROMY-UHFFFAOYSA-L sebacate(2-) Chemical compound [O-]C(=O)CCCCCCCCC([O-])=O CXMXRPHRNRROMY-UHFFFAOYSA-L 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000012748 slip agent Substances 0.000 description 1
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 125000001424 substituent group Chemical group 0.000 description 1
- CXVGEDCSTKKODG-UHFFFAOYSA-N sulisobenzone Chemical compound C1=C(S(O)(=O)=O)C(OC)=CC(O)=C1C(=O)C1=CC=CC=C1 CXVGEDCSTKKODG-UHFFFAOYSA-N 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- PMTPAGVGEXGVNI-UHFFFAOYSA-N tetracyclo[10.2.1.02,11.04,9]pentadeca-2,4,6,13-tetraene Chemical compound C12=CC3=CC=CCC3CC2C2CC1C=C2 PMTPAGVGEXGVNI-UHFFFAOYSA-N 0.000 description 1
- XBFJAVXCNXDMBH-UHFFFAOYSA-N tetracyclo[6.2.1.1(3,6).0(2,7)]dodec-4-ene Chemical compound C1C(C23)C=CC1C3C1CC2CC1 XBFJAVXCNXDMBH-UHFFFAOYSA-N 0.000 description 1
- KFWJXQDORLWKBB-UHFFFAOYSA-N tetracyclo[6.2.1.13,6.02,7]dodec-9-ene-4-carboxylic acid Chemical compound C1C(C23)C=CC1C3C1CC2CC1C(=O)O KFWJXQDORLWKBB-UHFFFAOYSA-N 0.000 description 1
- FAGUFWYHJQFNRV-UHFFFAOYSA-N tetraethylenepentamine Chemical compound NCCNCCNCCNCCN FAGUFWYHJQFNRV-UHFFFAOYSA-N 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 1
- WLPUWLXVBWGYMZ-UHFFFAOYSA-N tricyclohexylphosphine Chemical compound C1CCCCC1P(C1CCCCC1)C1CCCCC1 WLPUWLXVBWGYMZ-UHFFFAOYSA-N 0.000 description 1
- 239000013638 trimer Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- LMISWUPDWKMCIH-UHFFFAOYSA-N undeca-3,7-diene Chemical compound CCCC=CCCC=CCC LMISWUPDWKMCIH-UHFFFAOYSA-N 0.000 description 1
- AZGPUOZQDCSPRB-UHFFFAOYSA-N undeca-3,8-diene Chemical compound CCC=CCCCC=CCC AZGPUOZQDCSPRB-UHFFFAOYSA-N 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09009—Substrate related
- H05K2201/09136—Means for correcting warpage
Definitions
- the present invention relates to a method of production of a multilayer circuit board. More particularly, it relates to a method of production of a multilayer circuit board which is substantially free from warping.
- circuit boards which are used for electronic devices are also being required to be made higher in density.
- the general practice is to make the circuit boards multilayered.
- Such multilayer circuit boards are comprised of an inner layer board in which a conductive circuit layer is formed on the outermost surface, an electrical insulating layer laminated on its surface, and a conductive circuit layer which is further formed on the electrical insulating layer. If desired, several electrical insulating layers and conductive circuit layers may be laminated.
- Patent Document 1 discloses a method of production of a multilayer circuit board on which at least an insulating resin layer and a conductor interconnect layer are formed comprising forming a foundation layer which contains a coordination polymer complex between the insulating resin layer and conductor interconnect layer.
- Patent Document 2 discloses a method of production of a multilayer circuit board comprising forming on an inner layer board which has an outermost layer of a conductive circuit layer 1 an uncured or semicured resin layer by using a curable composition which contains an insulating polymer and a curing agent (step A), then bringing a compound which has a structure which can coordinate with a metal into contact with the surface of that resin layer (step B), next curing that shaped member to form an electrical insulating layer “b” (step C), forming a metal thin film layer on the surface of this electrical insulating layer “b” (step D), then forming a conductive circuit layer 2 including that metal thin film layer (step E).
- Patent Document 1 Japanese Patent Publication No. 2001-345554
- Patent Document 2 Japanese Patent Publication No. 2003-158373
- the object of the present invention is to provide a method of production of a multilayer circuit board which is substantially free of warping.
- a multilayer circuit board obtained by forming an uncured resin layer which contains a heat curable resin and a curing agent (I) on a board, bringing a curing agent (II) which functions at a lower temperature than the curing agent (I) into contact with that surface, then heating the resin layer at a temperature at which the curing agent (II) expresses its function, then raising the temperature to complete the curing of the resin layer by the curing agent (I) and form the electrical insulating layer, substantially no warping occurs and thereby completed the present invention.
- a method of production of a multilayer circuit board comprising using a curable composition which contains a heat curable resin and curing agent (I) to form an uncured or semicured resin layer on a board (step A), then bringing a curing agent (II) able to substantially to cure the heat curable resin at a temperature at which the curing agent (I) cannot substantially cure the heat curable resin into contact with the surface of the resin layer, then heating the resin layer at a temperature at which the curing agent (I) cannot substantially cure the heat curable resin and the curing agent (II) can substantially cure the heat curable resin (step B), next heating and curing the resin layer at a temperature at which the curing agent (I) can substantially cure the heat curable resin to form an electrical insulating layer (step C).
- the heat curable resin is at least one type of resin which is selected from the group comprised of an epoxy resin, maleimide resin, (meth)acrylic resin, diallylphthalate resin, triazine resin, alicyclic olefin polymer, aromatic polyether polymer, benzocyclobutene polymer, cyanate ester polymer, liquid crystal polymer, and polyimide.
- [7] The method of production of the multilayer circuit board as set forth in any one of [1] to [6], wherein the curing agent (II) is at least one type of agent which is selected from the group comprised of a polysulfide; polymercaptan; polyamide; imidazole; and chain aliphatic polyamine, cyclic aliphatic polyamine, aliphatic-aromatic amine, aromatic amine, and complexes of these amines.
- the curing agent (II) is at least one type of agent which is selected from the group comprised of a polysulfide; polymercaptan; polyamide; imidazole; and chain aliphatic polyamine, cyclic aliphatic polyamine, aliphatic-aromatic amine, aromatic amine, and complexes of these amines.
- a multilayer circuit board which is produced by the method of production of the multilayer circuit board as set forth in any one of [1] to [7].
- the method of production of the multilayer circuit board of the present invention has as one major characteristic using two types of curing agents which differ in temperature regions suitable for expression of their functions and heating and curing the resin layer at least at two stages of temperature to form an electrical insulating layer.
- the method of production of the multilayer circuit board of the present invention has the following three steps:
- Step A A step of using a curable composition which contains a heat curable resin and a curing agent (I) to form an uncured or semicured resin layer on a board.
- Step B A step of bringing a curing agent (II) able to substantially to cure the heat curable resin at a temperature at which the curing agent (I) cannot substantially cure the heat curable resin into contact with the resin layer surface, then heating the resin layer at a temperature at which the curing agent (I) cannot substantially cure the heat curable resin and a temperature at which the curing agent (II) can substantially cure the heat curable resin.
- Step C A step of heating the resin layer to cure at a temperature at which the curing agent (I) can substantially cure the heat curable resin so as to form an electrical insulating layer.
- the board which is used at step A is not particularly limited, but usually a board on which a conductive circuit layer “a” is formed on one or both surfaces of an electrical insulating layer “a” is used.
- a board on which a conductive circuit layer “a” is formed on one or both surfaces of an electrical insulating layer “a” is used.
- the thickness of the board is usually 50 ⁇ m to 2 mm, preferably 60 ⁇ m to 1.6 mm, more preferably 100 ⁇ m to 1 mm.
- the electrical insulating layer “a” which forms the board is mainly comprised of a heat curable resin which has an electrical insulating property.
- the heat curable resin is not particularly limited, but, for example, an alicyclic olefin polymer, epoxy resin, maleimide resin, (meth)acrylic resin, diallylphthalate resin, triazine resin, aromatic polyether polymer, cyanate ester polymer, and polyimide, etc. may be mentioned.
- the curable composition which contains the heat curable resin and the curing agent is cured to obtain an electrical insulating layer “a”.
- the board may contain a glass fiber, resin fiber, etc. in the electrical insulating layer “a” from the viewpoint of improvement of the strength.
- the material of the conductive circuit layer “a” which forms the board is usually a conductive metal.
- a curable composition which contains a heat curable resin and a curing agent (I) is used to form an uncured or semicured resin layer.
- the “uncured resin layer” means a state in which substantially all of the resin layer can be dissolved in a solvent in which the heat curable resin which forms the resin layer can be dissolved.
- a “semicured resin layer” means a state where the resin is cured to an extent in which it can be further cured by heating and a state in which part is dissolved in a solvent in which the heat curable resin which forms the resin layer can be dissolved.
- the method for forming the resin layer on the board is not especially limited, but the method of bonding a film shaped or sheet shaped article of a curable composition which contains a heat curable resin and curing agent (I) to the surface of the board, in particular so as to contact the conductive circuit layer “a” of the board, to form an uncured or semicured resin layer (step A1) and a method of coating a board with a curable composition which contains a heat curable resin and curing agent (I) and drying it to form an uncured or semicured resin layer (step A2) may be mentioned.
- the planar uniformity of the bonding with the conductive circuit layer which is formed as desired on the electrical insulating layer which is obtained by curing the resin layer becomes higher, so (step A1) is preferably used for forming the resin layer.
- the surface of the board on which the conductive circuit layer “a” is formed is preferably pretreated.
- the pretreatment the method of bringing an alkaline sodium hypochlorite aqueous solution, permanganic acid, etc. into contact with the board surface to coarsen the surface, the method of using an alkaline potassium permanganate aqueous solution, potassium sulfide-ammonium chloride aqueous solution, etc.
- the method of forming a primer layer using 2-di-n-butylamino-4,6-dimercapto-s-triazine or other thiol compound is preferable since when the conductive circuit layer “a” is made of copper, there is no corrosion of copper and a high bonding is obtained.
- the heat curable resin which forms the curable composition which is used for forming the resin layer is not limited so long as being one which exhibits heat curing property in combination with a curing agent and which has an electric insulating ability.
- an epoxy resin, maleimide resin, (meth)acrylic resin, diallylphthalate resin, triazine resin, alicyclic olefin polymer, aromatic polyether polymer, benzocyclobutene polymer, cyanate ester polymer, and polyimide etc. may be mentioned. These resins may be used alone or in two or more types in combination.
- an alicyclic olefin polymer aromatic polyether polymer, benzocyclobutene polymer, cyanate ester polymer, and polyimide is preferable, an alicyclic olefin polymer and aromatic polyether polymer are more preferable, and an alicyclic olefin polymer is particularly preferable.
- a liquid crystal polymer may also be used as a preferable heat curable resin.
- liquid crystal polymer a polymer of an aromatic or aliphatic dihydroxy compound, a polymer of an aromatic or aliphatic dicarboxylic acid, a polymer of an aromatic hydroxycarboxylic acid, a polymer of an aromatic diamine, aromatic hydroxyamine, aromatic amino carboxylic acid, etc. may be illustrated.
- (meth)acrylic means methacrylic or acrylic.
- the heat curable resin is not especially limited in weight average molecular weight (Mw), but it is usually 1,000 to 1,000,000, preferably 3,000 to 500,000, more preferably 4,000 to 300,000.
- Mw weight average molecular weight
- a heat curable resin ingredient with a weight average molecular weight (Mw) of 1,000 to 1,000,000 is preferably included in a ratio, with respect to the heat curable resin which is contained in the curable composition as well, of preferably 10 wt % or more, more preferably 15 wt % or more.
- the upper limit of this ratio is 100 wt %, that is, the entire amount of the heat curable resin which is contained in the curable composition may be comprised of a heat curable resin ingredient with a weight average molecular weight (Mw) of 1,000 to 1,000,000.
- Mw weight average molecular weight
- the heat curable resin one with a weight average molecular weight (Mw) of less than 1,000 or one with over 1,000,000 may also be contained.
- the weight average molecular weight (Mw) is the weight average molecular weight converted to polystyrene which is measured by gel permeation chromatography (GPC) using tetrahydrofuran as the eluent.
- An alicyclic olefin polymer is a polymer of an unsaturated hydrocarbon which has an alicyclic structure.
- a cycloalkane structure, cycloalkene structure, etc. may be mentioned, but the obtained electrical insulating layer is improved in mechanical strength, heat resistance, etc., so a cycloalkane structure is preferable.
- any one of a monocyclic structure and polycyclic structure condensed polycyclic structure, bridged cyclic structure, combination polycyclic structure of the same, etc. is possible.
- the number of carbon atoms which form the alicyclic structure is not particularly limited, but is usually 4 to 30, preferably 5 to 20, more preferably 5 to 15 in range. At this time, the formability of the curable composition and the mechanical strength and heat resistance of the obtained electrical insulating layer and other such properties are balanced to a high degree.
- the alicyclic olefin polymer is preferably one which has a polar group.
- a polar group a hydroxyl group, carboxyl group, alkoxyl group, epoxy group, glycidyl group, oxycarbonyl group, carbonyl group, amino group, ester group, and carboxylic acid anhydride group, etc. may be mentioned.
- a carboxyl group and carboxylic acid anhydride group are preferable.
- the content of the repeating units which have polar groups in 100 mol % of the total repeating units which form the alicyclic olefin polymer is not particularly limited, but is usually 5 to 60 mol %, preferably 10 to 50 mol %.
- the number of polar groups which are present in the repeating units is not particularly limited, but usually is preferably 1 to 2.
- An alicyclic olefin polymer is usually obtained by addition polymerization or ring opening polymerization of an alicyclic olefin monomer and, as desired, by hydrogenation of the unsaturated bond part or by addition polymerization of an aromatic olefin monomer and hydrogenation of the aromatic ring part of the obtained polymer.
- an alicyclic olefin polymer which has polar groups is obtained by, for example, 1) introduction of polar groups to the alicyclic olefin polymer by a denaturation reaction, 2) copolymerization using a monomer having polar groups as a copolymerization ingredient, or 3) copolymerization using a monomer containing ester groups or other polar groups as a copolymerization ingredient, then hydrolysis of the ester group etc.
- alicyclic olefin monomer means a monomer which has carbon-carbon double bonds in the alicyclic structure
- aromatic olefin monomer means a monomer which is comprised of aromatic groups and a chain hydrocarbon which has carbon-carbon double bonds.
- bicyclo[2.2.1]-hept-2-ene (common name: norbornene), 5-methyl-bicyclo[2.2.1]-hept-2-ene, 5,5-dimethyl-bicyclo[2.2.1]-hept-2-ene, 5-ethyl-bicyclo[2.2.1]-hept-2-ene, 5-butyl-bicyclo[2.2.1]-hept-2-ene, 5-hexyl-bicyclo[2.2.1]-hept-2-ene, 5-octyl-bicyclo[2.2.1]-hept-2-ene, 5-octadecyl-bicyclo[2.2.1]-hept-2-ene, 5-ethylidene-bicyclo[2.2.1]-hept-2-ene, 5-methylidene-bicyclo[2.2.1]-hept-2-ene, 5-vinyl-bic
- bicyclo[2.2.1]-hept-2-ene-5,6-dicarboxylic acid anhydride 5-hydroxymethylbicyclo[2.2.1]-hept-2-ene, 5,6-di(hydroxymethyl)-bicyclo[2.2.1]-hept-2-ene, 5-hydroxy-i-propylbicyclo[2.2.1]-hept-2-ene, 5,6-dicarboxy-bicyclo[2.2.1]-hept-2-ene, bicyclo[2.2.1]-hept-2-ene-5,6-dicarboxylic acid imide, 5-cyclopentyl-bicyclo[2.2.1]-hept-2-ene, 5-cyclohexyl-bicyclo[2.2.1]-hept-2-ene, 5-cyclohexenyl-bicyclo[2.2.1]-hept-2-ene, 5-phenyl-bicyclo[2.2.1]-hept-2-ene,
- tricyclo[4.3.0.1 2,5 ]deca-3,7-diene (common name: dicyclopentadiene), tricyclo[4.3.0.1 2,5 ]deca-3 -ene, tricyclo[4.4.0.1 2,5 ]undeca-3,7-diene, tricyclo[4.4.0.1 2,5 ]undeca-3,8-diene, tricyclo[4.4.0.1 2,5 ]undeca-3-ene, tetracyclo[7.4.0.1 10,13 .0 2,7 ]-trideca-2,4,6-11-tetraene (other name: 1,4-methano-1,4,4a,9a-tetrahydrofluorene), tetracyclo[8.4.0.1 11,14 .0 3,8 ]-tetradeca-3,5,7,12,11-tetraene (other name: 1,4-methano-1,4,4a,5,10,10a-hexahydroanthracene),
- cyclobutene cyclopentene, cyclohexene, 3,4-dimethylcyclopentene, 3-methylcyclohexene, 2-(2-methylbutyl)-1-cyclohexene, cyclooctene, 3a,5,6,7a-tetrahydro-4,7-methano-1H-indene, cycloheptene, or other such monocyclic cycloalkene-based monomer; vinylcyclohexene, vinylcyclohexane, or other such vinyl-based alicyclic hydrocarbon-based monomer; cyclopentadiene, cyclohexadiene, or other such alicyclic conjugated diene-based monomer; etc. may be mentioned.
- aromatic olefin monomer styrene, ⁇ -methylstyrene, and divinylbenzene, etc. may be mentioned.
- the alicyclic olefin monomer and/or aromatic olefin monomer may be respectively used alone or in two or more types combined.
- the alicyclic olefin polymer may be obtained by copolymerization of the alicyclic olefin monomer and/or aromatic olefin monomer and monomers able to copolymerize with these monomers.
- ethylene As a monomer able to copolymerize with the alicyclic olefin monomer or aromatic olefin monomer, ethylene; propylene, 1-butene, 1-pentene, 1-hexene, 3-methyl-1-butene, 3-methyl-1-pentene, 3-ethyl-1-pentene, 4-methyl-1-pentene, 4-methyl-1-hexene, 4,4-dimethyl-1-hexene, 4,4-dimethyl-1-pentene, 4-ethyl-1-hexene, 3-ethyl-1-hexene, 1-octene, 1-decene, 1-dodecene, 1-tetradecene, 1-hexadecene, 1-octadecene, 1-eicosene, or other C 3 to C 20 ⁇ -olefin; 1,4-hexadiene, 4-methyl-1,4-hexadiene, 5-methyl-1,4-hexad
- the polymerization of the alicyclic olefin monomer or the aromatic olefin monomer and the hydrogenation of the obtained polymer which is performed as desired are not particularly limited and may be performed by a known method.
- an alicyclic olefin polymer an ring-opening polymer of a norbornene-based monomer and its hydrogenate, an addition polymer of a norbornene-based monomer, an addition polymer of a norbornene-based monomer and vinyl compound, a monocyclic cycloalkene polymer, alicyclic conjugated diene polymer, vinyl-based alicyclic hydrocarbon polymer and its hydrogenate, hydrogenate obtained by hydrogenating aromatic ring of an aromatic olefin polymer, etc. may be mentioned.
- a ring-opening polymer of a norbornene-based monomer and its hydrogenate an addition polymer of a norbornene-based monomer, an addition polymer of norbornene-based monomer and vinyl compound, and an aromatic cyclic hydrogenate of aromatic olefin polymer are preferable, in particular a hydrogenate of ring-opening polymer of norbornene-based monomer is preferable.
- aromatic cyclic hydrogenate of aromatic olefin polymer may be used respectively alone or as two or more types combined.
- a “norbornene-based monomer” means an alicyclic olefin monomer which has a norbornene ring structure.
- the method of adjusting the alicyclic olefin polymer in weight average molecular weight may be an ordinary method. For example, at the time of ring opening polymerization of an alicyclic olefin monomer by using a titanium-based catalyst, tungsten-based catalyst, or ruthenium-based catalyst, the method of adding a molecular weight adjuster such as a vinyl compound or diene compound in an amount of about 0.1 to 10 mol % with respect to the total amount of monomer may be mentioned. At this time, if using a smaller amount of molecular weight adjuster, a polymer with a relatively high Mw is obtained, while if using a larger amount, a polymer with a relatively low Mw is obtained.
- a molecular weight adjuster such as a vinyl compound or diene compound
- vinyl compound which is used as the molecular weight adjuster 1-butene, 1-pentene, 1-hexene, 1-octene, or other ⁇ -olefin compound; styrene, vinyltoluene, or other styrene compound; ethylvinylether, isobutylvinylether, allylglycidylether, or other ether compound; allylchloride or other halogen-containing vinyl compound; allylacetate, allylalcohol, glycidylmethacrylate, or other oxygen-containing vinyl compound; acrylamide or other nitrogen-containing vinyl compound; etc. may be mentioned.
- the alicyclic olefin polymer may be suitably selected in glass transition temperature in accordance with need, but it is usually 50° C. or more, preferably 70° C. or more, more preferably 100° C. or more, most preferably 125° C. or more.
- the curing agent (I) which is used in the present invention is not specially limited.
- an ionic curing agent, radical curing agent, or a curing agent which is provided with both an ionic and radical property, etc. is used.
- 1-allyl-3,5-diglycidylisocyanulate, 1,3-diallyl-5-glycidyl isocyanulate, and other non-halogen-containing isocyanulate-based curing agent which contains allyl groups and epoxy groups, or other nitrogen-based curing agent; bisphenol A bis(ethyleneglycol glycidylether)ether, bisphenol A bis(diethyleneglycol glycidylether)ether, bisphenol A bis(triethyleneglycol glycidylether)ether, bisphenol A bis(propyleneglycol glycidylether)ether, and other bisphenol A-based glycidylether type epoxy compound, or other glycidylether type epoxy compound, fluorene-based epoxy compound, or
- curing agents (I) may be suitably respectively used alone or as two or more types combined.
- the curing agent (I) using at least one type of agent selected from the group comprised of a polyvalent epoxy compound, dicarboxylic acid derivative, and polyol compound is preferable, while using a polyvalent epoxy compound is more preferable.
- the curing of the curable composition proceeds by heating the composition, but the temperature region at which the above curing agent (I) can substantially cure the heat curable resin is usually 150 to 300° C. in range.
- the amount of the curing agent (I) blended into the curable composition which is used in the present invention is, with respect to 100 parts by weight of the heat curable resin, usually 1 to 500 parts by weight.
- a curing accelerator etc. may be used.
- the curing agent (I) is, for example, a polyvalent epoxy compound
- a curing accelerator constituted by a tertiary amine-based compound, a boron trifluoride complex compound, etc. is suitable.
- tertiary amine-based compounds the lamination ability of the obtained electrical insulating layer with micro interconnects, insulation resistance, heat resistance, and chemical resistance are improved.
- tertiary amine-based compound benzyldimethylamine, triethanolamine, triethylamine, tributylamine, tribenzylamine, dimethylformamide, or other chain tertiary amine compound; pyrrazoles, pyridines, pyrazines, pyrimidines, indazoles, quinolines, isoquinolines, imidazoles, triazoles, etc. may be mentioned. Among these as well, imidazoles, in particular substituted imidazole compounds which have substituents, are preferable.
- substituted imidazole compound 2-ethylimidazole, 2-ethyl-4-methylimidazole, bis-2-ethyl-4-methylimidazole, 1-methyl-2-ethylimidazole, 2-isopropylimidazole, 2,4-dimethylimidazole, 2-heptadecyl-imidazole, or other alkyl substituted imidazole compound; 2-phenylimidazole, 2-phenyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-ethylimidazole, 1-benzyl-2-phenylimidazole, benzimidazole, 2-ethyl-4-methyl-1-(2′-cyanoethyl)imidazole, 2-ethyl-4-methyl-1-[2′-(3′′,5′′-diaminotriazinyl)ethyl]imidazole, 1-(2-amin
- an imidazole compound which is substituted by a hydrocarbon group containing a ring structure is preferable, while 1-benzyl-2-phenylimidazole is particularly preferable.
- the curing accelerator is used alone or in two or more types combined.
- the amount of the curing accelerator is suitably selected in accordance with the objective of use, but is, with respect to 100 parts by weight of heat curable resin, usually 0.001 to 30 parts by weight, preferably 0.01 to 10 parts by weight, more preferably 0.03 to 5 parts by weight.
- the curable composition which is used for the present invention may have other ingredients blended into it as desired.
- a compound which has absorption in the wavelength region of a laser beam which is used when forming via holes, through holes, or other holes is preferable.
- a UV laser for example, a UV-YAG laser etc.
- a curable composition which contains a compound which has absorption in the wavelength region of a laser beam a laser can be used to easily form holes in the obtained electrical insulating layer and formation of smears etc. is reduced.
- UV absorbant phenylsalicylate, p-tert-butylphenylsalicylate, p-octylphenylsalicylate, or other salicylic acid-based compound
- 2,4-dihydroxybenzophenone 2-hydroxy-4-methoxybenzophenone, 2-hydroxy-4-octoxy-benzophenone, 2-hydroxy-4-dodecyloxybenzophenone, 2,2′-dihydroxy-4-methoxybenzophenone, 2,2′-dihydroxy-4,4′-dimethoxybenzophenone, 2-hydroxy-4-methoxy-5-sulfobenzophenone, bis(2-hydroxy-4-methoxybenzoylphenyl)methane, or other benzophenone-based compound;
- the amount of the UV absorbant is, with respect to 100 parts by weight of the heat curable resin, normally 0.1 to 30 parts by weight, preferably 1 to 10 parts by weight.
- a flame retardant soft polymer, heat resistance stabilizer, weather resistance stabilizer, antiaging agent, leveling agent, antistatic agent, slip agent, antiblocking agent, anti-fogging agent, lubricant, dye, pigment, natural oil, synthetic oil, wax, emulsifier, filler, etc. may be used as another ingredient.
- the amounts of these are suitably selected within a range not impairing the object of the present invention.
- the film shaped or sheet shaped article of a curable composition which is used at (step A1) is usually obtained by shaping a curable composition by the solution casting process, melt casting process, etc., but use of the solution casting process for production is preferable.
- a varnish is coated on the support, then the organic solvent is dried off.
- a resin film carrier film
- metal foil etc.
- the resin film normally a thermoplastic resin film is used. Specifically, a polyethylene terephthalate film, polypropylene film, polyethylene film, polycarbonate film, polyethylene naphthalate film, polyarylate film, nylon film, etc. may be mentioned. In these resin films, due to the excellent heat resistance, chemical resistance, release property after lamination, etc., a polyethylene terephthalate film and polyethylene naphthalate film are preferable.
- the metal foil for example, copper foil, aluminum foil, nickel foil, chrome foil, gold foil, silver foil, etc. may be mentioned.
- the thickness of the support is not particularly limited, but from the viewpoint of the workability etc., usually is 1 to 150 ⁇ m, preferably 2 to 100 ⁇ m, more preferably 3 to 50 ⁇ m.
- the method of obtaining the varnish is not specially limited. For example, it is obtained by mixing the ingredients which form the curable composition and an organic solvent.
- the ingredients may be mixed in accordance with an ordinary method. For example, this may be performed by stirring by a roater and magnetic stirrer or using a high speed homogenizer, dispersion mixer, planetary stirrer, twin-screw kneader, ball mill, triple roll, etc.
- the temperature at the time of mixing is in a range where the reaction due to the curing agent (I) affects the workability. Further, from the viewpoint of safety, less than the boiling point of the organic solvent which is used at the time of mixing is preferable.
- organic solvent for example, toluene, xylene, ethylbenzene, trimethylbenzene, anisole, or other aromatic hydrocarbon-based organic solvent; n-pentane, n-hexane, n-heptane, or other aliphatic hydrocarbon-based organic solvent; cyclopentane, cyclohexane, or other alicyclic hydrocarbon-based organic solvent; chlorobenzene, dicyclobenzene trichlorobenzene, or other halogenated hydrocarbon-based organic solvent; methylethylketone, methylisobutylketone, cyclopentanone, cyclohexanone, or other ketone-based organic solvent, etc. may be mentioned. These organic solvents may be used alone or in two or more types combined.
- the amount of organic solvent used is suitably selected for control of the thickness of the obtained shaped article or improvement of flatness or other objective, but the solid content concentration of the varnish is usually 5 to 85 wt %, preferably 10 to 80 wt %, more preferably 20 to 70 wt %.
- the coating method dip coating, roll coating, curtain coating, die coating, slit coating, or other method may be mentioned. Further, the conditions for removal and drying of the organic solvent are suitably selected according to the type of the organic solvent.
- the drying temperature is usually 20 to 300° C., preferably 30 to 200° C., while the drying time is usually 30 seconds to 1 hour, preferably 1 minute to 30 minutes.
- the film shaped or sheet shaped article of the curable composition for example, it is possible to coat and impregnate a varnish on a fiber substrate on a support and suitably remove the organic solvent so as to obtain a film shaped or sheet shaped composite article comprised of a curable composition impregnated in a fiber substrate.
- the fiber substrate polyamide fiber, polyaramide fiber, polyester fiber, or other organic fiber and glass fiber, carbon fiber, or other inorganic fiber may be mentioned.
- a flat weave, twill weave, or other form of woven fabric, form of nonwoven fabric, etc. may be mentioned.
- the thickness of the fiber substrate from the viewpoint of the ease of handling of the obtained shaped article or embedding of interconnects, 5 to 100 ⁇ m is preferable and 10 to 50 ⁇ m in range is more preferable.
- the film shaped or sheet shaped article has a thickness of usually 0.1 to 150 ⁇ m, preferably 0.5 to 100 ⁇ m, more preferably 1 to 80 ⁇ m.
- the film shaped or sheet shaped article may be a single-layer structure or a multilayer structure.
- the layers may be the same type or may be different types. Note that, when desiring to obtain a film or sheet alone, a film or sheet is formed on a support, then is peeled off from the support.
- the film shaped or sheet shaped article of the curable composition is bonded on the board usually by superposing a film shaped or sheet shaped article with a support on the board so that the shaped article contacts the conductive circuit layer “a” then using a pressure laminator, press, vacuum laminator, vacuum press, roll laminator, or other pressing machine to hot press (laminate) them and bond the two so that substantially no space is present at the interface of the board surface and the shaped article.
- the hot pressing is preferably performed under reduced pressure so as to improve the embedding of interconnects in the shaped article and suppress the formation of bubbles.
- the temperature at the time of hot pressing is usually 30 to 250° C., preferably 70 to 200° C.
- the pressing force is usually 10 kPa to 20 MPa, preferably 100 kPa to 10 MPa
- the pressing time is usually 30 seconds to 5 hours, preferably 1 minute to 3 hours
- the atmosphere is reduced in pressure to usually 100 kPa to 1 Pa, preferably 40 kPa to 10 Pa.
- the shaped articles which are bonded to the board may be two or more articles.
- the shaped articles which are used maybe of the same type or may be of mutually different types.
- step A2 When using (step A2) to form the resin layer, it is sufficient to directly coat and dry a varnish of the above-mentioned curable composition on the board.
- the methods and conditions etc. of coating and drying may be similar to those when forming the film shaped or sheet shaped articles of a curable composition.
- the resin layer may be formed on both sides of the board or may be fanned on only one side.
- warping occurred remarkably in a multilayer circuit board which is fanned by laminating an electrical insulating layer and a conductive circuit layer on only one side of the board, so the method of production of the multilayer circuit board of the present invention is extremely suitable for forming the resin layer at only one side of the board to produce a multilayer circuit board.
- a curing agent (II) which can substantially cure a heat curable resin at a temperature at which the curing agent (I) substantially cannot cure a heat curable resin is brought into contact with the surface of the resin layer which is formed on the board at step A, then the resin layer after being brought into contact with the curing agent (II) is heated at a temperature at which the curing agent (I) substantially cannot cure the heat curable resin and the curing agent (II) substantially can cure the heat curable resin.
- the temperature at which it substantially cannot cure a heat curable resin means a temperature of usage of the curing agent which substantially cannot cure a heat curable resin.
- “it substantially can cure a heat curable resin” means that when heating a heat curable resin in the presence of the curing agent at a predetermined temperature for 1 hour, the reduction in weight due to the amount of dissolution after heating of the heat curable resin in a solvent to which the uncured. heat curable resin exhibits solubility compared with the amount of dissolution before heating in that solvent is 95 wt % or more.
- the temperature at which it substantially can cure a heat curable resin means a temperature of usage of the curing agent which substantially can cure a heat curable resin.
- a curing agent (I) and curing agent (II) are used.
- the above temperature region of the curing agent (I) is at the high temperature side, while the above temperature region of the curing agent (II) is at the low temperature side.
- the resin layer brought into contact with the curing agent (II) is heated, but under the heating conditions at this time, usually the heat curable resin does not substantially exhibit fluidity, but maintains the obtained shape as a resin layer which partially cures at the part in contact with the curing agent (II) (preliminary curing), then, at step C, the resin layer is further heated and is made to substantially completely cure due to the curing agent (I) (main curing) to form the electrical insulating layer.
- the resin layer maintains its shape by the preliminary curing at step B, for example, even if a temperature difference occurs at the time of the main curing (high temperature) and the time of storage of the multilayer circuit board (room temperature), the obtained electrical insulating layer is small in deformation. As a result, in the multilayer circuit board of the present invention, it is believed that warping does not occur.
- a curing agent (II) is brought into contact with the surface of the resin layer which was formed on the board at step A.
- a curing agent (II) is brought into contact with the surface of the resin layer.
- the curing agent (II) which is used in the present invention is not particularly limited, but from the viewpoint of effectively performing preliminary curing, at last one agent selected from the group comprised of a polysulfide; polymercaptan; polyamide; imidazole; and a chain aliphatic polyamine, cyclic aliphatic polyamine, aliphatic-aromatic amine, aromatic amine, and complexes of these amines is preferably used, while a chain aliphatic polyamine is more preferably used.
- the chain aliphatic polyamine for example, diethylenetriamine, triethylenetetramine, tetraethylenepentamine, diproprenediamine, diethylaminopropylamine, hexamethylenediamine, etc.
- cyclic aliphatic polyamine for example, N-aminoethylpiperadine etc. may be mentioned.
- aliphatic-aromatic amine for example, xylenediamine, a xylenediamine trimer (for example, “Amine Black” or “Sho-Amine Black” made by Showa Denko), xylenediamine derivative (for example, “Sho-Amine N”, “Sho-Amine 1001”, and “Sho-Amine 1010” made by Showa Denko), etc.
- aromatic amine for example, metaphenylenediamine, diaminodiphenylmethane, etc. may be mentioned. These may be respectively used alone or as two or more types combined.
- the temperature region at which the curing agent (II) substantially can cure the heat curable resin is usually 20° C. or more and less than 150° C. in range.
- the method of bringing the curing agent (II) into contact with the resin layer surface is not particularly limited.
- the dip method of dissolving the curing agent (II) in water or an organic solvent to form a solution, then dipping the board on which the resin layer is formed in the obtained solution, the spray method of coating that solution on the surface of the resin layer on the board by spraying etc. may be mentioned.
- To make the curing agent (II) contact the resin layer surface from the viewpoint of effectively performing preliminary curing, it is preferable to dip the board on which the resin layer is formed into an aqueous solution of the curing agent (II). Further, it is preferable to perform this operation substantially for the resin layer surface as a whole.
- the contact operation may be performed once or two or more times repeatedly.
- the temperature at the time of contact may be freely selected considering the temperature region at which the curing agent (II) substantially can cure the heat curable resin, the boiling point of the solvent of the solution, etc., but is usually 10 to 100° C., preferably 15 to 65° C. in range.
- the dipping time may be suitably selected in accordance with the concentration etc. of the curing agent (II) solution, but is usually 0.1 to 360 minutes, preferably 0.1 to 60 minutes.
- the solvent which can be used for preparation of the solution of the curing agent (II) is not limited so long as the resin layer is not easily dissolved and the curing agent (II) is dissolved in it.
- water; diethylether or other ether; ethanol, isopropanol, or other alcohol; acetone or other ketone; ethyl cellosolve acetate or other cellosolve; or other polar solvent and their mixtures may be mentioned.
- the solution of the curing agent (II) is not particularly limited in the concentration of the curing agent (II), but from the viewpoint of effectively performing the preliminary curing, it is usually 0.001 to 70 wt %, preferably 0.01 to 50 wt %.
- the contact operation can also be performed with the curing agent (II) as is without particularly dissolving it in a solvent.
- any surfactant etc. as an ingredient other than the curing agent (II) into the solution of the curing agent (II) from the viewpoint of improving the wettability of the curing agent (II) and the resin layer surface.
- the amount of the ingredients other than the curing agent (II) is usually 10 wt % or less, preferably 5 wt % or less, more preferably 1 wt % or less.
- the curing agent (II) is made to contact the surface of the resin layer, then the resin layer is heated.
- the heating is performed at a temperature at which the curing agent (I) substantially cannot cure the heat curable resin and the curing agent (II) can substantially cure the heat curable resin, but the heating temperature is usually 20° C. or more and less than 150° C. Further, the heating time is usually 0.1 to 5 hours, preferably 0.5 to 3 hours.
- the resin layer may be heated (i) by maintaining a constant temperature for a certain time, (ii) by performing the heating of the (i) in a certain temperature region in a combination of multiple stages, (iii) by raising the temperature from the lower limit to the upper limit of a certain temperature region steadily or irregularly over a certain time, or (iv) by suitably combining the (i) to (iii).
- the resin layer is preferably heated by the above (iv).
- the heating method is not particularly limited. For example, an oven etc. may be used.
- step B the preliminarily cured resin layer is heated and cured at the temperature at which the curing agent (I) can substantially cure the heat curable resin so as to form the electrical insulating layer.
- the resin layer is usually cured by heating the resin layer (board as a whole on which resin layer is formed).
- the curing conditions maybe suitably selected in accordance with the curing agent (I), but the heating temperature of the resin layer is usually 150 to 300° C. and the heating time is usually 0.1 to 5 hours, preferably 0.5 to 3 hours.
- the resin layer is heated as in the above (i) to (iv) in the same way as the heating of the resin layer after making the curing agent (II) contact its surface at step B, but from the viewpoint of effectively performing the main curing, heating by the above (i) is preferable.
- the heating method is not particularly limited. For example, it may be performed using an oven etc.
- the resin layer is substantially completely cured and an electrical insulating layer is formed.
- the electrical insulating layer is not particularly limited in thickness, but is usually 1 to 50 ⁇ m.
- the multilayer circuit board of the present invention is produced.
- substantially no warping occurs.
- “substantially” means an extent not posing a problem in practical use.
- the electrical insulating layer which is formed on the conductive circuit layer “a” of the board may be further provided with a conductive circuit layer “b”. In this case, it forms openings for forming via holes in the electrical insulating layer in order to connect the conductive circuit layer “a” and the conductive circuit layer “b” before forming the conductive circuit layer “b”. From the viewpoint of being able to form finer via holes without causing a drop in the characteristics of the electrical insulating layer, a method using a CO 2 gas laser, excimer laser, UV-YAG laser, or other laser is preferable.
- the method of forming the conductive circuit layer “b” on the electrical insulating layer which is formed on the board (below, sometimes referred to as the “electrical insulating layer ‘b’ ”)
- the method of forming the electrical insulating layer “b”, then forming the metal thin film layer on it and, furthermore, using electroplating or other wet plating to grow the plating and form the conductive circuit layer may be mentioned.
- the openings for formation of via holes in the electrical insulating layer “b” are usually formed before forming the metal thin film layer.
- the metal thin film layer may be formed by the electroless plating method, sputtering method, vacuum deposition method, etc.
- the electroless plating method or sputtering method is preferably used.
- the metal thin film layer is formed on the surface of the electrical insulating layer “b” and on the inner wall surface of the opening for formation of the via hole use.
- a plating resist is formed on the metal thin film layer, the plating is grown, then the plating resist is removed and, furthermore, etching is used to etch the metal thin film layer and form the conductive circuit layer “b”.
- This conductive circuit layer “b” is usually comprised of a metal thin film layer and plating grown on top of it.
- the present invention even if forming a multilayer circuit on one side of the board, it is possible to obtain a multilayer circuit board which is substantially free of warping. For this reason, as the method of forming the multilayer circuit on the silicon wafer board in the “wafer level package (WLP)” art of directly forming the multilayer circuit on the silicon wafer board before dicing into individual chips so as to keep the areas of the packages equal to the chips, the method of production of the multilayer circuit board of the present invention is particularly suitable.
- WLP wafer level package
- the multilayer circuit board of the present invention can be used as a printed circuit board for mounting a CPU, memory, other semiconductor device, or other mounted part in a computer, mobile phone, or other electronic device.
- a board which has microinterconnects is suitable as a high density printed circuit board in a high speed computer or a mobile computer used at the high frequency region.
- Amount of Monomer in Polymerization Solution A polymerization solution was diluted by tetrahydrofuran and measured by gas chromatography (GC) to find the amount of monomer in the polymerization solution.
- the hydrogenation rate means the ratio of the number of moles of unsaturated bonds which are hydrogenated to the number of moles of unsaturated bonds in the polymer before hydrogenation and was found by 400 MHz 1H-NMR spectroscopy.
- Viscosity of Varnish E-type viscometer used to measure dynamic viscosity at 25° C.
- a multilayer board comprised of a board on one surface of which an insulating layer is formed is placed on a flat surface with its projecting surface downward, and the distance from the flat surface to the end of the multilayer board which rises due to warping the most is measured as the amount of warping of the board.
- EdNB 5-ethylidene-bicyclo[2.2.1]hept-2-ene
- 1-hexene 0.9 molar part 1-hexene 0.9 molar part
- anisole 340 molar parts and a ruthenium-based polymerization catalyst constituted by 4-acetoxybenzylidene(dichloro)(4,5-dibromo-1,3-dimesityl-4-imidazolin-2-ylidene)(tricyclohexylphosphine)ruthenium (C1063, made by Wako Pure Chemical Industries) 0.005 part were charged into a pressure resistant glass reactor with an inside substituted with nitrogen.
- a polymerization reaction was performed under stirring at 80° C. for 30 minutes to obtain a solution of an ring-opening polymer of a norbornene-based monomer (below, referred to as a norbornene-based ring-opening polymer).
- MTF 70 molar parts, NDCA 30 molar parts, 1-hexene 0.9 molar part, anisole 590 molar parts, and C1063: 0.015 molar part were charged into a pressure resistant glass reactor with an inside substituted with nitrogen.
- a polymerization reaction was performed under stirring at 80° C. for 1 hour to obtain a solution of a norbornene-based ring-opening polymer. This solution was measured by gas chromatography, whereupon it was confirmed that substantially no monomer remained.
- the polymerization conversion rate was 990 or more.
- MTF 70 molar parts, NDCA 30 molar parts, 1-hexene 6 molar parts, anisole 590 molar parts, and C1063: 0.015 molar part were charged into a pressure resistant glass reactor with an inside substituted with nitrogen.
- a polymerization reaction was performed under stirring at 80° C. for 1 hour to obtain a solution of a norbornene-based ring-opening polymer. This solution was measured by gas chromatography, whereupon it was confirmed that substantially no monomer remained.
- the polymerization conversion rate was 990 or more.
- the obtained polymer (A-3) had a weight average molecular weight of 10,000, a number average molecular weight of 5,000, and a molecular weight distribution of 2. Further, the hydrogenation rate was 97%, while the content of the repeating units which have carboxylic acid anhydrides was 30 mol %.
- the solution of the polymer (A-3) had a solid content concentration of 55%.
- spherical silica (Admafine (registered trademark) SO-C1, made by Admatechs, volume average particle size 0.25 ⁇ m) 40%
- the polymer (A-2) 2% in anisole were mixed and stirred by a planetary stirrer for 3 minutes.
- a curing agent (I) constituted by a polyfunctional epoxy resin (1032H60, made by Mitsubishi Chemical, epoxy equivalent 163 to 175) dissolved in anisole to 70%: 4.5 parts
- a curing accelerator constituted by a solution of 1-(2-aminoethyl)-2-methyl-1H-imidazole dissolved in anisole to 1%: 70 parts was mixed and stirred by a planetary stirrer for 5 minutes to obtain a varnish of a curable composition (B-1).
- the varnish had a viscosity of 230 mPa ⁇ sec.
- a surface treated spherical silica Admafine SC-2500-SXJ, made by Admatechs, treated by amino silane type silane coupling agent
- a curing agent (I) constituted by a fluorene-based epoxy resin (Ogsol (registered trademark) PG-100, made by Osaka Gas Chemicals, epoxy equivalents 163 to 175) 123 parts, a bisphenol A type epoxy resin (Epicoat (registered trademark) 828EL, made by Mitsubishi Chemical, epoxy equivalents 184 to 194) 28 parts, a polyfunctional epoxy resin 1032H60: 23 parts, an antiaging agent constituted by tris(3,5-di-t-butyl-4-hydroxybenzyl)-isocyanulate 1 part, a dicyclopentadiene type novolac resin (GDP-6095LR, made by Gunei Chemical Industry) 81 parts, and a solution of CP-002 (mixture of fluorene-based phenol monomer and bisphenol A, made by Osaka Gas Chemicals) dissolved in anisole to 50%: 60 parts were mixed and stirred by a planetary stirrer for 3 minutes.
- a curing accelerator constituted by a solution of 1-benzyl-2-phenylimidazole dissolved in anisole to 5%: 25 parts was mixed. The mixture was stirred by a planetary stirrer for 5 minutes to obtain a varnish of a curable composition (B-2). The varnish had a viscosity of 2300 mPasec.
- a varnish of the curable composition (B-1) was coated on a thickness 100 ⁇ m polyethylene terephthalate film (support) using a wire bar, next, this was dried in a nitrogen atmosphere at 130° C. for 90 seconds to obtain a supported film (C-1) formed with a resin layer of a thickness of the uncured curable composition (B-1) of 3 ⁇ m.
- the surface of the curable composition (B-1) of the supported film (C-1) was coated with a varnish of the curable composition (B-2) using a doctor blade (made by Tester Sangyo) and auto film applicator (made by Tester Sangyo), next, this was dried under a nitrogen atmosphere at 80° C. for 10 minutes to obtain a supported film (C-2) formed with a resin layer of a total thickness of the curable composition of 13 ⁇ m.
- the supported film (C-2) was formed in the order of the support, the resin layer of the curable composition (B-1), and the resin layer of the curable composition (B-2).
- the above obtained supported film (C-2) was superposed so that the surface of the resin layer of the curable composition (B-2) overlaid the board.
- This assembly was reduced in pressure using a vacuum laminator provided with heat resistant rubber press plates at the top and bottom (made by Meiki Co., ltd) at a vacuum degree of 13 hPa or less for 30 seconds, then hot pressed by the heat resistant rubber press plates at a pressing temperature of 110° C. and a pressing pressure of 0.1 MPa for 60 seconds (primary pressing).
- a hydraulic press device provided with metal press plates at the top and bottom was used to hot press the assembly at a pressing temperature 110° C. by 1 MPa for 90 seconds (secondary pressing).
- the support was peeled off to obtain a laminate of a resin layer of a curable composition and a board.
- This laminate was dipped in a curing agent (II) constituted by triethylenetetramine (hereinafter, abbreviated as “TETA”) in a 5% aqueous solution at 25° C. for 1 hour, then the excess solution was removed by an air gun.
- TETA triethylenetetramine
- the laminate was placed with the board side down on an oven plate and was raised in temperature and heated in an oven (INH-9C2, made by Koyo Lindberg) from 60 to 120° C. over 1 hour. Next, this was heated at 120° C. for 30 minutes, then raised in temperature and heated from 120 to 180° C. for 1 hour. Furthermore, this was heated at 180° C. for 30 minutes and the resin layer of the curable composition was cured to obtain a multilayer board on which an insulating layer was formed.
- the obtained laminated board was measured for the amount of warping, whereupon the amount of warping was 1.5 mm. The results are shown in Table 1.
- Example 1 Except for using ion exchanged water instead of TETA 5% aqueous solution, the same method was followed as in Example 1 to obtain a laminated board formed with an insulating layer. Note that, the total thickness of the resin layer was 14 ⁇ m. The obtained laminated board was measured for the amount of warping, whereupon the amount of warping was 2.5 mm. The results are shown in Table 1.
- Example 1 Except for dipping the laminate of the resin layer of the curable composition and board in a TETA 5% aqueous solution, then heating by an oven at 180° C. for 60 minutes to cause the resin layer to completely cure without multiple stages of heat treatment, the same method was followed as in Example 1 to obtain a laminated board formed with an insulating layer. Note that, the total thickness of the resin layer was 14 ⁇ m. The obtained laminated board was measured for the amount of warping, whereupon the amount of warping was 3 mm. The results are shown in Table 1.
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
- The present invention relates to a method of production of a multilayer circuit board. More particularly, it relates to a method of production of a multilayer circuit board which is substantially free from warping.
- Along with the increasingly small size and greater number of functions of electronic devices, the circuit boards which are used for electronic devices are also being required to be made higher in density. To make circuit boards higher in density, the general practice is to make the circuit boards multilayered. Such multilayer circuit boards, for example, are comprised of an inner layer board in which a conductive circuit layer is formed on the outermost surface, an electrical insulating layer laminated on its surface, and a conductive circuit layer which is further formed on the electrical insulating layer. If desired, several electrical insulating layers and conductive circuit layers may be laminated.
- In such a multilayer circuit board, to extend the lifetime of the circuit board and secure the reliability, the bondability between the electrical insulating layer and the conductive circuit layer which is formed on it is important. As art for improving the bondability, for example, Patent Document 1 discloses a method of production of a multilayer circuit board on which at least an insulating resin layer and a conductor interconnect layer are formed comprising forming a foundation layer which contains a coordination polymer complex between the insulating resin layer and conductor interconnect layer. Further, Patent Document 2 discloses a method of production of a multilayer circuit board comprising forming on an inner layer board which has an outermost layer of a conductive circuit layer 1 an uncured or semicured resin layer by using a curable composition which contains an insulating polymer and a curing agent (step A), then bringing a compound which has a structure which can coordinate with a metal into contact with the surface of that resin layer (step B), next curing that shaped member to form an electrical insulating layer “b” (step C), forming a metal thin film layer on the surface of this electrical insulating layer “b” (step D), then forming a conductive circuit layer 2 including that metal thin film layer (step E).
- Patent Document 1: Japanese Patent Publication No. 2001-345554
- Patent Document 2: Japanese Patent Publication No. 2003-158373
- The inventors followed the methods described in the above patent documents to obtain multilayer circuit boards whereupon they failed to find any practical problem in the bonding of the electrical insulating layer and the conductive circuit layer. In each method, however, it became clear that when laminating an electrical insulating layer and a conductive circuit layer on one side of an inner layer board to obtain a multilayer circuit board, the board ends up warping and, for example, sometimes becomes unsuitable for mounting on a mother board. Therefore, the object of the present invention is to provide a method of production of a multilayer circuit board which is substantially free of warping.
- The inventors engaged in an in-depth study to solve the above problem and as a result discovered that in a multilayer circuit board obtained by forming an uncured resin layer which contains a heat curable resin and a curing agent (I) on a board, bringing a curing agent (II) which functions at a lower temperature than the curing agent (I) into contact with that surface, then heating the resin layer at a temperature at which the curing agent (II) expresses its function, then raising the temperature to complete the curing of the resin layer by the curing agent (I) and form the electrical insulating layer, substantially no warping occurs and thereby completed the present invention.
- That is, according to the present invention, there are provided:
- [1] A method of production of a multilayer circuit board comprising using a curable composition which contains a heat curable resin and curing agent (I) to form an uncured or semicured resin layer on a board (step A), then bringing a curing agent (II) able to substantially to cure the heat curable resin at a temperature at which the curing agent (I) cannot substantially cure the heat curable resin into contact with the surface of the resin layer, then heating the resin layer at a temperature at which the curing agent (I) cannot substantially cure the heat curable resin and the curing agent (II) can substantially cure the heat curable resin (step B), next heating and curing the resin layer at a temperature at which the curing agent (I) can substantially cure the heat curable resin to form an electrical insulating layer (step C).
- [2] The method of production of the multilayer circuit board as set forth in [1] wherein, at step A, the uncured or semicured resin layer is formed by bonding a film shaped or sheet shaped article of the curable composition to the surface of the board.
- [3] The method of production of the multilayer circuit board as set forth in [1] or [2], wherein at step A, the uncured or semicured resin layer is formed at only one surface of the board.
- [4] The method of production of the multilayer circuit board as set forth in any one of [1] to [3], wherein, at step B, contact of the curing agent (II) with the resin layer surface is performed by dipping a board on which a resin layer is formed in an aqueous solution of the curing agent (II).
- [5] The method of production of the multilayer circuit board as set forth in any one of [1] to [4], wherein the heat curable resin is at least one type of resin which is selected from the group comprised of an epoxy resin, maleimide resin, (meth)acrylic resin, diallylphthalate resin, triazine resin, alicyclic olefin polymer, aromatic polyether polymer, benzocyclobutene polymer, cyanate ester polymer, liquid crystal polymer, and polyimide.
- [6] The method of production of the multilayer circuit board as set forth in any one of [1] to [5], wherein the curing agent (I) is at least one type of agent which is selected from the group comprised of a polyhydric epoxy compound, dicarboxylic acid derivative, and polyol compound.
- [7] The method of production of the multilayer circuit board as set forth in any one of [1] to [6], wherein the curing agent (II) is at least one type of agent which is selected from the group comprised of a polysulfide; polymercaptan; polyamide; imidazole; and chain aliphatic polyamine, cyclic aliphatic polyamine, aliphatic-aromatic amine, aromatic amine, and complexes of these amines.
- [8] A multilayer circuit board which is produced by the method of production of the multilayer circuit board as set forth in any one of [1] to [7].
- According to the present invention, it is possible to efficiently produce a multilayer circuit board with substantially no warping.
- The method of production of the multilayer circuit board of the present invention has as one major characteristic using two types of curing agents which differ in temperature regions suitable for expression of their functions and heating and curing the resin layer at least at two stages of temperature to form an electrical insulating layer.
- The method of production of the multilayer circuit board of the present invention has the following three steps:
- (Step A) A step of using a curable composition which contains a heat curable resin and a curing agent (I) to form an uncured or semicured resin layer on a board.
- (Step B) A step of bringing a curing agent (II) able to substantially to cure the heat curable resin at a temperature at which the curing agent (I) cannot substantially cure the heat curable resin into contact with the resin layer surface, then heating the resin layer at a temperature at which the curing agent (I) cannot substantially cure the heat curable resin and a temperature at which the curing agent (II) can substantially cure the heat curable resin.
- (Step C) A step of heating the resin layer to cure at a temperature at which the curing agent (I) can substantially cure the heat curable resin so as to form an electrical insulating layer.
- The steps will be explained in detail below:
- (Step A)
- The board which is used at step A is not particularly limited, but usually a board on which a conductive circuit layer “a” is formed on one or both surfaces of an electrical insulating layer “a” is used. As specific examples of the board, a printed circuit board, silicon wafer board, glass board, or other board comprised of an electrical insulating layer and conductive circuit layer formed on the surface of that may be mentioned. The thickness of the board is usually 50 μm to 2 mm, preferably 60 μm to 1.6 mm, more preferably 100 μm to 1 mm.
- In a printed circuit board, the electrical insulating layer “a” which forms the board is mainly comprised of a heat curable resin which has an electrical insulating property. The heat curable resin is not particularly limited, but, for example, an alicyclic olefin polymer, epoxy resin, maleimide resin, (meth)acrylic resin, diallylphthalate resin, triazine resin, aromatic polyether polymer, cyanate ester polymer, and polyimide, etc. may be mentioned. Usually, the curable composition which contains the heat curable resin and the curing agent is cured to obtain an electrical insulating layer “a”. Further, the board may contain a glass fiber, resin fiber, etc. in the electrical insulating layer “a” from the viewpoint of improvement of the strength. The material of the conductive circuit layer “a” which forms the board is usually a conductive metal.
- On the above such board, a curable composition which contains a heat curable resin and a curing agent (I) is used to form an uncured or semicured resin layer.
- Here, the “uncured resin layer” means a state in which substantially all of the resin layer can be dissolved in a solvent in which the heat curable resin which forms the resin layer can be dissolved. A “semicured resin layer” means a state where the resin is cured to an extent in which it can be further cured by heating and a state in which part is dissolved in a solvent in which the heat curable resin which forms the resin layer can be dissolved.
- The method for forming the resin layer on the board is not especially limited, but the method of bonding a film shaped or sheet shaped article of a curable composition which contains a heat curable resin and curing agent (I) to the surface of the board, in particular so as to contact the conductive circuit layer “a” of the board, to form an uncured or semicured resin layer (step A1) and a method of coating a board with a curable composition which contains a heat curable resin and curing agent (I) and drying it to form an uncured or semicured resin layer (step A2) may be mentioned. The planar uniformity of the bonding with the conductive circuit layer which is formed as desired on the electrical insulating layer which is obtained by curing the resin layer becomes higher, so (step A1) is preferably used for forming the resin layer.
- When using (step A1) for forming the resin layer, to improve the bonding between the board on which the conductive circuit layer “a” is formed and the electrical insulating layer which is formed by curing the resin layer, before bonding the film shaped or sheet shaped article of the curable composition, the surface of the board on which the conductive circuit layer “a” is formed is preferably pretreated. As the pretreatment, the method of bringing an alkaline sodium hypochlorite aqueous solution, permanganic acid, etc. into contact with the board surface to coarsen the surface, the method of using an alkaline potassium permanganate aqueous solution, potassium sulfide-ammonium chloride aqueous solution, etc. to oxidize a surface, then reduce it, the method of plating and coarsening the conductive circuit layer part of the board, the method of using a thiol compound, silane compound, etc. to form a primer layer, etc. may be mentioned. Among these as well, the method of forming a primer layer using 2-di-n-butylamino-4,6-dimercapto-s-triazine or other thiol compound is preferable since when the conductive circuit layer “a” is made of copper, there is no corrosion of copper and a high bonding is obtained.
- The heat curable resin which forms the curable composition which is used for forming the resin layer is not limited so long as being one which exhibits heat curing property in combination with a curing agent and which has an electric insulating ability. For example, an epoxy resin, maleimide resin, (meth)acrylic resin, diallylphthalate resin, triazine resin, alicyclic olefin polymer, aromatic polyether polymer, benzocyclobutene polymer, cyanate ester polymer, and polyimide etc. may be mentioned. These resins may be used alone or in two or more types in combination. Among these as well, an alicyclic olefin polymer, aromatic polyether polymer, benzocyclobutene polymer, cyanate ester polymer, and polyimide is preferable, an alicyclic olefin polymer and aromatic polyether polymer are more preferable, and an alicyclic olefin polymer is particularly preferable. In addition to these polymers, a liquid crystal polymer may also be used as a preferable heat curable resin. As the liquid crystal polymer, a polymer of an aromatic or aliphatic dihydroxy compound, a polymer of an aromatic or aliphatic dicarboxylic acid, a polymer of an aromatic hydroxycarboxylic acid, a polymer of an aromatic diamine, aromatic hydroxyamine, aromatic amino carboxylic acid, etc. may be illustrated. Note that, in this description, “(meth)acrylic” means methacrylic or acrylic.
- The heat curable resin is not especially limited in weight average molecular weight (Mw), but it is usually 1,000 to 1,000,000, preferably 3,000 to 500,000, more preferably 4,000 to 300,000. When forming a conductive circuit layer on an electrical insulating layer obtained by curing a resin layer and performing electroless plating, coarsening of the electrical insulating layer due to this pretreatment is suppressed, so a heat curable resin ingredient with a weight average molecular weight (Mw) of 1,000 to 1,000,000 is preferably included in a ratio, with respect to the heat curable resin which is contained in the curable composition as well, of preferably 10 wt % or more, more preferably 15 wt % or more. Note that, the upper limit of this ratio is 100 wt %, that is, the entire amount of the heat curable resin which is contained in the curable composition may be comprised of a heat curable resin ingredient with a weight average molecular weight (Mw) of 1,000 to 1,000,000. As the heat curable resin, one with a weight average molecular weight (Mw) of less than 1,000 or one with over 1,000,000 may also be contained. In this description, the weight average molecular weight (Mw) is the weight average molecular weight converted to polystyrene which is measured by gel permeation chromatography (GPC) using tetrahydrofuran as the eluent.
- An alicyclic olefin polymer is a polymer of an unsaturated hydrocarbon which has an alicyclic structure. As the alicyclic structure, a cycloalkane structure, cycloalkene structure, etc. may be mentioned, but the obtained electrical insulating layer is improved in mechanical strength, heat resistance, etc., so a cycloalkane structure is preferable. Further, as the alicyclic structure, any one of a monocyclic structure and polycyclic structure (condensed polycyclic structure, bridged cyclic structure, combination polycyclic structure of the same, etc.) is possible. The number of carbon atoms which form the alicyclic structure is not particularly limited, but is usually 4 to 30, preferably 5 to 20, more preferably 5 to 15 in range. At this time, the formability of the curable composition and the mechanical strength and heat resistance of the obtained electrical insulating layer and other such properties are balanced to a high degree.
- The alicyclic olefin polymer is preferably one which has a polar group. As the polar group, a hydroxyl group, carboxyl group, alkoxyl group, epoxy group, glycidyl group, oxycarbonyl group, carbonyl group, amino group, ester group, and carboxylic acid anhydride group, etc. may be mentioned. In particular, a carboxyl group and carboxylic acid anhydride group are preferable. The content of the repeating units which have polar groups in 100 mol % of the total repeating units which form the alicyclic olefin polymer is not particularly limited, but is usually 5 to 60 mol %, preferably 10 to 50 mol %. Note that, the number of polar groups which are present in the repeating units is not particularly limited, but usually is preferably 1 to 2.
- An alicyclic olefin polymer is usually obtained by addition polymerization or ring opening polymerization of an alicyclic olefin monomer and, as desired, by hydrogenation of the unsaturated bond part or by addition polymerization of an aromatic olefin monomer and hydrogenation of the aromatic ring part of the obtained polymer. Further, an alicyclic olefin polymer which has polar groups is obtained by, for example, 1) introduction of polar groups to the alicyclic olefin polymer by a denaturation reaction, 2) copolymerization using a monomer having polar groups as a copolymerization ingredient, or 3) copolymerization using a monomer containing ester groups or other polar groups as a copolymerization ingredient, then hydrolysis of the ester group etc. In the case of the above 1), it is possible to adjust the amount of introduction of polar groups, while in the case of the above 2) and 3), it is possible to suitably use a monomer which does not have the desired polar groups at the time of polymerization so as to adjust the content of repeating units which have polar groups in the alicyclic olefin polymer. In this description, “alicyclic olefin monomer” means a monomer which has carbon-carbon double bonds in the alicyclic structure, while “aromatic olefin monomer” means a monomer which is comprised of aromatic groups and a chain hydrocarbon which has carbon-carbon double bonds.
- As the alicyclic olefin monomer which is used for obtaining an alicyclic olefin polymer, bicyclo[2.2.1]-hept-2-ene (common name: norbornene), 5-methyl-bicyclo[2.2.1]-hept-2-ene, 5,5-dimethyl-bicyclo[2.2.1]-hept-2-ene, 5-ethyl-bicyclo[2.2.1]-hept-2-ene, 5-butyl-bicyclo[2.2.1]-hept-2-ene, 5-hexyl-bicyclo[2.2.1]-hept-2-ene, 5-octyl-bicyclo[2.2.1]-hept-2-ene, 5-octadecyl-bicyclo[2.2.1]-hept-2-ene, 5-ethylidene-bicyclo[2.2.1]-hept-2-ene, 5-methylidene-bicyclo[2.2.1]-hept-2-ene, 5-vinyl-bicyclo[2.2.1]-hept-2-ene,
- 5-propenyl-bicyclo[2.2.1]-hept-2-ene, 5-methoxy-carbonyl-bicyclo[2.2.1]-hept-2-ene, 5-cyano-bicyclo[2.2.1]-hept-2-ene, 5-methyl-5-methoxycarbonyl-bicyclo[2.2.1]-hept-2-ene, 5-ethoxycarbonyl-bicyclo[2.2.1]-hept-2-ene, bicyclo[2.2.1]-hept-5-enyl-2-methylpropionate, bicyclo[2.2.1]-hept-5-enyl-2-methyloctanate,
- bicyclo[2.2.1]-hept-2-ene-5,6-dicarboxylic acid anhydride, 5-hydroxymethylbicyclo[2.2.1]-hept-2-ene, 5,6-di(hydroxymethyl)-bicyclo[2.2.1]-hept-2-ene, 5-hydroxy-i-propylbicyclo[2.2.1]-hept-2-ene, 5,6-dicarboxy-bicyclo[2.2.1]-hept-2-ene, bicyclo[2.2.1]-hept-2-ene-5,6-dicarboxylic acid imide, 5-cyclopentyl-bicyclo[2.2.1]-hept-2-ene, 5-cyclohexyl-bicyclo[2.2.1]-hept-2-ene, 5-cyclohexenyl-bicyclo[2.2.1]-hept-2-ene, 5-phenyl-bicyclo[2.2.1]-hept-2-ene,
- tricyclo[4.3.0.12,5]deca-3,7-diene (common name: dicyclopentadiene), tricyclo[4.3.0.12,5]deca-3 -ene, tricyclo[4.4.0.12,5]undeca-3,7-diene, tricyclo[4.4.0.12,5]undeca-3,8-diene, tricyclo[4.4.0.12,5]undeca-3-ene, tetracyclo[7.4.0.110,13.02,7]-trideca-2,4,6-11-tetraene (other name: 1,4-methano-1,4,4a,9a-tetrahydrofluorene), tetracyclo[8.4.0.111,14.03,8]-tetradeca-3,5,7,12,11-tetraene (other name: 1,4-methano-1,4,4a,5,10,10a-hexahydroanthracene),
- tetracyclo[4.4.0.12,5.27,10]-dodeca-3-ene (common name: tetracyclododecene), 8-methyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-ethyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-methylidene-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-ethylidene-tetracyclo[4,4,0.1 2,5.17,10]-dodeca-3-ene, 8-vinyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-propenyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-methoxycarbonyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-methyl-8-methoxycarbonyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-hydroxymethyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-carboxy-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene,
- 8-cyclopentyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-cyclohexyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-cyclohexenyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, 8-phenyl-tetracyclo[4.4.0.12,5.17,10]-dodeca-3-ene, pentacyclo[6.5.1.13,6.02,7.09,13]pentadeca-3,10-diene, pentacyclo[7.4.0.13,6.110,13.02,7]-pentadeca-4,11-diene, or other such norbornene-based monomer;
- cyclobutene, cyclopentene, cyclohexene, 3,4-dimethylcyclopentene, 3-methylcyclohexene, 2-(2-methylbutyl)-1-cyclohexene, cyclooctene, 3a,5,6,7a-tetrahydro-4,7-methano-1H-indene, cycloheptene, or other such monocyclic cycloalkene-based monomer; vinylcyclohexene, vinylcyclohexane, or other such vinyl-based alicyclic hydrocarbon-based monomer; cyclopentadiene, cyclohexadiene, or other such alicyclic conjugated diene-based monomer; etc. may be mentioned.
- As the aromatic olefin monomer, styrene, α-methylstyrene, and divinylbenzene, etc. may be mentioned.
- The alicyclic olefin monomer and/or aromatic olefin monomer may be respectively used alone or in two or more types combined.
- The alicyclic olefin polymer may be obtained by copolymerization of the alicyclic olefin monomer and/or aromatic olefin monomer and monomers able to copolymerize with these monomers.
- As a monomer able to copolymerize with the alicyclic olefin monomer or aromatic olefin monomer, ethylene; propylene, 1-butene, 1-pentene, 1-hexene, 3-methyl-1-butene, 3-methyl-1-pentene, 3-ethyl-1-pentene, 4-methyl-1-pentene, 4-methyl-1-hexene, 4,4-dimethyl-1-hexene, 4,4-dimethyl-1-pentene, 4-ethyl-1-hexene, 3-ethyl-1-hexene, 1-octene, 1-decene, 1-dodecene, 1-tetradecene, 1-hexadecene, 1-octadecene, 1-eicosene, or other C3 to C20 α-olefin; 1,4-hexadiene, 4-methyl-1,4-hexadiene, 5-methyl-1,4-hexadiene, 1,7-octadiene, or other nonconjugated diene; etc. may be mentioned. These monomers may be respectively used alone or in two or more types combined.
- The polymerization of the alicyclic olefin monomer or the aromatic olefin monomer and the hydrogenation of the obtained polymer which is performed as desired are not particularly limited and may be performed by a known method.
- As specific examples of an alicyclic olefin polymer, an ring-opening polymer of a norbornene-based monomer and its hydrogenate, an addition polymer of a norbornene-based monomer, an addition polymer of a norbornene-based monomer and vinyl compound, a monocyclic cycloalkene polymer, alicyclic conjugated diene polymer, vinyl-based alicyclic hydrocarbon polymer and its hydrogenate, hydrogenate obtained by hydrogenating aromatic ring of an aromatic olefin polymer, etc. may be mentioned. Among these as well, a ring-opening polymer of a norbornene-based monomer and its hydrogenate, an addition polymer of a norbornene-based monomer, an addition polymer of norbornene-based monomer and vinyl compound, and an aromatic cyclic hydrogenate of aromatic olefin polymer are preferable, in particular a hydrogenate of ring-opening polymer of norbornene-based monomer is preferable. These alicyclic olefin polymers may be used respectively alone or as two or more types combined.
- Note that, among these alicyclic olefin polymers, the particularly preferable polymers of ring-opening polymers of norbornene-based monomers and their hydrogenates are classified, from their differences in structure, as polymers of a different type from polyolefin resin which are obtained by copolymerization of an olefin expressed by CnH2n. In this description, a “norbornene-based monomer” means an alicyclic olefin monomer which has a norbornene ring structure.
- The method of adjusting the alicyclic olefin polymer in weight average molecular weight may be an ordinary method. For example, at the time of ring opening polymerization of an alicyclic olefin monomer by using a titanium-based catalyst, tungsten-based catalyst, or ruthenium-based catalyst, the method of adding a molecular weight adjuster such as a vinyl compound or diene compound in an amount of about 0.1 to 10 mol % with respect to the total amount of monomer may be mentioned. At this time, if using a smaller amount of molecular weight adjuster, a polymer with a relatively high Mw is obtained, while if using a larger amount, a polymer with a relatively low Mw is obtained.
- As the vinyl compound which is used as the molecular weight adjuster, 1-butene, 1-pentene, 1-hexene, 1-octene, or other α-olefin compound; styrene, vinyltoluene, or other styrene compound; ethylvinylether, isobutylvinylether, allylglycidylether, or other ether compound; allylchloride or other halogen-containing vinyl compound; allylacetate, allylalcohol, glycidylmethacrylate, or other oxygen-containing vinyl compound; acrylamide or other nitrogen-containing vinyl compound; etc. may be mentioned. As a diene compound, 1,4-pentadiene, 1,5-hexadiene, 1,6-heptadiene, 2-methyl-1,4-pentadiene, 2,5-dimethyl-1,5-hexadiene, or other nonconjugated diene compound; 1,3-butadiene, 2-methyl-1,3-butadiene, 2,3-dimethyl-1,3-butadiene, 1,3-pentadiene, 1,3-hexadiene, or other conjugated diene compound may be mentioned.
- The alicyclic olefin polymer may be suitably selected in glass transition temperature in accordance with need, but it is usually 50° C. or more, preferably 70° C. or more, more preferably 100° C. or more, most preferably 125° C. or more.
- The curing agent (I) which is used in the present invention is not specially limited. For example, an ionic curing agent, radical curing agent, or a curing agent which is provided with both an ionic and radical property, etc. is used. For example, 1-allyl-3,5-diglycidylisocyanulate, 1,3-diallyl-5-glycidyl isocyanulate, and other non-halogen-containing isocyanulate-based curing agent which contains allyl groups and epoxy groups, or other nitrogen-based curing agent; bisphenol A bis(ethyleneglycol glycidylether)ether, bisphenol A bis(diethyleneglycol glycidylether)ether, bisphenol A bis(triethyleneglycol glycidylether)ether, bisphenol A bis(propyleneglycol glycidylether)ether, and other bisphenol A-based glycidylether type epoxy compound, or other glycidylether type epoxy compound, fluorene-based epoxy compound, or other alicyclic epoxy compound, glycidylester-based epoxy compound, or other polyvalent epoxy compound; acid anhydride or dicarboxylic acid compound or other dicarboxylic acid derivative; diol compound, triol compound, polyvalent phenol compound, or other polyol compound; or other curing agent may be mentioned. These curing agents (I) may be suitably respectively used alone or as two or more types combined. Among these as well, from the viewpoint of raising the obtained electrical insulating layer in mechanical strength, as the curing agent (I), using at least one type of agent selected from the group comprised of a polyvalent epoxy compound, dicarboxylic acid derivative, and polyol compound is preferable, while using a polyvalent epoxy compound is more preferable.
- The curing of the curable composition proceeds by heating the composition, but the temperature region at which the above curing agent (I) can substantially cure the heat curable resin is usually 150 to 300° C. in range.
- The amount of the curing agent (I) blended into the curable composition which is used in the present invention is, with respect to 100 parts by weight of the heat curable resin, usually 1 to 500 parts by weight.
- To make the curing reaction between the alicyclic olefin polymer and the curing agent (I) proceed, a curing accelerator etc. may be used. When the curing agent (I) is, for example, a polyvalent epoxy compound, a curing accelerator constituted by a tertiary amine-based compound, a boron trifluoride complex compound, etc. is suitable. Among these as well, if using tertiary amine-based compounds, the lamination ability of the obtained electrical insulating layer with micro interconnects, insulation resistance, heat resistance, and chemical resistance are improved.
- As specific examples of the tertiary amine-based compound, benzyldimethylamine, triethanolamine, triethylamine, tributylamine, tribenzylamine, dimethylformamide, or other chain tertiary amine compound; pyrrazoles, pyridines, pyrazines, pyrimidines, indazoles, quinolines, isoquinolines, imidazoles, triazoles, etc. may be mentioned. Among these as well, imidazoles, in particular substituted imidazole compounds which have substituents, are preferable.
- As specific examples of the substituted imidazole compound, 2-ethylimidazole, 2-ethyl-4-methylimidazole, bis-2-ethyl-4-methylimidazole, 1-methyl-2-ethylimidazole, 2-isopropylimidazole, 2,4-dimethylimidazole, 2-heptadecyl-imidazole, or other alkyl substituted imidazole compound; 2-phenylimidazole, 2-phenyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-ethylimidazole, 1-benzyl-2-phenylimidazole, benzimidazole, 2-ethyl-4-methyl-1-(2′-cyanoethyl)imidazole, 2-ethyl-4-methyl-1-[2′-(3″,5″-diaminotriazinyl)ethyl]imidazole, 1-(2-aminoethyl)-2-methyl-1H-imidazole, or other imidazole compound which is substituted by a hydrocarbon group containing a ring structure such as an aryl group, arakyl group, etc. may be mentioned. Among these as well, due to the excellent compatibility with an alicyclic olefin polymer, an imidazole compound which is substituted by a hydrocarbon group containing a ring structure is preferable, while 1-benzyl-2-phenylimidazole is particularly preferable.
- The curing accelerator is used alone or in two or more types combined. The amount of the curing accelerator is suitably selected in accordance with the objective of use, but is, with respect to 100 parts by weight of heat curable resin, usually 0.001 to 30 parts by weight, preferably 0.01 to 10 parts by weight, more preferably 0.03 to 5 parts by weight.
- The curable composition which is used for the present invention may have other ingredients blended into it as desired. For example, a compound which has absorption in the wavelength region of a laser beam which is used when forming via holes, through holes, or other holes is preferable. When using a CO2 gas laser, silica etc. is used, while when using a UV laser (for example, a UV-YAG laser etc.), a UV absorbant is used. When using a curable composition which contains a compound which has absorption in the wavelength region of a laser beam, a laser can be used to easily form holes in the obtained electrical insulating layer and formation of smears etc. is reduced.
- As specific examples of the UV absorbant, phenylsalicylate, p-tert-butylphenylsalicylate, p-octylphenylsalicylate, or other salicylic acid-based compound; 2,4-dihydroxybenzophenone, 2-hydroxy-4-methoxybenzophenone, 2-hydroxy-4-octoxy-benzophenone, 2-hydroxy-4-dodecyloxybenzophenone, 2,2′-dihydroxy-4-methoxybenzophenone, 2,2′-dihydroxy-4,4′-dimethoxybenzophenone, 2-hydroxy-4-methoxy-5-sulfobenzophenone, bis(2-hydroxy-4-methoxybenzoylphenyl)methane, or other benzophenone-based compound;
- 2-(2′-hydroxy-5′-methylphenyl)benzotriazole, 2-(2′-hydroxy-5′-tert-butylphenyl)benzotriazole, 2-(2′-hydroxy-3′,5′-di-tert-butylphenyl)-5-chlorobenzotriazole, 2-(2′-hydroxy-3′,5′-di-tert-amylphenyl)benzotriazole, 2-[2′-hydroxy-3′-(3″,4″,5″,6″-tetrahydrophthalimidemethyl)-5′-methylphenyl]benzotriazole, 2,2-methylenebis[4-(1,1,3,3-tetramethylbutyl)-6-(2H-benzotriazol-2-yl)phenol], 2-[2-hydroxy-3,5-bis(α,α-dimethylbenzyl)phenyl]benzotriazole, or other benzotriazole-based compound; 2,4-di-tert-butylphenyl-3′,5′-di-tert-butyl-4′-hydroxybenzoate, or other benzoate-based compound; 2-ethylhexyl-2-cyano-3,3′-diphenylacrylate, ethyl-2-cyano-3,3′-diphenylacrylate, or other cyanoacrylate-based compound; bis (2,2,6,6-tetramethyl-piperidinyl-4)sebacate, or other hindered amine-based compound; nickel bis(octylphenyl)sulfide, [2,2′-thiobis(4-tert-octylphenolate)]-n-butylaminenickel, or other organometallic compound, etc. may be mentioned. Among these as well, due to the excellent compatibility with an alicyclic olefin polymer and stability at the time of heat curing, a benzotriazole-based compound is preferable.
- The amount of the UV absorbant is, with respect to 100 parts by weight of the heat curable resin, normally 0.1 to 30 parts by weight, preferably 1 to 10 parts by weight.
- In addition, a flame retardant, soft polymer, heat resistance stabilizer, weather resistance stabilizer, antiaging agent, leveling agent, antistatic agent, slip agent, antiblocking agent, anti-fogging agent, lubricant, dye, pigment, natural oil, synthetic oil, wax, emulsifier, filler, etc. may be used as another ingredient. The amounts of these are suitably selected within a range not impairing the object of the present invention.
- The film shaped or sheet shaped article of a curable composition which is used at (step A1) is usually obtained by shaping a curable composition by the solution casting process, melt casting process, etc., but use of the solution casting process for production is preferable. When using the solution casting process for shaping, a varnish is coated on the support, then the organic solvent is dried off.
- As the support which is used for solution casting, a resin film (carrier film), metal foil, etc. may be mentioned. As the resin film, normally a thermoplastic resin film is used. Specifically, a polyethylene terephthalate film, polypropylene film, polyethylene film, polycarbonate film, polyethylene naphthalate film, polyarylate film, nylon film, etc. may be mentioned. In these resin films, due to the excellent heat resistance, chemical resistance, release property after lamination, etc., a polyethylene terephthalate film and polyethylene naphthalate film are preferable. As the metal foil, for example, copper foil, aluminum foil, nickel foil, chrome foil, gold foil, silver foil, etc. may be mentioned. Since the conductivity is good and the price is low, copper foil, in particular, electrolytic copper foil or rolled copper foil is suitable. The thickness of the support is not particularly limited, but from the viewpoint of the workability etc., usually is 1 to 150 μm, preferably 2 to 100 μm, more preferably 3 to 50 μm.
- The method of obtaining the varnish is not specially limited. For example, it is obtained by mixing the ingredients which form the curable composition and an organic solvent. The ingredients may be mixed in accordance with an ordinary method. For example, this may be performed by stirring by a roater and magnetic stirrer or using a high speed homogenizer, dispersion mixer, planetary stirrer, twin-screw kneader, ball mill, triple roll, etc. The temperature at the time of mixing is in a range where the reaction due to the curing agent (I) affects the workability. Further, from the viewpoint of safety, less than the boiling point of the organic solvent which is used at the time of mixing is preferable.
- As the organic solvent, for example, toluene, xylene, ethylbenzene, trimethylbenzene, anisole, or other aromatic hydrocarbon-based organic solvent; n-pentane, n-hexane, n-heptane, or other aliphatic hydrocarbon-based organic solvent; cyclopentane, cyclohexane, or other alicyclic hydrocarbon-based organic solvent; chlorobenzene, dicyclobenzene trichlorobenzene, or other halogenated hydrocarbon-based organic solvent; methylethylketone, methylisobutylketone, cyclopentanone, cyclohexanone, or other ketone-based organic solvent, etc. may be mentioned. These organic solvents may be used alone or in two or more types combined.
- The amount of organic solvent used is suitably selected for control of the thickness of the obtained shaped article or improvement of flatness or other objective, but the solid content concentration of the varnish is usually 5 to 85 wt %, preferably 10 to 80 wt %, more preferably 20 to 70 wt %.
- As the coating method, dip coating, roll coating, curtain coating, die coating, slit coating, or other method may be mentioned. Further, the conditions for removal and drying of the organic solvent are suitably selected according to the type of the organic solvent. The drying temperature is usually 20 to 300° C., preferably 30 to 200° C., while the drying time is usually 30 seconds to 1 hour, preferably 1 minute to 30 minutes.
- Note that, when producing the film shaped or sheet shaped article of the curable composition, for example, it is possible to coat and impregnate a varnish on a fiber substrate on a support and suitably remove the organic solvent so as to obtain a film shaped or sheet shaped composite article comprised of a curable composition impregnated in a fiber substrate. As the fiber substrate, polyamide fiber, polyaramide fiber, polyester fiber, or other organic fiber and glass fiber, carbon fiber, or other inorganic fiber may be mentioned. Further, as the form of the fiber substrate, a flat weave, twill weave, or other form of woven fabric, form of nonwoven fabric, etc. may be mentioned. As the thickness of the fiber substrate, from the viewpoint of the ease of handling of the obtained shaped article or embedding of interconnects, 5 to 100 μm is preferable and 10 to 50 μm in range is more preferable.
- The film shaped or sheet shaped article has a thickness of usually 0.1 to 150 μm, preferably 0.5 to 100 μm, more preferably 1 to 80 μm. The film shaped or sheet shaped article may be a single-layer structure or a multilayer structure. The layers may be the same type or may be different types. Note that, when desiring to obtain a film or sheet alone, a film or sheet is formed on a support, then is peeled off from the support.
- At (step A1), the film shaped or sheet shaped article of the curable composition is bonded on the board usually by superposing a film shaped or sheet shaped article with a support on the board so that the shaped article contacts the conductive circuit layer “a” then using a pressure laminator, press, vacuum laminator, vacuum press, roll laminator, or other pressing machine to hot press (laminate) them and bond the two so that substantially no space is present at the interface of the board surface and the shaped article. The hot pressing is preferably performed under reduced pressure so as to improve the embedding of interconnects in the shaped article and suppress the formation of bubbles. The temperature at the time of hot pressing is usually 30 to 250° C., preferably 70 to 200° C., the pressing force is usually 10 kPa to 20 MPa, preferably 100 kPa to 10 MPa, the pressing time is usually 30 seconds to 5 hours, preferably 1 minute to 3 hours, and the atmosphere is reduced in pressure to usually 100 kPa to 1 Pa, preferably 40 kPa to 10 Pa.
- The shaped articles which are bonded to the board may be two or more articles. For example, to improve the flatness of the electrical insulating layer or to increase the thickness of the electrical insulating layer, it is also possible to bond another shaped article to the board to which the shaped article is bonded so as to contact that shaped article. The shaped articles which are used maybe of the same type or may be of mutually different types. When bonding a plurality of shaped articles to a board to laminate the shaped articles, what contacts the curing agent (II) at the next (step B) becomes the surface of the shaped article which is finally laminated.
- When using (step A2) to form the resin layer, it is sufficient to directly coat and dry a varnish of the above-mentioned curable composition on the board. The methods and conditions etc. of coating and drying may be similar to those when forming the film shaped or sheet shaped articles of a curable composition.
- On the board, the resin layer may be formed on both sides of the board or may be fanned on only one side. In the past, in particular, warping occurred remarkably in a multilayer circuit board which is fanned by laminating an electrical insulating layer and a conductive circuit layer on only one side of the board, so the method of production of the multilayer circuit board of the present invention is extremely suitable for forming the resin layer at only one side of the board to produce a multilayer circuit board.
- (Step B)
- At step B, a curing agent (II) which can substantially cure a heat curable resin at a temperature at which the curing agent (I) substantially cannot cure a heat curable resin is brought into contact with the surface of the resin layer which is formed on the board at step A, then the resin layer after being brought into contact with the curing agent (II) is heated at a temperature at which the curing agent (I) substantially cannot cure the heat curable resin and the curing agent (II) substantially can cure the heat curable resin.
- In this description, for a predetermined curing agent, “it substantially cannot cure a heat curable resin” means that when heating a heat curable resin in the presence of the curing agent at a predetermined temperature for 1 hour, the reduction in weight due to the amount of dissolution after heating of the heat curable resin in a solvent to which the uncured heat curable resin exhibits solubility compared with the amount of dissolution before heating in that solvent (amount of reduction of amount of dissolution corresponding to cured (cross-linked) insoluble part) is within 5 wt %. Further, for a predetermined curing agent, “the temperature at which it substantially cannot cure a heat curable resin” means a temperature of usage of the curing agent which substantially cannot cure a heat curable resin. On the other hand, for a predetermined curing agent, “it substantially can cure a heat curable resin” means that when heating a heat curable resin in the presence of the curing agent at a predetermined temperature for 1 hour, the reduction in weight due to the amount of dissolution after heating of the heat curable resin in a solvent to which the uncured. heat curable resin exhibits solubility compared with the amount of dissolution before heating in that solvent is 95 wt % or more. Further, for a predetermined curing agent, “the temperature at which it substantially can cure a heat curable resin” means a temperature of usage of the curing agent which substantially can cure a heat curable resin.
- In the method of production of the multilayer circuit board of the present invention, two types of curing agents which differ in temperature region able to substantially cure a heat curable resin, that is, a curing agent (I) and curing agent (II), are used. In the case of comparing the two curing agents, the above temperature region of the curing agent (I) is at the high temperature side, while the above temperature region of the curing agent (II) is at the low temperature side. At step B, the resin layer brought into contact with the curing agent (II) is heated, but under the heating conditions at this time, usually the heat curable resin does not substantially exhibit fluidity, but maintains the obtained shape as a resin layer which partially cures at the part in contact with the curing agent (II) (preliminary curing), then, at step C, the resin layer is further heated and is made to substantially completely cure due to the curing agent (I) (main curing) to form the electrical insulating layer. In this case, because the resin layer maintains its shape by the preliminary curing at step B, for example, even if a temperature difference occurs at the time of the main curing (high temperature) and the time of storage of the multilayer circuit board (room temperature), the obtained electrical insulating layer is small in deformation. As a result, in the multilayer circuit board of the present invention, it is believed that warping does not occur.
- At step B, a curing agent (II) is brought into contact with the surface of the resin layer which was formed on the board at step A. When bonding a film shaped or sheet shaped article of a curable composition on the board to form a resin layer, if using a shaped article with a support, this support is peeled off, then the curing agent (II) is brought into contact with the surface of the resin layer.
- The curing agent (II) which is used in the present invention is not particularly limited, but from the viewpoint of effectively performing preliminary curing, at last one agent selected from the group comprised of a polysulfide; polymercaptan; polyamide; imidazole; and a chain aliphatic polyamine, cyclic aliphatic polyamine, aliphatic-aromatic amine, aromatic amine, and complexes of these amines is preferably used, while a chain aliphatic polyamine is more preferably used. As the chain aliphatic polyamine, for example, diethylenetriamine, triethylenetetramine, tetraethylenepentamine, diproprenediamine, diethylaminopropylamine, hexamethylenediamine, etc. maybe mentioned. As the cyclic aliphatic polyamine, for example, N-aminoethylpiperadine etc. may be mentioned. As the aliphatic-aromatic amine, for example, xylenediamine, a xylenediamine trimer (for example, “Amine Black” or “Sho-Amine Black” made by Showa Denko), xylenediamine derivative (for example, “Sho-Amine N”, “Sho-Amine 1001”, and “Sho-Amine 1010” made by Showa Denko), etc. may be mentioned. As the aromatic amine, for example, metaphenylenediamine, diaminodiphenylmethane, etc. may be mentioned. These may be respectively used alone or as two or more types combined. The temperature region at which the curing agent (II) substantially can cure the heat curable resin is usually 20° C. or more and less than 150° C. in range.
- The method of bringing the curing agent (II) into contact with the resin layer surface is not particularly limited. For example, the dip method of dissolving the curing agent (II) in water or an organic solvent to form a solution, then dipping the board on which the resin layer is formed in the obtained solution, the spray method of coating that solution on the surface of the resin layer on the board by spraying etc., may be mentioned. To make the curing agent (II) contact the resin layer surface, from the viewpoint of effectively performing preliminary curing, it is preferable to dip the board on which the resin layer is formed into an aqueous solution of the curing agent (II). Further, it is preferable to perform this operation substantially for the resin layer surface as a whole. The contact operation may be performed once or two or more times repeatedly.
- The temperature at the time of contact may be freely selected considering the temperature region at which the curing agent (II) substantially can cure the heat curable resin, the boiling point of the solvent of the solution, etc., but is usually 10 to 100° C., preferably 15 to 65° C. in range. When performing the contact by the dip method, the dipping time may be suitably selected in accordance with the concentration etc. of the curing agent (II) solution, but is usually 0.1 to 360 minutes, preferably 0.1 to 60 minutes.
- After the operation for bringing the curing agent (II) into contact with the resin layer surface, it is also possible to adopt the method of spraying nitrogen or other inert gas in order to remove the excess of the curing agent (II). Further, before this operation for removal, water or organic solvent may be used to wash the board surface.
- The solvent which can be used for preparation of the solution of the curing agent (II) is not limited so long as the resin layer is not easily dissolved and the curing agent (II) is dissolved in it. For example, water; diethylether or other ether; ethanol, isopropanol, or other alcohol; acetone or other ketone; ethyl cellosolve acetate or other cellosolve; or other polar solvent and their mixtures may be mentioned. The solution of the curing agent (II) is not particularly limited in the concentration of the curing agent (II), but from the viewpoint of effectively performing the preliminary curing, it is usually 0.001 to 70 wt %, preferably 0.01 to 50 wt %. By dipping the board on which the resin layer is formed into the solution of the curing agent (II) or by spraying that solution on the surface of the resin layer on the board, the preliminary curing can be performed well.
- Note that, when, at the usage temperature, the curing agent (II) is liquid and there is nothing obstructing the contact operation of the curing agent (II) on the surface of the resin layer, the contact operation can also be performed with the curing agent (II) as is without particularly dissolving it in a solvent.
- It is possible to blend in any surfactant etc. as an ingredient other than the curing agent (II) into the solution of the curing agent (II) from the viewpoint of improving the wettability of the curing agent (II) and the resin layer surface. The amount of the ingredients other than the curing agent (II) is usually 10 wt % or less, preferably 5 wt % or less, more preferably 1 wt % or less.
- The curing agent (II) is made to contact the surface of the resin layer, then the resin layer is heated. The heating is performed at a temperature at which the curing agent (I) substantially cannot cure the heat curable resin and the curing agent (II) can substantially cure the heat curable resin, but the heating temperature is usually 20° C. or more and less than 150° C. Further, the heating time is usually 0.1 to 5 hours, preferably 0.5 to 3 hours. The resin layer may be heated (i) by maintaining a constant temperature for a certain time, (ii) by performing the heating of the (i) in a certain temperature region in a combination of multiple stages, (iii) by raising the temperature from the lower limit to the upper limit of a certain temperature region steadily or irregularly over a certain time, or (iv) by suitably combining the (i) to (iii). Among these, from the viewpoint of effectively performing preliminary curing, the resin layer is preferably heated by the above (iv). The heating method is not particularly limited. For example, an oven etc. may be used.
- (Step C)
- After the above (step B), the preliminarily cured resin layer is heated and cured at the temperature at which the curing agent (I) can substantially cure the heat curable resin so as to form the electrical insulating layer.
- The resin layer is usually cured by heating the resin layer (board as a whole on which resin layer is formed). The curing conditions maybe suitably selected in accordance with the curing agent (I), but the heating temperature of the resin layer is usually 150 to 300° C. and the heating time is usually 0.1 to 5 hours, preferably 0.5 to 3 hours. The resin layer is heated as in the above (i) to (iv) in the same way as the heating of the resin layer after making the curing agent (II) contact its surface at step B, but from the viewpoint of effectively performing the main curing, heating by the above (i) is preferable. The heating method is not particularly limited. For example, it may be performed using an oven etc. By the heating of the resin layer at step C, the resin layer is substantially completely cured and an electrical insulating layer is formed. The electrical insulating layer is not particularly limited in thickness, but is usually 1 to 50 μm.
- In the above way, the multilayer circuit board of the present invention is produced. In this multilayer circuit board, substantially no warping occurs. Here, “substantially” means an extent not posing a problem in practical use. Note that, in the multilayer circuit board of the present invention, the electrical insulating layer which is formed on the conductive circuit layer “a” of the board may be further provided with a conductive circuit layer “b”. In this case, it forms openings for forming via holes in the electrical insulating layer in order to connect the conductive circuit layer “a” and the conductive circuit layer “b” before forming the conductive circuit layer “b”. From the viewpoint of being able to form finer via holes without causing a drop in the characteristics of the electrical insulating layer, a method using a CO2 gas laser, excimer laser, UV-YAG laser, or other laser is preferable.
- In the method of production of the multilayer circuit board of the present invention, as the method of forming the conductive circuit layer “b” on the electrical insulating layer which is formed on the board (below, sometimes referred to as the “electrical insulating layer ‘b’ ”), the method of forming the electrical insulating layer “b”, then forming the metal thin film layer on it and, furthermore, using electroplating or other wet plating to grow the plating and form the conductive circuit layer may be mentioned. The openings for formation of via holes in the electrical insulating layer “b” are usually formed before forming the metal thin film layer. The metal thin film layer may be formed by the electroless plating method, sputtering method, vacuum deposition method, etc. In particular, the electroless plating method or sputtering method is preferably used. The metal thin film layer is formed on the surface of the electrical insulating layer “b” and on the inner wall surface of the opening for formation of the via hole use. After forming the metal thin film layer and before growing the plating, a plating resist is formed on the metal thin film layer, the plating is grown, then the plating resist is removed and, furthermore, etching is used to etch the metal thin film layer and form the conductive circuit layer “b”. This conductive circuit layer “b” is usually comprised of a metal thin film layer and plating grown on top of it.
- By using the thus obtained multilayer circuit board as the board and repeating the formation of the electrical insulating layer by steps A to C in the present invention and the formation of the conductive circuit layer on the electrical insulating layer, further multilayering can be formed.
- According to the present invention, even if forming a multilayer circuit on one side of the board, it is possible to obtain a multilayer circuit board which is substantially free of warping. For this reason, as the method of forming the multilayer circuit on the silicon wafer board in the “wafer level package (WLP)” art of directly forming the multilayer circuit on the silicon wafer board before dicing into individual chips so as to keep the areas of the packages equal to the chips, the method of production of the multilayer circuit board of the present invention is particularly suitable.
- The multilayer circuit board of the present invention can be used as a printed circuit board for mounting a CPU, memory, other semiconductor device, or other mounted part in a computer, mobile phone, or other electronic device. In particular, a board which has microinterconnects is suitable as a high density printed circuit board in a high speed computer or a mobile computer used at the high frequency region.
- Below, examples and comparative examples will be given to explain the present invention in more detail. Note that, in the examples, parts and are based on weight unless otherwise specially indicated. Various types of physical properties were evaluated by the following method.
- (1) Amount of Monomer in Polymerization Solution: A polymerization solution was diluted by tetrahydrofuran and measured by gas chromatography (GC) to find the amount of monomer in the polymerization solution.
- (2) Number Average Molecular Weight (Mn) and Weight Average Molecular Weight (Mw) of Polymer: Tetrahydrofuran was used as a developing solvent and gel permeation chromatography (GPC) was used for measurement to find the molecular weights as values converted to polystyrene.
- (3) Hydrogenation Rate of Polymer: The hydrogenation rate means the ratio of the number of moles of unsaturated bonds which are hydrogenated to the number of moles of unsaturated bonds in the polymer before hydrogenation and was found by 400 MHz 1H-NMR spectroscopy.
- (4) Content of Repeating Units Which Have Carboxylic Acid Anhydride Groups of Polymer: It means ratio of number of moles of repeating units which have carboxylic acid anhydride groups with respect to number of moles of total monomer units in polymer and was found by 400 MHz 1H-NMR spectroscopy.
- (5) Viscosity of Varnish: E-type viscometer used to measure dynamic viscosity at 25° C.
- (6) Amount of Warping of Board: A multilayer board comprised of a board on one surface of which an insulating layer is formed is placed on a flat surface with its projecting surface downward, and the distance from the flat surface to the end of the multilayer board which rises due to warping the most is measured as the amount of warping of the board.
- As a first stage of polymerization, 5-ethylidene-bicyclo[2.2.1]hept-2-ene (below, abbreviated as “EdNB”) 35 molar parts, 1-hexene 0.9 molar part, anisole 340 molar parts and a ruthenium-based polymerization catalyst constituted by 4-acetoxybenzylidene(dichloro)(4,5-dibromo-1,3-dimesityl-4-imidazolin-2-ylidene)(tricyclohexylphosphine)ruthenium (C1063, made by Wako Pure Chemical Industries) 0.005 part were charged into a pressure resistant glass reactor with an inside substituted with nitrogen. A polymerization reaction was performed under stirring at 80° C. for 30 minutes to obtain a solution of an ring-opening polymer of a norbornene-based monomer (below, referred to as a norbornene-based ring-opening polymer).
- Next, as a second stage of polymerization, to the solution which was obtained at the first stage of polymerization, tetracyclo[9.2.1.02,10.03,8]tetradeca-3,5,7,12-tetraene (methanotetrahydrofluorene, below abbreviated as “MTF”) 35 molar parts, bicyclo[2.2.1]hept-2-ene-5,6-dicarboxylic acid anhydride (below abbreviated as “NDCA”) 30 molar parts, anisole 250 molar parts, and C1063: 0.01 part were added. A polymerization reaction was performed under stirring at 80° C. for 1.5 hours to obtain a solution of a norbornene-based ring-opening polymer. This solution was measured by gas chromatography, whereupon it was confirmed that substantially no monomer remained. The polymerization conversion rate was 990 or more.
- Next, an autoclave with an inside substituted with nitrogen and equipped with a stirrer was charged with a solution of the obtained ring-opening polymer, C1063: 0.03 part was added, then the mixture was stirred at 150° C. at a hydrogen pressure of 7 MPa for 5 hours for a hydrogenation reaction to obtain a solution of a polymer (A-1) of a hydrogenate of a norbornene-based ring-opening polymer. The obtained polymer (A-1) had a weight average molecular weight of 60,000, number average molecular weight of 30,000, and molecular weight distribution of 2. Further, the hydrogenation rate was 95%, and the content of the repeating units which have carboxylic acid anhydride groups was 30 mol %. The solution of the polymer (A-1) had a solid content concentration of 22%.
- MTF 70 molar parts, NDCA 30 molar parts, 1-hexene 0.9 molar part, anisole 590 molar parts, and C1063: 0.015 molar part were charged into a pressure resistant glass reactor with an inside substituted with nitrogen. A polymerization reaction was performed under stirring at 80° C. for 1 hour to obtain a solution of a norbornene-based ring-opening polymer. This solution was measured by gas chromatography, whereupon it was confirmed that substantially no monomer remained. The polymerization conversion rate was 990 or more.
- Next, an autoclave with an inside substituted with nitrogen and equipped with a stirrer was charged with a solution of the obtained ring-opening polymer, then the mixture was stirred at 150° C. at a hydrogen pressure of 7 MPa for 5 hours for a hydrogenation reaction to obtain a solution of a polymer (A-2) of a hydrogenate of a norbornene-based ring-opening polymer. The obtained polymer (A-2) had a weight average molecular weight of 50,000, number average molecular weight of 26,000, and molecular weight distribution of 1.9. Further, the hydrogenation rate was 97%, while the content of the repeating units which have carboxylic acid anhydride groups was 30 mol %. The solution of the polymer (A-2) had a solid content concentration of 22%.
- MTF 70 molar parts, NDCA 30 molar parts, 1-hexene 6 molar parts, anisole 590 molar parts, and C1063: 0.015 molar part were charged into a pressure resistant glass reactor with an inside substituted with nitrogen. A polymerization reaction was performed under stirring at 80° C. for 1 hour to obtain a solution of a norbornene-based ring-opening polymer. This solution was measured by gas chromatography, whereupon it was confirmed that substantially no monomer remained. The polymerization conversion rate was 990 or more.
- Next, an autoclave with an inside substituted with nitrogen and equipped with a stirrer was charged with a solution of the obtained ring-opening polymer, then the mixture was stirred at 150° C. at a hydrogen pressure of 7 MPa for 5 hours for a hydrogenation reaction. Next, the obtained hydrogenation reaction solution was concentrated to obtain a solution of the hydrogenate of the norbornene -based ring-opening polymer constituted by the polymer (A-3). The obtained polymer (A-3) had a weight average molecular weight of 10,000, a number average molecular weight of 5,000, and a molecular weight distribution of 2. Further, the hydrogenation rate was 97%, while the content of the repeating units which have carboxylic acid anhydrides was 30 mol %. The solution of the polymer (A-3) had a solid content concentration of 55%.
- A solution of the polymer (A-1) 450 parts and a silica slurry 150 parts, obtained by dispersing spherical silica (Admafine (registered trademark) SO-C1, made by Admatechs, volume average particle size 0.25 μm) 40% and the polymer (A-2) 2% in anisole, were mixed and stirred by a planetary stirrer for 3 minutes.
- To this, a solution of a curing agent (I) constituted by a polyfunctional epoxy resin (1032H60, made by Mitsubishi Chemical, epoxy equivalent 163 to 175) dissolved in anisole to 70%: 4.5 parts, a lasering enhancer constituted by 2-[2-hydroxy-3,5-bis(α,α-dimethylbenzyl)phenyl]-2H-benzotriazole 1 part, an antiaging agent constituted by tris(3,5-di-t-butyl-4-hydroxybenzyl)-isocyanulate 1 part, an elastomer constituted by a solution of liquid epoxylated polybutadiene (Ricon (registered trademark) 657, made by Sartomer Japan) dissolved in anisole to 80%: 3 parts, and anisole 370 parts were mixed and stirred by a planetary stirrer for 3 minutes.
- Furthermore, to this, a curing accelerator constituted by a solution of 1-(2-aminoethyl)-2-methyl-1H-imidazole dissolved in anisole to 1%: 70 parts was mixed and stirred by a planetary stirrer for 5 minutes to obtain a varnish of a curable composition (B-1). The varnish had a viscosity of 230 mPa·sec.
- A solution of the polymer (A-2) 44 parts, a solution of the polymer (A-3) 32 parts, and a silica slurry 863 parts, obtained by mixing a surface treated spherical silica (Admafine SC-2500-SXJ, made by Admatechs, treated by amino silane type silane coupling agent) 78% and the polymer (A-3) 2% with anisole, treating this by a high pressure homogenizer for 15 minutes, then dispersing it, were mixed and stirred by a planetary stirrer for 3 minutes.
- To this, a curing agent (I) constituted by a fluorene-based epoxy resin (Ogsol (registered trademark) PG-100, made by Osaka Gas Chemicals, epoxy equivalents 163 to 175) 123 parts, a bisphenol A type epoxy resin (Epicoat (registered trademark) 828EL, made by Mitsubishi Chemical, epoxy equivalents 184 to 194) 28 parts, a polyfunctional epoxy resin 1032H60: 23 parts, an antiaging agent constituted by tris(3,5-di-t-butyl-4-hydroxybenzyl)-isocyanulate 1 part, a dicyclopentadiene type novolac resin (GDP-6095LR, made by Gunei Chemical Industry) 81 parts, and a solution of CP-002 (mixture of fluorene-based phenol monomer and bisphenol A, made by Osaka Gas Chemicals) dissolved in anisole to 50%: 60 parts were mixed and stirred by a planetary stirrer for 3 minutes. Furthermore, to this, a curing accelerator constituted by a solution of 1-benzyl-2-phenylimidazole dissolved in anisole to 5%: 25 parts was mixed. The mixture was stirred by a planetary stirrer for 5 minutes to obtain a varnish of a curable composition (B-2). The varnish had a viscosity of 2300 mPasec.
- A varnish of the curable composition (B-1) was coated on a thickness 100 μm polyethylene terephthalate film (support) using a wire bar, next, this was dried in a nitrogen atmosphere at 130° C. for 90 seconds to obtain a supported film (C-1) formed with a resin layer of a thickness of the uncured curable composition (B-1) of 3 μm.
- Next, the surface of the curable composition (B-1) of the supported film (C-1) was coated with a varnish of the curable composition (B-2) using a doctor blade (made by Tester Sangyo) and auto film applicator (made by Tester Sangyo), next, this was dried under a nitrogen atmosphere at 80° C. for 10 minutes to obtain a supported film (C-2) formed with a resin layer of a total thickness of the curable composition of 13 μm. The supported film (C-2) was formed in the order of the support, the resin layer of the curable composition (B-1), and the resin layer of the curable composition (B-2).
- On one surface of a board constituted by a diameter 4 inch circular glass board (D263, made by Schott, thickness 150 μm), the above obtained supported film (C-2) was superposed so that the surface of the resin layer of the curable composition (B-2) overlaid the board. This assembly was reduced in pressure using a vacuum laminator provided with heat resistant rubber press plates at the top and bottom (made by Meiki Co., ltd) at a vacuum degree of 13 hPa or less for 30 seconds, then hot pressed by the heat resistant rubber press plates at a pressing temperature of 110° C. and a pressing pressure of 0.1 MPa for 60 seconds (primary pressing). Furthermore, a hydraulic press device provided with metal press plates at the top and bottom was used to hot press the assembly at a pressing temperature 110° C. by 1 MPa for 90 seconds (secondary pressing). Next, the support was peeled off to obtain a laminate of a resin layer of a curable composition and a board.
- This laminate was dipped in a curing agent (II) constituted by triethylenetetramine (hereinafter, abbreviated as “TETA”) in a 5% aqueous solution at 25° C. for 1 hour, then the excess solution was removed by an air gun. Next, the laminate was placed with the board side down on an oven plate and was raised in temperature and heated in an oven (INH-9C2, made by Koyo Lindberg) from 60 to 120° C. over 1 hour. Next, this was heated at 120° C. for 30 minutes, then raised in temperature and heated from 120 to 180° C. for 1 hour. Furthermore, this was heated at 180° C. for 30 minutes and the resin layer of the curable composition was cured to obtain a multilayer board on which an insulating layer was formed. The obtained laminated board was measured for the amount of warping, whereupon the amount of warping was 1.5 mm. The results are shown in Table 1.
- Except for using ion exchanged water instead of TETA 5% aqueous solution, the same method was followed as in Example 1 to obtain a laminated board formed with an insulating layer. Note that, the total thickness of the resin layer was 14 μm. The obtained laminated board was measured for the amount of warping, whereupon the amount of warping was 2.5 mm. The results are shown in Table 1.
- Except for dipping the laminate of the resin layer of the curable composition and board in a TETA 5% aqueous solution, then heating by an oven at 180° C. for 60 minutes to cause the resin layer to completely cure without multiple stages of heat treatment, the same method was followed as in Example 1 to obtain a laminated board formed with an insulating layer. Note that, the total thickness of the resin layer was 14 μm. The obtained laminated board was measured for the amount of warping, whereupon the amount of warping was 3 mm. The results are shown in Table 1.
-
TABLE 1 Example 1 Comp. Ex. 1 Comp. Ex. 2 Composition of first resin layer B-1 B-1 B-1 Thickness of first resin layer (μm) 3 3 3 Composition of second resin layer B-2 B-2 B-2 Total thickness of resin layers (μm) 13 14 14 Treatment conditions of resin layers Dipping in 5% TETA Dipping in water for 1 Dipping in 5% TETA aqueous solution for 1 hour aqueous solution for 1 hour hour Curing conditions Step cure Step cure 180° C. 1 hour 60 to 120° C. 1 hour 60 to 120° C. 1 hour 120° C. 0.5 hour 120° C. 0.5 hour 120 to 180° C. 1 hour 120 to 180° C 1 hour 180° C. 0.5 hour 180° C. 0.5 hour Warping of board (mm) 1.5 2.5 3 - From Table 1, it will be understood that by using a curable composition which contains a heat curable resin and curing agent (I) to form a resin layer on a board, then bringing a curing agent (II) into contact with the resin layer surface and heating to a predetermined temperature, next heating the resin layer to cause it to cure and thereby form an insulating layer on a multilayer board, the amount of warping can be kept small (Example 1). As opposed to this, it will be understood that if not bringing the curing agent (II) into contact with the resin layer surface (Comparative Example 1) or bringing the curing agent (II) into contact with the resin layer surface, but not heating at a predetermined temperature (Comparative Example 2), the amount of warping of the multilayer board becomes larger.
Claims (8)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010223318 | 2010-09-30 | ||
| JP2010-223318 | 2010-09-30 | ||
| PCT/JP2011/072575 WO2012043799A1 (en) | 2010-09-30 | 2011-09-30 | Method for manufacturing multilayer circuit board |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US20130180767A1 true US20130180767A1 (en) | 2013-07-18 |
| US9615465B2 US9615465B2 (en) | 2017-04-04 |
Family
ID=45893236
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US13/876,495 Expired - Fee Related US9615465B2 (en) | 2010-09-30 | 2011-09-30 | Method of production of multilayer circuit board |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9615465B2 (en) |
| JP (1) | JP5673685B2 (en) |
| WO (1) | WO2012043799A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11398587B2 (en) * | 2017-09-29 | 2022-07-26 | Nichia Corporation | Method of manufacturing light-transmissive sheet |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6322887B2 (en) * | 2012-12-18 | 2018-05-16 | 日立化成株式会社 | Laminated body, laminated board, multilayer laminated board, printed wiring board, multilayer printed wiring board, and laminated board manufacturing method |
| JP6545924B2 (en) * | 2012-12-27 | 2019-07-17 | 味の素株式会社 | Roughened hardened body, laminate, printed wiring board and semiconductor device |
| JP7120261B2 (en) * | 2020-02-05 | 2022-08-17 | 味の素株式会社 | Method for manufacturing printed wiring board and method for manufacturing semiconductor device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060257625A1 (en) * | 2003-09-10 | 2006-11-16 | Yasuhiro Wakizaka | Resin composite film |
| US20090151984A1 (en) * | 2005-08-26 | 2009-06-18 | Zeon Corporation | Composite resin molded article, laminate, multi-layer circuit board, and electronic device |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4826020B2 (en) | 2000-03-29 | 2011-11-30 | 凸版印刷株式会社 | Manufacturing method of multilayer wiring board |
| JP3862009B2 (en) | 2001-09-05 | 2006-12-27 | 日本ゼオン株式会社 | Multilayer circuit board manufacturing method |
| JP2006028225A (en) * | 2004-07-12 | 2006-02-02 | Nippon Zeon Co Ltd | Thermosetting resin composition, electrical insulating film, laminate and multilayer circuit board |
| JP2006229038A (en) * | 2005-02-18 | 2006-08-31 | Nippon Zeon Co Ltd | Manufacturing method of multilayer printed wiring board |
| JP2006278922A (en) * | 2005-03-30 | 2006-10-12 | Nippon Zeon Co Ltd | Multilayer circuit board manufacturing method |
| JP2007227567A (en) * | 2006-02-22 | 2007-09-06 | Nippon Zeon Co Ltd | Method for forming metal thin film layer and method for producing multilayer printed wiring board |
-
2011
- 2011-09-30 US US13/876,495 patent/US9615465B2/en not_active Expired - Fee Related
- 2011-09-30 WO PCT/JP2011/072575 patent/WO2012043799A1/en not_active Ceased
- 2011-09-30 JP JP2012536583A patent/JP5673685B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060257625A1 (en) * | 2003-09-10 | 2006-11-16 | Yasuhiro Wakizaka | Resin composite film |
| US20090151984A1 (en) * | 2005-08-26 | 2009-06-18 | Zeon Corporation | Composite resin molded article, laminate, multi-layer circuit board, and electronic device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11398587B2 (en) * | 2017-09-29 | 2022-07-26 | Nichia Corporation | Method of manufacturing light-transmissive sheet |
Also Published As
| Publication number | Publication date |
|---|---|
| US9615465B2 (en) | 2017-04-04 |
| WO2012043799A1 (en) | 2012-04-05 |
| JPWO2012043799A1 (en) | 2014-02-24 |
| JP5673685B2 (en) | 2015-02-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9629240B2 (en) | Prepreg and laminate including prepreg | |
| TWI483990B (en) | Hardened resin composition, film, laminated film, prepreg, laminate, hardening And complexes | |
| US9453145B2 (en) | Insulating adhesive film, prepreg, laminate, cured article, and composite article | |
| JP5590245B2 (en) | Curable resin composition, film, prepreg, laminate, cured product, and composite | |
| US9615465B2 (en) | Method of production of multilayer circuit board | |
| US20130309512A1 (en) | Curable resin composition, cured product, surface treated cured product, and laminate | |
| CN104870510A (en) | Curable resin composition, insulating film, prepreg, cured product, composite, and substrate for electronic material | |
| JP2014133877A (en) | Curable resin composition and cured article | |
| JP5691977B2 (en) | Insulating adhesive film, prepreg, laminate, cured product, and composite | |
| JP5630262B2 (en) | Curable resin composition, cured product, laminate, multilayer circuit board, and electronic device | |
| JP6528226B2 (en) | Curable resin composition, film, laminated film, prepreg, laminate, cured product, and composite | |
| JP2012214606A (en) | Curable resin composition, film, laminate, and cured product | |
| JP2013055301A (en) | Manufacturing method of multilayer printed wiring board | |
| JP2013010895A (en) | Insulating adhesive film, laminate, cured product and composite body | |
| JP2010155934A (en) | Curable resin composition | |
| JP2014117823A (en) | Insulating film, prepreg and cure product | |
| JPWO2015016165A1 (en) | Substrate for electronic materials |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AS | Assignment |
Owner name: ZEON CORPORATION, JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:TATEISHI, YOHEI;IGA, TAKASHI;REEL/FRAME:030115/0185 Effective date: 20130220 |
|
| STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
| FEPP | Fee payment procedure |
Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
| LAPS | Lapse for failure to pay maintenance fees |
Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
| STCH | Information on status: patent discontinuation |
Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362 |
|
| FP | Lapsed due to failure to pay maintenance fee |
Effective date: 20210404 |