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US20060198735A1 - Vacuum pump and method of starting the same - Google Patents

Vacuum pump and method of starting the same Download PDF

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Publication number
US20060198735A1
US20060198735A1 US10/524,688 US52468803A US2006198735A1 US 20060198735 A1 US20060198735 A1 US 20060198735A1 US 52468803 A US52468803 A US 52468803A US 2006198735 A1 US2006198735 A1 US 2006198735A1
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United States
Prior art keywords
pump
rotor
vacuum pump
starting
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/524,688
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English (en)
Inventor
Naoki Iijima
Jiro Watanbe
Hiroyuki Chino
Kiyoshi Yanagisawa
Takeshi Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
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Individual
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Assigned to EBARA CORPORATION reassignment EBARA CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHINO, HIROYUKI, IIJIMA, NAOKI, KAWAMURA, TAKESHI, WATANABE, JIRO, YANAGISAWA, KIYOSHI
Publication of US20060198735A1 publication Critical patent/US20060198735A1/en
Abandoned legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F04C13/005—Removing contaminants, deposits or scale from the pump; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/02—Surge control
    • F04D27/0292—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/03—Torque
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/17—Tolerance; Play; Gap
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/70—Safety, emergency conditions or requirements
    • F04C2270/701—Cold start
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/80—Diagnostics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/60—Fluid transfer
    • F05D2260/607—Preventing clogging or obstruction of flow paths by dirt, dust, or foreign particles

Definitions

  • the present invention relates to a vacuum pump and a method of starting a vacuum pump, and more particularly to a vacuum pump for evacuating a gas from a chamber used in a semiconductor fabrication apparatus or the like, and a method of starting such a vacuum pump.
  • a vacuum pump In a semiconductor fabrication apparatus, a vacuum pump is widely used for evacuating a gas used in a semiconductor fabrication process from a chamber and producing a vacuum environment in the chamber.
  • this type of vacuum pump there has been known a positive-displacement vacuum pump having Roots-type or screw-type pump rotors.
  • the positive-displacement vacuum pump comprises a pair of pump rotors disposed in a casing, and a motor for rotating the pump rotors.
  • a small clearance is formed between the pair of the pump rotors themselves and also between the pump rotors and the inner surface of the casing so that the pump rotors are rotated in a noncontact manner.
  • the pair of the pump rotors are synchronously rotated in the opposite directions by energizing the motor, a gas drawn from an inlet port into the casing is delivered toward an outlet port and is thus evacuated from a chamber or the like connected to the inlet port of the vacuum pump.
  • Some gases used in the semiconductor fabrication process contain components which are solidified or liquidized when the temperature of the gases is lowered.
  • the heat of compression is generated during the process of delivering the gas toward the outlet port, and hence the vacuum pump has a high temperature during operation. Therefore, while the vacuum pump maintains a high temperature, even if the vacuum pump evacuates the gas containing the above components, the components are not solidified or liquidized, and a good evacuation is thus carried out.
  • the solidified or liquidized components are refereed to as a product). Consequently, such product prevents the rotation of the pump rotors, and hence the pump rotors cannot be rotated by a starting torque of the motor, thus causing a failure of the restart of the vacuum pump. Further, in addition to the failure of the restart of the vacuum pump, an excessive load is applied to the motor to cause the motor to overheat, and hence the vacuum pump cannot be operated safely.
  • the present invention has been made in view of the above drawbacks. It is therefore an object of the present invention to provide a vacuum pump which can be normally started even if a product solidified or liquidized in a casing of the vacuum pump presents an obstacle to the rotation of the pump rotor.
  • Another object of the present invention is to provide a method of starting such a vacuum pump.
  • a vacuum pump comprising: a pump rotor rotatably disposed in a casing; and a pump-rotor controller for controlling rotation of the pump rotor in a forward direction or a reverse direction in accordance with a predetermined pattern at the time of starting the vacuum pump.
  • the rotation of the pump rotor in the forward direction is defined as the rotation of the pump rotor in a direction in which a gas drawn in the casing is delivered from an inlet side of the casing toward an outlet side of the casing.
  • the rotation of the pump rotor in the reverse direction is defined as the rotation of the pump rotor in a direction opposite to the forward direction.
  • the predetermined pattern includes a combination of at least two of rotation of the pump rotor in the forward direction, rotation of the pump rotor in the reverse direction, and stop of the pump rotor.
  • the predetermined pattern is set in the pump-rotor controller such that the pump rotor is driven in the order of the rotation in the forward direction, the stop, and the rotation in the forward direction.
  • the predetermined pattern is set in the pump-rotor controller such that the pump rotor is rotated in the order of the reverse direction and the forward direction.
  • the pump rotor if the product solidified or liquidized in the casing prevents the rotation of the pump rotor, the pump rotor is rotated in accordance with a predetermined pattern to thereby remove the product, thus enabling the vacuum pump to be started normally.
  • the vacuum pump further comprises a state-judging device for judging whether the pump rotor is rotated normally or not at the time of starting the vacuum pump; wherein when the state-judging device judges that the pump rotor is not rotated normally at the time of starting the vacuum pump, the pump rotor is rotated in accordance with the predetermined pattern.
  • the pump rotor when the pump rotor can be rotated normally, a normal-starting operation is carried out, thus enabling the vacuum pump to be started quickly.
  • a method of starting a vacuum pump having a pump rotor rotatably disposed in a casing comprising: controlling rotation of the pump rotor in a forward direction or a reverse direction at the time of starting the vacuum pump in accordance with a predetermined pattern; and rotating the pump rotor in the forward direction in a steady state for evacuation.
  • the predetermined pattern includes a combination of at least two of rotation of the pump rotor in the forward direction, rotation of the pump rotor in the reverse direction, and stop of the pump rotor.
  • the predetermined pattern is set such that the pump rotor is driven in the order of the rotation in the forward direction, the stop, and the rotation in the forward direction.
  • the predetermined pattern is set such that the pump rotor is rotated in the order of the reverse direction and the forward direction.
  • a method of starting a vacuum pump further comprises judging whether the pump rotor is rotated normally or not; wherein the pump rotor is rotated in accordance with the predetermined pattern when the pump rotor is judged not to be rotated normally.
  • a method of starting a vacuum pump comprising: judging whether the pump rotor is rotated normally or not; controlling rotation of the pump rotor in a forward direction or a reverse direction at the time of starting the vacuum pump in accordance with a predetermined pattern when the pump rotor is judged not to be rotated normally; and rotating the pump rotor in the forward direction in a steady state for evacuation.
  • FIG. 1 is a cross-sectional view showing a vacuum pump according to a first embodiment of the present invention
  • FIG. 2 is a schematic view showing a control system including a pump-rotor controller according to the first embodiment of the present invention
  • FIG. 3 is a schematic view showing a control system including a pump-rotor controller according to a second embodiment of the present invention
  • FIG. 4 is a schematic view showing a control system including a pump-rotor controller according to a third embodiment of the present invention.
  • FIG. 5 is a schematic view showing a control system including a pump-rotor controller according to a fourth embodiment of the present invention.
  • FIG. 6 is a schematic view showing a control system including a pump-rotor controller according to a fifth embodiment of the present invention.
  • FIG. 1 is a cross-sectional view showing a vacuum pump according to a first embodiment of the present invention.
  • the vacuum pump comprises a pair of pump rotors 1 , 1 each having a screw groove, a casing 2 for housing the pump rotors 1 , 1 , and a motor 3 for rotating the pump rotors 1 , 1 .
  • the casing 2 has an inlet port 7 for drawing a gas therein and an outlet port 8 for discharging the gas therefrom.
  • the pump rotors 1 , 1 are fixed respectively to two shafts 4 , 4 which are rotatably supported by bearings 5 , 5 .
  • One of the shafts 4 , 4 has a motor rotor 3 a fixed thereto, and a motor stator 3 b is disposed so as to enclose the motor rotor 3 a .
  • the motor rotor 3 a and the motor stator 3 b constitute the motor 3 .
  • the motor 3 comprises an induction motor.
  • Timing gears 6 , 6 are fixed to end portions of the shafts 4 , 4 , respectively, and the pair of the pump rotors 1 , 1 are synchronously rotated in the opposite directions by the timing gears 6 , 6 .
  • a small clearance is formed between the pair of the pump rotors 1 , 1 themselves and also between the pump rotors 1 , 1 and the inner surface of the casing 2 so that the pump rotors 1 , 1 are rotated in a noncontact manner.
  • the vacuum pump of this embodiment comprises a control system 10 for controlling the operation of the vacuum pump.
  • the control system 10 incorporates a pump-rotor controller 15 therein for controlling rotation of the pump rotors 1 , 1 and stop of the pump rotors 1 , 1 .
  • FIG. 2 is a schematic view showing the control system including the pump-rotor controller according to the first embodiment of the present invention.
  • the control system comprises a three-phase power source 11 , an earth leakage breaker (ELB) 12 , an electromagnetic contactor 13 , and a thermal protector 14 .
  • the three-phase power source 11 is connected to the electromagnetic contactor 13 through the earth leakage breaker (ELB) 12
  • the electromagnetic contactor 13 is connected to the motor 3 through the thermal protector 14 .
  • the pump-rotor controller 15 for controlling the rotation of the pump rotors 1 , 1 (only one pump rotor is schematically shown in FIG. 2 ) and the stop of the pump rotors 1 , 1 is connected to the electromagnetic contactor 13 .
  • a circuit breaker (CB) may be used instead of the earth leakage breaker (ELB) 12 .
  • a start-switch (not shown) of the vacuum pump is connected to the pump-rotor controller 15 , and when the start-switch is operated, a start-command signal is sent from the pump-rotor controller 15 to the electromagnetic contactor 13 .
  • the electromagnetic contactor 13 is activated in response to the start-command signal, and a three-phase voltage is applied to the motor 3 from the three-phase power source 11 . Therefore, a rotational torque for rotating the pump rotors 1 , 1 in forward directions is imparted to the pump rotors 1 , 1 from the motor 3 , thus starting the vacuum pump.
  • the thermal protector 14 is provided for breaking current supplied from the three-phase power source 11 to stop the operation of the vacuum pump when the motor 3 is overloaded, thus preventing the overload and the overheat of the motor 3 from occurring.
  • the pump-rotor controller 15 includes a timer 16 , and when the vacuum pump is started, the pump rotors 1 , 1 are rotated or stopped in accordance with a predetermined pattern set in the timer 16 in advance.
  • the pattern of the timer 16 is set such that the pump rotors 1 , 1 are driven in the order of (1) forward-direction rotation (rotation of the pump rotors 1 , 1 in the forward directions), (2) stop, and (3) forward-direction rotation.
  • the pump rotors 1 , 1 are rotated in the forward directions, one of the pump rotors 1 , 1 is rotated in one direction (e.g. clockwise direction) and another pump rotor 1 is rotated in the opposite direction (e.g.
  • the rotation of the pump rotors 1 , 1 in the forward directions is defined as the rotation of the pump rotors 1 , 1 in directions in which the gas drawn in the casing 2 is delivered from the inlet port 7 toward the outlet port 8 .
  • the rotational torque for rotating the pump rotors 1 , 1 in the forward directions is imparted to the pump rotors 1 , 1 from the motor 3 . Thereafter, the rotational torque imparted to the pump rotors 1 , 1 is reduced to zero once. Subsequently, the rotational torque for rotating the pump rotors 1 , 1 in the forward directions is imparted to the pump rotors 1 , 1 from the motor 3 again.
  • FIG. 3 The basic structure of a vacuum pump of this embodiment is the same as that of the first embodiment, and will not be described in detail below.
  • FIG. 3 is a schematic view showing a control system including a pump-rotor controller according to the second embodiment of the present invention.
  • a control system of this embodiment comprises a three-phase power source 11 , an earth leakage breaker (ELB) 12 , and a frequency converter 21 .
  • the three-phase power source 11 is connected to the frequency converter 21 through the earth leakage breaker (ELB) 12 , and the frequency converter 21 is connected to the motor 3 .
  • the frequency converter 21 comprises a rectifier 22 , a power transistor 23 for generating a waveform to rotate the motor 3 , and a frequency-conversion controller 24 for controlling the frequency converter 21 .
  • a pump-rotor controller 15 for controlling rotation of the pump rotors 1 , 1 and stop of the pump rotors 1 , 1 is connected to the frequency converter 21 .
  • the pump-rotor controller 15 includes a timer 16 , as with the first embodiment. Specifically, when a start-switch (not shown) is operated, a start-command signal is sent from the pump-rotor controller 15 to the frequency converter 21 , and a three-phase voltage is applied to the motor 3 from the three-phase power source 11 . Thus, the pump rotors 1 , 1 are rotated in accordance with a predetermined pattern set in the timer 16 in advance. In this embodiment, as with the first embodiment, the pattern is set in the timer 16 such that the pump rotors 1 , 1 are driven by the motor 3 in the order of (1) forward-direction rotation, (2) stop, and (3) forward-direction rotation. A pattern for allowing the pump rotors 1 , 1 to repeat its rotation and stop several times may be set in the timer 16 .
  • the induction motor can be replaced with a brushless DC motor by replacing the frequency-conversion controller 24 with a brushless-DC-motor controller.
  • the pump rotor can be rotated in accordance with a predetermined pattern.
  • FIG. 4 The basic structure of a vacuum pump and parts of a control system denoted by identical reference numerals are the same as those of the first embodiment, and will not be described in detail below.
  • FIG. 4 is a schematic view showing a control system including a pump-rotor controller according to the third embodiment of the present invention.
  • a control system comprises a three-phase power source 11 , an earth leakage breaker (ELB) 12 , a first electromagnetic contactor 13 A, a second electromagnetic contactor 13 B, and a thermal protector 14 .
  • An induction motor is used as the motor 3 .
  • the first electromagnetic contactor 13 A and the second electromagnetic contactor 13 B are connected to a pump-rotor controller 15 , respectively, and are activated by receiving an operation-command signal from the pump-rotor controller 15 .
  • the three-phase power source 11 is connected to the first electromagnetic contactor 13 A and the second electromagnetic contactor 13 B through the earth leakage breaker (ELB) 12 , and the first electromagnetic contactor 13 A and the second electromagnetic contactor 13 B are connected to the motor 3 through the thermal protector 14 .
  • the first electromagnetic contactor 13 A applies a three-phase voltage of the three-phase power source 11 to the motor 3 with the phase sequence being kept as it is.
  • the second electromagnetic contactor 13 B applies the three-phase voltage of the three-phase power source 11 with the phase sequence being inverted from the phase sequence of the three-phase voltage of the three-phase power source 11 .
  • the pump-rotor controller 15 is constructed so as to rotate the pump rotors 1 , 1 in forward directions or reverse directions in accordance with a predetermined pattern set in the pump-rotor controller 15 in advance through the first electromagnetic contactor 13 A and the second electromagnetic contactor 13 B. Specifically, an operation-command signal is sent from the pump-rotor controller 15 to the first electromagnetic contactor 13 A and the second electromagnetic contactor 13 B alternately in accordance with the predetermined pattern.
  • the pattern is set in the pump-rotor controller 15 such that the pump rotors 1 , 1 are rotated in the order of the reverse directions and the forward directions.
  • one of the pump rotors 1 , 1 is rotated in one direction (e.g.
  • the operation-command signal is sent from the pump-rotor controller 15 to the second electromagnetic contactor 13 B.
  • the operation-command signal is sent from the pump-rotor controller 15 to the second electromagnetic contactor 13 B.
  • the three-phase voltage having an inverted phase sequence is applied to the motor 3 through the second electromagnetic contactor 13 B, and hence the rotational torque for rotating the pump rotors 1 , 1 in the reverse directions is imparted to the pump rotors 1 , 1 from the motor 3 .
  • the pump-rotor controller 15 stops sending the operation-command signal to the second electromagnetic contactor 13 B.
  • the operation-command signal is sent from the pump-rotor controller 15 to the first electromagnetic contactor 13 A.
  • the three-phase voltage of the three-phase power source 11 is applied to the motor 3 through the first electromagnetic contactor 13 A with the phase sequence being kept as it is. Therefore, the rotational torque for rotating the pump rotors 1 , 1 in the forward directions is imparted to the pump rotors 1 , 1 from the motor 3 .
  • FIG. 5 The basic structure of a vacuum pump and parts of a control system denoted by identical reference numerals are the same as those of the second embodiment, and will not be described in detail below.
  • FIG. 5 is a schematic view showing a control system including a pump-rotor controller according to the fourth embodiment of the present invention.
  • a pump-rotor controller 15 is constructed so as to send a start-command signal 101 for starting the vacuum pump and a control signal 102 for rotating the pump rotors 1 , 1 in the forward directions or the reverse directions in accordance with a predetermined pattern to the frequency-conversion controller 24 of the frequency converter 21 .
  • a pattern is set in the pump-rotor controller 15 such that the pump rotors 1 , 1 are rotated in the order of the reverse directions and the forward directions at the time of starting the vacuum pump, as with the third embodiment.
  • the control system of this embodiment shown in FIG. 5 is operated to start the vacuum pump as follows:
  • a start-switch (not shown) is operated, the start-command signal 101 is sent from the pump-rotor controller 15 to the frequency-conversion controller 24 .
  • the control signal 102 for rotating the motor 3 in the reverse direction is sent from the pump-rotor controller 15 to the frequency-conversion controller 24 . Therefore, the rotational torque for rotating the pump rotors 1 , 1 in the reverse directions is imparted to the pump rotors 1 , 1 from the motor 3 .
  • control signal 102 for rotating the motor 3 in the forward direction is sent from the pump-rotor controller 15 to the frequency-conversion controller 24 , and hence the rotational torque for rotating the pump rotors 1 , 1 in the forward directions is imparted to the pump rotors 1 , 1 from the motor 3 .
  • the induction motor can be replaced with a brushless DC motor by replacing the frequency-conversion controller 24 with a brushless-DC-motor controller.
  • the pump rotors 1 , 1 can be rotated in the forward directions or the reverse directions in accordance with a predetermined pattern.
  • FIG. 6 The basic structures of a vacuum pump and a control system of this embodiment are the same as those of the fourth embodiment, and will not be described in detail below.
  • FIG. 6 is a schematic view showing a control system including a pump-rotor controller according to the fifth embodiment of the present invention.
  • the vacuum pump of this embodiment comprises a current monitor 27 for monitoring current supplied to the motor 3 .
  • the current monitor 27 serves as a state-judging device for judging whether the pump rotors 1 , 1 are rotated normally or not at the time of starting the vacuum pump.
  • the current monitor 27 judges that the pump rotors 1 , 1 are not rotated normally. Specifically, if the product or the like deposited in the casing 2 prevents the pump rotors 1 , 1 from being rotated, current supplied to the motor 3 is detected to be in the abnormal state, and hence the current monitor 27 can judge that the pump rotors 1 , 1 are not rotated normally.
  • the current monitor 27 judges that the rotation of the pump rotors 1 , 1 is abnormal, the current monitor 27 sends an operation signal to the pump-rotor controller 15 .
  • the pump-rotor controller 15 is activated by receiving the operation signal to thereby rotate the motor 3 in accordance with a predetermined pattern which is set in the pump-rotor controller 15 in advance.
  • the pump-rotor controller 15 does not work until the operation signal is sent from the current monitor 27 to the pump-rotor controller 15 . Therefore, when the pump rotor can be rotated normally, the normal-starting operation is carried out, thus enabling the vacuum pump to be started quickly.
  • a rotation monitor for monitoring the rotation of the pump rotors 1 , 1 or a product monitor for monitoring the amount of the product deposited in the casing 2 may be provided instead of the current monitor 27 .
  • an optical sensor or a thermocouple may be used for monitoring the amount of the product deposited in the casing 2 .
  • the product monitor may send the operation signal to the pump-rotor controller 15 .
  • the vacuum pump according to the embodiments of the present invention has two pump rotors engaging with each other, the present invention can be applied to a vacuum pump having a single pump rotor or more than two pump rotors.
  • the rotation of the pump rotor (or pump rotors) in a forward direction (or forward directions) is defined as the rotation of the pump rotor (or pump rotors) in a direction (or directions) in which a gas is delivered from an inlet side toward an outlet side.
  • the rotation of the pump rotor (or pump rotors) in a reverse direction (or reverse directions) is defined as the rotation of the pump rotor (or pump rotors) in a direction (or directions) opposite to the forward direction (or forward directions).
  • the vacuum pump can be started normally.
  • the present invention is applicable to a vacuum pump and a method of starting a vacuum pump, and more particularly to a vacuum pump for evacuating a gas from a chamber used in a semiconductor fabrication apparatus or the like, and a method of starting such a vacuum pump.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
US10/524,688 2002-08-20 2003-08-11 Vacuum pump and method of starting the same Abandoned US20060198735A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002-239728 2002-08-20
JP2002239728 2002-08-20
PCT/JP2003/010207 WO2004018879A1 (fr) 2002-08-20 2003-08-11 Pompe a vide et procede de demarrage de cette pompe

Publications (1)

Publication Number Publication Date
US20060198735A1 true US20060198735A1 (en) 2006-09-07

Family

ID=31943869

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/524,688 Abandoned US20060198735A1 (en) 2002-08-20 2003-08-11 Vacuum pump and method of starting the same

Country Status (6)

Country Link
US (1) US20060198735A1 (fr)
EP (1) EP1540185B1 (fr)
KR (1) KR20050059076A (fr)
CN (1) CN1675469A (fr)
TW (1) TWI318665B (fr)
WO (1) WO2004018879A1 (fr)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060099083A1 (en) * 2002-10-24 2006-05-11 Hope Mark C Dry pumps
US20070177999A1 (en) * 2006-01-20 2007-08-02 Toshiro Fujii Electric pump for hydrogen circulation
US20080063536A1 (en) * 2006-09-12 2008-03-13 Ryosuke Koshizaka Method of controlling the stopping operation of vacuum pump and device therefor
US20090097984A1 (en) * 2007-10-12 2009-04-16 Ebara Corporation Operation control device for vacuum pump and method for stopping operation thereof
US20100316503A1 (en) * 2007-02-16 2010-12-16 Grundfos Management A/S Pump unit
US20140265742A1 (en) * 2013-03-15 2014-09-18 Nidec Motor Corporation Multiple speed motor with thermal overload protection
US20150120062A1 (en) * 2013-10-29 2015-04-30 Regal Beloit America, Inc. System and method for enabling a motor controller to communicate using multiple different communication protocols
US10260559B2 (en) 2013-01-28 2019-04-16 Shimadzu Corporation Motor driving device and vacuum pump
CN115030880A (zh) * 2022-07-02 2022-09-09 梅志文 一种气动真空泵
US20240410373A1 (en) * 2023-06-07 2024-12-12 Zoeller Pump Company, Llc Reversing polarity of a pump on failure, and applications thereof

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US4664601A (en) * 1984-07-25 1987-05-12 Hitachi, Ltd. Operation control system of rotary displacement type vacuum pump
US5518373A (en) * 1993-02-16 1996-05-21 Zexel Corporation Compressor start-up controller
US5961291A (en) * 1996-08-30 1999-10-05 Hitachi, Ltd. Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump

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GB2102072A (en) * 1981-05-05 1983-01-26 Denco Agr Limited Sliding-vane type rotary compressor
JP3929185B2 (ja) * 1998-05-20 2007-06-13 株式会社荏原製作所 真空排気装置及び方法

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Publication number Priority date Publication date Assignee Title
US4664601A (en) * 1984-07-25 1987-05-12 Hitachi, Ltd. Operation control system of rotary displacement type vacuum pump
US5518373A (en) * 1993-02-16 1996-05-21 Zexel Corporation Compressor start-up controller
US5961291A (en) * 1996-08-30 1999-10-05 Hitachi, Ltd. Turbo vacuum pump with a magnetically levitated rotor and a control unit for displacing the rotator at various angles to scrape deposits from the inside of the pump

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8398376B2 (en) * 2002-10-24 2013-03-19 Edwards Limited Dry pumps
US20060099083A1 (en) * 2002-10-24 2006-05-11 Hope Mark C Dry pumps
US20070177999A1 (en) * 2006-01-20 2007-08-02 Toshiro Fujii Electric pump for hydrogen circulation
US8491279B2 (en) 2006-01-20 2013-07-23 Kabushiki Kaisha Toyota Jidoshokki Electric pump for hydrogen circulation
US20080063536A1 (en) * 2006-09-12 2008-03-13 Ryosuke Koshizaka Method of controlling the stopping operation of vacuum pump and device therefor
US20100316503A1 (en) * 2007-02-16 2010-12-16 Grundfos Management A/S Pump unit
US10443601B2 (en) * 2007-02-21 2019-10-15 Grundfos Management A/S Pump unit having an elctric drive motor and electronic control device
US20090097984A1 (en) * 2007-10-12 2009-04-16 Ebara Corporation Operation control device for vacuum pump and method for stopping operation thereof
US8172544B2 (en) * 2007-10-12 2012-05-08 Ebara Corporation Operation control device for vacuum pump and method for stopping operation thereof
US10260559B2 (en) 2013-01-28 2019-04-16 Shimadzu Corporation Motor driving device and vacuum pump
US20140265742A1 (en) * 2013-03-15 2014-09-18 Nidec Motor Corporation Multiple speed motor with thermal overload protection
US9742246B2 (en) * 2013-03-15 2017-08-22 Nidec Motor Corporation Multiple speed motor with thermal overload protection
US9413211B2 (en) * 2013-03-15 2016-08-09 Nidec Motor Corporation Multiple speed motor with thermal overload protection
US9897986B2 (en) * 2013-10-29 2018-02-20 Regal Beloit America, Inc. System and method for enabling a motor controller to communicate using multiple different communication protocols
US20150120062A1 (en) * 2013-10-29 2015-04-30 Regal Beloit America, Inc. System and method for enabling a motor controller to communicate using multiple different communication protocols
CN115030880A (zh) * 2022-07-02 2022-09-09 梅志文 一种气动真空泵
US20240410373A1 (en) * 2023-06-07 2024-12-12 Zoeller Pump Company, Llc Reversing polarity of a pump on failure, and applications thereof

Also Published As

Publication number Publication date
KR20050059076A (ko) 2005-06-17
TW200404124A (en) 2004-03-16
EP1540185A1 (fr) 2005-06-15
EP1540185B1 (fr) 2013-02-13
WO2004018879A1 (fr) 2004-03-04
CN1675469A (zh) 2005-09-28
TWI318665B (en) 2009-12-21

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