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US20020079195A1 - Carrier positional displacement detecting mechanism - Google Patents

Carrier positional displacement detecting mechanism Download PDF

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Publication number
US20020079195A1
US20020079195A1 US10/022,082 US2208201A US2002079195A1 US 20020079195 A1 US20020079195 A1 US 20020079195A1 US 2208201 A US2208201 A US 2208201A US 2002079195 A1 US2002079195 A1 US 2002079195A1
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US
United States
Prior art keywords
carrier
positional displacement
detecting mechanism
shaft
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/022,082
Inventor
Seiji Kuninobu
Osamu Arakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ando Electric Co Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Assigned to ANDO ELECTRIC CO., LTD. reassignment ANDO ELECTRIC CO., LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ARAKAWA, OSAMU, KUNINOBU, SEIJI
Publication of US20020079195A1 publication Critical patent/US20020079195A1/en
Abandoned legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Definitions

  • the invention relates to a carrier positional displacement detecting mechanism which is suitable for positioning a carrier relative to a test board on which IC sockets are disposed in a horizontal conveyance type auto-handler.
  • a horizontal conveyance type auto-handler for horizontally conveying a carrier on which ICs are mounted of auto-handlers which automatically supply ICs, upon completion of assembly thereof, to a test system and automatically classify and accommodate the ICs based on the result of a test.
  • a conventional carrier positional displacement detection in the horizontal conveyance type auto-handler will be described next.
  • FIG. 3 is a view showing a conventional carrier positional displacement detecting mechanism provided with IC sockets, carriers, contact pushers, and the like.
  • FIG. 4 is a sectional view taken along guide pins in FIG. 3. As shown in FIGS. 3 and 4, a plurality of IC sockets 3 are provided on a test board 2 , while guide pins 3 a are provided upright on each IC socket. Guide pins 1 are provided upright on the test board 2 .
  • a carrier 4 is conveyed horizontally by a conveyance mechanism, not shown, in the direction of an arrow A in FIG. 3 while a plurality of carrier dowels 5 for holding individual ICs 7 are provided on the carrier 4 .
  • the carrier 4 conveyed onto the test board 2 is lowered toward the test board 2 by an elevating mechanism, not shown, in the direction of the arrow B in FIG. 4.
  • the contact pusher 6 is lowered from the above of the carrier 4 so that the ICs 7 on the carrier 4 are forced to contact the IC sockets 3 by the contact pusher 6 , thereby testing the ICs 7 .
  • the foregoing problem of the positional displacement of a carrier is solved by detecting a positional displacement of the carrier when the carrier is positioned relative to a test board, and it is an object of the invention to provide and advantageous carrier positional displacement detecting mechanism without taking time for detecting the position.
  • a first aspect of the invention resides in a carrier positional displacement detecting mechanism provided in an auto-handler comprising, as shown in FIG. 1, a carrier ( 4 ) for mounting an IC thereon, and a measuring part ( 2 ) for measuring the IC mounted on the carrier ( 4 ), said carrier ( 4 ) having a positioning hole ( 4 a ), and a measuring part ( 2 ) having a projection ( 11 ) wherein the projection ( 11 ) is inserted into the positioning hole ( 4 a ) so as to position the carrier ( 4 ) relative to the measuring part ( 2 ), and wherein the carrier positional displacement detecting mechanism comprises positional displacement time contact means ( 8 ) projected from and disposed on each tip end of the projection ( 11 ) and capable of passing through the positioning hole ( 4 a ) only when the projection ( 11 ) and the positioning hole ( 4 a ) correspond to each other, and contact detection means ( 9 ) for detecting the contact between the positional displacement time contact means ( 8 ) and the carrier ( 4 ),
  • the carrier positional displacement detecting mechanism is characterized in that the positional displacement time contact means ( 8 ) in the first aspect of the invention is a shaft projected from and biased by the projection ( 11 ) and the contact detection means ( 9 ) is in the first aspect of the invention is a sensor for detecting a rear end ( 8 b ) of the shaft ( 8 ).
  • the carrier positional displacement detecting mechanism is characterized in that the positioning operation of the carrier ( 4 ) is stopped when the contact detection means ( 9 ) detects the carrier positional displacement signal.
  • FIG. 1 is view showing a state where the position of a carrier in a carrier positional displacement detecting mechanism according to a preferred embodiment of the invention is displaced.
  • FIG. 2 is view showing a state where the position of a carrier is in a carrier positional displacement detecting mechanism according to a preferred embodiment of the invention is in a normal position.
  • FIG. 3 is a view showing a conventional carrier positional displacement detecting mechanism provided with IC sockets, carriers, contact pushers, and the like.
  • FIG. 4 is a sectional view taken along guide pins in FIG. 3.
  • FIG. 1 is view showing a state where the position of a carrier in a carrier positional displacement detecting mechanism according to a preferred embodiment of the invention is displaced, wherein FIG. 1(A) shows a state before the carrier is lowered, and FIG. 1(B) shows a state after the carrier is lowered.
  • FIG. 2 is view showing a state where the position of a carrier is in a carrier positional displacement detecting mechanism according to a preferred embodiment of the invention is in a normal position, wherein FIG. 2(A) shows a state before the carrier is lowered, and FIG. 2(B) shows a state after the carrier is lowered.
  • Basic constituents such as a test board, carriers, contact pushers, and the like are substantially the same as those set forth in the prior art of the invention (see FIGS. 3 and 4), and the improvement of the invention resides in the constituent of guide pins provided on the test board and the neighborhood thereof. Accordingly, the constituents of the test board and carriers, and the like as described in the prior art are depicted by the same reference numerals and the explanation thereof is omitted.
  • a guide pin 11 (positioning projection) is provided on a carrier 4 instead of the guide pin 1 as explained in the prior art with reference to FIGS. 1 and 2, and it is inserted into a guide hole 4 a of the carrier 4 for positioning the carrier 4 .
  • a through hole 1 a is formed on the center of the guide pin 11 , and a shaft 8 or contact means at positional displacement time (hereinafter referred to as positional displacement time contact means) is inserted into the through hole 11 a to be freely movable up and down.
  • a compression coil spring 10 (hereinafter simply referred to as a spring 10 ) is provided inside the through hole 11 a for protruding and biasing the shaft 8 upward.
  • the tip end 8 a of the shaft 8 protrudes more than that of the guide pin 11
  • the rear end 8 b of the shaft 8 protrudes downward (lower side of the test board 2 ) more than the lower end of the guide pin 11 .
  • An optical sensor 9 (contact detection means) is provided at the position where the rear end 8 b of the shaft 8 is forced to enter and extract from the through hole 11 a when the shaft 8 is moved up and down.
  • the carrier positional displacement detecting mechanism is structured by the constituents set forth above.
  • the contact detection means may be replaced by a contact-type or non-contact type contact detection means.
  • the carrier 4 In a normal operation, as shown in FIG. 2(A), the carrier 4 , on which a non -measured IC 7 (not shown) is mounted, is conveyed onto the test board 2 (measuring part). Since the carrier 4 is correctly positioned on the test board 2 in the case as illustrated in FIG. 2(A), when the carrier 4 is lowered toward the test board 2 , the guide pin 11 is inserted and engaged in the positioning hole 4 a of the carrier 4 so that the carrier 4 is properly positioned onto the test board 2 as shown in FIG. 2(B).
  • the tip end 8 a of the shaft 8 does not contact the carrier 4 and the like, the shaft 8 does not move up and down, and hence the rear end 8 b of the shaft 8 does not intercept the optical sensor 9 . That is, in this case, the positional displacement of the carrier 4 is not detected, and hence the lowering operation and the like of the carrier 4 are not interrupted.
  • the optical sensor 9 When the optical sensor 9 is intercepted, it outputs a carrier positional displacement detection signal.
  • the carrier 4 is once raised up to the conveyance position and adjusted in position, then it is lowered again, and the positioning operation of the carrier 4 is resumed again.
  • the optical sensor 9 outputs the detection signal only in the case where the position of the carrier 4 is displaced when the carrier 4 is actually lowered, so that the lowering of the carrier 4 is interrupted. That is, additional time for detecting position of the carrier 4 is not required, and hence an index time is not prolonged, which is very convenient.
  • the positional displacement time contact means contacts the carrier 4 , and the contact detection means outputs the positional displacement detection signal.
  • the positional displacement of the carrier 4 is detected.
  • it is possible to take measures for interrupting the lowering of the carrier 4 so that the deformation or breakage of the carrier 4 can be prevented in advance.
  • additional time for detecting position of the carrier 4 is not required, and hence the operation time is not extended, which is very convenient.
  • the carrier positional displacement detecting mechanism with a simple construction comprising the shaft and the sensor for detecting the rear end of the shaft.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measuring Leads Or Probes (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

In a horizontal conveyance type auto-handler, the operation of a carrier is stopped when a positional displacement of the carrier relative to a test board is detected. A shaft is provided on a center of a guide pin on the test board. When the carrier which is displaced relative to the test board is lowered, the shaft is pushed down by the carrier, and the lowering of the shaft is detected by an optical sensor, thereby stopping the lowering operation of the carrier.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention: [0001]
  • The invention relates to a carrier positional displacement detecting mechanism which is suitable for positioning a carrier relative to a test board on which IC sockets are disposed in a horizontal conveyance type auto-handler. [0002]
  • 2. Description of the Prior Art: [0003]
  • There is a horizontal conveyance type auto-handler for horizontally conveying a carrier on which ICs are mounted of auto-handlers which automatically supply ICs, upon completion of assembly thereof, to a test system and automatically classify and accommodate the ICs based on the result of a test. A conventional carrier positional displacement detection in the horizontal conveyance type auto-handler will be described next. [0004]
  • FIG. 3 is a view showing a conventional carrier positional displacement detecting mechanism provided with IC sockets, carriers, contact pushers, and the like. FIG. 4 is a sectional view taken along guide pins in FIG. 3. As shown in FIGS. 3 and 4, a plurality of [0005] IC sockets 3 are provided on a test board 2, while guide pins 3a are provided upright on each IC socket. Guide pins 1 are provided upright on the test board 2.
  • A [0006] carrier 4 is conveyed horizontally by a conveyance mechanism, not shown, in the direction of an arrow A in FIG. 3 while a plurality of carrier dowels 5 for holding individual ICs 7 are provided on the carrier 4. The carrier 4 conveyed onto the test board 2 is lowered toward the test board 2 by an elevating mechanism, not shown, in the direction of the arrow B in FIG. 4.
  • When the [0007] carrier 4 is lowered, guide pins 1 on the test board 2 are inserted into and engaged in holes 4a defined in the carrier 4. As a result, the entire carrier 4 is positioned relative to the test board 2. Thereafter, guide pins 3 a on the IC sockets 3 are inserted into and engaged in carrier dowel guide holes 5 a defined in each carrier dowel 5 corresponding to each IC socket 3, so that individual ICs 7 are positioned relative to the IC sockets 3.
  • After positioning of each [0008] IC 7 relative to each IC socket 3, the contact pusher 6 is lowered from the above of the carrier 4 so that the ICs 7 on the carrier 4 are forced to contact the IC sockets 3 by the contact pusher 6, thereby testing the ICs 7.
  • However, according to the conventional carrier positional displacement detecting mechanism having the construction set forth above, if the [0009] carrier 4 conveyed onto the test board 2 is lowered while it is not located at a normal position owing to a faulty operation of the conveyance mechanism or setting error by an operator, there occurs a problem that the guide pins 1 on the test board 2 are not inserted or engaged into the guide holes 4 a, and further the contact pusher 6 is lowered, so that the carrier 4 is sandwiched between the contact pusher 6 and the guide pins 1.
  • To solve the foregoing inconvenience, for example, it is conceived such a construction the position of the [0010] carrier 4 is detected by a sensor which is installed previously, then the carrier 4 is lowered toward the test board 2. However, this construction has a drawback that it takes time for detecting the position of the carrier 4 by the sensor, causing a problem that index time is prolonged.
  • SUMMARY OF THE INVENTION
  • In view of the foregoing circumstances, the foregoing problem of the positional displacement of a carrier is solved by detecting a positional displacement of the carrier when the carrier is positioned relative to a test board, and it is an object of the invention to provide and advantageous carrier positional displacement detecting mechanism without taking time for detecting the position. [0011]
  • A first aspect of the invention resides in a carrier positional displacement detecting mechanism provided in an auto-handler comprising, as shown in FIG. 1, a carrier ([0012] 4) for mounting an IC thereon, and a measuring part (2) for measuring the IC mounted on the carrier (4), said carrier (4) having a positioning hole (4 a), and a measuring part (2) having a projection (11) wherein the projection (11) is inserted into the positioning hole (4 a) so as to position the carrier (4) relative to the measuring part (2), and wherein the carrier positional displacement detecting mechanism comprises positional displacement time contact means (8) projected from and disposed on each tip end of the projection (11) and capable of passing through the positioning hole (4 a) only when the projection (11) and the positioning hole (4 a) correspond to each other, and contact detection means (9) for detecting the contact between the positional displacement time contact means (8) and the carrier (4) and outputting a carrier positional displacement signal.
  • The carrier positional displacement detecting mechanism according to the second aspect of the invention is characterized in that the positional displacement time contact means ([0013] 8) in the first aspect of the invention is a shaft projected from and biased by the projection (11) and the contact detection means (9) is in the first aspect of the invention is a sensor for detecting a rear end (8 b) of the shaft (8).
  • The carrier positional displacement detecting mechanism according to the third aspect of the invention is characterized in that the positioning operation of the carrier ([0014] 4) is stopped when the contact detection means (9) detects the carrier positional displacement signal.
  • The reference numerals set forth here are provided for comparing with the attached drawings, but they do not constituents of the invention.[0015]
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is view showing a state where the position of a carrier in a carrier positional displacement detecting mechanism according to a preferred embodiment of the invention is displaced. [0016]
  • FIG. 2 is view showing a state where the position of a carrier is in a carrier positional displacement detecting mechanism according to a preferred embodiment of the invention is in a normal position. [0017]
  • FIG. 3 is a view showing a conventional carrier positional displacement detecting mechanism provided with IC sockets, carriers, contact pushers, and the like. [0018]
  • FIG. 4 is a sectional view taken along guide pins in FIG. 3. [0019]
  • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • FIG. 1 is view showing a state where the position of a carrier in a carrier positional displacement detecting mechanism according to a preferred embodiment of the invention is displaced, wherein FIG. 1(A) shows a state before the carrier is lowered, and FIG. 1(B) shows a state after the carrier is lowered. FIG. 2 is view showing a state where the position of a carrier is in a carrier positional displacement detecting mechanism according to a preferred embodiment of the invention is in a normal position, wherein FIG. 2(A) shows a state before the carrier is lowered, and FIG. 2(B) shows a state after the carrier is lowered. [0020]
  • Basic constituents such as a test board, carriers, contact pushers, and the like are substantially the same as those set forth in the prior art of the invention (see FIGS. 3 and 4), and the improvement of the invention resides in the constituent of guide pins provided on the test board and the neighborhood thereof. Accordingly, the constituents of the test board and carriers, and the like as described in the prior art are depicted by the same reference numerals and the explanation thereof is omitted. [0021]
  • A guide pin [0022] 11 (positioning projection) is provided on a carrier 4 instead of the guide pin 1 as explained in the prior art with reference to FIGS. 1 and 2, and it is inserted into a guide hole 4 a of the carrier 4 for positioning the carrier 4. A through hole 1 a is formed on the center of the guide pin 11, and a shaft 8 or contact means at positional displacement time (hereinafter referred to as positional displacement time contact means) is inserted into the through hole 11 a to be freely movable up and down.
  • A compression coil spring [0023] 10 (hereinafter simply referred to as a spring 10) is provided inside the through hole 11 a for protruding and biasing the shaft 8 upward. The tip end 8 a of the shaft 8 protrudes more than that of the guide pin 11, and the rear end 8 b of the shaft 8 protrudes downward (lower side of the test board 2) more than the lower end of the guide pin 11. An optical sensor 9 (contact detection means) is provided at the position where the rear end 8 b of the shaft 8 is forced to enter and extract from the through hole 11 a when the shaft 8 is moved up and down. The carrier positional displacement detecting mechanism is structured by the constituents set forth above. The contact detection means may be replaced by a contact-type or non-contact type contact detection means.
  • In a normal operation, as shown in FIG. 2(A), the [0024] carrier 4, on which a non -measured IC 7 (not shown) is mounted, is conveyed onto the test board 2 (measuring part). Since the carrier 4 is correctly positioned on the test board 2 in the case as illustrated in FIG. 2(A), when the carrier 4 is lowered toward the test board 2, the guide pin 11 is inserted and engaged in the positioning hole 4 a of the carrier 4 so that the carrier 4 is properly positioned onto the test board 2 as shown in FIG. 2(B).
  • As shown in FIGS. [0025] 2(A) and 2(B), the tip end 8 a of the shaft 8 does not contact the carrier 4 and the like, the shaft 8 does not move up and down, and hence the rear end 8 b of the shaft 8 does not intercept the optical sensor 9. That is, in this case, the positional displacement of the carrier 4 is not detected, and hence the lowering operation and the like of the carrier 4 are not interrupted.
  • Then, although the [0026] carrier 4 is lowered even if the position of the conveyed carrier 4 is displaced from the test board 2 as shown in FIG. 1(A), the guide pin 11 provided on the test board 2 is neither inserted and nor engaged in the positioning hole 4 a of the carrier 4, and hence the tip end 8 a of the shaft 8 is brought into contact with the portion other than the positioning hole 4 a of the 4 as shown in FIG. 1(B). As a result, the shaft 8 is moved downward while resisting the spring 10, so that the rear end 8 b of the shaft 8 intercepts the optical sensor 9.
  • When the optical sensor [0027] 9 is intercepted, it outputs a carrier positional displacement detection signal. A controller of an autohandler, not shown, interrupts the lowering of the carrier 4 based on the carrier positional displacement detection signal. As a result, the inconvenience that the carrier 4 is sandwiched between the contact pressure and the guide pin is solved. Thereafter, the carrier 4 is once raised up to the conveyance position and adjusted in position, then it is lowered again, and the positioning operation of the carrier 4 is resumed again.
  • As mentioned in detail above, since the invention adopts the carrier positional displacement detecting mechanism, even if the position of the [0028] carrier 4 is not detected in advance before the carrier 4 is lowered, the optical sensor 9 outputs the detection signal only in the case where the position of the carrier 4 is displaced when the carrier 4 is actually lowered, so that the lowering of the carrier 4 is interrupted. That is, additional time for detecting position of the carrier 4 is not required, and hence an index time is not prolonged, which is very convenient.
  • According to the invention, only in the case where the position of the [0029] carrier 4 is displaced when the carrier 4 is actually lowered, the positional displacement time contact means contacts the carrier 4, and the contact detection means outputs the positional displacement detection signal. In such a manner, the positional displacement of the carrier 4 is detected. When the positional displacement of the carrier 4 is detected, it is possible to take measures for interrupting the lowering of the carrier 4, so that the deformation or breakage of the carrier 4 can be prevented in advance. Further, additional time for detecting position of the carrier 4 is not required, and hence the operation time is not extended, which is very convenient.
  • Further, according to the invention, it is possible to structure the carrier positional displacement detecting mechanism with a simple construction comprising the shaft and the sensor for detecting the rear end of the shaft. [0030]

Claims (3)

What is claimed is:
1. A carrier positional displacement detecting mechanism provided in an auto-handler comprising a carrier for mounting an IC thereon, and a measuring part for measuring the IC mounted on the carrier, said carrier having a positioning hole, and a measuring part having a projection wherein the projection is inserted into the positioning hole so as to position the carrier relative to the measuring part, said carrier positional displacement detecting mechanism comprising:
positional displacement time contact means projected from and disposed on each tip end of the projection and capable of passing through the positioning hole only when the projection and the positioning hole correspond to each other; and
contact detection means for detecting the contact between the positional displacement time contact means and the carrier and outputting a carrier positional displacement signal.
2. The carrier positional displacement detecting mechanism according to claim 1, wherein the positional displacement time contact means is a shaft projected from and biased by the projection and the contact detection means is a sensor for detecting a rear end of the shaft.
3. The carrier positional displacement detecting mechanism according to claim 1, wherein the positioning operation of the carrier is stopped when the contact detection means detects the carrier positional displacement signal.
US10/022,082 2000-12-22 2001-12-13 Carrier positional displacement detecting mechanism Abandoned US20020079195A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000-391402 2000-12-22
JP2000391402A JP2002196039A (en) 2000-12-22 2000-12-22 Carrier displacement detection mechanism

Publications (1)

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US20020079195A1 true US20020079195A1 (en) 2002-06-27

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JP (1) JP2002196039A (en)
KR (1) KR100451964B1 (en)
TW (1) TWI221903B (en)

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US20150165578A1 (en) * 2013-12-12 2015-06-18 Seagate Technology Llc Positioning apparatus

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KR100815136B1 (en) * 2006-11-10 2008-03-20 세크론 주식회사 Strip Picker Device for Semiconductor Devices
JP5191924B2 (en) * 2009-02-18 2013-05-08 セイコーインスツル株式会社 Semiconductor inspection equipment
JP5113275B2 (en) * 2011-03-28 2013-01-09 京楽産業.株式会社 Inspection preparation equipment for control boards for gaming machines
JP6203589B2 (en) * 2013-09-30 2017-09-27 株式会社ディスコ Chuck table
KR101629447B1 (en) 2015-12-03 2016-06-10 이은보 Lightweight stainless steel pipe roller
CN116443730B (en) * 2023-06-13 2023-08-25 上海新创达半导体设备技术有限公司 Auxiliary crown block compensation correction system and control method

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US5855829A (en) * 1994-05-10 1999-01-05 Procontrol Ag Method and apparatus for controlling the nozzle engagement in an electric injection molding machine
US5800205A (en) * 1995-02-28 1998-09-01 Ando Electrical Co., Ltd. Contact mechanism for IC testing
US6537133B1 (en) * 1995-03-28 2003-03-25 Applied Materials, Inc. Method for in-situ endpoint detection for chemical mechanical polishing operations
US5901829A (en) * 1995-12-27 1999-05-11 Kabushiki Kaisha Shinano Electronics Method of positioning an I.C. and IC handler utilizing said method
US6056530A (en) * 1997-04-29 2000-05-02 Axxicon Moulds Eindhoven B.V. Device for manufacturing information carriers by injection moulding
US6445203B1 (en) * 1998-12-08 2002-09-03 Advantest Corporation Electric device testing apparatus

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US20150165578A1 (en) * 2013-12-12 2015-06-18 Seagate Technology Llc Positioning apparatus
US9666465B2 (en) * 2013-12-12 2017-05-30 Seagate Technology Llc Positioning apparatus
US10541166B2 (en) 2013-12-12 2020-01-21 Seagate Technology Llc Positioning apparatus

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TWI221903B (en) 2004-10-11
KR100451964B1 (en) 2004-10-08
KR20020051846A (en) 2002-06-29
JP2002196039A (en) 2002-07-10

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Date Code Title Description
AS Assignment

Owner name: ANDO ELECTRIC CO., LTD., JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KUNINOBU, SEIJI;ARAKAWA, OSAMU;REEL/FRAME:012400/0879

Effective date: 20011203

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION