JP2000338179A - Automatic handler - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an attitude detecting mechanism for an IC of an automatic handler capable of detecting whether the IC is mounted normally on an IC socket in response to dispersion of IC package shapes or not, and capable of detecting thereby the attitude of the IC, by providing an area sensor of a wide detection range to detect a shading amount. SOLUTION: Sensor light sensitivity received by an area sensor lightreceiving side 1b in the case where an IC 4 is set normally onto an IC socket 2 is stored as 100% of reference value. When a detection determining reference value is, for example, 90% or less, it is determined that the IC 4 is not mounted normally on the IC socket 2 in the case where the sensor light sensitivity received by the area sensor receiving side 1b is changed from 100% at the time of a sensor light width C shown in (A) to 70% at the time of a sensor light width D shown in (B) to get lower than the detection determining reference value of 90%.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic handler IC detection mechanism. In particular, an IC used for a horizontal transport type auto handler that sorts and transports an IC in a surface mount package by pressing an IC into an IC socket.
This is for the attitude detection mechanism of C.

[0002]

2. Description of the Related Art Conventionally, an integrated circuit (IC) has been used.
2. Description of the Related Art In an IC test system for measuring the electrical characteristics of an IC, an auto handler is used to transport an IC to be measured. The horizontal transfer type auto handler is
It has a function of sucking the IC and transporting it to the IC socket, and a measuring hand for pressing the transported IC against the IC socket. The horizontal transport type auto handler (hereinafter abbreviated as auto handler) has a posture of the IC. It has a detection mechanism.

FIG. 4 shows a conventional attitude detecting mechanism of an IC of an auto-handler. FIG. 4A is a view showing a state in which the IC is correctly placed at a predetermined position in the measuring section of the auto-handler, and the IC socket 2, the test board 3, the IC 4,
Suction nozzle 5, contact pusher 6, base 7, fiber sensor light emitting side 8a, fiber sensor light receiving side 8b
Is arranged.

In FIG. 4A, an IC 4 sucked and conveyed by a suction nozzle 5 of an auto handler is correctly placed at a predetermined position of an IC socket 2 of a measuring section. At this time, the position of the upper surface of the IC 4 mounted on the IC socket 2 is at a distance of the dimension A from the upper surface of the base 7, and the fiber sensor light emitting side 8 a to the fiber sensor light receiving side 8 b By adjusting the position E (the distance from the upper surface of the base 7 to E) through which the optical axis passes through, the sensor light can be received without interruption from the fiber sensor light emitting side 8a to the fiber sensor light receiving side 8b. As a result, it is detected that the IC 4 is not tilted.

FIG. 4B is a view showing a state in which the IC 4 is placed on the IC socket 2 by the automatic handler as in FIG. 4A, but FIG. This shows a case where the device has been placed in the socket 2. In this case, the sensor light emitted from the fiber sensor light emitting side 8a is blocked by the IC 4 tilted and mounted on the IC socket 2 and cannot be received by the fiber sensor light receiving side 8b. Can be detected.

As shown in FIG. 4A, the sensor light is received from the fiber sensor light emitting side 8a to the fiber sensor light receiving side 8b without being interrupted, so that the IC 4 is normally placed at a predetermined position of the IC socket 2. When the IC 4 is detected, the contact pusher 6 is lowered after the IC 4 is placed on the IC socket 2 and the IC 4 is pressed against the IC socket 2 to test the electrical characteristics.

As shown in FIG. 4B, the sensor light emitted from the fiber sensor light emitting side 8a is blocked by the IC 4 mounted on the IC socket 2 at an angle, and is not received by the fiber sensor 8b. When it is detected that the IC 4 is not properly placed at a predetermined position of the socket 2, an alarm is issued to inform that the IC 4 is not properly placed in the IC socket 2 before lowering the contact pusher 6. Then, the operation of the measuring unit is stopped. Therefore,
When the IC 4 is not properly placed in the IC socket 2, the contact pusher 6 does not damage the IC 4.

[0008]

However, the conventional auto-handler provided with the above-described IC attitude detecting mechanism has the following problems. In the case of the conventional auto-handler equipped with the posture detection mechanism of the IC, in the case of FIG. 4 described above, the fact that the IC 4 is not properly mounted on the IC socket 2 indicates that the sensor light from the fiber sensor light emitting side 8a has been detected. Is not detected by the fiber sensor 8b.

However, as shown in FIG. 5, when the connection position between the IC socket 2 and the IC 4 changes due to a change in the type of the IC to be measured, the I
The position of the upper surface of C4 is changed from the distance A in FIG. 4 to the distance A ′ (A
<A ′), and the IC 4 is tilted as shown in FIG.
Even when the IC 4 is mounted on the socket 2, the sensor light passes over the IC 4 in the same manner as when the IC 4 of FIG. 5A is set normally. It may be misrecognized.

Therefore, in the case shown in FIG. 5B, the fiber sensor light emitting side 8a is connected to the fiber sensor light emitting side 8a.
It is necessary to adjust the position of the optical axis so that the optical axis that passes to b passes directly above the IC 4.

Such erroneous recognition can be considered in addition to the case of FIG. For example, contrary to the case of FIG. 5, when the type of the IC changes, the upper surface position of the IC 4 from the upper surface of the base 7 becomes shorter than the distance A of FIG. 4, or only the thickness of the package of the IC 4 changes, resulting in Various cases are assumed, such as when the upper surface position of the IC 4 changes. In particular, in recent years, IC packages have been diversified, and ICs of various standards have increased, and it has been necessary to adjust the position E of the optical axis for each type. In the case of high-mix low-volume production, the frequency of adjusting the position E of the general-purpose type auto handler increases.

Alternatively, in order to save the trouble of adjusting the position E of the optical axis depending on the type of IC every time a different type of IC is tested, the upper surface position of the IC 4 in FIG. It is sufficient to provide a component for fixing the height by mounting it on the IC socket so that the IC 4 is placed at the position A. As described above, components or units of various dimensions are prepared for the diversified IC packages. And the need to replace parts each time a different type of IC is tested, which is very time consuming.

An object of the present invention is to provide an area sensor having a wide detection range, and to detect whether or not the IC is normally mounted on the IC socket according to the variation in the IC package shape by detecting the amount of light shielding. An object of the present invention is to provide a posture detecting mechanism of an IC of an auto handler that performs detection.

[0014]

According to the first aspect of the present invention,
A transport unit for sucking the IC and transporting the IC to the IC socket, a measuring hand for pressing the IC against the IC socket, and the IC
An auto-handler comprising: an IC attitude detecting means for detecting an attitude of the IC mounted on the socket;
The attitude detecting means of C detects the attitude of the IC in a predetermined space above the IC socket based on the amount of the IC serving as a light shield.

According to the first aspect of the present invention, a transport unit for sucking an IC and transporting the IC to the IC socket, a measuring hand for pressing the IC against the IC socket, and the IC mounted on the IC socket An IC attitude detecting means for detecting the attitude of the IC, wherein the attitude detecting means for the IC is provided in a predetermined space above the IC socket,
The attitude of the IC is detected based on the amount of the IC serving as a light shield.

[0016] Therefore, the I mounted on the IC socket is
Whether the posture of C is normal or abnormal can be determined in a predetermined space above the IC socket.

According to a second aspect of the present invention, the posture detecting means of the IC is an area sensor having a light emitting side and a light receiving side for emitting and receiving band-shaped light with respect to the predetermined space. Detecting the attitude of the IC mounted on the IC socket based on the amount of received light.

According to the second aspect of the present invention, the posture detecting means of the IC is an area sensor having a light emitting side and a light receiving side for emitting and receiving band-shaped light with respect to the predetermined space. The IC based on the detected amount of received light
The attitude of the IC mounted on the socket is detected.

Therefore, based on the amount of light received on the light receiving side of the area sensor, the I
It can be determined whether the posture of C is normal or abnormal.

The invention according to claim 3 is characterized in that the area sensor further comprises an adjusting means for adjusting the light receiving sensitivity on the light receiving side according to various shapes of the IC socket and the IC.

According to the third aspect of the present invention, the area sensor adjusts the light receiving sensitivity on the light receiving side by adjusting means according to various shapes of the IC socket and the IC.

Therefore, the light receiving sensitivity detected on the light receiving side of the area sensor when the IC is normally mounted on the IC socket can be adjusted according to various shapes of the IC socket and the IC.

According to a fourth aspect of the present invention, the area sensor further comprises a storage means for storing, as a reference value, the amount of light received on the light receiving side when the posture of the IC mounted on the IC socket is normal. And determining whether the posture of the IC is normal or abnormal based on a comparison result obtained by comparing the reference value stored in the storage means with the amount of light received on the light receiving side.

According to the fourth aspect of the present invention, the area sensor stores the amount of light received on the light receiving side when the posture of the IC mounted on the IC socket is normal as a reference value by the storage means. Then, it is determined whether the posture of the IC is normal or abnormal based on a comparison result obtained by comparing the reference value stored in the storage means with the amount of light received on the light receiving side.

Therefore, it is possible to reliably detect whether the posture of each IC is normal or abnormal by comparing the reference value stored in accordance with the shape of each IC socket and each IC with the amount of light received on the light receiving side.

According to a fifth aspect of the present invention, the area sensor determines whether the posture of the IC mounted on the IC socket is normal or abnormal based on the reference value stored by the storage means. Setting means for setting a detection reference value; determining whether the posture of the IC is normal or abnormal based on a comparison result of comparing the detection reference value set by the setting means with the amount of light received on the light receiving side. Is characterized.

According to the invention described in claim 5, the area sensor determines whether the posture of the IC mounted on the IC socket is normal or abnormal based on the reference value stored by the storage means. Setting means for setting a detection reference value for determining whether the posture of the IC is normal or abnormal based on a comparison result of comparing the detection reference value set by the setting means with the amount of light received on the light receiving side. Is determined.

Therefore, by comparing the detection reference value set based on the reference values stored in accordance with the various IC sockets and the shape of the IC with the amount of light received on the light receiving side, whether the posture of the various ICs is normal or abnormal is determined. Can be reliably detected.

[0029]

Embodiments of the present invention will be described below in detail with reference to the drawings. 1 to 3 are diagrams showing an embodiment of an auto handler to which the present invention is applied. First, the configuration will be described. FIGS. 7A and 7B are diagrams showing components of an IC attitude detection mechanism of the auto handler and an IC attitude detection state according to the embodiment of the present invention. FIG.
4A and 4B, the same components as those of the auto handler shown in FIGS. 4A and 4B are denoted by the same reference numerals, and the description of the configuration will be omitted.

In FIG. 1A, the IC of the auto-handler
The attitude detection mechanism is such that the fiber sensor light emitting side 8a and the fiber sensor light receiving side 8b attached to the base 7 in FIGS. 4A and 4B are changed to the area sensor light emitting side 1a and the area sensor light receiving side 1b. It is.

The area sensor is a kind of fiber sensor, and the fiber sensor shown in FIGS. 4 and 5 detects the presence or absence of an object with light having a small spot diameter, whereas the area sensor shown in FIG. 1 is wide. By projecting and receiving the band-shaped light, an object within the range of the band width can be detected. In the area sensor, the light receiving sensitivity changes depending on the amount of the blocked sensor light, and thus the sensitivity difference can be used as a detection result.

FIG. 1A shows a state in which the IC 4 is normally set in the IC socket 2, and FIG.
FIG. 4 is a diagram showing a state where the camera is set to be inclined to a C socket. At this time, the upper surface of the IC 4 is located at a distance A from the upper surface of the base 7. In FIG. 1A, the band-shaped sensor light emitted from the area sensor light emitting side 1a is blocked by the IC socket 2, the IC 4, and the suction nozzle 5, and the band width of the sensor light is reduced, and is received by the area sensor light receiving side 1b. FIG.
In FIG. 1B, as in FIG. 1A, the band-shaped sensor light is blocked by the IC socket 2, the IC 4, and the suction nozzle 5, and the band width of the sensor light received by the area sensor light receiving side 1b is reduced. Is set to be inclined, so that the band width is further reduced accordingly.

FIG. 2 shows that the position of the upper surface of the IC 4 from the upper surface of the base 7 is changed from the distance A in FIG. 1 to the distance A '(A <A') in FIG. 1 by changing the type of the IC to be measured. It shows the state.

FIG. 2A shows a state where the IC 4 is normally set in the IC socket 2, and FIG.
FIG. 4 is a diagram showing a state where the camera is set to be inclined to a C socket. As in the case of FIG. 1, in FIG. 2A, the band-shaped sensor light emitted from the area sensor light emitting side 1a is blocked by the IC socket 2, the IC 4, and the suction nozzle 5, so that the band width of the sensor light is reduced and the area is reduced. As shown in FIG.
(B) shows a state in which the IC 4 is set to be inclined, so that the band width is further reduced and reaches the area sensor light receiving side 1b.

FIG. 3 is a diagram showing a main configuration of an auto handler to which the IC attitude detecting mechanism shown in FIG. 1 is applied.

FIG. 3 shows a contact block 9, a measuring hand 10, and a DUT in addition to the IC attitude detecting mechanism shown in FIG.
(Device Under Test) area sensor 11 (light emitting side 11a, light receiving side 11b), orthogonal axis area sensor 12
(Light-emitting side 12a, light-receiving side 12b) are added. FIG. 3A is a plan view of an auto-handler provided with an IC attitude detecting mechanism, and FIG. 3B is a light emitting side 12a of the area sensor for the orthogonal axis and a light receiving side 1 of the area sensor for the orthogonal axis in FIG.
3C is a cross-sectional view on a line connecting the area sensor light emitting side 1a and the area sensor light receiving side 1b in FIG. 3A.

As shown in FIG. 3, in an application example of the auto-handler having the IC attitude detecting mechanism of the present invention, an IC socket 2 is installed on a contact board 3,
A contact block 9 is placed on the contact board 3 around the socket 2, and a base 7 is placed on the contact block 9. The area sensor 1 (light emitting side 1a, light receiving side 1b), the area sensor 12 (light emitting side 12a, light receiving side 12b) and the area sensor 11 (not shown in the cross-sectional views of FIGS. 3B and 3C). (Light emitting side 11
a, the light receiving side 11b) is mounted at the positions of the sensor mounting holes 7a to 7f of the base 7 in FIG.
C4, the suction nozzle 5 and the like are positioned.

A contact pusher 6 is arranged so as to surround the suction nozzle 5 of the auto handler. As shown in FIG. 3C, a measuring hand 10 for pressing an IC against the IC socket 2 is provided above the contact pusher 6. Have.

In the configuration example shown in FIG. 3, an area sensor 1 (light-emitting side 1a, light-receiving side 1b), an area sensor 11 (light-emitting side 11a, light-receiving side 11b) and an area sensor 12 for orthogonal axis (light-emitting side) are provided for two DUTs. By using the three-axis area sensor on the side 12a and the light receiving side 12b) and arranging the area sensor so as to be orthogonal to each DUT, the attitude of the IC4 can be detected even if the IC4 is set in an inclined direction in all directions. As a result, the detection accuracy can be improved.

Next, the operation of the IC attitude detecting mechanism of the auto handler according to the present embodiment will be described below.

FIG. 1 (A) shows an IC 4
Is normally set in the IC socket 2. In this case, the band-shaped sensor light emitted from the area sensor light emitting side 1a is blocked by the IC socket 2, the IC 4, and the suction nozzle 5, and the width of the sensor light received on the area sensor light receiving side 1b is reduced to C.

The sensitivity at this time is stored as a reference value of 100%, and the detection criterion is set to 90% with respect to the reference value of 100%.
The following cases are assumed.

FIG. 1B is a state diagram in the case where the IC 4 is set to the IC socket 2 at an angle by the automatic handler, similarly to FIG. 1A. In this case, the area sensor light emitting side 1
The strip-shaped sensor light emitted from a is blocked by the IC socket 2, IC4, and the suction nozzle 5 as in the case of FIG. 1A, but is further blocked by the slant of the IC4. It is assumed that the width of the sensor light reaching the side 1b is reduced to D, and the sensitivity is reduced to 70%.

As described above, the sensitivity of the sensor light received by the area sensor light receiving side 1b is changed from 100% of the sensor light width C shown in FIG. 1A to the sensor light shown in FIG. To 70% of the width D of 90% of the detection criterion.
If it is less than%, it can be detected that the IC 4 is not set in the IC socket 2 normally.

FIG. 2 shows that the IC socket 2 and the IC socket 2
2, the position of the upper surface of the IC 4 from the upper surface of the base 7 is changed from the distance A in FIG. 2 to the distance A ′ (A <
A ′).

As shown in FIG. 2A, when the IC 4 is normally placed on the IC socket 2, the area sensor light emitting side 1a
1A, the width of the sensor light received by the area sensor light receiving side 1b is blocked by the IC socket 2, the IC 4, and the suction nozzle 5, as in the case of FIG.
2C is changed from C in FIG. 2A, and the width C ′ is stored again as a new reference value of 100%.

FIG. 2B shows that the IC 4
FIG. 3 is a state diagram in a case where is set to be inclined to the IC socket 2. In this case, the band-like sensor light emitted from the area sensor light-emitting side 1a is blocked by the IC socket 2, the IC4, and the suction nozzle 5, as in the case of FIG. Since the light is blocked, the width of the sensor light reaching the area sensor light receiving side 1b is reduced to D ', and the sensitivity is reduced to 70%.
%.

As described above, the sensitivity of the sensor light received by the area sensor light receiving side 1b is changed from 100% at the time of the sensor light width C 'shown in FIG. 2A to the sensor light shown in FIG. Since it has changed to 70% of the light width D ', and less than 90% of the detection criterion set in FIG. 1, it can be detected that the IC 4 is not set properly in the IC socket 2.

Therefore, unlike the prior art described with reference to FIG. 5, the IC attitude detection according to the present invention can be performed without realigning the optical axis of the sensor or replacing components for fixing the height of the upper surface of the IC. According to the auto-handler having the mechanism, it is possible to cope with variations in the positions of various types of ICs and IC sizes only by changing the setting of the sensitivity of the area sensor.

When it is desired to detect a subtle inclination of an IC set in an IC socket, the judgment reference value is set to 100%.
And set so that even a slight difference in sensitivity can be detected. Conversely, if it is sufficient to detect only a large inclination of the IC, erroneous detection can be prevented by setting the determination reference value to a low value.

In the auto handler according to the present invention, I
The part where C is placed is not limited to the IC socket.
The present invention can also be applied to a stage, a shuttle (reciprocating mechanism), or the like existing at a place where an IC is being transferred during transfer.

[0052]

According to the automatic handler of the first aspect of the present invention, it is possible to determine whether the posture of the IC mounted on the IC socket is normal or abnormal in a predetermined space above the IC socket.

According to the second aspect of the invention, it is possible to determine whether the posture of the IC mounted on the IC socket is normal or abnormal based on the amount of light received on the light receiving side of the area sensor.

According to the third aspect of the present invention, the light receiving sensitivity detected on the light receiving side of the area sensor when the IC is normally mounted on the IC socket depends on the various shapes of the IC socket and the IC. Can be adjusted accordingly.

According to the fourth aspect of the present invention, the reference value stored in accordance with the shape of each IC socket and IC is compared with the amount of light received on the light receiving side to determine whether the posture of each IC is normal. Abnormality can be reliably detected.

According to the fifth aspect of the present invention, the detection reference value set based on the reference value stored according to the shape of each IC socket and IC is compared with the amount of light received on the light receiving side. This makes it possible to reliably detect whether the posture of each IC is normal or abnormal.

[Brief description of the drawings]

FIG. 1 is a diagram showing components of an IC attitude detection mechanism of an auto handler and an IC attitude detection state according to an embodiment of the present invention.

FIG. 2 is a diagram showing a configuration of an IC posture detecting mechanism of an auto-handler and an IC when a connection position between an IC socket 2 and an IC 4 changes due to a change in the type of the IC 4 in FIG.
FIG. 7 is a diagram illustrating a posture detection state.

FIG. 3 is a diagram showing a main configuration of an auto handler to which the IC attitude detection mechanism shown in FIG. 1 is applied.

FIG. 4 is a diagram showing components of an IC attitude detection mechanism of a conventional auto handler and an IC attitude detection state.

FIG. 5 shows components of an IC attitude detection mechanism of a conventional auto handler and an IC attitude detection state when the connection position between the IC socket 2 and the IC 4 changes due to a change in the type of IC4. FIG.

[Explanation of symbols]

 Reference Signs List 1 area sensor 2 IC socket 3 test board 4 IC 5 suction nozzle 6 contact pusher 7 base 8 fiber sensor 9 contact block 10 measuring hand 11 area sensor 12 area sensor

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2G003 AA07 AG01 AG11 AG16 3F059 AA01 AA11 AA14 BA09 DA02 DC07 DD12 DE06 FB12 4M106 AA04 BA04 CA50 DG16 DG25 DJ39

Claims (5)

[Claims] 1. A transport unit for sucking an IC and transporting the IC to an IC socket, a measuring hand for pressing the IC against the IC socket, and an attitude of the IC for detecting an attitude of the IC mounted on the IC socket. An auto handler provided with a detecting means, wherein the posture detecting means for the IC detects the IC in a predetermined space above the IC socket based on the amount of the IC serving as a light shielding body.
An auto handler characterized by detecting a posture of the user. 2. The method according to claim 1, wherein the attitude detecting means of the IC is an area sensor having a light emitting side and a light receiving side for emitting and receiving band-shaped light with respect to the predetermined space, and based on a light receiving amount detected at the light receiving side. 2. The auto-handler according to claim 1, wherein a posture of the IC mounted on the IC socket is detected. 3. The area sensor according to claim 2, further comprising adjusting means for adjusting the light receiving sensitivity of the light receiving side according to various shapes of the IC socket and the IC.
Auto handler described. 4. The area sensor further comprises storage means for storing, as a reference value, the amount of light received on the light receiving side when the attitude of the IC mounted on the IC socket is normal. 4. The auto-handler according to claim 2, wherein whether the posture of the IC is normal or abnormal is determined based on a comparison result of comparing the stored reference value with the amount of light received on the light receiving side. 5. The area sensor sets a detection reference value for determining whether the posture of the IC mounted on the IC socket is normal or abnormal based on the reference value stored by the storage means. Setting means for judging whether the posture of the IC is normal or abnormal based on a comparison result obtained by comparing the detection reference value set by the setting means with the amount of light received on the light receiving side. The auto handler according to claim 4.