[go: up one dir, main page]

US12313514B2 - Detection scheme for particle size and concentration measurement - Google Patents

Detection scheme for particle size and concentration measurement Download PDF

Info

Publication number
US12313514B2
US12313514B2 US17/570,228 US202217570228A US12313514B2 US 12313514 B2 US12313514 B2 US 12313514B2 US 202217570228 A US202217570228 A US 202217570228A US 12313514 B2 US12313514 B2 US 12313514B2
Authority
US
United States
Prior art keywords
particle
monitoring system
signal
particles
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active, expires
Application number
US17/570,228
Other versions
US20220228963A1 (en
Inventor
Joseph Shamir
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Particle Measuring Systems Inc
Original Assignee
Particle Measuring Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Particle Measuring Systems Inc filed Critical Particle Measuring Systems Inc
Priority to US17/570,228 priority Critical patent/US12313514B2/en
Assigned to PARTICLE MEASURING SYSTEMS, INC. reassignment PARTICLE MEASURING SYSTEMS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: P.M.L - PARTICLES MONITORING TECHNOLOGIES, LTD.
Assigned to P.M.L - PARTICLES MONITORING TECHNOLOGIES, LTD. reassignment P.M.L - PARTICLES MONITORING TECHNOLOGIES, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHAMIR, JOSEPH
Publication of US20220228963A1 publication Critical patent/US20220228963A1/en
Application granted granted Critical
Publication of US12313514B2 publication Critical patent/US12313514B2/en
Active legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G01N15/1436—Optical arrangements the optical arrangement forming an integrated apparatus with the sample container, e.g. a flow cell
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1456—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals
    • G01N15/1459—Optical investigation techniques, e.g. flow cytometry without spatial resolution of the texture or inner structure of the particle, e.g. processing of pulse signals the analysis being performed on a sample stream
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/075—Investigating concentration of particle suspensions by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G01N2015/1447—Spatial selection
    • G01N2015/145—Spatial selection by pattern of light, e.g. fringe pattern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10—Investigating individual particles
    • G01N15/14—Optical investigation techniques, e.g. flow cytometry
    • G01N15/1434—Optical arrangements
    • G01N2015/1454—Optical arrangements using phase shift or interference, e.g. for improving contrast

Definitions

  • the present invention is related to the field of measuring particle size and concentration. More specifically it relates to the use of optical methods for measuring particle size and concentration.
  • PSA particle size and concentration analysis
  • TOT Time of Transition
  • the interaction of the particles in the TOT technique is with a focused scanning laser beam.
  • a smaller focused spot should be used.
  • the divergence of the beam is proportional to ⁇ /D where ⁇ is the laser's wavelength.
  • ⁇ is the laser's wavelength.
  • the trade-off between the ability to resolve small particles, to the focus volume and the accuracy in measuring concentration is obvious.
  • the TOT technique is targeted to resolve and measure particles in the micron and sub-micron range it would be limited in its ability to measure low concentrations as the instantaneous focus volume is small and the interaction rate of particles is low.
  • taking a larger spot will improve the concentration measurement rate but will degrade the quality and resolution of the size analysis.
  • the present invention provides a system and method of particle size and concentration measurement that comprises the steps of: providing a focused, synthesized, structured laser beam, causing the beam to interact with the particles, measuring the interaction signal and the number of interactions per unit time of the beam with the particles, and using algorithms to map the interaction signals to the particle size and the number of interactions per unit time to the concentration.
  • the particles can be fluid borne, airborne, or on a surface and have a size ranging from sub-micron to thousands of microns.
  • the focused, synthesized, structured laser beam is a dark beam.
  • the structured beam can be generated by employing a mask over a Gaussian laser beam, by directly modifying the laser cavity, by combining the beams from several lasers, or by other manipulations of the laser beam such as in an interferometric or polarization modification scheme.
  • the measurements can be made using the duration of interaction with a scanning beam, including dark field.
  • the invention further provides a system for particle size and concentration measurement.
  • An alternative approach which has the advantage of not using any moving parts to scan the beam, is to cause the particles to cross focal region of a focused laser beam.
  • aspects of the invention relate to an improved detection scheme capable of better particle characterization according to the forward and back scatter, detect particle fluorescence and measure the particle velocity.
  • the present invention introduces new detection schemes offering: higher sensitivity due to lower particle diameter dependency of the interaction signal (much lower than r ⁇ circumflex over ( ) ⁇ 4 to r ⁇ circumflex over ( ) ⁇ 6 as with conventional scattering of sub wavelength particles); the ability to measure higher particle concentration due to inherent optical noise filtration; the ability to characterize particles by their interaction signal in forward and back scatter, for example to discriminate between bubbles and particles flowing in a liquid; the ability to measure fluorescence from particles; and the ability to measure the particle's velocity.
  • the latter enables a scanner free system where the flow of particles is either at a known velocity or the velocity of each particle is intrinsically measured.
  • the invention is a particle monitoring system comprising a laser that generates a Gaussian beam; means for converting the Gaussian laser beam into a structured dark beam; a focusing lens that focuses the dark beam onto particles moving through the illuminating dark beam; and two detectors. One of the two detectors is positioned over each intensity lobe of the dark beam.
  • the particle monitoring system of the invention is arranged such that the particles move through the illuminating dark beam in a direction at an angle of 90 degrees relative to the direction of the dark beam.
  • the signals from the two detectors are recorded in at least one of the following ways:
  • Embodiments of the particle monitoring system of the invention comprise a beam splitter and a second set of detectors oriented in a perpendicular direction to the dark line of the dark beam.
  • Embodiments of the particle monitoring system of the invention comprise a beam splitter and a third detector arranged to allow simultaneous measurement of back scattered radiation from the particles.
  • FIG. 1 schematically shows an embodiment of a particle monitoring system
  • FIG. 2 shows the positioning of the detectors of the system of FIG. 1 with respect to the illuminating dark beam pattern
  • FIG. 3 ( a ) and FIG. 3 ( b ) show typical signals measured by the two detectors in the system of FIG. 1 ;
  • FIG. 4 is a scattering simulation showing half of the signals detected by the two detectors of the system of FIG. 1 for air bubbles and latex particles in water;
  • FIG. 5 shows simulated signals for the difference between the signals from the two detectors of FIG. 1 as particles of various size move from the center outward;
  • FIG. 6 schematically shows an embodiment of the detector system of FIG. 1 that has been modified to allow also the measurement of backscattering of radiation from the particles;
  • FIG. 7 shows an example of how the invention can be used for classification by clustering
  • FIG. 8 shows an example of multi-dimensional clustering using an un-supervised learning method
  • FIG. 9 schematically shows the profile of the dark beam
  • FIG. 10 A shows the differential signal of the two detector signals for three illuminating beam structures in the presence of noise and the advantage of the dark beam in suppressing common noise;
  • FIG. 10 B shows the summation signal of the two detector signals for same three illuminating beam structures as in FIG. 10 A ;
  • FIG. 11 is a screen shot showing two shoulders in the interaction signal, which correspond to half the spot size.
  • FIG. 12 shows the positioning of the detectors with respect to the illuminating dark beam pattern in an embodiment of the system of the invention that comprises a second set of two forward detectors and a beam splitter oriented in a perpendicular direction to the dark line of the dark beam.
  • FIG. 1 schematically shows an embodiment of a particle monitoring system.
  • the system shown in FIG. 1 comprises a laser ( 1 ), which generates a Gaussian beam; collimating lens ( 2 ); phase mask ( 3 ), which converts the Gaussian laser beam into a structured dark beam; a focusing lens ( 4 ), which focuses the dark beam inside a cuvette ( 5 ) through which water containing particles ( 6 ) flows in the direction of the arrow; and two detectors ( 7 ) and ( 8 ). It is noted that in the case of airborne particles, the air stream bearing the particles need not be confined within a cuvette. The positioning of the detectors with respect to the illuminating dark beam pattern is shown in FIG. 2 .
  • one detector is positioned over each intensity lobe of the original dark beam. As particles cross the beam the output intensity pattern is modified and the detectors sense the change.
  • the detector spacing can be optimized for sensitivity by aligning it to the maximum intensity gradient of the dark beam.
  • the detector signals can be recorded either as:
  • a second set of two forward detectors is used via a beam splitter in a perpendicular direction to the dark line of the dark beam. These two detectors are large relative to the beam size and integrate the total beam intensity.
  • FIG. 12 shows the positioning of the second set of detectors with respect to the illuminating dark beam pattern in this embodiment.
  • FIG. 3 ( a ) and FIG. 3 ( b ) Typical signals measured by the two detectors in the system of FIG. 1 are shown in FIG. 3 ( a ) and FIG. 3 ( b ) .
  • the signals measured by detector 1 ( 7 ) are identified by numeral ( 10 ) and those by detector 2 ( 8 ) are identified by numeral ( 12 ).
  • the signals of the two detectors appear simultaneously when the particle crosses the beam at focus, as shown in FIG. 3 a . If the particle does not cross along the focal plane one detector signal is delayed with respect to the other one as is shown in FIG. 3 b .
  • the shift direction determines also whether the particle crosses the beam before or after the focus. It should be noted that the shape of the signal represents intrinsic particle characteristics.
  • the detector signals qualitatively represent interferometric response they react to the phase modulation by the moving particles.
  • a particle with refractive index larger than the surrounding medium e.g. latex in water
  • the main feature is the opposing signals.
  • FIG. 4 shows half of the simulated signals in the forms of graphs showing detector output vs. the distance moved by the particles for air bubbles and latex particles in water. As a consequence, it is possible to distinguish bubbles from particles.
  • curve ( 14 ) shows the signal from sensor 1 for air in water
  • curve ( 16 ) shows the signal from sensor 2 for air in water
  • curve ( 18 ) shows the signal from sensor 1 for latex in water
  • curve ( 20 ) shows the signal from sensor 2 for latex in water.
  • FIG. 5 is an example of a simulation showing the dependence of the difference signal, i.e.
  • the intensity on the two detectors will reach a plateau and the measuring parameter will be the detectors summation width, which is proportional to the particle size.
  • FIG. 6 schematically shows an embodiment of the detector system of FIG. 1 that has been modified to allow measurement of backscattering of radiation from the particles.
  • the setup is as explained herein above for FIG. 1 with the addition of a beam splitter ( 24 ), collecting lens ( 26 ), pinhole ( 28 ), and the back scatter detector ( 30 ).
  • the back scatter radiation from a particle ( 6 ) in the focus of the focusing lens ( 4 ) is collected by the focusing lens ( 4 ), collimated, reflected by beam splitter ( 24 ), and directed via the collecting lens ( 26 ), which focuses the radiation through pinhole ( 28 ) onto the back scatter detector ( 30 ).
  • another lens ( 32 ) has been added, as may be needed by the type of laser output, between the laser ( 1 ) and collimating lens ( 2 ) such that lens ( 32 ) and ( 2 ) act together as a beam expander ( 34 ).
  • the back scatter detector has four roles:
  • a combination of a beam splitter and a dichroic mirror would allow to detect by two back scatter detectors the back scattered light and the fluorescent light.
  • the two forward signals and the optional back scatter signals are single particle interactions with a high resolution laser focused beam. These interactions function as a high resolution one dimensional scanning laser microscope and provide a lot of information on the particle infrastructure. This information could be used to characterize specific particles. Particles of the same size but different internal structure will have the same interaction width but the internal interaction pulse behavior will differ and be like a “fingerprint” of the particle.
  • An example of how the invention can be used for classification by clustering is shown in FIG. 7 for algae.
  • FIG. 7 shows the data in a two dimensional feature space.
  • a set of interactions were acquired for 3 different types of Algae: Chlorela, Tetrahedron, and Pediastrum (indicated in the figure respectively by x, +, and *).
  • Validation filters on the interaction signals including symmetry of the two channels; interaction rise time, and others were applied.
  • the Validation filters assure that the interaction is in the focal zone of the dark beam. Tests were conducted with various sub sets of filters but FIG. 7 presents the data when all validation filters were applied.
  • Features are extracted from the interactions that qualified the validation filters and show the clustering of the different types of algae.
  • FIG. 7 presents a 2D scatter diagram wherein the X axis is the interaction pulse width in microseconds and the Y axis the maximal signal per interaction as detected by the detectors.
  • the X axis is the interaction pulse width in microseconds
  • the Y axis the maximal signal per interaction as detected by the detectors.
  • the application of this mechanism is such that once the clusters of known algae are established, it is possible to monitor, for example, water contaminated with algae and detect in a mixture whether algae complying with the clusters appear. This would give real time information on the algae population and feedback to any process attempting to reduce the algae population.
  • the classification by clustering approach can be extended to a multi-dimensional space using artificial intelligence tools to teach the system the nature of specific events and then to monitor for the presence of such events.
  • One embodiment of the invention is to cluster the detectors signals by un-supervised learning (Visit http://www.autonlab.org/tutorials/ for Andrew's repository of Data Mining tutorials.).
  • FIG. 8 shows an example of multi-dimensional clustering using an un-supervised learning method.
  • the measuring systems of FIG. 1 and FIG. 6 can be used to measure the intrinsic velocity of the particles moving through the cuvette. This is possible because the interaction signal duration is scaled inversely to the particles velocity. While in some configurations a constant and known velocity could be achieved a more general approach of the present invention is to extract the velocity information from the intrinsic information in the interaction signal. This is done by accounting for the profile (shown schematically in FIG. 9 ) of the dark beam. The distance between the intensity peaks of the lobes of the beam profile is equal to WO*2 ⁇ circumflex over ( ) ⁇ 0.5, where WO is the Gaussian waist. This value is known and hence can be used to measure the crossing particle velocity, while the modulation depth is used to extract the size information. This is applicable for small particles where the “lens effect” of the particle is negligible. For larger particles there will be 2 shoulders in the interaction signal which correspond to half the spot size, as shown in FIG. 11 .
  • Many particle monitoring applications are characterized by a large population of very small particles, doped with slightly larger particles. Examples could be colloids; CMP slurry; crystallization processes and more.
  • the ratio of the tail concentration of the slightly larger particles could be 10 ⁇ circumflex over ( ) ⁇ 6:1 or so smaller compared to the main concentration.
  • the state of the art instrumentation today is practically blind to these small concentrations. While small and challenging to measure, this small tail could cause damages and scratches in the case of CMP or other processes.
  • the present invention offers the ability to measure concentrations which are 10 ⁇ circumflex over ( ) ⁇ 6:1 smaller in this tail.
  • the spot size is selected such that the majority of the population is filtered out and becomes a background noise while the larger particles are shown as clear interactions.
  • FIG. 10 A shows the differential signal on an arbitrary scale while a 200 nm particle crosses the beam from the center for three illuminating beam structures: Gaussian (dashed lines), Gauss-Laguerre (solid lines), and Dark beam (dotted lines).
  • FIG. 10 B is similar to FIG. 10 A but for the summation of the two detector signals.
  • the simulations were conducted under semi-dynamic noise containing 10% of the total illuminating power and the other optical parameters in the simulation were as follows:
  • FIG. 10 A a signal higher by a factor of two is achieved for the dark beam compared to the signals for the other two beam structures.
  • the difference in sign of the curves is not material and depends on the order of the detectors in the subtraction relative to the particle direction.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

The present invention provides a system and method of particle size and concentration measurement that comprises the steps of: providing a focused, synthesized, structured laser beam, causing the beam to interact with the particles, measuring the interaction signal and the number of interactions per unit time of the beam with the particles, and using algorithms to map the interaction signals to the particle size and the number of interactions per unit time to the concentration.

Description

CROSS REFERENCE TO RELATED APPLICATIONS
This patent application is a Continuation of U.S. patent application Ser. No. 16/680,125, filed Nov. 11, 2019; which is a Continuation of U.S. patent application Ser. No. 15/440,287, filed Feb. 23, 2017, now U.S. Pat. No. 10,921,229, issued Feb. 16, 2021; which application is a Continuation of U.S. patent application Ser. No. 14/359,233, filed on May 19, 2014; which was a National Phase of PCT international application number PCT/IL2012/050488, having an international filing date of Nov. 29, 2012, published as International Publication number WO 2013/080209; which claimed priority and the benefit from U.S. provisional patent application No. 61/565,529, filed on Dec. 1, 2011; all of which are hereby incorporated by reference in their entirety.
FIELD OF THE INVENTION
The present invention is related to the field of measuring particle size and concentration. More specifically it relates to the use of optical methods for measuring particle size and concentration.
BACKGROUND OF THE INVENTION
Many techniques exist for particle size and concentration analysis (PSA), they can be reviewed for reference in the book by Terry Alan “Introduction to Particle Size Analysis” T. Allen, Particle size analysis John Wiley & Sons; ISBN: 0471262218; June, 1983. The most commonly used techniques are optical, based on the interaction of the measured particles with laser radiation. Especially when approaching the particle size range around 1 micron and below, most of these techniques suffer from inaccuracies due to the effect of the real and imaginary part of the particle's refractive index. It is known, for example, that in some techniques, such as techniques based on Fraunhoffer diffraction analysis, light absorbing particles would be over sized due to energy loss resulting from the absorption, while in high concentration, particles would be under sized due to secondary scattering etc. An optical technique that is less sensitive to these problems is known as Time of Transition or TOT. In this technique the interaction of a scanning, focused laser beam and the particles is analyzed in the time domain rather than in the amplitude domain, resulting in lower sensitivity to variation in the refractive index. A detailed description of the technique appears in a paper “Improvements in Accuracy and Speed Using the Time-of-Transition Method and Dynamic Image Analysis For Particle Sizing by Bruce Weiner, Walter Tscharnuter, and Nir Karasikov”, [Particle Size Distribution III; Assessment and Characterization; Editor(s): Theodore Provder1; Volume 693, Publication Date (Print): Jun. 10, 1998; Copyright © 1998 American Chemical Society]. To a great extent, in this technique a de-convolution algorithm of the known laser beam profile from the interaction signal derives the size. The concentration is derived from the number of interactions per unit time within the known volume of the focused laser beam.
The interaction of the particles in the TOT technique is with a focused scanning laser beam. In order to measure smaller particles, a smaller focused spot should be used. However according to diffraction laws for a Gaussian laser beam, if the beam's waist is D, the divergence of the beam is proportional to λ/D where λ is the laser's wavelength. The trade-off between the ability to resolve small particles, to the focus volume and the accuracy in measuring concentration is obvious. Thus if the TOT technique is targeted to resolve and measure particles in the micron and sub-micron range it would be limited in its ability to measure low concentrations as the instantaneous focus volume is small and the interaction rate of particles is low. On the other hand, taking a larger spot will improve the concentration measurement rate but will degrade the quality and resolution of the size analysis.
An improvement could be achieved by using a shorter wavelength. This could have a limited effect of as high as a factor of 2 only since going to too short a wavelength will result in absorption of the laser light by the optics and, in the case of particles in liquid, also absorption by the liquid.
A previous invention by the inventors (U.S. Pat. No. 7,746,469) introduced a new technique and means to decouple between the two contradicting requirements: the ability to resolve small particles and the ability to measure low concentration using measurements based on single particle interactions using a structured laser beam.
It is therefore a purpose of the present invention to provide new detection schemes offering higher sensitivity due to lower particle diameter dependency of the interaction signal.
It is another purpose of the present invention to provide new detection schemes offering the ability to measure higher particle concentration due to inherent optical noise filtration.
It is another purpose of the present invention to provide new detection schemes offering the ability to characterize particles by their interaction signal both in forward and in back scatter.
Further purposes and advantages of this invention will appear as the description proceeds.
SUMMARY OF THE INVENTION
The present invention provides a system and method of particle size and concentration measurement that comprises the steps of: providing a focused, synthesized, structured laser beam, causing the beam to interact with the particles, measuring the interaction signal and the number of interactions per unit time of the beam with the particles, and using algorithms to map the interaction signals to the particle size and the number of interactions per unit time to the concentration.
The particles can be fluid borne, airborne, or on a surface and have a size ranging from sub-micron to thousands of microns. In a preferred embodiment of the invention, the focused, synthesized, structured laser beam is a dark beam.
The structured beam can be generated by employing a mask over a Gaussian laser beam, by directly modifying the laser cavity, by combining the beams from several lasers, or by other manipulations of the laser beam such as in an interferometric or polarization modification scheme. The measurements can be made using the duration of interaction with a scanning beam, including dark field. The invention further provides a system for particle size and concentration measurement.
An alternative approach, which has the advantage of not using any moving parts to scan the beam, is to cause the particles to cross focal region of a focused laser beam.
Other aspects of the invention relate to an improved detection scheme capable of better particle characterization according to the forward and back scatter, detect particle fluorescence and measure the particle velocity.
The present invention introduces new detection schemes offering: higher sensitivity due to lower particle diameter dependency of the interaction signal (much lower than r{circumflex over ( )}4 to r{circumflex over ( )}6 as with conventional scattering of sub wavelength particles); the ability to measure higher particle concentration due to inherent optical noise filtration; the ability to characterize particles by their interaction signal in forward and back scatter, for example to discriminate between bubbles and particles flowing in a liquid; the ability to measure fluorescence from particles; and the ability to measure the particle's velocity. The latter enables a scanner free system where the flow of particles is either at a known velocity or the velocity of each particle is intrinsically measured.
The invention is a particle monitoring system comprising a laser that generates a Gaussian beam; means for converting the Gaussian laser beam into a structured dark beam; a focusing lens that focuses the dark beam onto particles moving through the illuminating dark beam; and two detectors. One of the two detectors is positioned over each intensity lobe of the dark beam.
The particle monitoring system of the invention is arranged such that the particles move through the illuminating dark beam in a direction at an angle of 90 degrees relative to the direction of the dark beam.
The signals from the two detectors are recorded in at least one of the following ways:
    • a) as separate signals;
    • b) as a differential signal of the two detector signals; and
    • c) as the sum of the two detector signals.
Embodiments of the particle monitoring system of the invention comprise a beam splitter and a second set of detectors oriented in a perpendicular direction to the dark line of the dark beam.
Embodiments of the particle monitoring system of the invention comprise a beam splitter and a third detector arranged to allow simultaneous measurement of back scattered radiation from the particles.
All the above and other characteristics and advantages of the invention will be further understood through the following illustrative and non-limitative description of embodiments thereof, with reference to the appended drawings. In the drawings the same numerals are sometimes used to indicate the same elements in different drawings.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 schematically shows an embodiment of a particle monitoring system;
FIG. 2 shows the positioning of the detectors of the system of FIG. 1 with respect to the illuminating dark beam pattern;
FIG. 3(a) and FIG. 3(b) show typical signals measured by the two detectors in the system of FIG. 1 ;
FIG. 4 is a scattering simulation showing half of the signals detected by the two detectors of the system of FIG. 1 for air bubbles and latex particles in water;
FIG. 5 shows simulated signals for the difference between the signals from the two detectors of FIG. 1 as particles of various size move from the center outward;
FIG. 6 schematically shows an embodiment of the detector system of FIG. 1 that has been modified to allow also the measurement of backscattering of radiation from the particles;
FIG. 7 shows an example of how the invention can be used for classification by clustering;
FIG. 8 shows an example of multi-dimensional clustering using an un-supervised learning method;
FIG. 9 schematically shows the profile of the dark beam;
FIG. 10A shows the differential signal of the two detector signals for three illuminating beam structures in the presence of noise and the advantage of the dark beam in suppressing common noise;
FIG. 10B shows the summation signal of the two detector signals for same three illuminating beam structures as in FIG. 10A;
FIG. 11 is a screen shot showing two shoulders in the interaction signal, which correspond to half the spot size; and
FIG. 12 shows the positioning of the detectors with respect to the illuminating dark beam pattern in an embodiment of the system of the invention that comprises a second set of two forward detectors and a beam splitter oriented in a perpendicular direction to the dark line of the dark beam.
 DETAILED DESCRIPTION OF EMBODIMENTS OF THE INVENTION
FIG. 1 schematically shows an embodiment of a particle monitoring system. The system shown in FIG. 1 comprises a laser (1), which generates a Gaussian beam; collimating lens (2); phase mask (3), which converts the Gaussian laser beam into a structured dark beam; a focusing lens (4), which focuses the dark beam inside a cuvette (5) through which water containing particles (6) flows in the direction of the arrow; and two detectors (7) and (8). It is noted that in the case of airborne particles, the air stream bearing the particles need not be confined within a cuvette. The positioning of the detectors with respect to the illuminating dark beam pattern is shown in FIG. 2 . In this embodiment one detector is positioned over each intensity lobe of the original dark beam. As particles cross the beam the output intensity pattern is modified and the detectors sense the change. The detector spacing can be optimized for sensitivity by aligning it to the maximum intensity gradient of the dark beam. For various analytic purposes the detector signals can be recorded either as:
    • a) separate signals;
    • b) as a differential signal of the two detector signals; and
    • c) as the sum of the two detector signals.
In another embodiment, a second set of two forward detectors is used via a beam splitter in a perpendicular direction to the dark line of the dark beam. These two detectors are large relative to the beam size and integrate the total beam intensity. FIG. 12 shows the positioning of the second set of detectors with respect to the illuminating dark beam pattern in this embodiment, By checking the symmetry of the signals from these two detectors, one can derive if a particle has crossed the focal zone along its diameter (signals are equal), or along a chord (signals are different) as well as important information on the particle size like the width of the interaction or the depth of modulation in the signal. The timing of these two signals provides information also on the alignment of the particle flow direction and to what extent it is laminar and perpendicular to the optical axis.
Typical signals measured by the two detectors in the system of FIG. 1 are shown in FIG. 3(a) and FIG. 3(b). In these figures the signals measured by detector 1 (7) are identified by numeral (10) and those by detector 2 (8) are identified by numeral (12). For proper signal interpretation it is necessary to confirm that the particle crossed the beam along the focal plane. According to the present invention the signals of the two detectors appear simultaneously when the particle crosses the beam at focus, as shown in FIG. 3 a . If the particle does not cross along the focal plane one detector signal is delayed with respect to the other one as is shown in FIG. 3 b . The shift direction determines also whether the particle crosses the beam before or after the focus. It should be noted that the shape of the signal represents intrinsic particle characteristics.
Since the detector signals qualitatively represent interferometric response they react to the phase modulation by the moving particles. Thus, a particle with refractive index larger than the surrounding medium, e.g. latex in water, will induce, as an example, first a negative signal in detector 1 and a positive signal in detector 2 while a particle with refractive index smaller than the medium (bubble in water) will generate the opposite signal. It should be noted that the main feature is the opposing signals. By changing the detectors order positive/negative could be reversed. FIG. 4 shows half of the simulated signals in the forms of graphs showing detector output vs. the distance moved by the particles for air bubbles and latex particles in water. As a consequence, it is possible to distinguish bubbles from particles. In the figure, curve (14) shows the signal from sensor 1 for air in water; curve (16) shows the signal from sensor 2 for air in water; curve (18) shows the signal from sensor 1 for latex in water; and curve (20) shows the signal from sensor 2 for latex in water.
Another important aspect of the present invention is a detection scheme with a lower signal intensity dependence on the particle radius r. According to the classical scattering theory, the energy scattered behaves according to r{circumflex over ( )}4 or even r{circumflex over ( )}6 while in the present invention the signal is a result of a phase shift and the r dependence is between r{circumflex over ( )}2 to r{circumflex over ( )}3. FIG. 5 is an example of a simulation showing the dependence of the difference signal, i.e. the difference between the signals of the two detectors for three particles of different size (r=50 nm—dotted line; r=100 nm—solid line; r=200 nm—dashed line) moving out from the center of the dark beam pattern shown in FIG. 2 . The advantage over the prior art provided by the invention is of a lower required detector dynamic range and a simpler detection scheme. The challenge of having a detector with a dynamic range of 1:10,000 to 1:1,000,000, as needed according to Rayleigh to detect particles in the range 0.1 to 1 micron, is clear to anyone familiar with the art.
For particles typically larger than the spot size, the intensity on the two detectors will reach a plateau and the measuring parameter will be the detectors summation width, which is proportional to the particle size.
FIG. 6 schematically shows an embodiment of the detector system of FIG. 1 that has been modified to allow measurement of backscattering of radiation from the particles. The setup is as explained herein above for FIG. 1 with the addition of a beam splitter (24), collecting lens (26), pinhole (28), and the back scatter detector (30). The back scatter radiation from a particle (6) in the focus of the focusing lens (4) is collected by the focusing lens (4), collimated, reflected by beam splitter (24), and directed via the collecting lens (26), which focuses the radiation through pinhole (28) onto the back scatter detector (30). In addition another lens (32) has been added, as may be needed by the type of laser output, between the laser (1) and collimating lens (2) such that lens (32) and (2) act together as a beam expander (34).
In the present invention the back scatter detector has four roles:
    • The obvious use of back scatter detector (30) is in a confocal detection scheme to verify that the interaction with the particle was indeed in focus.
    • To provide additional size information, where, for particles smaller than the dark spot, the dark beam modulation is inversely proportional to the particle size. On the other hand, for particles larger than the dark spot and moving with constant velocity, the interaction duration is proportional to the particle size.
    • The back scattering interaction adds another dimension for differentiation among particle groups based on the fine details of the interaction fingerprint, which could include reflection properties.
    • The back scatter detector can detect fluorescence generated by the illuminating beam. In this application the beam splitter (24) is replaced by a dichroic mirror that would reflect the fluorescent light to the BS detector. The ability to measure the fluorescent light in parallel to the detection with the forward detectors, adds a powerful classification tool in cases in which the particle population was stained with a fluorescent stain. This is extremely applicable to Algae to help characterize the algae type or to the detection of pathogenic organisms.
A combination of a beam splitter and a dichroic mirror would allow to detect by two back scatter detectors the back scattered light and the fluorescent light.
The two forward signals and the optional back scatter signals (with and without Fluorescence) are single particle interactions with a high resolution laser focused beam. These interactions function as a high resolution one dimensional scanning laser microscope and provide a lot of information on the particle infrastructure. This information could be used to characterize specific particles. Particles of the same size but different internal structure will have the same interaction width but the internal interaction pulse behavior will differ and be like a “fingerprint” of the particle. An example of how the invention can be used for classification by clustering is shown in FIG. 7 for algae.
FIG. 7 shows the data in a two dimensional feature space. A set of interactions were acquired for 3 different types of Algae: Chlorela, Tetrahedron, and Pediastrum (indicated in the figure respectively by x, +, and *). Validation filters on the interaction signals, including symmetry of the two channels; interaction rise time, and others were applied. The Validation filters assure that the interaction is in the focal zone of the dark beam. Tests were conducted with various sub sets of filters but FIG. 7 presents the data when all validation filters were applied. Features are extracted from the interactions that qualified the validation filters and show the clustering of the different types of algae.
Although the feature space is multi-dimensional, FIG. 7 presents a 2D scatter diagram wherein the X axis is the interaction pulse width in microseconds and the Y axis the maximal signal per interaction as detected by the detectors. Already in this 2D presentation there is a clear grouping of the different algae types. To help manifest this grouping ellipses were outlined in the figure to indicate the boundaries between the groups. In this 2D presentation there is still some overlap, which could be reduced in a multi-dimensional feature space. Artificial Intelligence clustering techniques are then used, in the multi dimensional space, to identify the boundaries.
The application of this mechanism is such that once the clusters of known algae are established, it is possible to monitor, for example, water contaminated with algae and detect in a mixture whether algae complying with the clusters appear. This would give real time information on the algae population and feedback to any process attempting to reduce the algae population.
While the capability of the invention is demonstrated herein on algae, it can be used with all its detection options described above, to train the system on other events, such as pathogenic organisms and upon appearance of an event complying with the cluster of the said organism an alarm signal will be triggered. The analogy is drawn to a fingerprint, where objects of the same group will have commonality in the feature space and could be identified via this commonality in the same way a person is identified by his fingerprint.
The classification by clustering approach can be extended to a multi-dimensional space using artificial intelligence tools to teach the system the nature of specific events and then to monitor for the presence of such events. One embodiment of the invention is to cluster the detectors signals by un-supervised learning (Visit http://www.autonlab.org/tutorials/ for Andrew's repository of Data Mining tutorials.). FIG. 8 shows an example of multi-dimensional clustering using an un-supervised learning method.
The measuring systems of FIG. 1 and FIG. 6 can be used to measure the intrinsic velocity of the particles moving through the cuvette. This is possible because the interaction signal duration is scaled inversely to the particles velocity. While in some configurations a constant and known velocity could be achieved a more general approach of the present invention is to extract the velocity information from the intrinsic information in the interaction signal. This is done by accounting for the profile (shown schematically in FIG. 9 ) of the dark beam. The distance between the intensity peaks of the lobes of the beam profile is equal to WO*2{circumflex over ( )}0.5, where WO is the Gaussian waist. This value is known and hence can be used to measure the crossing particle velocity, while the modulation depth is used to extract the size information. This is applicable for small particles where the “lens effect” of the particle is negligible. For larger particles there will be 2 shoulders in the interaction signal which correspond to half the spot size, as shown in FIG. 11 .
Many particle monitoring applications are characterized by a large population of very small particles, doped with slightly larger particles. Examples could be colloids; CMP slurry; crystallization processes and more. The ratio of the tail concentration of the slightly larger particles could be 10{circumflex over ( )}6:1 or so smaller compared to the main concentration. The state of the art instrumentation today is practically blind to these small concentrations. While small and challenging to measure, this small tail could cause damages and scratches in the case of CMP or other processes. The present invention offers the ability to measure concentrations which are 10{circumflex over ( )}6:1 smaller in this tail. The spot size is selected such that the majority of the population is filtered out and becomes a background noise while the larger particles are shown as clear interactions.
The present invention, based on the dark beam illumination in conjunction with recording the detector signals as a differential signal of the two detectors is extremely robust to the background noise and can facilitate detection in a high level of background noise. This robustness is illustrated by the simulations presented in FIG. 10A and FIG. 10B. FIG. 10A shows the differential signal on an arbitrary scale while a 200 nm particle crosses the beam from the center for three illuminating beam structures: Gaussian (dashed lines), Gauss-Laguerre (solid lines), and Dark beam (dotted lines).
FIG. 10B is similar to FIG. 10A but for the summation of the two detector signals. The simulations were conducted under semi-dynamic noise containing 10% of the total illuminating power and the other optical parameters in the simulation were as follows:
    • NA=0.125
    • λ=400 nm
In FIG. 10A a signal higher by a factor of two is achieved for the dark beam compared to the signals for the other two beam structures. The difference in sign of the curves is not material and depends on the order of the detectors in the subtraction relative to the particle direction.
Bearing in mind the larger spot and depth of field of the dark beam compared to the Gaussian beam, for achieving a valid measurement of particles smaller than spot, the noise immunity is even more apparent. The significant advantage in the noise reduction of the differential configuration (FIG. 10A) as compared to the summation configuration (FIG. 10B) is obvious.
In actual measurements a measurement set-up based on the present invention was able to detect the tail of larger particles, the concentration of which was 10{circumflex over ( )}6 times smaller in concentration than the main population of the smaller particles.
Although embodiments of the invention have been described by way of illustration, it will be understood that the invention may be carried out with many variations, modifications, and adaptations, without exceeding the scope of the claims.

Claims (9)

The invention claimed is:
1. A particle monitoring system comprising:
a flow cell including a particle interrogation region;
a light source configured to produce a laser beam directed at the particle interrogation region, the laser beam having first and second intensity regions;
a first detector positioned to detect forward scatter of the first intensity region of the beam after the beam has passed through the particle interrogation region, the first detector configured to produce a first signal; and
a second detector, spaced apart from the first detector and positioned to detect forward scatter of the second intensity region of the beam after the beam has passed through the interrogation region, the second detector configured to produce a second signal; wherein the first signal and the second signal are used to generate a differential signal; and
a validation filter configured to analyze the rise time of the differential signal, wherein the validation filter is configured such that a detected interaction between a particle and the beam occurs in a focal zone of the beam; and
wherein a spot size of the laser beam is selected such that a majority of a population of particles flowing through the flow cell is filtered out and becomes a background noise.
2. The particle monitoring system of claim 1, wherein the laser beam is a structured beam.
3. The particle monitoring system of claim 2, wherein the structured laser beam is a structured dark beam.
4. The particle monitoring system of claim 1, configured to record the differential signal of the first and second signals.
5. The particle monitoring system of claim 1, configured to record a summed signal of the first and second signals.
6. The particle monitoring system of claim 1, wherein the laser beam is configured such that a focal region of the structured laser beam occurs in the particle interrogation region.
7. The particle monitoring system of claim 1, wherein the flow cell comprises a cuvette.
8. The particle monitoring system of claim 1 comprising a processor configured to carryout algorithms to analyze the first and second signals.
9. The particle monitoring system of claim 1, wherein the validation filter is configured to validate that a particle crossed a focal region of the beam by analyzing whether the first and second forward scatter signals appear simultaneously.
US17/570,228 2011-12-01 2022-01-06 Detection scheme for particle size and concentration measurement Active 2033-11-04 US12313514B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US17/570,228 US12313514B2 (en) 2011-12-01 2022-01-06 Detection scheme for particle size and concentration measurement

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US201161565529P 2011-12-01 2011-12-01
PCT/IL2012/050488 WO2013080209A1 (en) 2011-12-01 2012-11-29 Detection scheme for particle size and concentration measurement
US201414359233A 2014-05-19 2014-05-19
US15/440,287 US10921229B2 (en) 2011-12-01 2017-02-23 Detection scheme for particle size and concentration measurement
US16/680,125 US20200150018A1 (en) 2011-12-01 2019-11-11 Detection scheme for particle size and concentration measurement
US17/570,228 US12313514B2 (en) 2011-12-01 2022-01-06 Detection scheme for particle size and concentration measurement

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US16/680,125 Continuation US20200150018A1 (en) 2011-12-01 2019-11-11 Detection scheme for particle size and concentration measurement

Publications (2)

Publication Number Publication Date
US20220228963A1 US20220228963A1 (en) 2022-07-21
US12313514B2 true US12313514B2 (en) 2025-05-27

Family

ID=48534768

Family Applications (4)

Application Number Title Priority Date Filing Date
US14/359,233 Abandoned US20150260628A1 (en) 2011-12-01 2012-11-29 Detection scheme for particle size and concentration measurement
US15/440,287 Active US10921229B2 (en) 2011-12-01 2017-02-23 Detection scheme for particle size and concentration measurement
US16/680,125 Abandoned US20200150018A1 (en) 2011-12-01 2019-11-11 Detection scheme for particle size and concentration measurement
US17/570,228 Active 2033-11-04 US12313514B2 (en) 2011-12-01 2022-01-06 Detection scheme for particle size and concentration measurement

Family Applications Before (3)

Application Number Title Priority Date Filing Date
US14/359,233 Abandoned US20150260628A1 (en) 2011-12-01 2012-11-29 Detection scheme for particle size and concentration measurement
US15/440,287 Active US10921229B2 (en) 2011-12-01 2017-02-23 Detection scheme for particle size and concentration measurement
US16/680,125 Abandoned US20200150018A1 (en) 2011-12-01 2019-11-11 Detection scheme for particle size and concentration measurement

Country Status (8)

Country Link
US (4) US20150260628A1 (en)
EP (2) EP2786117B1 (en)
JP (1) JP6309896B2 (en)
KR (1) KR102104987B1 (en)
CN (1) CN103959039A (en)
CA (1) CA2856664A1 (en)
SG (1) SG11201402528TA (en)
WO (1) WO2013080209A1 (en)

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2786117B1 (en) 2011-12-01 2022-12-21 Particle Measuring Systems, Inc. Detection scheme for particle size and concentration measurement
ITRM20130128U1 (en) 2013-07-23 2015-01-24 Particle Measuring Systems S R L DEVICE FOR MICROBIAL AIR SAMPLING
US9267877B2 (en) * 2014-03-12 2016-02-23 Nxgen Partners Ip, Llc System and method for making concentration measurements within a sample material using orbital angular momentum
JP2016103590A (en) * 2014-11-28 2016-06-02 東京エレクトロン株式会社 Substrate processing method and substrate processing device
PL3308136T3 (en) * 2015-06-12 2022-04-11 Koninklijke Philips N.V. Optical particle sensor and sensing method
WO2017201327A1 (en) * 2016-05-19 2017-11-23 Regents Of The University Of Colorado, A Body Corporate Modulus-enforced probe
EP3309536A1 (en) * 2016-10-11 2018-04-18 Malvern Panalytical Limited Particle characterisation instrument
EP3701245A4 (en) * 2017-10-26 2021-08-11 Particle Measuring Systems, Inc. SYSTEM AND METHOD FOR PARTICLE MEASUREMENT
CN108226015A (en) * 2018-01-04 2018-06-29 江苏苏净集团有限公司 A kind of new liquid grain count method and system
GB201803523D0 (en) * 2018-03-05 2018-04-18 Malvern Panalytical Ltd Improved particle sizing by optical diffraction
CN112601948A (en) 2018-08-31 2021-04-02 粒子监测系统有限公司 Fluid refractive index optimized particle counter
JP7504866B2 (en) * 2018-09-04 2024-06-24 パーティクル・メージャーリング・システムズ・インコーポレーテッド Detection of nanoparticles on production equipment and surfaces
JP7333637B2 (en) * 2018-09-28 2023-08-25 国立大学法人 東京大学 Particle detector
US11181455B2 (en) 2018-11-12 2021-11-23 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
US11385161B2 (en) 2018-11-12 2022-07-12 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
US10908059B2 (en) 2018-11-16 2021-02-02 Particle Measuring Systems, Inc. Slurry monitor coupling bulk size distribution and single particle detection
JP7436473B2 (en) 2018-11-16 2024-02-21 パーティクル・メージャーリング・システムズ・インコーポレーテッド Particle sampling system and method for robot-controlled manufacturing barrier systems
RU2722066C2 (en) * 2018-11-19 2020-05-26 Самсунг Электроникс Ко., Лтд. Multichannel dust sensor
KR102142248B1 (en) 2019-04-12 2020-08-07 (주)에이치앤지텍 An Apparatus for Measuring a Particle of a Compressed Air
CN113692529A (en) * 2019-04-25 2021-11-23 粒子监测系统有限公司 Particle detection system and method for on-axis particle detection and/or differential detection
WO2021041420A1 (en) 2019-08-26 2021-03-04 Particle Measuring Systems, Inc Triggered sampling systems and methods
JP2022550418A (en) 2019-10-07 2022-12-01 パーティクル・メージャーリング・システムズ・インコーポレーテッド antimicrobial particle detector
WO2021071792A1 (en) 2019-10-07 2021-04-15 Particle Measuring Systems, Inc. Particle detectors with remote alarm monitoring and control
US11733149B2 (en) * 2019-10-10 2023-08-22 Kansas State University Research Foundation Monitor for environmental particulate matter size, concentration, and complex index of refraction
IT201900020248A1 (en) 2019-11-04 2021-05-04 Particle Measuring Systems S R L MOBILE MONITORING DEVICE FOR CONTROLLED CONTAMINATION AREAS
WO2021102256A1 (en) * 2019-11-22 2021-05-27 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
US11892462B2 (en) 2020-01-21 2024-02-06 Pharma Integration Srl Robotic control for aseptic processing
KR20230021732A (en) 2020-06-09 2023-02-14 파티클 머슈어링 시스템즈, 인크. Particle detection via scattered light combined with incident light
WO2022114733A1 (en) * 2020-11-27 2022-06-02 삼성전자 주식회사 Method of determining particle size distribution and electronic device
CN112730174A (en) * 2020-12-17 2021-04-30 华南理工大学 Method for monitoring concentration of spheroidal particles in crystallization process in real time
EP4356099A4 (en) 2021-06-15 2025-06-18 Particle Measuring Systems, Inc. COMPACT INTELLIGENT AEROSOL AND LIQUID DISTRIBUTOR
TW202323792A (en) 2021-06-15 2023-06-16 美商粒子監測系統有限公司 Modular particle counter with docking station
KR20240019843A (en) 2021-06-15 2024-02-14 파티클 머슈어링 시스템즈, 인크. Condensation particle counting and how to use it
US12326393B2 (en) 2022-01-21 2025-06-10 Particle Measuring Systems, Inc. Enhanced dual-pass and multi-pass particle detection
US12461010B2 (en) 2023-11-16 2025-11-04 Particle Measuring Systems, Inc. Systems and methods for reducing false positive particle detection events in a particle detector
DE102024107205B3 (en) * 2024-03-13 2025-05-22 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Method for measuring a measurand of a light-scattering measuring object

Citations (178)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737251A (en) 1980-08-19 1982-03-01 Keisho Amano Optical system of measuring device of grain density in suspension liquid
US4540283A (en) 1983-06-20 1985-09-10 Bachalo William D Apparatus and method for determining the size and velocity of particles, droplets, bubbles or the like using laser light scattering
US4594715A (en) 1983-11-17 1986-06-10 Particle Measuring Systems, Inc. Laser with stabilized external passive cavity
US4690561A (en) 1985-01-18 1987-09-01 Canon Kabushiki Kaisha Particle analyzing apparatus
US4783599A (en) 1987-02-10 1988-11-08 High Yield Technology Particle detector for flowing liquids with the ability to distinguish bubbles via photodiodes disposed 180° apart
US4798465A (en) 1986-04-14 1989-01-17 Particle Measuring Systems, Inc. Particle size detection device having high sensitivity in high molecular scattering environment
US4806774A (en) 1987-06-08 1989-02-21 Insystems, Inc. Inspection system for array of microcircuit dies having redundant circuit patterns
US4854705A (en) 1988-04-05 1989-08-08 Aerometrics, Inc. Method and apparatus to determine the size and velocity of particles using light scatter detection from confocal beams
US4906094A (en) 1987-04-23 1990-03-06 Sumitomo Chemical Co. Ltd. Fine particle measuring method and system and a flow cell for use in the system
US4917494A (en) 1987-07-28 1990-04-17 Amherst Process Instruments, Inc. Beam forming apparatus for aerodynamic particle sizing system
US4963003A (en) 1988-02-22 1990-10-16 Fuji Photo Film Co., Ltd. Laser optical system
JPH032544A (en) 1989-05-30 1991-01-08 Sumitomo Heavy Ind Ltd Rain drop measuring instrument
US4989978A (en) 1986-04-04 1991-02-05 Technicon Instruments Corporation Method and apparatus for determining the count per unit volume of particles
JPH0329835A (en) 1989-06-28 1991-02-07 Hitachi Ltd Apparatus of cytoanalysis
US5030002A (en) 1989-08-11 1991-07-09 Becton, Dickinson And Company Method and apparatus for sorting particles with a moving catcher tube
US5063301A (en) 1989-12-21 1991-11-05 The Standard Oil Company Noninvasive method and apparatus using coherent backscattering for process control
JPH04188041A (en) 1990-11-21 1992-07-06 Canon Inc Sample measuring device
US5282151A (en) 1991-02-28 1994-01-25 Particle Measuring Systems, Inc. Submicron diameter particle detection utilizing high density array
US5283199A (en) 1990-06-01 1994-02-01 Environmental Technologies Group, Inc. Chlorine dioxide monitor based on ion mobility spectrometry with selective dopant chemistry
US5471298A (en) 1992-03-27 1995-11-28 Mitsui Minings & Melting Co., Ltd. Method and apparatus for measuring size of particle or defect
JPH0850089A (en) 1994-08-08 1996-02-20 Toa Medical Electronics Co Ltd Cellular analyser
JPH0854388A (en) 1983-10-31 1996-02-27 Technicon Instr Corp Device for measuring particle volume and refractive index
US5532943A (en) 1992-12-28 1996-07-02 Toa Medical Electronics Co., Ltd. Particle analyzing apparatus and method therefor
US5585921A (en) 1995-03-15 1996-12-17 Hughes Aircraft Company Laser-ultrasonic non-destructive, non-contacting inspection system
US5619043A (en) 1994-09-21 1997-04-08 Laser Sensor Technology, Inc. System for acquiring an image of a multi-phase fluid by measuring backscattered light
US5660985A (en) 1990-06-11 1997-08-26 Nexstar Pharmaceuticals, Inc. High affinity nucleic acid ligands containing modified nucleotides
US5671046A (en) 1996-07-01 1997-09-23 Particle Measuring Systems, Inc. Device and method for optically detecting particles in a free liquid stream
US5719667A (en) 1996-07-30 1998-02-17 Bayer Corporation Apparatus for filtering a laser beam in an analytical instrument
US5726753A (en) 1996-02-26 1998-03-10 Research Electro-Optics, Inc. Intracavity particle detection using optically pumped laser media
US5739527A (en) 1993-10-04 1998-04-14 International Business Machines Corporation Near-field optical microscope for angle resolved measurements
US5740079A (en) 1995-03-13 1998-04-14 Dainichiseika Color & Chemicals Mfg. Co., Ltd. Method for determining colorimetric value
US5751422A (en) 1996-02-26 1998-05-12 Particle Measuring Systems, Inc. In-situ particle detection utilizing optical coupling
US5805281A (en) 1997-04-21 1998-09-08 Particle Measuring Systems Noise reduction utilizing signal multiplication
WO1998050779A1 (en) 1997-05-06 1998-11-12 Holcomb Matthew J Surface analysis using gaussian beam profiles
US5861950A (en) 1997-07-10 1999-01-19 Particle Measuring Systems, Inc. Particle detection system utilizing an inviscid flow-producing nozzle
WO1999006823A1 (en) 1997-08-01 1999-02-11 Kla-Tencor Corporation System for detecting anomalies and/or features of a surface
JPH11118946A (en) 1997-10-09 1999-04-30 Omron Corp Snowstorm detection sensor and snowstorm detection device using this sensor
US5903338A (en) 1998-02-11 1999-05-11 Particle Measuring Systems, Inc. Condensation nucleus counter using mixing and cooling
US5995650A (en) 1996-03-21 1999-11-30 Real-Time Geometry Corp. System and method for rapid shaped digitizing and adaptive mesh generation
US5999256A (en) 1992-02-12 1999-12-07 Cambridge Consultants Limited Particle measurement system
US6137572A (en) 1998-02-27 2000-10-24 Pacific Scientific Instruments Company High sensitivity optical fluid-borne particle detection
US6167107A (en) 1999-07-16 2000-12-26 Particle Measuring Systems, Inc. Air pump for particle sensing using regenerative fan, and associated methods
EP1083424A2 (en) 1999-09-07 2001-03-14 Applied Materials, Inc. Particle detection and embedded vision system to enhance substrate yield and throughput
US6246474B1 (en) 1998-04-29 2001-06-12 Particle Measuring Systems, Inc. Method and apparatus for measurement of particle size distribution in substantially opaque slurries
US6256096B1 (en) 1999-01-11 2001-07-03 Softray Flow cytometry apparatus and method
US20030030783A1 (en) 2000-06-02 2003-02-13 Roche John W. Consumable tube for use with a flow cytometry-based hematology system
US6532067B1 (en) 1999-08-09 2003-03-11 The United States Of America As Represented By The Secretary Of The Army Aerosol fluorescence spectrum analyzer for rapid measurement of single airborne particles
US6615679B1 (en) 2000-08-15 2003-09-09 Particle Measuring Systems, Inc. Ensemble manifold, system and method for monitoring particles in clean environments
US20040011975A1 (en) 2002-07-17 2004-01-22 Nicoli David F. Sensors and methods for high-sensitivity optical particle counting and sizing
US20040021868A1 (en) 1999-01-25 2004-02-05 Ortyn William E. Imaging and analyzing parameters of small moving objects such as cells
US20040023293A1 (en) 1999-09-27 2004-02-05 Kreimer David I. Biochips for characterizing biological processes
US20040036874A1 (en) 2002-08-23 2004-02-26 Kramer Donald L. Fiber optic apparatus for detecting light scatter to differentiate blood cells and the like
US6709311B2 (en) 2001-08-13 2004-03-23 Particle Measuring Systems, Inc. Spectroscopic measurement of the chemical constituents of a CMP slurry
JP2004184135A (en) 2002-11-29 2004-07-02 Sanyo Electric Co Ltd Battery remaining capacity calculation system
AU2004256318A1 (en) 2003-07-09 2005-01-20 Particle Measuring Systems, Inc. A method for particle size and concentration measurement
US20050028593A1 (en) 2003-08-04 2005-02-10 Particle Measuring Systems, Inc. Method and apparatus for high sensitivity monitoring of molecular contamination
US6859277B2 (en) 2002-08-27 2005-02-22 Particle Measuring Systems, Inc. Particle counter with strip laser diode
CN1587984A (en) 2004-10-19 2005-03-02 天津大学 Monitoring method and device for laser phase Doppler powder dust particle
US20050067337A1 (en) 2003-09-30 2005-03-31 Hart Sean J. Laser optical separator and method for separating colloidal suspensions
US6903818B2 (en) 2002-10-28 2005-06-07 Particle Measuring Systems, Inc. Low noise intracavity laser particle counter
US20050138934A1 (en) 2002-02-14 2005-06-30 Martin Weigert Optoelectronic component with a peltier cooler
US20050179896A1 (en) 2004-02-13 2005-08-18 Girvin Kenneth L. Method and apparatus for operating a laser in an extinction-type optical particle detector
US6945090B2 (en) 2002-06-24 2005-09-20 Particle Measuring Systems, Inc. Method and apparatus for monitoring molecular contamination of critical surfaces using coated SAWS
US7030980B1 (en) 2004-12-29 2006-04-18 Particle Measuring Systems, Inc. Diode pumped intracavity laser particle counter with improved reliability and reduced noise
US7088447B1 (en) 2005-03-01 2006-08-08 Particle Measuring Systems, Inc. Particle counter with self-concealing aperture assembly
US7088446B2 (en) 2003-12-31 2006-08-08 Particle Measuring Systems, Inc. Optical measurement of the chemical constituents of an opaque slurry
US7092078B2 (en) 2003-03-31 2006-08-15 Nihon Kohden Corporation Flow cytometer for classifying leukocytes and method for determining detection angle range of the same
KR20060132545A (en) 2003-08-05 2006-12-21 루미넥스 코포레이션 Measurement system based on light emitting diodes
CN1890595A (en) 2003-12-12 2007-01-03 皇家飞利浦电子股份有限公司 A method and apparatus for detection of a speckle based physically unclonable function
US20070030492A1 (en) 2005-05-04 2007-02-08 Lukas Novotny Apparatus and method for sizing nanoparticles based on optical forces and interferometric field detection
US7208123B2 (en) 2002-06-24 2007-04-24 Particle Measuring Systems, Inc. Molecular contamination monitoring system and method
US7235214B2 (en) 2003-04-23 2007-06-26 Particle Measuring Systems, Inc. System and method for measuring molecular analytes in a measurement fluid
US20070165225A1 (en) 2004-03-06 2007-07-19 Michael Trainer Methods and apparatus for determining the size and shape of particles
WO2007100615A2 (en) 2006-02-22 2007-09-07 Arist Instruments, Inc. High-sensitivity surface detection system and method
US20070259440A1 (en) 2006-04-19 2007-11-08 Xin Zhou Measuring low levels of methane in carbon dioxide
US20070263215A1 (en) 2006-05-12 2007-11-15 Bachalo William D Means and methods for signal validation for sizing spherical objects
CN101153868A (en) 2006-09-30 2008-04-02 深圳迈瑞生物医疗电子股份有限公司 Stream type cell analyzer
US7456960B2 (en) 2005-06-06 2008-11-25 Particle Measuring Systems, Inc. Particle counter with improved image sensor array
US20090067035A1 (en) 2007-07-10 2009-03-12 Deep Photonics Corporation Method and apparatus for continuous wave harmonic laser
US20090078862A1 (en) 2007-07-30 2009-03-26 Dan Rodier Ion mobility spectrometry analyzer for detecting peroxides
US7526158B2 (en) 2001-02-07 2009-04-28 University Of Rochester System and method for high resolution optical imaging, data storage, lithography, and inspection
US20090128810A1 (en) 2007-11-16 2009-05-21 Particle Measuring Systems, Inc. System and method for calibration verification of an optical particle counter
US20090139311A1 (en) 2007-10-05 2009-06-04 Applied Biosystems Inc. Biological Analysis Systems, Devices, and Methods
US7576857B2 (en) 2002-08-27 2009-08-18 Particle Measuring Systems, Inc. Particle counter with laser diode
US7630147B1 (en) 2007-02-16 2009-12-08 University Of Central Florida Research Foundation, Inc. Laser beam shaping for pitchfork profile
US20090323061A1 (en) 2006-02-28 2009-12-31 Lukas Novotny Multi-color hetereodyne interferometric apparatus and method for sizing nanoparticles
US7667839B2 (en) 2006-03-30 2010-02-23 Particle Measuring Systems, Inc. Aerosol particle sensor with axial fan
JP2010101879A (en) 2008-09-27 2010-05-06 Flowtech Research Inc Particle visualizing apparatus
US20100220315A1 (en) 2009-02-27 2010-09-02 Beckman Coulter, Inc. Stabilized Optical System for Flow Cytometry
US7796255B2 (en) 2007-03-23 2010-09-14 Particle Measuring Systems, Inc. Optical particle sensor with exhaust-cooled optical source
US20100304429A1 (en) * 2003-08-28 2010-12-02 William Frank Butler Methods and apparatus for sorting cells using an optical switch in a microfluidic channel network
US20100328657A1 (en) 2007-03-08 2010-12-30 The University Court Of The University Of St. Andrews Enhanced Spectroscopic Techniques Using Spatial Beam Shaping
US7876450B2 (en) 2007-09-14 2011-01-25 University Of Rochester Common-path interferometer rendering amplitude and phase of scattered light
US7916293B2 (en) 2007-12-04 2011-03-29 Particle Measuring Systems, Inc. Non-orthogonal particle detection systems and methods
JP2011133460A (en) 2009-11-30 2011-07-07 Sysmex Corp Particle analyzing apparatus
US8109129B2 (en) 2005-06-29 2012-02-07 Naneum Limited Portable nanoparticle size classifier
US20120044493A1 (en) 2010-08-23 2012-02-23 Anthony E Smart Dynamic and depolarized dynamic light scattering colloid analyzer
US8143600B2 (en) 2008-02-18 2012-03-27 Visiongate, Inc. 3D imaging of live cells with ultraviolet radiation
US20120100521A1 (en) 2008-05-16 2012-04-26 Soper Steven A Microfluidic Isolation of Tumor Cells or Other Rare Cells from Whole Blood or Other Liquids
US20130050782A1 (en) 2011-02-22 2013-02-28 Bio-Rad Laboratories, Inc. Line scan cytometry systems and methods
WO2013080209A1 (en) 2011-12-01 2013-06-06 P.M.L. - Particles Monitoring Technologies Ltd. Detection scheme for particle size and concentration measurement
US8465791B2 (en) 2009-10-16 2013-06-18 Msp Corporation Method for counting particles in a gas
WO2013181453A2 (en) 2012-05-30 2013-12-05 Cytojene Corp. Flow cytometer
US8605282B2 (en) 2009-05-08 2013-12-10 Ben-Gurion University Of The Negev Research And Development Authority Method and apparatus for high precision spectroscopy
US8705040B2 (en) 2004-03-06 2014-04-22 Michael Trainer Methods and apparatus for determining particle characteristics by measuring scattered light
US20140177932A1 (en) 2011-08-29 2014-06-26 Amgen Inc. Methods and apparati for nondestructive detection of undissolved particles in a fluid
US8800383B2 (en) 2009-08-24 2014-08-12 Particle Measuring Systems, Inc. Flow monitored particle sensor
US20140226158A1 (en) 2004-03-06 2014-08-14 Michael Trainer Methods and apparatus for determining particle characteristics
US8822952B2 (en) 2010-11-09 2014-09-02 Hitachi High-Technologies Corporation Charged particle beam apparatus having noise absorbing arrangements
US8869593B2 (en) 2008-05-08 2014-10-28 Particle Measuring Systems Inc. Condensation apparatus
US20150062587A1 (en) 2012-02-24 2015-03-05 New York University Holographic microrefractometer
US9063117B2 (en) 2007-02-21 2015-06-23 Paul L. Gourley Micro-optical cavity with fluidic transport chip for bioparticle analysis
US9068916B2 (en) 2010-03-15 2015-06-30 Bio-Rad Laboratories, Inc. Microassembled imaging flow cytometer
US20150233814A1 (en) 2013-03-28 2015-08-20 Kla-Tencor Corporation Metrology target indentification, design and verification
US20150259723A1 (en) 2014-03-14 2015-09-17 Particle Measuring Systems, Inc. Firmware Design for Area and Location Data Management of Biological Air Samples Collected on Media Plates
US20150276575A1 (en) 2012-10-15 2015-10-01 Sony Corporation Microparticle measuring apparatus
CN104969055A (en) 2013-03-14 2015-10-07 雅培实验室 Beam shaping optics of flow cytometer systems and methods related thereto
US20160126081A1 (en) 2013-06-11 2016-05-05 Particle Measuring Systems, Inc. Apparatus for charging or adjusting the charge of aerosol particles
US20160139013A1 (en) 2013-06-21 2016-05-19 Particle Measuring Systems, Inc. A method and apparatus for dilution of aerosols
US20160290915A1 (en) 2013-11-14 2016-10-06 Beckman Coulter, Inc. Flow cytometry optics
US20160356711A1 (en) 2015-04-02 2016-12-08 Particle Measuring Systems, Inc. Laser noise detection and mitigation in particle counting instruments
US20170059485A1 (en) 2015-08-28 2017-03-02 Captl Llc Multi-spectral microparticle-fluorescence photon cytometry
US20170089826A1 (en) 2014-03-17 2017-03-30 Junyu Lin Method and apparatus for bulk microparticle sorting using a microfluidic channel
US9631222B2 (en) 2014-03-14 2017-04-25 Particle Measuring Systems, Inc. Filter and blower geometry for particle sampler
US9638665B2 (en) 2013-06-17 2017-05-02 Particle Measuring Systems, Inc. Method for obtaining aerosol particle size distributions
US9682345B2 (en) 2014-07-08 2017-06-20 Particle Measuring Systems, Inc. Method of treating a cleanroom enclosure
US20170191924A1 (en) 2015-12-30 2017-07-06 Bio-Rad Laboratories, Inc. Optical detection system for particles
US20170198782A1 (en) 2014-06-05 2017-07-13 Virocyt, Inc. Flow cytometer with optical system assembly
US9810558B2 (en) 2014-03-14 2017-11-07 Particle Measuring Systems, Inc. Pressure-based airflow sensing in particle impactor systems
US20170336328A1 (en) 2016-01-04 2017-11-23 Laser & Plasma Technologies, LLC Infrared detection camera
WO2017203224A1 (en) 2016-05-23 2017-11-30 Oxford University Innovation Limited Particle characterisation in open optical resonator cavity
US9857284B1 (en) 2013-07-15 2018-01-02 Stratedigm, Inc. Method and apparatus for detection and measurement of particles with a wide dynamic range of measurement
US9885640B2 (en) 2014-03-14 2018-02-06 Particle Measuring Systems, Inc. Particle impactor with selective height adjustment
US20180038783A1 (en) 2014-12-19 2018-02-08 Captl Llc Flow cytometry using hydrodynamically planar flow
US9952136B2 (en) 2015-01-21 2018-04-24 Stratedigm, Inc. Systems and methods for detecting a particle
US9983113B2 (en) 2015-12-03 2018-05-29 Rion Co., Ltd. Particle counter
CN108369170A (en) 2015-09-16 2018-08-03 弗劳恩霍夫应用研究促进协会 Method and apparatus for carrying out the method for determining the average radius of gyration of size≤1 μm particle in suspension
US10078045B2 (en) 2015-10-13 2018-09-18 Omega Biosystems Incorporated Multi-modal fluorescence imaging flow cytometry system
US20180270435A1 (en) 2017-03-16 2018-09-20 Symmetry Sensors, Inc. Systems and methods for optical perception
US20180284008A1 (en) 2017-03-30 2018-10-04 Sysmex Corporation Flow cytometer and particle detection method
US20180313796A1 (en) 2015-11-03 2018-11-01 Waters Technologies Corporation Dmd based uv absorption detector for liquid chromatography
US20180335376A1 (en) 2012-11-01 2018-11-22 E.I. Spectra, Llc Microfluidic interrogation device
US20190025214A1 (en) 2017-07-24 2019-01-24 Quantum-Si Incoroprated Hand-held, massively-parallel, bio-optoelectronic instrument
US10197487B2 (en) 2016-06-03 2019-02-05 Particle Measuring Systems, Inc. Systems and methods for isolating condensate in a condensation particle counter
WO2019082186A1 (en) 2017-10-26 2019-05-02 Particle Measuring Systems, Inc. System and method for particles measurement
US10345200B2 (en) 2013-07-23 2019-07-09 Particle Measuring Systems, S.R.L. Microbial air sampler integrating media plate and sample collection device
US10345246B2 (en) 2016-06-02 2019-07-09 Tokyo Electron Limited Dark field wafer nano-defect inspection system with a singular beam
US10371620B2 (en) 2016-05-20 2019-08-06 Particle Measuring Systems, Inc. Automatic power control liquid particle counter with flow and bubble detection systems
US20190250785A1 (en) 2014-03-14 2019-08-15 Particle Measuring Systems, Inc. Firmware design for facility navigation, and area and location data management of particle sampling and analysis instruments
WO2019171044A1 (en) 2018-03-05 2019-09-12 Malvern Panalytical Limited Improved particle sizing by optical diffraction
US20190277745A1 (en) 2018-03-09 2019-09-12 Rion Co., Ltd. Particle counter
US10416069B2 (en) 2017-11-28 2019-09-17 Rion Co., Ltd. Particle counter
US20200072729A1 (en) 2018-08-31 2020-03-05 Particle Measuring Systems, Inc. Fluid refractive index optimizing particle counter
US20200150017A1 (en) 2018-11-12 2020-05-14 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
US20200156057A1 (en) 2018-11-21 2020-05-21 BacterioScan, Inc. Systems and methods using bacteriophage-mediated lysis for detection and identification of microorganisms in a fluid sample
US20200158603A1 (en) 2018-11-16 2020-05-21 Particle Measuring Systems, Inc. Particle Sampling Systems and Methods for Robotic Controlled Manufacturing Barrier Systems
WO2020219841A1 (en) 2019-04-25 2020-10-29 Particle Measuring Systems, Inc. Particle detection systems and methods for on-axis particle detection and/or differential detection
US10908059B2 (en) 2018-11-16 2021-02-02 Particle Measuring Systems, Inc. Slurry monitor coupling bulk size distribution and single particle detection
US20210044978A1 (en) 2019-08-09 2021-02-11 Particle Measuring Systems, Inc. User access-restrictive systems and methods for operating particle sampling devices
US20210041364A1 (en) 2018-04-28 2021-02-11 Shenzhen Mindray Bio-Medical Electronics Co., Ltd. Optical detection system, blood cell analyzer, and platelet detection method
US10928293B2 (en) 2018-09-04 2021-02-23 Particle Measuring Systems, Inc. Detecting nanoparticles on production equipment and surfaces
US20210063349A1 (en) 2019-08-26 2021-03-04 Particle Measuring Systems, Inc. Triggered sampling systems and methods
US20210102884A1 (en) 2019-10-07 2021-04-08 Particle Measuring Systems, Inc. Antimicrobial particle detectors
US20210104146A1 (en) 2019-10-07 2021-04-08 Particle Measuring Systems, Inc. Particle detectors with remote alarm monitoring and control
US20210136722A1 (en) 2019-11-04 2021-05-06 Particle Measuring Systems, Inc. Mobile monitoring device for controlled contamination areas
WO2021102256A1 (en) 2019-11-22 2021-05-27 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
US20210223273A1 (en) 2020-01-21 2021-07-22 Particle Measuring Systems, Inc. Robotic control for aseptic processing
US20210381948A1 (en) 2020-06-09 2021-12-09 Particle Measuring Systems, Inc. Particle detection via scattered light combined with incident light
US20210404936A1 (en) 2018-11-12 2021-12-30 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
US20220057317A1 (en) 2018-12-17 2022-02-24 Captl Llc Photon counting and multi-spot spectroscopy
US20220364971A1 (en) 2019-12-27 2022-11-17 Rion Co., Ltd. Particle measuring device
US20220397519A1 (en) 2021-06-15 2022-12-15 Particle Measuring Systems, Inc. Modular particle counter with docking station
US20220397495A1 (en) 2021-06-15 2022-12-15 Particle Measuring Systems, Inc. Compact intelligent aerosol and fluid manifold
US20220397510A1 (en) 2021-06-15 2022-12-15 Particle Measuring Systems, Inc. Condensation particle counters and methods of use
US20230009668A1 (en) 2021-07-09 2023-01-12 Particle Measuring Systems, Inc. Liquid impinger sampling systems and methods
US20230087059A1 (en) 2021-09-23 2023-03-23 Particle Measuring Systems, Inc. Optical isolator stabilized laser optical particle detector systems and methods
US20230236107A1 (en) 2022-01-21 2023-07-27 Particle Measuring Systems, Inc. Enhanced dual-pass and multi-pass particle detection
US20240219412A1 (en) 2022-12-20 2024-07-04 Particle Measuring Systems, Inc. Robotic control for particle sampling and monitoring

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2526708B1 (en) 1982-05-17 1985-07-12 Michelin & Cie PROCESS FOR SOLIDARIZING THE THREADS OF A TIRE RING
US4623252A (en) * 1984-10-09 1986-11-18 Spectrex Corporation Particulate counter
CN101107508B (en) * 2005-01-17 2011-08-10 比奥菲斯股份公司 Method and device for measuring dynamic parameters of particles
CN101236150B (en) * 2007-02-02 2012-09-05 深圳迈瑞生物医疗电子股份有限公司 Stream type cell technique instrument opto-electronic sensor and its irradiation unit

Patent Citations (243)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5737251A (en) 1980-08-19 1982-03-01 Keisho Amano Optical system of measuring device of grain density in suspension liquid
US4540283A (en) 1983-06-20 1985-09-10 Bachalo William D Apparatus and method for determining the size and velocity of particles, droplets, bubbles or the like using laser light scattering
JPH0854388A (en) 1983-10-31 1996-02-27 Technicon Instr Corp Device for measuring particle volume and refractive index
US4594715A (en) 1983-11-17 1986-06-10 Particle Measuring Systems, Inc. Laser with stabilized external passive cavity
US4690561A (en) 1985-01-18 1987-09-01 Canon Kabushiki Kaisha Particle analyzing apparatus
US4989978A (en) 1986-04-04 1991-02-05 Technicon Instruments Corporation Method and apparatus for determining the count per unit volume of particles
US4798465A (en) 1986-04-14 1989-01-17 Particle Measuring Systems, Inc. Particle size detection device having high sensitivity in high molecular scattering environment
US4798465B1 (en) 1986-04-14 1991-09-17 Particle Measuring Syst
US4798465B2 (en) 1986-04-14 1994-08-30 Particle Measuring Syst Particle size detection device having high sensitivity in high molecular scattering environment
US4893928A (en) 1986-04-14 1990-01-16 Particle Measuring Systems, Inc. Highly sensitive particle size detection device having noise cancellation
US4783599A (en) 1987-02-10 1988-11-08 High Yield Technology Particle detector for flowing liquids with the ability to distinguish bubbles via photodiodes disposed 180° apart
US4906094A (en) 1987-04-23 1990-03-06 Sumitomo Chemical Co. Ltd. Fine particle measuring method and system and a flow cell for use in the system
US4806774A (en) 1987-06-08 1989-02-21 Insystems, Inc. Inspection system for array of microcircuit dies having redundant circuit patterns
US4917494A (en) 1987-07-28 1990-04-17 Amherst Process Instruments, Inc. Beam forming apparatus for aerodynamic particle sizing system
US4963003A (en) 1988-02-22 1990-10-16 Fuji Photo Film Co., Ltd. Laser optical system
US4854705A (en) 1988-04-05 1989-08-08 Aerometrics, Inc. Method and apparatus to determine the size and velocity of particles using light scatter detection from confocal beams
JPH032544A (en) 1989-05-30 1991-01-08 Sumitomo Heavy Ind Ltd Rain drop measuring instrument
JPH0329835A (en) 1989-06-28 1991-02-07 Hitachi Ltd Apparatus of cytoanalysis
US5030002A (en) 1989-08-11 1991-07-09 Becton, Dickinson And Company Method and apparatus for sorting particles with a moving catcher tube
US5063301A (en) 1989-12-21 1991-11-05 The Standard Oil Company Noninvasive method and apparatus using coherent backscattering for process control
US5283199A (en) 1990-06-01 1994-02-01 Environmental Technologies Group, Inc. Chlorine dioxide monitor based on ion mobility spectrometry with selective dopant chemistry
US5660985A (en) 1990-06-11 1997-08-26 Nexstar Pharmaceuticals, Inc. High affinity nucleic acid ligands containing modified nucleotides
JPH04188041A (en) 1990-11-21 1992-07-06 Canon Inc Sample measuring device
US5282151A (en) 1991-02-28 1994-01-25 Particle Measuring Systems, Inc. Submicron diameter particle detection utilizing high density array
US5999256A (en) 1992-02-12 1999-12-07 Cambridge Consultants Limited Particle measurement system
US5471298A (en) 1992-03-27 1995-11-28 Mitsui Minings & Melting Co., Ltd. Method and apparatus for measuring size of particle or defect
US5532943A (en) 1992-12-28 1996-07-02 Toa Medical Electronics Co., Ltd. Particle analyzing apparatus and method therefor
US5739527A (en) 1993-10-04 1998-04-14 International Business Machines Corporation Near-field optical microscope for angle resolved measurements
JPH0850089A (en) 1994-08-08 1996-02-20 Toa Medical Electronics Co Ltd Cellular analyser
US5619043A (en) 1994-09-21 1997-04-08 Laser Sensor Technology, Inc. System for acquiring an image of a multi-phase fluid by measuring backscattered light
US5740079A (en) 1995-03-13 1998-04-14 Dainichiseika Color & Chemicals Mfg. Co., Ltd. Method for determining colorimetric value
US5585921A (en) 1995-03-15 1996-12-17 Hughes Aircraft Company Laser-ultrasonic non-destructive, non-contacting inspection system
US5726753A (en) 1996-02-26 1998-03-10 Research Electro-Optics, Inc. Intracavity particle detection using optically pumped laser media
US5751422A (en) 1996-02-26 1998-05-12 Particle Measuring Systems, Inc. In-situ particle detection utilizing optical coupling
US5889589A (en) 1996-02-26 1999-03-30 Research Electro-Optics, Inc. Intracavity particle detection using optically pumped laser media
US5995650A (en) 1996-03-21 1999-11-30 Real-Time Geometry Corp. System and method for rapid shaped digitizing and adaptive mesh generation
US5671046A (en) 1996-07-01 1997-09-23 Particle Measuring Systems, Inc. Device and method for optically detecting particles in a free liquid stream
US5719667A (en) 1996-07-30 1998-02-17 Bayer Corporation Apparatus for filtering a laser beam in an analytical instrument
US5805281A (en) 1997-04-21 1998-09-08 Particle Measuring Systems Noise reduction utilizing signal multiplication
WO1998050779A1 (en) 1997-05-06 1998-11-12 Holcomb Matthew J Surface analysis using gaussian beam profiles
US6084671A (en) 1997-05-06 2000-07-04 Holcomb; Matthew J. Surface analysis using Gaussian beam profiles
US5861950A (en) 1997-07-10 1999-01-19 Particle Measuring Systems, Inc. Particle detection system utilizing an inviscid flow-producing nozzle
WO1999006823A1 (en) 1997-08-01 1999-02-11 Kla-Tencor Corporation System for detecting anomalies and/or features of a surface
JPH11118946A (en) 1997-10-09 1999-04-30 Omron Corp Snowstorm detection sensor and snowstorm detection device using this sensor
US5903338A (en) 1998-02-11 1999-05-11 Particle Measuring Systems, Inc. Condensation nucleus counter using mixing and cooling
US6137572A (en) 1998-02-27 2000-10-24 Pacific Scientific Instruments Company High sensitivity optical fluid-borne particle detection
US6275290B1 (en) 1998-04-29 2001-08-14 Particle Measuring Systems, Inc. Chemical mechanical planarization (CMP) slurry quality control process and particle size distribution measuring systems
USRE39783E1 (en) 1998-04-29 2007-08-21 Particle Measuring Systems, Inc. Chemical mechanical planarization (CMP) slurry quality control process and particle size distribution measuring systems
US6246474B1 (en) 1998-04-29 2001-06-12 Particle Measuring Systems, Inc. Method and apparatus for measurement of particle size distribution in substantially opaque slurries
US6256096B1 (en) 1999-01-11 2001-07-03 Softray Flow cytometry apparatus and method
US20040021868A1 (en) 1999-01-25 2004-02-05 Ortyn William E. Imaging and analyzing parameters of small moving objects such as cells
US6167107A (en) 1999-07-16 2000-12-26 Particle Measuring Systems, Inc. Air pump for particle sensing using regenerative fan, and associated methods
US6532067B1 (en) 1999-08-09 2003-03-11 The United States Of America As Represented By The Secretary Of The Army Aerosol fluorescence spectrum analyzer for rapid measurement of single airborne particles
EP1083424A2 (en) 1999-09-07 2001-03-14 Applied Materials, Inc. Particle detection and embedded vision system to enhance substrate yield and throughput
US20040023293A1 (en) 1999-09-27 2004-02-05 Kreimer David I. Biochips for characterizing biological processes
US20030030783A1 (en) 2000-06-02 2003-02-13 Roche John W. Consumable tube for use with a flow cytometry-based hematology system
US6615679B1 (en) 2000-08-15 2003-09-09 Particle Measuring Systems, Inc. Ensemble manifold, system and method for monitoring particles in clean environments
US7526158B2 (en) 2001-02-07 2009-04-28 University Of Rochester System and method for high resolution optical imaging, data storage, lithography, and inspection
US6709311B2 (en) 2001-08-13 2004-03-23 Particle Measuring Systems, Inc. Spectroscopic measurement of the chemical constituents of a CMP slurry
US20050138934A1 (en) 2002-02-14 2005-06-30 Martin Weigert Optoelectronic component with a peltier cooler
US7208123B2 (en) 2002-06-24 2007-04-24 Particle Measuring Systems, Inc. Molecular contamination monitoring system and method
US6945090B2 (en) 2002-06-24 2005-09-20 Particle Measuring Systems, Inc. Method and apparatus for monitoring molecular contamination of critical surfaces using coated SAWS
US20040011975A1 (en) 2002-07-17 2004-01-22 Nicoli David F. Sensors and methods for high-sensitivity optical particle counting and sizing
US20040036874A1 (en) 2002-08-23 2004-02-26 Kramer Donald L. Fiber optic apparatus for detecting light scatter to differentiate blood cells and the like
JP2005536740A (en) 2002-08-23 2005-12-02 コールター インターナショナル コーポレイション Optical fiber device for detecting light scattering to differentiate blood cells and the like
US6859277B2 (en) 2002-08-27 2005-02-22 Particle Measuring Systems, Inc. Particle counter with strip laser diode
US7576857B2 (en) 2002-08-27 2009-08-18 Particle Measuring Systems, Inc. Particle counter with laser diode
US20090268202A1 (en) 2002-08-27 2009-10-29 Particle Measuring Systems, Inc. Particle Counter with Laser Diode
US6903818B2 (en) 2002-10-28 2005-06-07 Particle Measuring Systems, Inc. Low noise intracavity laser particle counter
JP2004184135A (en) 2002-11-29 2004-07-02 Sanyo Electric Co Ltd Battery remaining capacity calculation system
US7092078B2 (en) 2003-03-31 2006-08-15 Nihon Kohden Corporation Flow cytometer for classifying leukocytes and method for determining detection angle range of the same
US7235214B2 (en) 2003-04-23 2007-06-26 Particle Measuring Systems, Inc. System and method for measuring molecular analytes in a measurement fluid
WO2005005965A1 (en) 2003-07-09 2005-01-20 P.M.L - Particles Monitoring Technologies Ltd. A method for particle size and concentration measurement
US7746469B2 (en) 2003-07-09 2010-06-29 P.M.L-Particles Monitoring Technologies, Ltd. Method for particle size and concentration measurement
AU2004256318A1 (en) 2003-07-09 2005-01-20 Particle Measuring Systems, Inc. A method for particle size and concentration measurement
US20080037004A1 (en) 2003-07-09 2008-02-14 Joseph Shamir Method for Particle Size and Concentration Measurement
EP1642113A1 (en) 2003-07-09 2006-04-05 P.M.L. - Particles Monitoring Technologies Ltd. A method for particle size and concentration measurement
US20050028593A1 (en) 2003-08-04 2005-02-10 Particle Measuring Systems, Inc. Method and apparatus for high sensitivity monitoring of molecular contamination
KR20060132545A (en) 2003-08-05 2006-12-21 루미넥스 코포레이션 Measurement system based on light emitting diodes
US20100304429A1 (en) * 2003-08-28 2010-12-02 William Frank Butler Methods and apparatus for sorting cells using an optical switch in a microfluidic channel network
US20050067337A1 (en) 2003-09-30 2005-03-31 Hart Sean J. Laser optical separator and method for separating colloidal suspensions
CN1890595A (en) 2003-12-12 2007-01-03 皇家飞利浦电子股份有限公司 A method and apparatus for detection of a speckle based physically unclonable function
US7088446B2 (en) 2003-12-31 2006-08-08 Particle Measuring Systems, Inc. Optical measurement of the chemical constituents of an opaque slurry
US20050179896A1 (en) 2004-02-13 2005-08-18 Girvin Kenneth L. Method and apparatus for operating a laser in an extinction-type optical particle detector
US8705040B2 (en) 2004-03-06 2014-04-22 Michael Trainer Methods and apparatus for determining particle characteristics by measuring scattered light
US20140226158A1 (en) 2004-03-06 2014-08-14 Michael Trainer Methods and apparatus for determining particle characteristics
US20070165225A1 (en) 2004-03-06 2007-07-19 Michael Trainer Methods and apparatus for determining the size and shape of particles
CN1587984A (en) 2004-10-19 2005-03-02 天津大学 Monitoring method and device for laser phase Doppler powder dust particle
US7030980B1 (en) 2004-12-29 2006-04-18 Particle Measuring Systems, Inc. Diode pumped intracavity laser particle counter with improved reliability and reduced noise
US7088447B1 (en) 2005-03-01 2006-08-08 Particle Measuring Systems, Inc. Particle counter with self-concealing aperture assembly
US20070030492A1 (en) 2005-05-04 2007-02-08 Lukas Novotny Apparatus and method for sizing nanoparticles based on optical forces and interferometric field detection
US7528959B2 (en) 2005-05-04 2009-05-05 University Of Rochester Apparatus and method for sizing nanoparticles based on interferometric field detection
US7456960B2 (en) 2005-06-06 2008-11-25 Particle Measuring Systems, Inc. Particle counter with improved image sensor array
US20090190128A1 (en) 2005-06-06 2009-07-30 Particle Measuring Systems, Inc. Particle Counter With Improved Image Sensor Array
US8109129B2 (en) 2005-06-29 2012-02-07 Naneum Limited Portable nanoparticle size classifier
WO2007100615A2 (en) 2006-02-22 2007-09-07 Arist Instruments, Inc. High-sensitivity surface detection system and method
US20090323061A1 (en) 2006-02-28 2009-12-31 Lukas Novotny Multi-color hetereodyne interferometric apparatus and method for sizing nanoparticles
US7667839B2 (en) 2006-03-30 2010-02-23 Particle Measuring Systems, Inc. Aerosol particle sensor with axial fan
US20070259440A1 (en) 2006-04-19 2007-11-08 Xin Zhou Measuring low levels of methane in carbon dioxide
US20070263215A1 (en) 2006-05-12 2007-11-15 Bachalo William D Means and methods for signal validation for sizing spherical objects
US7561267B2 (en) 2006-09-30 2009-07-14 Shenzhen Mindray Bio-Medical Electronics Co., Ltd. Flow cytometer
US20080079929A1 (en) 2006-09-30 2008-04-03 Shenzhen Mindray Bio-Medical Electronics Co., Ltd. Flow cytometer
CN101153868A (en) 2006-09-30 2008-04-02 深圳迈瑞生物医疗电子股份有限公司 Stream type cell analyzer
US7630147B1 (en) 2007-02-16 2009-12-08 University Of Central Florida Research Foundation, Inc. Laser beam shaping for pitchfork profile
US9063117B2 (en) 2007-02-21 2015-06-23 Paul L. Gourley Micro-optical cavity with fluidic transport chip for bioparticle analysis
US20100328657A1 (en) 2007-03-08 2010-12-30 The University Court Of The University Of St. Andrews Enhanced Spectroscopic Techniques Using Spatial Beam Shaping
US7796255B2 (en) 2007-03-23 2010-09-14 Particle Measuring Systems, Inc. Optical particle sensor with exhaust-cooled optical source
US20090067035A1 (en) 2007-07-10 2009-03-12 Deep Photonics Corporation Method and apparatus for continuous wave harmonic laser
US20090078862A1 (en) 2007-07-30 2009-03-26 Dan Rodier Ion mobility spectrometry analyzer for detecting peroxides
US7985949B2 (en) 2007-07-30 2011-07-26 Particle Measuring Systems, Inc. Detection of analytes using ion mobility spectrometry
US7876450B2 (en) 2007-09-14 2011-01-25 University Of Rochester Common-path interferometer rendering amplitude and phase of scattered light
US20090139311A1 (en) 2007-10-05 2009-06-04 Applied Biosystems Inc. Biological Analysis Systems, Devices, and Methods
US7973929B2 (en) 2007-11-16 2011-07-05 Particle Measuring Systems, Inc. System and method for calibration verification of an optical particle counter
US20090128810A1 (en) 2007-11-16 2009-05-21 Particle Measuring Systems, Inc. System and method for calibration verification of an optical particle counter
US7916293B2 (en) 2007-12-04 2011-03-29 Particle Measuring Systems, Inc. Non-orthogonal particle detection systems and methods
US8427642B2 (en) 2007-12-04 2013-04-23 Particle Measuring Systems, Inc. Two-dimensional optical imaging methods and systems for particle detection
US8027035B2 (en) 2007-12-04 2011-09-27 Particle Measuring Systems, Inc. Non-orthogonal particle detection systems and methods
US8174697B2 (en) 2007-12-04 2012-05-08 Particle Measuring Systems, Inc. Non-orthogonal particle detection systems and methods
US8154724B2 (en) 2007-12-04 2012-04-10 Particle Measuring Systems, Inc. Two-dimensional optical imaging methods and systems for particle detection
US8143600B2 (en) 2008-02-18 2012-03-27 Visiongate, Inc. 3D imaging of live cells with ultraviolet radiation
US20150316464A1 (en) 2008-02-20 2015-11-05 Paul L. Gourley Analysis of Bioparticles in an Optical Microcavity
US20150000595A1 (en) 2008-05-08 2015-01-01 Particle Measuring Systems Inc. Condensation apparatus
US8869593B2 (en) 2008-05-08 2014-10-28 Particle Measuring Systems Inc. Condensation apparatus
US10792694B2 (en) 2008-05-08 2020-10-06 Particle Measuring Systems, Inc. Condensation apparatus
US20120100521A1 (en) 2008-05-16 2012-04-26 Soper Steven A Microfluidic Isolation of Tumor Cells or Other Rare Cells from Whole Blood or Other Liquids
JP2010101879A (en) 2008-09-27 2010-05-06 Flowtech Research Inc Particle visualizing apparatus
US20100220315A1 (en) 2009-02-27 2010-09-02 Beckman Coulter, Inc. Stabilized Optical System for Flow Cytometry
US8605282B2 (en) 2009-05-08 2013-12-10 Ben-Gurion University Of The Negev Research And Development Authority Method and apparatus for high precision spectroscopy
US8800383B2 (en) 2009-08-24 2014-08-12 Particle Measuring Systems, Inc. Flow monitored particle sensor
US8465791B2 (en) 2009-10-16 2013-06-18 Msp Corporation Method for counting particles in a gas
JP2011133460A (en) 2009-11-30 2011-07-07 Sysmex Corp Particle analyzing apparatus
US9068916B2 (en) 2010-03-15 2015-06-30 Bio-Rad Laboratories, Inc. Microassembled imaging flow cytometer
US20120044493A1 (en) 2010-08-23 2012-02-23 Anthony E Smart Dynamic and depolarized dynamic light scattering colloid analyzer
US8822952B2 (en) 2010-11-09 2014-09-02 Hitachi High-Technologies Corporation Charged particle beam apparatus having noise absorbing arrangements
US20130050782A1 (en) 2011-02-22 2013-02-28 Bio-Rad Laboratories, Inc. Line scan cytometry systems and methods
US20140177932A1 (en) 2011-08-29 2014-06-26 Amgen Inc. Methods and apparati for nondestructive detection of undissolved particles in a fluid
US10921229B2 (en) 2011-12-01 2021-02-16 Particle Measuring Systems, Inc. Detection scheme for particle size and concentration measurement
WO2013080209A1 (en) 2011-12-01 2013-06-06 P.M.L. - Particles Monitoring Technologies Ltd. Detection scheme for particle size and concentration measurement
US20170176312A1 (en) 2011-12-01 2017-06-22 P.M.L. - Particles Monitoring Technologies Ltd. Detection scheme for particle size and concentration measurement
CN103959039A (en) 2011-12-01 2014-07-30 P.M.L.离子监测装置有限公司 Detection scheme for particle size and concentration measurement
US20150260628A1 (en) 2011-12-01 2015-09-17 P.M.L - Particles Monitoring Technologies Ltd. Detection scheme for particle size and concentration measurement
JP6309896B2 (en) 2011-12-01 2018-04-11 ピー．エム．エル． − パーティクルズ モニタリング テクノロジーズ リミテッド Detection scheme for particle size and concentration measurement
US20200150018A1 (en) 2011-12-01 2020-05-14 Particle Measuring Systems, Inc. Detection scheme for particle size and concentration measurement
US20150062587A1 (en) 2012-02-24 2015-03-05 New York University Holographic microrefractometer
WO2013181453A2 (en) 2012-05-30 2013-12-05 Cytojene Corp. Flow cytometer
US20150276575A1 (en) 2012-10-15 2015-10-01 Sony Corporation Microparticle measuring apparatus
US20180335376A1 (en) 2012-11-01 2018-11-22 E.I. Spectra, Llc Microfluidic interrogation device
CN104969055A (en) 2013-03-14 2015-10-07 雅培实验室 Beam shaping optics of flow cytometer systems and methods related thereto
US20150233814A1 (en) 2013-03-28 2015-08-20 Kla-Tencor Corporation Metrology target indentification, design and verification
US20160126081A1 (en) 2013-06-11 2016-05-05 Particle Measuring Systems, Inc. Apparatus for charging or adjusting the charge of aerosol particles
US9638665B2 (en) 2013-06-17 2017-05-02 Particle Measuring Systems, Inc. Method for obtaining aerosol particle size distributions
US20160139013A1 (en) 2013-06-21 2016-05-19 Particle Measuring Systems, Inc. A method and apparatus for dilution of aerosols
US9857284B1 (en) 2013-07-15 2018-01-02 Stratedigm, Inc. Method and apparatus for detection and measurement of particles with a wide dynamic range of measurement
US10345200B2 (en) 2013-07-23 2019-07-09 Particle Measuring Systems, S.R.L. Microbial air sampler integrating media plate and sample collection device
US11231345B2 (en) 2013-07-23 2022-01-25 Particle Measuring Systems, S.R.L. Microbial air sampler integrating media plate and sample collection device
US20190346345A1 (en) 2013-07-23 2019-11-14 Particle Measuring Systems, S.R.L. Microbial air sampler integrating media plate and sample collection device
US20160290915A1 (en) 2013-11-14 2016-10-06 Beckman Coulter, Inc. Flow cytometry optics
US9631222B2 (en) 2014-03-14 2017-04-25 Particle Measuring Systems, Inc. Filter and blower geometry for particle sampler
US9810558B2 (en) 2014-03-14 2017-11-07 Particle Measuring Systems, Inc. Pressure-based airflow sensing in particle impactor systems
US20190250785A1 (en) 2014-03-14 2019-08-15 Particle Measuring Systems, Inc. Firmware design for facility navigation, and area and location data management of particle sampling and analysis instruments
US20150259723A1 (en) 2014-03-14 2015-09-17 Particle Measuring Systems, Inc. Firmware Design for Area and Location Data Management of Biological Air Samples Collected on Media Plates
US9885640B2 (en) 2014-03-14 2018-02-06 Particle Measuring Systems, Inc. Particle impactor with selective height adjustment
US20170089826A1 (en) 2014-03-17 2017-03-30 Junyu Lin Method and apparatus for bulk microparticle sorting using a microfluidic channel
US20170198782A1 (en) 2014-06-05 2017-07-13 Virocyt, Inc. Flow cytometer with optical system assembly
US9682345B2 (en) 2014-07-08 2017-06-20 Particle Measuring Systems, Inc. Method of treating a cleanroom enclosure
US9808760B2 (en) 2014-07-08 2017-11-07 Particle Measuring Systems, Inc. Active filtration system for controlling cleanroom environments
US20180038783A1 (en) 2014-12-19 2018-02-08 Captl Llc Flow cytometry using hydrodynamically planar flow
US9952136B2 (en) 2015-01-21 2018-04-24 Stratedigm, Inc. Systems and methods for detecting a particle
US9989462B2 (en) 2015-04-02 2018-06-05 Particle Measuring Systems, Inc. Laser noise detection and mitigation in particle counting instruments
US20160356711A1 (en) 2015-04-02 2016-12-08 Particle Measuring Systems, Inc. Laser noise detection and mitigation in particle counting instruments
US20170059485A1 (en) 2015-08-28 2017-03-02 Captl Llc Multi-spectral microparticle-fluorescence photon cytometry
CN108369170A (en) 2015-09-16 2018-08-03 弗劳恩霍夫应用研究促进协会 Method and apparatus for carrying out the method for determining the average radius of gyration of size≤1 μm particle in suspension
US10288546B2 (en) 2015-10-13 2019-05-14 Omega Biosystems Incorporated Multi-modal fluorescence imaging flow cytometry system
US10078045B2 (en) 2015-10-13 2018-09-18 Omega Biosystems Incorporated Multi-modal fluorescence imaging flow cytometry system
US20190204208A1 (en) 2015-10-13 2019-07-04 Omega Biosystems Incorporated Multi-Modal Fluorescence Imaging Flow Cytometry System
US20180313796A1 (en) 2015-11-03 2018-11-01 Waters Technologies Corporation Dmd based uv absorption detector for liquid chromatography
US9983113B2 (en) 2015-12-03 2018-05-29 Rion Co., Ltd. Particle counter
US20170191924A1 (en) 2015-12-30 2017-07-06 Bio-Rad Laboratories, Inc. Optical detection system for particles
US20170336328A1 (en) 2016-01-04 2017-11-23 Laser & Plasma Technologies, LLC Infrared detection camera
US10859487B2 (en) 2016-05-20 2020-12-08 Particle Measuring Systems, Inc. Automatic power control liquid particle counter with flow and bubble detection systems
US10371620B2 (en) 2016-05-20 2019-08-06 Particle Measuring Systems, Inc. Automatic power control liquid particle counter with flow and bubble detection systems
WO2017203224A1 (en) 2016-05-23 2017-11-30 Oxford University Innovation Limited Particle characterisation in open optical resonator cavity
CN109642866A (en) 2016-05-23 2019-04-16 牛津大学科技创新有限公司 Particle Characterization in Open Optical Resonators
US10345246B2 (en) 2016-06-02 2019-07-09 Tokyo Electron Limited Dark field wafer nano-defect inspection system with a singular beam
US10197487B2 (en) 2016-06-03 2019-02-05 Particle Measuring Systems, Inc. Systems and methods for isolating condensate in a condensation particle counter
WO2018170257A1 (en) 2017-03-16 2018-09-20 Symmetry Sensors, Inc. System and method for particle characterization
US20180270434A1 (en) 2017-03-16 2018-09-20 Symmetry Sensors, Inc. Systems and methods for optical perception
US20180270435A1 (en) 2017-03-16 2018-09-20 Symmetry Sensors, Inc. Systems and methods for optical perception
US20180266938A1 (en) * 2017-03-16 2018-09-20 Symmetry Sensors, Inc. System and method for particle characterization
US20180269250A1 (en) 2017-03-16 2018-09-20 Symmetry Sensors, Inc. Systems and methods for optical perception
WO2018170232A1 (en) 2017-03-16 2018-09-20 Symmetry Sensors, Inc. Systems and methods for optical perception
US20180284008A1 (en) 2017-03-30 2018-10-04 Sysmex Corporation Flow cytometer and particle detection method
US20190025214A1 (en) 2017-07-24 2019-01-24 Quantum-Si Incoroprated Hand-held, massively-parallel, bio-optoelectronic instrument
US20240027326A1 (en) 2017-10-26 2024-01-25 Particle Measuring Systems, Inc. System and method for particles measurement
WO2019082186A1 (en) 2017-10-26 2019-05-02 Particle Measuring Systems, Inc. System and method for particles measurement
US20200240896A1 (en) 2017-10-26 2020-07-30 Particle Measuring Systems, Inc. System and method for particles measurement
US11781965B2 (en) 2017-10-26 2023-10-10 Particle Measuring Systems, Inc. System and method for particles measurement
US10416069B2 (en) 2017-11-28 2019-09-17 Rion Co., Ltd. Particle counter
WO2019171044A1 (en) 2018-03-05 2019-09-12 Malvern Panalytical Limited Improved particle sizing by optical diffraction
US20190277745A1 (en) 2018-03-09 2019-09-12 Rion Co., Ltd. Particle counter
US20210041364A1 (en) 2018-04-28 2021-02-11 Shenzhen Mindray Bio-Medical Electronics Co., Ltd. Optical detection system, blood cell analyzer, and platelet detection method
US20200072729A1 (en) 2018-08-31 2020-03-05 Particle Measuring Systems, Inc. Fluid refractive index optimizing particle counter
US10928293B2 (en) 2018-09-04 2021-02-23 Particle Measuring Systems, Inc. Detecting nanoparticles on production equipment and surfaces
US20210140867A1 (en) 2018-09-04 2021-05-13 Particle Measuring Systems, Inc. Detecting nanoparticles on production equipment and surfaces
US20200150017A1 (en) 2018-11-12 2020-05-14 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
US20210404936A1 (en) 2018-11-12 2021-12-30 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
US11181455B2 (en) 2018-11-12 2021-11-23 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
US20240183759A1 (en) 2018-11-16 2024-06-06 Particle Measuring Systems, Inc. Particle sampling systems and methods for robotic controlled manufacturing barrier systems
US11927509B2 (en) 2018-11-16 2024-03-12 Particle Measuring Systems, Inc. Particle sampling systems and methods for robotic controlled manufacturing barrier systems
US20210190659A1 (en) 2018-11-16 2021-06-24 Particle Measuring Systems, Inc. Slurry Monitor Coupling Bulk Size Distribution and Single Particle Detection
US20200158603A1 (en) 2018-11-16 2020-05-21 Particle Measuring Systems, Inc. Particle Sampling Systems and Methods for Robotic Controlled Manufacturing Barrier Systems
US10908059B2 (en) 2018-11-16 2021-02-02 Particle Measuring Systems, Inc. Slurry monitor coupling bulk size distribution and single particle detection
US20200156057A1 (en) 2018-11-21 2020-05-21 BacterioScan, Inc. Systems and methods using bacteriophage-mediated lysis for detection and identification of microorganisms in a fluid sample
US20220057317A1 (en) 2018-12-17 2022-02-24 Captl Llc Photon counting and multi-spot spectroscopy
US11237095B2 (en) 2019-04-25 2022-02-01 Particle Measuring Systems, Inc. Particle detection systems and methods for on-axis particle detection and/or differential detection
US20220155212A1 (en) 2019-04-25 2022-05-19 Particle Measuring Systems, Inc. Particle detection systems and methods for on-axis particle detection and/or differential detection
WO2020219841A1 (en) 2019-04-25 2020-10-29 Particle Measuring Systems, Inc. Particle detection systems and methods for on-axis particle detection and/or differential detection
US11946852B2 (en) 2019-04-25 2024-04-02 Particle Measuring Systems, Inc. Particle detection systems and methods for on-axis particle detection and/or differential detection
US20200355599A1 (en) 2019-04-25 2020-11-12 Particle Measuring Systems, Inc. Particle detection systems and methods for on-axis particle detection and/or differential detection
US20210044978A1 (en) 2019-08-09 2021-02-11 Particle Measuring Systems, Inc. User access-restrictive systems and methods for operating particle sampling devices
US20210063349A1 (en) 2019-08-26 2021-03-04 Particle Measuring Systems, Inc. Triggered sampling systems and methods
US10997845B2 (en) 2019-10-07 2021-05-04 Particle Measuring Systems, Inc. Particle detectors with remote alarm monitoring and control
US20210295670A1 (en) 2019-10-07 2021-09-23 Particle Measuring Systems, Inc. Particle detectors with remote alarm monitoring and control
US20210104146A1 (en) 2019-10-07 2021-04-08 Particle Measuring Systems, Inc. Particle detectors with remote alarm monitoring and control
US20210102884A1 (en) 2019-10-07 2021-04-08 Particle Measuring Systems, Inc. Antimicrobial particle detectors
US11215546B2 (en) 2019-10-07 2022-01-04 Particle Measuring Systems, Inc. Antimicrobial particle detectors
US20210136722A1 (en) 2019-11-04 2021-05-06 Particle Measuring Systems, Inc. Mobile monitoring device for controlled contamination areas
US20240133793A1 (en) 2019-11-22 2024-04-25 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
US11988593B2 (en) 2019-11-22 2024-05-21 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
WO2021102256A1 (en) 2019-11-22 2021-05-27 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
US20210208054A1 (en) 2019-11-22 2021-07-08 Particle Measuring Systems, Inc. Advanced systems and methods for interferometric particle detection and detection of particles having small size dimensions
US20220364971A1 (en) 2019-12-27 2022-11-17 Rion Co., Ltd. Particle measuring device
US20210223273A1 (en) 2020-01-21 2021-07-22 Particle Measuring Systems, Inc. Robotic control for aseptic processing
US20240159787A1 (en) 2020-01-21 2024-05-16 Particle Measuring Systems, Inc. Robotic control for aseptic processing
US11892462B2 (en) 2020-01-21 2024-02-06 Pharma Integration Srl Robotic control for aseptic processing
US20210381948A1 (en) 2020-06-09 2021-12-09 Particle Measuring Systems, Inc. Particle detection via scattered light combined with incident light
US20220397519A1 (en) 2021-06-15 2022-12-15 Particle Measuring Systems, Inc. Modular particle counter with docking station
US20220397510A1 (en) 2021-06-15 2022-12-15 Particle Measuring Systems, Inc. Condensation particle counters and methods of use
US20220397495A1 (en) 2021-06-15 2022-12-15 Particle Measuring Systems, Inc. Compact intelligent aerosol and fluid manifold
US20230009668A1 (en) 2021-07-09 2023-01-12 Particle Measuring Systems, Inc. Liquid impinger sampling systems and methods
US20230087059A1 (en) 2021-09-23 2023-03-23 Particle Measuring Systems, Inc. Optical isolator stabilized laser optical particle detector systems and methods
US20230236107A1 (en) 2022-01-21 2023-07-27 Particle Measuring Systems, Inc. Enhanced dual-pass and multi-pass particle detection
US20240219412A1 (en) 2022-12-20 2024-07-04 Particle Measuring Systems, Inc. Robotic control for particle sampling and monitoring

Non-Patent Citations (47)

* Cited by examiner, † Cited by third party
Title
"Innovative On-Line Particle Analyzer," (Jun. 2012) Innovative Particle-Monitoring Technologies Poster, 1 pp.
"Nano-particle analysis using dark laser beam sensor," (Jun. 2014) Innovative Particle-Monitoring Technologies Poster, 1 pp.
Bouhelier et al. (2003) "Near-field scattering of longitudinal fields," Applied Physics Letters 82(25): 4596-4598.
Bouhelier et al. (2003) "Near-Field Second-Harmonic Generation Induced by Local Field Enhancement," Physical Review Letters 90(1): 013903-1-013903-4.
Bouhelier et al. (2003) "Plasmon-coupled tip-enhanced near-field optical microscopy," J. of Microscopy 210: 220-224.
European Extended Search Report, dated Jul. 13, 2021, corresponding to EP 18871675.7—10 pp.
European Office Action, dated Feb. 16, 2012, corresponding to European Patent Application No. 04744956.6, 5 pp.
European Office Action, dated Jan. 22, 2009, corresponding to European Patent Application No. 04744956.6, 2 pp.
European Office Action, dated Oct. 8, 2020, corresponding to European Patent Application No. 12854152.1, 8 pp.
European Office Action, dated Sep. 24, 2013, corresponding to European Patent Application No. 04744956.6, 7 pp.
Friedmann et al. (1996) "Surface Analysis Using Multiple Coherent Beams," Electrical and Electronics Engineers in Israel, 537-540.
Friedmann et al. (1997) "Resolution enhancement by extrapolation of the optically measured spectrum of surface profiles," Appl. Opt. 36(8): 1747-1751.
Goldberg et al. (2002) "Immersion Lens Microscopy of Photonic Nanostructures and Quantum Dots," IEEE Journal of Selected Topics in Quantum Electronics 8(5): 1051-1059.
Hemo et al. (Jan. 1, 2011) "Scattering of singular beams by subwavelength objects," Applied Optics 50(1):33-42.
Ignatovich et al. (2006) "Real-Time and Background-Free Detection of Nanoscale Particles," Physical Review Letters 96(1): 013901-1-013901-4.
International Preliminary Report on Patentability corresponding to PCT/IL2004/000616, issued Oct. 24, 2005.
International Preliminary Report on Patentability corresponding to PCT/IL2012/050488, issued Jun. 3, 2014.
International Search Report and Written Opinion corresponding to PCT/IL2004/000616, issued Nov. 12, 2004.
International Search Report and Written Opinion corresponding to PCT/IL2012/050488, issued Mar. 21, 2013.
International Search Report and Written Opinion corresponding to PCT/IL2018/051141, issued Feb. 21, 2019, 16 pages.
International Search Report and Written Opinion, dated Feb. 26, 2021, corresponding to International Patent Application No. PCT/US2020/061493, 12 pages.
International Search Report and Written Opinion, dated Jul. 28, 2020, corresponding to International Patent Application No. PCT/US2020/029765, 11 pages.
Japanese Search Report corresponding to Application No. 2014-544046, issued Jul. 28, 2016.
Jones (1999) "Light scattering for particle characterization," Progress in Energy and Combustion Science 25(1): 1-53.
Matizen et al. (1987) "Formation of non-gaussian light beams with the aid of a spatially inhomogeneous amplitude filter," Soviet Journal of Quantum Electronics 17(7): 886-887.
Munster et al. (2002) "Interferometry in flow to sort unstained X- and Y-chromosome-bearing bull spermatozoa " Cytometry 47: 192-199.
Notice of Allowance corresponding to Korean Patent Application No. 10-2014-7017139, dated Feb. 18, 2020, 3 pp.
Notice of Preliminary Rejection corresponding to Korean Patent Application No. 10-2014-7017139, dated Sep. 23, 2019.
Notification of Reason for Refusal corresponding to Korean Patent Application No. 10-2014-7017139, dated Nov. 22, 2018, 9 pp.
Notification of Reasons for Refusal corresponding to Japanese Patent Application No. 2014-544046, drafted Aug. 28, 2017.
Notification of Reasons for Refusal corresponding to Japanese Patent Application No. 2014-544046, drafted Sep. 26, 2016.
Office Action (First) corresponding to Chinese Patent Application No. 201280059154.7, issued Jun. 17, 2015.
Office Action (Second) corresponding to Chinese Patent Application No. 201280059154.7, issued May 9, 2016.
Piestun (2001) "Multidimensional Synthesis of Light Fields," Optics and Photonics News 12(11): 28-32.
Piestun et al. (1994) "Control of wave-front propagation with diffractive elements," Opt. Lett. 19(11):771-773.
Piestun et al. (1996) "Unconventional Light Distributions in three-dimensional domains," J. Mod. Opt. 43(7): 1495-1507.
Piestun et al. (1996) "Wave fields in three dimensions: Analysis and synthesis," J. Opt. Soc. Am. A 13(9): 1837-1848.
Piestun et al. (1998) "Pattern generation with extended focal depth," Appl. Opt. 37(23): 5394-5398.
Piestun et al. (2002) "Synthesis of three-dimensional light-fields and applications," Proc. IEEE 90(2): 222-244.
Search Opinion corresponding to European Patent Application No. 12854152.1, completed Jun. 2, 2015.
Shamir (Jul. 2012) "Singular beams in metrology and nanotechnology," Optical Engineering 51(7): 073605-1-073605-8.
Shamir et al. (2011) "Singular beams in metrology and nanotechnology," Tribute to Joseph W. Goodman, SPIE 8122(1): 1-8.
Shamir et al. (May 2013) "Novel particle sizing technology," 6 pp.
Spektor et al. (1996) "Dark beams with a constant notch," Opt. Lett. 21(7):456-458.
Supplementary Search corresponding to Chinese Patent Application No. 2012800591547, Apr. 28, 2016.
Weiner et al. (1998) "Improvements in Accuracy and Speed Using the Time-of-Transition Method and Dynamic Image Analysis for Particle Sizing," American Chemical Society, Chapter 8: 88-102.
Zhang et al. (Feb. 2019) "Modulated charge transport characteristics in solution-processed UV photodetector by incorporating localized built-in electric field," J. Alloys and Compounds, 774, 887-895.

Also Published As

Publication number Publication date
US20150260628A1 (en) 2015-09-17
US10921229B2 (en) 2021-02-16
KR20140106595A (en) 2014-09-03
WO2013080209A1 (en) 2013-06-06
EP2786117A4 (en) 2015-07-08
US20220228963A1 (en) 2022-07-21
EP2786117A1 (en) 2014-10-08
SG11201402528TA (en) 2014-10-30
KR102104987B1 (en) 2020-04-28
JP2015500467A (en) 2015-01-05
EP4180794A2 (en) 2023-05-17
EP4180794A3 (en) 2023-08-09
CA2856664A1 (en) 2013-06-06
EP2786117B1 (en) 2022-12-21
US20200150018A1 (en) 2020-05-14
JP6309896B2 (en) 2018-04-11
CN103959039A (en) 2014-07-30
US20170176312A1 (en) 2017-06-22

Similar Documents

Publication Publication Date Title
US12313514B2 (en) Detection scheme for particle size and concentration measurement
JP7504912B2 (en) PARTICLE DETECTION SYSTEM AND METHOD FOR ON-AXIS PARTICLE DETECTION AND/OR DIFFERENTIAL DETECTION - Patent application
US7746469B2 (en) Method for particle size and concentration measurement
JP4965561B2 (en) Cytometer cell counting and sizing system
JP5381741B2 (en) Optical measuring apparatus and optical measuring method
US20090323061A1 (en) Multi-color hetereodyne interferometric apparatus and method for sizing nanoparticles
KR20230021732A (en) Particle detection via scattered light combined with incident light
US20010035954A1 (en) Method and apparatus for measuring particle size distributions using light scattering
WO2018162869A1 (en) Particle characterisation with a focus tuneable lens
JPH0843292A (en) A detector for measuring the intensity of light scattered by thin layers of colloidal media.
JP2001264232A (en) Method and apparatus for measuring fine particles
CN116952789A (en) Method and device for measuring multi-angle mueller matrix of suspended particulate matters in water body
JP3745947B2 (en) Method and apparatus for measuring particle size of fine particles in fluid
CN118883519A (en) A fluorescence and turbidity measuring device and use method
JP2003130784A (en) Apparatus for detecting particulate in fluid
US20070047836A1 (en) Analysis of signal oscillation patterns
EP3797280B1 (en) Apparatus and method for the characterization of objects by analysis of scattered radiation
RU2279663C2 (en) Device for determining composition of aerosols
JP2009204450A (en) Turbidimeter
JPH09196842A (en) Fi value measuring method and device
JP2006329722A (en) Fine object detection method and apparatus

Legal Events

Date Code Title Description
FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

AS Assignment

Owner name: P.M.L - PARTICLES MONITORING TECHNOLOGIES, LTD., ISRAEL

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:SHAMIR, JOSEPH;REEL/FRAME:058590/0596

Effective date: 20121225

Owner name: PARTICLE MEASURING SYSTEMS, INC., COLORADO

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:P.M.L - PARTICLES MONITORING TECHNOLOGIES, LTD.;REEL/FRAME:058590/0646

Effective date: 20181220

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: NOTICE OF ALLOWANCE MAILED -- APPLICATION RECEIVED IN OFFICE OF PUBLICATIONS

STCF Information on status: patent grant

Free format text: PATENTED CASE