UA93471C2 - Ion-plasma plant - Google Patents

Abstract

An ion-plasma plant relates to technology equipment for application of bimetal coatings with laminar nano-structure of different composition and purpose. Essential feature of plant is use of two coaxial magnetron sprays of radial type with conic cathodes. The magnetron sprays mounted on axis of vacuum chamber with possibility regulation of distance between their. The details are fixed on rotary holder, on which coating is applied. The value of diameter of assembly surface of rotary holder can be adjusted. The holder with details has possibility of planetary and reciprocating moving relative to rotation axis. Present is possibility of regulation of the ratio of distance between magnetron sprays and diameter of assembly surface of holder of details. The plant allows carrying out joint processing of details or application of coatings on internal surface of pipe articles, to increase quality of laminar coatings.

Description

provides a further increase in the performance of cathodes of different composition. Magnetron atomizers of the process when reducing the thermal load on the surface to be processed, mounted relative to the carousel holder. so that the normals to the surfaces of their cathodes

The magnetron coating technology is applied along the radii of the carousel holder in the direction from allows forming two-phase coatings from the period- axis of its rotation. Sources of electric wire with a nanostructure, which are distinguished by significant magnetron atomizers and source hardness and high decorative qualities. The displacement strips are made of impulse and they have been developed wear-resistant and decorative, have the property of preventing the development of bimetallic coatings with periodic nano-arc discharges. The displacement source is included in the structure (4), which has the necessary physical scheme through the synchronizing device. Characteristics - mechanical and decorative characteristics and the joints of this installation are high quality coatings, can be used to improve the performance of a number of technical and household products. So far, the performance of the installation. The quality indicators of these coatings exceed those for the group processing of products that are placed on a carousel holder and successively cross- and single-layer coatings of nitrides and carbides flow of coating material from one and another transition metals. Such coatings represent a magnetron atomizer. Among the disadvantages of this system is the periodic structure of layers of equal thickness ("the impossibility of providing nm should be attributed to 10 tanovka). The total thickness of the coating with a periodic to the full extent of the conditions under which clear nanostructure faces are formed does not exceed 3-5 microns. Installation between layers of coating of different composition. It was established that the physical and mechanical properties of such coatings do not provide the possibility of applying coatings superior to the properties of each individual on the inner surface of tubular products. of the dual layer and are significantly improved by reducing the period of the structure from tens to ten nanometers. In order to achieve high quality 1) to improve the quality of layered bimetallic such coatings, an important condition is the provision of coatings due to the reduction of the period of layering and the distinct character of interlayer boundaries. Obtaining that structure and improving the clarity of interlayer properties of a wide range of layered edges; variable-sized coatings can be ensured by 2) increasing processing productivity by derating the thickness and material of the layers. Layered coating of heat-sensitive materials; digging with a periodic nanostructure is obtained for 3) expanding the possibilities of processing unbalanced magnetron-based products with various means, including tubular products from lying devices, with ion bombardment of the inner working surface. of densat formed on the working surface of the invention. This technology of coating formation - problems are solved by the fact that in the ion-plasma system, ion assistance - is also characterized by the fact that two magnetron sprayers are used with a low temperature of the surface of the product, which are of the radial type, which are mounted in a vacuum. the camera is coaxial with the possibility of adjusting the distance

At a certain state of the art, the relationship between them was analyzed, and the magnetron cathodes are made of different metals and have a conical shape with counter-orientation of the cones (С23С 14/35), information about ion -plasma tops, the internal magnetic poles of magnetron devices for applying layered coatings of ty- atomizers have the opposite polarity, and the bubbles and information about plasma anodes of magnetron atomizers are mounted from devices for implementing the technology of coating from the ion side of smaller conical cathode bases, with current-driven assistance . The vast majority of the leads to the anodes are made through tubes for supplying plasma devices and industrial vacuum gas, which are mounted on the axis of magnetron spray-plasma units designed for group vacuums, the electrical power system includes the processing of products of small dimensions. one magnetron discharge power source,

An example can be the installations described in what is connected to magnetron atomizers

IBI In the equipment of this type, group processing is done through a switch, and the carousel holder of parts is implemented on the rotators of the carousel, which additionally has a variable diameter of the mounting surface-type. The features of this organization of the process is that the thickness of each coating is relative to the axis of rotation. of the metal coating layer is proportional to the period The essence of the proposed invention is explained- (or half of the period) of full rotation is rotated by drawings, where in Fig. 1 the end around magnetron atomizers is shown. With this structural scheme of the installation for applying bimetham, there are difficulties in ensuring clear left functional and decorative coatings due to the nature of the interlayer boundaries. periodic nanostructure on working surfaces

The closest solution in technical terms is a variety of products, including products from the Ib|Y installation. The installation includes a vacuum chamber for moisture-sensitive materials and internal working surfaces with vacuum pumping systems, at least two tubular products. The basis of the design is a working rectangular unbalanced magnetron spray-cylindrical vacuum chamber (1) with a nozzle nozzle, placed symmetrically and parallel to the axis of the vacuum pump (2) and with a corresponding vacuum rotation of the product carousel holder and equipped with a spring-regulating valve. The vacuum chamber contains two oppositely located covers, (3) a pair of electric power sources, on which identical spray-type magnetrons are mounted. When supplied from a displacement source on a radial-type feeder with conical cathodes (4). processed products are negative relative to the anodes

A carousel holder (5) of products (b) is installed on one of the end covers of the vacuum chamber of magnetron atomizers of electrical potential (about 1000 V). In the vacuum chamber, a glow discharge is connected to the negative pole of the source. As a result of bombardment, displacement voltage (7). The system of electrical power supply of the surface of the processed products with the power supply of magnetron atomizers contains only gas ions, ion cleaning takes place and one power source of the magnetron discharge pre-heats the products before coating (8). Power sources of magnetron discharge and tya. When the coating is applied, the voltage on the displacement holder can be fixed or reduced to a level of approximately 100 V. With a pulse circuit. In the case of using pulsed execution of the plasma-chemical process of application of sources, synchronization of pulses is assumed. coating is applied to the working area reactive

Electricity and gas must be included in the composition of sources. A discharge voltage is alternately applied to the cathodes of cylindrical magnetrons by a sputtering system that prevents the occurrence of blowouts. first grades. The discharge power source is connected to the commutator (9), which provides a sequence of ron or other cathodes. As a result, the shape of magnetron atomizers with adjustable corresponding coating layers. Forming by the length of working periods and the availability of work. The coverage of the switchgear occurs simultaneously on all the torus and ensures the adjustment of the time and mode of operation of the products mounted on the holder. Layers have bias voltage sources. The distance between the magnetically regulated thickness and the clear nature of the interbody atomizers along the axis of the vacuum chamber and its boundaries. From the plasma formed in the area, the diameter of the cylindrical surface of the carousel tri- where there is a closed magnetic field, on the surface of the products can be adjusted. did, argon ions with energies of order are extracted

The construction of magnetron atomizers with a power of 100 eV and a current density of no more than 10 mA/cm, which was possible from the drawing in Fig. 2. In the drawing, the magnetron contributes to the formation of a dense structure of the coating with sprayers shown in the position of maximum excellent adhesion to the base at a relatively low convergence, which corresponds to the processing regime of the tube- the temperature of the surface being processed. At maximum product. Cathodes of magnetron atomizers (1) made of different metals (Mo, MB, 2tg, Ti, Sg, etc.)

Si, AI, etc.). Magnetic systems of magnetrons for the inner surface of tubular products. The length of dusters contain permanent magnets (2) from the material of the coating area on the inner surface-

Ma-Re-Vi and magnetic poles (3, 4) with magnetically soft nu is determined by the possibility of reversible steel. The magnetic poles, which are turned towards one another for the unidirectional movement of the tubular product h, have the opposite polarity. Thanks to this, in the working area of the formation of the coating. region between the magnetron atomizers and the ob- Thus, the ion-plasma installation, which is created by the manufactured products, a region of magnetic field with closed magnetic force ensures the achievement of the following technical goal: lines. Anodes of magnetron atomizers (5) 1) improvement of the quality of layered bimetallic are mounted on the ends of magnetron atomizers-coatings due to the reduction of the layering period. Current leads to the anodes are made through a tubular structure and improvement of the clarity of the interlayer cu(s) (7) for the supply of gas (or gases) to the area where the boundaries are; concentrated plasma. Cathodes of magnetrons are cooled by running water supplied through a ley of heat-sensitive materials; pipelines (6). 3) expansion of possibilities for processing various

The installation works as follows. On carumanite products, including tubular products with a saddle holder (5) (Fig. 1) are mounted on the working surface. hollow products (b) or tubular product (8) (see List of used sources:

Fig. 2). The ratio of the diameter of the cylindrical 1. Vacuum-arc device and coating / upper carousel holder of products - a and the distance A.A. Andreev, L.P. Sablev, V.M. Shulaev, S.N. Gri- between magnetron atomizers - n choose goryev. - Kharkov.: Izd. NNC Khfty, 2005. - 238 pp. in such a way that the maxima of the diagram direct- 2. Danilyn B.S. Magnetron sputtering of streams sprayed by magnetron sputtering systems! / B.S. Danilyn, V.K. Heart - M.: with the eyes, the substances converged (or maximally converged) on the cylindrical surface of the product holder. Z. Kuzmychev A.I. Magnetron atomizer

The vacuum chamber is sealed and pumped to the linen systems. Book 1. Introduction to physics and pressure of approximately 103 Pa. Into a vacuum chamber, the technique of magnetron sputtering / A.I. Plasma-forming gas - argon is heated to a pressure of 0.1-1 chevron. - Kyiv: Avers, 2008. - 244 p.

Pas. Application of pulse power sources 4. Beresnev V.M. Nanocrystalline and magnetron atomizers and displacement for foam composite coating, structure, properties / rare ion surface treatment and for the formation of V.M. Beresnev, A.D. Pogrebnyak, N.A. Azarenkov, the coating allows to increase the productivity of pro- V.I. Farenyk, G.V. Kyryk // PHIL. - 2007. - T. 5, Mo1- cess during processing of products from heat-sensitive materials - 2.- 6. 4-27. alev Further operations refer to the case of using

5. Svadkovskii I.V. The direction of the development of nNIIIh covered with a periodic structure of meto-magnetron scattering systems / I.V. house of magnetron spraying / Yu.V. Agabekov,

Svadkovsky // Belorussky gosudarstennennyi uni- Sutyryn A.M., Fedotov A.V.; applicant and patent university of informatics and radioelectronics: Co-owner (e/0)6) NPF "Zlan-Praktik". - clothes! BGUYR. - 2007. - Me2 (18). - b. 112-121. 2006121379/02; statement 19.06.2006; published 6. Patent for invention 2308538 of the Russian Federation, IPC 20.10.2007, Bull. Mo29.

C23C 14/35. Installation for applying multilayer

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Ministry of Education and Science of Ukraine

State Department of Intellectual Property, str. Urytskogo, 45, Kyiv, MSP, 03680, Ukraine

SE "Ukrainian Institute of Industrial Property", str. Glazunova, 1, Kyiv - 42, 01601