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UA86684C2 - Способ и установка химической инфильтрации в газовой фазе для уплотнения пористых субстратов пиролитическим углеродом - Google Patents

Способ и установка химической инфильтрации в газовой фазе для уплотнения пористых субстратов пиролитическим углеродом

Info

Publication number
UA86684C2
UA86684C2 UAA200708532A UAA200708532A UA86684C2 UA 86684 C2 UA86684 C2 UA 86684C2 UA A200708532 A UAA200708532 A UA A200708532A UA A200708532 A UAA200708532 A UA A200708532A UA 86684 C2 UA86684 C2 UA 86684C2
Authority
UA
Ukraine
Prior art keywords
gas
pyrolytic carbon
inlet
oven
porous substrates
Prior art date
Application number
UAA200708532A
Other languages
English (en)
Ukrainian (uk)
Inventor
Жак ТЕБО
Себастьен БЕРТРАН
Кристиан Робин-Броссе
Бруно Бернар
Жан-Люк Домблид
Original Assignee
Снекма Пропюльсйон Солид
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Снекма Пропюльсйон Солид filed Critical Снекма Пропюльсйон Солид
Publication of UA86684C2 publication Critical patent/UA86684C2/ru

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45593—Recirculation of reactive gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S427/00—Coating processes
    • Y10S427/10—Chemical vapor infiltration, i.e. CVI

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Treating Waste Gases (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
  • Gas Separation By Absorption (AREA)

Abstract

Один или более уплотняемых пористых субстратов загружают в печь, на вход которой подают реакционную газовую фазу, которая состоит из газа-предшественника пиролитического углерода, который содержит по меньшей мере один газообразный углеводород CH, где x и y - натуральные целые числа и 1<х<6, и газа-носителя, который содержит по меньшей мере газ, выбранный из метана и инертных газов. Газ, который отходит и содержит остаточные составляющие реакционной газовой фазы, которая поступила, и продукты реакции, включая водород, добывают из печи, и рециркулируют до реакционной газовой фазы, которая подается на вход печи по меньшей мере часть потока газа, полученного из газа, отходящего, и содержащего реакционный газ-предшественник пиролитического углерода, причем рециркуляцию осуществляют после удаления тяжелых углеводородов, которые содержатся в отходя
UAA200708532A 2005-01-24 2006-01-23 Способ и установка химической инфильтрации в газовой фазе для уплотнения пористых субстратов пиролитическим углеродом UA86684C2 (ru)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0500696A FR2881145B1 (fr) 2005-01-24 2005-01-24 Procede d'infiltration chimique en phase gazeuse pour la densification de substrats poreux par du carbone pyrolytique

Publications (1)

Publication Number Publication Date
UA86684C2 true UA86684C2 (ru) 2009-05-12

Family

ID=34982481

Family Applications (1)

Application Number Title Priority Date Filing Date
UAA200708532A UA86684C2 (ru) 2005-01-24 2006-01-23 Способ и установка химической инфильтрации в газовой фазе для уплотнения пористых субстратов пиролитическим углеродом

Country Status (13)

Country Link
US (1) US8084079B2 (ru)
EP (1) EP1844179B1 (ru)
JP (1) JP5038154B2 (ru)
KR (1) KR101381481B1 (ru)
CN (1) CN100569997C (ru)
BR (1) BRPI0607609B8 (ru)
CA (1) CA2595498C (ru)
FR (1) FR2881145B1 (ru)
IL (1) IL184718A (ru)
MX (1) MX2007008886A (ru)
RU (1) RU2398047C2 (ru)
UA (1) UA86684C2 (ru)
WO (1) WO2006077353A1 (ru)

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* Cited by examiner, † Cited by third party
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US10689753B1 (en) * 2009-04-21 2020-06-23 Goodrich Corporation System having a cooling element for densifying a substrate
DE102012100176B4 (de) * 2012-01-10 2016-11-17 Cvt Gmbh & Co. Kg Verfahren zur chemischen Gasphaseninfiltration von wenigstens einem refraktären Stoff
FR2993044B1 (fr) * 2012-07-04 2014-08-08 Herakles Dispositif de chargement et installation pour la densification de preformes poreuses tronconiques et empilables
US9523149B2 (en) 2013-03-14 2016-12-20 Rolls-Royce Corporation Rapid ceramic matrix composite production method
FR3010995B1 (fr) * 2013-09-25 2015-10-23 Herakles Installation industrielle pour infiltration chimique en phase gazeuse de substrats poreux avec circuit de refroidissement accelere
CN104498891B (zh) * 2014-11-23 2017-01-25 中国人民解放军第五七一九工厂 炭/炭复合材料构件化学气相渗积装置
US10648075B2 (en) * 2015-03-23 2020-05-12 Goodrich Corporation Systems and methods for chemical vapor infiltration and densification of porous substrates
US9938618B2 (en) * 2015-03-23 2018-04-10 Goodrich Corporation Method for rapid and efficient chemical vapor infiltration and densification of carbon fiber preforms, porous substrates and close packed particulates
RU2661320C1 (ru) * 2017-04-26 2018-07-13 Закрытое акционерное общество Научно-инженерный центр "ИНКОМСИСТЕМ" Способ гидрофобизации субстрата
KR102175816B1 (ko) 2017-07-31 2020-11-06 주식회사 엘지화학 전지재료에서 발생되는 산소의 정량분석 장치
US12233433B2 (en) * 2018-04-27 2025-02-25 Raytheon Company Uniform thin film deposition for poly-p-xylylene
FR3108629B1 (fr) 2020-03-30 2022-04-01 Safran Ceram Procédé de densification de matériaux composites
FR3147721B1 (fr) 2023-04-11 2025-04-18 Safran Landing Systems Procédé de recyclage d'un gaz effluent issu d'un dépôt ou d'une infiltration chimique en phase vapeur
FR3163949A1 (fr) * 2024-06-28 2026-01-02 Safran Landing Systems Procédé de recyclage d’une huile aromatique de capture chargée en hydrocarbures aromatiques polycycliques

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Also Published As

Publication number Publication date
CN100569997C (zh) 2009-12-16
FR2881145A1 (fr) 2006-07-28
RU2398047C2 (ru) 2010-08-27
JP2008528415A (ja) 2008-07-31
IL184718A0 (en) 2007-12-03
CN101107382A (zh) 2008-01-16
KR101381481B1 (ko) 2014-04-04
CA2595498C (en) 2014-03-18
JP5038154B2 (ja) 2012-10-03
CA2595498A1 (en) 2006-07-27
EP1844179A1 (fr) 2007-10-17
MX2007008886A (es) 2007-10-11
WO2006077353A1 (fr) 2006-07-27
RU2007127902A (ru) 2009-02-27
FR2881145B1 (fr) 2007-11-23
KR20070100375A (ko) 2007-10-10
IL184718A (en) 2013-04-30
EP1844179B1 (fr) 2013-11-06
US8084079B2 (en) 2011-12-27
US20080160192A1 (en) 2008-07-03
BRPI0607609A2 (pt) 2009-09-22
BRPI0607609B1 (pt) 2016-10-11
BRPI0607609B8 (pt) 2017-03-21

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