TWM623015U - Double shielding member and thin film deposition machine having the same - Google Patents

Abstract

The present invention provides a double-opening shielding member and a film deposition machine with the double-opening shielding member, which mainly include a first and a second shielding plate, at least one driving motor and a shaft sealing device, wherein the driving motor passes through the outer surface of the shaft sealing device. The pipe body and the shaft body are respectively connected with the first and second shielding plates, and the first and second shielding plates are driven to swing in opposite directions and switch between an open state and a shielding state. Both the first and second shielding plates include at least one groove, so as to reduce the weight of the first and second shielding plates and reduce the burden of the driving motor for carrying and driving the first and second shielding plates.

Description

Double-opening shielding member and thin film deposition machine with double-opening shielding member

The present invention relates to a double-opening shielding member, which mainly includes at least one groove on the shielding plate, so as to reduce the weight of the first and second shielding plates, and reduce the burden of the drive motor for carrying and driving the first and second shielding plates .

Chemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), and Atomic Layer Deposition (ALD) are commonly used thin-film deposition equipment, and are commonly used in processes such as integrated circuits, light-emitting diodes, and displays.

The deposition equipment mainly includes a cavity and a wafer carrier, wherein the wafer carrier is located in the cavity and used to carry at least one wafer. Taking physical vapor deposition as an example, a target needs to be set in the cavity, wherein the target faces the wafer on the wafer carrier. During physical vapor deposition, inert gas and/or reactive gas can be delivered into the chamber to apply bias voltages to the target material and the wafer carrier, respectively, and to heat the supported wafer through the wafer carrier.

The inert gas in the cavity forms an ionized inert gas due to the action of the high-voltage electric field, and the ionized inert gas will be attracted by the bias voltage on the target and bombard the target. Target atoms or molecules sputtered from the target are attracted by a bias on the wafer carrier and deposit on the surface of the heated wafer to form a thin film on the surface of the wafer.

After a period of use, a deposition film will form on the inner surface of the cavity, so the cavity needs to be cleaned periodically to prevent the deposition film from falling off during the process and contaminating the wafer. In addition, oxides or other contaminants may also form on the surface of the target, so periodic cleaning of the target is also required. Generally speaking, usually through a burn-in process, plasma ions strike the target in the cavity to remove oxides or other contaminants on the surface of the target.

When cleaning the cavity and the target, it is necessary to take out the wafer carrier and the wafer in the cavity, or isolate the wafer carrier to avoid contamination of the wafer carrier and the wafer during the cleaning process.

After a period of use, the thin film deposition machine usually needs to be cleaned to remove the thin film deposited in the chamber and the oxide or nitride on the target. Particles generated during the cleaning process can contaminate the carrier plate, so it is necessary to isolate the carrier plate from the contaminants. The present invention provides a double-opening shielding member and a film deposition machine with the double-opening shielding member, which mainly drives two shielding plates to swing in opposite directions through a driving device, so that the two shielding plates are switched between the open state and the shielding state.

When cleaning the reaction chamber, the driving device drives the two shielding plates to approach each other in a swinging manner, so that the two shielding plates are close to each other and shield the carrier plate in the accommodating space, so as to avoid the plasma used in the cleaning process or the generated Contamination contacts the carrier tray and/or the substrate it carries. During the deposition process, the driving device drives the two shielding plates to move away from each other in a swinging manner, so as to perform thin film deposition on the substrate in the reaction chamber.

An object of the present invention is to provide a thin film deposition machine with a double-opening shielding member, which mainly includes a reaction chamber, a carrier plate and a double-opening shielding member. The double-opening shielding member includes a driving device and two shielding plates, wherein the driving device connects and drives the two shielding plates to swing in opposite directions respectively, so that the two shielding plates operate in an open state and a shielding state.

At least one groove is provided on the surfaces of the two shielding plates facing the carrier plate, which can reduce the weight of the shielding plates without affecting the shielding effect of the shielding plates. By reducing the weight of the shielding plate, the burden on the driving device to drive the shielding plate to rotate will be reduced.

Specifically, the driving device is respectively connected to and supports the two shielding plates through the two connecting arms, and by arranging at least one groove on the shielding plates, the burden of the connecting arms bearing the shielding plates can be reduced. In addition, at least one perforated portion can be further provided on the connecting arm, which can reduce the weight of the connecting arm without affecting the structural strength of the connecting arm, and is beneficial for the driving device to drive the two shielding plates in opposite directions through the two connecting arms respectively. swing.

An object of the present invention is to provide a thin film deposition machine with a double-opening shielding member, comprising a driving device, two shielding plates, two connecting arms and two distance sensing units, wherein the driving device passes through the two connecting arms Connect the two shielding plates respectively. One less groove is arranged on the surface of the shielding plate, and at least one perforated portion is arranged on the connecting arm to reduce the weight of the shielding plate and the connecting arm.

In addition, a reflective surface is respectively set on the two connecting arms. When the two connecting arms operate in a shielded state, the sensing beams emitted by the two distance sensing units will be projected on the reflective surfaces of the two connecting arms, and the measurement of the two The distance between the two connecting arms and the two distance sensing units is used to determine that the two connecting arms operate in a shielding state.

An object of the present invention is to provide a thin film deposition machine with a double-opening shielding member, which mainly includes a reaction chamber, a carrier plate and a double-opening shielding member. The double-opening shielding member includes a driving device and two shielding plates, wherein the driving device includes a shaft sealing device and a driving motor.

The drive motor connects the two drive plates through the outer tube body and the shaft body of the shaft sealing device respectively, wherein two sensing units are arranged on the sides of the outer tube body and/or the shaft body to confirm the outer tube body and/or the shaft body. The angle of rotation, and the angle of the outer tube body and/or the shaft body determines whether the two shielding plates are operating in the shielding state or the opening state.

In order to achieve the above-mentioned purpose, the present invention proposes a thin film deposition machine, including: a reaction chamber, including an accommodating space; a carrying tray, located in the accommodating space, and used for carrying at least one substrate; and a double-opening shield The component includes: a first shielding plate, located in the accommodating space; a second shielding plate, located in the accommodating space, wherein the first shielding plate and the second shielding plate both include at least one groove, facing the direction of the carrier plate ; and a driving device, comprising: a shaft sealing device connected to the first shielding plate and the second shielding plate; at least one driving motor connected to the shaft sealing device, and respectively driving the first shielding plate and the second shielding plate towards the shaft sealing device through the shaft sealing device Swing in the opposite direction, so that the first shielding plate and the second shielding plate are switched between an open state and a shielding state, wherein an interval space is formed between the first shielding plate and the second shielding plate in the open state, The first shielding plate and the second shielding plate operating in the shielding state are close to each other and used to shield the carrier plate.

The present invention proposes a double-opening shielding member suitable for a thin film deposition machine, comprising: a first shielding plate; a second shielding plate, wherein the first shielding plate and the second shielding plate both include at least one groove, which is disposed in the The lower surfaces of the first shielding plate and the second shielding plate; and a driving device, comprising: a shaft sealing device, connected to the first shielding plate and the second shielding plate; at least one driving motor, connected to the shaft sealing device, and passing through the shaft sealing device The first shielding plate and the second shielding plate are respectively driven to swing in opposite directions, so that the first shielding plate and the second shielding plate are switched between an open state and a shielding state, wherein the first shielding plate and the second shielding plate in the open state are operated. A space is formed between some of the second shielding plates, and the first shielding plate and the second shielding plate operating in the shielding state are close to each other to form a shielding member.

In the film deposition machine and the double-opening shielding member, the shaft sealing device includes an outer tube body and a shaft body, the outer tube body includes a space for accommodating the shaft body, and the drive motor is connected to the first shielding plate through the shaft body, The second shielding plate is connected through the outer tube body, and the shaft body and the outer tube body are synchronously driven to rotate in opposite directions.

The thin film deposition machine and the double-opening shielding member include two sensing units adjacent to the outer tube body, and there is a distance between the two sensing units, and are respectively used for sensing the rotation of the outer tube body to a first position. a position and a second position, wherein when the outer tube body rotates to the first position, the second shielding plate operates in an open state, and when the outer tube body rotates to the second position, the second shielding plate operates in a shielding state.

The film deposition machine and the double-opening shielding member include a first connecting arm and a second connecting arm, the shaft body is connected to the first shielding plate through the first connecting arm, and the outer tube body is connected through the second connecting arm For the second shielding plate, the first connecting arm and the second connecting arm are provided with at least one perforated portion.

The thin film deposition machine and the double-opening shielding member include a first distance sensing unit and a second distance sensing unit, the first connecting arm has a first reflective surface, and the second connecting arm has a first Two reflective surfaces, wherein the first distance sensing unit and the second distance sensing unit are disposed on the reaction cavity, and are respectively used to project a first sensing beam and a second sensing beam to the first connecting arm The first reflecting surface and the second reflecting surface of the second connecting arm are used to confirm that the first shielding plate and the second shielding plate are operating in a shielding state.

Please refer to FIG. 1 , which is a schematic side cross-sectional view of an embodiment of the novel thin film deposition machine with double-opened shielding members operating in a shielded state. As shown in the figure, the thin film deposition machine 10 mainly includes a reaction chamber 11 , a carrier plate 165 and a double-opening shielding member 100 , wherein the reaction chamber 11 includes an accommodating space 12 for accommodating the carrier plate 165 and part of it. The double-opening shielding member 100.

The carrier plate 165 is located in the accommodating space 12 of the reaction chamber 11 and used to carry at least one substrate 163 . Taking the thin film deposition machine 10 as a physical vapor deposition chamber as an example, a target 161 is disposed in the reaction chamber 11 , wherein the target 161 faces the substrate 163 and the carrier plate 165 . For example, the target 161 may be disposed on the upper surface of the reaction chamber 11 and face the carrier plate 165 and/or the substrate 163 in the accommodating space 12 .

Please refer to FIG. 2 , the double-opening shielding member 100 includes a first shielding plate 151 , a second shielding plate 153 and a driving device 17 , wherein the first shielding plate 151 and the second shielding plate 153 are located in the accommodating space 12 . The driving device 17 is connected to the first shielding plate 151 and the second shielding plate 153, and drives the first shielding plate 151 and the second shielding plate 153 to swing in opposite directions respectively, so that the first shielding plate 151 and the second shielding plate 153 are in the shielding state For example, the first shielding plate 151 and the second shielding plate 153 swing synchronously with the driving device 17 as the axis.

The first shielding plate 151 and the second shielding plate 153 according to the present novel embodiment operate in the shielding state, which can be defined as the first shielding plate 151 and the second shielding plate 153 approaching each other and forming a shielding member 15 to shield Carrier tray 165 . Specifically, the first shielding plate 151 and the second shielding plate 153 operating in the shielding state are not in direct contact, and the distance between the two is less than a threshold value, for example, less than 1 mm, to prevent the first shielding plate 151 and the second shielding plate 151 from contacting the second shielding plate 153 directly. The shielding plate 153 generates particles during the contact process.

Please refer to FIG. 3 , the surfaces of the first shielding plate 151 and the second shielding plate 153 can be provided with at least one groove 154 . The setting of the groove 154 can reduce the weight of the first shielding plate 151 and the second shielding plate 153 . The shielding effect of the first shielding plate 151 and the second shielding plate 153 will not be affected. For example, the first shielding plate 151 and the second shielding plate 153 can be made of titanium, the depth of the groove 154 is about 30% to 70% of the thickness of the first shielding plate 151 and the second shielding plate 153 , and the cross-sectional area of the groove 154 About 30% to 70% of the area of the first shielding plate 151 and the second shielding plate 153 . In addition, a rounded corner or a chamfered corner can be provided between the bottom and the side of the groove 154 .

Specifically, the first shielding plate 151 and the second shielding plate 153 can be semicircular plates, and the groove 154 can be a partial annular groove, such as a half annular groove or a quarter annular groove An annular groove is close to the outer or radial outer side of the first shielding plate 151 and the second shielding plate 153 . In addition, the grooves 154 can be symmetrically disposed on the first shielding plate 151 and the second shielding plate 153 to avoid changing the center of mass of the first shielding plate 151 and the second shielding plate 153 due to the grooves 154 .

In an embodiment of the present invention, the first shielding plate 151 and the second shielding plate 153 operating in the shielding state are used to shield the carrier plate 165 , wherein the lower surfaces of the first shielding plate 151 and the second shielding plate 153 face the supporting plate 165 , and the grooves 154 are disposed on the lower surfaces of the first shielding plate 151 and the second shielding plate 153 , so that the grooves 154 face the carrier plate 165 .

In an embodiment of the present invention, the driving device 17 is connected through a first connecting arm 141 and a second connecting arm 143 respectively and drives the first shielding plate 151 and the second shielding plate 153 to swing or rotate in opposite directions, for example, the first connection The arm 141 and the second connecting arm 143 are similar to scissors, wherein the first connecting arm 141 and the second connecting arm 143 are used to carry the first shielding plate 151 and the second shielding plate 153 respectively. By reducing the weight of the first shielding plate 151 and the second shielding plate 153 , the burden on the first connecting arm 141 and the second connecting arm 143 can be reduced, so as to avoid deformation or breakage of the first connecting arm 141 and the second connecting arm 143 .

Please refer to FIG. 4 , the first connecting arm 141 and the second connecting arm 143 are respectively provided with at least one through hole 142 to reduce the weight of the first connecting arm 141 and the second connecting arm 143 . In addition, disposing the perforated portion 142 on the first connecting arm 141 and the second connecting arm 143 will not reduce the structural strength of the first connecting arm 141 and the second connecting arm 143 .

In an embodiment of the present invention, the surfaces of the first shielding plate 151 and the second shielding plate 153 may also be provided with a plurality of positioning protrusions 156 , wherein the positioning protrusions 156 and the grooves 154 are disposed on the first shielding plate 151 and the second shielding plate 151 . On the same surface of the shielding plate 153, for example, the lower surface. The surfaces of the first connecting arm 141 and the second connecting arm 143 for supporting the first shielding plate 151 and the second shielding plate 153 are provided with a plurality of positioning recesses 144 . A shielding plate 151 and a second shielding plate 153 are placed at the fixed positions of the first connecting arm 141 and the second connecting arm 143, respectively, so as to prevent the first shielding plate 151 and the second shielding plate 153 from being relative to the first connecting arm 141 and the second connecting arm 143. The second connecting arm 143 is displaced.

The above-mentioned arrangement of the positioning protrusions 156 on the lower surfaces of the first shielding plate 151 and the second shielding plate 153, and the positioning concave portions 144 arranged on the upper surfaces of the first connecting arm 141 and the second connecting arm 143 is only an embodiment of the present invention. rather than limiting the scope of the rights of this new model.

In different embodiments, positioning concave portions may also be provided on the lower surfaces of the first shielding plate 151 and the second shielding plate 153 , and positioning convex portions may be provided on the upper surfaces of the first connecting arm 141 and the second connecting arm 143 . For example, a plurality of screw holes can be provided on the first connecting arm 141 and the second connecting arm 143 , and the screws can be locked on the screw holes to form positioning protrusions on the upper surfaces of the first connecting arm 141 and the second connecting arm 143 and align with the positioning recesses on the lower surfaces of the first shielding plate 151 and the second shielding plate 153 through the screws protruding from the upper surfaces of the first connecting arm 141 and the second connecting arm 143 .

In an embodiment of the present invention, please refer to FIG. 5 , the driving device 17 includes a driving motor 171 and a shaft sealing device 173 , wherein the driving motor 171 is connected to the first shielding plate 151 and the second shielding plate 153 through the shaft sealing device 173 , The shaft sealing device 173 drives the first shielding plate 151 and the second shielding plate 153 to swing in opposite directions respectively, so that the first shielding plate 151 and the second shielding plate 153 are switched between an open state and a shielding state.

Specifically, the shaft sealing device 173 includes an outer tube body 1733 and a shaft body 1731, wherein the outer tube body 1733 includes a space for accommodating the shaft body 1731, and the driving motor 171 drives the outer tube body 1733 and the shaft body 1731 synchronously Turn in the opposite direction.

The outer tube body 1733 and the shaft body 1731 are coaxially disposed, and the outer tube body 1733 and the shaft body 1731 can rotate relative to each other. The driving motor 171 is connected to the first connecting arm 141 through the shaft body 1731 , and is connected through the first connecting arm 141 to drive the first shielding plate 151 to swing. The driving motor 171 is connected to the second connecting arm 143 through the outer tube 1733 , and is connected through the second connecting arm 143 to drive the second shielding plate 153 to swing.

The shaft sealing device 173 may be a common shaft seal, and is mainly used to isolate the accommodating space 12 of the reaction chamber 11 from the external space, so as to maintain the vacuum of the accommodating space 12 . For example, the outer tube body 1733 is located in a fixed tube body 1737 and is connected to a fixed tube body 1737 through a plurality of bearings, and the shaft body 1731 is connected to the outer tube body 1733 through a plurality of bearings. In another embodiment of the present invention, the shaft seal device 173 may be a magnetic fluid shaft seal, and includes a plurality of bearings, at least one permanent magnet, at least one magnetic pole piece and at least one magnetic fluid.

The number of the driving motor 171 can be one, as shown in FIG. 2 , wherein the driving motor 171 drives the shaft body 1731 and the outer tube body 1733 to rotate in opposite directions at the same time through a linkage mechanism. In another embodiment of the present invention, as shown in FIG. 5 , the number of the driving motors 171 can be two, which are the first driving motor 1711 and the second driving motor 1713 respectively. The first driving motor 1711 is connected to and drives the shaft body 1731 to rotate, and drives the first shielding plate 151 to swing through the shaft body 1731 and the first connecting arm 141 . The second driving motor 1713 drives the outer tube body 1733 to rotate through a transmission unit 1735 , for example, the transmission unit 1735 can be a transmission belt, and drives the second shielding plate 153 to swing through the outer tube body 1733 and the second connecting arm 143 .

Generally speaking, the rotation angle or position of the shaft body 1731 can be obtained through the rotation angle of the first driving motor 1711 , and the rotation angle or position of the outer tube 1733 can be obtained through the rotation angle of the second driving motor 1713 . However, when the second driving motor 1713 drives the outer tube body 1733 to rotate, the transmission unit 1735 may slide relative to the second driving motor 1713 and the outer tube body 1733 . As a result, it is impossible to correctly determine whether the outer tube body 1733 is rotated to a preset angle or position based on the rotation angle of the second driving motor 1713, and of course it is impossible to determine whether the second shielding plate 153 connected and driven by the outer tube body 1733 is not. Correct operation is in the shaded state or the open state.

To this end, two sensing units 131 can be respectively disposed on the sides of the outer tube body 1733 of the shaft sealing device 173 , and there is a distance between the two sensing units 131 . For example, the two sensing units 131 and the axis of the outer tube body 1733 form an included angle, and are used to sense the rotation of the outer tube body 1733 to a first position (or a first angle) and a second position (or a second position, respectively). angle).

Specifically, when the outer tube body 1733 rotates to the first position, it drives the second shielding plate 153 to rotate to the open state, and when the outer tube body 1733 rotates to the second position, it drives the second shielding plate 153 to rotate to the open state. occluded state. There is basically no relative rotation between the outer tube body 1733 and the second shielding plate 153, so the two sensing units 131 can sense the rotation of the outer tube body 1733 to the first position or the second position to confirm the second shielding plate Whether the 153 is indeed operating in the open state or the shaded state.

In another embodiment of the present invention, two sensing units 131 can also be disposed on the side of the shaft body 1731 of the shaft sealing device 173 , wherein there is a distance between the two sensing units 131 and are respectively used for sensing the shaft. The body 1731 is rotated to a third position (or a third angle) and a fourth position (or a fourth angle).

When the shaft body 1731 rotates to the third position, it drives the first shielding plate 151 to rotate to the open state, and when the shaft body 1731 rotates to the fourth position, it drives the first shielding plate 151 to rotate to the shielding state. Therefore, the rotation of the shaft body 1731 to the third position or the fourth position can be sensed through the two sensing units 131 to confirm whether the first shielding plate 151 is indeed rotated to the open state or the shielding state.

In addition, in order to further confirm whether the first shielding plate 151 and the second shielding plate 153 are operating in the shielding state, as shown in FIG. 2 , FIG. 4 and FIG. A first reflective surface 1411 and a second reflective surface 1431 are arranged, and a first distance sensing unit 191 and a second distance sensing unit 193 are arranged on the reaction chamber 11 , such as the first distance sensing unit 191 and the The second distance sensing unit 193 may be an optical rangefinder.

Specifically, the first connecting arm 141 and the second connecting arm 143 respectively include a first protruding portion 1413 and a second protruding portion 1433, and the first reflecting surface 1411 and the second reflecting surface 1431 are respectively disposed on the on a protruding portion 1413 and a second protruding portion 1433 . For example, the first protruding portion 1413 and the second protruding portion 1433 respectively protrude the first connecting arm 141 and the second connecting arm 143 along the radial direction of the first shielding plate 151 and the second shielding plate 153 .

The first distance sensing unit 191 is disposed on the same side of the reaction chamber 11 as the first connecting arm 141 and the first shielding plate 151 , wherein the first distance sensing unit 191 is used to project a first sensing beam L1 to the first distance sensing unit 191 . A connecting arm 141 . In practical applications, the setting position of the first distance sensing unit 191 can be adjusted, so that when the first shielding plate 151 operates in a shielding state, the first sensing beam L1 generated by the first distance sensing unit 191 is projected on the first connecting arm 141 of the first reflective surface 1411. At this time, the first sensing light beam L1 is perpendicular to the first reflecting surface 1411 , so that the first distance sensing unit 191 receives the first sensing light beam L1 reflected by the first reflecting surface 1411 . The first distance sensing unit 191 can measure the distance between the first connecting arm 141 and the first distance sensing unit 191 through the reflected first sensing light beam L1, and determine whether the first shielding plate 151 is not based on the measured distance. It is indeed operating in a shading state.

The second distance sensing unit 193, the second connecting arm 143 and the second shielding plate 153 are disposed on the same side of the reaction chamber 11, wherein the second distance sensing unit 193 is used to project a second sensing beam L2 to the first Two connecting arms 143 . When the second shielding plate 153 operates in the shielding state, the second sensing light beam L2 generated by the second distance sensing unit 193 is projected on the second reflecting surface 1431 of the second connecting arm 143 , wherein the second sensing light beam L2 and The second reflective surface 1431 is vertical, so that the second distance sensing unit 193 can receive the reflected second sensing light beam L2 to measure the distance between the second connecting arm 143 and the second distance sensing unit 193 , and Based on the measured distance, it is determined whether the second shielding plate 153 is actually operating in the shielding state.

In an embodiment of the present invention, as shown in FIG. 6 and FIG. 7 , two sensing areas 113 are respectively disposed on the reaction chamber 11 , wherein the two sensing areas 113 protrude from the reaction chamber 11 , and the first distance sensing The sensing unit 191 and the second distance sensing unit 193 are respectively disposed in the two sensing areas 113 .

In addition, a shielding plate sensing unit 195 may be further disposed on the two sensing areas 113 respectively, wherein the two shielding plate sensing units 195 are used to sense the first shielding plate 151 and the first shielding plate 151 entering the two sensing areas 113 respectively. The second shielding plate 153 . When the two shielding plate sensing units 195 sense the first shielding plate 151 and the second shielding plate 153, it can be determined that the first shielding plate 151 and the second shielding plate 153 are operating in an open state, as shown in FIG. 7 . When the operation is in the open state, the first shielding plate 151 and the second shielding plate 153 are separated from each other, wherein a space 152 is formed between the first shielding plate 151 and the second shielding plate 153, so that the first shielding plate 151 and the second shielding plate 151 are separated from each other. The shielding plate 153 does not shield the carrier tray 165 .

In an embodiment of the present invention, as shown in FIG. 1 , a blocking member 111 may be disposed in the accommodating space 12 of the reaction chamber 11 , wherein one end of the blocking member 111 is connected to the reaction chamber 11 , and the other end of the blocking member 111 is connected to the reaction chamber 11 . An opening 112 is formed. When the carrier plate 165 approaches the target 161 , it will enter or contact the opening 112 formed by the stopper 111 . The reaction chamber 11 , the carrier plate 165 and the blocking member 111 will partition a reaction space within the accommodating space 12 , and deposit a film on the surface of the substrate 163 in the reaction space, which can prevent the reaction chamber 11 and the reaction chamber outside the reaction space. A deposition film is formed on the surface of the carrier plate 165 .

The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Modifications should be included in the scope of the patent application of the present invention.

10: Thin film deposition machine 100: Double-opening shielding member 11: Reaction chamber 111: Stopper 112: Opening 113: Sensing area 12: Accommodating space 131: Sensing unit 141: The first connecting arm 1411: The first reflecting surface 1413: The first protrusion 142: perforated part 143: Second connecting arm 1431: Second reflective surface 1433: Second protrusion 144: Positioning recess 15: Shielding 151: First shielding plate 153: Second shielding plate 154: Groove 156: Positioning convex part 161: Target 163: Substrate 165: Carrier plate 17: Drive unit 171: Drive Motor 1711: First drive motor 1713: Second drive motor 173: Shaft seal device 1731: Shaft 1733: Outer body 1735: Transmission unit 1737: Fixed pipe body 191: The first distance sensing unit 193: Second distance sensing unit 195: Shield plate sensing unit L1: The first sensing beam L2: Second sensing beam

FIG. 1 is a schematic side cross-sectional view of an embodiment of the novel thin film deposition machine with a double-opening shielding member operating in a shielding state.

[Fig. 2] This is a schematic exploded perspective view of the novel double-opening shielding member.

3 is a perspective view and a partial cross-sectional view of an embodiment of a shielding plate of the novel double-opening shielding member.

FIG. 4 is a top view of an embodiment of the connecting arm of the novel double-opening shielding member.

FIG. 5 is a schematic perspective cross-sectional view of an embodiment of the driving device of the novel double-opening shielding member.

6 is a schematic structural diagram of an embodiment of the novel thin film deposition machine with a double-opening shielding member operating in a shielded state.

7 is a schematic structural diagram of an embodiment of the novel thin film deposition machine with double-opening shielding members operating in an open state.

141: The first connecting arm

1411: The first reflecting surface

1413: The first protrusion

142: perforated part

143: Second connecting arm

1431: Second reflective surface

1433: Second protrusion

144: Positioning recess

15: Shielding

151: First shielding plate

153: Second shielding plate

154: Groove

156: Positioning convex part

17: Drive unit

171: Drive Motor

173: Shaft seal device

1731: Shaft

1733: Outer body

Claims (10)

A thin film deposition machine, comprising: a reaction cavity, including an accommodating space; a carrying tray located in the accommodating space and used for carrying at least one substrate; a target located in the accommodating space of the reaction chamber and facing the carrier plate; and A pair of open shade elements, including: a first shielding plate, located in the accommodating space; a second shielding plate located in the accommodating space, wherein both the first shielding plate and the second shielding plate include at least one groove facing the direction of the carrier plate; and a drive unit, comprising: a shaft sealing device connecting the first shielding plate and the second shielding plate; At least one driving motor is connected to the shaft sealing device, and drives the first shielding plate and the second shielding plate to swing in opposite directions respectively through the shaft sealing device, so that the first shielding plate and the second shielding plate are in one Switching between an open state and a shielding state, wherein an interval is formed between the first shielding plate and the second shielding plate operating in the open state, and the first shielding plate and the second shielding plate operating in the shielding state The second shielding plates are close to each other, and are used for shielding the carrier plate. The film deposition machine of claim 1, wherein the shaft sealing device comprises an outer tube body and a shaft body, the outer tube body includes a space for accommodating the shaft body, and the drive motor is connected to the shaft body through the shaft body The first shielding plate is connected to the second shielding plate through the outer pipe body, and drives the shaft body and the outer pipe body to rotate in opposite directions synchronously. The thin film deposition machine according to claim 2, comprising two sensing units adjacent to the outer tube body, a distance between the two sensing units, and used for sensing the rotation of the outer tube body to a first position and a second position, wherein when the outer pipe body rotates to the first position, the second shielding plate operates in the open state, and when the outer pipe body rotates to the second position, the second The shielding plate operates in this shielding state. The thin film deposition machine of claim 2, comprising a first connecting arm and a second connecting arm, the shaft body is connected to the first shielding plate through the first connecting arm, and the outer tube body is connected to the first shielding plate through the first connecting arm Two connecting arms are connected to the second shielding plate, and at least one perforated portion is provided on the first connecting arm and the second connecting arm. The thin film deposition machine of claim 4, comprising a first distance sensing unit and a second distance sensing unit, wherein the first connecting arm has a first reflection surface, and the second connecting arm has a The second reflective surface, wherein the first distance sensing unit and the second distance sensing unit are disposed on the reaction cavity, and are respectively used for projecting a first sensing beam and a second sensing beam to the reaction cavity The first reflecting surface of the first connecting arm and the second reflecting surface of the second connecting arm are used to confirm that the first shielding plate and the second shielding plate operate in the shielding state. A double-opening shielding member suitable for a thin film deposition machine, comprising: a first shielding plate; A second shielding plate, wherein both the first shielding plate and the second shielding plate include at least one groove disposed on the lower surface of the first shielding plate and the second shielding plate, wherein the first shielding plate is The cross-sectional area of the groove is between 30% and 70% of the area of the first shielding plate, and the cross-sectional area of the groove on the second shielding plate is between 30% and 70% of the area of the second shielding plate. and a drive unit, comprising: a shaft sealing device connecting the first shielding plate and the second shielding plate; At least one driving motor is connected to the shaft sealing device, and drives the first shielding plate and the second shielding plate to swing in opposite directions respectively through the shaft sealing device, so that the first shielding plate and the second shielding plate are in one Switching between an open state and a shielding state, wherein an interval is formed between the first shielding plate and the second shielding plate operating in the open state, and the first shielding plate and the second shielding plate operating in the shielding state The second shielding plates are close to each other and form a shielding member. The double-opening shielding member as claimed in claim 6, wherein the shaft sealing device comprises an outer tube body and a shaft body, the outer tube body includes a space for accommodating the shaft body, and the drive motor is connected to the shaft body through the shaft body The first shielding plate is connected to the second shielding plate through the outer pipe body, and drives the shaft body and the outer pipe body to rotate in opposite directions synchronously. The double-opening shielding member as claimed in claim 7, comprising two sensing units adjacent to the outer tube body, a distance between the two sensing units, and used for sensing the rotation of the outer tube body to a first position and a second position, wherein when the outer pipe body rotates to the first position, the second shielding plate operates in the open state, and when the outer pipe body rotates to the second position, the second The shielding plate operates in this shielding state. The double-opening shielding member as claimed in claim 7, comprising a first connecting arm and a second connecting arm, the shaft body is connected to the first shielding plate through the first connecting arm, and the outer pipe body is connected to the first shielding plate through the first connecting arm. Two connecting arms are connected to the second shielding plate, and at least one perforated portion is provided on the first connecting arm and the second connecting arm. The double-opening shielding member as claimed in claim 9, wherein the first connecting arm has a first protruding portion, the first protruding portion includes a first reflective surface, and the second connecting arm has a second protruding portion an outgoing part, the second protruding part includes a second reflecting surface.

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