TWM676844U - Optical inspection device - Google Patents

Abstract

An optical inspection device has a door panel, a mirror set connected to a rear of the door panel, at least one camera module arranged below the mirror set, and a light source connected to the door panel and facing toward a front of the door panel. The optical inspection device is configured to be arranged at an opening of a door frame of an inspection platform. When the door panel opens and moves down, the light source emits light forward, and each camera module is configured to capture images reflected from the mirror set to inspect the products arranged in a unified pod.

Description

Image-based product detection device

This invention relates to an inspection device suitable for inspecting wafers, PLP panels, or wafer frames, and particularly to an image-based product detection device suitable for inspecting wafers, PLP panels, or wafer frames.

In today's semiconductor industry, front-opening wafer cassettes are used to hold multiple wafers during the wafer fabrication process. These cassettes have multiple grooves, allowing robotic arms to place the wafers into the cassettes in a staggered manner, providing protection during transport and storage. After the wafers are placed in the cassette, inspection equipment is typically used to locate and detect defects within the wafer. Mapping is primarily used to determine the correctness of the number, placement, and deformation of wafers through a detection device. This prevents wafers from being misaligned or stacked due to incorrect placement, which could damage them during transport. The detection process mainly involves moving the wafer transport cassette containing the wafers to the detection position of a detection device, and then using the detection device to scan and detect each wafer in the wafer transport cassette.

Existing wafer inspection equipment mainly includes a rotary arm for mounting sensors. During inspection, the rotary arm first rotates to align the sensors with the wafer transport cassette, and then the sensors scan the wafers to detect the amount of deformation of each wafer and whether there are any instances of skewed placement or overlapping. However, existing wafer inspection equipment has a relatively complex structure and high cost. The sensor-based wafer scanning method may not be able to completely detect wafer defects, resulting in low inspection accuracy, which needs to be improved.

In view of the above-mentioned deficiencies, the present invention provides an image-based product detection device with a simple structure that can be integrated into an opening and closing door, and can detect products through image recognition during the opening and closing process of the door.

To achieve the above objectives, the present invention provides an image-based product detection device comprising: a door panel having a front side and a rear side; a mirror assembly connected to the rear side of the door panel and mounted above the door panel, the mirror assembly having a reflector tilted towards the door panel; at least one camera module connected to the rear side of the door panel and located below the mirror assembly, the lens of the at least one camera module facing the reflector of the mirror assembly; and a light source connected to the door panel and facing the front side of the door panel.

This novel image-based product detection device is suitable for inspecting products such as wafers, PLP (Panel Level Packaging) panels, or wafer frames. It can be installed at the door frame opening of an inspection platform. As the door panel opens and moves downward, a light source is provided, and each camera module can capture the image reflected by the mirrors of the mirror assembly. By detecting the reflected images captured by each camera module during the downward movement of the door panel, the status of the product can be detected, thereby reducing process steps and improving production efficiency.

Since this novel image-based product detection device mainly detects product defects by capturing the reflection image of the mirror assembly through at least one camera module, its structure is simple and the wiring method is relatively straightforward, which can reduce costs. Furthermore, it can detect product defects through the captured images, fully present the product's condition, and accurately detect product defects.

Please refer to Figures 2 to 4. A preferred embodiment of the new imaging product detection device includes a door panel 10, a mirror assembly 20, at least one camera module 30, and a light source 40.

Referring to Figures 1 and 2, the door panel 10 is mounted on a testing platform 60, which includes a tabletop 61 and a door frame 63 located on one side of the tabletop 61. The door frame 63 has an opening 64. Referring to Figures 7 and 8, the door panel 10 is used to close the opening 64 of the door frame 63 and can move up and down relative to the door frame 63 to open the opening 64. The door panel 10 has a front side and a rear side, with the front side facing the tabletop 61 and the rear side facing away from the tabletop 61.

Please refer to Figures 2 to 5. The mirror assembly 20 is connected to the rear side of the door panel 10 and is mounted above the door panel 10. The mirror assembly 20 has a reflector 21, which is tilted towards the door panel 10. The mirror surface of the reflector 21 faces forward and is tilted downward.

Referring to Figures 3 to 6, the at least one camera module 30 is connected to the rear side of the door panel 10 and is located below the mirror assembly 20. The lens 31 of the at least one camera module 30 faces the reflector 21 of the mirror assembly 20 to capture the reflected image of the reflector 21. The at least one camera module 30 may include a plurality of camera modules 30 arranged horizontally at intervals, and each camera module 30 may be a CCD camera module.

Please refer to Figures 4, 5, and 8. The light source 40 is connected to the door panel 10 and faces the front of the door panel 10, so as to illuminate the detection platform 60 and provide a light source. The light source 40 can be connected to the rear of the door panel 10, mounted above the door panel 10, and located between the mirror assembly 20 and the door panel 10.

Preferably, referring to Figures 3 to 5, the mirror assembly 20 is connected to the door panel 10 so that its angle and position can be adjusted relative to the door panel 10; the light source 40 is connected to the door panel 10 so that its front and rear distances can be adjusted relative to the door panel 10.

Specifically, referring to Figures 3 to 6, a support frame 50 is provided on the rear side of the door panel 10 near the top. The light source 40 and the mirror assembly 20 are connected to the support frame 50. The light source 40 is connected to the support frame 50 in a way that allows it to move back and forth relative to the support frame 50, and the mirror assembly 20 is connected to the support frame 50 in a way that allows it to rotate relative to the support frame 50. The support frame 50 includes a first bracket 51 and a second bracket 53. The first bracket 51 is connected to the door panel 10, and the light source 40 is connected to the second bracket 53. The light source 40 is attached to the first bracket 51 and can be adjusted in front and back position relative to the first bracket 51. The first bracket 51 includes two first arms 511 arranged horizontally. The light source 40 extends horizontally and is connected between the first arms 511. Each first arm 511 includes at least one first adjustment groove 512. Each first adjustment groove 512 extends in front and back. The light source 40 can move in front and back relative to the first bracket 51 along each first adjustment groove 512, thereby adjusting the distance between itself and the door panel 10.

The second bracket 53 is connected to the first bracket 51 in an adjustable position relative to the first bracket 51, and the lens assembly 20 is rotatably connected to the second bracket 53 relative to the second bracket 53. The second bracket 53 includes a front-to-back adjustment bracket 54 and a vertical adjustment bracket 55. The front-to-back adjustment bracket 54 is connected to the first bracket 51 in an adjustable front-to-back position relative to the first bracket 51, and the vertical adjustment bracket 55 is connected to the front-to-back adjustment bracket 54 in an adjustable vertical position relative to the front-to-back adjustment bracket 54. The lens assembly 20 is rotatably connected to the vertical adjustment bracket 55 relative to the vertical adjustment bracket 55.

The front-to-back adjustment frame 54 includes two second arms 541 respectively connected to the two first arms 511. Each second arm 541 is provided with at least one second adjustment groove 542 extending forward and backward. The front-to-back adjustment frame 54 can adjust its front-to-back position relative to the first bracket 51 along each second adjustment groove 542. The up-and-down adjustment frame 55 includes two third arms 551 respectively connected to the two second arms 541. Each third arm 551 includes at least one third adjustment groove 552 extending upward and downward. The up-and-down adjustment frame 55 can adjust its up-and-down position relative to the front-to-back adjustment frame 54 along each third adjustment groove 552. In turn, the position and angle between the mirror assembly 20 and the door panel 10 can be adjusted by the support frame 50.

Please refer to Figures 7 and 8. When this invention is in use, a transfer box 66 is placed on the table surface 61 of the testing platform 60. The front side of the transfer box 66 forms a box opening 67. The transfer box 66 contains a plurality of products 68 stacked on top of each other. The products 68 can be wafers, PLP panels, or wafer frames, etc.

During testing, the transfer box 66 is moved to a position close to the door frame 63, so that the periphery of the opening 67 of the transfer box 66 fits against the periphery of the opening 64 of the door frame 63. The door panel 10 can be moved outward and downward relative to the testing platform 60, thereby opening the opening 64 of the door frame 63.

During the downward movement of the door panel 10, the light from the light source 40 can shine through the opening 64 of the door frame 63 onto the transfer box 66. Because the reflector 21 of the mirror assembly 20 is tilted, each camera module 30 can capture the image reflected by the reflector 21. During the downward movement of the door panel 10, the reflected images captured by each camera module 30 can be used to detect the status of each product 68 placed in the transfer box 66, confirming whether any product 68 is deformed, tilted, or overlapping. After the detection is complete, the door panel 10 can move upward to close the opening 64.

Please refer to Figures 9 to 11. The first reflected image S1 shown in Figures 9 to 11 is a schematic image captured by the camera module 30 located on the left side in Figure 6, and the second reflected image S2 is a schematic image captured by the camera module 30 on the right side.

Please refer to Figures 8 and 9. When each product 68A and 68B is placed in the correct position, the two camera modules 30 will capture the first reflective image S1 and the second reflective image S2 as shown in Figure 9. The two products 68A and 68B in the image are appropriately spaced and placed in parallel.

Please refer to Figures 8 and 10. When product 68A is tilted, the two camera modules 30 will capture the first reflective image S1 and the second reflective image S2 as shown in Figure 10. The distance between the two products 68A and 68B is not equal, and product 68A is tilted relative to product 68B.

Please refer to Figures 8 and 10. When the two products 68B and 68C are placed close together and overlap, the two camera modules 30 will capture the first reflective image S1 and the second reflective image S2 as shown in Figure 10. The distance between products 68A and 68B is equal and appropriate, but the distance between products 68B and 68C is too small.

Therefore, during the process of the door panel 10 opening relative to the door frame 63 of the detection platform 60, the quantity and placement of the products 68 placed in the delivery box 66 can be detected by the reflected images of the mirror group 20 captured by each camera module 30.

Since this novel image-based product detection device mainly detects product defects by capturing the reflected image of the mirror group 20 through at least one camera module 30, its structure is simple and the wiring method is relatively simple, which can reduce costs. Furthermore, it can detect product defects through the captured image, fully present the product's condition, and accurately detect product defects.

Furthermore, users can adjust the angle of the reflector, the height of the reflector relative to the door panel or the front-to-back distance of the reflector, and the front-to-back distance of the light source relative to the door panel, or change the number of camera modules so that each camera module can capture a clear reflection.

The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present invention. Anyone skilled in the art can make some modifications or alterations to the above-disclosed technical content as equivalent embodiments without departing from the scope of the present invention. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

10: Door panel; 20: Mirror assembly; 21: Reflector; 30: Camera module; 31: Lens; 40: Light source; 50: Support frame; 51: First support; 511: First arm; 512: First adjustment slot; 53: Second support; 54: Front and rear adjustment frame; 541: Second arm; 542: Second adjustment slot; 55: Up and down adjustment frame; 551: Third arm; 552: Third adjustment slot; 60: Inspection platform; 61: Tabletop; 63: Door frame; 64: Opening; 66: Transfer box; 67: Box opening; 68, 68A, 68B, 68C: Product; S1: First reflected image; S2: Second reflected image.

Figure 1 is a three-dimensional view of the preferred embodiment of the present invention mounted on the testing platform. Figure 2 is a partially enlarged three-dimensional view of the preferred embodiment of the present invention mounted on the testing platform. Figure 3 is a partially enlarged three-dimensional view of the preferred embodiment of the present invention. Figure 4 is a three-dimensional view of the preferred embodiment of the present invention from another angle. Figure 5 is a partially enlarged side view of the preferred embodiment of the present invention. Figure 6 is a partially enlarged rear side view of the preferred embodiment of the present invention. Figure 7 is a schematic diagram of the use of the preferred embodiment of the present invention. Figure 8 is a schematic diagram of the use of the preferred embodiment of the present invention moving downward relative to the testing platform. Figure 9 is a schematic diagram of the testing image captured by the camera module of the preferred embodiment of the present invention, showing the product placed in the correct position. Figure 10 is a schematic diagram of the detection image captured by the camera module of the present invention, showing the product placed at an angle. Figure 11 is a schematic diagram of the detection image captured by the camera module of the present invention, showing the products pressed against and overlapping each other.

10: Door panel

20: Lens assembly

30: Photography Module

40: The Light Source

60: Detection Platform

61: Countertop

63: Door frame

64: Opening

Claims (9)

An image-based product detection device includes: a door panel having a front side and a rear side; a mirror assembly connected to the rear side of the door panel and mounted above the door panel, the mirror assembly having a reflector tilted towards the door panel; at least one camera module connected to the rear side of the door panel and located below the mirror assembly, the lens of the at least one camera module facing the reflector of the mirror assembly; and a light source connected to the door panel and facing the front side of the door panel. The image-based product detection device as described in claim 1, wherein the light source is connected to the rear side of the door panel, mounted above the door panel, and located between the mirror assembly and the door panel. The image-based product detection device as described in claim 2, wherein the mirror assembly is connected to the door panel in an adjustable position relative to the door panel. The image-based product detection device as described in claim 2, wherein the light source is connected to the door panel to adjust its position relative to the door panel. The image-based product detection device as described in claim 2, wherein a support is provided on the rear side of the door panel near the top; the light source and the mirror assembly are connected to the support. The image-based product detection device as described in claim 5, wherein the light source is connected to the support frame in a position that can be adjusted forward and backward relative to the support frame; and the lens assembly is connected to the support frame in a position that can be rotated relative to the support frame. The image-based product detection device as described in claim 6, wherein the support frame includes a first bracket and a second bracket; the first bracket is connected to the door panel; the second bracket is connected to the first bracket with adjustable position relative to the first bracket; the light source is connected to the first bracket and is adjustable in front and back position relative to the first bracket; the mirror assembly is rotatably connected to the second bracket. The image-based product detection device as described in claim 7, wherein the second bracket includes a front-to-back adjustment bracket and a vertical adjustment bracket; the front-to-back adjustment bracket is connected to the first bracket to adjust its front-to-back position relative to the first bracket; the vertical adjustment bracket is connected to the front-to-back adjustment bracket to adjust its vertical position relative to the front-to-back adjustment bracket; the lens assembly is rotatable relative to the vertical adjustment bracket and connected to the vertical adjustment bracket. The image-based product detection device as described in any of claims 1 to 8, wherein the at least one camera module comprises a plurality of camera modules arranged horizontally at intervals.