TWM673119U - Substrate carrier for square substrates - Google Patents

Abstract

A substrate carrier suitable for square substrates includes a carrier body, a plurality of side support portions, at least one rear support portion, and a door panel; the carrier body has a bottom, a top opposite to the bottom, two side walls between the bottom and the top, and a rear wall located behind the bottom, the top and the two side walls, and an opening is formed in the front of the carrier body; the side support portions are located in the carrier body and are respectively arranged on the two side walls, and each side support portion has at least a spacing row The vehicle body comprises a plurality of supporting components arranged in a row, each supporting component having a protruding supporting flange and a guide block located between the supporting flange and a corner of the side wall; the rear end supporting portion is located within the vehicle body and is arranged on the rear wall, the rear end supporting portion has at least one connecting wall and a plurality of supporting protrusions formed on the connecting wall and arranged at intervals, and each supporting protrusion is configured to correspond to the height position of each supporting flange; and the door panel is assembled on the vehicle body to close the front opening of the vehicle body.

Description

Substrate carrier for square substrates

This invention is related to a storage container, specifically a substrate carrier suitable for square substrates, used for storing semiconductor substrates for transportation.

In the current semiconductor industry, substrates are mostly fragile or plate-like materials, such as glass or silicon wafers. Therefore, during production or processing, they often need to be stored in carriers such as cassettes, containers, or carriers before being transported or stored according to process requirements.

However, existing substrate carriers are mostly designed to carry round substrates. However, considering available surface area, square substrates offer greater area utilization, leading to a demand for their use. However, when carrying square substrates, existing substrate carriers, because all four sides of the square substrate come into contact with the carrier's support, increase the risk of collision and abrasion during assembly and transportation, easily damaging the square substrate.

In view of this, the author of this invention has conducted intensive research and applied theoretical knowledge to improve and resolve the above-mentioned deficiencies, and finally proposed a design that is reasonable and effective in resolving the above-mentioned deficiencies.

The main purpose of this invention is to provide a substrate carrier suitable for square substrates, which can reduce contact during assembly and provide good positioning of the square substrate in the substrate carrier to prevent damage caused by shaking during transportation.

In order to achieve the above-mentioned purpose, the present invention provides a substrate carrier suitable for square substrates, comprising a carrier body, a plurality of side support portions, at least one rear support portion, and a door panel; the carrier body has a bottom, a top opposite to the bottom, two side walls between the bottom and the top, and a rear wall located behind the bottom, the top and the two side walls, and an opening is formed in the front of the carrier body; the side support portions are located in the carrier body and are respectively arranged on the two side walls, and each side support portion is provided on the side wall. The rear support portion comprises at least a plurality of spaced support components, each of which comprises a protruding support flange and a guide block located between the support flange and a corner of the side wall. The rear support portion is located within the vehicle body and is disposed on the rear wall. The rear support portion comprises at least one connecting wall and a plurality of spaced support protrusions integrally formed on the connecting wall, each of which is configured to correspond to the height position of each support protrusion. The door panel is assembled on the vehicle body to close the front opening of the vehicle body.

To further reveal the features and technical content of this work, please refer to the following detailed description and accompanying diagrams. However, the accompanying diagrams are provided for reference and illustration only and are not intended to limit this work.

Please refer to Figures 1 and 2, which are, respectively, an exploded 3D view of this invention and an enlarged detailed view of Section A in Figure 1. This invention provides a substrate carrier suitable for square substrates, comprising a carrier body 1, a plurality of lateral supports 2, at least one rear support 3, and a door panel 4, for mounting at least one square substrate 5. As shown in Figure 13, the square substrate 5 has a width W and a length L, for example, approximately 300x300mm. The carrier body 1 and the door panel 4 provide a stable fixation along the length L to prevent the square substrate 5 from shaking.

1 and 2 , the carrier body 1 may include a bottom 10, a top 11 opposite the bottom 10, two side walls 12 surrounding the bottom 10 and the top 11, and a rear wall 13 located behind the bottom 10, the top 11, and the two side walls 12. An opening is formed at the front of the carrier body 1 to accommodate one or more square substrates 5, which are then covered by the door panel 4 to accommodate the inserted square substrates 5 (as shown in FIG10 ).

As shown in Figures 1 and 3, the side support portions 2 are disposed within the carrier body 1 and are vertically mounted on the two side walls 12 of the carrier body 1. As shown in Figure 3, each side support portion 2 may include a connecting plate 20 vertically stacked on any side wall 12, and a plurality of support components 21 spaced apart from a surface of the connecting plate 20. Each support component 21 includes a supporting flange 210 protruding from a surface of the connecting plate 20 and a guide block 211 located between the supporting flange 210 and a corner of the connecting plate 20 (or side wall 12). In other feasible embodiments, the support components 21 may also be directly spaced apart within any side wall 12.

Referring again to Figures 1 and 2 , the rear support portion 3 is disposed within the carrier body 1 and located on the rear wall 13 of the carrier body 1. As shown in Figure 2 , the rear support portion 3 comprises at least one connecting wall 30 and a plurality of spaced support protrusions 31 integrally formed on the connecting wall 30. Each support protrusion 31 is positioned at a height corresponding to each of the aforementioned support flanges 210 , allowing a square substrate 5 to be supported within the carrier body 1 at the same height by two support flanges 210 and a support protrusion 31 at the same height.

As shown in Figures 1 and 4, the door panel 4 is assembled at the front opening of the carrier body 1, thereby closing the carrier body 1 and preventing the square substrates 5 stored therein from falling out. It can also further limit the square substrates 5 stored in the carrier body 1 from shaking during transportation, thereby reducing damage to the square substrates 5. The door panel 4 has a door body 40 and a front end support portion 41 provided in the door body 40. The front end support portion 41 has a vertical frame portion 410 and a plurality of elastic sheets 411 arranged at intervals on the vertical frame portion 410. The vertical frame portion 410 is assembled in the door body 40. Each elastic sheet 411 can be in a lateral "V" shape (as shown in Figure 12) to provide an elastic thrust to the square substrate 5 in the carrier body 1, so as to ensure that the square substrate 5 is pressed against the above-mentioned rear end support portion 3 to prevent shaking during transportation.

Therefore, through the above-mentioned structural composition, a substrate carrier suitable for square substrates can be obtained.

Accordingly, as shown in Figures 5 and 6, when the square substrate 5 is inserted through the opening in the front of the carrier body 1, the present invention can further reserve a gap d between the front edge of the support protrusion 210 of any lateral support portion 2 and the front edge of the guide block 211. The gap d can be approximately 20 mm, for example, so that the corners of the two sides of the square substrate 5 can be connected to the support protrusion 210 in the gap d when it is inserted, thereby facilitating the square substrate 5 to be pushed into the carrier body 1. As shown in Figures 3 and 6, since the guide block 211 of each lateral support portion 2 has a guide slope 211a and guide surfaces 211b formed at the front and rear ends of the guide slope 211a; and in the embodiment of the present invention, as shown in Figure 7, the height h of each guide block 211 can be designed to be about 1/2 of the distance P between any two supporting flanges 210. Specifically, the height h of each guide block 211 can be 1/3 to 2/3 of the distance P. Thus, when the square substrate 5 is pushed into the carrier body 1 by a robot arm (not shown) or other means, if the square substrate 5 is not completely aligned on any side and deviates to any side (taking FIG. 7 as an example, deviating to the right side), the corner of the square substrate 5 can be guided by the guide surface 211 b to adjust the deviation. The guide surface 211 b can guide the deviated side of the square substrate 5 onto the guide slope 211 a, and then the guide slope 211 a can place the deviated side of the square substrate 5 flat on the support protrusion 210 (as shown in FIG. 8).

As shown in FIG9 , by designing the lateral support portion 2 , the square substrate 5 can be smoothly placed into the carrier body 1 while reducing the contact with the side edges of the square substrate 5 , as shown in FIG10 or FIG13 . Furthermore, as shown in FIG13 , the guide bevel 211a of the guide block 211 of any lateral support portion 2 has a long side l1 connected to the connecting plate 20 (or the side wall 12), and a short side l2 connected to the supporting protrusion 210. The long side l1 is larger than the short side l2, so that a larger guide surface 211b can be provided. Therefore, the guide surface 211b is not a simple guide angle, and can have a better guiding effect for the square substrate 5. Moreover, the long side l1 or the short side l2 is less than the length L of the square substrate 5, or at least 1/2 of the length L of the square substrate 5.

Referring again to Figures 10 to 12 , once each of the square base plates 5 is placed within the carrier body 1 , the door panel 4 can be placed over the front opening of the carrier body 1 . At this point, as shown in Figure 11 , the side of each of the square base plates 5 facing the rear wall 13 of the carrier body 1 is anchored to the support protrusion 31 of the rear support portion 3 . Specifically, each support protrusion 31 comprises a support surface 310 and a rising surface 311 extending obliquely upward from the support surface 310 . The rising surface 311 forms an external angle α with the support surface 310 . The angle α can be between 30 and 50 degrees, preferably 45 degrees. The side of each of the square base plates 5 facing the rear wall 13 is superimposed on the support surface 310 , as shown in FIG11 by the dashed lines of the square base plates 5 . Then, as shown in FIG12, when the door panel 4 is closed, the elastic sheets 411 of the front support portion 41 can respectively push the square base plates 5 with elastic force, so that each square base plate 5 can be positioned so that one side of the rear wall 13 relative to the rear wall 13 is lifted upward along the climbing surface 311 as shown in FIG11, with a lifting distance D and a lifting height H, wherein the lifting distance D can be about 1.5 to 2.5 mm, and the lifting height H can be 2 mm or less, so that the square base plate 5 can be positioned relative to the rear wall 13. One side of the rear wall 13 is maintained in a state of not contacting the supporting protrusion 210 and the supporting surface 310; further, a groove 312 is formed on the climbing surface 311, and the groove 312 is at the same height as the "V"-shaped groove portion of each elastic sheet 411 shown in Figure 12, and the groove 312 has a thickness T. When the door panel 4 is closed, the side of the square base plate 5 facing the rear wall 13 can be pushed against the groove 312 and maintained in a state of not contacting the supporting protrusion 210 and the supporting surface 310 and lifted up.

Finally, as shown in FIG13 , the size of the square base plate 5 in this invention is 300x300mm as an example. When the square base plate 5 is placed in the carrier body 1, the lateral position F1 between the center line C of the square base plate 5 and the elastic sheet 411 on the front end support portion 41 of the door panel 4 on any side can occupy about 1/6 of the width W of the square base plate 5, and the lateral position F1 between the center line C of the square base plate 5 and the elastic sheet 411 on the front end support portion 41 of the door panel 4 can occupy about 1/6 of the width W of the square base plate 5, and the lateral position F1 between the center line C of the square base plate 5 and the elastic sheet 411 on the front end support portion 41 of the door panel 4 on any side ... 32, and the rear support portion 3 is located on the extension portion 32), the lateral position F2 of which can occupy 1/6 to 1/3 of the width W of the square substrate 5 (approximately 50 to 100 mm), preferably 1/4 to 1/3 (approximately 75 to 100 mm). Furthermore, the lateral position F1 is smaller than the lateral position F2, thus forming a three-point support structure, stabilizing the square substrate 5 with minimal or minimum contact. In addition, the front edges of the two rear support portions 3 are connected to an imaginary line S, and the two lateral support portions 2 extend toward the rear wall 13 to the imaginary line S or beyond the imaginary line S. This allows the square substrate 5 to be more stably arranged within the carrier body 1, unlike with circular substrates.

In summary, this invention is truly a rare and novel creation that can truly achieve the creative objectives described in the aforementioned specification and address knowledge gaps. Furthermore, due to its novelty and advancement, it fully meets the requirements for a new patent application. Therefore, an application is filed in accordance with the Patent Law to protect the rights of the creator.

However, the above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. Therefore, all equivalent structural changes made by using the description and diagrams of the present invention are also included in the scope of the present invention and are hereby declared.

1: Carrier Body 10: Bottom 11: Top 12: Side Walls 13: Rear Wall 2: Side Support 20: Connecting Plate 21: Support Component 210: Supporting Edge 211: Guide Block 211a: Guide Inclined Surface 211b: Guide Surface 3: Rear Support 30: Connecting Wall 31: Supporting Block 310: Support Surface 311: Climbing Surface 312: Groove 32: Extension 4: Door Panel 40: Door Body 41: Front Support 410: Vertical Frame 411: Elastic Sheet 5: Square Base

Figure 1 is a 3D exploded view of this work.

Figure 2 is an enlarged detail of Part A in Figure 1.

Figure 3 is a three-dimensional diagram of the lateral support part of this creation.

Figure 4 is a schematic diagram of the exploded door panel of this creation.

Figure 5 is a side-view diagram of the work before being placed on a square substrate.

Figure 6 is a partial schematic diagram of the contact between any corner of this invention and the lateral support portion when it is placed on a square substrate.

Figure 7 is a partial schematic diagram of this creation being placed sideways on a square substrate.

Figure 8 is a partial schematic diagram of this creation after being aligned when placed on a square substrate.

Figure 9 is a top-down diagram of the square substrate of this creation during the placement process.

Figure 10 is a side view of this creation after being placed on a square substrate.

Figure 11 is an enlarged schematic diagram of part B of Figure 10 and a partial schematic diagram of the rear end climbing of the square substrate.

Figure 12 is an enlarged detail of part C in Figure 10.

Figure 13 is a top view of the square substrate of this creation after it is placed.

1: Vehicle body

10: Bottom

11: Top

12: Sidewall

13: Posterior wall

2: Lateral support

3: Backend Support Department

4: Door Panel

40: Door body

41: Front-end Support Department

Claims (15)

A substrate carrier suitable for square substrates is used to accommodate at least one square substrate and includes: a carrier body having a bottom, a top opposite to the bottom, two side walls surrounding the bottom and the top, and a rear wall located behind the bottom, the top and the two side walls, and forming an opening at the front of the carrier body; a plurality of side support portions located in the carrier body and respectively provided on the two side walls, and each of the side support portions has at least a plurality of support components arranged at intervals, and each of the support components has a protruding support flange and a guide block located between the support flange and the corner of the side wall; at least one A rear end support portion is located in the carrier body and is provided on the rear wall. The rear end support portion has at least one connecting wall and a plurality of support protrusions formed on the connecting wall and arranged at intervals, and each of the support protrusions is configured corresponding to the height position of each support edge; and a door panel is assembled on the carrier body to close the front opening of the carrier body; wherein each of the support protrusions has a supporting surface and a climbing surface extending obliquely upward from the supporting surface, and when the door panel closes the front opening of the carrier body, it pushes against the square base plate to lift the side of the square base plate relative to the rear wall along the climbing surface. A substrate carrier suitable for square substrates as described in claim 1, wherein each of the side support portions has a connecting plate vertically stacked on any one of the side walls, and the supporting components are located on a surface of the connecting plate. The substrate carrier suitable for square substrates as described in claim 1, wherein a gap is provided between the front edge of the supporting protrusion of each of the lateral supporting portions and the front edge of the guide block. As described in claim 1, the substrate carrier suitable for square substrates, wherein the guide blocks of each lateral support portion have a guide slope and guide surfaces formed at the front and rear ends of the guide slope. A substrate carrier suitable for a square substrate as described in claim 4, wherein the guide slope of the guide block of each side support portion has a long side connected to the side wall and a short side connected to the supporting protrusion, and both the long side and the short side are smaller than the length of the square substrate and are at least 1/2 of the length of the square substrate. A substrate carrier suitable for a square substrate as described in any one of claims 1 to 5, wherein the height of the guide block is 1/3 to 2/3 of the distance between any two adjacent support protrusions. A substrate carrier suitable for square substrates as described in claim 1, wherein an external angle is formed between the climbing surface and the supporting surface, and the external angle is 30 to 50 degrees. A substrate carrier suitable for square substrates as described in claim 7, wherein the outer angle is 45 degrees. The substrate carrier suitable for square substrates as described in claim 1, wherein a groove is formed on the climbing surface, the groove has a thickness and is used for the square substrate to support. A substrate carrier suitable for square substrates as described in claim 1, wherein the rear end support portion is formed by the rear wall being recessed from the outside into the carrier body to form at least one extension portion, and the rear end support portion is located on the extension portion. A substrate carrier suitable for square substrates as described in claim 1, wherein the door panel has a door body and a front end support portion arranged in the door body, and the front end support portion has at least a plurality of elastic sheets and is used to push against the square substrate. A substrate carrier suitable for square substrates as described in claim 11, wherein the number of the rear end support parts is two, and the front edges of the two rear end support parts are connected to each other by an imaginary line, and the two side support parts extend toward the rear wall to the imaginary line or beyond the imaginary line. A substrate carrier suitable for a square substrate as described in claim 12, wherein the center line of the square substrate is at a lateral position with respect to the elastic sheet on the front end support portion that is 1/6 of the width of the square substrate in any lateral direction, and is at a lateral position with respect to each of the rear end support portions that is 1/6 to 1/3 of the width of the square substrate. As described in claim 11, the substrate carrier suitable for square substrates, wherein the front end support portion further has a vertical frame portion assembled in the door body, and the elastic sheets are arranged at intervals on the vertical frame portion. A substrate carrier suitable for a square substrate as described in any one of claims 11 to 13, wherein each of the elastic sheets is in a lateral "V" shape.