TWM670763U - Wet process device - Google Patents

Abstract

A wet processing device includes a first pipeline connected to an liquid outlet of a pump and having a first valve. A second pipeline has one end connected to a second tank and the other end connected to a liquid inlet of the pump, and the second pipeline has a second valve and a third valve. One end of a third pipeline is connected to the second pipeline between the second valve and the third valve, and a fourth valve is disposed in the third pipeline. One end of at least one of the first pipeline and the third pipeline is connected to the first tank. A fourth pipeline has one end connected to the second pipeline and the other end connected to the first pipeline, and has a fifth valve. The fifth pipeline is connected to the second pipeline and has a sixth valve and a seventh valve.

Description

Wet treatment equipment

The present application relates to a wet processing equipment, and in particular to a wet processing equipment with a variable flow field.

In the manufacturing process of semiconductor wafers, packages, display panels, LEDs and other products, a wafer (substrate) processing system is required to supply processing liquids, such as chemicals or deionized water, to the surface of the substrate for etching, cleaning, photoresist removal and other processing procedures. In the substrate processing system, a wet process equipment must be used to collect, drain, recycle and other subsequent processing of the used process liquid. However, traditional wet process equipment can only provide a single-direction internal circulation, and the pipeline design is complex. It is necessary to purchase multiple equipment to perform processes with different flow field modes. It is also impossible to filter the liquid in the flow circulation, which increases the equipment cost, affects the yield, and causes surface defects and electrical problems.

One purpose of this application is to provide a wet processing equipment which has a simplified pipeline design, can switch between multiple flow field modes, and can continuously filter the liquid in the process.

To achieve the above-mentioned purpose, the present application provides a wet processing equipment with a variable flow field, comprising: a first tank body, comprising at least one first communication port; a second tank body, comprising a second communication port, and the second tank body is located at the side of the first tank body; a pump, comprising a liquid inlet end and a liquid outlet end; a first pipeline, one end of the first pipeline is connected to the liquid outlet end of the pump, and the first pipeline has a first valve; a second pipeline, One end of the second pipeline is connected to the second communication port of the second tank body, and the other end is connected to the liquid inlet end of the pump, and the second pipeline has a second valve and a third valve; a third pipeline, one end of the third pipeline is connected to the second pipeline between the second valve and the third valve, and the third pipeline has a fourth valve, wherein the other end of at least one of the first pipeline and the third pipeline is connected to the at least one first communication port of the first tank body; a fourth pipeline, one end of the fourth pipeline is connected to the second pipeline between the second valve and the second tank body, and the other end is connected to the first pipeline between the first valve and the pump, and the fourth pipeline has a fifth valve; and a fifth pipeline, One end of the fifth pipeline is connected to the second pipeline between the second valve and the third valve, and the other end is connected to the second pipeline between the third valve and the pump, and a sixth valve and a seventh valve are provided in the fifth pipeline.

Preferably, the first tank includes two first communication ports, the end of the first pipeline is connected to one of the two first communication ports, and the end of the second pipeline is connected to the other second communication port.

Preferably, the other end of the first pipeline is connected to the third pipeline between the fourth valve and the first tank.

Preferably, the wet treatment equipment also includes a second extension pipeline and a third extension pipeline, one end of the second extension pipeline is connected to the second pipeline between the second valve component and the third valve component, and one end of the third extension pipeline is connected to the third pipeline between the fourth valve component and the first trough body, wherein the third extension pipeline has an eighth valve component and the second extension pipeline has a ninth valve component.

Preferably, when the second valve, the eighth valve and the ninth valve are opened and the first valve, the third valve, the fourth valve, the fifth valve, the sixth valve and the seventh valve are closed, the wet processing equipment is in the discharge flow field mode.

Preferably, when the first valve, the second valve and the third valve are opened and the fourth valve, the fifth valve, the sixth valve and the seventh valve are closed, the wet treatment equipment is in a first upflow circulation flow field mode; when the first valve, the second valve, the sixth valve and the seventh valve are opened and the third valve, the fourth valve and the fifth valve are closed, the wet treatment equipment is in a second upflow circulation flow field mode.

Preferably, when the third valve, the fourth valve and the fifth valve are opened and the first valve, the second valve, the sixth valve and the seventh valve are closed, the wet treatment equipment is in a first downflow circulation flow field mode; when the fourth valve, the fifth valve, the sixth valve and the seventh valve are opened and the first valve, the second valve and the third valve are closed, the wet treatment equipment is in a second downflow circulation flow field mode.

Preferably, the wet treatment equipment further includes at least one filter, which is disposed in at least one of the second pipeline and the first pipeline.

Preferably, a plurality of the filters are arranged in series.

Preferably, the wet treatment equipment further includes a first parallel pipeline and a plurality of the filters, wherein the plurality of filters are arranged in parallel in the first parallel pipeline.

Preferably, the wet treatment equipment further comprises at least one filter bag device, which is arranged in the fifth pipeline between the sixth valve component and the seventh valve component.

Preferably, a plurality of the filter bag devices are arranged in series.

Preferably, the wet treatment equipment further includes a second parallel pipeline and a plurality of the filter bag devices, wherein the second parallel pipeline is connected to the fifth pipeline, and the plurality of filter bag devices are arranged in parallel in the second parallel pipeline.

Preferably, the wet processing equipment further includes at least one overflow port, which is arranged between the first tank body and the second tank body for liquid to enter and exit.

The wet treatment equipment of the embodiment of the present application can switch between multiple flow field modes such as upflow, downflow, and static to reduce equipment costs and improve the convenience of process switching. The circulation pipeline and the drainage pipeline are shared to reduce the number of pipelines and increase the utilization space. The filtration system is further equipped with an external tank filter element, a filter in the pipeline, and a filter bag equipment to reduce the back-contamination of pollutants and improve the reuse rate of chemicals. It effectively solves the problems that traditional wet process equipment can only provide a single-direction circulation mode, the pipeline design is complex, and it cannot filter liquids, which affects the yield, surface defects, electrical properties, etc.

The following descriptions of the embodiments refer to the attached drawings to illustrate specific embodiments that can be implemented in the present application. Directional terms mentioned in the present application, such as "upper", "lower", "front", "back", "left", "right", "inner", "outer", "side", etc., are only with reference to the directions of the attached drawings. Therefore, the directional terms used are used to explain and understand the present application, but not to limit the present application.

The present application is particularly described with the following examples, which are used for illustration only, because for those skilled in the art, various changes and modifications can be made without departing from the spirit and scope of the present disclosure, so the protection scope of the present disclosure shall be subject to the definition of the attached patent scope. Throughout the specification and the patent scope, unless the content clearly specifies, the meaning of "one" and "the" includes such a description including "one or at least one" of the elements or components. In addition, as used in the present application, unless it is obvious from the specific context that the plural is excluded, the singular article also includes the description of plural elements or components. Moreover, when applied in this description and the entire patent scope below, unless the content clearly specifies, the meaning of "in which" may include "in which" and "on which".

The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by technical personnel in this field without creative labor are within the scope of protection of this application.

The present application provides a wet processing device, in particular, an immersion-type and variable flow field wet processing device, which is suitable for batch processing of substrates or wafers, such as semiconductor front-end processes, semiconductor advanced packaging processes, compound semiconductor processes, optoelectronic processes, etc., related to etching, cleaning, photoresist removal, etc. Refer to Figure 1, which is a cross-sectional schematic diagram of a variable flow field wet processing device 1 of an embodiment of the present application. The wet processing device 1 of the present application includes a first tank body 11, a second tank body 12, a pump 3, a first pipeline 21, a second pipeline 22, a third pipeline 23, a fourth pipeline 24, a fifth pipeline 25, a second extension pipeline 221 and a third extension pipeline 231. As shown in FIG1 , the second tank body 12 is located at the side of the first tank body 11 (inner tank) and is an outer tank surrounding the first tank body 11. The connecting wall between the first tank body 11 and the second tank body 12 has at least one overflow port 101 for liquid to enter and exit. Specifically, the height of the outer side wall of the second tank body 12 is greater than the height of the connecting wall between the first tank body 11 and the second tank body 12 to form the overflow port 101, so that the liquid in the first tank body 11 can flow into the second tank body 12 along the connecting wall when it overflows. In some embodiments, the overflow port 101 can be formed by opening a hole in the connecting wall between the first tank body 11 and the second tank body 12. Specifically, the bottom of the first tank body 11 includes two first communication ports 111 and 112, and the bottom of the second tank body 12 includes a second communication port 121. The pump 3 has a liquid inlet port 301 and a liquid outlet port 302. In some embodiments, a filter element 13 is disposed near the top of the second tank body 12 to filter impurities or fine particles in the liquid in the first tank body 11 and the second tank body 12.

As shown in FIG. 1 , in this embodiment, one end of the first pipeline 21 is connected to the discharge port 302 of the pump 3, and the other end is connected to the first communication port 112 of the first tank 11, and the first pipeline 21 has a first valve 51. One end of the second pipeline 22 is connected to the second communication port 121 of the second tank 12, and the other end is connected to the inlet port 301 of the pump 3, and the second pipeline 22 has a second valve 52 and a third valve 53. One end of the third pipeline 23 is connected to the second pipeline 22 between the second valve 52 and the third valve 53, and the other end is connected to the first communication port 111 of the first tank 11, and the third pipeline 23 has a fourth valve 54. One end of the fourth pipeline 24 is connected to the second pipeline 22 between the second valve 52 and the second tank 12, and the other end is connected to the first pipeline 21 between the first valve 51 and the pump 3, and a fifth valve 55 is provided in the fourth pipeline 24. One end of the fifth pipeline 25 is connected to the second pipeline 22 between the second valve 52 and the third valve 53, and the other end is connected to the second pipeline 22 between the third valve 53 and the pump 3, and a sixth valve 56 and a seventh valve 57 are provided in the fifth pipeline 25.

Continuing to refer to FIG. 1 , one end of the second extension pipeline 221 is connected to the second pipeline 22 between the second valve 52 and the third valve 53, and the second extension pipeline 221 has a ninth valve 59. One end of the third extension pipeline 231 is connected to the third pipeline 23 between the fourth valve 54 and the first tank 11, and the third extension pipeline 231 has an eighth valve 58. The second extension pipeline 221 and the third extension pipeline 231 are respectively connected to external processing equipment (not shown) to discharge the liquid out of the tank without circulating through the wet processing equipment 1. In some embodiments, the second extension pipeline 221 and the second pipeline 22 are the same pipeline, which are used as the drainage pipe of the second tank body 12 (outer tank), and the third extension pipeline 231 and the third pipeline 23 are the same pipeline, which are used as the drainage pipe of the first tank body 11 (inner tank). In other words, the drainage pipeline and circulation pipeline of the first tank body 11 and the second tank body 12 of the present application are shared to reduce the number of pipelines and increase the utilization space.

Refer to Figure 2, which is a cross-sectional schematic diagram of a wet processing equipment 1' of another embodiment of the present application. The difference between the wet processing equipment 1' shown in Figure 2 and the wet processing equipment 1 shown in Figure 1 lies in the different connection relationships between the first pipeline 21 and the third pipeline 23 and the first tank body 11. In some embodiments, one end of at least one of the first pipeline 21 and the third pipeline 23 is connected to the first communication port 111 or 112 of the first tank body 11. Specifically, in the embodiment shown in Figure 2, the end of the first pipeline 21 far from the pump 3 is connected to the third pipeline 23 between the fourth valve 54 and the first tank body 11, that is, the first pipeline 21 is connected to the first communication port 111 or 112 of the first tank body 11 through the third pipeline 23, so that the pipelines are shared, the number of pipelines is reduced, and the utilization space is increased.

As shown in FIG1 , the wet processing equipment 1 of the present application further includes at least one filter 6 and at least one filter bag device 7, which are used to filter the pollution sources, such as impurities or fine particles, in the liquid in the first tank body 11 and the second tank body 12 during the processing of the substrate. In detail, the filter 6 is at least arranged in one of the second pipeline 22 and the first pipeline 21, that is, the filter 6 can be arranged in the liquid inlet direction or the liquid discharge direction of the pump 3 or both sides to enhance the filtering effect. The filter bag device 7 is arranged in the fifth pipeline 25 between the sixth valve 56 and the seventh valve 57.

The wet processing equipment of the embodiment of the present application can switch the flow path of the liquid in the pipeline according to the actual process requirements to achieve the requirements of different flow fields in the same wet processing equipment. Generally speaking, the fluid overflows from the inner tank to the outer tank, which is referred to as the upflow flow field; the fluid flows downward from the outer tank to the inner tank, which is referred to as the downflow flow field; and the fluid is stationary, which is referred to as the stationary flow field. Refer to Figure 3, which is a structural schematic diagram of the wet processing equipment 1 in the first upflow circulation flow field mode, wherein the direction indicated by the arrow in the diagram represents the direction of liquid flow. As shown in FIG3 , when the first valve 51, the second valve 52 and the third valve 53 are opened and the fourth valve 54, the fifth valve 55, the sixth valve 56, the seventh valve 57, the eighth valve 58 and the ninth valve 59 are closed, the wet treatment equipment 1 is in the first upflow circulation flow field mode. Specifically, the liquid 8 in the second tank 12 first flows through the second pipeline 22 and flows into the pump 3 after being filtered by the filter 6, then flows through the first pipeline 21 and enters the first tank 11 and gradually rises, and finally the liquid 8 overflowing the first tank 11 flows into the second tank 12 through the overflow port 101, and then continues the circulation flow of the above path.

Referring to Fig. 4, it is a schematic diagram of the structure of the wet treatment equipment 1 in the second upflow circulation flow field mode. As shown in Fig. 4, when the first valve 51, the second valve 52, the sixth valve 56 and the seventh valve 57 are opened and the third valve 53, the fourth valve 54, the fifth valve 55, the eighth valve 58 and the ninth valve 59 are closed, the wet treatment equipment 1 is in the second upflow circulation flow field mode. In detail, the liquid 8 in the second tank body 12 first flows through the second pipeline 22, then flows through the fifth pipeline 25 and is filtered by the filter bag device 7, then flows through the second pipeline 22 and is filtered by the filter 6 and then flows into the pump 3, and finally flows through the first pipeline 21 and enters the first tank body 11 and gradually rises, and the liquid 8 that subsequently overflows the first tank body 11 flows into the second tank body 12 through the overflow port 101, and then continues the circulation flow of the above path.

Referring to Fig. 5, it is a schematic diagram of the structure of the wet treatment equipment 1 in the first downflow circulation flow field mode. As shown in Fig. 5, when the third valve 53, the fourth valve 54 and the fifth valve 55 are opened and the first valve 51, the second valve 52, the sixth valve 56, the seventh valve 57, the eighth valve 58 and the ninth valve 59 are closed, the wet treatment equipment 1 is in the first downflow circulation flow field mode. In detail, the liquid 8 in the first tank 11 first flows downward through the third pipe 23, then flows through the second pipe 22 and filtered by the filter 6 to flow into the pump 3, then flows through the fourth pipe and enters the second tank 12, and finally the liquid 8 overflowing the second tank 12 flows into the first tank 11 through the overflow port 101, and then continues the circulation flow of the above path.

Referring to Fig. 6, it is a schematic diagram of the structure of the wet treatment equipment 1 in the second downflow circulation flow field mode. As shown in Fig. 6, when the fourth valve 54, the fifth valve 55, the sixth valve 56 and the seventh valve 57 are opened and the first valve 51, the second valve 52, the third valve 53, the eighth valve 58 and the ninth valve 59 are closed, the wet treatment equipment 1 is in the second downflow circulation flow field mode. In detail, the liquid 8 in the first tank body 11 first flows downward through the third pipeline 23, then flows through the second pipeline 22 and is filtered by the filter bag device 7, then flows through the second pipeline 22 and is filtered by the filter 6 and then flows into the pump 3. After being discharged from the pump 3, it flows through the fourth pipeline and then enters the second tank body 12. Subsequently, the liquid 8 overflowing from the second tank body 12 flows into the first tank body 11 through the overflow port 101, and then continues the circulation flow of the above path.

Referring to Fig. 7, it is a schematic diagram of the structure of the wet processing equipment 1 in the static mode. As shown in Fig. 7, when all the first valves 51 to the ninth valves 59 are closed, the liquid 8 will not flow in the pipeline. At this time, the wet processing equipment 1 is in the static mode, waiting for the substrate 9 to be immersed according to the predetermined time before switching to other flow field modes.

Refer to FIG8 , which is a schematic diagram of the structure of the wet treatment equipment 1 in the discharge flow field mode. As shown in FIG8 , when the second valve 52, the eighth valve 58 and the ninth valve 59 are opened and the first valve 51, the third valve 53, the fourth valve 54, the fifth valve 55, the sixth valve 56 and the seventh valve 57 are closed, the wet treatment equipment 1 is in the discharge flow field mode. In detail, the liquid 8 in the first tank body 11 is directly discharged through the third pipeline 23 and the third extension pipeline 231 and enters the external treatment equipment (not shown), and the liquid 8 in the second tank body 12 is directly discharged through the second pipeline 22 and the second extension pipeline 221 and enters the external treatment equipment, and the liquid 8 is discharged through the design shared by the above-mentioned discharge pipeline and the circulation pipeline.

Referring to Figures 9 and 10, Figure 9 is a schematic top view of the wet treatment device 1. As shown in Figure 9, a filter element 13 is disposed at the top of the second tank body 12 (outer tank), and the pore size of the filter element 13 can be selected as required. In some embodiments, as shown in Figure 10, the filter element 13 can be a single-layer or multi-layer arrangement, such as three layers, to preliminarily filter pollutants and impurities with larger filter diameters.

Refer to FIG. 11A and FIG. 11B , which are respectively schematic configuration diagrams of different embodiments of part A of the wet treatment equipment of FIG. 1 . The filter bag device 7 of the present application serves as a mid-stage filter, and the filter bag device 7 contains a filter element, a filter mesh or a filter bag, and the aperture can be replaced as needed. As shown in FIG. 11A , in some embodiments, a plurality of filter bag devices 7 are arranged in parallel in a second parallel pipeline 262 between the sixth valve 56 and the seventh valve 57 , and both ends of the second parallel pipeline 262 are respectively connected to the fifth pipeline 25 . Specifically, a valve is provided in the second parallel pipeline 262 corresponding to each filter bag device 7 to control different flow paths of the liquid 8 in the second parallel pipeline 262 . As shown in FIG. 11B , multiple filter bag devices 7 are arranged in series to enhance the filtering effect. In some embodiments, multiple sets of filter bag devices 7 in series may be configured, and each set of filter bag devices 7 in series may be arranged in parallel with each other. The present application utilizes the filter bag devices 7 in series to enhance the filtering efficiency, and the filter bag devices 7 may also be connected in parallel to switch without stopping the process, clean, and replace the filter element, so as to achieve the purpose of continuously filtering the liquid and ensuring that the liquid is free of impurities.

Refer to FIG. 12A and FIG. 12B, which are respectively schematic diagrams of the configuration of different embodiments of the B part of the wet treatment equipment of FIG. 1. The filter 6 of the present application serves as the final stage filter, and a filter element is disposed in the filter 6, and the pore size of the filter element can be replaced as needed. Referring to FIG. 12A and in conjunction with FIG. 1, in some embodiments, a plurality of filters 6 are disposed in parallel in a first parallel pipeline 261 between the third valve 53 and the pump 3, and the first parallel pipeline 261 is connected to the second pipeline 22. Specifically, a valve is disposed in the first parallel pipeline 261 corresponding to each filter 6 connected in series to control different flow paths of the liquid 8 in the first parallel pipeline 261. As shown in FIG12B , multiple filters 6 are arranged in series to enhance the filtering effect. In some embodiments, as shown in FIG12A , multiple sets of filters 6 in series may be configured, and each set of filters 6 in series may be arranged in parallel with each other. The present application utilizes filters 6 in series to enhance filtering efficiency, and filters 6 may also be connected in parallel to switch without stopping the process, clean, and replace the filter element, so as to achieve the purpose of continuously filtering the liquid and ensuring that the liquid is free of impurities.

In summary, the wet processing equipment of the embodiment of the present application can switch between multiple flow field modes such as upflow, downflow, and static flow to reduce equipment costs and improve the convenience of process switching. The circulation pipeline and the drainage pipeline are shared to reduce the number of pipelines and increase the utilization space. The filtration system is equipped with an external tank filter element, a filter in the pipeline, and a filter bag equipment to reduce the back-contamination of pollutants and improve the reuse rate of chemicals. It effectively solves the problems that traditional wet process equipment can only provide a single-direction circulation mode, the pipeline design is complex, and it cannot filter liquids, which affects the yield, surface defects, electrical properties, etc.

Although the present application has been described above with preferred embodiments, the above preferred embodiments are not intended to limit the present application. A person skilled in the art may make various changes and modifications without departing from the spirit and scope of the present application. Therefore, the scope of protection of the present application shall be based on the scope defined in the claims.

The above is a detailed introduction to the wet processing equipment used in the processing process of wafers and substrates provided by the embodiment of this application. This article uses specific examples to explain the principles and implementation methods of this application. The description of the above embodiments is only used to help understand the method and core ideas of this application. At the same time, for technical personnel in this field, according to the ideas of this application, there will be changes in the specific implementation methods and application scopes. In summary, the content of this specification should not be understood as a limitation on this application.

1, 1': Wet treatment equipment 101: Overflow port 11: First tank 111, 112: First connection port 12: Second tank 121: Second connection port 13: Filter element 21: First pipeline 22: Second pipeline 221: Second extension pipeline 23: Third pipeline 231: Third extension pipeline 24: Fourth pipeline 25: Fifth pipeline 261: First parallel pipeline 262: Second parallel pipeline 3: Pump 301: Liquid inlet end 302: Liquid outlet end 51: First valve 52: Second valve 53: Third valve 54: Fourth valve 55: Fifth valve 56: Sixth valve 57: Valve 7 58: Valve 8 59: Valve 9 6: Filter 7: Filter bag equipment 8: Liquid 9: Substrate

FIG. 1 is a cross-sectional schematic diagram of a wet treatment device with a variable flow field in one embodiment of the present application. FIG. 2 is a cross-sectional schematic diagram of a wet treatment device with a variable flow field in another embodiment of the present application. FIG. 3 is a structural schematic diagram of the wet treatment device of FIG. 1 in a first upflow circulation flow field mode. FIG. 4 is a structural schematic diagram of the wet treatment device of FIG. 1 in a second upflow circulation flow field mode. FIG. 5 is a structural schematic diagram of the wet treatment device of FIG. 1 in a first downflow circulation flow field mode. FIG. 6 is a structural schematic diagram of the wet treatment device of FIG. 1 in a second downflow circulation flow field mode. FIG. 7 is a structural schematic diagram of the wet treatment device of FIG. 1 in a static mode. FIG8 is a schematic diagram of the structure of the wet processing equipment of FIG1 in the discharge flow field mode. FIG9 is a schematic diagram of a top view of a wet processing equipment with a variable flow field of an embodiment of the present application. FIG10 is a schematic diagram of a partial cross-section of the wet processing equipment with a variable flow field of FIG9. FIG11A is a schematic diagram of the configuration of another embodiment of the part A of the wet processing equipment of FIG1. FIG11B is a schematic diagram of the configuration of another embodiment of the part A of the wet processing equipment of FIG1. FIG12A is a schematic diagram of the configuration of another embodiment of the part B of the wet processing equipment of FIG1. FIG12B is a schematic diagram of the configuration of another embodiment of the part B of the wet processing equipment of FIG1.

1: Wet treatment equipment

101: Overflow port

11: First tank

111, 112: First connection port

12: Second tank

121: Second connection port

13: Filter element

21: First pipeline

22: Second pipeline

221: Second extension pipeline

23: The third pipeline

231: The third extension pipeline

24: Fourth pipeline

25: Fifth pipeline

3: Pumping

301: Liquid inlet end

302: Drain port end

51: First valve

52: Second valve

53: The third valve

54: The fourth valve

55: Fifth valve

56: The sixth valve

57: The seventh valve

58: The eighth valve

59: The ninth valve

6: Filter

7: Filter bag equipment

Claims (14)

A wet treatment equipment, comprising: A first tank body, comprising at least one first communication port; A second tank body, comprising a second communication port, and the second tank body is located at the side of the first tank body; A pump, comprising a liquid inlet end and a liquid outlet end; A first pipeline, one end of which is connected to the liquid outlet end of the pump, and the first pipeline has a first valve; A second pipeline, one end of which is connected to the second communication port of the second tank body, and the other end is connected to the liquid inlet end of the pump, and the second pipeline has a second valve and a third valve; A third pipeline, one end of which is connected to the second pipeline between the second valve and the third valve, and the third pipeline has a fourth valve, wherein the other end of at least one of the first pipeline and the third pipeline is connected to the at least one first communication port of the first tank; A fourth pipeline, one end of which is connected to the second pipeline between the second valve and the second tank, the other end of which is connected to the first pipeline between the first valve and the pump, and the fourth pipeline has a fifth valve; and A fifth pipeline, one end of which is connected to the second pipeline between the second valve and the third valve, the other end of which is connected to the second pipeline between the third valve and the pump, and the fifth pipeline has a sixth valve and a seventh valve. A wet processing equipment as described in claim 1, wherein the first tank body includes two first connecting ports, the end of the first pipe is connected to one of the two first connecting ports, and the end of the second pipe is connected to the other second connecting port. A wet processing equipment as described in claim 1, wherein the other end of the first pipeline is connected to the third pipeline between the fourth valve and the first tank. The wet treatment equipment as described in claim 1 also includes a second extension pipeline and a third extension pipeline, one end of the second extension pipeline is connected to the second pipeline between the second valve component and the third valve component, and one end of the third extension pipeline is connected to the third pipeline between the fourth valve component and the first trough body, wherein the third extension pipeline has an eighth valve component and the second extension pipeline has a ninth valve component. A wet processing equipment as described in claim 4, wherein when the second valve, the eighth valve and the ninth valve are opened and the first valve, the third valve, the fourth valve, the fifth valve, the sixth valve and the seventh valve are closed, the wet processing equipment is in a discharge flow field mode. A wet treatment device as described in claim 1, wherein when the first valve, the second valve and the third valve are opened and the fourth valve, the fifth valve, the sixth valve and the seventh valve are closed, the wet treatment device is in a first upflow circulation flow field mode; when the first valve, the second valve, the sixth valve and the seventh valve are opened and the third valve, the fourth valve and the fifth valve are closed, the wet treatment device is in a second upflow circulation flow field mode. A wet processing equipment as described in claim 1, wherein when the third valve, the fourth valve and the fifth valve are opened and the first valve, the second valve, the sixth valve and the seventh valve are closed, the wet processing equipment is in a first downflow circulation flow field mode; when the fourth valve, the fifth valve, the sixth valve and the seventh valve are opened and the first valve, the second valve and the third valve are closed, the wet processing equipment is in a second downflow circulation flow field mode. The wet processing equipment as described in claim 1 further includes at least one filter, which is arranged in at least one of the second pipeline and the first pipeline. A wet processing apparatus as described in claim 8, wherein a plurality of the filters are arranged in series. The wet processing equipment as described in claim 8 further includes a first parallel pipeline and a plurality of the filters, wherein the plurality of filters are arranged in parallel in the first parallel pipeline. The wet processing equipment as described in claim 1 further includes at least one filter bag device, which is arranged in the fifth pipeline between the sixth valve component and the seventh valve component. A wet processing device as described in claim 11, wherein a plurality of the filter bag devices are arranged in series. The wet processing equipment as described in claim 11 also includes a second parallel pipeline and a plurality of the filter bag devices, wherein the second parallel pipeline is connected to the fifth pipeline, and the plurality of filter bag devices are arranged in parallel in the second parallel pipeline. The wet processing equipment as described in claim 1 also includes at least one overflow port, which is arranged between the first tank body and the second tank body for allowing liquid to enter and exit.