TWM668359U - Vacuum valve - Google Patents

Abstract

A vacuum valve comprises: a valve housing (1), the valve housing having a first valve opening (4) and a second valve opening (5), the first valve opening having a first axis (6), the second valve opening having a second axis (7) which is at a certain angle to the first axis (6); and a closing member (10), the closing member being movable between an open position and a closed position parallel to the first axis (6). In the open position of the closing member (10), a through passage extending from the first valve opening (4) to the second valve opening (5) and passing through the vacuum valve is opened. The through-channel has a section formed by a tube (24), which is parallel to the first axis (6) of the first valve opening (4) and extends at least from the area of the valve seat (19) to the area of the intersection (8) between the first axis (6) of the first valve opening (4) and the second axis (7) of the second valve opening (5), wherein the valve housing (1) or the closing member (10) has the tube (24), and the tube (24) is open at a first end facing the first valve opening (4) and is closed at an opposite second end, and has a side opening (26) pointing to the second valve opening (4) in the axial area of the intersection (8) between the first axis (6) and the second axis (7).

Description

Vacuum valve

The utility model relates to a vacuum valve, comprising: a valve housing, the valve housing having a first valve opening and a second valve opening, the first valve opening having a first axis, the second valve opening having a second axis forming a certain angle with the first axis, wherein the first axis and the second axis intersect at an intersection; and a closing member, the closing member being arranged inside the valve housing. The closure member is in a space and is capable of moving between an open position and a closed position parallel to the first axis, and is abutted against a valve seat of the valve housing around the first axis in the closed position, and is lifted from the valve seat in the open position, wherein, in the open position of the closure member, a through passage extending from the first valve opening to the second valve opening and passing through the vacuum valve is opened.

Vacuum valves, in which the first valve opening and the second valve opening of the valve housing are at an angle to each other, in particular at a right angle, and in which the closure element can be moved linearly parallel to one of the axes of the valve openings between an open position and a closed position, are also referred to as angle valves and are known in different embodiments. Angle valves with manual actuators are known from US 2015/0285396 A1, US 2006/016940 A1 and US 6,669,170 B2, and angle valves with pneumatic actuators in the form of piston-cylinder units are known from US 6,289,932 B1, US 2009/0194728 A1, US 5,678,595 A and US 9,851,012 B2.

In vacuum plants using aggressive process gases, for example in the semiconductor industry, there is the problem that the seals of the vacuum valves are damaged relatively quickly, which requires frequent maintenance and corresponding plant downtimes. Measures have therefore been taken to reduce the maintenance costs. In the angle valve known from US 7,527,238 B2, the closure element comprises a plate-shaped main part, which has an elastic sealing ring for sealing against the valve seat in the closed position of the closure element and on the rear side remote from the valve seat, in a recess in the main part. The closure element has a plate-shaped additional part with an elastic additional sealing ring. In the open position of the closure element, the additional sealing ring rests against the sealing surface of the valve housing. The seal for the linear passage of the valve stem carrying the closure element, through which the valve stem protrudes from the interior of the valve housing, is thereby protected from the aggressive process gases used.

In the angle valve known from JP 3210186 U, an additional seal is also arranged on the back of the closing piece, which cooperates with the sealing surface of the valve housing in the open position of the closing piece. On the front side, the closing piece has a sealing surface that cooperates with a sealing ring arranged on the valve seat. The valve seat is arranged on the inner side of the front wall of the valve housing, from which a pipe connector protrudes outwards, which forms one of the valve openings of the vacuum valve. On the inner side of the housing, the front wall has an annular extension, which slightly extends the channel formed by the pipe connector on the inner side of the housing and is surrounded by the valve seat. The closing piece has a recess on its front side facing the valve seat to avoid collision with the annular extension in the closed position. By means of the annular extension, the gas flow entering through the valve opening is guided through the area where the sealing ring is located, so that less aggressive process gas is deposited on the sealing ring. However, this can only achieve limited protection of the sealing ring.

The object of the present utility model is to provide an advantageous vacuum valve of the type mentioned at the beginning, which can be used advantageously in particular when using aggressive process gases. According to the utility model, this is achieved by using a vacuum valve having the features of claim 1.

In the vacuum valve according to the utility model, the passage extending through the valve housing in the open position of the closing member has a section formed by a pipe member parallel to the first axis, preferably coaxially, the valve housing or the closing member is equipped with the section, and the section extends at least from the area of the valve seat to the intersection area between the first and second axes of the first and second valve openings. The pipe member is open at the first end facing the first valve opening and is closed at the opposite second end. The pipe member has a side opening pointing to the second valve opening in the axial area of the intersection between the first axis and the second axis of the first valve opening and the second valve opening.

Due to the design of the utility model, the flow of the corrosive process gas can be effectively guided through the sealing ring. When the vacuum valve is closed, the sealing member is sealed relative to the valve seat through the sealing ring, so that as little process gas as possible contacts the sealing ring.

In a first possible embodiment of the utility model, the valve housing has a pipe piece, wherein the pipe piece is arranged with its first end on the inner side of the housing front wall of the closing piece (= housing inner side) or is constructed integrally with the housing front wall. Therefore, the pipe piece extends from the housing front wall into the inner space of the valve housing. The closing piece is designed to be cup-shaped and surrounds the pipe piece in the closed position, in which the closing piece rests on the valve seat. Therefore, in the closed position of the closing piece, the pipe piece is accommodated by the inner space of the cup-shaped closing piece. The valve seat is advantageously arranged on the inner side of the housing front wall and surrounds the pipe piece in the region of the first end of the pipe piece.

In a second possible embodiment of the utility model, the closure has a pipe, wherein the pipe is placed on the base part of the closure with its second end, or is integrally constructed therewith, and is closed by the base part of the closure at its second end. The first end of the pipe extends into the passage of the pipe joint extending from the first valve opening through the valve housing, more precisely, a smaller distance in the open position of the closure than in the closed position. The valve seat is advantageously arranged on the inner side of the front wall of the valve housing and surrounds the pipe. Except for the necessary gap, the outer diameter of the pipe is advantageously equal to the inner diameter of the pipe joint, so as to form a sliding guide for the pipe in the pipe joint. Therefore, the outer diameter of the pipe is slightly smaller than the inner diameter of the pipe joint, preferably less than 1 mm.

The elastic sealing ring is preferably arranged on the valve seat, and in the closed position, the closure member is sealed relative to the valve seat by the elastic sealing ring. However, it is also conceivable and feasible to arrange it on the closure member, as will be explained in more detail in the description of the drawings.

A preferred embodiment of the utility model provides that an elastic additional sealing ring is arranged on the back side of the closing element facing away from the first valve opening, and in the open position of the closing element, the additional sealing ring presses against the sealing surface of the valve housing. In this way, a seal can be achieved to prevent aggressive process gases from penetrating into the area of the sliding through-portion of the valve stem, and the closing element is carried by the valve stem.

A first embodiment of a vacuum valve according to the utility model is shown in FIGS. 1 to 6 . The vacuum valve has a valve housing 1 with a first pipe connector 2 and a second pipe connector 3. The pipe connectors 2, 3 are used to connect the vacuum valve to other components of a vacuum device. For example, the second pipe connector 3 can be connected to a vacuum chamber in a vacuum-tight manner, and a supply line for a process gas can be connected to the first pipe connector 2. The free end of the first pipe connector 2 has a first valve opening 4, and the free end of the second pipe connector 3 has a second valve opening 5. The vacuum valve is designed as an angle valve, and the first axis 6 of the first valve opening 4 is perpendicular to the second axis 7 of the second valve opening 5. Other angles, in particular in the range from 45° to 135°, are conceivable and feasible, but less preferred.

The first axis 6 of the first valve opening 4 is also the longitudinal center axis of the first pipe joint 2, and the second axis 7 of the second valve opening is also the longitudinal center axis of the second pipe joint 3. The pipe joints 2, 3 both have a connecting pipe protruding from the corresponding housing wall and a connecting flange arranged at the free end of the corresponding connecting pipe.

The first axis 6 and the second axis 7 intersect at an intersection 8 .

The valve housing 1 has an inner space 9. A closing element 10 is arranged in this inner space. The closing element 10 can be moved linearly and parallel to the first axis 6 between an open position (FIG. 5), in which the vacuum valve is open, and a closed position (FIG. 6), in which the vacuum valve is closed. The closing element 10 is carried by a valve stem 11. The first axis 6 forms the longitudinal center axis of the valve stem 11, so that the valve stem 11 is coaxial with the first valve opening 4. The valve stem 11 extends from the inner space 9 of the vacuum valve through a sliding through-hole, that is, the valve stem 11 can be moved relative to the valve housing 1 parallel to the first axis 6, wherein the valve stem is sealed relative to the valve housing 1. In this embodiment, annular elastic seals 12, 13, 14 are used to seal the valve stem 11 relative to the valve housing 1. These seals are arranged in annular grooves, which surround an opening in the valve housing 1, through which the valve stem 11 extends. As is known, sealing by means of a bellows, in particular a folded bellows, is also possible.

In this embodiment, the valve rod 11 is at the same time the piston rod of a pneumatic piston-cylinder unit 15 which forms the actuator of the vacuum valve.

Between the seal 12 closest to the interior 9 and the seal 13 adjacent thereto, an annular space 17 is provided, which is ventilated via the bore 16 and surrounds the valve stem 11, the annular space being formed by a groove in the wall of a bore through the valve housing 1, which bore is penetrated by the valve stem 11. The seal 12 is thereby protected from excessive pressure from the piston-cylinder unit 15, which could overcome the seals 13, 14. The annular space 17 can also be sucked through the bore 16.

In this embodiment, the piston-cylinder unit 15 has a double-acting piston. As known, a single-acting piston can also be provided in combination with a spring acting in another direction, in particular in the closing direction.

Other types of drives or manual controls may also be provided.

In the closed position of the closing member 10, the sealing surface 18 of the closing member 10 presses against the elastic sealing ring 20 arranged on the valve seat 19. The valve seat 19 surrounds the first axis 6. In particular, the valve seat 19 is arranged on the inner side of the front wall 21 of the valve housing. The first pipe connection 2 is located on the outer side of the front wall 21.

In this embodiment, the front wall 21 of the valve housing 1 is connected to the side walls of the valve housing in a vacuum-tight manner via a threaded connection and an annular seal 22 located therebetween. The second pipe connection 3 is arranged on one of these side walls.

In this embodiment, the side wall of the valve housing 1 is integrally formed with the rear wall 23 of the valve housing. The rear wall 23 can also be formed by a separate component and connected to the side wall of the valve housing in a vacuum-tight manner via a seal and a threaded connection. In particular, in this case, the front wall 21 can also be integrally formed with the side wall of the valve housing.

In this embodiment, valve housing 1 is configured as a cuboid substantially. On the contrary, it can be configured, for example, substantially cylindrically, with a side wall in the shape of a cylindrical jacket.

On the inner side of the front wall 21 of the valve housing 1 (= on the side defining the inner space 9 of the valve housing), a pipe piece 24 is arranged. The first axis 6 of the first valve opening 4 is the longitudinal center axis of the pipe piece 24, i.e., as preferred, the pipe piece 24 is coaxial with the first valve opening 4. The channel formed by the pipe piece 24 preferably continues the channel formed by the first pipe connection 2 continuously.

The figures show an integral design of the unit formed by the front wall 21, the first pipe connection 2 and the pipe piece 24. Conversely, the unit can also be designed in multiple parts, wherein two or more parts can be connected to one another, in particular by welding. Thus, for example, the first pipe connection 2 and the pipe piece 24 can be integrally constructed and welded into an opening in the housing front wall 21.

Thus, the pipe 24 is placed with a first end on the front wall 21 on the inside of the housing, or is integrally formed with the front wall 21. The pipe 24 is closed at its opposite second end by a cover 25, which is integrally formed with the pipe 24, for example.

With respect to the direction of the first axis 6, the pipe 24 has a side opening 26 in the axial region of the intersection 8 between the first axis 6 and the second axis 7. The side opening is formed by a window recess in the wall around the longitudinal axis of the pipe 24. The side opening 26 points to the second valve opening 5. The axis of the side opening 26 is preferably coaxial with the second axis 7. A certain offset between the two axes is also conceivable and feasible.

The valve seat 19 surrounds the pipe 24 in the region of the first end of the pipe, in which region the pipe protrudes from the front wall 21 of the valve housing 1. The pipe 24 thus projects from the front wall 21 into the interior 9 of the valve housing 1 and here extends in the axial direction with respect to the first axis 6 at least from the region of the valve seat 19 to the region of the intersection 8 between the first axis 6 and the second axis 7.

With respect to the direction of the first axis 6 , the sealing ring 20 is spaced apart from the side opening 26 , preferably by at least one quarter of the diameter of the side opening 26 with respect to the direction of the first axis 6 .

The closure 10 is cup-shaped and has in this embodiment a disc-shaped base portion 27 from which a wall 28, annular in cross section, projects toward the valve seat 19. At the end opposite the base portion 27, the sealing surface 18 is arranged on the end face of the wall 28, which sealing surface is thus annular in configuration.

In the closed position of the closure member, the closure member 10 surrounds the tube member 24, in which the closure member 10 rests with the sealing surface 18 on the sealing ring 20. That is, the tube member 24 is located in the inner space of the cup-shaped closure member 10 in the closed position of the closure member 10.

In the open position of the closure, the closure is pulled away from the tube 24 at least to such an extent that the side opening 26 of the tube 24 is unobstructed.

In the open position of the closure element 10, a through-channel extends through the valve housing 1, which extends from the first valve opening 4 to the second valve opening 5. A first section of the through-channel extends from the first valve opening 4 through the channel formed by the first pipe connection 2. The next section, starting from its open first end, extends through the pipe 24 to its side opening 26. Starting from the side opening 26, the through-channel extends through the region of the interior of the valve housing 1, which is located between the side opening 26 and the channel formed by the pipe connection 3. Furthermore, the through-channel extends through the channel formed by the second pipe connection 3 to the second valve opening 5.

When the closing member 10 is in the closed state, the through passage is sealed by the closing member 10 in a vacuum-tight manner.

In the embodiment shown, the diameter of the side opening 26 of the pipe 24 is smaller than the diameter of the through-channel, which has this diameter in the section from the second valve opening to the inlet portion into the inner space of the valve housing. Therefore, if the process gas is allowed to flow in through the first valve opening 4 and the second valve opening 5 is connected to the inner space of the vacuum chamber under vacuum, the gas flow flows directly from the side opening 26 of the pipe 24 into the channel of the second pipe connector 3 for the most part, that is, the gas flow basically flows only through the area of the inner space 9 of the valve housing 1, which is directly between the side opening 26 and the inlet portion of the second pipe connector 3, and enters the inner space of the valve housing. Therefore, the sealing ring 20 disposed on the valve seat 19 is hardly in contact with the process gas.

It is also conceivable and feasible for the diameter of the side opening to be greater than the diameter of the through-channel, which has this diameter in the section from the second valve opening to the inlet into the interior of the valve housing. The supply of process gas is then preferably carried out via the second valve opening, and the first valve opening is then connected to the interior of the vacuum chamber, to which process gas is to be supplied.

In a variation of the first embodiment, it is also conceivable and feasible to arrange the sealing ring 20 on the closure member 10, in particular on the end face of the annular wall 28 facing the valve seat 19. The valve seat 19 will then have a sealing surface. In this case, the closure member 10 will be further retracted in the open position than shown in FIG. 5, to be precise, to such an extent that the sealing ring 20 is axially spaced apart from the side opening 26 in the axial direction with respect to the first axis 6, preferably at least by a quarter of the diameter of the side opening 26.

On the back of the closure 10 facing away from the first valve opening 4, an elastic additional sealing ring 29 is arranged, which surrounds the first axis 6. In the open position of the closure, it bears against a sealing surface 30 of the valve housing 1. The sealing surface 30 is arranged on the inside of the rear wall 23 of the valve housing and surrounds an opening in the rear wall 23 through which the valve stem 11 protrudes from the interior 9 of the valve housing 1. In the open position of the closure 10, the seal 12 is protected from process gas residues which could otherwise penetrate into this area.

A second embodiment of the utility model is explained below with reference to Fig. 7 and Fig. 8. Except for the difference described below, the design corresponds to that of the first embodiment, and the description of the first embodiment in this respect can also be used for the second embodiment.

The second embodiment differs from the first embodiment mainly in that, in the second embodiment, the closure 10 is equipped with a tube 24 having a side opening 26. The tube 24 is thus arranged with its second end on a base part 27 of the closure 10 or (as shown) is integrally formed therewith and is closed at its second end by the base part 27 of the closure. The tube 24, coaxial with the first axis 6, projects with its first end into the passage extending from the first valve opening 4 through the first pipe connection 2, specifically a shorter distance in the open position of the closure (FIG. 7) than in the closed position of the closure (FIG. 8). The outer diameter of the tube 24 is preferably only slightly smaller than the inner diameter of the passage, preferably less than 1 mm. That is, the outer diameter of the pipe member 24 is equal to the inner diameter of the pipe joint 2 except for the gap for forming a sliding guide between the pipe member 24 and the first pipe joint 2.

As shown in the figure, the sealing ring 20 can be advantageously arranged on the valve seat 19, and the sealing surface 18 is arranged on the closing member 10, more precisely, on the base part 27 of the closing member 10 (on the side facing the valve seat 19), wherein the sealing surface 18 surrounds the second end of the pipe member 24.

The front wall 21 of the valve housing 1 is constructed integrally with the side walls, and the rear wall 23 of the valve housing is connected to the side walls in a sealing manner (for the sake of simplicity, the seals and connecting screws located therebetween are not shown). However, similar to the first embodiment, it is also possible to provide for a sealed threaded connection of the front wall 21 constructed separately from the side walls, and the rear wall 23 can be constructed integrally with the side walls.

The passage from the second valve opening 5 through the second pipe connection 3 has a smaller diameter here than the diameter of the side opening 26 in the pipe piece 24, at least in its end section which opens into the interior space 9 of the valve housing. The side opening 26 in turn points to the second valve opening 5, wherein its axis is slightly offset here in the open position relative to the second axis 7 of the second valve opening 5 (it is closer to the first valve opening 4), see FIG. 7. However, in the open position of the closure, the axis of the side opening 26 can also be coaxial with the second axis 7 again.

In the open position of the closure element 10, a through-channel is formed again through the valve housing. Starting from the second valve opening 5, the through-channel extends through the channel formed by the second pipe connection 3 and further through the region of the inner space 9 of the valve housing, which region is located between the inlet of the channel on the inner side of the housing and the side opening 26. Another section of the through-channel extends through the pipe 24, to be precise, from the side opening 26 to the open first end of the pipe. Furthermore, the through-channel extends through the channel formed by the first pipe connection 2 as far as the first valve opening 4.

The sealing ring 20 arranged on the valve seat 19 is spaced apart from the side opening 26 on the pipe member 24 in the open position of the closure member 10 in the direction of the first axis 6. This axial spacing is designed relatively small according to Figure 7, but can also be selected to be larger if this seems appropriate.

If the process gas is allowed to flow in through the second valve opening 5, wherein the vacuum valve is connected to the inner space of the vacuum chamber under vacuum through the first valve opening 4, then most of the process gas will directly enter the pipe fitting 24 from the inner inlet portion of the channel extending through the second pipe joint 3 through the area of the inner space 9 of the valve housing 1 directly between the inlet portion and the side opening 26, wherein only a small part of the process gas will enter another area of the inner space 9 of the valve housing 1 and thereby reach the sealing ring 20 arranged on the valve seat 19.

In this embodiment, the sealing ring 20 can also be arranged on the closure element 10 instead of on the valve seat 19, wherein the sealing ring will surround the second end of the pipe 24. The valve seat 19 will then have a sealing surface cooperating with the sealing ring 20. The sealing ring 20 will here be arranged axially spaced apart from the side opening 26 with respect to the first axis 6. For this purpose, the side opening 26 can be arranged in the pipe 24 further away from the second end of the pipe.

In this second embodiment of the utility model, similarly to that shown in the first embodiment, the diameter of the side opening 26 can be designed to be smaller than the diameter of the section of the through-channel extending from the second valve opening to the entrance portion into the inner space 9 of the valve housing 1. In this case, the process gas can be advantageously supplied via the first valve opening 4, and the vacuum valve can communicate with the inner space of the vacuum chamber using its second valve opening 5.

In both the first and second embodiments described, the second pipe connector 3 can be omitted. Therefore, the second valve opening will be directly arranged on the corresponding side wall of the valve housing 1, and the valve housing 1 can be directly connected to another part of the vacuum device using this side wall.

In the first embodiment described, the first pipe connection 2 can be omitted and the first valve opening 4 can then be arranged directly on the front wall 21 of the valve housing 1 and another part of the vacuum device can be directly connected to the front wall 21 of the valve housing in a vacuum-tight manner.

1: Valve housing 2: First pipe joint 3: Second pipe joint 4: First valve opening 5: Second valve opening 6: First axis 7: Second axis 8: Intersection 9: Inner space 10: Closing piece 11: Valve stem 12: Seal 13: Seal 14: Seal 15: Piston-cylinder unit 16: Hole 17: Annular space 18: Sealing surface 19: Valve seat 20: Sealing ring 21: Front wall 22: Seal 23: Rear wall 24: Pipe fitting 25: Cover 26: Side opening 27: Base part 28: Wall 29: Additional sealing ring 30: Sealing surface

The following is an explanation of the further advantages and details of the utility model with reference to the attached drawings. Among them:

FIG. 1 is an oblique view of a vacuum valve according to an embodiment of the utility model;

[FIG. 2] shows the vacuum valve of FIG. 1 in a partially exploded state;

FIG. 3 is an oblique view of the front wall of the housing, viewed from a different viewing direction than FIG. 1 and FIG. 2 , with the front wall of the housing having pipe joints and pipe fittings disposed thereon;

[Figure 4] is a back view of the vacuum valve;

[Fig. 5] shows a cross-sectional view along the line A-A in Fig. 4 in the open position of the closure member;

[Fig. 6] shows a cross-sectional view along the line A-A in Fig. 4 in the closed position of the closure member;

[Fig. 7] and [Fig. 8] are cross-sectional views of the front portion of the vacuum valve in the open position and the closed position of the closure member of the second embodiment of the utility model similar to Fig. 5 and Fig. 6 (the rear portion of the valve housing and the actuator are not shown for simplicity).

2: First pipe joint

3: Second pipe joint

4: First valve opening

5: Second valve opening

6: First axis

7: Second axis

8: Intersection point

9: Internal space

10: Closed piece

11: Valve lever

12: Seals

13: Seals

14: Seals

15: Piston-cylinder unit

16: Hole

17: Ring Space

18: Sealing surface

19: Valve seat

20: Sealing ring

21: Anterior wall

22: Seals

23: Back wall

24: Pipe fittings

25: Lid

26: Side opening

27: Base part

28: Wall

29: Additional seals

Claims (10)

A vacuum valve, comprising: - a valve housing (1), the valve housing having a first valve opening (4) and a second valve opening (5), the first valve opening having a first axis (6), the second valve opening having a second axis (7) which is at a certain angle to the first axis (6), wherein the first axis (6) and the second axis (7) intersect at an intersection (8); and - a closing member (10), which is arranged in the inner space (9) of the valve housing (1) and is movable parallel to the first axis (6) between an open position and a closed position, and in the closed position abuts against a valve seat (19) of the valve housing (1) around the first axis (6), and in the open position is lifted from the valve seat (19), wherein, in the open position of the closing member (10), a through passage extending from the first valve opening (4) to the second valve opening (5) through the vacuum valve is opened, It is characterized in that the through-channel extending through the valve housing (1) in the open position of the closing member (10) has a section formed by a pipe (24) which is parallel to the first axis (6) and extends in the axial direction of the first axis (6) at least from the area of the valve seat (19) to the area of the intersection (8) between the first axis (6) and the second axis (7), The valve housing (1) or the closing member (10) has the pipe member (24), and the pipe member (24) is open at a first end facing the first valve opening (4) and is closed at an opposite second end, and has a side opening (26) pointing to the second valve opening (5) in an axial region of the intersection (8) between the first axis (6) and the second axis (7). The vacuum valve according to claim 1 is characterized in that the tube (24) is placed with its first end on the front wall (21) of the valve housing (1), or is constructed integrally with the front wall (21) and protrudes from the front wall (21) into the internal space (9) of the valve housing (1), and the closing member (10) is constructed in a cup shape and surrounds the tube (24) in the closed position. The vacuum valve according to claim 2 is characterized in that the valve seat (19) is arranged on the inner side of the front wall (21) of the valve housing (1) and surrounds the first end of the pipe (24). The vacuum valve according to claim 1 is characterized in that the pipe member (24) is placed on the base portion (27) of the closing member (10) with its second end, or is constructed integrally with the base portion (27) of the closing member (10), and is closed by the base portion (27) of the closing member (10) at the second end, and protrudes with its first end into the channel of the pipe joint (2) extending from the first valve opening (4) through the valve housing (1). The vacuum valve according to claim 4 is characterized in that the outer diameter of the pipe (24) is less than 1 mm smaller than the inner diameter of the channel. The vacuum valve according to any one of claims 1 to 5 is characterized in that a resilient sealing ring (20) is arranged on the valve seat (19), and the closing member (10) is sealed relative to the valve seat (19) by the sealing ring in the closed position. The vacuum valve according to any one of claims 1 to 5 is characterized in that an elastic additional sealing ring (29) is arranged on the back side of the closing member (10) facing away from the first valve opening (4), and the additional sealing ring is in contact with the sealing surface of the valve housing (1) when the closing member (10) is in the open position. The vacuum valve according to any one of claims 1 to 5 is characterized in that the closing member (10) is carried by a valve stem (11), which extends parallel to the first axis (6) of the first valve opening (4) and protrudes from the internal space (9) of the valve housing (1) in a vacuum-tight and axially movable manner. The vacuum valve according to any one of claims 1 to 5 is characterized in that the diameter of the section of the through passage passing through the valve housing (1) in the open position of the closing member (10) is greater than the diameter of the side opening (26) of the pipe member (24), and the section extends from the second valve opening (5) to the entrance portion into the internal space (9) of the valve housing (1). The vacuum valve according to claim 9 is characterized in that the diameter of the section of the through-channel formed through the valve housing (1) in the open position of the closing member (10) is smaller than the diameter of the side opening (26) of the pipe (24) at least in the area of the inlet portion entering the internal space (9) of the valve housing (1).

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