M302117 八、新型說明： '【新型所屬之技術領域】 本創作係有關於一種探針工作台裝置，尤指一種利用利用複 數個LED當成光源之探針工作台裝置。 【先前技術】 • 按，目前之半導體及LCD等產業由於製程越作越精密，因 - 此需要大量之檢測工作以確保成品之品質，於其中一種檢測方式 ^為將一待測物3 a放置於一探針工作台1 a上，請參考圖一，利 .用該探針工作台1 a之光源穿透該探測物3 a，以提供探測器2 a足夠之背光光源。然，目前之探針工作台1 a係利用複數個日 光燈4 a當作光源，由於該等日光燈4 a採取交流電源會因此會 產生電磁干擾，於檢測時不但影響其測量品質而因此無法測量微 小訊號，且由於本身光源之限制其波長較短、穿透率不佳，因此 會造成檢測時背光光源不足之問題。按，一般之日光燈亮度調整 幅度不大，無法針對目前待測物之性質及檢測之方法作一精確調 整。更者，日光燈之壽命短，更換時需將蓋覆之玻璃板5 a用手 ⑩搬離才能與以更換，造成使用上之不便。因日光燈管屬玻璃材質 因本身熱度問題兩燈管間無法靠太近，以造成光源之均勻度不 ' 足，且日光燈使用一段時間後燈管兩侧之光源會減弱，且兩端之 r光源不穩定，對於現今半導體製程日趨精密，品質之要求越來越 高，以日光燈當作光源實不符合現今所需。 是以，由上可知，上述習知之探針工作台1 a，在實際生產 及使用上，顯然具有不便與缺失存在，而可待加以改善者。 【新型内容】 5 M302117 土了達成上述之目的，本創作係提供 其包括複數個發光模組及至少一個 =針工作台裝置， 面方式排列，其中每一, 〜箏發光模組係以平 一鍺Η 表先杈組係包括複數個 〜片、—電路基板。複數個LED裝置於 D、一基板、 置於趙板下，該電路基板裝置於該籍片下該錯片ί 係设置於該等發光模組之上。 〜至>、—個擴散板 uhbD採取直流電源，因此不會 創作採用自光LED，其波長較長、=干擾問題、 路’可大幅提昇檢測品質。且由 二生較強使探針易牙 睛均地分佈於整個工作平台上，不以，狀之優‘ =本創作另提供-模組化設計，如^材質义 貝損壞之發光模組以達到快逮“之： 上加I-定位:觸工作台裝置，於探 快速地將待制：其彻疋位減少使檢剩之誤差，〆稼 、、寺成I物移動至檢測區並於檢測後 、’ 術、^了能更進一步暸解本創作為達成預定日預定位置厶技 ，太段及功效’請參閱以下有關本創作之:羊έ丄的所採孓，相 乍之目的、特徵與特點，當可由二二:？與附二# ^而所附_提供參考與說明用，並非‘ 口乙β D採取直流電源，因此不會產 路4?光L E D，其波長較長、穿透::二= 路，可大幅提昇檢測品質。 旱乂知使掩針易 緊密平均地分佈於整個工作平台上，4=粒狀之優f:, ^ e d之亮度容易精確調整，可更適合：π一 。本創作另提供—模組化設計，如探針卫作;^同材質1 p 1，即可插換損壞之發光模組以達到俠读二上之某一h 夜 【貫施方式】 由圖中可知7 1，至少/ ，该 探針工，乐一貫施例’凊芩考第二至五圖。 散板2。D衣置1係包括有：複數個發光模組1 6 M302117 該等發光模組1i係以平面方式排列及矩陣方式排列， 甘1 4 y月材貝’裝置於該等發光模組11上方。 ^ ：；母—發先模組11，係包括有複數個LED 12、-基 板13、、一鰭片14、一電路美拓土 片丄^ L E D 1 2係係發出料錢置於該基板！ 3上，料 片3下方，該電路基板 該二 j ^下方亚電性連接該等L ED丄2 ’該電路基板i 5二 「刷包路板其上並印有控制電路。 '、、 中-模2右光t組11其中之一發生故障，僅需抽換該其 T杈、、且而達到迅速修復之功能。 钏而以士护甘处丸 v寻風扇3仏t置於該等發光模組；[丄之 發光模：Γι 能’其中每一風扇3可個別地與其中每-該 板2，、以:二—組。該等支柱2 1支撐該至少一個擴散 離。帅制^個擴散板2與該等發光模組1 1保持-段距 °亥‘制衣置係調整該等L ED 1 2之亮度。 於另一實施例中，該發光模組lfb包" ►數個LED 1 2，兮耸τ pn ] 〇 基板1 3及稷 上。該其板1 2係裝置於該基板1 3上表面 ‘之控料路為—印刷電路板其背面係'印有該等led 12 其包括-X軸控^件（圖未示）。該定位裝置8 該滑桿8 牛8 1，一 ¥軸定位件8 2及一滑桿8 3， = 模組11之-侧，以軸定位件8 該1軸定位件81=山3’該^由定位件82之一端滑接於 丄，另一^可吸附一待測物6，如此藉由該控制 7 M302117 το件拴制忒疋位裝置8將待測物6由起始位置 ，，則物6，並移往一不影響檢測進行之預定位 / =畢後自4預^立置移動至該待測物6，並吸起該待測物6 亚放回該待測物6之起始位置或另一預定位置。 於另 、，貝靶例中該滑桿8 3個別地設置於該等發光模組工 :A 側/亥X車由定位* 8 1之兩端個別地滑接於該滑桿 ，以控制元件之功能整合於該控制裝置中。 逵述，本創作之探針工作台裝置1係利用複數個led 及精4地調整亮度之功能，並藉由模組化之方式辦 更進—步藉由控制元件可精確地將待測物移至指 待測地點，並於檢測完後移至一預定地點。 乂上所述，僅為本創作最佳之一二 :與==作之特徵並不侷限於此， a乜飾自可涵盍在以下本案之專利範圍。 f—圖係本創作習知探針玉作台之示意圖； 圖係本創作發光模組之立體圖； f—圖“本創作發光模組之分解圖； =係本創作探針工作台裝置卡之分解圖； ==作探針工作台裝置卡之立體圖；以及 本創_針工作台裝置卡之組裝圖。 8 M302117 【主要元件符號說明】 [習知] 探針工作台 1 a 探測器 2 a 探測物 3 3 曰光燈 4 a 玻璃板 5 a [本創作] 探針工作台裝置 1 發光模組 11 LED 基板 鰭片 電路基板 擴散板 2 支柱 風扇 3 待測物 6 定位裝置 8 X轴定位件 γ軸定位件 滑桿M302117 VIII. New description: '[New technical field] This creation is about a probe table device, especially a probe table device that utilizes multiple LEDs as a light source. [Prior Art] • According to the current semiconductor and LCD industries, the process is becoming more and more precise, because it requires a large amount of testing to ensure the quality of the finished product. One of the detection methods is to place a test object 3 a. On a probe table 1 a, please refer to FIG. 1. The light source of the probe table 1 a penetrates the probe 3 a to provide a sufficient backlight source for the detector 2 a. However, the current probe table 1 a uses a plurality of fluorescent lamps 4 a as a light source. Since the fluorescent lamps 4 a take AC power, electromagnetic interference is generated, which not only affects the measurement quality but also cannot be measured. The signal, due to its own light source, has a short wavelength and poor transmittance, which causes a problem of insufficient backlight source during detection. According to the general adjustment, the brightness of the fluorescent lamp is not large enough to make a precise adjustment to the nature of the current object to be tested and the method of detection. Moreover, the life of the fluorescent lamp is short, and it is necessary to remove the covered glass plate 5 a by hand 10 to replace it, so that the use is inconvenient. Because the fluorescent tube is made of glass due to its own thermal problem, the two lamps cannot be too close together, so that the uniformity of the light source is not sufficient, and the light source on both sides of the tube will be weakened after the fluorescent lamp is used for a period of time, and the r light source at both ends is weakened. Unstable, the current semiconductor manufacturing process is becoming more and more sophisticated, and the quality requirements are getting higher and higher. The use of fluorescent lamps as a light source does not meet the needs of today. Therefore, it can be seen from the above that the above-mentioned conventional probe table 1 a is obviously inconvenient and missing in actual production and use, and can be improved. [New Content] 5 M302117 In order to achieve the above objectives, the creation department provides a plurality of light-emitting modules and at least one needle-spinning table device arranged in a plane manner, wherein each of the x-ray lighting modules is flat. Η The table is composed of a plurality of pieces, a circuit board. A plurality of LED devices are disposed on the D, a substrate, and placed under the Zhao board, and the circuit substrate device is disposed on the light-emitting module under the tablet. ~~>, a diffuser uhbD uses a DC power supply, so it does not create a self-illuminating LED. Its long wavelength, = interference problem, and road can greatly improve the quality of detection. And the two students are stronger, so that the probes are easily distributed on the whole working platform, and the shape is excellent. '=This creation is also provided--modular design, such as the material module To achieve fast catching:: Adding I-positioning: Touching the workbench device, the probe will quickly be prepared: its full position is reduced to make the error of the remaining, and the crops and temples move to the detection area and After the test, 'surgery, ^ can further understand the purpose of this creation to achieve the predetermined date of the scheduled position, too segment and efficacy' Please refer to the following about this creation: the selection of the sheep, the purpose, characteristics With the characteristics, when the two can be: two and two with attached ^ ^ and attached _ provide reference and description, not 'mouth B β D to take DC power, so will not produce road 4? light LED, its wavelength is longer, wear Through:: 2 = road, can greatly improve the quality of detection. Drought and drought know that the needle is easy to be evenly distributed on the entire working platform, 4 = granular excellent f:, ^ ed brightness is easy to adjust accurately, can be more suitable : π一. This creation is also provided - modular design, such as probe security; ^ with the material 1 p 1, can be inserted The damaged light-emitting module is to achieve a certain h night of the second reading of the man's reading. According to the figure, at least 7, the probe worker, Le consistently apply 'the second to fifth pictures. Dispersion plate 2. D clothing set 1 series includes: a plurality of light-emitting modules 1 6 M302117 The light-emitting modules 1i are arranged in a planar manner and arranged in a matrix manner, and the light-emitting modules are arranged in the light-emitting mode. Above the group 11. ^ :; mother - the first module 11, including a plurality of LEDs 12, - substrate 13, a fin 14, a circuit of the United States Tuo 丄 ^ LED 1 2 system issued by the money On the substrate 3, under the chip 3, the circuit substrate is electrically connected to the L ED 丄 2 '. The circuit board i 5 2 is printed on the circuit board and printed with a control circuit. ',, medium-mode 2 right light t group 11 one of the failures, only need to replace the T杈, and achieve the function of rapid repair. 钏 以 士 士 甘 甘 丸 丸 v v Placed in the light-emitting modules; [丄光光模:Γι能' each of the fans 3 can be individually associated with each of the plates 2, with: two-group. The pillars 2 1 support At least one of the diffusion plates 2 and the light-emitting modules 1 1 are held at a distance from the illumination system 1 to adjust the brightness of the L ED 1 2. In another embodiment, the illumination The module lfb package " ► several LEDs 1 2, τ pn 〇 〇 〇 〇 〇 〇 〇 〇 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The back side of the system is printed with the LED 12, which includes an -X axis control member (not shown). The positioning device 8 has the slider 8 8 , a shaft locator 8 2 and a slider 8 3 . = the side of the module 11 to the shaft positioning member 8 The one-axis positioning member 81 = the mountain 3' is rotated by one end of the positioning member 82 to the crucible, and the other is capable of adsorbing a sample to be tested 6, thus by The control 7 M302117 τ 拴 忒疋 忒疋 忒疋 8 8 将 将 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待 待Up to the object to be tested 6, and sucking up the object to be tested 6 and returning it to the initial position of the object to be tested 6 or another predetermined position. In the other, in the shell example, the sliders 8 3 are separately disposed on the lighting module: the A side/the X-car is individually slidably connected to the slider by the two ends of the positioning * 8 1 to control the components. The function is integrated in the control device. As described above, the probe workbench device 1 of the present invention utilizes a plurality of functions of adjusting the brightness of a plurality of LEDs and fines, and further improves the method by modularizing the steps to accurately measure the object to be tested. Move to the location to be tested and move to a predetermined location after the test. As mentioned above, only one of the best ones of this creation: the characteristics of the == is not limited to this, a 乜 乜 can be covered in the following patent scope of this case. F-图图 This is a schematic diagram of the probe known as the jade table; the picture is the perspective view of the creation of the light-emitting module; f-picture "the exploded view of the creation of the light-emitting module; = is the creation of the probe workbench device card Exploded view; == is a perspective view of the probe table device card; and the assembly diagram of the _needle table device card. 8 M302117 [Main component symbol description] [Practical] Probe table 1 a Detector 2 a Probe 3 3 Xenon lamp 4 a Glass plate 5 a [This creation] Probe table device 1 Light module 11 LED substrate Flip circuit substrate diffuser 2 Pillar fan 3 Object to be tested 6 Positioning device 8 X-axis positioning member Γ-axis positioning member slide bar