TWM349849U - Two optical elements fθ lens of MEMS laser scanning unit 4 - Google Patents

Abstract

Two f-θ lens used for micro-electro mechanical system (MEMS) laser scanning unit having a first lens and a second lens, the first lens is a positive power meniscus lens which concave surface towards the MEMS mirror, the second lens is a negative power meniscus lens which convex surface towards the MEMS mirror. The first lens has two optical surfaces, which convert the mapped spots by scanning light at nonlinear relationship between the angle and the time of the MEMS reflecting mirror into the mapped spots by scanning light at the linear relationship between the rotating angle and the distance of the MEMS reflecting mirror. The second lens has two optical surfaces, which focuses the scanning light to the target by calibrating itself. Both the first lens and the second lens are satisfied the specified optical condition. The purpose of linear scanning and high resolution scanning can be achieved by disposing the first lens and the second lens.

Description

M349849 VII. Designated representative map: (1) The representative representative figure of this case is: Figure (3). (2) A brief description of the component symbols of this representative figure: 2: light spot; 3: scanning window; 131: first lens; and 132: second lens. M349849 VIII. New description: [New technical field] This is a two-piece lens for a micro-electromechanical laser scanning device, especially for the micro-electromechanical mirror with modified lazy motion. The time-sinusoidal relationship between the winter angles and the two-piece twist lens that achieves the linear scanning effect required by the laser scanning device. [Prior Art] At present, the laser scanning device LSU (Laser Scanning Unit) used in the laser beam printer LBP (Laser Beam Prim) uses a high-speed rotating polygon mirror to manipulate the scanning action of the laser beam. The beam scanning is as described in US Pat. No. 7,707, 729, US Pat. No. 6,295,116, or as described in Taiwan Patent No. 1198966. The principle is as follows: a laser beam is emitted by a semiconductor laser (^1^3111)' first through a collimating mirror (^0 out 111 station &1>), and then through a-aperture to form a parallel beam And the parallel beam passes through a cylindrical lens, and the width on the γ axis of the sub scanning directi〇n can be along the X axis of the main scanning direction. The parallel directions are parallelly focused to form a line image, which is then projected onto a high-speed rotating polygon mirror, and the polygon mirror is uniformly and continuously provided with a polygon mirror which is located at or close to the above linear image (Hne image ) The focus position. By controlling the projection direction of the laser beam by the polygon mirror, when the continuous plurality of mirrors rotate at a high speed, the laser beam incident on a mirror can be extended in the parallel direction of the main scanning direction (X-axis) at the same angular velocity. (angular velocity) is deflected to a twisted linear scanning lens, and the ίθ linear scanning lens is disposed beside the polygon mirror, which can be a single-piece lens structure or a two-piece lens structure. The twist of the linear scanning M349849 lens is that the laser beam that is reflected by the mirror on the polygon mirror and incident on the lens can be concentrated and reduced to the side spot and projected on the light receiver hQto. On the surface) and achieve a linear scan (sc fine also g (5) (7) requirements. However, the practice of laser sweeping device LSU in the community has the following problems: (1), rotary polygon mirror is difficult to manufacture and the price is not Low, relatively increase the production cost of the LSU. (2) The evening mirror must have a fast rotation (such as 4Q 〇〇〇 turn / minute) function, the precision requirements are 焉 以 以 般 般 般 般 般 般 般 般 般 般 般 般 般 般 般 般 般 般The width is extremely thin, so that the Hi-mirror (eylindl>ieal lens) needs to be added in the conventional display so that the laser (four) cylindrical mirror can be focused into a line (a point on the Y-axis) and then projected on the reflection of the polygon mirror ^, As a result, the component cost and assembly process are increased. (3) The conventional polygon mirror must be rotated at a high speed (such as 4 rpm), resulting in a relatively high rotational noise, and the polygon mirror takes a long time from start to work speed, increasing Waiting time after booting. (4), assembly structure of conventional LSU The center axis of the laser beam projected onto the polygon mirror is not the center axis of the polygon mirror, so that the design of the twisted lens π is considered while considering the off-axis deviation of the polygon mirror (〇^axis devjati〇n) Relatively increasing the trouble of designing and manufacturing the ίθ lens. In recent years, in order to improve the conventional LSU assembly structure, an oscillatory microelectromechanical mirror (MEMSmirr〇r) has been developed on the market to replace the conventional use. The polygon mirror is used to control the scanning of the laser beam. The microelectromechanical mirror is a torsionoscillator (the torsionoscillators) with a reflective layer on the surface, which can be reflected by the oscillating and oscillating reflective layer, which will be applied in the future. In the imaging system (4) system), scanner or laser printer (laser scanning unit (Lsu), its scanning efficiency (Scanningeffiden (9) M349849 will be higher than the traditional rotating polygon mirror. , for example, US Pat. No. 6,844,951, US Pat. No. 6,956,597, which is to generate at least one driving signal whose driving frequency approaches the resonant frequency of a plurality of microelectromechanical mirrors, and A driving signal drives the microelectromechanical mirror to generate a scanning path, US 7,064,876, US 7,184,187, US 7,190,499, US 2006/0113393; or Taiwan patent TWM253133, which is a collimating mirror and twist in an LSU module structure Between the lenses, a micro-electromechanical mirror is used instead of the conventional rotary polygon mirror to control the projection direction of the laser beam; or as in the patent 圯2006-201350. The microelectromechanical mirror has the advantages of small components, fast rotation speed and low manufacturing cost. However, due to the microelectromechanical mirror, after receiving a voltage drive, a simple harmonic motion will be performed, and the harmonic motion (harmonicm〇ti〇n) is a sinusoidal relationship between time and angular velocity, and is projected on the microelectromechanical mirror. The relationship between the reflected angle Θ and the time t after reflection is: θ(ί) = θ3 -sin(2^· / -t) (1) where .f is the scanning frequency of the MEMS mirror; 4 is the laser beam After the microelectromechanical mirror, the 'one side of the largest scanning angle. Therefore, at the same time interval Δί, the corresponding reflection angle changes with the time sinusoidal function, that is, at the same time interval Δ, the reflection angle becomes W′ and has a nonlinear relationship with time, that is, When the reflected light rays are projected on the target with different degrees of shading, the distances of the light spots generated in the same time interval are not the same and may increase or decrease with time. For example, when the swing angle of the MEMS mirror is located at the peaks and troughs of the sine wave, the amount of change in the degree of turbulence increases or decreases, which is different from the movement of the mirror of the sand at an equal angular velocity. The amount of angular change produced by the lens on the laser rotating device (LSU) with microelectromechanical mirrors causes the angular velocity of the laser to be projected on the imaging surface to produce a non-equal rate M349849 i. Shape (four) 妓 Wei, called the target on the = = through the light source to emit a laser beam, through the micro-electromechanical mirror to the left and right into the reflection of the wire axis, the level is corrected by the creation of the angle and position, the photosensitive A light spot is formed on the drum _, and the data It has a sensitizer 'inducing the carbon powder to be collected on the paper, so that the two-piece ten lenses of the present invention are sequentially included by the microelectromechanical mirror - the first: the lens 'The first lens has a -th optical surface and a second one; the second optical surface and the second silk surface have at least one side in the main scanning direction which is formed by an aspherical surface. Electromechanical reflection = in progress Off from the surface of the optical fiber with increasing day pin (iv) reduction or increasing 'Ϊ positive rate for the other scan, so that the laser beam is projected on the imaging plane = = regardless like. The second lens has a third optical surface and a fourth optical surface, and the first optical surface and the thin optical surface are in the main scanning direction to the optical surface: the direction ====: the broad light is on the main scanning The direction and the sub-scanning port are shifted by the nine axes to cause imaging deviation on the photosensitive drum, and the first scanning light correction is condensed on the target. [Embodiment] 2, referring to Fig. 1, is an illustration of an optical path of a two-piece 抅 lens of a microelectromechanical laser scanning device. The two-dimensional calendar of the present microelectromechanical f-scan device has a first optical surface 131a and a second optical surface 131b. The first mirror 1 has a second optical surface 132a and a fourth optical surface 132b. The second lens 132' is suitable for use in a microelectromechanical laser scanning device. In the figure, the micro-electromechanical laser scanning M349849 device mainly comprises a laser light source 11, a microelectromechanical mirror l〇, a 7 cylinder mirror 6, a two-photon sensor 14a, 14b, and a target for sensitization. . In the figure, the target system is implemented by a photosensitive drum 15. The light beam m generated by the laser light source 11 passes through the cylindrical mirror 16 and is projected onto the microelectromechanical mirror 1〇. The microelectromechanical mirror ί reflects the light beam ill into the scanning light rays n3a, 113b, 114a, 114b, 115a, 115b in such a manner that the resonance oscillates left and right. The projection of the scanning rays 113a, U3b, U4a, 114b, 115a, 115b in the X direction is referred to as a sub scanning direction. The projection in the gamma direction is referred to as a main scaming direction, and The microelectromechanical mirror has a scan angle of 0C. Referring to FIG. 1 and FIG. 2, FIG. 1 is a diagram showing the relationship between the scanning angle t and the time t of a microelectromechanical mirror. Since the microelectromechanical mirror 1〇 exhibits a simple harmonic motion, its greedy angle is positively positive with time. Therefore, the angle of incidence of the broom light is linear with time. As shown in the figure, the peak a_a' and the trough b_b are smaller than =a-b and a, -b, and the phenomenon of uneven angular velocity is liable to cause imaging deviation on the scanning light-sensitive photosensitive drum 15. Therefore, the photoinductor (4), 咐

= Microelectromechanical mirror 1〇 within the maximum scanning angle, its loss angle (4) ρ,;, is reflected by the microelectromechanical mirror (1) from the wave ♦ of Fig. 2, at this time: = __ recorded ^: not electromechanical mirror 10 series swing to +θρ angle, this time is quite 捃, IHa; when the microelectromechanical mirror 1G scanning angle changes as shown in Figure: J position; Light source U will be driven _ bit ΐ 至 to point b of Figure 2 'this time is equivalent to scanning light U31 electromechanical inverse 2 mesh (four) η limb _ laser light source U hair (four) beam is called. When the vibration time, as in the band a, _b, time, and the field, the laser beam U1 is emitted; this is done - cycle =, cut 11 by the temple M349849, please refer to Figure 1 and Figure 3, where Figure 3 is the first A path diagram of the light trace of a lens and a second lens. The towel '±θη is the effective sweeping limb, and when the rotation angle of the microelectromechanical mirror 10 enters the θηη, the laser light source 11 starts to emit the laser beam Ui, which is reflected by the microelectromechanical mirror 10 as the scanning light. When the scanning light passes through the first lens 131, it is widely refracted by the first optical surface 131a and the second optical surface 13 of the first lens 131, and the distance reflected by the microelectromechanical mirror 10 is nonlinearly related to time. Converted into a scanning ray whose distance is linear with time. After the scanning light passes through the first lens 131 and the second lens 132, the scanning light is scanned by the optical properties of the first optical surface 13u, the second = learning surface 131b, the third optical surface 132a, and the fourth optical surface 13 The light is collected on the photosensitive drum 15, and a light spot of the column is formed on the photosensitive drum 15 (SP〇0 2 . The distance between the two farthest light spots 2 on the photosensitive drum 15 is called an effective scanning window 3 . D1 is the distance between the microelectromechanical mirror 1 〇 to the first optical surface 131 & the distance between the first optical surface 131a and the second optical surface 131b, and (5) the distance between the second optical surface 131b and the third optical surface 132a, D4 is the third optical face to the fourth optical surface (10) (10) distance, & is the distance between the first and second optical faces 132b, the R1 is the curvature radius of the first optical surface 131a, and the second optical surface is the buckle The radius of curvature, R3 is the radius of curvature of the third optical surface (10), and the radius of curvature of the fourth optical surface 132b. Referring to FIG. 4, after the scale is projected on the mechanical level, the spot surface _) is 'SaG# SM The length of the main scanning direction σ direction of the 1G reflection surface of the microelectromechanical mirror and the length of the sub-scanning direction (χ direction), and the correction beam of the first line (Gaussian) Beams) in the gamma-direction beam radius of 13.5% in Guangqiang County, as shown in Figure 5, 'only the beam in the Υ direction is shown in Figure 5, the above-mentioned two-piece mirror # can be used to microelectromechanical mirror 1 〇Reflection 12 M349849 The degree of resolution is difficult. In the direction of the beam and the sub-scanning in the X direction and the direction of the beam, the angle of the beam is angle-疋, and the yarn is produced on the surface to provide a solution that meets the demand. In order to achieve the above-mentioned effect, the creation of the two-piece piece In the main scanning direction or the sub-scanning direction, the first optical surface 131a or the second optical surface 132a of the first lens (3) and the third optical surface or the second optical surface 132b' of the second lens 132 may be spherical or curved. For spherical surface design, if the _ spherical surface is designed, the aspheric surface is the following surface equation: 1 · Anamorphic equation Z = -_ (Cx)X1 +(CvW1 r 1 + + Ky){Cyf Y2 + Ar (1 ~AP^X^^1 + AP)7'ί +

Br ^(1 ~ Bp )χ2 + (1 + ^ )Y1 f + [(1 - CP )X1 + (1 + Cp )Y1 ]4 + [(1 ~ Dp)X1 +(\ + yy2 j5 (2) Where Z is the distance from the optical axis direction to the tangent plane of any point on the lens (SAG) 'Do not be the curvature of the X direction and the γ direction ((3)^^ plus ^); a and ! are respectively the X direction and the γ direction Conical coefficient; w and A? are the rotational deformation (r〇tati〇naUy Symmetric p〇rn〇n) four times, six-person, eight-time and ten-power cone deformation coefficient (deformation from The conic); 4, A, (^ and 仏 respectively non-rotational symmetry (n〇IMOtati〇naiiySymmetric components) are four, six, eight, ten power deformation deformation coefficient (deformation from the conic); When c, = a = and 4 = heart = cp = = 〇 is reduced to a single aspheric surface. 13 1. T〇ric equation M349849 z = z>, +-~ I + VhGoO7?7

Cxy =-i--- (l/Cx)~Zy 7 __ (Cy)Y2 "~ + BX + BJ6 + 5«78 + 5^'° (3) where Z is the point on the lens from the optical axis to 〇 The distance of the point-cut plane (SAG)' ^ is the curvature of the Y direction and the X direction (eurvatoe); the heart is the cone coefficient of the γ direction (C〇niecGeffident); &, & For the four, six, eight, and ten powers (4th ~ job rder c〇effici her) def_ati〇n from the conic) 'When (^$ and heart = '='=& == 〇 is reduced to a single spherical surface. In order to maintain the scanning speed of the scanning light on the imaging surface of the target, for example, in two identical time intervals, the two light points are kept at the same distance; , the ίθ lens can correct the scanning light exit angle of the scanning light _ to the scanning light _ between the first lens 131 and the second lens 132, so that the phase _ time off _ two scanning rays are corrected by the emission difference The distance between the two spots formed on the image-forming drum 15 is equal. Further, when the laser beam 11 is reflected by the f-mirror 1G, the Gaussian beam radius is larger. After the electricity is applied, the distance between the Gaussian beam radius and the creation of the 1 dog secret, 隹丄 more practical resolution requirements; this 乍 - - ί 制 进 - 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 可 扫描 扫描 扫描 扫描 扫描 扫描 扫描 扫描=== A small spot is produced on the photosensitive drum 15 that is focused on the image. The twisted lens can be imaged on the photosensitive drum 15 2 The two pieces of the creation of the genius to be _, 1 勒 == _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ θ = 〇. The distance from the target-side optical surface of the first lens 131 to the optical surface of the second lens 132 microelectromechanical mirror 1 is known as θ = 0°, the thickness of the second lens 132, and 屯 is θ = 0. The distance from the optical side of the target side of the lens 132 to the target, fsx is the combined focal length of the two-piece lens in the sub-scanning direction, fsY is the composite focal length of the two-piece twisted lens in the main scanning direction, and Rix 1 the radius of curvature of the optical surface in the sub-sweep direction; the radius of curvature of the second optical surface in the main scanning direction; & and the refractive index of the first lens 131 and the second lens 132. The uniformity of the spot formed by the two-piece lens of the present invention can be expressed by the ratio δ of the maximum value and the minimum value of the beam size of the light on the photosensitive drum 15, that is, satisfying the formula (8): (8) max(^ - Sa) More step-by-step resolution of the two-piece lens of this creation, use

Tlmax is the ratio of the spot of the scanning light on the reflecting surface of the microelectromechanical mirror 10 to the maximum value of the spot on the photosensitive drum 15 and η—the light spot of the scanning light on the reflecting surface of the microelectromechanical mirror 1 The minimum number of filaments on the dimming drum 15 can satisfy the formulas (9) and (10), ▽min (^bO '^a〇) ~(SbQ-SaQ) <0.10 <0.10 (9) ( 10) where 'sa and Sb are the lengths of any one of the spots formed by the scanning light on the photosensitive drum 15 in the Y direction and the X direction, δ is the minimum first point and the maximum spot on the photosensitive drum 15, the ratio, η is the surface electric The ratio of the spot of the stray light on the counter-operative 1G reflecting surface to the spot on the photoconductor drum 15; 'and Sb〇 is the spot of the micro-electromechanical mirror 1 〇 the reflecting surface of the reflecting light in the main scanning direction and the sub-scanning direction length. 16 M349849 Table 1, Twist optical characteristics of the first embodiment Optical surface curvature radius (_) (optical surface) (curvature) d thickness (mm) nd refractive index (refraction index) MEMS reflective surface R OO 11.65 1 lens 1 1.527 R1 Rlx 143.33 13.04 Rly -62.25 R2(Anamor〇hic) R2x* -15.35 22.00 R2y* -36.88 lens 2 1.527 R3( Anamorphic) R3x* 19.89 12.18 R3y* 223.38 R4(Anamorphic) R4x* 75.52 89.76 R4y* 101.98 Drum R5 * 生二斗死 OO 0.00 * indicates an aspheric surface table 2, the optical surface aspherical surface optical surface (optica surface) of the first embodiment ... and the Anamorphic equation coefficenf L1 Ky cone coefficient (Conic Coefficent) 4«1-also guaranteed number 6th power factor 8th power factor 10th curtain coefficient C^der Order Order Order Coefficient (AR) Coefficient Coefficient fCR) Coefficient iDR, R2* -1.0639E +00 -2.4178E-06 0.0000E+00 O.OOOOE+OO 0.0000E+00 R3* -4.9963E+01 0.0O00E+00 O.OOOOE+OO 0.0000E+00 O.OOOOE+OO R4* -6.1801E +00 O.OOOOE+OO 0.0000E+00 0.0000E+00 0.0000ΕΉΜ) First Surface (ODtical 4th power coefficient 6th power coefficient 8th power coefficient l〇th power coefficient surface) (Conic Order Order Order Coefficent) Coefficient CAP) Coefficient mP, Coefficient fCP> Coefficient R2* -5.3942E-01 5.1047E -02 00 00 00 00 00 00 00 00 00 OO O.OOOOE+OO O.OOOOE+OO 0.0000E+00 The two-piece f0 lens thus constructed, f(l)Y=145.78, f(2)Y=-368.67, fsX=23.655, fsY=215.37 (mm) converts the scanning light into a scanning light spot whose distance is linear with time, and removes the light spot 18 M349849 from the microelectromechanical mirror 10 by 臓, Sb ((4) sweeping the input, and moving on the photosensitive drum 15 The contracting focus 'forms a small spot 6 and satisfies the conditions of the formulas (4) to (10), as shown in Table 3, the Gaussian beam of the wire on the photosensitive drum 15 with the central axis z-axis in the γ direction from the central axis γ distance (mm) New Zealand, as shown in Table 4; Lin Shi _ light point distribution map shown in Figure 7. Figure towel, the unit circle diameter is (10) 5 drying. Table 3, the first embodiment satisfies the condition table + + ί/5 fmrA_ f(2)Y main scanning direction, ((~-1).丨("the-1) 'my 'my sub-scanning direction (ϋ)+ (ϋν- δ 7„ minQVD max(Sb -Sa) _mwi(Sh-Sa)~~(sb0-sa0) minCVD _Tn〇) 0.8502 -0.2435 0.4707 0.9481 0.8787 0.0685 0.0602 Table IV, light spot on the photosensitive drum of the first embodiment The maximum value of the Gaussian beam diameter Y -107.460 -96.206 -84.420 -96.206 -60.206 -48.050 -35.947 -23.914 0.000

Max(2Ga, 2Gb) 4.70E-03 3.75E-03 3.33E-03 3.48E-03 3.96E-03 4.13E-03 4.02E-03 3.43E-03 2.77E-03 <Second Embodiment> The first lens 131 and the second lens 19 of the two-piece twisted lens of the present embodiment are the optical aspheric parameters of the sixth embodiment and the second embodiment. The ring image equation coefficient T〇ric equation Coefficient__ optical surface ( Optical Ky Cone Coefficient 4th Power Coefficient 6th Sub-curtain Coefficient 8th Power Coefficient IQth Power Coefficient surface) (Conic Order Order 〇rder Order -^--r-Coefficent)-Coefficient (B4) Coefficient (B6) CoefBcient (B8) Coefficient -- —— v/u_VAUUUUCr'TUU soil work, t--Anamorphic equation coefficent Turfi^1Ca conic coefficient her power coefficient her power coefficient her power coefficient l〇th curtain Coefficient surface) (C〇n,c Order Order 〇rder 〇rder —·2939Ε+0° —O.OOOOE+OO O.OOOOE+OO Q.000QE+00 0.0000E+00 -^--—... Coefficient ^AR) Coefficient (BR) Coefficient (CR) Coefficient (DR)

-——9E+01 O.OOOOE+OO 0.0000E+00 0.0000E+00 O.OOOOE+OO

The two-piece twisted lens formed by the two, [(1) 丫 133.89, [(2) γ ifsx = 2aG84, fsY = 274.2G5 (mm) can convert the scanning light into a distance _ s, 2 is linear Scan the light spot, and scan the MEMS mirror 10 gloss = 13·824 (μιη), Sb wide 3512 〇 66 (μηι) into scanning light in the sensitization table 7; into the light spot 8 ' and meet (4) The condition of the formula (10), the female light & Utr is in the direction of the ¥ direction from the central axis ¥ distance (the coffee is shown in Table 8; and the light spot distribution of this embodiment is not affected. In the figure, the diameter of the unit circle is 0. 05mm. 21 M349849 Learning characteristics and aspherical parameters are shown in Table 9 and Table 10. Table IX, Optical characteristics of the third embodiment Optical surface radius of curvature (mm) (optical surfaced (curvature! d thickness (mm) nd refractive index ( Thickness) (refraction index) MEMS and shoot r OO 19.84 1 lens 1 1.527 RJ. Rlx -388.85 11.22 Rly -112.39 R2(Anamorphi〇.) R2x* -15.41 15.00 R2y* -42.77 lens 2 1.527 R3(Anamon)hic, R3x* 25.94 12.00 R3y* 422.59 R4iAnamorohic, R4x* 56.93 94.18 R4y* 125.67 Sense drum idrum)R5 OO 0.00 * indicates an aspheric surface. The optical surface aspheric parameters of the tenth and third embodiments

Optical surface (Anamorphic equation coefficent) ICy conic coefficient (Conic Coefficent) 4th power coefficient 6th power coefficient 8th power coefficient I〇th power coefficient Order Order Order Coefficient (AR) Coefficient (BK) Coefficient (CR) Coefficient (DR) R2* -1.1079E+00 -1.8898E-06 O.OOOOE+OO O.OOOOE+OO O.OOOOE+OO R3* -2.0505E+02 0.0000E+00 0.0000 E+00 0.0000E+00 0.0000E+00 R4* -4.9535E+00 O.OOOOE+OO O.OOOOE+OO 0.0000E+00 0.0000E+00 Kx Conic coefficient 4th power coefficient 6th power coefficient 8th power Coefficient Order Order Order Coefficent Coefficient (AP) Coefficient Co) Coefficient fCP, Coefficient (DP) R2* -4.9292E-01 -5.6828E-02 O.OOOOE+OO 0.0000E+00 O.OOOOE+OO R3* •4.9518E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 R4* 2.1264E+00 O.OOOOE+OO 0.0000E+00 0.0000E+00 O.OOOOE +OO By the two-piece ίθ lens thus constructed, f(1)Y=124.07, f(2)Y=-344.01, fsx=23.785, fSY=l76.355 (mm) can convert the scanning light into distance and Time For the line 23 M349849, the two-piece twisted lens formed by this, f((4)36.2 W(2)Y= marriage 44 fsX':258, fsY=2m784(mm) can convert the scanning light into distance and time. Scanning light secret, Lin micro-machines 1G on the charm _, sb0 = 3522 · 〇 4 (four) scanning into scanning light, on the photosensitive drum μ to form a smaller fine 丨 2 ' and meet the conditions of (4) ~ (10), As shown in Table 15; on the salt-light drum 15 with the central axis axis in the γ direction away from the i & first branch, ± ± γ distance (mm) of the light point of the Gaussian diameter (four) ' as shown in Table 16; The light spot distribution map of the real _ is not. In the figure, the soap circle has a diameter of 0.05 mm. 7 Table 15, the fourth embodiment satisfies the condition table d3 ^rd^Jrds

/(2)r main scanning direction

fsY.(^^ + ^izR , (i) y '(2) y sub-scanning direction h miH) max^ -Sa) max^ -Sa) ~(Sb〇-sa0)min〇V. (*^iO ' ^aO i 0.8745 -0.4157 0.4615 0.7910 0.8772 0.0945 0.0829 Table sixteen, fine Wei _ light drum on the top of the Gaussian silk

26 M349849 Table 18, optical aspheric parameters of the fifth embodiment

Toric equation Coefficient Optical surface (Conic Coefficent) 4th power coefficient 6th power coefficient Order Order Coefficient (B4) Coefficient CB6) 8th power coefficient Order Coefficient (B8) 10th power Coefficient Order Coefficient Rl* R4* 2.3701E-01 -L5112E+01 -1.1545E-07 -5.1670E-10 -5.2786E-09 4.4640E-15 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 Anamorphic eaneffen rneffirpnt, optical surface Ky cone coefficient (Conic Coefficent) 4th power coefficient 6th power coefficient Order Order Coefficient (AR) Coefficient CRR'» 8th power coefficient Order Coefficient (CR) 10th power factor Order Coefficient (DR) R2* R3* -1.1425E-01 -2.1300E+01 -2.2983E-07 -2.1475E-10 -1.2206E-06 5.2723E-1? 0.0000E+00 0.0000E+ 00 O.OOOOE+OO 0.0000E+00 Kx Conic Coefficient (Conic Coefficent) 4th Power Coefficient 6th Power Coefficient Order Order 1 Coefficient (AP) Coefficient (UP\ 8th Power Coefficient Order Coefficient (CP) 10th Power Coefficient Order Coefficient (ΠΡ) R2 * R3* -7.6546E-01 1.0000E+01 -1.0556E+00 O.OOOOE+OO -8.3557E-01 0.0000R+nn 0Ό000Ε+00 0.0000E+00 O.OOOOE+OO O.OOOOE+OO The two-piece wound lens, f(1)γ=85141, f(2)Y= _2714 78 fsX-26·469, fsY=mi.728 (mm) converts the scanning light into a distance-time 3 linear scanning light. Point, and scan the micro-electromechanical mirror 1 〇 spot, Sb0, 83.85_ into scanning light, on the photosensitive drum 15: line focus 'forms a smaller spot I2, and satisfies (4) ~ (10) Conditions, such as Table 19 △ with the central axis z-axis in the γ direction from the central axis γ distance - 'as shown in Table 20; and this real off the new points willow 11 do not. In the figure, the diameter of the unit circle is 〇.〇5mm. 28 M349849 Table 19, the fifth embodiment satisfies the condition table 0.1190 -0.0281 0.4615 0.1243 0.8435 0.0843 0.0711 dj + d4 + d5 /(l)y

d 5 f(2)Y Main scanning direction Sub-scanning direction — — + (– — —~)/rf K′x κ2χ k3x kAx 3_ mm(Sb-Sa) max(Sb -Sa) =max(56 -Sa maX'"(^7 = mm(Sb.Sa) Table 20, the maximum value of the Gaussian beam diameter of the light spot on the photosensitive drum of the fifth embodiment Y '1G7.460 _96.2Q6 —84.42〇_%.206 · 60.206 ·48.050 -35.947 -23.914 〇.〇〇〇

Max(2Ga, 2Gbj^1.35E-02 1.27E-02 1.21E-02 1.28E-02 1.35E-02 1.41E-02 1.42E-02 1.37E-02 1.22E-02 Illustrated by the above embodiment, The creation can at least achieve the following effects: (1) With the setting of the two-piece twist lens of the present creation, the spacing of the spot of the microelectromechanical mirror in the simple harmonic motion on the imaging surface can be decreased or increased from the original time. The non-equal rate scanning phenomenon is corrected to an equal-rate scanning, so that the projection of the laser beam on the imaging surface is performed at an equal rate, so that the distance between two adjacent spots formed on the object is equal. () By this creation ^ The setting of the slice ίθ lens can be corrected by scanning the light in the main scanning direction and the sub-scanning direction to make the spot on the target that is focused on the image. 29 M349849 (3) = If the setting of the two-piece lens is ' Distortion correction in the main sweeping sentence to the y sweeping the shovel to trace the light, so that the remaining target object field spot ^ is limited by the spirit and scope of the 'in this _ claim, but will fall into this creation: Protection =: change 'modification' or even equivalent change [simplified description of the diagram] Figure 1 is a two-piece calendar Fig. 2 is a diagram showing the relationship between the scanning and θ舆 time k of the microelectromechanical mirror. Fig. 3 is an explanatory view of the first lens and the second lens, and the optical path of the line of the ® line and the symbol 4 is a schematic diagram of the first change after the scanning of the sister's face level; the difference between the position of the tunnel and the slave is shown in Fig. 5 is the relationship between the light and the south of the light. FIG. 9 is a schematic diagram of a light spot of the first embodiment; FIG. 8 is a schematic diagram of a light spot of the third embodiment; FIG. 9 is a schematic diagram of a light spot of the third embodiment; Figure 10 is a schematic view of a light spot of the fourth embodiment; and 30 M349849. Figure 11 is a schematic view of a light spot of the fifth embodiment. [Explanation of main component symbols] 10: Microelectromechanical mirror; 11: Laser light source; 111: Beams 113a, 113b, 113c, 114a, 114b, 115a, 115b: scanning light; 131: first lens; 132: second lens; 14a, 14b: photodetector; 15: photosensitive drum; Mirror; 2, 2a, 2b, 2c: light spot; and, 3: effective scanning window. 31 M349849 mi tv Scanning phenomenon is required to produce imaging on the imaging surface-fr. Therefore, for the micro-electromechanical mirror, it is based on the micro-electromechanical reflection, which is characterized by micro-electromechanical reflection. After the mirror scan, the equal time interval is formed, and the development can be performed on the lens of the micro-electromechanical laser sweeping thief, so that the correct scan can be made on the target, which will be forced [new content] The purpose of this creation is to provide a two-piece lens for a microelectromechanical laser scanning device. The two-piece twisted lens is sequentially calculated by a microelectromechanical mirror, which is composed of a positive diopter crescent and a concave surface in the microelectromechanical reflection. The lens on the mirror side and a mirror with a negative refracting crescent shape and convex surface on the side of the microelectromechanical mirror, the scanning light reflected by the green electromechanical mirror is correctly imaged on the target, and the laser scanning device is required. Linear scanning effect. Another object of the present invention is to provide a two-piece lens of a microelectromechanical laser scanning device for reducing the area of a spot projected on a target to achieve an improved resolution. A further object of the present invention is to provide a two-chip ί θ mirror f of a micro-electromechanical lightning scanning device, which can correct the deviation of the main scanning direction and the field sweeping direction due to the deviation of the scanning light from the optical axis. The problem of expanding the spot size of the photoreceptor drum into a circular shape is made and the size of each imaging spot is made uniform, thereby achieving the effect of improving the resolution quality of the resolution. Therefore, the two-piece ίθ lens of the present microelectromechanical laser scanning device is suitable for M349849-·.-«.f,: 'S' which includes at least one light source that emits a laser beam to oscillate left and right to resonate. .C〆**;,, . . . -*- .....ι· is the first lens 13 which is a positive diopter crescent and has a concave surface on the side of the microelectromechanical mirror 10 The second lens 132 is formed by a lens having a negative refracting crescent shape and a convex surface on the side of the microelectromechanical mirror; wherein the first lens 131 has a first optical surface 131a and a second optical surface 131b, and the microelectromechanical mirror is 1 〇 The scanning light spot whose angle of reflection is nonlinear with time is converted into a scanning light spot whose distance is linear with time; the "two lenses 132 have a third optical t-shirt and the first wide face 132b" are the first lens (3) scanning light correction condensing on the target object = scanning light reflected by the microelectromechanical mirror 1 藉 by the two-piece fB lens is imaged on the photographic image 15, wherein the first optical surface 131a and the second optical surface (3)匕, the second optical surface l32a and the fourth optical surface escape on the main scanning side At least one of the optical surface, the first optical surface 131a, the second optical surface 13 ratio, the third optical surface 132a, and the fourth optical surface 132b formed by at least one aspherical surface may be a non-spherical surface in the sub-scanning direction. The optical surface formed by the optical surface or the sub-scanning direction uses an optical surface formed by a spherical surface. Further, in the optical lens effect, the two-piece twisted lens of the present invention is formed on the optical lens. Further satisfying the condition of the formula (5) in the main scanning direction: 卜 0.1 d3+d4+d5 Λ: <1.2 nr -0.6 <-Λ < -0.01 f(2)y (4) (5) or, in The main scanning direction satisfies the equation (6) 0.3 <<0.6 f(\) yf(2) y (6) and satisfies the equation (7) in the sub-scanning direction 0.1 dWsx 1.1 (7) where the first lens 131 is in the main scanning direction Focal length, f(2)Y is the second 15 97. M349849 Miscellaneous. r::' - ^=" plus clear and detailed, the best embodiment is dedicated to the following figure, the structure and technical features of this creation are detailed as follows The "Embodiment" is a description of the main components of the MEMS-based laser-scanning clothing-film ίθ lens, so the following is not disclosed in this creation. Implementation _ is based on - micro · Rena bribe like "electric reading scanner, in addition to the two revealed in this creation = injury, off-chip, other structures are general notification technology, so in this field As the person of the j-term Yu, the creation of the money surface of the creation of Lei Qi silk: = ί θ mirror-shaped navigation and secrets of Wei Ji, also 疋 微 微 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋 疋Many changes, modifications, and even equivalent changes are made, for example, the radius of curvature design or the face of the first lens 132 is not limited. 4Button Selection, Spacing Adjustment <First Embodiment> Please refer to Fig. 6, which is an optical path of an embodiment in which a line passing through a first lens and a second mirror # is created. In the second embodiment of the present invention, the second lens 132 of the two-piece ten lens is a lens having a concave surface on the side of the microelectromechanical mirror 10, and a second lens 132 is a first lens (3). a lens having a negative refractive moon shape and a convex surface on the 1G side of the microelectromechanical mirror, and a second crescent-shaped concave surface in the lens of the microelectromechanical mirror, wherein the first lens ^ the optical surface is a spherical surface, and the second The optical surface 131b and the 1321th fourth optical surface of the second lens 132 are all aspherical, and the design is used (the surface is designed. The optical characteristics and aspherical parameters are shown in Table 1 and Table 2. M349849 m:. % l 'nH#. i_ κ 〜,,-.-λ,,"礴一··—*"* Mirror 10 side mirror = 131 is a positive diopter crescent and concave in MEMS reflective electrical reflection Mirror side ω side == i32 Π refractive _ shape and convex surface in the microcomputer and the second optical surface! ^, the surface of the lens 131 - optical surface 1 can be spherical surface parameters as shown in Table 5 and Table ^ scale surface formula design. Characteristics and non-Table 5, the characteristics of the second embodiment i learning plane ^ rate radius (mn^d〇^7:-- (optical surface) (curvature) < 4111111) nd folding Rate MEMS reflective surface R _ (refraction index) lens 1 12.42 1 M 1.527 Rlx 107.63 Rly -51.38 12.59 R2 R2x -15.74 R2y -32.25 11.37 lens 2 R3 fAnamorohic) 1.527 R3x* 19.26 R3y* 75.91 8.00 R4rY Toroid) R4x 70.85 R4y* 45.26 99.56 威来.鼓 idrunOI^ 〇〇Π ΛΑ * indicates aspherical surface, ^----- 20

M349849 Table VII, the second embodiment satisfies the condition table f(l)Y d5 /(2)r main scanning direction mm(VSj ma.x(Sb -Sa) two (^40 ' ^a0 ) min(^ -Sa) i^bO · Sa0) '(^y '(2)y 0.8883 -0.4260 0.4609 0.8321 0.8802 0.0894 0.0787 Table 8. The maximum value of the Gaussian beam diameter on the photosensitive drum of the second embodiment Y 107.460 -96.206 -84.420 -96.206 - 60.206 -48.050 -35.947 -23.914 0.000 --° )~~1£5E~02 !-27E-02 1.21E-02 1.28E-02 1.35E-02 1.41E-02 1.42E-02 1.37E-02 1.22E -02 <Third Embodiment> The two-piece "lens-lens (3) and - second mirror of the lens] 132 of the present embodiment, wherein the first lens 131 is a positive diopter crescent and concave in the microelectromechanical reflexoscope 1 The second lens 132 of the temporal side is composed of a lens having a negative refracting crescent shape and a convex surface on the side of the microelectromechanical mirror 1G, and the first lens 131 is a crescent-shaped lens having a concave surface on the side of the rhyme electromechanical mirror ίο The first optical surface i3i of the first lens 131 is an optical surface (10), and the third optical surface 132 of the second lens 132 is characterized by a "four-light-to-face scalar surface" system (2) scale ball-type design. Magic 22 M349849

iJ scanning the light charm, and the microelectromechanical mirror 1 () on the first point V 13.452 (_, SbQ = 3941 hall ((4) scanning into scanning light, in the ❹ ^ poly (four) into a smaller plus G, and full. The condition of the class ^Table 10, on the photosensitive 妓15, the center axis z-axis is in the γ direction from the center of the spot light (4), such as the second; the age is called 3 =) as shown in Figure 9. In the figure, The unit circle diameter is 〇〇5〇^. ”&quot; 77 &quot; Production eleven, the third embodiment satisfies the condition table d, +d, +ds fd)r / (2)r ± scan direction / y ((~ 1 - i) , (3⁄4 -1) '(2)y Sub-scanning direction Λ - mill(^ -Sa)max〇V\) max(^ -SJ(sb〇-sa0) min(Sb-Sa). V ' ^min (n) 0.9768 -0.2738 0.4789 0.5615 0.8776 0.0586 0.0515 Table XI, 苐 two examples of the maximum value of the sensitized light spot Nantes beam diameter γ Max (2Ga, 2Gb) -107.458 -96.173 -84.419 -96.173 - 60.343 3.75E-03 2.27E-03 1.89E-03 1.96E-03 3.05E-03 -48.232 -36.136 -24.067 3.73E-03 3.92E-03 3.40E-03 0.000 1.84E-03 &lt;Fourth Embodiment &gt; The first lens 131 and the second lens 132 of the two-piece lens of the embodiment, wherein the first lens 131 is a positive refracting power Tsukigata concave lenses and a micro-electromechanical mirror side, the second lens is I32 - negative refractive power and a convex meniscus 24-ί. Microelectromechanical: * M349849 i ·

' ...-.. I ,........ , . The mirror on the side of the mirror 10 constitutes the electric mirror _, the towel = entangled and the concave surface is spherical on the computer, the first lens brother The optical surface 131a of the slice 131 ====== fine formula is set. Table 12, ίθ optical characteristics of the fourth embodiment MEMS and lensR lens 1 OO 12.49 {icirdcuon irtrtaY) 1 Μ 1.527 Rlx Rly 79.81 -48.62 11.98 R2fAnamorphic) R2x -15.47 10.00 R2y* lens 2 R3 fAnamorohic) -31.46 1.527 R3x 19.60 8.00 R3y* R4(Y Toroid) 62.12 R4x 71.71 101.12 R4y* Deterrent drum idrum)R5 40.00 OO 0.00 * indicates aspherical table XIV. Optical surface aspherical parameter of the fourth embodiment

Optica surface ring pattern equation coefficient Toric equation Coefficient J Ky cone coefficient (Conic Coefficent) 4th power coefficient Order Coefficient (B4) 6th power coefficient Order Coefficient (B6) 8th power coefficient Order Coefficient (B8) 10th Power Coefficient Order Coefficient R4* -6.7983E+00 0.0000E+00 0.0000E+00 0.0000E+00 0.0000E+00 ioDtical Anamorphic equation coefficent surface Kvia cone coefficient 4th Coefficient 6th times 暮 coefficient 8th oligo coefficient 10th power coefficient R2* -5.7584E-01 O.OOOOE+OO O.OOOOE+OO O.OOOOE+OO O.OOOOE+OO R3* -1.7523E+01 0.0000E+ 00 0.0000E+00 0.0000E+00 O.OOOOE+OO 25 M349849 ~ /.:..-<Fifth Embodiment> ..-.

The two-piece pound M 132 of the embodiment, wherein the first lens 13 is a positive, the brother 131 and a second lens mirror 10 side of the w 4 wire (10) as the surface of the microelectromechanical reflection ΐ anti m ^ 132 'program _ The meeting is composed of a microcomputer, a 'brother' brother, the first lens 131 is a crescent-shaped and concave surface is in the second optical surface 131b and the second third optical surface 132a of the micro-brother lens 131 For the spherical surface, the equation (2) is aspherical, the first optical surface ma of the first lens 131 and the fourth optical surface mb of the second lens are aspherical surfaces, and the equation (3) is an aspherical formula design. Its optical characteristics and aspherical parameters are shown in Table 17 and Table 18. Table 17 and Twisted Optical Characteristics of the Fifth Embodiment Optical Surface Curvature Radius (mm) d Thickness (mm) nd Refractive Index MEMS and R lens 1 〇〇30.74 Vi^iia^uuu uiuca; 1 1.527 R1 (Y Toroid Rlx Rly* -41.73 -39.34 10.00 R2(Anamorphic) R2x* -11.19 12.95 R2y* lens 2 -39.34 1.527 R3 (Anamorphic) R3x* R3y* 347.39 140.92 12.00 R4(Y Toroid) R4x 99.54 76.38 R4y* 124.52 • Drum R5 oo 0.00 ' indicates aspheric 27

Claims (1)

M349849 Nine, the scope of application for patents: ...9 1. A micro-electromechanical laser scanning device electric laser scanning device, the micro-electromechanical lightning 'the system is suitable for the first source of the micro-beam, - (four) the total of the emission of light Electromechanical mirrors, and - for scanning ==: r£i3H = = electric qingcheng into 'the first - mirror / with two = have -" 2 angle scale _ secret _ scan the neon point into distance 舆 time is linear a scanning light spot of the relationship; wherein the second lens has a third optical surface and a fourth optical surface, wherein the third optical surface and the fourth optical surface have at least one optical surface aspherical in the main scanning direction The scanning light correction of the first lens is condensed on the target; the scanning light reflected by the microelectromechanical mirror is imaged on the target by the two-piece β lens. The two-piece twist lens of the microelectromechanical laser scanning device according to the first aspect of the patent further satisfies the following conditions in the main scanning direction: ο.ι&lt;ί±^ι&lt;12; -0.6 &lt;; J(2) r where ' is the focal length of the first lens in the main scanning direction, f(2)Y is the second mirror The focal length in the main scanning direction, the mountain is θ = 0. The distance from the optical surface of the first lens target side to the optical surface of the second lens microelectromechanical mirror side, d4 is θ = 0. The thickness of the second lens, 屯θ = = 0. The distance from the optical side of the second lens target side to the target of 32 M349849. 3. The two-piece twist lens of the microelectromechanical laser scanning device according to claim 1 of the patent application, further The following conditions are satisfied: 0.3 in the main scanning direction: f(l)y /(2: )&gt;- &lt;0.6 satisfies 0.1 in the sub-scanning direction &lt; (d) &lt;1.1; where 'f(l)Y And f(2)Y is the focal length of the first lens and the second lens in the main scanning direction, fsx is the composite focal length of the two-piece ίθ lens in the sub-scanning direction, and the two-dimensional lens is in the main scanning direction. The composite focal length, Rix is the radius of curvature of the i-th optical surface in the sub-scanning direction, Riy is the radius of curvature of the second optical surface at the main scanning side (10), and the refractive indices of the first lens and the second lens are respectively. · A two-piece calendar lens of a microelectromechanical laser scanning device as described in claim 1 The ratio of the minimum spot size of the maximum light bribe of the towel satisfies: ; 0 R &lt;- Λ = J^(Sb · Sa). maxH), where Sa and Sb are - the direction and sub-scan of the broom light on the photosensitive drum The length of the direction, 3 is the ratio of the highest point on the photosensitive drum. ^ Take the person especially 5. If you apply for the paste of the first item, the ratio of the maximum spot on the target and the target The ratios are respectively satisfied by _ upper take small first point - &lt;0.10 (H) 33 M349849 f in 'sa. With sbG for the loom, the reflection point of the mirror is reversed in the main = direction and the length of the sub-sweeping direction, &amp;&amp; is - the light spot on the photosensitive drum The length of the main scanning direction and the sub-scanning direction, w is the ratio of the maximum spot on the target of the scanning line on the reflecting surface of the MEMS mirror, and η_ is the scanning surface of the MEMS mirror The light spot of the thief line is known to describe the ratio of the minimum spot on the target. 34