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TWM341304U - Cleaning and transferring device for substrate - Google Patents

Cleaning and transferring device for substrate Download PDF

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Publication number
TWM341304U
TWM341304U TW97206660U TW97206660U TWM341304U TW M341304 U TWM341304 U TW M341304U TW 97206660 U TW97206660 U TW 97206660U TW 97206660 U TW97206660 U TW 97206660U TW M341304 U TWM341304 U TW M341304U
Authority
TW
Taiwan
Prior art keywords
conveying device
substrate cleaning
shaft
substrate
convex portion
Prior art date
Application number
TW97206660U
Other languages
Chinese (zh)
Inventor
Pei-Yu Wang
Original Assignee
Horng Jinq Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horng Jinq Co Ltd filed Critical Horng Jinq Co Ltd
Priority to TW97206660U priority Critical patent/TWM341304U/en
Publication of TWM341304U publication Critical patent/TWM341304U/en

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Description

M341304 •八、新型說明: 【新型所屬之技術領域】 洗芙〒輪送裝置,尤指-種於進行輸送並以喷洗水清 洗土板守可元王防止魏水滲出的基板清洗輪送裝置。 【先前技術】 子設$於此之發達所依賴的不外乎就是電子設備,而電 多ϊ電子零件電’經由電路板進行設置 軟,,以,有物==設J同時可搭配寫入 線路零件’各電子零件與電子零件間係經由 士;看一 收ίΐ^ίίί^與=35 ’該基底31兩側邊同時延伸有 3 3 :而該基底3 χ相對應於收納槽3 i i處凹^置片 ,而於該U形槽3 1 同Ϊ凹陷有對位槽3 3 1M341304 • Eight, new description: [New technical field] The washing machine, especially the substrate cleaning device that transports and washes the soil with spray water to keep the water from seeping . [Prior Art] Sub-sets of this development rely on nothing more than electronic devices, and electric multi-electron electronic parts are set softly via the circuit board, so that there is something == J can be combined with writing The line parts 'between the electronic parts and the electronic parts are connected to each other; see a collection ίΐ^ίίί^ and =35 'the sides of the substrate 31 are simultaneously extended by 3 3 : and the substrate 3 χ corresponds to the receiving groove 3 ii The concave groove is placed, and the U-shaped groove 3 1 is recessed with the alignment groove 3 3 1

繞有輸送環3 4 ;與定位環U k开:3 進該轉軸! 4係於 上進行輸送’並於輸送之同時,盆喷管3 ; 物3 4 1 基板上所未具有線狀㈣清除。、s 3 21⑷謂水4理,以將其 :然上料洗機1於朗時,為確實存在下制軸缺失尚待改進 其基板巧洗水喊時,其喷洗水容易受基板㈣如^賤且 M341304 ,-而,,實洗水則會從u形槽3工2與對位槽3 …摩出,進而造成其噴洗水滲出至洗淨室3外 2 與周圍環境同時容㈣成賴積水之現象。μ錢1外部 是以,要如何解決上述習用之問題與缺失, 與從事此行業之相關軸所亟欲研究改善之方向所在者Υ之創作人 【新型内容】 故,本創作之創作人有鑑於上述缺失, ,估及考量,並《從事於此行業累積之多年:相f=斷== ^者始設恤附完全防止噴洗水滲㈣基板清 本要目的f於·:該基座上之容置室兩側邊分別設有複數 伸有 凸部可_於容置室上,該轴封則可依^==微= 燥之實用至卜竹輸送裝置料與賴環境保持乾 以細微間距套合有_,以使其凸部可固定於容置t =凸4上 凸部ί:之二由;封件與 内’且該輸送_時料㈣定轉==== 6 M341304 -動時磨擦至其密封件與凸 滲出於容置室外之實用進步性了 、、、,且同時可達到防止其喷洗水 【實施方式】 圖就i創作較佳實施例^么兒術手段及構造’茲繪 請參閱第三圖、第功i如下’俾利完全了解。 立體圖、局部示意圖一及巧 〖斤不’係為本創作較佳實施例之 裝置4主要包括有平台中可清楚看出,該輸送 ’並於該連桿52相以各定位件5 1間穿設有連桿5 2, 且該平台5上至6之位置處分別設有磁環5 2 1, 環π 1付番考^ 有複數定位件5 31,且該容置室6於各磁 1内分別固設時以孔6 1與墊片6 2 ’該各軸孔6 凸部6 44各⑥封件6 3之相對應面同時延伸有 4内有複數穿通之導孔64 1 ’並於該凸部6 置處具f =該等密封件6 3與凸部6 4中央位 管6 5、下iir巧43 ’其中’該容置室6内收容有複數之上喷 上同時設有數輸ίΐ7 ’該等上喷管6 5與下嘴管6 6 兮笠_ 6 7,亚於該容置室下側穿設有排水孔6 8,而 • 於該穿孔6 4 3内,該等軸桿71係 - 压b 3之疋位件5 31上,且該軸桿71相對應於連桿5 2 位置處設有磁環711,而該等磁環711與連桿5 2上之磁 ί人21具有可相互磁力牽引之距離,又該軸桿71外繞設有可分別 =於兩側^部64之軸封712,該軸封712間繞設有第一調整 713、第二調整件714與複數滚輪715。 =由七述之結構、組成設計,茲就本創作之使用作動情形說明如 下’ 參閱第六圖、第七圖及第八圖所示,係為本創作較佳實施 ,之貫施示意圖一、實施示意圖二及實施示意圖三,由圖中可清楚看 ’上述構件動作時,該輸送裝置4於啟動前,該軸桿71上之第一 7 M341304 - 調整件713與第二調整件714則可視所欲輸送之基板8大小進广Winding around the conveying ring 3 4; opening with the positioning ring U k : 3 into the rotating shaft! 4 is transporting on the top and at the same time as the conveying, the basin nozzle 3; the object 3 4 1 has no linear (4) removal on the substrate . , s 3 21 (4) is water 4, in order to: it is: when the washing machine 1 is in the lang, for the existence of the shaft is missing, the substrate needs to be improved, the spray water is easily affected by the substrate (4) ^贱 and M341304, -,,, the actual wash water will be removed from the u-shaped groove 3 work 2 and the alignment groove 3 ..., causing its spray water to seep out to the outside of the clean room 3 2 simultaneously with the surrounding environment (4) The phenomenon of water accumulation. The external money of μ money 1 is how to solve the problems and lacks of the above-mentioned practices, and the creators who want to study and improve the relevant axes of the industry [new content] Therefore, the creators of this creation have The above-mentioned shortcomings, estimates and considerations, and "the years of accumulation in this industry: phase f = broken == ^ start to set up a shirt to completely prevent spray water seepage (four) substrate clearing purpose to f: · on the pedestal The two sides of the accommodating chamber are respectively provided with a plurality of convex portions for arranging on the accommodating chamber, and the shaft seal can be kept dry according to the utility of the sputum transfer device and the environment. The spacing sleeve is combined with _ so that the convex portion can be fixed to the receiving portion t = convex portion 4 convex portion ί: two by; the sealing member and the inner 'and the conveying _ current material (four) fixed rotation ==== 6 M341304 - Friction to the seal and the osmosis of the seal to the outside of the room for practical advancement, and at the same time, to prevent the spray wash water [embodiment] Figure 1 to create a preferred embodiment The structure is drawn, please refer to the third picture, the first work is as follows. The three-dimensional diagram, the partial schematic diagram, and the simplification of the apparatus are the same as the apparatus 4 of the preferred embodiment of the present invention. The device 4 is mainly included in the platform, and the conveyance 'and the link 52 is worn between the positioning members 51. A connecting rod 52 is provided, and a magnetic ring 5 2 1 is disposed at a position of the platform 5 to 6 respectively. The ring π 1 is subjected to a plurality of positioning members 5 31, and the receiving chamber 6 is respectively magnetized. When the inner portions are respectively fixed, the holes 6 1 and the spacers 6 2 'the respective axial holes 6 and the convex portions 6 44 and the corresponding faces of the six seals 6 3 extend simultaneously with a plurality of through holes 64 1 ' The convex portion 6 is disposed with f = the sealing member 63 and the convex portion 6 4 of the central tube 6 5 , and the lower iir 43 ' of which the housing chamber 6 is accommodated with a plurality of sprays simultaneously provided with a number of losses Ϊ́7 'the upper nozzle 6 5 and the lower nozzle tube 6 6 兮笠 _ 6 7 , the lower side of the accommodating chamber is provided with a drainage hole 6 8 , and within the perforation 6 4 3 The rod 71 is attached to the clamp member 51 of the b3, and the shaft 71 is provided with a magnetic ring 711 corresponding to the position of the link 52, and the magnetic ring 711 and the magnetic rod 511 are magnetically attached thereto. The person 21 has a distance that can be magnetically pulled by each other, and the shaft 71 is outside the shaft 71 A shaft seal 712, which can be respectively disposed on the two sides 64, is disposed around the shaft seal 712 with a first adjustment 713, a second adjustment member 714 and a plurality of rollers 715. = Designed by the structure and composition of the seven statements, the following is the description of the use of this creation. 'Refer to the sixth, seventh and eighth figures, which is a better implementation of this creation. FIG. 2 and FIG. 3 are implemented. It can be clearly seen from the figure that when the above-mentioned component is operated, the first 7 M341304 - the adjusting member 713 and the second adjusting member 714 on the shaft 71 are visible before the conveying device 4 is started. The size of the substrate 8 to be transported is wide

巧整,並同時固定該等第一調整件713、第二調整件714與萨倉I i輪715,而該輸达裝置4於啟動後,其平台5之連桿5 2則於^ 位件51内進行轉動,於連桿5 2轉動時,該連桿5 2上之複數磁ί 5 2 1同時進行轉動,該等磁環5 2 ;[同時以磁力牽引帶動^桿? ^ 末知位置處之磁環71 1轉動,而該軸桿71則經由磁環71 1之饿The first adjustment member 713, the second adjustment member 714 and the Sabin I i wheel 715 are fixed at the same time, and after the delivery device 4 is activated, the link 5 of the platform 5 is at the position Rotating within 51, when the connecting rod 52 rotates, the plurality of magnetic φ 5 2 1 on the connecting rod 5 2 simultaneously rotates, and the magnetic ring 5 2 ; [at the same time, the magnetic rod is used to drive the rod? ^ The magnetic ring 71 1 at the last known position rotates, and the shaft 71 is hungry via the magnetic ring 71 1

動於始、封件6 3與凸部6 4内轉動,且該軸桿71與穿孔6 4 3間I 以具有適當間距且相互不磨擦進行轉動,而該軸桿7丄轉動同 :After the start, the seal 6 3 and the convex portion 64 are rotated, and the shaft 71 and the perforation 6 4 3 are rotated at an appropriate interval and are not rubbed with each other, and the shaft 7 turns the same:

動第-調整件713、第二調整件714與滾輪715同步轉動,I 丨有效帶動基板8於該容置室6内輸送,且經由第一調整件713盥 =周,件7 1 4進行定位輸送,而當基板8於容置室6内輸送時,、爷 =8,可經由上噴管6 5與下喷f 6 6之喷嘴6 7以喷洗水進行^ =基3於容置室6内輸送時,可經由複數上喷管6 5 铃下貝官6 6之贺洗水完全清洗。 綱請=配合參縣九鼠第十®所示,係為本創作較佳實施例之 固及側視不意圖二,_中可清楚看*,該軸封7 1 2係 7 1 2與检封件6 3及凸部6 4產生相互磨擦之現 使轴封学口= 3間具有細微間距,該間距係以相互不磨擦^情況 密封件6 3分別固定於車由桿7 1與容置室6上,:其 其上噴管:具有細微間距且不相互磨擦,而當 直嘻、、先太存^/、貝g 6 6之贺嘴6 7以噴洗水進行沖洗基板§時, i水渗出:ίΐ=封與密封件6 3進行隔離’以防止其喷 水同時^人,L6外其參人其軸封7 1 2與密封件6 3之喷洗 凸二:r導孔6 41,並經由導孔6 41流入該 上噴管6 5、 = 4 2,而於邊基板8經由輸送組7輸送且經由 導孔6 4 1流出2洗時’其溝槽6 4 2内之喷洗水同時經由 並收集回收以經由容置室6下側之排水孔6 8流出 惟,以μ &、+、可70全防止喷洗水滲出於容置室6外。 込僅為本創作之較佳實施例而已,非因此即侷限本創 8 M341304 .實存全部附圖所示’本創作使用時, Ζ習用技術相較,著 m 7 ^ ^6 4 ΐϊ^ί Jilt 7 ? 2 件6 具,且該密封 其上噴管匕與轴桿71進行同步轉動,而 :巧以防止其嘴洗水噴kgi:7卜以ΐί 一!^置4卜部與觸環境保持乾燥之目的。 達輪 -、違各凸部6 4上具有複數導孔6 4 ^ 相通於導孔6 4 1之複數溝槽6 4 2 , Sg 6 j壁環繞有 6所噴*之嘴洗水流人該凸部6 4 f Tf與下喷管6 導孔641流出,且經由容罾“〇射曰f42内’並同時經由 _ 並收集 二、:=;由有== .,”穿孔6 4 3内5 =:?==件! 3與 疋於軸桿7 1上’卿止 _ 2啊可固 4^f,L6 4 3^^, 出於容置室Θ外之功效。 才j運到防止其賀洗水滲 紅上所述,本創作之基板清洗輸送裝置於 其功效及目的,故本創作誠為—實之^為確貫能達到 之申請要件,差依法提出申i,ς用===本=合新型專利 =人之辛苦創作,倘^ ·局審委有任何稽疑,f保障創 作人定當竭力配合,實感德便。 明不口來函扣示,創 9 M341304 % 【圖式簡單說明】 第一圖係為習用之立體圖 g二圖係為習用之立體分解圖 第三圖係為本創作較佳實施例之立體圖。 第四圖係為本創作較佳實施例之局部示意圖一。 第五圖係為本創作較佳實施例之局部示意圖二。 第六圖係為本創作較佳實施例之實施示意圖一。 第七圖係為本創作較佳實施例之實施示意圖二。 第八圖係為本創作較佳實施例之實施示意圖三。 第九圖係為本創作較佳實施例之側視示意圖一。 第十圖係為本創作較佳實施例之側視示意圖二。 M341304 【主要元件符號說明】 清洗機· · · · • · 1 底座..... • · 2 洗淨室· · · · • · 3 基底..... ••31 收納槽· · · · ••311 U形槽···· ••312 喷管..... ••32 嵌設片···· ••33 對位槽···· ••331 轉軸..... ••34 輸送環· · · · ••341 定位環···· • · 342 上蓋..... ••35 輸送裝置··· • · 4 平台..... • · 5 定位件···· ••51 連桿..... ••52 磁環..... ••521 基座..... ••53 定位件···· ••531 容置室· · · • · · 6 軸孔···· •••61 墊片· · · · •••62 密封件··· •••63 凸部···· •••6 4 導孔· · · · •••641 溝槽· · · · •••642 穿孔···· •••643 上喷管··· •••6 5 下喷管··· •••66 喷嘴···· •••6 7 排水孔··· •••68 輸送組··· …7 軸;^干· · · · •••71 磁環· · · · •••711 軸封···· •••712 第一調整件· •••713 第二調整件· •••714 滾輪···· •••715 基板···· …8The first adjusting member 713 and the second adjusting member 714 rotate synchronously with the roller 715, and the I 丨 effectively drives the substrate 8 to be transported in the accommodating chamber 6, and is positioned through the first adjusting member 713 盥 = week, the member 714 When the substrate 8 is transported in the accommodating chamber 6, the main unit 8 can be sprayed with the spray water through the upper nozzle 6 5 and the nozzle 6 6 of the lower spray f 6 6 in the accommodating chamber. When transporting within 6, it can be completely cleaned by a plurality of upper nozzles. The outline = as shown in the tenth® of the Jixian County, is the solid and side view of the preferred embodiment of the creation. The _ can be clearly seen*, the shaft seal 7 1 2 is 7 1 2 and the inspection The sealing member 6 3 and the convex portion 6 4 are mutually rubbed, and the shaft sealing mouth is 3, and the spacing is 3, and the spacing is not rubbed with each other. The sealing member 63 is respectively fixed to the vehicle by the rod 7 1 and accommodated. On the chamber 6, the upper nozzles thereof have fine pitches and do not rub against each other, and when the cymbals are directly rubbed, the first mouth is stored, the shells 6 6 are washed with water to wash the substrate § i water seepage: ΐ ΐ = seal and seal 6 3 to isolate 'to prevent it from spraying at the same time ^ people, L6 outside its shaft seal 7 1 2 and seal 6 3 spray convex 2: r guide hole 6 41, and flows into the upper nozzle 6 5, = 4 2 via the guide hole 6 41, and is transported in the groove 6 4 2 when the side substrate 8 is transported via the transport group 7 and flows out through the guide hole 6 4 1 The rinsing water is simultaneously collected and recovered to flow out through the drain hole 6.8 on the lower side of the accommodating chamber 6, and the blasting water is prevented from seeping out of the accommodating chamber 6 by μ &, +, and 70.込 is only the preferred embodiment of this creation, and therefore it is not limited to the original 8 M341304. The actual picture shown in the figure is 'when the creation is used, the technique used is compared with m 7 ^ ^6 4 ΐϊ^ί Jilt 7 ? 2 pieces of 6 pieces, and the seal on the upper nozzle 匕 and the shaft 71 synchronous rotation, and: to prevent its mouth washing water spray kgi: 7 卜 一 one! ^ Set 4 Bu and keep the environment dry. The wheel--, each of the convex portions 64 has a plurality of guide holes 6 4 ^ a plurality of grooves 6 4 2 which are connected to the guide holes 6 4 1 , and the wall of the Sg 6 j is surrounded by 6 nozzles; The portion 6 4 f Tf flows out with the lower nozzle 6 guiding hole 641, and passes through the 罾 〇 〇 曰 42 42 42 42 42 并 并 并 并 并 并 并 并 并 并 并 并 并 并 收集 收集 收集 收集 收集 收集 收集 收集 收集 收集 收集 收集 收集 收集 收集 收集 收集 收集=:?==件! 3 and 疋 on the shaft 7 1 'Qing _ 2 ah can be solid 4 ^ f, L6 4 3 ^ ^, for the effect of housing room Θ. According to the effect and purpose of the substrate cleaning and conveying device of this creation, the creation of this substrate is sincerely--the actual application can meet the requirements of the application. i, use === this = new type of patent = people's hard work, if ^ the bureau has any doubts, the protection of the creator will be the best to cooperate, the real sense of virtue. The letter is shown in the letter, creating 9 M341304% [Simplified illustration of the drawing] The first picture is a stereoscopic view of the conventional g. The second figure is a three-dimensional exploded view of the prior art. The third figure is a perspective view of the preferred embodiment of the present invention. The fourth figure is a partial schematic view 1 of the preferred embodiment of the present invention. The fifth figure is a partial schematic view 2 of the preferred embodiment of the present invention. The sixth figure is a first schematic diagram of the implementation of the preferred embodiment of the present invention. The seventh figure is a schematic diagram 2 of the implementation of the preferred embodiment of the present invention. The eighth figure is a schematic diagram of the implementation of the preferred embodiment of the present invention. The ninth drawing is a side view of a preferred embodiment of the present invention. The tenth figure is a side view of the second preferred embodiment of the present invention. M341304 [Description of main component symbols] Washing machine · · · · • · 1 Base..... • · 2 Washing room · · · · • · 3 Base..... ••31 Storage tank · · · · ••311 U-shaped groove···· ••312 Nozzle....••32 Embedded piece···· ••33 Alignment groove···· ••331 Rotary shaft..... •34 Conveyor ring · · · · ••341 Positioning ring ···· • · 342 Upper cover..... ••35 Conveying device··· • · 4 Platform..... • · 5 Positioning parts·· ·· ••51 Connecting rods..... ••52 Magnetic rings.....••521 Bases.....••53 Positioning parts···· ••531 accommodating chambers · · · • · · 6 Axial Holes···· •••61 Gaskets · · · · •••62 Seals··· •••63 Projections····•••6 4 Guide Holes · · · · •••641 Groove · · · · •••642 Perforation ···· •••643 Upper nozzle ··· •••6 5 Lower nozzle ··· •••66 Nozzle···· ••6 7 Drain hole··· •••68 Transport group····7 axis; ^dry · · · · •••71 Magnetic ring · · · · •• •711 Shaft seal···· •••712 First adjustment part ••••713 Second adjustment part ·•••714 Roller····••• 715 Substrate····8

Claims (1)

M341304 •九、申請專利範圍: 1、二種基,清洗輸送裝置’所述之基板主要係經由該輸送裝置 輸送並清洗,該輸送裝置包括有: -平台’斜台上設置有複數定位件,轉定位制穿設有 桿土且該平台上同時設置#-基座,縣座上晴設置有複數定 位件; 二置至’ 3谷置室係固設該基座上,且該容置室兩側邊分別設 有複數軸孔,該等軸孔内固設有—密封件,該密封件向内同時延 伸有一凸部,該凸部與密封件中央位置處呈有一穿孔· ^數輸送組,鱗輸送組硫容於容置室内,雌輸送組具有一 了没於牙孔之贿,且該軸桿外繞設有可分別套合於凸部之輛封 3 4 5 6 如申請專利範圍帛1項所述之基板清洗輸送裝置 設有一個或一個以上之磁環。 如申請專利細第1項所述之基板清洗輸送裝置 内同時固設有一個或一個以上之上喷管盥下喷管 如申請專機圍第3賴狀基板清洗^送裝置 與下噴管上裝設有複數噴嘴。 如申專利細料項所述之基板清洗輸送裝置 具有衩數導孔’且該凸㈣麵繞有複數溝槽。 如申請專利範圍第1項所述之基板清洗輸送裝置 定位於基座之定仂杜,p # 土,说^…. 其中該連桿上 其中該容置室 其中該上喷管 其中該凸部上 其中該軸桿係 7 其中該軸桿外 其中該容置室 其中該容置室 、如^請專利第i項所述之基板清洗輸送裝置 堯設有調整件、第二調整件與複數滾輪 ‘申請專纖_ 1酬叙基板清洗輸送裝置 下側設有-個或-細±之排水孔。 =請專娜龄1韻述之基板清洗輸送裝置 14岔封件間進一步可增設有一墊片。 12M341304 • Nine, the scope of application for patents: 1. Two kinds of bases, the cleaning conveyor device's substrate is mainly transported and cleaned by the conveying device, and the conveying device comprises: - a platform, a plurality of positioning members are arranged on the inclined platform, The rotary positioning device is provided with rod soil and the platform is provided with a #-base at the same time, and the county seat is provided with a plurality of positioning members on the ground; the second to the '3 valley chamber is fixed on the base, and the accommodation room is A plurality of shaft holes are respectively disposed on the two sides, and a sealing member is fixed in the shaft holes, and the sealing member extends inwardly with a convex portion, and the convex portion and the central portion of the sealing member have a perforation and a number of conveying groups The scale transporting group is contained in the chamber, the female transport group has a bribe that is not in the dental hole, and the shaft is surrounded by a seal that can be respectively fitted to the convex portion. 3 4 5 6 The substrate cleaning and conveying device of item 1 is provided with one or more magnetic rings. For example, in the substrate cleaning and conveying device described in the first application of the patent application, one or more nozzles under the nozzle are fixed at the same time, such as applying for a special machine, the third substrate cleaning device and the lower nozzle tube top. There are multiple nozzles. The substrate cleaning and conveying device as described in the patent fine material has a number of guide holes ' and the convex (four) face is surrounded by a plurality of grooves. The substrate cleaning and conveying device according to claim 1 is positioned on the pedestal of the pedestal, p #土, said ^.... wherein the connecting rod is in the receiving chamber, wherein the upper nozzle is the convex portion Wherein the shaft 7 is outside the shaft, wherein the receiving chamber has the receiving chamber, and the substrate cleaning and conveying device according to the item i is provided with an adjusting member, a second adjusting member and a plurality of rollers 'Application for special fiber _ 1 Reward on the lower side of the substrate cleaning conveyor is provided with a - or - fine ± drain hole. = Please use the substrate cleaning and conveying device of the Nana 1 rhyme. 14 垫片 A further gasket can be added between the seals. 12
TW97206660U 2008-04-18 2008-04-18 Cleaning and transferring device for substrate TWM341304U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW97206660U TWM341304U (en) 2008-04-18 2008-04-18 Cleaning and transferring device for substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW97206660U TWM341304U (en) 2008-04-18 2008-04-18 Cleaning and transferring device for substrate

Publications (1)

Publication Number Publication Date
TWM341304U true TWM341304U (en) 2008-09-21

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395261B (en) * 2009-07-23 2013-05-01 Dainippon Screen Mfg Method of and apparatus for cleaning substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI395261B (en) * 2009-07-23 2013-05-01 Dainippon Screen Mfg Method of and apparatus for cleaning substrate

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