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TWI914289B - SiC P-TYPE, AND LOW RESISTIVITY, CRYSTALS, BOULES, WAFERS AND DEVICES, AND METHODS OF MAKING THE SAME - Google Patents

SiC P-TYPE, AND LOW RESISTIVITY, CRYSTALS, BOULES, WAFERS AND DEVICES, AND METHODS OF MAKING THE SAME

Info

Publication number
TWI914289B
TWI914289B TW114133532A TW114133532A TWI914289B TW I914289 B TWI914289 B TW I914289B TW 114133532 A TW114133532 A TW 114133532A TW 114133532 A TW114133532 A TW 114133532A TW I914289 B TWI914289 B TW I914289B
Authority
TW
Taiwan
Prior art keywords
boules
sic
wafers
crystals
making
Prior art date
Application number
TW114133532A
Other languages
Chinese (zh)
Other versions
TW202606495A (en
Inventor
達倫 韓森
道格拉斯 杜克斯
馬克 洛波達
馬克 蘭德
維特 托雷斯
胡安卡洛斯 羅霍
Original Assignee
美商佩利達斯股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商佩利達斯股份有限公司 filed Critical 美商佩利達斯股份有限公司
Application granted granted Critical
Publication of TWI914289B publication Critical patent/TWI914289B/en
Publication of TW202606495A publication Critical patent/TW202606495A/en

Links

TW114133532A 2022-04-30 2022-10-03 SiC P-TYPE, AND LOW RESISTIVITY, CRYSTALS, BOULES, WAFERS AND DEVICES, AND METHODS OF MAKING THE SAME TWI914289B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US63/337,088 2022-04-30
US17/861,187 2022-07-09

Publications (2)

Publication Number Publication Date
TWI914289B true TWI914289B (en) 2026-02-01
TW202606495A TW202606495A (en) 2026-02-01

Family

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160181375A1 (en) 2013-08-06 2016-06-23 Sumitomo Electric Industries, Ltd. Silicon carbide semiconductor substrate, method for manufacturing silicon carbide semiconductor substrate, and method for manufacturing silicon carbide semiconductor device
US20170204532A1 (en) 2014-09-25 2017-07-20 Melior Innovations, Inc. Vapor deposition apparatus and techniques using high puritiy polymer derived silicon carbide
WO2020174315A1 (en) 2019-02-28 2020-09-03 株式会社半導体エネルギー研究所 Semiconductor device and manufacturing method of semiconductor device
TW202136600A (en) 2019-12-27 2021-10-01 美商克立公司 Large diameter silicon carbide wafers

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160181375A1 (en) 2013-08-06 2016-06-23 Sumitomo Electric Industries, Ltd. Silicon carbide semiconductor substrate, method for manufacturing silicon carbide semiconductor substrate, and method for manufacturing silicon carbide semiconductor device
US20170204532A1 (en) 2014-09-25 2017-07-20 Melior Innovations, Inc. Vapor deposition apparatus and techniques using high puritiy polymer derived silicon carbide
WO2020174315A1 (en) 2019-02-28 2020-09-03 株式会社半導体エネルギー研究所 Semiconductor device and manufacturing method of semiconductor device
TW202136600A (en) 2019-12-27 2021-10-01 美商克立公司 Large diameter silicon carbide wafers

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