TWI912906B - Robot motion path generation method and robot motion path generation device - Google Patents

Abstract

This robot motion path generation method reads robot CAD data and arrangement area CAD data that are used to derive motion path in an arrangement area for arranging a robot and a substrate, wherein the robot CAD data is Computer-Aided Design data of the transport robot, and the arrangement area CAD data is Computer-Aided Design data of the arrangement area.

Description

Methods and devices for generating robot motion paths

This invention relates to a method and apparatus for generating robot motion paths.

Previously, methods for generating robot paths based on predetermined conditions were known. For example, Japanese Patent Application Publication No. 2019-193975 discloses a method for generating robot paths in a way that prevents the robotic arm from interfering with other robotic arms or obstacles. In the robot path generation method of Japanese Patent Application Publication No. 2019-193975, a robot path generation program for generating the robot's path based on predetermined conditions is installed in the calculation processing unit. In this way, the calculation processing unit generates the robot's path based on the predetermined conditions.

However, in the robot trajectory generation method disclosed in Japanese Patent Application Publication No. 2019-193975, a robot trajectory generation program for deriving the robot's motion path based on predetermined conditions is installed in a calculation processing unit, which then derives the robot's motion path based on the predetermined conditions. Therefore, it is impossible to arbitrarily combine the robot data used for deriving the motion path with the data of the placement area for deriving the robot. Therefore, it is desirable to have a robot motion path generation method and a robot motion path generation device that can arbitrarily combine the robot data with the data of the placement area to derive the robot's motion path within the placement area.

This disclosure was made to solve the aforementioned problems. One of its objectives is to provide a method and apparatus for generating robot motion paths, capable of arbitrarily combining robot data with data from a configuration area to generate the robot's motion path within the configuration area.

To achieve the above objectives, the robot motion path generation method of the first viewpoint disclosed herein comprises: simulating the generation of a robot motion path in a configuration area for configuring the robot and a workpiece according to predetermined conditions, wherein the robot includes a terminal effector and a robotic arm, the terminal effector holding the workpiece, and the robotic arm having the terminal effector mounted on it and being interconnected by a plurality of links; reading robot CAD data belonging to the robot's computer-aided design data and configuration area CAD data belonging to the configuration area's computer-aided design data, which are used in the motion path; and displaying a virtual image containing the robot and the configuration area on a display unit based on the integrated data that integrates the read robot CAD data and the configuration area CAD data.

As described above, in the robot motion path generation method of the first viewpoint disclosed herein, the robot CAD data belonging to the robot's computer-aided design data and the configuration area CAD data belonging to the configuration area's computer-aided design data are read and used to export the robot's motion path in the configuration area for configuring the robot and the workpiece. This allows the user to arbitrarily combine and read the robot CAD data and the configuration area CAD data used when exporting the robot's motion path in the configuration area. As a result, the robot's data and the configuration area data can be arbitrarily combined to export the robot's motion path in the configuration area. Furthermore, as described above, in the first viewpoint's method for generating the robot's motion path, a virtual image containing the robot and the configuration area is displayed on the display unit based on integrated data formed by combining the read robot CAD data and the configuration area CAD data. This allows the user to easily review the predetermined conditions for deriving the robot's motion path within the configuration area by viewing the virtual image displayed on the display unit.

Furthermore, to achieve the aforementioned objective, the robot motion path generation device of the second viewpoint disclosed herein includes: a display unit; and a control unit, which simulates the motion path of the robot in a configuration area for configuring the robot and the workpiece according to predetermined conditions. The robot includes a terminal effector and a robotic arm. The terminal effector holds the workpiece, and the robotic arm is equipped with the terminal effector and consists of a plurality of interconnected terminals. The control unit consists of interconnected rods. It reads robot CAD data (part of the robot's computer-aided design data used in the motion path) and configuration area CAD data (part of the configuration area's computer-aided design data). Based on this integrated data, which combines the read robot CAD data and configuration area CAD data, it displays a virtual image containing the robot and the configuration area on the display unit.

As described above, the robot motion path generation device of the second viewpoint disclosed herein includes a control unit that reads the robot CAD data (part of the robot's computer-aided design data) and the configuration area CAD data (part of the configuration area's computer-aided design data) used to export the robot's motion path in the configuration area for configuring the robot and the workpiece. Therefore, similar to the robot motion path generation method of the first viewpoint described above, the user can arbitrarily combine and read the robot CAD data and the configuration area CAD data used when exporting the robot's motion path in the configuration area. As a result, similar to the robot motion path generation method of the first viewpoint described above, a robot motion path generation device can be provided that can arbitrarily combine robot data and configuration area data to derive the robot's motion path in the configuration area. Furthermore, as described above, in the robot motion path generation device of the second viewpoint, the control unit displays a virtual image containing the robot and the configuration area on the display unit based on integrated data that integrates the read robot CAD data and configuration area CAD data. Therefore, similar to the robot motion path generation method described in the first viewpoint above, the user can easily review the predetermined conditions for deriving the robot's motion path within the designated area by viewing the virtual image displayed on the screen, which includes the robot and the designated area.

As described above, according to this disclosure, a method and apparatus for generating a robot's motion path can be provided, capable of arbitrarily combining robot data with data from a configuration area to generate the robot's motion path within the configuration area.

10:Substrate transfer robot

11: Hands

12: Robotic Arm

12a: Connecting rod

13:Abutment

20: Configure the region

21:Substrate transfer room

22:Substrate mounting part

22a: Loading/unloading port

22b: Buffer cavity

23c: Alignment

30, 30a: Obstacles

100:Substrate transfer system

200: Motion path generation device

210:Input department

220: Display Unit

230: Memory Section

240: Control Department

CD:CAD data

CD1: Transfer robot CAD data

CD2: Configure Area CAD Data

CD3: Substrate CAD data

G: Gap

Ga: Minimum threshold

ID: Data Integration

IDa: 2D data

IDb: 3D data

MP: Action Path Generator

OP: Action Path

VC: Substrate transfer room

VI: Virtual Images

VIa: Two-dimensional virtual images

VIb: Three-dimensional virtual images

W: substrate

Figure 1 is a top view showing a substrate transport system according to an embodiment of the present disclosure.

Figure 2 is a block diagram showing the configuration of a substrate conveying robot motion path generation device according to an embodiment of this disclosure.

Figure 3 is a flowchart illustrating the motion path generation of a substrate conveying robot according to one embodiment of this invention.

Figure 4 is a diagram showing an embodiment of the present disclosure in which a virtual image is displayed on a display unit.

Figure 5 shows a configuration in which the size of the gap between the substrate transport robot and the placement area is displayed on the display unit according to an embodiment of this disclosure.

Figure 6 is a diagram illustrating how, according to an embodiment of this disclosure, virtual obstacles are configured based on the minimum threshold of the gap between the substrate transport robot and the configuration area.

The following is a diagram illustrating the implementation of this disclosure.

[Substrate conveying robot motion path generation device]

Referring to Figures 1 and 2, a motion path generation device 200 for a substrate transport robot 10 according to an embodiment of the present invention will be described. The motion path generation device 200 for the substrate transport robot 10 is a device that generates the motion path OP of the substrate transport robot 10 within the substrate transport system 100. Furthermore, the substrate transport robot 10 is an example of a robot.

(Substrate transfer system)

As shown in Figure 1, the substrate transport system 100 includes a substrate transport robot 10 and a placement area 20. The substrate W is an example of a workpiece.

The substrate transport robot 10 includes: a hand 11 for holding a substrate W; a horizontally articulated robotic arm 12 on which the hand 11 is mounted and interconnected by a plurality of links 12a; and a base 13 supporting the robotic arm 12. The hand 11 holds the substrate W while it is being transported by the substrate transport robot 10. The hand 11 is mounted on the tip of the robotic arm 12. The substrate W is, for example, a silicon wafer with a disk shape. The substrate W and the hand 11 are examples of a workpiece and an end effector, respectively.

The configuration area 20 includes a substrate transport chamber 21 and a substrate mounting section 22.

A substrate transfer robot 10 is installed in the substrate transfer chamber 21. The substrate transfer chamber 21 is a space for transferring substrates W by the substrate transfer robot 10. The substrate transfer chamber 21 maintains a high-pressure environment.

The substrate placement section 22 is connected to the substrate transport chamber 21. The substrate W is placed in the substrate placement section 22. The substrate placement section 22 includes a plurality of load ports 22a, a plurality of load locks 22b, and an alignment device 22c.

Each of the plurality of loading/unloading ports 22a includes a FOUP (Front Opening Unify Pod) serving as a container for accommodating a plurality of substrates W.

Each of the plurality of buffer chambers 22b is connected to the substrate transport chamber 21 at a different location than each of the plurality of loading/unloading ports 22a. Each of the plurality of buffer chambers 22b is connected to the substrate transport chamber VC, which is maintained in a vacuum environment.

The substrate transport chamber VC is connected at different locations from each of the plurality of buffer chambers 22b to the substrate processing chamber where anti-corrosion coating, etching, and other processes are performed on the substrate W. That is, the substrate transport system 100 is an EFEM (Equipment Front End Module) that transports the substrate W between the FOUPs (feedback ports) of the plurality of loading/unloading ports 22a and the substrate transport chamber VC connected to the substrate processing chamber.

The alignment device 22c is used to align and correct the eccentricity of the substrate W.

(The structure of the device for generating the motion path of the substrate conveying robot)

As shown in Figure 2, the motion path generation device 200 of the substrate transport robot 10 includes an input unit 210, a display unit 220, a memory unit 230, and a control unit 240. The motion path generation device 200 of the substrate transport robot 10 is, for example, a PC (personal computer) or a tablet computer.

Input unit 210 accepts input operations from the user. When input unit 210 receives an input operation from the user, it outputs an input signal corresponding to the input operation to control unit 240. For example, input unit 210 is a keyboard or mouse. Input unit 210 is used when setting or changing predetermined conditions for exporting the operation path OP of board transport robot 10 in configuration area 20.

The display unit 220 displays a virtual image VI of the substrate transport robot 10, the arrangement area 20, and the substrate W, as well as the exported motion path OP of the substrate transport robot 10 in the arrangement area 20. The display unit 220 is, for example, a liquid crystal display (LCD) or an organic EL (Electroluminescence) display.

The memory unit 230 is a computer-readable memory medium that stores various programs and data. The memory unit 230 stores an action path generation program MP, which is used by the control unit 240 to execute the action path generation method of the board transport robot 10. The memory unit 230 is formed using materials such as magnetic disks (e.g., hard drives), optical discs (e.g., CD-ROMs and DVDs), or semiconductor memory.

The control unit 240 simulates the movement path (OP) of the board transport robot 10 within the configuration area 20 based on predetermined conditions. The control unit 240 includes, for example, a processor (CPU), and semiconductor memory such as RAM (Random Access Memory) and ROM (Read Only Memory).

The control unit 240 reads the CAD data CD exported for use in the action path OP. The CAD data CD includes transport robot CAD data CD1 (computer-aided design data belonging to the board transport robot 10), configuration area CAD data CD2 (computer-aided design data belonging to the configuration area 20), and board CAD data CD3 (computer-aided design data belonging to the board W). The user can arbitrarily select which of the following data to read: transport robot CAD data CD1, configuration area CAD data CD2, and board CAD data CD3. Furthermore, transport robot CAD data CD1 and board CAD data CD3 are examples of robot CAD data and workpiece CAD data, respectively.

The control unit 240 displays a virtual image VI containing the substrate transport robot 10, the configuration area 20, and the substrate W on the display unit 220 based on an integrated data ID that integrates the read CAD data CD1 of the transport robot, CD2 of the configuration area, and CD3 of the substrate.

[Method for generating the motion path of a substrate conveying robot]

The method for generating the motion path of a substrate conveying robot 10 according to an embodiment of this disclosure will be explained with reference to Figures 3 to 5.

As shown in Figure 3, in step S1, the control unit 240 reads the CAD data CD1 of the transport robot, the CAD data CD2 of the configuration area, and the CAD data CD3 of the substrate, which are exported for use in the action path OP. The configuration area CAD data CD2 includes obstacles 30 shown in Figure 4 that may become obstacles during the operation of the substrate transport robot 10. Figure 4 shows an example of a columnar object disposed in the substrate transport chamber 21 as an obstacle 30.

As shown in Figure 3, in step S2, the control unit 240 displays the virtual image VI, which includes the substrate transport robot 10, the configuration area 20, and the substrate W, on the display unit 220 based on the integrated data ID, which integrates the read CAD data CD1 of the transport robot, the CAD data CD2 of the configuration area, and the CAD data CD3 of the substrate. Furthermore, the control unit 240 also displays the virtual image VI on the display unit 220 in steps S3, S4, and S5, which will be described later.

As shown in Figure 4, the control unit 240 displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220. In the example shown in Figure 4, the control unit 240 displays both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220. Furthermore, the control unit 240 switches between states where the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed side-by-side on the display unit 220, a state where the two-dimensional virtual image VIa is displayed on the display unit 220, and a state where the three-dimensional virtual image VIb is displayed on the display unit 220, based on the user's input operation to the input unit 210.

When the control unit 240 changes one of the two-dimensional data IDa and three-dimensional data IDb in the integrated data ID according to the user's operation, it reflects the change to the other two-dimensional data IDa and three-dimensional data IDb, and simultaneously displays at least one of the two-dimensional virtual image VIa corresponding to the two-dimensional data IDa and the three-dimensional virtual image VIb corresponding to the three-dimensional data IDb on the display unit 220. For example, when the control unit 240 changes one of the two-dimensional data IDa and three-dimensional data IDb according to the user's operation, it reflects the change to the other two-dimensional data IDa and three-dimensional data IDb, and simultaneously displays both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb side by side on the display unit 220. That is, when both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb are displayed on the display unit 220, in step S3 described later, when a user performs an input operation on the input unit 210 to change the two-dimensional data IDa or the three-dimensional data IDb, both the two-dimensional virtual image VIa and the three-dimensional virtual image VIb change in a linked manner.

As shown in Figure 3, in step S3, the control unit 240 corresponds to the user's input operation to the input unit 210 to set the predetermined conditions for exporting the action path OP, and sets the predetermined conditions for exporting the action path OP. The predetermined conditions include the start and end points of the action path OP, the upper limits of the speed and acceleration of the hand 11, the upper limits of the speed and acceleration of the robotic arm 12, whether the substrate W is held by the hand 11, the minimum threshold Ga of the gap G (described later), the size of the components of the substrate transport robot 10, the position of the components of the substrate transport robot 10, the posture of the substrate transport robot 10, the size of the components of the arrangement area 20, and the position of the components of the arrangement area 20. That is, the control unit 240 changes at least one of the following in the integrated data ID: the size of the component of the substrate transport robot 10, the position of the component of the substrate transport robot 10, the posture of the substrate transport robot 10, the size of the component of the configuration area 20, and the position of the component of the configuration area 20. Furthermore, when the control unit 240 changes at least one of the following factors in the two-dimensional data IDa and the three-dimensional data IDa: the size, position, posture, size, or position of the substrate transport robot 10, or the configuration area 20, based on the user's operation, it simultaneously reflects this change in the other of the two-dimensional data IDa and the three-dimensional data IDa, and displays at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb on the display unit 220. The change in the size and position of the substrate transport robot 10 in the integrated data IDa includes changes in the length and position of at least one of the connecting rod 12a and the hand 11, which are components of the substrate transport robot 10, in the integrated data IDa. Changes in the size and position of the components of the configuration area 20 in the integrated data ID include: changes in the position of the substrate mounting portion 22, which is a component of the configuration area 20; additions and deletions of at least one of these; and changes in the position and size of at least one of the obstacles 30, which is a component of the configuration area 20.

As shown in Figure 3, in step S4, the control unit 240 simulates the movement path OP of the substrate transport robot 10 in the placement area 20 according to predetermined conditions. As shown in Figure 5, the control unit 240 simulates multiple movement paths OP. In Figure 5, only two movement paths OP are shown in a simplified manner. Furthermore, as shown in Figure 6, the control unit 240 simulates the movement path OP by placing virtual obstacles 30a in the virtual image VI displayed on the display unit 220, thereby offsetting the outline of the placement area 20 to the minimum threshold Ga of the preset gap G (described later).

As shown in Figure 3, in step S5, the control unit 240 displays the exported motion path OP on the display unit 220. As shown in Figure 5, the control unit 240 displays the size of the gap G between the exported motion path OP and at least one of the substrate transport robot 10 and substrate W on the motion path OP in the integrated data ID and the obstacle 30, which is a component of the configuration area 20, on the display unit 220. Specifically, the control unit 240 displays the size of the smallest gap G among the plurality of motion paths OP in the integrated data ID on the display unit 220. That is, the size of the smallest gap G among the plurality of exported motion paths OP is displayed on the display unit 220 simultaneously. Furthermore, the control unit 240 displays the smallest gap G among the plurality of motion paths OP in the integrated data ID on the display unit 220 in a manner corresponding to the size of gap G. For example, the control unit 240 displays the smallest gap G among the plurality of motion paths OP on the display unit 220 in a color corresponding to the size of gap G.

After step S4 or S5, if a user performs an input operation on the input unit 210 to change the predetermined conditions for exporting the action path (OP), the process returns to step S3. After step S5, if no user performs an input operation on the input unit 210 to change the predetermined conditions for exporting the action path (OP), the generation of the board transport robot 10's action path ends.

[Effects of the Implementation Mode]

In this embodiment, the following effects can be achieved.

(The effect of the method used to generate the robot's movement path)

In this embodiment, the system reads the computer-aided design data CD1 belonging to the substrate transport robot 10 and the computer-aided design data CD2 belonging to the configuration area 20, which is used to export the action path OP of the substrate transport robot 10 in the configuration area 20 for configuring the substrate transport robot 10 and the substrate W. This allows the user to arbitrarily combine and read the transport robot CAD data CD1 and the configuration area CAD data CD2 used when exporting the action path OP of the substrate transport robot 10 in the configuration area 20. As a result, the action path OP of the substrate transport robot 10 in the configuration area 20 can be exported by arbitrarily combining the data of the substrate transport robot 10 and the data of the configuration area 20. Furthermore, in this embodiment, a virtual image VI containing the substrate transport robot 10 and the configuration area 20 is displayed on the display unit 220 based on integrated data that combines the read CAD data CD1 of the transport robot and the CAD data CD2 of the configuration area. This allows the user to easily review the predetermined conditions for deriving the action path OP of the substrate transport robot 10 in the configuration area 20 by viewing the virtual image VI containing the substrate transport robot 10 and the configuration area 20 displayed on the display unit 220.

Furthermore, in this embodiment, displaying the virtual image VI on the display unit 220 includes displaying a three-dimensional virtual image VIb on the display unit 220. This allows the user to view the visually easily recognizable three-dimensional virtual image VIb, including the substrate transport robot 10 displayed on the display unit 220 and the placement area 20, while simultaneously setting the predetermined conditions for exporting the action path OP of the substrate transport robot 10 in the placement area 20.

Furthermore, in this embodiment, the method for generating the motion path of the substrate transport robot 10 includes: changing at least one of the size, position, posture, size, and position of the components of the substrate transport robot 10 in the integrated data ID according to the user's operation. This allows the user to generate the motion path OP even when at least one of the following states has been changed: size, position, posture, size, and position of the components of the configuration area 20. As a result, the degrees of freedom in setting at least one of the following parameters—the size, position, posture, size, and position of the components of the mounting area 20—as predetermined conditions for generating the operation path (OP), can be increased.

Furthermore, in this embodiment, changing at least one of the size and position of the components of the substrate transport robot 10 includes changing at least one of the length and position of the link 12a and the hand 11, which are components of the substrate transport robot 10, according to the user's operation. This allows the user to generate an operation path OP even when the length and position of the link 12a and the hand 11, which are components of the substrate transport robot 10, are arbitrarily changed according to the integrated data ID. As a result, the freedom of setting the length and position of at least one of the predetermined conditions for generating the operation path OP is increased.

Furthermore, in this embodiment, reading the configuration area CAD data CD2 includes reading the configuration area CAD data CD2, which includes the substrate mounting portion 22 for mounting the substrate W. Furthermore, changing at least one of the size and position of the components of the configuration area 20 includes changing the position of the substrate mounting portion 22, which is a component of the configuration area 20, in the integrated data ID according to the user's operation. This allows the user to export the operation path OP even when the position of the substrate mounting portion 22, which is a component of the configuration area 20, in the integrated data ID is arbitrarily changed. As a result, the freedom of setting the position of the substrate mounting portion 22, which is a predetermined condition for exporting the operation path OP, is increased.

Furthermore, in this embodiment, reading the configuration area CAD data CD2 includes reading the configuration area CAD data CD2 containing the obstacle 30 that will become an obstacle when the substrate transport robot 10 performs its actions. Furthermore, changing at least one of the size and position of a component of the configuration area 20 includes changing at least one of the position and size of the obstacle 30, which is a component of the configuration area 20, in the integrated data ID according to the user's operation. Therefore, the user can export the operation path OP even when at least one of the position and size of the obstacle 30, which is a component of the configuration area 20, in the integrated data ID has been changed. As a result, the freedom to set at least one of the position and size of the obstacle 30, which serves as a predetermined condition for generating the action path (OP), is increased.

Furthermore, in this embodiment, reading the configuration area CAD data CD2 includes reading the configuration area CAD data CD2 containing the obstacle 30 that will become an obstacle when the substrate transport robot 10 performs its actions. Furthermore, the method for generating the motion path of the substrate transport robot 10 includes displaying the derived motion path OP on the display unit 220. Furthermore, displaying the derived motion path OP on the display unit 220 includes displaying the size of the gap G between the substrate transport robot 10 on the motion path OP in the integrated data ID and the obstacle 30, which is a component of the configuration area 20, on the display unit 220. Therefore, the user can identify the size of the gap G by observing the size of the gap G between the substrate transport robot 10 on the motion path OP displayed on the display unit 220 and the obstacle 30, which is part of the placement area 20. As a result, the user can examine the size of the gap G between the substrate transport robot 10 and the placement area 20 on the motion path OP of the placement area 20.

Furthermore, in this embodiment, the case in which the virtual image VI is displayed on the display unit 220 includes: when one of the two-dimensional data IDa in the integrated data ID corresponding to the two-dimensional virtual image VIa and the three-dimensional data IDb in the integrated data ID corresponding to the three-dimensional virtual image VIb is changed according to the user's operation, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220 while the change is reflected on the other side of the two-dimensional data IDa and the three-dimensional data IDb. Therefore, when one of the two-dimensional data IDa and the three-dimensional data IDb is changed, the other of the two-dimensional data IDa and the three-dimensional data IDb will be reflected. Thus, even if the user changes either the two-dimensional data IDa or the three-dimensional data IDb, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb based on the changed data can be displayed on the display unit 220 in the desired timing. As a result, user operability and visual recognition are improved when setting the predetermined conditions for exporting the action path OP.

Furthermore, in this embodiment, the method for generating the motion path of the substrate transport robot 10 includes reading the substrate CAD data CD3, which is computer-aided design data belonging to the substrate W and is used in the exported motion path OP. This allows the user to arbitrarily combine and read the transport robot CAD data CD1, the configuration area CAD data CD2, and the substrate CAD data CD3 used when exporting the motion path OP of the substrate transport robot 10 in the configuration area 20. As a result, the data of the substrate transport robot 10, the data of the configuration area 20, and the substrate CAD data CD3 can be arbitrarily combined to export the motion path OP of the substrate transport robot 10 in the configuration area 20. Furthermore, in this embodiment, displaying the virtual image VI on the display unit 220 includes: displaying the virtual image VI, which includes the substrate transport robot 10, the configuration area 20, and the substrate W, on the display unit 220 based on an integrated data ID that integrates the read CAD data CD1 of the transport robot, the CAD data CD2 of the configuration area, and the CAD data CD3 of the substrate. This allows the user to more easily review the predetermined conditions for deriving the action path OP of the substrate transport robot 10 in the configuration area 20 by viewing the virtual image, which includes the substrate transport robot 10, the configuration area 20, and the substrate W, displayed on the display unit 220.

(The robot's movement path produces the effect of the device)

In this embodiment, the motion path generation device 200 for the substrate transport robot 10 includes a control unit 240. This control unit 240 reads the transport robot CAD data CD1, which is part of the computer-aided design data of the substrate transport robot 10, and the configuration area CAD data CD2, which is part of the computer-aided design data of the configuration area 20, used to export the motion path OP of the substrate transport robot 10 in the configuration area 20 where the substrate transport robot 10 and the substrate W are configured. Therefore, similar to the motion path generation method for the substrate transport robot 10 described above, the user can arbitrarily combine and read the transport robot CAD data CD1 and the configuration area CAD data CD2 used when exporting the motion path OP of the substrate transport robot 10 in the configuration area 20. As a result, similar to the above-described method for generating the motion path of the substrate transport robot 10, a substrate transport robot 10 motion path generation device 200 can be provided, which can arbitrarily combine the data of the substrate transport robot 10 and the data of the arrangement area 20 to generate the motion path OP of the substrate transport robot 10 in the arrangement area 20. Furthermore, in this embodiment, the control unit 240 displays a virtual image VI containing the substrate transport robot 10 and the arrangement area 20 on the display unit 220 based on an integrated data ID formed by integrating the read transport robot CAD data CD1 and the arrangement area CAD data CD2. Therefore, similar to the method for generating the motion path of the substrate transport robot 10 described above, the user can easily review the predetermined conditions for generating the motion path OP of the substrate transport robot 10 in the placement area 20 by viewing the virtual image VI displayed on the display unit 220, which includes the substrate transport robot 10 and the placement area 20.

[Variation Example]

Furthermore, it should be understood that all features of the embodiments disclosed herein are illustrative and not limiting. The scope of this disclosure is indicated by the scope of the patent application, not by the description of the embodiments described above, and includes the equivalent meaning of the scope of the patent application and all variations (variations) within that scope.

For example, the example shown in the above embodiment is that the case of displaying the virtual image VI on the display unit 220 includes: when one of the two-dimensional data IDa in the integrated data ID corresponding to the two-dimensional virtual image VIa and the three-dimensional data IDb in the integrated data ID corresponding to the three-dimensional virtual image VIb is changed according to the user's operation, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on the display unit 220 while reflecting it to the other of the two-dimensional data IDa and the three-dimensional data IDb. However, this disclosure is not limited to this. In this disclosure, the display of virtual image VI on display unit 220 may not include the following scenario: when, based on user operation, one of the two-dimensional data IDa in the integrated data ID corresponding to two-dimensional virtual image VIa and the three-dimensional data IDb in the integrated data ID corresponding to three-dimensional virtual image VIb is changed, at least one of the two-dimensional virtual image VIa and the three-dimensional virtual image VIb is displayed on display unit 220 while the other of the two-dimensional data IDa and the three-dimensional data IDb are reflected.

Furthermore, the example shown in the above embodiment, where the exported motion path OP is displayed on the display unit 220, includes displaying the size of the gap G between the substrate transport robot 10 on the motion path OP in the integrated data ID and the obstacle 30, which is a component of the arrangement area 20, on the display unit 220. However, this disclosure is not limited to this. In this disclosure, the case where the exported motion path OP is displayed on the display unit 220 may also not include displaying the size of the gap G between the substrate transport robot 10 on the motion path OP in the integrated data ID and the obstacle 30, which is a component of the arrangement area 20, on the display unit 220.

Furthermore, the example shown in the above embodiment illustrates that changing at least one of the size and position of a component of configuration area 20 includes changing at least one of the position and size of the obstacle 30, which is a component of configuration area 20, in the integrated data ID according to user operation. However, this disclosure is not limited to this. In this disclosure, changing at least one of the size and position of a component of configuration area 20 may also not include changing at least one of the size and position of the obstacle 30, which is a component of configuration area 20, in the integrated data according to user operation.

Furthermore, the example shown in the above embodiment illustrates that changing at least one of the size and position of the components of the configuration area 20 includes changing the position of the substrate mounting portion 22, which is a component of the configuration area 20, according to user operation. However, this disclosure is not limited to this. In this disclosure, changing at least one of the size and position of the components of the configuration area 20 may also not include changing the position of the substrate mounting portion 22, which is a component of the configuration area 20, according to user operation.

Furthermore, the example shown in the above embodiment illustrates that changing at least one of the size and position of a component of the substrate transport robot 10 includes changing at least one of the length and position of at least one of the link 12a and the hand 11, which are components of the substrate transport robot 10, as recorded in the integrated data ID, according to user operation. However, this disclosure is not limited to this. In this disclosure, changing at least one of the size and position of a component of the substrate transport robot 10 may also not include changing at least one of the length and position of at least one of the link 12a and the hand 11, which are components of the substrate transport robot 10, as recorded in the integrated data ID, according to user operation.

Furthermore, in the example shown in the above embodiment, the method for generating the motion path of the substrate transport robot 10 includes: changing at least one of the following based on the user's operation: the size of a component of the substrate transport robot 10, the position of a component of the substrate transport robot 10, the posture of the substrate transport robot 10, the size of a component of the configuration area 20, and the position of a component of the configuration area 20. However, this disclosure is not limited to this. In this disclosure, the method for generating the motion path of the substrate transport robot 10 may also not include: changing at least one of the following based on the user's operation: the size of a component of the substrate transport robot 10, the position of a component of the substrate transport robot 10, the posture of the substrate transport robot 10, the size of a component of the configuration area 20, and the position of a component of the configuration area 20.

Furthermore, the example shown in the above embodiment illustrates that displaying the virtual image VI on the display unit 220 includes displaying a three-dimensional virtual image VIb on the display unit 220; however, this disclosure is not limited to this. In this disclosure, displaying the virtual image VI on the display unit 220 may also exclude displaying the three-dimensional virtual image VIb on the display unit 220.

Furthermore, the example shown in the above embodiment illustrates that displaying the virtual image VI on the display unit 220 includes: displaying the virtual image VI, which includes the substrate transport robot 10, the configuration area 20, and the substrate W, on the display unit 220 based on an integrated data ID that integrates the read CAD data CD1 of the transport robot, the CAD data CD2 of the configuration area, and the CAD data CD3 of the substrate. However, this disclosure is not limited to this. In this disclosure, displaying the virtual image VI on the display unit 220 may also include: displaying the virtual image VI, which includes the substrate transport robot 10 and the configuration area 20 but not the substrate W, on the display unit 220 based on an integrated data ID that integrates the read CAD data CD1 of the transport robot and the CAD data CD2 of the configuration area but not the substrate CAD data CD3.

Furthermore, the example shown in the above embodiment illustrates a method for generating the motion path of the substrate transport robot 10 that includes reading substrate CAD data CD3, which is computer-aided design data belonging to the substrate W and is exported from the motion path OP. However, this disclosure is not limited to this. In this disclosure, the method for generating the motion path of the substrate transport robot 10 may also not include reading substrate CAD data CD3, which is computer-aided design data belonging to the substrate W and is exported from the motion path OP.

Furthermore, in the example shown in the above embodiment, the workpiece is a substrate W, the terminal effect is a hand 11, and the robotic arm 12 is a horizontal multi-joint robotic arm. However, this disclosure is not limited to this. In this disclosure, the workpiece may be anything other than the substrate W, the terminal effect may be anything other than the hand 11, and the robotic arm 12 may be anything other than a horizontal multi-joint robotic arm.

Furthermore, in the example shown in the above embodiment, the configuration area 20 includes a substrate transport chamber 21 for transporting the substrate W and a substrate mounting portion 22 adjacent to the substrate transport chamber 21 for mounting the substrate W; however, this disclosure is not limited to this. The configuration area 20 may also include the substrate transport chamber 21 for transporting the substrate W, but without including the substrate mounting portion 22 adjacent to the substrate transport chamber 21 for mounting the substrate W.

The functions of the components disclosed in this specification are achievable using general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), conventional circuits, and/or combinations thereof, configured or programmed to perform the disclosed functions. Processors include transistors, other circuits, etc., and can therefore be considered as processing circuits or circuits. In this disclosure, circuits, units, or means are hardware that performs the listed functions, or hardware programmed to perform the listed functions. Hardware may be the hardware disclosed in this specification, or other known hardware programmed or configured to perform the listed functions. When hardware is considered as a type of circuit, the circuit, means, or unit is a combination of hardware and software, with the software used in the hardware and/or processor's configuration.

[Attitude]

Those skilled in the art will understand that the illustrative embodiments described above are specific examples of the following forms.

(Style 1)

A method for generating a robot's motion path includes the following steps:

The robot's movement path within a designated area for arranging the robot and workpiece is simulated according to predetermined conditions. The robot comprises an end effector and a robotic arm. The end effector holds the workpiece, and the robotic arm is equipped with the end effector and interconnected by a plurality of links.

Read the robot CAD data belonging to the aforementioned robot's computer-aided design data and the configuration area CAD data belonging to the aforementioned configuration area's computer-aided design data, which are exported and used in the aforementioned action path; and

The virtual image containing the robot and the configuration area is displayed on the display unit based on the integrated data, which combines the read CAD data of the robot and the configuration area.

(Style 2)

The robot motion path generation method as described in Type 1, wherein,

Displaying the aforementioned virtual image on the aforementioned display unit includes displaying a three-dimensional version of the aforementioned virtual image on the aforementioned display unit.

(Style 3)

The method for generating the robot's motion path as described in type 1 or 2 has the following features:

The size, position, posture, size, and position of the aforementioned robot components in the integrated data may be changed according to user operation.

(Style 4)

The robot motion path generation method as described in Type 3, wherein,

The situation of changing at least one of the size and position of the aforementioned components of the robot includes: changing at least one of the length and position of the aforementioned linkage and the aforementioned terminal effect, which are the aforementioned components of the robot, in the aforementioned integrated data according to the operation of the aforementioned user.

(Style 5)

The robot motion path generation method as described in Type 3, wherein,

Reading the aforementioned configuration area CAD data includes: reading the aforementioned configuration area CAD data containing the workpiece mounting section for mounting the aforementioned workpiece;

The situation where at least one of the size and position of the aforementioned components of the aforementioned configuration area is changed includes: changing the position of the aforementioned workpiece mounting portion, which is a aforementioned component of the aforementioned configuration area, in the aforementioned integrated data based on the aforementioned user's operation.

(Style 6)

The robot motion path generation method as described in Type 3, wherein,

Reading the aforementioned configuration area CAD data includes: reading the aforementioned configuration area CAD data containing obstacles that would become obstacles when the robot performs its actions;

The situation where at least one of the size and position of the aforementioned components of the aforementioned configuration area is changed includes: the situation where, based on the operation of the aforementioned user, at least one of the position and size of the aforementioned obstacles in the aforementioned integrated data that are the aforementioned components of the aforementioned configuration area is changed.

(Style 7)

The robot motion path generation method as described in any of the types 1 to 6, wherein,

Reading the aforementioned configuration area CAD data includes: reading the aforementioned configuration area CAD data containing obstacles that would become obstacles when the robot performs its actions;

The method for generating the motion path of the substrate conveying robot includes: displaying the generated motion path on the display unit;

Displaying the aforementioned action path on the aforementioned display unit includes displaying the size of the gap between the robot on the aforementioned action path in the aforementioned integrated data and the aforementioned obstacle, which is part of the aforementioned configuration area, on the aforementioned display unit.

(Style 8)

The robot motion path generation method as described in any of the types 1 to 7, wherein,

The display of the aforementioned virtual image on the aforementioned display unit includes: when, based on the user's operation, one of the two-dimensional data corresponding to the aforementioned two-dimensional virtual image in the aforementioned integrated data and the three-dimensional data corresponding to the aforementioned three-dimensional virtual image in the aforementioned integrated data is changed, at least one of the aforementioned two-dimensional virtual image and the aforementioned three-dimensional virtual image is displayed on the aforementioned display unit while the change is reflected in the other of the aforementioned two-dimensional data and the aforementioned three-dimensional data.

(Style 9)

The robot motion path generation method described in any of the types 1 to 8 is further provided with:

Read the workpiece CAD data, which belongs to the aforementioned workpiece and is exported from the computer-aided design data of the aforementioned workpiece, and use it in the aforementioned action path;

Displaying the aforementioned virtual image on the aforementioned display unit includes: displaying the aforementioned virtual image, including the aforementioned robot, the aforementioned configuration area, and the aforementioned workpiece, on the aforementioned display unit based on the aforementioned integrated data, which integrates the read CAD data of the aforementioned robot, the aforementioned CAD data of the aforementioned configuration area, and the aforementioned CAD data of the aforementioned workpiece.

(Style 10)

The robot motion path generation method as described in any of the types 1 to 9, wherein,

The aforementioned workpiece is a substrate;

The aforementioned terminal effect is a hand;

The aforementioned robotic arm is a horizontal, multi-segment robotic arm;

The aforementioned configuration area includes a substrate transport chamber for transporting the aforementioned substrate and a substrate mounting section connected to the aforementioned substrate transport chamber and for mounting the aforementioned substrate.

(Style 11)

A robot motion path generation device, comprising:

Display section; and

The control unit simulates the movement path of a robot within a designated area for arranging the robot and workpiece, based on predetermined conditions. The robot includes a terminal effector and a robotic arm. The terminal effector holds the workpiece, and the robotic arm is equipped with the terminal effector and interconnected by a plurality of links. The control unit reads the robot's CAD data (part of the robot's computer-aided design data) and the designated area's CAD data (part of the designated area's computer-aided design data), and displays a virtual image of the robot and the designated area on a display unit based on integrated data combining the read robot CAD data and the designated area CAD data.

200: Motion path generation device

210:Input department

220: Display Unit

230: Memory Section

240: Control Department

CD:CAD data

CD1: Transfer robot CAD data

CD2: Configure Area CAD Data

CD3: Substrate CAD data

ID: Data Integration

IDa: 2D data

IDb: 3D data

MP: Action Path Generator

VI: Virtual Images

VIa: Two-dimensional virtual images

VIb: Three-dimensional virtual images

Claims (10)

A method for generating a robot's motion path includes the following steps: exporting, in a simulated manner, a robot's motion path within a configuration area for configuring the robot and a workpiece, based on predetermined conditions. The robot includes a terminal effector and a robotic arm, the terminal effector holding the workpiece, and the robotic arm having the terminal effector mounted on it and interconnected by a plurality of links; reading robot CAD data belonging to the robot's computer-aided design data and configuration area CAD data belonging to the configuration area's computer-aided design data, both exported for use in the motion path. The virtual image containing the robot and the configuration area is displayed on the display unit based on integrated data that integrates the read robot CAD data and the read configuration area CAD data; and the size and position of the components of the configuration area in the integrated data are changed according to the user's operation. The case of reading the configuration area CAD data includes: reading the configuration area CAD data that includes a workpiece mounting part for mounting the workpiece; the case of changing at least one of the size and position of the components of the configuration area includes: changing the position of the workpiece mounting part, which is a component of the configuration area, in the integrated data according to the user's operation. The method for generating the robot's motion path as described in claim 1, wherein displaying the aforementioned virtual image on the aforementioned display unit includes displaying the aforementioned three-dimensional virtual image on the aforementioned display unit. The method for generating the robot's motion path as described in claim 1 is further provided with the following feature: changing at least one of the size of the aforementioned robot components, the position of the aforementioned robot components, and the posture of the aforementioned robot in the aforementioned integrated data according to the user's operation. The method for generating the robot's motion path as described in claim 3, wherein changing at least one of the size and position of the aforementioned components of the robot includes changing the length and position of at least one of the aforementioned linkage and the aforementioned terminal effect, which are the aforementioned components of the robot, in the aforementioned integrated data according to the operation of the aforementioned user. The method for generating a robot's motion path as described in claim 1, wherein reading the aforementioned configuration area CAD data includes: reading the aforementioned configuration area CAD data containing obstacles that would become obstacles when the robot performs an action; and changing at least one of the size and position of the aforementioned components of the configuration area includes: changing at least one of the position and size of the aforementioned obstacles that are the aforementioned components of the configuration area in the aforementioned integrated data according to the operation of the aforementioned user. The robot motion path generation method as described in claim 1, wherein reading the aforementioned configuration area CAD data includes: reading the aforementioned configuration area CAD data containing obstacles that would become obstacles when the robot performs an action; the robot motion path generation method includes: displaying the derived motion path on the aforementioned display unit; displaying the motion path on the aforementioned display unit includes: displaying the size of the gap between the robot on the aforementioned motion path in the aforementioned integrated data and the aforementioned obstacle that is a component of the aforementioned configuration area on the aforementioned display unit. The method for generating the robot's motion path as described in claim 1, wherein displaying the aforementioned virtual image on the aforementioned display unit includes: when, based on the user's operation, one of the two-dimensional data in the aforementioned integrated data corresponding to the two-dimensional virtual image and the three-dimensional data in the aforementioned integrated data corresponding to the three-dimensional virtual image are changed, the change is reflected to the other of the aforementioned two-dimensional data and the aforementioned three-dimensional data, while at least one of the aforementioned two-dimensional virtual image and the aforementioned three-dimensional virtual image is displayed on the aforementioned display unit. The method for generating a robot's motion path as described in claim 1 is further provided with: reading workpiece CAD data that is exported from computer-aided design data belonging to the aforementioned workpiece and used in the aforementioned motion path; and displaying the aforementioned virtual image on the aforementioned display unit includes: displaying the aforementioned virtual image, including the aforementioned robot, the aforementioned configuration area, and the aforementioned workpiece, on the aforementioned display unit based on the aforementioned integrated data that integrates the read aforementioned robot CAD data, the aforementioned configuration area CAD data, and the aforementioned workpiece CAD data. The method for generating the robot's motion path as described in claim 1, wherein the aforementioned workpiece is a substrate; the aforementioned terminal effector is a hand; the aforementioned robotic arm is a horizontal multi-joint robotic arm; and the aforementioned configuration area includes a substrate transport chamber for transporting the aforementioned substrate and a substrate placement section connected to the aforementioned substrate transport chamber and for placing the aforementioned substrate. A robot motion path generation device, comprising: a display unit; and The control unit simulates the movement path of the robot in the configuration area for configuring the robot and the workpiece according to predetermined conditions. The robot includes a terminal effector and a robotic arm. The terminal effector holds the workpiece, and the robotic arm is equipped with the terminal effector and is connected by a plurality of links. The control unit reads the robot CAD data belonging to the computer-aided design data of the robot and the configuration area CAD data belonging to the computer-aided design data of the configuration area, which are used in the aforementioned movement path. Based on the integrated data formed by integrating the read robot CAD data and the configuration area CAD data, the control unit displays a virtual image containing the robot and the configuration area on the aforementioned display unit. The aforementioned control unit changes at least one of the size of the aforementioned configuration area component and the position of the aforementioned configuration area component in the aforementioned integrated data according to the user's operation; the case of reading the aforementioned configuration area CAD data includes: reading the aforementioned configuration area CAD data including the workpiece mounting part for mounting the aforementioned workpiece; the case of changing at least one of the size and position of the aforementioned configuration area component includes: changing the position of the aforementioned workpiece mounting part, which is a aforementioned component of the aforementioned configuration area, in the aforementioned integrated data according to the aforementioned user's operation.