TWI900231B - Teaching support device, teaching support method, and teaching support program - Google Patents

Abstract

The present invention aims to provide a teaching support device that can reduce the time required to determine the position of a prohibited area. A teaching support device (30) is a device that displays on a display (21) an image of a model of a robot (10) having an arm (12) and a hand (14) connected to the arm (12). The teaching support device (30) includes a setter (321) that sets a robot model (10m) obtained by modeling the robot (10) and a prohibited area that is not an operating area of the robot model (10m); a receiver (322) that receives changes to the prohibited area; a determiner (326) that determines interference between the robot model (10m) and the prohibited area; a deriver (323) that derives the posture of the robot model (10m); and an image generator (324) that generates an image of the prohibited area and the robot model (10m). When the prohibited area is changed via the receiver (322), the image generator (324) generates an image of the changed and moving prohibited area. When the determiner (326) determines interference between the robot model (10m) and the changed prohibited area, the derivers (323) derives the posture of the robot model (10m) that does not interfere with the prohibited area, and the image generator (324) changes the posture of the robot model (10m) in the image to the posture derived by the deriver (323).

Description

Teaching support device, teaching support method, and teaching support program

The present invention relates to a teaching support device, a teaching support method, and a teaching support program.

Teaching support devices that confirm the posture of robots are already known. For example, the teaching support device disclosed in Patent Document 1 confirms the movements of a robot model by reproducing the robot model's movements on a touch screen based on a motion trajectory calculated from a set starting point and end point.

[Prior Art Literature]

[Patent Literature]

Patent Document 1: Japanese Patent No. 6526098

However, in such teaching support devices, the robot model's movements are displayed after the user sets a start point and an end point for the robot model. However, there are cases where the user wishes to change a prohibited area of the robot model that is not part of the robot's movement area. In such cases, the user must confirm multiple prohibited area positions to find the appropriate location for the prohibited area. In other words, the user must set the prohibited areas one by one and confirm the robot model's posture one by one to see if a posture that does not interfere with the prohibited area is possible. Consequently, determining the prohibited area's position based on the robot model's posture increases the time required.

In view of the above, an object of the present invention is to shorten the time for determining the location of a prohibited area.

The teaching support device of the present invention is a teaching support device that displays an image of a robot model on a display, wherein the robot has an arm and an actuator connected to the end of the arm, and the teaching support device includes a setter, an acceptor, a judger, an exporter, and an image generator. The setter sets a robot model that models the robot and a prohibited area of the robot model that is not an action area, the acceptor accepts changes to the prohibited area, the judger judges interference between the robot model and the prohibited area, and the exporter exports the image. The image generator generates an image of the prohibited area and the robot model. When the prohibited area is changed by the receiver, the image generator generates an image of the changed and moved prohibited area. When the determiner determines that the robot model interferes with the changed prohibited area, the exporter exports a pose of the robot model that does not interfere with the prohibited area, and the image generator changes the pose of the robot model in the image to the pose exported by the exporter.

The teaching support method of the present invention is a teaching support method for displaying an image of a robot model on a display, wherein the robot has an arm and an end actuator connected to the arm. The teaching support method of the present invention includes the steps of setting a robot model that models the robot and a prohibited area of the robot model that is not an action area, accepting changes to the prohibited area, determining interference between the robot model and the prohibited area, and deriving a posture of the robot model. When interference between the robot model and the modified prohibited area is determined, a step is further performed to derive a pose of the robot model that does not interfere with the prohibited area, and an image of the prohibited area and the robot model is generated. When the prohibited area is changed, an image of the modified and moved prohibited area is generated. When interference between the robot model and the modified prohibited area is determined, the step is further performed to change the pose of the robot model in the image to the derived pose.

The teaching support program of the present invention is a teaching support program that displays an image of a robot model on a display, wherein the robot has an arm and an actuator connected to the end of the arm, and the teaching support program enables a computer to realize the function of setting a robot model that models the robot and a prohibited area of the robot model that is not an action area, the function of accepting changes to the prohibited area, the function of determining interference between the robot model and the prohibited area, and the function of deriving the posture of the robot model. When interference between the robot model and the changed prohibited area is determined, the function further includes deriving a posture of the robot model that does not interfere with the prohibited area and generating an image of the prohibited area and the robot model. When the prohibited area is changed, an image of the modified and moved prohibited area is generated. When interference between the robot model and the changed prohibited area is determined, the function further includes changing the posture of the robot model in the image to the derived posture.

The teaching support device, the teaching support method, and the teaching support program can shorten the time required to determine the location of a prohibited area.

1: Cleanroom

2: Basket

2m: Basket model

4: Front-opening wafer transfer box

4m: Front-opening wafer transfer box model

5: Processing device

5m: Processing device model

6: Interference

6m: Interference Model

10: Robot

10m:Robot model

12,12m: Arm

14,14m: Hand (end effector)

14am, 14am: First hand (first terminal executor)

14b, 14bm: Second Hand (Second End Executor)

21: Display

30: Teaching support device

311: Teaching Support Program

321: Configurator

322: Receiver

323: Exporter

324: Image Generator

325: Alarm

326: Determinator

FIG1 is a schematic diagram showing a teaching support system including a teaching support device according to an embodiment.

Figure 2 is a schematic diagram of a robot used in a clean room.

Figure 3 is a block diagram showing the structure of the teaching support device.

Figure 4 shows images of each model displayed on the monitor.

Figure 5 is a flow chart showing the operation of the teaching support device.

Figure 6 shows an image of a chassis model including the initial specifications.

Figure 7 shows an image before the position of the interferer model is changed.

Figure 8 shows an image after the position of the interferer model is changed.

FIG9 is a diagram showing an image in which the display of the robot model is changed due to interference between the robot model and the interferer model.

Figure 10 shows an image of a robot model with a changed posture.

FIG11 is a diagram showing an image in which the robot model display is changed due to interference between the robot model and the interfering object model in the teaching support device according to Modification 1.

FIG12 is a diagram showing an image of a robot model with a changed posture in the teaching support device according to Modification 1.

FIG13 is a diagram showing an image in which the robot model display is changed due to interference between the robot model and the interfering object model in the teaching support device according to Modification 2.

FIG14 is a diagram showing an image of a robot model whose type has been changed in the teaching support device according to Modification 2.

Figure 15 shows three-dimensional images of various models displayed on a monitor.

The following describes an exemplary embodiment in detail with reference to the accompanying drawings. Figure 1 is a schematic diagram of a teaching support system 20 including a teaching support device 30 according to the embodiment. The teaching support system 20 determines the layout of a robot-using environment based on, for example, an image of a robot model. The teaching support system 20 includes the teaching support device 30, a display 21, and a mouse 22.

The teaching support device 30 generates an image of the robot model and displays the generated image on the display 21. The display 21 receives signals from the teaching support device 30 and displays the image. The display 21 is, for example, a liquid crystal display or an organic EL display. The mouse 22 receives input operations from the user and outputs signals in response to the input operations to the teaching support device 30. The mouse 22 is an example of an input device.

Figure 2 is a schematic diagram of a robot 10 used in cleanroom 1. The robot 10 shown in Figure 2 is an example of a robot targeted by the teaching support device 30. The robot 10 is a horizontal multi-joint robot (scalar robot). The robot 10 includes a base 11, an arm 12 connected to the base 11, and a hand 14 connected to the arm 12. The arm 12 is connected to the base 11 so as to be rotatable in the horizontal direction. The arm 12 has a plurality of interconnected links 13. The hand 14 is an example of an end effector.

The arm 12 is composed of two connecting rods 13. The two connecting rods 13 are horizontally rotatably connected to each other. From the side of the base 11, the two connecting rods 13 are sequentially designated as a first connecting rod 13a and a second connecting rod 13b. The first connecting rod 13a is rotatably connected to the base 11 about a first axis L1 extending in the vertical direction. The second connecting rod 13b is rotatably connected to the first connecting rod 13a about a second axis L2 extending in the vertical direction. When the first connecting rod 13a and the second connecting rod 13b are not distinguished, they are simply referred to as "connecting rod 13."

The robot 10 has two hands 14: a first hand 14a and a second hand 14b. The first hand 14a is an example of a first end effector, and the second hand 14b is an example of a second end effector. The first hand 14a is located lower than the second hand 14b. The basic structure of each of the first and second hands 14a and 14b is identical. The hand 14 is shaped like a horizontally extending plate, with the tip of the hand 14 forked. In other words, the hand 14 is roughly Y-shaped when viewed through its thickness. The first and second hands 14a and 14b are rotatably connected to the second link 13b around a third axis L3 extending vertically. The first axis L1, the second axis L2, and the third axis L3 extend parallel to each other. When the first hand 14a and the second hand 14b are not distinguished, they are simply referred to as "hand 14".

The first link 13a, second link 13b, first hand 14a, and second hand 14b are stacked in this order from bottom to top. Although not shown, the robot 10 has multiple motors that rotate and drive the two links 13 and two hands 14. The robot 10 transports the substrate S, which is an object, by placing it loosely on the top surface of the hand 14. In other words, the object is simply placed on the top surface of the hand 14 and is not fixed.

Cleanroom 1 includes a housing 2, within which a robot 10 is positioned. Cleanroom 1 is used, for example, in an EFEM (Equipment Front End Module). Housing 2 is a roughly rectangular parallelepiped. The interior of housing 2 is a clean space. Robot 10 transports substrates S within cleanroom 1. Substrates S are, for example, disc-shaped semiconductor wafers.

A plurality of front-opening wafer pods (FOUPs) 4 and a plurality of processing devices 5 are mounted on the chassis 2 from the outside of the chassis 2. In this example, three front-opening wafer pods 4 and two processing devices 5 are arranged in the chassis 2. The plurality of front-opening wafer pods 4 are arranged on a side wall in the chassis 2. The plurality of processing devices 5 are arranged on a side wall in the chassis 2, and the side wall is opposite to the side wall on which the front-opening wafer pods 4 are arranged. The interior of each of the front-opening wafer pods 4 and the processing devices 5 is communicable with the interior of the chassis 2. The front-opening wafer pod 4 stores substrates S. The front-opening wafer pod 4 stores a plurality of substrates S at equal intervals in the vertical direction, for example, in a horizontal state. The processing device 5 processes the substrates S. The processing device 5 is a processing device that performs various processes on the substrate S, such as heat treatment, impurity introduction treatment, and thin film formation treatment.

The robot 10 transports substrates S between the front-loading pod 4 and the processing equipment 5. Specifically, the arm 12 and hand 14 transport substrates S between the front-loading pod 4 and the processing equipment 5. The interior of the housing 2, the front-loading pod 4, and the processing equipment 5 corresponds to the robot 10's movable area.

Interference objects 6 may be placed within the housing 2. Interference objects 6 may be static or dynamic. Static interference objects 6 include, for example, pillars, screws, wiring covers, and other stationary interference objects. Dynamic interference objects 6 include, for example, other robots, blinds, and other moving interference objects.

The teaching support device 30 displays an image of a model of the robot 10 on the display 21. The robot 10 includes an arm 12 and a hand 14 connected to the arm 12. The teaching support device 30 also displays the robot 10 model's action area and the robot 10 model's prohibited area (not the action area) on the display 21. When the prohibited area is changed by the user, the teaching support device 30 generates an image of the changed prohibited area. If the changed prohibited area interferes with the robot 10 model, the teaching support device 30 generates an image of the robot 10 model that does not interfere with the prohibited area. Figure 3 is a block diagram showing the structure of the teaching support device 30. The teaching support device 30 includes a storage device 31, a processor 32, and a memory 33.

The processor 32 performs various computations. For example, the processor 32 is implemented using a processor such as a CPU (Central Processing Unit). The processor 32 may also be implemented using an MCU (Microcontroller Unit), an MPU (Microprocessor Unit), an FPGA (Field Programmable Gate Array), a PLC (Programmable Logic Controller), a system LSI, or the like.

The storage device 31 stores various programs and data executed by the processor 32. The storage device 31 is formed using nonvolatile memory, an HDD (hard drive), or an SSD (solid-state drive). The storage device 31 stores control programs such as a teaching support program 311. The teaching support program 311 is a teaching support program that enables the computer, i.e., the teaching support device 30, to implement various functions such as generating images such as a model of the robot 10 displayed on the display 21. The teaching support program 311 is constructed based on, for example, a genetic algorithm.

The memory 33 temporarily stores data, etc. For example, the memory 33 is formed using a volatile memory.

The processor 32 implements various functions by reading and expanding control programs such as the teaching support program 311 from the storage device 31 into the memory 33. Specifically, the processor 32 includes a setter 321, an acceptor 322, an exporter 323, an image generator 324, and a determiner 326 as functional blocks. The processor 32 may also include an alarm 325 as a functional block.

The setter 321 sets the robot model 10m that models the robot 10 and the prohibited area of the robot model 10m that is not the action area. The setter 321 sets the chassis model 2m that models the chassis 2 and the interferer model 6m that models the interferer 6 as prohibited areas. Specifically, the inside of the chassis model 2m is the action area, and the outside of the chassis model 2m is the prohibited area. The inside of the interferer model 6m is the prohibited area. The setter 321 also sets the front-opening wafer cassette model 4m that models the front-opening wafer cassette 4 and the processing device model 5m that models the processing device 5. Here, each model is explained. Figure 4 is a schematic diagram showing the images of each model displayed on the display 21. The image shown in Figure 4 corresponds to the layout shown in Figure 2.

The robot model 10m includes elements that model the arm 12 and hand 14 of the robot 10. Each element of the robot model 10m is assigned a symbol that is the symbol of the corresponding element of the robot 10 with "m" added. That is, the robot model 10m has an arm 12m and a hand 14m. The arm 12m includes a connecting rod 13m. Referring to Figure 7, the connecting rod 13m includes a first connecting rod 13am and a second connecting rod 13bm. Referring to Figure 7, the hand 14m includes a first hand 14am and a second hand 14bm. The robot model 10m also includes a substrate Sm placed on the hand 14m. A substrate Sm is placed on each of the first hand 14am and the second hand 14bm. The robot model 10m omits the base 11 of the robot 10. When the distinction between the first connecting rod (13am) and the second connecting rod (13bm) is not made, it is simply called "connecting rod 13m." When the distinction between the first hand (14am) and the second hand (14bm) is not made, it is simply called "hand 14m."

The position of the robot model 10m is defined, for example, by the position of the first axis L1, the rotation center of the first link 13am. It should be noted that the position of the robot model 10m can be defined by the angle of the first link 13am, or, if the base 11 of the robot 10 is modeled, by the position of the modeled base.

The housing model 2m models the side walls of the housing 2, i.e., the planar shape of the housing 2.

The front-opening pod model 4m models the side walls of the front-opening pod 4, that is, the planar shape of the front-opening pod 4. Target positions P1, P2, and P3 are defined within each of the three front-opening pod models 4m. Each target position P1, P2, and P3 represents the target position of the hand 14m within the front-opening pod model 4m. In this example, the position of the hand 14m is defined by the center position of the substrate Sm placed on the hand 14m, and the target position of the hand 14m within the front-opening pod model 4m is defined by the center position of the substrate Sm housed within the front-opening pod model 4m. In other words, the position of the hand 14m when a substrate Sm within the front-opening pod model 4m is placed on the hand 14m is the target position of the hand 14m within the front-opening pod model 4m.

The processing device model 5m models the side walls of the processing device 5, that is, the planar shape of the processing device 5. Target positions P4 and P5 are set within the two processing device models 5m, respectively. Each target position P4 and P5 represents the target position of the hand 14m within the processing device model 5m. In this example, the position of the hand 14m is defined by the center position of the substrate Sm placed on the hand 14m, and the target position of the hand 14m within the processing device model 5m is defined by the center position of the substrate Sm housed within the processing device model 5m. In other words, the position of the hand 14m when a substrate Sm within the processing device model 5m is placed on the hand 14m is the target position of the hand 14m within the processing device model 5m.

The interferer model 6m models the planar shape of the interferer 6.

When setting up a model, the setter 321 sets the specifications (parameters) of each model. Specifically, regarding the specifications of the chassis model 2m, the setter 321 sets the position, planar shape, number of side walls, and size of the side walls. Regarding the specifications of the robot model 10m, the setter 321 sets the relative position of the robot model 10m relative to the chassis model 2m, the number and length of the connecting rods 13m, the number, size, and shape of the hands 14m. Regarding the specifications of the front-opening wafer transfer box model 4m, the setter 321 sets the number, size, and shape of the front-opening wafer transfer box model 4m, as well as the relative position of the front-opening wafer transfer box model 4m relative to the chassis model 2m. The setter 321 sets the specifications of the processing device model 5m, including the number, size, shape, and relative position of the processing device model 5m relative to the housing model 2m. The setter 321 also sets the number, size, shape, and relative position of the interferer model 6m relative to the housing model 2m.

The specifications of each model include changeable specifications. The setter 321 can change at least one of the specifications of each model. For example, for a robot model 10m, the setter 321 can change the number or length of the connecting rods 13m. The setter 321 changes the changeable specifications in response to user input. The user input regarding the specifications of each model is input to the receiver 322. The setter 321 sets the specifications of each model in response to the input regarding the specifications received by the receiver 322. If there is no user input regarding a changeable specification, the setter 321 sets the changeable specification to the initial setting.

Image generator 324 generates images of the prohibited area and robot model 10m, and outputs the generated images to display 21. Specifically, image generator 324 generates images of robot model 10m, housing model 2m, front-opening pod model 4m, processing equipment model 5m, and interference object model 6m. Image generator 324 generates images of the models configured by configuration unit 321. The generated images are displayed on display 21.

Receiver 322 receives changes to the prohibited area. Setter 321 sets the prohibited area changed by receiver 322. Specifically, receiver 322 receives input regarding the prohibited area from the user via mouse 22. When receiver 322 receives a change to the prohibited area, setter 321 updates the prohibited area to the changed prohibited area. Changes to the prohibited area include, for example, adding a prohibited area, changing the shape of a prohibited area, or moving the position of a prohibited area.

The user operates the mouse 22 to select the interferer model 6m using the cursor Q displayed on the display 21 and drags it to move it. The receiver 322 accepts the drag operation of the interferer model 6m by the mouse 22 as a change in the prohibited area. Since the position of the interferer model 6m is continuously changed by the drag operation, the drag operation of the interferer model 6m by the mouse 22 is a continuous change in the prohibited area. The user may also operate the mouse 22 to reposition the interferer model 6m in the image. The repositioning of the interferer model 6m is the input of a new prohibited area. Similarly, the user may operate the mouse 22 to select the housing model 2m using the cursor Q displayed on the display 21 and drag it to change its shape. Receiver 322 receives the drag operation of the housing model 2m by the mouse 22 as a change in the prohibited area. Since the shape of the housing model 2m changes continuously due to the drag operation, the drag operation of the housing model 2m by the mouse 22 constitutes a continuous change in the prohibited area.

The determiner 326 determines whether the robot model 10m interferes with the prohibited area. For example, when the prohibited area is changed via the receiver 322, the determiner 326 determines whether the robot model 10m interferes with the changed prohibited area.

The guide 323 guides the posture of the robot model 10m. Specifically, the guide 323 guides the posture of the robot model 10m when the hand 14m of the robot model 10m is located at the target position or other positions. Other positions refer to the pass-through positions that the hand 14m passes through before reaching the target position. For example, the hand 14m waits at the pass-through position before reaching each of the front-opening wafer conveyor box model 4m and the processing device model 5m. Specifically, since the front-opening wafer conveyor box 4 and the processing device 5 have shutters in the actual clean room 1, the hand 14 waits at the pass-through position until the shutters are opened. Pass-through positions are also set for the front-opening wafer conveyor box model 4m and the processing device model 5m to correspond to the pass-through positions of the front-opening wafer conveyor box 4 and the processing device 5. The exporter 323 exports the posture of the robot model 10m within the area encompassing the housing model 2m, the front-opening wafer pod model 4m, and the processing equipment model 5m. The exporter 323 exports the posture of the robot model 10m based on factors such as the rotational angles of the first link 13am, the second link 13bm, the first hand 14am, and the second hand 14bm. Hereinafter, the "posture of the robot model 10m when the hand 14m is at the target position" will be referred to simply as the "target posture." For example, the exporter 323 exports the posture of the robot model 10m when the first hand 14am is at the target position and the second hand 14bm is at a predetermined position within the operating area.

The exporter 323 exports a pose of the robot model 10m that does not interfere with the prohibited area. When the prohibited area set by the setter 321 is changed and the determiner 326 determines whether the robot model 10m interferes with the changed prohibited area, the exporter 323 re-exports a pose of the robot model 10m that does not interfere with the changed prohibited area.

Image generator 324 generates images of the prohibited area and robot model 10m. Image generator 324 outputs the generated images to display 21. Image generator 324 generates images of chassis model 2m and interference model 6m as images of the prohibited area. Image generator 324 also generates images of front-opening cassette model 4m and processing equipment model 5m as images of the target position. Image generator 324 synthesizes the images of chassis model 2m, front-opening cassette model 4m, processing equipment model 5m, interference model 6m, and robot model 10m. Image generator 324 outputs the synthesized image to display 21.

When the target pose of the robot model 10m is derived by the exporter 323, the image generator 324 generates an image of the robot model 10m in the target pose. Specifically, in the generated image, the hand 14m of the robot model 10m is located at the target position, and the arm 12m of the robot model 10m is in a pose that achieves the positioning of the hand 14m at the target position. When the target pose is updated by the exporter 323, the image generator 324 generates an image of the robot model 10m in the updated target pose.

When the prohibited area is changed via the receiver 322, the image generator 324 generates an image of the changed and moved prohibited area. In other words, the image generator 324 generates an image (moving image) of the movement of the changed prohibited area. When the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the image generator 324 changes the posture of the robot model 10m in the image to a posture derived by the deriver 323 that does not interfere with the prohibited area.

As described above, the receiver 322 can accept continuous input, or continuous changes, of the prohibited area. In response to these continuous changes, the setter 321 sequentially updates the modified prohibited area. The image generator 324 sequentially generates an image of the updated prohibited area. As a result, when the prohibited area is changed via the receiver 322, the image generator 324 generates an image of the modified and moved prohibited area. In other words, the image generator 324 generates a moving image of the prohibited area. The image generator 324 then outputs the image of the modified and moved prohibited area to the display 21.

At this time, the determiner 326 successively determines the interference between the successively updated prohibited area and the robot model 10m. If the change in the prohibited area causes the robot model 10m to interfere with the prohibited area, the exporter 323 exports a target pose for the robot model 10m that does not interfere with the changed prohibited area. The image generator 324 generates an image of the robot model 10m in the target pose derived by the exporter 323. As a result, the image generator 324 changes the pose of the robot model 10m in the image to the pose derived by the exporter 323. In other words, the image generator 324 changes the image of the robot model 10m before the interference with the prohibited area to an image of the robot model 10m that avoids interference with the changed prohibited area. The image generator 324 outputs the image of the changed robot model 10m to the display 21.

For example, in an image of the robot model 10m with a changed pose generated by the image generator 324, the position of the robot model 10m and the position of the first hand 14am at the target position remain unchanged, while the pose of the arm 12m or the second hand 14bm changes, thereby changing the pose of the robot model 10m. Alternatively, the position of the robot model 10m changes, the position of the first hand 14am remains unchanged, while the pose of the arm 12m or the second hand 14bm changes, thereby changing the pose of the robot model 10m.

When the determiner 326 determines that the robot model 10m is interfering with the changed prohibited area, the alarm 325 notifies the user that the robot model 10m is interfering with the prohibited area. Specifically, when notifying the user, the alarm 325 causes the image generator 324 to change the display of the robot model 10m. For example, the alarm 325 changes the display color of the robot model 10m when the prohibited area is changed and the robot model 10m is interfering with the prohibited area, compared to the display color of the robot model 10m when the prohibited area is changed and the robot model 10m is not interfering with the prohibited area. As an example, the display color of the robot model 10m is red when interfering, and blue when not interfering.

Next, the layout setting process performed by the teaching support device 30 will be described with reference to the flowchart in Figure 5. The layout setting process is a process that determines the position of the prohibited area while confirming the interference between the robot model 10m and the prohibited area.

First, in step S1, the setter 321 performs initial configuration of the specifications for each model. Specifically, the setter 321 performs initial configuration of the housing model 2m, the target position, the interference model 6m, and the robot model 10m. Some of the specifications for each model during the initial configuration are pre-stored in the storage device 31, while the remaining specifications are input by the user. In other words, the setter 321 performs initial configuration of the housing model 2m, the target position, the interference model 6m, and the robot model 10m based on the initial specifications for each model stored in the storage device 31 and the specifications received from the user by the receiver 322. Step S1 is an example of "setting the robot model 10m and the prohibited area" in the teaching support method.

During the initial setup, the image generator 324 generates an image that combines the chassis model 2m, the target position, the interference model 6m, and the robot model 10m, and displays the generated image on the display 21. At this point, the robot model 10m is in its initial pose. For example, the initial pose of the robot model 10m is a pose in which the first and second links 13am and 13bm, and the first and second hands 14am and 14bm overlap in a plan view. It should be noted that the exporter 323 may also export the pose of the robot model when the hand 14m is at any target position during the initial setup, and the image generator 324 generates an image of the robot model 10m in the exported pose.

Specifically, the setter 321 sets the size and shape of the housing model 2m to the initial specifications. As shown in Figure 6 , the image generator 324 generates an image containing the housing model 2m (see the solid line) at the initial specifications and displays the generated image on the display 21. The user changes the size and shape of the housing model 2m by operating the cursor Q with the mouse 22 and dragging a vertex of the housing model 2m. When the receiver 322 receives input from the user using the mouse 22, the setter 321 sets the size and shape of the housing model 2m based on the input received by the receiver 322. Simultaneously, as shown in Figure 4 , the image generator 324 generates an image of the housing model 2m at the set size and shape and displays the generated image on the display 21. It should be noted that, instead of operating the mouse 22, for example, the receiver 322 may receive coordinate values input by the user via a keyboard, and the setter 321 may set the size of the housing model 2m based on the coordinate values received by the receiver 322.

The setter 321 sets the target position based on the user's input operation. The setter 321 sets the front-opening wafer cassette model 4m and the processing device model 5m as the target position. Specifically, the setter 321 sets the number, shape, size, and position of the front-opening wafer cassette model 4m and the processing device model 5m. For example, regarding the front-opening wafer cassette model 4m, the setter 321 sets multiple options related to shape and size. The image generator 324 generates an image including options related to the shape and size of the front-opening wafer cassette model 4m and displays it on the display 21. The acceptor 322 accepts the selection of the option made by the user via the mouse 22. The setter 321 sets the shape and size of the front-opening pod model 4m in response to the selections received by the receiver 322. The receiver 322 receives the initial position specified by the user via the mouse 22. The setter 321 sets the initial position of the front-opening pod model 4m using the specified position received by the receiver 322. It should be noted that if the number, shape, size, or initial position of the front-opening pod models 4m is pre-stored in the storage device 31, the setter 321 can also read the number, shape, size, or initial position stored in the storage device 31 to perform the settings. The settings related to the processing device model 5m are the same as those related to the front-opening pod model 4m.

After the target position is set by the setter 321, the image generator 324 generates an image containing the front-loading pod models 4m and the processing equipment models 5m, whose quantity, shape, size, and position are set, and displays it on the display 21. The image generator 324 generates an image of the front-loading pod models 4m and the processing equipment models 5m incorporated into the housing model 2m. The housing model 2m, the front-loading pod models 4m, and the processing equipment models 5m are combined in a continuous internal space.

The setter 321 sets the interferer model 6m through user input operations. The setter 321 sets the number, shape, size, and position of the interferer model 6m. Specifically, the setter 321 sets multiple options related to shape and size for the interferer model 6m. The image generator 324 generates an image including options related to the shape and size of the interferer model 6m and displays it on the display 21. The receiver 322 receives the selection of the options made by the user via the mouse 22. The setter 321 sets the shape and size of the interferer model 6m in response to the selection received by the receiver 322. The receiver 322 receives the designation of the initial position of the interferer model 6m by the user via the mouse 22. The setter 321 sets the designated position received by the receiver 322 as the initial position of the interferer model 6m. It should be noted that if the number, shape, size, or initial position of the interferer models 6m is pre-stored in the storage device 31, the setter 321 can also read the shape, size, or initial position stored in the storage device 31 to set the position. It should be noted that the position of the interferer model 6m can also be set by inputting coordinate values.

After the setter 321 sets the interferer model 6m, the image generator 324 generates an image including the interferer model 6m with the set number, shape, size, and position, and displays it on the display 21.

The setter 321 sets the robot model 10m through the user's input operation. The setter 321 sets the shape, size, and position of the robot model 10m. Specifically, the setter 321 sets a plurality of options related to the shape and size of the robot model 10m. The image generator 324 generates an image including the options related to the shape and size of the robot model 10m and displays it on the display 21. The receiver 322 receives the selection of the option made by the user via the mouse 22. The setter 321 sets the shape and size of the robot model 10m in response to the option received by the receiver 322. The receiver 322 receives the designation of the initial position of the robot model 10m made by the user via the mouse 22. Setter 321 sets the designated position received by receiver 322 as the initial position of robot model 10m. It should be noted that if the shape, size, or initial position of robot model 10m is pre-stored in storage device 31, setter 321 can also read the shape, size, or initial position stored in storage device 31 to set the initial position. It should be noted that the position of robot model 10m can also be set by inputting coordinate values.

After the robot model 10m is configured by the configuration device 321, the image generator 324 generates an image including the configured shape, size, and position of the robot model 10m and displays it on the display 21.

In step S2, receiver 322 receives a target position selection. The user considers the target poses of robot model 0m corresponding to all target positions, including the target poses of robot model 10m that could potentially interfere with the prohibited area due to changes in the prohibited area, and selects the target position corresponding to the target pose of robot model 10m that could potentially interfere. Specifically, receiver 322 receives input for the target position selection via mouse 22 or the like. For example, receiver 322 receives a click operation on a target position as input for the target position selection.

In step S3, the exporter 323 exports the target pose of the robot model 10m corresponding to the selected target position. In step S4, the image generator 324 generates an image of the robot model 10m in the exported target pose and displays the generated image on the display 21.

Specifically, as shown in Figure 4 , the user operates cursor Q with mouse 22 to designate a target position P1 for the front-loading pod model 4m. The receiver 322 then receives the user's input using mouse 22, and the exporter 323 exports the robot model 10m's posture when the substrate Sm at the first hand 14am of the robot model 10m is positioned within the designated front-loading pod model 4m. The exporter 323 also exports the target posture of the robot model 10m within the non-interference housing model 2m and the interference object model 6m, i.e., the prohibited area. Image generator 324 generates an image of robot model 10m in a target pose corresponding to the designated front-opening pod model 4m based on the pose of robot model 10m derived by exporter 323. As shown in FIG7 , the generated image is displayed on display 21.

In step S5, receiver 322 determines whether a change to the prohibited area has been accepted. Specifically, receiver 322 determines whether an input to change the prohibited area has been received via mouse 22 or the like. For example, receiver 322 accepts a drag operation on a prohibited area as an input to change the prohibited area. If no input to change the prohibited area has been received, receiver 322 determines in step S6 whether an input to confirm the layout has been received. For example, a confirm button for confirming the layout is displayed on display 21. Receiver 322 accepts the input to confirm the layout by the user clicking the confirm button via mouse 22. When receiver 322 receives a layout confirmation input, setter 321 saves the current layout, i.e., the settings for each model, to storage device 31, completing the layout setting process. If no layout confirmation input is received, receiver 322 returns to step S5. Receiver 322 periodically repeats steps S5 and S6, waiting for changes to the prohibited area or layout confirmation input. It should be noted that while clicking the confirm button may be used as layout confirmation, it is also possible to replace or add to clicking the confirm button by determining that the layout has been confirmed if no input to change the prohibited area has been received for a predetermined period of time.

When the receiver 322 receives a change in the prohibited area in step S5, the setter 321 sets the changed prohibited area received by the receiver 322 in step S7. In step S8, the image generator 324 generates an image of the changed prohibited area and displays the generated image of the changed prohibited area on the display 21. Step S5 is an example of "accepting a change in the prohibited area" in the teaching support method. Step S8 is an example of "generating an image of the changed and moved prohibited area when the prohibited area is changed" in the teaching support method.

In step S9, the determiner 326 determines whether the robot model 10m interferes with the prohibited area. Step S9 is an example of "determining whether the robot model 10m interferes with the prohibited area" in the teaching support method.

If the robot model 10m and the prohibited area do not interfere with each other in step S9, the receiver 322 determines in step S10 whether the acceptance of the prohibited area change is continuing. Specifically, the receiver 322 determines whether the input of the prohibited area change, such as by the mouse 22, is continuing or stopping. For example, the receiver 322 considers the continued acceptance of the prohibited area change input as continuing. On the other hand, the receiver 322 considers the placement operation in the prohibited area as stopping the acceptance of the prohibited area change input. If the acceptance of the prohibited area change continues in step S10, the process returns to step S7. If the process does not continue in step S10, i.e., the acceptance of changes to the prohibited area is stopped, the process returns to step S5.

By repeating steps S5, S7, S8, S9, and S10, or steps S7, S8, S9, and S10, receiver 322 can receive continuous changes in the prohibited area. In response to these continuous changes, setter 321 updates the modified prohibited area. Image generator 324 sequentially generates images of the updated prohibited area. As a result, image generator 324 generates images of the modified and moving prohibited area. In other words, image generator 324 generates a moving image of the prohibited area. It should be noted that, when the acceptance of changes to the prohibited area is discontinued in step S10, the image generator 324 generates an image of the prohibited area where the input of changes is stopped and remains stationary.

For example, when the position of the interferer model 6m is changed as a prohibited area, as shown in FIG8 , the user operates the cursor Q with the mouse 22, dragging the interferer model 6m as indicated by the dashed line to the solid line, thereby changing the position of the interferer model 6m. Dragging the interferer model 6m is an input from the user to continuously (strictly speaking, discontinuously) change the position of the interferer model 6m. Thus, the setter 321 continuously sets, i.e., changes, the position of the interferer model 6m. In response, the determiner 326 sequentially determines the interference between the robot model 10m and the interferer model 6m. At this point, since there is no interference between the robot model 10m and the interfering object model 6m, the image generator 324 sequentially generates images of the altered interfering object model 6m. As a result, the image generator 324 continuously generates images of the altered interfering object model 6m, creating a moving image of the interfering object model 6m.

If the robot model 10m interferes with the prohibited area in step S9, the alarm 325 notifies the user of the interference with the prohibited area in step S11. Specifically, the alarm 325 instructs the image generator 324 to change the display of the robot model 10m. For example, the image generator 324 receives a command from the alarm 325 and changes the color of the robot model 10m.

Specifically, as shown in Figure 9, the user uses the mouse 22 to operate the cursor Q, dragging the interferer model 6m from the dashed line at the start of the arrow to the dotted line at the end of the arrow, thereby changing the position of the interferer model 6m. After the receiver 322 receives continuous user input using the mouse 22, the setter 321 successively sets the position of the interferer model 6m based on the input received by the receiver 322. The determiner 326 successively determines whether the robot model 10m and the interferer model 6m are interfering. The image generator 324 generates an image of the changed and moving interferer model 6m and displays it on the display 21.

When the altered and moved interferer model 6m reaches the position indicated by the solid line, the robot model 10m interferes with the interferer model 6m. Therefore, the alarm 325 changes the display of the robot model 10m, which is interfering with the interferer model 6m, to the image generator 324 as indicated by the hatched lines. The hatched display appears red in the actual image. The alarm 325 changes the display of the substrate Sm of the second hand 14bm, which is interfering with the interferer model 6m.

In step S12, receiver 322 determines whether acceptance of prohibited area changes is continuing. Specifically, receiver 322 determines whether input of prohibited area changes, such as via mouse 22, is continuing or stopping. For example, receiver 322 considers continued dragging of a prohibited area as continued acceptance of prohibited area change input. On the other hand, receiver 322 considers dropping a prohibited area as stopped acceptance of prohibited area change input. If acceptance of prohibited area changes continues in step S12, processing returns to step S7. If acceptance of prohibited area changes does not continue, that is, it stops in step S12, processing proceeds to step S13.

In step S13, the deriver 323 derives a target pose of the robot model 10m that does not interfere with the prohibited area. Step S13 is an example of "deriving a pose of the robot model 10m that does not interfere with the prohibited area when determining interference between the robot model 10m and the modified prohibited area" in the teaching support method.

In step S14, the image generator 324 changes the target pose of the robot model 10m in the image to the target pose derived by the deriver 323. The image generator 324 displays the changed image of the robot model 10m on the display 21. Specifically, the image generator 324 changes the image of the robot model 10m before interfering with the prohibited area to an image of the robot model 10m avoiding interference with the changed prohibited area. The image generator 324 changes the image of the robot model 10m after the alarm 325 notifies the user that the robot model 10m has interfered with the prohibited area. The process then returns to step S5. As long as changes to the prohibited area continue to be accepted, the processing from step S5 onward is repeated. Step S14 is an example of "changing the posture of the robot model 10m in the image to the derived posture when interference between the robot model 10m and the changed prohibited area is determined" in the teaching support method.

Specifically, as shown in Figure 9, after the alarm 325 notifies the user that the robot model 10m is interfering with the interferer model 6m, the exporter 323 exports the pose of the robot model 10m without interfering with the altered interferer model 6m, as shown in Figure 10. Subsequently, the image generator 324 generates an image of the robot model 10m with the altered pose, as derived by the exporter 323, and displays it on the display 21. For example, as shown in Figure 9, while the user is dragging the interfering object model 6m, the alarm 325 changes the display of the robot model 10m. The user then places the interfering object model 6m at the location indicated by the dashed line, as shown in Figure 10. This causes the exporter 323 to export the posture of the robot model 10m, and the image generator 324 generates and outputs an image of the changed robot model 10m. Specifically, the exporter 323 exports the posture of the robot model 10m in the non-interference prohibited area by maintaining the positions of the robot model 10m and the first hand 14am at the target location unchanged and changing the posture of the second hand 14bm.

In this way, the user can visually check on the display 21 that the robot model 10m is deforming its posture to avoid interfering with the interfering object model 6m while changing the position of the interfering object model 6m. Specifically, the user can check the interference of the robot model 10m with the interfering object model 6m at the target posture corresponding to the front-opening pod model 4m, which is the target position P1. Similarly, the user can check the interference of the robot model 10m with the interfering object model 6m at the target posture corresponding to each of the target positions P2, P3, P4, and P5. Therefore, users can shorten the time it takes to determine the location of prohibited areas based on the posture of a 10m robot model.

In the teaching support device 30, when the prohibited area is changed via the receiver 322, the image generator 324 generates an image of the changed and moved prohibited area. When the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the exporter 323 exports a pose of the robot model 10m that does not interfere with the prohibited area. Simultaneously, the image generator 324 changes the pose of the robot model 10m in the image to the pose derived by the exporter 323. In this way, the user can confirm the pose of the robot model 10m that does not interfere with the prohibited area while watching the display 21 change the prohibited area. Therefore, users can shorten the time it takes to determine the location of prohibited areas based on the robot model's 10m posture.

Furthermore, since the alarm 325 is included, the user can easily detect when the robot model 10m interferes with the prohibited area after the user changes the prohibited area. Furthermore, after the user detects that the robot model 10m has interfered with the prohibited area, they can confirm that the robot model 10m is not interfering with the prohibited area.

Furthermore, when alerting the user, the alarm device 325 causes the image generator 324 to change the display of the robot model 10m. This allows the user to more easily determine that the robot model 10m is interfering with the prohibited area by observing the change in the display of the robot model 10m.

Furthermore, since the deriving device 323 derives the posture of the robot model 10m when the hand 14m is at the target position, the user can confirm the posture of the robot model 10m when the hand 14m is at the target position.

Furthermore, since robot model 10m is a model of robot 10 that includes first hand 14a and second hand 14b, robot model 10m is designed to accommodate robots 10 with more complex structures. Even for such complex robots, the time required to determine the location of the prohibited area can be shortened.

Furthermore, the robot model 10m is a model of a horizontal multi-jointed robot 10 whose hand 14 transports a substrate S. Even with such a robot, the time required to determine the position of the prohibited area can be shortened.

Furthermore, when the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the deriving unit 323 maintains the posture of the first hand 14am and changes the posture of the second hand 14bm, thereby deriving a posture of the robot model 10m that does not interfere with the prohibited area. This allows the user to confirm the posture of the second hand 14bm of the robot model 10m does not interfere with the prohibited area while watching the display 21 change the prohibited area.

Furthermore, since the prohibited area includes the area inside the interferer model 6m, the user can display the interferer 6 on the display 21 as the prohibited area.

Furthermore, since the prohibited area includes the area outside the housing model 2m, the user can display the housing 2 on the display 21 as the prohibited area. This allows the user to confirm the posture of the robot 10 used in the cleanroom 1. Therefore, the user can confirm the posture of the robot 10 used in an environment with strict movement restrictions.

《Variation 1》

In the teaching support device according to Modification 1, when the determiner 326 determines that the robot model 10m interferes with the modified prohibited area, the deriver 323 derives the position of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area.

Specifically, as shown in Figure 11, the user uses the mouse 22 to operate the cursor Q, dragging the interferer model 6m from the dashed line at the start of the arrow to the dotted line at the end of the arrow, thereby changing the position of the interferer model 6m. After the receiver 322 receives continuous user input using the mouse 22, the setter 321 successively sets the position of the interferer model 6m based on the input received by the receiver 322. The determiner 326 successively determines whether the robot model 10m and the interferer model 6m are interfering. The image generator 324 generates an image of the changed and moving interferer model 6m and displays it on the display 21.

When the altered and moved interfering object model 6m reaches the position indicated by the solid line, the robot model 10m interferes with the interfering object model 6m. Therefore, the alarm 325 changes the display of the robot model 10m, which is interfering with the interfering object model 6m, to the image generator 324 as shown by the shaded lines. Specifically, the alarm 325 changes the display of the first link 13am, which is interfering with the interfering object model 6m.

The user then places the interfering object model 6m at the position indicated by the dotted line, as shown in FIG12 . This causes the exporter 323 to re-export the target pose of the robot model 10m without interfering with the altered interfering object model 6m. In response, the image generator 324 generates an image of the robot model 10m exported by the exporter 323 and displays it on the display 21. Specifically, the exporter 323 changes the position of the robot model 10m while maintaining the position of the first hand 14am at the target position, thereby deriving the pose of the robot model 10m without interfering with the interfering object model 6m.

With the teaching support device according to Modification 1, the user can change the prohibited area while viewing the display 21 and confirming the position of the robot model 10m away from the prohibited area.

"Variation 2"

In the teaching support device according to Modification 2, when the determiner 326 determines that the robot model 10m interferes with the modified prohibited area, the deriver 323 derives the type of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area. The type of the robot model 10m is, for example, a collection of robot models 10m having different lengths and numbers of links 13m. Derivation of the type of the robot model 10m involves selecting a specific robot model 10m from the collection of robot models 10m. The deriver 323 derives the appropriate type of the robot model 10m based on pre-accumulated data such as empirical values.

Specifically, as shown in Figure 13, the user uses the mouse 22 to operate the cursor Q, dragging the interferer model 6m from the dashed line at the start of the arrow to the dotted line at the end of the arrow, thereby changing the position of the interferer model 6m. After the receiver 322 receives continuous user input using the mouse 22, the setter 321 successively sets the position of the interferer model 6m based on the input received by the receiver 322. The determiner 326 successively determines whether the robot model 10m and the interferer model 6m are interfering. The image generator 324 generates an image of the changed and moving interferer model 6m and displays it on the display 21.

When the altered and moved interferer model 6m reaches the position indicated by the solid line, the robot model 10m interferes with the interferer model 6m. Therefore, the alarm 325 changes the display of the robot model 10m, which is interfering with the interferer model 6m, to the image generator 324 as shown by the shaded lines. Specifically, the alarm 325 changes the display of the substrate Sm of the second hand 14bm, which is interfering with the interferer model 6m.

The user then places the interfering object model 6m at the position indicated by the dotted line, as shown in FIG14 . This causes the exporter 323 to re-export the target pose of the robot model 10m without interfering with the altered interfering object model 6m. In response, the image generator 324 generates an image of the robot model 10m exported by the exporter 323 and displays it on the display 21. Specifically, the exporter 323 exports the robot model 10m with the number of connecting rods 13m added, and then exports the pose of the robot model 10m without interfering with the interfering object model 6m. Specifically, the deriver 323 selects to add the third link 13cm to the first link 13am and the second link 13bm of the robot model 10m, deriving the pose of the robot model 10m without interfering with the interfering object model 6m. At this time, the deriver 323 maintains the position of the robot model 10m unchanged and the position of the first hand 14am at the target position unchanged, thereby deriving the pose of the robot model 10m.

With the teaching support device according to Modification 2, the user can change the prohibited area while viewing the display 21 and confirming the type of robot model 10m that does not interfere with the prohibited area.

Other Implementation Methods

As described above, the embodiments described above are described as examples of the technology disclosed in this application. However, the technology disclosed herein is not limited thereto and is applicable to embodiments with appropriate modifications, substitutions, additions, and omissions. Furthermore, the components described in the embodiments described above can be combined to create new embodiments. Furthermore, the components described in the drawings and detailed descriptions include not only those components essential to solving the problem but also components that are not essential for exemplifying the technology. Therefore, one should not assume that non-essential components are essential simply because they are described in the drawings and detailed descriptions.

For example, the robot 10 is not limited to clean rooms for processing semiconductor wafers; it can also be used in spaces where other components are processed, that is, spaces with lower air purity.

The number of front-loading pods 4 and processing devices 5 is not limited to the examples described above and may be increased or decreased. Accordingly, the number of front-loading pod models 4m and processing device models 5m is not limited to the examples described above and may be increased or decreased.

The robot 10 can be used in a location that includes both a front-loading pod 4 and a processing unit 5, or it can be used in a location that includes either the front-loading pod 4 or the processing unit 5. In other words, the setter 321 can be configured to specify only the front-loading pod model 4m or the processing unit model 5m. For example, when the robot is used in a sorter, it transports substrates between front-loading pods. Therefore, the setter configures only the front-loading pod model. Alternatively, when the robot is used in a vacuum processing chamber, it transports substrates between processing units 5. Therefore, the setter configures the processing unit model. Thus, the setter 321 can be configured to specify at least one of the front-loading pod model 4m and the processing unit model 5m.

The housing 2 houses a front-loading cassette 4 and a processing unit 5, and other spaces may also be provided. For example, when a robot is used in a stocker, it transports substrates between the front-loading cassette and a substrate storage chamber (storage room). In this case, the housing houses the front-loading cassette and storage room. The setup device then configures the front-loading cassette model and storage room model.

The number of interferers 6 is not limited to the example described above and may be increased or decreased. Accordingly, the number of interferer models 6m is not limited to the example described above and may be increased or decreased.

The setter 321 can also be used to set only one of the chassis model 2m or the interference model 6m as the prohibited area. The setter 321 can also be used to set the models of other objects such as the chassis and the interference as the prohibited area.

Housing 2 houses a front-opening wafer pod 4 and a processing unit 5, and may also include a pre-alignment unit. The pre-alignment unit detects the center position and notch position of the substrate S and positions the substrate S at the desired location. A pre-alignment unit model representing the pre-alignment unit may also be provided as the target position for the hand 14m of the robot model 10m.

The end effector of the robot 10 is a hand 14, which can also be a mechanical tool such as a cutting tool or a grinding tool.

The input device of the teaching support system 20 is a mouse 22, which can also be a keyboard, or both a mouse and a keyboard.

The processor 32 only needs to include the setter 321, receiver 322, exporter 323, image generator 324, and determiner 326 as functional blocks, and does not need to include the alarm 325 as a functional block.

When the determiner 326 determines that the prohibited area has been changed via the receiver 322 and that the robot model 10m has interfered with the prohibited area, the alarm 325 changes the display of the robot model 10m and may also notify the user using an alarm display or sound.

When robot model 10m and interfering object model 6m are interfering, alarm 325 may cause image generator 324 to change the display of robot model 10m or may notify the user using an alarm display or sound. Specifically, alarm 325 may cause image generator 324 to display information on the screen indicating the interference caused by robot model 10m and interfering object model 6m. Alternatively, alarm 325 may output a sound indicating the interference caused by robot model 10m and interfering object model 6m.

When the robot model 10m and the interfering object model 6m are interfering, the alarm 325 may cause the image generator 324 to change the display of the image other than the robot model 10m from the display when there is no interference. For example, the alarm 325 may cause the image generator 324 to change the display color or display mode (such as flashing display) of the interfering object model 6m.

Receiver 322 receives, as a change to the prohibited area, the movement of the prohibited area's position, the addition of a prohibited area, or the modification of the prohibited area's shape. For example, if a user adds a new prohibited area to the screen of display 21, receiver 322 receives the newly added prohibited area. Furthermore, if a user modifies the shape of a prohibited area on the screen of display 21, receiver 322 receives the modified prohibited area.

After the alarm 325 notifies the user, the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the exporter 323. Alternatively, the image generator 324 may change the posture of the robot model 10m in the image to the posture derived by the exporter 323 before the alarm 325 notifies the user.

The setter 321 may also set a transit position that the first hand 14am of the robot model 10m passes through before reaching the target position. The deriving device 323 may also derive the posture of the robot model 10m when the first hand 14am is at the transit position and the second hand 14bm of the robot model 10m is at a predetermined position within the action area.

When the determiner 326 determines that the robot model 10m interferes with the modified prohibited area, the deriver 323 may change the posture of the arm 12m while leaving the first hand 14am and the second hand 14bm unchanged, thereby deriving a posture of the robot model 10m that does not interfere with the prohibited area. For example, the deriver 323 may change the posture of the arm 12m so that the first link 13am and the second link 13bm bend in opposite directions.

As shown in Figure 4, image generator 324 generates two-dimensional images for each model. It can also generate three-dimensional images, as shown in Figure 15. Figure 15 uses the same symbols as Figures 4 and 7. Furthermore, processing device model 5m is depicted with a two-point line, and chassis model 2m is omitted. Furthermore, robot model 10m includes base 11m, which models base 11. The position of each model is defined by a three-dimensional position. For example, receiver 322 receives the three-dimensional position of a target position, setter 321 sets the three-dimensional position of the target position, and exporter 323 exports the pose of robot model 10m at the three-dimensional position of the target position.

The flowchart is merely an example. The steps in the flowchart may be modified, replaced, added, or omitted as appropriate. Furthermore, the order of the steps in the flowchart may be altered, or serial processing may be performed in parallel. For example, in the flowchart (Figure 5), during the initial setup of step S1, the chassis model, FOUP model, interferer model, and robot model settings may be altered in order or performed in parallel. Furthermore, the robot model's posture may be derived in step S13 before the alarm in step S11. Furthermore, the alarm in step S11 may be performed after the modified robot model is displayed in step S14.

The teaching support method is not limited to the teaching support device 30 and can also be implemented by other devices. The teaching support program is not limited to the teaching support device 30 and can also be implemented by other devices.

The functions implemented by the components described in this specification may also be implemented in circuits or processing circuits including general-purpose processors, special-purpose processors, integrated circuits, ASICs (Application Specific Integrated Circuits), CPUs (Central Processing Units), conventional circuits, and/or combinations thereof, programmed to implement the described functions. A processor includes transistors and other circuits and is considered a circuit or processing circuit. A processor may also be a programmable processor that executes a program stored in memory.

In this specification, a circuit, unit, or device refers to hardware programmed or executed to implement the described functions. This hardware may be any of the various hardware disclosed in this specification or any of the various hardware known to the public that is programmed or executed to implement the described functions.

When the hardware is a processor that is considered a circuit, the circuit, device or unit is a combination of hardware and software used to constitute the hardware and/or processor.

〔Way〕

The above implementation method is a specific example of the following method.

[Method 1]

The teaching support device 30 is a teaching support device that displays an image of a model of a robot 10 on a display 21. The robot 10 has an arm 12 and a hand 14 (end effector) connected to the arm 12. The teaching support device 30 includes a setter 321, an acceptor 322, a judger 326, an exporter 323, and an image generator 324. The setter 321 sets the robot model 10m that models the robot 10 and a prohibited area of the robot model 10m that is not an action area. The acceptor 322 accepts changes to the prohibited area. The judger 326 judges the interference between the robot model 10m and the prohibited area. The exporter 323 exports the pose of the robot model 10m, and the image generator 324 generates an image of the prohibited area and the robot model 10m. When the prohibited area is changed by the receiver 322, the image generator 324 generates an image of the changed and moved prohibited area. When the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the exporter 323 exports a pose of the robot model 10m that does not interfere with the prohibited area, and the image generator 324 changes the pose of the robot model 10m in the image to the pose exported by the exporter 323.

With this structure, when the prohibited area is changed via the receiver 322, the image generator 324 generates an image of the changed and moved prohibited area. When the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the exporter 323 exports a pose of the robot model 10m that does not interfere with the prohibited area. Simultaneously, the image generator 324 changes the pose of the robot model 10m in the image to the pose derived by the exporter 323. This allows the user to confirm the pose of the robot model 10m that does not interfere with the prohibited area while watching the display 21 change the prohibited area. Consequently, when determining the position of the prohibited area based on the pose of the robot model 10m, the time required to determine the position of the prohibited area can be shortened.

[Method 2]

The teaching support device 30 described in embodiment 1 further includes an alarm 325. When the determiner 326 determines that the robot model 10m is interfering with the changed prohibited area, the alarm 325 notifies the user that the robot model 10m is interfering with the prohibited area. After the alarm 325 notifies the user that the robot model 10m is interfering with the prohibited area, the image generator 324 changes the posture of the robot model 10m in the image to the posture derived by the deriving device 323.

With this structure, the inclusion of alarm 325 allows the user to easily detect when the robot model 10m has violated the prohibited area after the user changes the prohibited area. Furthermore, after detecting that the robot model 10m has violated the prohibited area, the user can confirm the robot model 10m's posture so that it does not violate the prohibited area.

[Method 3]

In the teaching support device 30 described in Embodiment 1 or Embodiment 2, the alarm device 325 causes the image generator 324 to change the display of the robot model 10m when notifying the user.

With this structure, the alarm device 325 causes the image generator 324 to change the display of the robot model 10m when notifying the user. This allows the user to easily determine that the robot model 10m is interfering with the prohibited area by observing the change in the display of the robot model 10m.

[Method 4]

In the teaching support device 30 described in any one of Embodiments 1 to 3, the setting device 321 sets the target position of the hand 14m (end effector) of the robot model 10m, and the deriving device 323 derives the posture of the robot model 10m when the hand 14m (end effector) is at the target position.

With this structure, the guide 323 guides the posture of the robot model 10m when the hand 14m is at the target position, allowing the user to confirm the posture of the robot model 10m when the hand 14m is at the target position.

[Method 5]

In the teaching support device 30 described in any one of Embodiments 1 to 4, the robot model 10m is a model of the robot 10 including a first hand 14a (first end effector) and a second hand 14b (second end effector) connected to the arm 12 as the hand 14 (end effector).

With this structure, robot model 10m represents robot 10, including first hand 14a and second hand 14b. Therefore, robot model 10m can accommodate robots 10 with more complex structures. Even for such complex robots, the time required to determine the location of the prohibited area can be shortened.

[Method 6]

In the teaching support device 30 described in any one of aspects 1 to 5, the setting unit 321 sets the target position of the first hand 14am (first end effector) of the robot model 10m, and the deriving unit 323 derives the first hand 14am (first end effector) at the target position and the second hand 14bm (second end effector) of the robot model 10m within the action area. The posture of the robot model 10m at the specified position. When the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the deriving unit 323 maintains the posture of the first hand 14am (first end effector) unchanged and changes the posture of the second hand 14bm (second end effector), thereby deriving a posture of the robot model 10m that does not interfere with the prohibited area.

With this structure, when the determiner 326 determines that the robot model 10m interferes with the changed prohibited area, the deriving unit 323 maintains the posture of the first hand 14am and changes the posture of the second hand 14bm, thereby deriving a posture of the robot model 10m that does not interfere with the prohibited area. This allows the user to confirm the posture of the second hand 14bm of the robot model 10m does not interfere with the prohibited area while watching the display 21 change the prohibited area.

[Method 7]

In the teaching support device 30 described in any one of aspects 1 to 6, the setting device 321 sets an interferer model 6m that models a dynamic or static interferer 6, and the prohibited area includes an area inside the interferer model 6m.

With this configuration, since the prohibited area includes the area inside the interferer model 6m, the user can display the interferer 6 on the display 21 as the prohibited area.

[Method 8]

In the teaching support device 30 described in any one of aspects 1 to 7, the setting device 321 sets a housing model 2m that models the housing 2 of the clean room 1, and the prohibited area includes an area outside the housing model 2m.

With this configuration, since the prohibited area includes the area outside the housing model 2m, the user can display the housing 2 on the display 21 as the prohibited area. This allows the user to confirm the posture of the robot 10 used in the cleanroom 1. This makes it possible to confirm the posture of the robot 10 used in an environment with strict movement restrictions.

[Method 9]

In the teaching support device 30 described in any one of aspects 1 to 8, when the determiner 326 determines the interference between the robot model 10m and the changed prohibited area, the deriver 323 derives the position of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area.

With this structure, the deriving device 323 derives the position of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area. This allows the user to confirm the position of the robot model 10m that does not interfere with the prohibited area while viewing the display 21 to change the prohibited area.

[Method 10]

In the teaching support device 30 described in any one of aspects 1 to 9, when the determiner 326 determines the interference between the robot model 10m and the changed prohibited area, the deriver 323 derives the type of the robot model 10m that does not interfere with the prohibited area, thereby deriving a posture of the robot model 10m that does not interfere with the prohibited area.

With this structure, the deriver 323 derives the type of the robot model 10m that does not interfere with the prohibited area, thereby deriving the posture of the robot model 10m that does not interfere with the prohibited area. This allows the user to confirm the type of the robot model 10m that does not interfere with the prohibited area while watching the display 21 change the prohibited area.

[Method 11]

In the teaching support device 30 described in any one of Embodiments 1 to 10, the robot model 10m is a model of the horizontal multi-jointed robot 10 that transports the substrate S using the hand 14 (end effector).

With this structure, the robot model 10m is a model of a horizontal multi-jointed robot 10 whose hand 14 transports a substrate S. Even for such a robot, the time required to determine the position of the prohibited area can be shortened.

[Method 12]

The teaching support method is a teaching support method for displaying an image of a model of a robot 10 on a display 21, wherein the robot 10 has an arm 12 and a hand 14 (end effector) connected to the arm 12, and the teaching support method includes the steps of setting a robot model 10m that models the robot 10 and a prohibited area of the robot model 10m that is not an action area, accepting a change in the prohibited area, determining interference between the robot model 10m and the prohibited area, and deriving the robot model 10m. When interference between the robot model 10m and the changed prohibited area is determined, the robot model 10m is further deduced to have a posture that does not interfere with the prohibited area, and an image of the prohibited area and the robot model 10m is generated. When the prohibited area is changed, an image of the changed and moved prohibited area is also generated. When interference between the robot model 10m and the changed prohibited area is determined, the robot model 10m in the image is further changed to the derived posture.

With this structure, when the prohibited area is changed, an image of the changed and moved prohibited area is generated. When the robot model 10m is determined to interfere with the changed prohibited area, a posture of the robot model 10m that does not interfere with the prohibited area is derived. Simultaneously, the posture of the robot model 10m in the image is changed to the derived posture. This allows the user to change the prohibited area while watching the display 21 and confirming the posture of the robot model 10m that does not interfere with the prohibited area. Consequently, the time required to determine the position of the prohibited area based on the posture of the robot model 10m can be shortened.

[Method 13]

The teaching support program 311 is a teaching support program for displaying an image of a model of the robot 10 on the display 21. The robot 10 has an arm 12 and a hand 14 (end effector) connected to the arm 12. The teaching support program 311 enables the computer to realize the function of setting the robot model 10m that models the robot 10 and the prohibited area of the robot model 10m that is not the action area, the function of accepting the change of the prohibited area, the function of determining the interference between the robot model 10m and the prohibited area, and the function of deriving the robot The robot model 10m is configured to determine the posture of the robot model 10m. When interference between the robot model 10m and the changed prohibited area is determined, the robot model 10m is further configured to derive a posture of the robot model 10m that does not interfere with the prohibited area and to generate an image of the prohibited area and the robot model 10m. When the prohibited area is changed, the robot model 10m is further configured to generate an image of the modified and moved prohibited area. When interference between the robot model 10m and the changed prohibited area is determined, the robot model 10m in the image is further configured to change the posture of the robot model 10m to the derived posture.

With this structure, when the prohibited area is changed, an image of the changed and moved prohibited area is generated. When the robot model 10m is determined to interfere with the changed prohibited area, a posture of the robot model 10m that does not interfere with the prohibited area is derived. Simultaneously, the posture of the robot model 10m in the image is changed to the derived posture. This allows the user to confirm the posture of the robot model 10m that does not interfere with the prohibited area while watching the display 21 change the prohibited area. Consequently, when determining the position of the prohibited area based on the posture of the robot model 10m, the time required to determine the position of the prohibited area can be shortened.

30: Teaching support device

31: Storage device

311: Teaching Support Program

32: Processor

321: Configurator

322: Receiver

323: Exporter

324: Image Generator

325: Alarm

326: Determinator

33: Memory

Claims (13)

A teaching support device displays an image of a robot model on a display, wherein the robot has an arm and an end effector connected to the arm. The teaching support device includes a setter, an acceptor, a determiner, an exporter, and an image generator. The setter sets a robot model that models the robot and a prohibited area of the robot model that is not an action area. The acceptor accepts changes to the prohibited area. The determiner determines interference between the robot model and the prohibited area. The exporter exports the posture of the robot model. The image generator generates an image of the prohibited area and the robot model. When the prohibited area is changed via the receiver, the image generator generates an image of the changed and moved prohibited area. When the determiner determines that the robot model interferes with the changed prohibited area, the deriver derives a pose of the robot model that does not interfere with the prohibited area, and the image generator changes the pose of the robot model in the image to the pose derived by the deriver. The teaching support device as described in claim 1 further includes an alarm, which notifies the user that the robot model is interfering with the prohibited area when the determiner determines that the robot model is interfering with the changed prohibited area. After the alarm notifies the user that the robot model is interfering with the prohibited area, the image generator changes the posture of the robot model in the image to the posture derived by the exporter. In the teaching support device of claim 2, the alarm device causes the image generator to change the display of the robot model when notifying the user. In the teaching support device as described in claim 1, the setter sets the target position of the end effector of the robot model. The exporter exports the posture of the robot model when the end effector is located at the target position. In the teaching support device according to claim 1, the robot model is a model of a robot including a first end effector connected to the arm and a second end effector as the end effector. In the teaching support device as described in claim 5, the setter sets the target position of the first end effector of the robot model. The exporter exports the posture of the robot model when the first end effector is located at the target position and the second end effector of the robot model is located at a specified position within the action area. When the determiner determines that the robot model interferes with the changed prohibited area, the deriving device maintains the posture of the first end effector and changes the posture of the second end effector, thereby deriving a posture of the robot model that does not interfere with the prohibited area. In the teaching support device described in claim 1, the setter sets an interferer model that models a dynamic or static interferer. The prohibited area includes the area inside the interferer model. In the teaching support device described in claim 1, the setter sets a chassis model that models the chassis of the clean room. The prohibited area includes the area outside the chassis model. In the teaching support device of claim 1, when the determiner determines the interference between the robot model and the changed prohibited area, the deriving device derives the posture of the robot model that does not interfere with the prohibited area by deriving the position of the robot model that does not interfere with the prohibited area. In the teaching support device of claim 1, when the determiner determines the interference between the robot model and the changed prohibited area, the deriver derives the type of the robot model that does not interfere with the prohibited area, thereby deriving a posture of the robot model that does not interfere with the prohibited area. In the teaching support device as described in claim 1, the robot model is a model of a horizontal multi-joint robot in which the end effector transports a substrate. A teaching support method is provided, wherein an image of a robot model is displayed on a display, wherein the robot has an arm and an end effector connected to the arm. The teaching support method includes the steps of setting a robot model that models the robot and a prohibited area of the robot model that is not a movement area, accepting a change in the prohibited area, determining interference between the robot model and the prohibited area, deriving a posture of the robot model, and when interference between the robot model and the changed prohibited area is determined, deriving a posture of the robot model that does not interfere with the prohibited area, generating an image of the prohibited area and the robot model, generating an image of the modified and moved prohibited area when the prohibited area is changed, and changing the posture of the robot model in the image to the derived posture when interference between the robot model and the changed prohibited area is determined. A teaching support program that displays an image of a robot model on a display, wherein the robot has an arm and an end effector connected to the arm. The teaching support program causes the computer to implement functions of setting a robot model that models the robot and a prohibited area of the robot model that is not an action area, accepting changes to the prohibited area, determining interference between the robot model and the prohibited area, deriving a posture of the robot model and, when interference between the robot model and the changed prohibited area is determined, deriving a posture of the robot model that does not interfere with the prohibited area, generating an image of the prohibited area and the robot model, generating an image of the modified and moved prohibited area when the prohibited area is changed, and changing the posture of the robot model in the image to the derived posture when interference between the robot model and the changed prohibited area is determined.