TWI908065B - Bonding mechanism - Google Patents

Abstract

A bonding mechanism includes a base, a confining structure and at least one elevated structure. The base includes a carrier for carrying a substrate. The confining structure is movably disposed on the base, and the confining structure surrounds the carrier. The elevated structure is disposed in correspondence with the base. The elevated structure is movable in a direction relative to the confining structure and has an initial position and a pressed position. In the initial position, an upper surface of the confining structure is positioned above the substrate. In the pressed position, the elevated structure operates to adjust the upper surface of the confining structure to be on the same level as the substrate.

Description

Pressing mechanism

This invention relates to a pressing mechanism, particularly a pressing mechanism for pressing pressing elements onto a substrate.

Conventional pressing mechanisms typically employ a single airbag design for pressing. However, since the airbag is an elastic body, although it can overcome height differences, its elasticity can easily lead to insufficient force applied to the substrate during airbag pressing, resulting in incomplete bonding between the pressed objects.

Furthermore, conventional compression mechanisms do not have a support structure at the edge of the loading platform. As a result, when airbag compression is performed, the edge of the loading platform may be subjected to heavy pressure, which may lead to problems such as poor lamination.

Therefore, developing a pressing mechanism that can improve upon the aforementioned deficiencies in conventional technology is one of the problems that needs to be solved in this field.

In view of the above problems, the present invention provides a pressing mechanism that helps to solve the problems of incomplete pressing when pressing a single airbag or flat plate onto a substrate due to the height difference gap of the substrate, and the problem of heavy pressure on the edge of the support platform when pressing airbags.

The pressing mechanism disclosed in this invention includes a base, a limiting structure, and at least one lifting structure. The base includes a support platform for supporting a substrate. The limiting structure is movably disposed on the base and surrounds the support platform. The lifting structure is correspondingly disposed on the base. The lifting structure is movable relative to the limiting structure and has an initial position and a pressed position. In the initial position, an upper surface of the limiting structure is higher than the substrate. In the pressed position, the lifting structure actuates to adjust the upper surface of the limiting structure to be flush with the substrate.

The pressing mechanism disclosed in this invention includes a base, a limiting structure, at least one elastic member, and a pressing element. The base includes a support platform for supporting a substrate. The limiting structure is movably disposed on the base and surrounds the support platform. The elastic member is spaced around the base and between the limiting structure. The pressing element is disposed corresponding to the support platform and can be pneumatically or electrically driven. The limiting structure is movable relative to the pressing element and has an initial position and a pressed position. In the initial position, an upper surface of the limiting structure is higher than the substrate. In the pressed position, the pressing element pushes the limiting structure, causing the upper surface of the limiting structure to be flush with the substrate.

The present invention further discloses a pressing mechanism comprising a base and a pressing element. The base includes a support platform for supporting a substrate. The pressing element includes an inflatable bladder and an intermediate layer. The inflatable bladder is disposed corresponding to the support platform. The intermediate layer is adhesively bonded to the inflatable bladder, and the intermediate layer pushes the substrate through the inflatable bladder.

The above description of the contents of this invention and the following description of the embodiments are intended to demonstrate and explain the principles of this invention and to provide a further explanation of the scope of the patent application of this invention.

The detailed features and advantages of this invention are described in detail in the following embodiments, the content of which is sufficient to enable anyone skilled in the art to understand the technical content of this invention and implement it accordingly. Furthermore, based on the content disclosed in this specification, the scope of the patent application, and the drawings, anyone skilled in the art can easily understand this invention. The following embodiments further illustrate the viewpoints of this invention in detail, but are not intended to limit the scope of this invention in any way.

Please refer to Figures 1 to 3, where Figure 1 is a schematic diagram of a pressing mechanism according to an embodiment of the present invention, Figure 2 is a schematic diagram of the limiting structure of the pressing mechanism of Figure 1, and Figure 3 is a schematic diagram of the lifting structure of the pressing mechanism of Figure 1 in the pressed position. In this embodiment, the pressing mechanism 1A includes a base 10, a limiting structure 20, an elastic element 30, and a pressing element 40.

The base 10 includes a support stage 110 for supporting the substrate 11. The upper surface 111 of the support stage 110 may be provided with a negative pressure hole for adsorbing the substrate 11 or a clamp (not shown) for gripping the substrate 11.

The limiting structure 20 is movably disposed on the base 10 and surrounds the support platform 110 of the base 10. Furthermore, the limiting structure 20 can be disposed on the base 10, thereby surrounding the support platform 110, and the limiting structure 20 can rise or fall relative to the base 10.

Elastic elements 30 are arranged at intervals around the base 10 and the limiting structure 20. Furthermore, the elastic elements 30 are, for example, but not limited to, compression springs or elastically deformable strip-shaped objects, and are arranged between the base 10 and the limiting structure 20. In this embodiment, there are multiple elastic elements 30, and these elastic elements 30 are arranged at intervals along the circumferential direction of the support platform 110, but the number of elastic elements 30 is not intended to limit the invention.

The pressing element 40 is disposed corresponding to the support platform 110 of the base 10, and the pressing element 40 can be pneumatically driven or electrically driven. Further, the pressing element 40 may include, for example, but not limited to, an inflatable airbag driven by pneumatics or a flat, electrically driven plate-shaped flattening member. In this embodiment, the pressing element 40 may include an inflatable airbag 410 and an interposer layer 420. The inflatable airbag 410 is disposed corresponding to the support platform 110. The interposer layer 420 is adhesively attached to the inflatable airbag 410, and the inflatable airbag 410 allows the interposer layer 420 to press against the substrate 11 placed on the support platform 110.

In this embodiment, the intermediate layer 420 of the pressing element 40 can be a soft or rigid material. In this embodiment, at least a portion of the intermediate layer can be made of at least one of rubber, silicone, polymer, and metal. Furthermore, at least a portion of the inflatable airbag 410 can be made of at least one of silicone and rubber. Additionally, the intermediate layer 420 of the pressing element 40 can have a thickness of 1 mm to 200 mm, and the inflatable airbag 410 can have a thickness of 1 mm to 10 mm.

The limiting structure 20 is movable relative to the pressing element 40 and has an initial position and a pressed position. FIG1 exemplarily illustrates the limiting structure 20 in the initial position, and FIG3 exemplarily illustrates the limiting structure 20 in the pressed position. Furthermore, the limiting structure 20 can be pushed by the interposer layer 420 of the pressing element 40 to move from the initial position to the pressed position. In the initial position, the upper surface 210 of the limiting structure 20 is higher than the substrate 11. In the pressed position, the upper surface 210 of the limiting structure 20 is flush with the substrate 11, and the elastic member 30 is compressed by the limiting structure 20 to store elasticity. When the pressing element 40 stops pushing the limiting structure 20, the elastic element 30 releases its elasticity, causing the limiting structure 20 to return to its initial position from the pressed position.

In this embodiment, the pressing mechanism 1A may further include a reinforcing structure 50 disposed on the lower surface 220 of the limiting structure 20. Furthermore, the reinforcing structure 50 is disposed between the base 10 and the limiting structure 20.

As shown in Figure 3, the substrate 11 can be placed on the support stage 110. The substrate 11 is, for example, but not limited to, a silicon wafer, a circuit board, a glass plate or a metal plate.

The inflation of the airbag 410 causes the intermediate layer 420 to press against the substrate 11 and the limiting structure 20. The limiting structure 20 is in a compressed position due to being pressed by the intermediate layer 420 of the pressing element 40. At this time, the upper surface 210 of the limiting structure 20 is within ±1 mm of the substrate 11. Furthermore, the intermediate layer 420, through the inflation of the airbag 410, presses against the substrate 11, so that the difference between the upper surface 210 of the limiting structure 20 and the upper surface 100 of the substrate 11 is within ±1 mm. More specifically, the upper surface 210 of the limiting structure 20 in the compressed position is substantially flush with the upper surface 100 of the substrate 11.

Since the limiting structure 20 supports the pressing element 40, the limiting structure 20 can support the inflatable airbag 410 and the intermediate layer 420, so that when the inflatable airbag 410 pushes the intermediate layer 420, it can more efficiently cover the substrate 11 and fill the gap (not shown) where the substrate 11 has a height difference.

Figures 1 to 3 disclose a pressing mechanism 1A that allows the limiting structure 20 to rise and fall through the elastic element 30 and the pressing element 40, but the present invention is not limited thereto. Please refer to Figures 4 to 6, wherein Figure 4 is a schematic diagram of a pressing mechanism according to another embodiment of the present invention, Figure 5 is a schematic diagram of the base and limiting structure of the pressing mechanism of Figure 4, and Figure 6 is a schematic diagram of the lifting structure of the pressing mechanism of Figure 4 in the pressed position. In this embodiment, the pressing mechanism 1B includes a base 10B, a limiting structure 20, a pressing element 40, a lifting structure 60, and a driving device 70.

The base 10B includes a support stage 110 for supporting the substrate 11. Further, the base 10B may include the support stage 110 and a main body 120B for mounting the support stage 110. The upper surface 111 of the support stage 110 may be provided with negative pressure holes for adsorbing the substrate 11 or a clamp (not shown) for gripping the substrate 11. In addition, the base 10B may also include a plurality of openings 121 formed in the main body 120B, and these openings 121 are spaced apart along the direction of the base 10B. The upper surface 111 of the support stage 110 may be provided with negative pressure holes for adsorbing the substrate 11 or a clamp (not shown) for gripping the substrate 11.

The lifting structure 60 is correspondingly disposed with respect to the base 10B. Further, the lifting structure 60 may be a linkage, and the linkage passes through the opening 121 of the base 10B. The drive device 70, for example but not limited to, a servo motor, is connected to the lifting structure 60 and is used to drive the lifting structure 60 to rise or fall. In this embodiment, the number of lifting structures 60 may be multiple, i.e., multiple linkages corresponding to multiple openings 121 of the base 10B, but the invention is not limited to this.

The limiting structure 20 is movably disposed on the lifting structure 60, and the limiting structure 20 surrounds the support platform 110 of the base 10. Furthermore, the driving device 70 can drive the lifting structure 60 and the limiting structure 20 to rise or fall relative to the base 10 together.

The pressing element 40 is disposed corresponding to the support platform 110 of the base 10, and the pressing element 40 can be pneumatically driven or electrically driven. Furthermore, the pressing element 40 may include, for example, but not limited to, an inflatable airbag driven by pneumatic pressure or a flat, plate-shaped flattening member driven by electricity. In this embodiment, the pressing element 40 may include an inflatable airbag 410 and an intermediate layer 420. A detailed description of the pressing element 40 can be found in the preceding content corresponding to Figures 1 to 3, and will not be repeated here.

The lifting structure 60 is movable relative to the limiting structure 20, and has an initial position and a pressed position. Figure 4 illustrates the lifting structure 60 in the initial position, and Figure 6 illustrates the lifting structure 60 in the pressed position. Furthermore, the lifting structure 60 can be driven by the driving device 70 to move from the initial position to the pressed position, or to return from the pressed position to the initial position. In the initial position, the upper surface 210 of the limiting structure 20 is higher than the substrate 11. In the pressed position, the lifting structure 60 actuates such that the upper surface 210 of the limiting structure 20 is flush with the substrate 11.

As shown in Figure 6, the substrate 11 can be placed on the support platform 110. When the driving device 70 drives the lifting structure 60 to descend to the pressure position, the inflatable airbag 410 expands, causing the intermediary layer 420 to push against the substrate 11 and the limiting structure 20. At this time, due to the operation of the lifting structure 60, the upper surface 210 of the limiting structure 20 is adjusted so that it is within ±1 mm of the substrate 11. More specifically, the difference between the upper surface 210 of the limiting structure 20 and the upper surface 100 of the substrate 11 is within ±1 mm. More specifically, when the lifting structure 60 is in the pressure position, the upper surface 210 of the limiting structure 20 and the upper surface 100 of the substrate 11 are substantially flush.

In summary, according to the pressing mechanism disclosed in this invention, the limiting structure supports the pressing element, and this limiting structure can support the inflatable airbag and the intermediate layer, allowing the inflatable airbag to more efficiently cover the gaps between the substrate height differences when pushing the intermediate layer. Furthermore, the pressing element, including the inflatable airbag and the intermediate layer, not only improves the handling of substrates with varying heights but also effectively fills the gaps between the substrates with different heights, thereby increasing the number of times the pressing element can be used.

The embodiments of this invention disclosed as described above are not intended to limit this invention. Anyone skilled in the art may make some changes to the shape, structure, features and spirit described in the claims without departing from the spirit and scope of this invention. Therefore, the scope of protection of this invention shall be determined by the scope of the claims attached to this specification.

1A, 1B: Pressing mechanism 11: Substrate 100: Upper surface 10, 10B: Base 110: Support platform 111: Upper surface 120B: Main body 121: Opening 20: Limiting structure 210: Upper surface 220: Lower surface 30: Elastic component 40: Pressing element 410: Inflatable airbag 420: Intermediate layer 50: Reinforcing structure 60: Lifting structure 70: Drive device

Figure 1 is a schematic diagram of a pressing mechanism according to one embodiment of the present invention. Figure 2 is a schematic diagram of the limiting structure of the pressing mechanism of Figure 1. Figure 3 is a schematic diagram of the lifting structure of the pressing mechanism of Figure 1 in the pressed position. Figure 4 is a schematic diagram of a pressing mechanism according to another embodiment of the present invention. Figure 5 is a schematic diagram of the base and limiting structure of the pressing mechanism of Figure 4. Figure 6 is a schematic diagram of the lifting structure of the pressing mechanism of Figure 4 in the pressed position.

1A: Pressing Mechanism 10: Base 110: Support Platform 111: Upper Surface 20: Limiting Structure 210: Upper Surface 220: Lower Surface 30: Elastic Component 40: Pressing Element 410: Inflatable Airbag 420: Intermediate Layer

Claims (10)

A pressing mechanism includes: a base, including: a support platform for supporting a substrate; and a plurality of openings, wherein the openings are spaced apart along a circumferential direction of the base; at least one lifting structure corresponding to the base; a limiting structure movably disposed on the at least one lifting structure and surrounding the support platform; and wherein the lifting structure is movable relative to the base and has an initial position and a pressed position, wherein in the initial position, an upper surface of the limiting structure is higher than the substrate, and in the pressed position, the lifting structure actuates to adjust the upper surface of the limiting structure to be flush with the substrate. The pressing mechanism as described in claim 1, wherein, in the pressed position, the lifting mechanism actuates to adjust the upper surface of the limiting structure to be within ±1 mm of the substrate. The pressing mechanism as described in claim 1 further includes a drive device connected to the lifting mechanism for driving the lifting mechanism to rise or fall. A pressing mechanism includes: a base including a support platform for supporting a substrate; a limiting structure movably disposed on the base and surrounding the support platform; at least one elastic member disposed at intervals around the base and the limiting structure; and a pressing element disposed corresponding to the support platform, the pressing element being pneumatically or electrically driven; wherein the limiting structure is movable relative to the pressing element and has an initial position and a pressed position, in the initial position, an upper surface of the limiting structure being higher than the substrate, and in the pressed position, the pressing element pushes the limiting structure, causing the upper surface of the limiting structure to be flush with the substrate, and causing the upper surface of the limiting structure to be within ±1 mm of the substrate. A pressing mechanism includes: a base including a support platform for supporting a substrate; and a pressing element including: an inflatable airbag disposed corresponding to the support platform; and an intermediary layer glued to the inflatable airbag, wherein the intermediary layer pushes the substrate through the inflatable airbag. The pressing mechanism as described in claim 5, wherein the intermediate layer of the pressing element is a soft material or a hard material. The pressing mechanism as described in claim 5, wherein at least a portion of the interlayer of the pressing element is made of at least one of rubber, silicone, polymer and metal, and at least a portion of the inflatable airbag is made of at least one of silicone and rubber. The pressing mechanism as described in claim 5, wherein the thickness of the intermediate layer of the pressing element is 1 mm to 200 mm, and the thickness of the inflatable air bladder is 1 mm to 10 mm. The pressing mechanism as described in claim 5 further includes a limiting structure, wherein the limiting structure is movably disposed on the base, the limiting structure surrounds the support platform, and the limiting structure is movable relative to the inflatable airbag and has an initial position and a pressed position. In the initial position, an upper surface of the limiting structure is higher than the substrate. In the pressed position, the intermediate layer of the pressing element pushes the substrate through the inflatable airbag, so that the upper surface of the limiting structure is flush with the substrate. The pressing mechanism as described in claim 9, wherein, at the pressed position, the intermediate layer of the pressing element pushes the substrate through the inflatable air bladder, such that the upper surface of the limiting structure is within ±1 mm of the substrate.