TWI906781B - Antenna module and manufacturing method thereof - Google Patents
Antenna module and manufacturing method thereofInfo
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- TWI906781B TWI906781B TW113106666A TW113106666A TWI906781B TW I906781 B TWI906781 B TW I906781B TW 113106666 A TW113106666 A TW 113106666A TW 113106666 A TW113106666 A TW 113106666A TW I906781 B TWI906781 B TW I906781B
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Abstract
Description
本發明是有關於一種天線模組及其製造方法,特別是有關於一種將天線、脊形波導管及射頻積體電路整合於電路板中的天線模組及其製造方法。This invention relates to an antenna module and its manufacturing method, and more particularly to an antenna module and its manufacturing method that integrates an antenna, a ridge waveguide, and an RF integrated circuit in a circuit board.
於無線網路中,裝置間的連接與通訊的達成,是透過連接到接收器或發射器的天線,以接收或發射訊號。於無線通訊系統中,天線模組通常會利用矩形波導或脊形波導連接晶片與天線。然而,矩形波導的波導寬度較大,若設置於電路板中會需要較大的面積,而脊形波導則因波導寬度較小,電波訊號不易從外部垂直饋入,進而造成天線模組的體積過大或電性不佳等問題。In wireless networks, the connection and communication between devices are achieved through antennas connected to receivers or transmitters to receive or transmit signals. In wireless communication systems, antenna modules typically use rectangular waveguides or ridge waveguides to connect the chip and the antenna. However, rectangular waveguides have a larger waveguide width, requiring a larger area if installed on a circuit board, while ridge waveguides have a smaller waveguide width, making it difficult for radio signals to be fed vertically from the outside, resulting in problems such as excessive antenna module size or poor electrical performance.
本發明至少一實施例提出一種將天線、脊形波導管及射頻積體電路整合於電路板中的天線模組,可減少體積,並改善電性表現。At least one embodiment of the present invention provides an antenna module that integrates an antenna, a ridge waveguide, and an RF integrated circuit into a circuit board, which can reduce size and improve electrical performance.
本發明至少另一實施例提出上述天線模組的製造方法,以幫助減少上述天線模組的體積並改善電性表現。At least one other embodiment of the present invention provides a method for manufacturing the antenna module described above, in order to help reduce the size of the antenna module and improve its electrical performance.
本發明至少一實施例所提出的一種天線模組,包含電路板及射頻積體電路。電路板具有第一表面及與第一表面相對的第二表面,且包含槽孔天線、脊形波導管及凹槽。槽孔天線設置於第一表面。脊形波導管連接槽孔天線,脊形波導管具有內壁。凹槽自第二表面往第一表面的方向凹陷。射頻積體電路設置於凹槽中。At least one embodiment of the present invention provides an antenna module comprising a circuit board and an RF integrated circuit. The circuit board has a first surface and a second surface opposite to the first surface, and includes a slotted antenna, a ridge waveguide, and a recess. The slotted antenna is disposed on the first surface. The ridge waveguide is connected to the slotted antenna and has an inner wall. The recess is recessed from the second surface toward the first surface. The RF integrated circuit is disposed in the recess.
在本發明至少一實施例中,所述電路板包含線路結構、下核心板、下膠層、上核心板及上膠層。線路結構具有第二表面並包含凹槽。下核心板設置於線路結構上。下膠層設置於線路結構與下核心板之間,且貼合線路結構與下核心板。上核心板設置於下核心板上並具有第一表面。上膠層設置於下核心板與上核心板之間,且貼合下核心板與上核心板。In at least one embodiment of the present invention, the circuit board includes a circuit structure, a lower core board, a lower adhesive layer, an upper core board, and an upper adhesive layer. The circuit structure has a second surface and includes a groove. The lower core board is disposed on the circuit structure. The lower adhesive layer is disposed between the circuit structure and the lower core board and adheres to the circuit structure and the lower core board. The upper core board is disposed on the lower core board and has a first surface. The upper adhesive layer is disposed between the lower core board and the upper core board and adheres to the lower core board and the upper core board.
在本發明至少一實施例中,所述脊形波導管更包含設置於所述內壁上的金屬層,所述電路板更包含金屬膏,金屬膏設置於所述上膠層與所述脊形波導管之間並電性連接金屬層。In at least one embodiment of the present invention, the ridge waveguide further includes a metal layer disposed on the inner wall, and the circuit board further includes metal paste, which is disposed between the adhesive layer and the ridge waveguide and electrically connects the metal layer.
在本發明至少一實施例中,所述槽孔天線具有開孔,所述脊形波導管包含上空腔,上空腔連通開孔以延伸貫穿(extend through)所述上核心板。In at least one embodiment of the present invention, the slot antenna has an opening, and the ridge waveguide includes an upper cavity that communicates with the opening to extend through the upper core plate.
在本發明至少一實施例中,所述脊形波導管更包含延伸貫穿所述下核心板的第一下空腔及第二下空腔,且第一下空腔及第二下空腔沿第一方向間隔設置於所述下核心板中,第一方向平行於所述第一表面。In at least one embodiment of the present invention, the ridge waveguide further includes a first lower cavity and a second lower cavity extending through the lower core plate, and the first lower cavity and the second lower cavity are spaced apart in the lower core plate along a first direction parallel to the first surface.
在本發明至少一實施例中,所述脊形波導管更包含延伸貫穿所述上膠層並對應所述上空腔的上連接槽,所述上空腔藉由上連接槽連通所述第一下空腔及所述第二下空腔,上連接槽於所述上核心板的正投影範圍大於所述上空腔,且所述上空腔位於正投影範圍內。In at least one embodiment of the present invention, the ridge waveguide further includes an upper connecting groove extending through the upper adhesive layer and corresponding to the upper cavity, the upper cavity being connected to the first lower cavity and the second lower cavity via the upper connecting groove, the orthographic projection range of the upper connecting groove on the upper core plate being larger than the upper cavity, and the upper cavity being located within the orthographic projection range.
在本發明至少一實施例中,所述脊形波導管更包含延伸貫穿所述下膠層的第一下連接槽及第二下連接槽,第一下連接槽及第二下連接槽分別對應並連通所述第一下空腔及所述第二下空腔。In at least one embodiment of the present invention, the ridge waveguide further includes a first lower connecting groove and a second lower connecting groove extending through the lower adhesive layer, the first lower connecting groove and the second lower connecting groove respectively corresponding to and connecting the first lower cavity and the second lower cavity.
在本發明至少一實施例中,所述第二下連接槽於所述第一方向上設置於所述第一下連接槽與所述射頻積體電路之間。所述線路結構更包含頂層線路,所述第一下連接槽及所述第二下連接槽分別暴露頂層線路的第一部分及第二部分,頂層線路的第二部分具有開槽,所述射頻積體電路藉由開槽饋入電波訊號至所述脊形波導管。In at least one embodiment of the present invention, the second lower connection slot is disposed in the first direction between the first lower connection slot and the RF integrated circuit. The circuit structure further includes a top-level circuit, the first lower connection slot and the second lower connection slot respectively exposing a first portion and a second portion of the top-level circuit, the second portion of the top-level circuit having a slot, and the RF integrated circuit feeding radio wave signals to the ridge waveguide through the slot.
本發明至少一實施例所提出的一種天線模組的製造方法,包含提供初始線路結構,包含初始頂層線路。將初始下膠層設置於初始線路結構與初始下核心板之間。壓合初始下膠層、初始線路結構及初始下核心板。在壓合初始下膠層、初始線路結構及初始下核心板之後,移除部分初始下核心板及部分初始下膠層,以形成下核心板、延伸貫穿下核心板的第一下空腔及第二下空腔、下膠層及延伸貫穿下膠層的第一下連接槽及第二下連接槽,第一下連接槽及第二下連接槽分別暴露初始頂層線路的第一部分及第二部分。在移除部分初始下核心板及部分初始下膠層之後,形成第一金屬層於下核心板、第一下空腔的內壁、第二下空腔的內壁、第一下連接槽的內壁、第二下連接槽的內壁及初始頂層線路的第一部分及第二部分上。移除部分位於初始頂層線路的第二部分上的第一金屬層,以形成頂層線路。移除部分初始線路結構,以形成凹槽。提供初始上核心板。移除部分初始上核心板,以形成上核心板、槽孔天線及上空腔,槽孔天線具有開孔,上空腔連通開孔以延伸貫穿上核心板。在形成上核心板、槽孔天線及上空腔之後,形成第二金屬層於上核心板、槽孔天線、開孔的內壁及上空腔的內壁上。提供初始上膠層。移除部分初始上膠層,以形成上膠層及上連接槽,上連接槽延伸貫穿上膠層並對應上空腔。形成金屬膏於位於下核心板上的第一金屬層上。將上膠層設置於下核心板與上核心板之間。在形成金屬膏之後,壓合上膠層、下核心板及上核心板,第一金屬層及第二金屬層藉由金屬膏彼此電性連接以形成金屬層。固設射頻積體電路於凹槽中。A method for manufacturing an antenna module according to at least one embodiment of the present invention includes providing an initial wiring structure, including an initial top-layer wiring. An initial lower adhesive layer is disposed between the initial wiring structure and an initial lower core board. The initial lower adhesive layer, the initial wiring structure, and the initial lower core board are pressed together. After pressing the initial lower adhesive layer, the initial wiring structure, and the initial lower core board, a portion of the initial lower core board and a portion of the initial lower adhesive layer are removed to form a lower core board, a first lower cavity and a second lower cavity extending through the lower core board, a lower adhesive layer, and a first lower connecting groove and a second lower connecting groove extending through the lower adhesive layer, wherein the first lower connecting groove and the second lower connecting groove respectively expose a first portion and a second portion of the initial top-layer wiring. After removing a portion of the initial lower core plate and a portion of the initial lower adhesive layer, a first metal layer is formed on the lower core plate, the inner wall of the first lower cavity, the inner wall of the second lower cavity, the inner wall of the first lower connecting groove, the inner wall of the second lower connecting groove, and the first and second portions of the initial top layer wiring. A portion of the first metal layer located on the second portion of the initial top layer wiring is removed to form the top layer wiring. A portion of the initial wiring structure is removed to form a groove. An initial upper core plate is provided. A portion of the initial upper core plate is removed to form an upper core plate, a slot antenna, and an upper cavity. The slot antenna has an opening, and the upper cavity connects to the opening to extend through the upper core plate. After forming the upper core plate, the slot antenna, and the upper cavity, a second metal layer is formed on the upper core plate, the slot antenna, the inner wall of the opening, and the inner wall of the upper cavity. An initial adhesive layer is provided. A portion of the initial adhesive layer is removed to form an adhesive layer and an upper connecting groove, which extends through the adhesive layer and corresponds to the upper cavity. Metal paste is formed on the first metal layer located on the lower core plate. The adhesive layer is placed between the lower and upper core plates. After forming the metal paste, the adhesive layer, lower core plate, and upper core plate are pressed together, electrically connecting the first and second metal layers to form a metal layer. The RF integrated circuit is fixed in the recess.
在本發明至少一實施例中,所述上空腔、所述上連接槽、所述第一下空腔、所述第二下空腔、所述第一下連接槽及所述第二下連接槽形成脊形波導管,所述脊形波導管連接所述槽孔天線。In at least one embodiment of the present invention, the upper cavity, the upper connecting slot, the first lower cavity, the second lower cavity, the first lower connecting slot, and the second lower connecting slot form a ridge waveguide, and the ridge waveguide is connected to the slot antenna.
在本發明至少一實施例中,在移除部分位於初始頂層線路的第二部分上的第一金屬層形成所述頂層線路之後,所述第一下連接槽及所述第二下連接槽分別暴露所述頂層線路的第一部分及第二部分,頂層線路的第二部分具有開槽,所述射頻積體電路藉由開槽饋入電波訊號至所述脊形波導管。In at least one embodiment of the present invention, after the top layer is formed by removing a portion of the first metal layer located on the second portion of the initial top layer, the first lower connection slot and the second lower connection slot respectively expose the first portion and the second portion of the top layer, the second portion of the top layer having a slot, and the RF integrated circuit feeding radio wave signals to the ridge waveguide through the slot.
在以下的內文中,為了清楚呈現本發明的技術特徵,圖式中的元件(例如層、膜、基板以及區域等)的尺寸(例如長度、寬度、厚度與深度)會以不等比例的方式放大,而且有的元件數量會減少。因此,下文實施例的說明與解釋不受限於圖式中的元件數量以及元件所呈現的尺寸與形狀,而應涵蓋如實際製程及/或公差所導致的尺寸、形狀以及兩者的偏差。例如,圖式所示的平坦表面可以具有粗糙及/或非線性的特徵,而圖式所示的銳角可以是圓的。所以,本發明圖式所呈示的元件主要是用於示意,並非旨在精準地描繪出元件的實際形狀,也非用於限制本發明的申請專利範圍。In the following text, to clearly illustrate the technical features of the invention, the dimensions (e.g., length, width, thickness, and depth) of the elements (e.g., layers, films, substrates, and areas) in the drawings will be enlarged proportionally, and the number of some elements may be reduced. Therefore, the description and explanation of the embodiments below are not limited to the number of elements in the drawings or the dimensions and shapes presented by the elements, but should cover dimensions, shapes, and deviations from both due to actual manufacturing processes and/or tolerances. For example, a flat surface shown in the drawings may have rough and/or nonlinear characteristics, and sharp angles shown in the drawings may be rounded. Therefore, the elements presented in the drawings of the invention are mainly for illustration and are not intended to accurately depict the actual shape of the elements, nor are they intended to limit the scope of the claims of the invention.
其次,本發明所出現的「約」、「近似」或「實質上」等這類用字不僅涵蓋明確記載的數值與數值範圍,而且也涵蓋發明所屬技術領域中具有通常知識者所能理解的可允許偏差範圍,其中此偏差範圍可由測量時所產生的誤差來決定,而此誤差例如是起因於測量系統或製程條件兩者的限制。舉例而言,兩物件(例如基板的平面或走線)「實質上平行」或「實質上垂直」,其中「實質上平行」與「實質上垂直」分別代表這兩物件之間的平行與垂直可包含允許偏差範圍所導致的不平行與不垂直。Secondly, the terms "approximately," "about," or "substantially" used in this invention not only cover explicitly stated numerical values and ranges, but also the permissible deviation range understandable to a person of ordinary skill in the art to which this invention pertains. This deviation range can be determined by the error generated during measurement, which may be caused by limitations of the measurement system or process conditions, for example. For instance, two objects (such as the planes or traces of a substrate) are "substantially parallel" or "substantially perpendicular." "Substantially parallel" and "substantially perpendicular" respectively mean that the parallelism and perpendicularity between the two objects can include non-parallelism and non-perpendicularity caused by the permissible deviation range.
本發明所使用的空間相對用語,例如「下方」、「之下」、「上方」、「之上」等,這是為了便於敘述一元件或特徵與另一元件或特徵之間的相對關係,如圖中所繪示。這些空間上的相對用語的真實意義包含其他的方位。例如,當圖示上下翻轉180度時,一元件與另一元件之間的關係,可能從「下方」、「之下」變成「上方」、「之上」。此外,本發明所使用的空間上的相對敘述也應作同樣的解釋。The spatial relative terms used in this invention, such as "below," "under," "above," and "above," are for the convenience of describing the relative relationship between one element or feature and another, as illustrated in the figure. The true meaning of these spatial relative terms includes other orientations. For example, when the figure is rotated 180 degrees vertically, the relationship between one element and another may change from "below" or "under" to "above" or "above." Furthermore, the spatial relative descriptions used in this invention should be interpreted in the same way.
應當可以理解的是,雖然本發明可能會使用到「第一」、「第二」、「第三」等術語來描述各種元件或者特徵,但這些元件或者特徵不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一特徵與另一特徵。另外,本發明所使用的術語「或」,應視實際情況可能包含相關聯的列出項目中的任一個或者多個的組合。It should be understood that although the present invention may use terms such as "first," "second," and "third" to describe various elements or features, these elements or features should not be limited by these terms. These terms are primarily used to distinguish one element from another, or one feature from another. Furthermore, the term "or" used in the present invention may, as the case may, include any one or more of the related listed items.
雖然本發明中利用一系列的操作或步驟來說明製造方法,但是這些操作或步驟所示的順序不應被解釋為本發明的限制。例如,某些操作或步驟可以按不同順序進行及/或與其它步驟同時進行。此外,在此所述的每一個操作或步驟可以包含數個子步驟或動作。Although the present invention uses a series of operations or steps to illustrate the manufacturing method, the order in which these operations or steps are shown should not be construed as a limitation of the present invention. For example, some operations or steps may be performed in a different order and/or simultaneously with other steps. Furthermore, each operation or step described herein may comprise several sub-steps or actions.
此外,本發明可通過其他不同的具體實施例加以施行或應用,本發明的各項細節也可基於不同觀點與應用,在不悖離本發明的構思下進行各種實施例的組合、修改與變更。Furthermore, the present invention can be implemented or applied through other different specific embodiments, and various details of the present invention can also be combined, modified and changed based on different viewpoints and applications without departing from the concept of the present invention.
圖1是本發明至少一實施例的天線模組的局部剖面示意圖。請參閱圖1,天線模組1包含電路板10及射頻積體電路20。電路板10具有第一表面S1及與第一表面S1相對的第二表面S2,且包含槽孔天線11、脊形波導管12及凹槽13。槽孔天線11設置於第一表面S1。脊形波導管12連接槽孔天線11,脊形波導管12具有內壁12W。凹槽13自第二表面S2往第一表面S1的方向凹陷。射頻積體電路20設置於凹槽13中,射頻積體電路20饋入電波訊號至脊形波導管12。Figure 1 is a partial cross-sectional schematic diagram of an antenna module according to at least one embodiment of the present invention. Referring to Figure 1, the antenna module 1 includes a circuit board 10 and an RF integrated circuit 20. The circuit board 10 has a first surface S1 and a second surface S2 opposite to the first surface S1, and includes a slot antenna 11, a ridge waveguide 12, and a groove 13. The slot antenna 11 is disposed on the first surface S1. The ridge waveguide 12 is connected to the slot antenna 11 and has an inner wall 12W. The groove 13 is recessed from the second surface S2 toward the first surface S1. The RF integrated circuit 20 is disposed in the groove 13, and the RF integrated circuit 20 feeds radio wave signals to the ridge waveguide 12.
藉由將脊形波導管12設置於電路板10中並連接槽孔天線11,以及將射頻積體電路20設置於電路板10的凹槽13中,可縮短晶片端(射頻積體電路20)至天線端(槽孔天線11)的電波傳送路徑,進而改善電性表現。再者,由於脊形波導管12的波導寬度較小,可減少天線模組的體積,亦可針對多個通道進行最密設計,應用於多發多收的天線模組,可更進一步減少體積。By placing the ridge waveguide 12 in the circuit board 10 and connecting it to the slot antenna 11, and placing the RF integrated circuit 20 in the recess 13 of the circuit board 10, the electromagnetic wave transmission path from the chip end (RF integrated circuit 20) to the antenna end (slot antenna 11) can be shortened, thereby improving electrical performance. Furthermore, since the waveguide width of the ridge waveguide 12 is smaller, the size of the antenna module can be reduced, and the densest design can be carried out for multiple channels. When applied to multi-transmitter and multi-receiver antenna modules, the size can be further reduced.
如圖1所示,電路板10包含線路結構110、下核心板120、下膠層130、上核心板140及上膠層150。線路結構110具有第二表面S2並包含凹槽13。下核心板120設置於線路結構110上。下膠層130設置於線路結構110與下核心板120之間,且貼合線路結構110與下核心板120。上核心板140設置於下核心板120上並具有第一表面S1。上膠層150設置於下核心板120與上核心板140之間,且貼合下核心板120與上核心板140。As shown in Figure 1, the circuit board 10 includes a circuit structure 110, a lower core board 120, a lower adhesive layer 130, an upper core board 140, and an upper adhesive layer 150. The circuit structure 110 has a second surface S2 and includes a groove 13. The lower core board 120 is disposed on the circuit structure 110. The lower adhesive layer 130 is disposed between the circuit structure 110 and the lower core board 120, and adheres to the circuit structure 110 and the lower core board 120. The upper core board 140 is disposed on the lower core board 120 and has a first surface S1. The upper adhesive layer 150 is disposed between the lower core board 120 and the upper core board 140, and adheres to the lower core board 120 and the upper core board 140.
槽孔天線11具有開孔11O,脊形波導管12包含上空腔121,上空腔121連通開孔11O以延伸貫穿上核心板140。具體而言,於上核心板140的法線上,上空腔121與開孔11O重疊並連接以延伸貫穿上核心板140。脊形波導管12更包含延伸貫穿下核心板120的第一下空腔122及第二下空腔123,且第一下空腔122及第二下空腔123沿第一方向D1間隔設置於下核心板120中,第一方向D1平行於第一表面S1。The slotted antenna 11 has an opening 110, and the ridge waveguide 12 includes an upper cavity 121 that connects to the opening 110 and extends through the core plate 140. Specifically, on the normal of the upper core plate 140, the upper cavity 121 overlaps with and connects to the opening 110 to extend through the core plate 140. The ridge waveguide 12 further includes a first lower cavity 122 and a second lower cavity 123 extending through the lower core plate 120, and the first lower cavity 122 and the second lower cavity 123 are spaced apart in the lower core plate 120 along a first direction D1, where the first direction D1 is parallel to the first surface S1.
脊形波導管12更包含延伸貫穿上膠層150並對應上空腔121的上連接槽124,上空腔121藉由上連接槽124連通第一下空腔122及第二下空腔123。詳細而言,於上核心板140的法線上,上空腔121與上連接槽124重疊並連接,而上連接槽124與第一下空腔122及第二下空腔123重疊並連接。上連接槽124於上核心板140的正投影範圍P大於上空腔121,且上空腔121位於正投影範圍P內。The ridge waveguide 12 further includes an upper connecting groove 124 extending through the adhesive layer 150 and corresponding to the upper cavity 121. The upper cavity 121 is connected to the first lower cavity 122 and the second lower cavity 123 via the upper connecting groove 124. Specifically, on the normal of the upper core plate 140, the upper cavity 121 overlaps with and is connected to the upper connecting groove 124, while the upper connecting groove 124 overlaps with and is connected to the first lower cavity 122 and the second lower cavity 123. The orthographic projection range P of the upper connecting groove 124 on the upper core plate 140 is larger than that of the upper cavity 121, and the upper cavity 121 is located within the orthographic projection range P.
如圖1所示,脊形波導管12更包含設置於內壁12W上的金屬層12M,電路板10更包含金屬膏160,金屬膏160於第一方向D1上設置於上膠層150與脊形波導管12之間並電性連接金屬層12M。換句話說,金屬膏160設置於脊形波導管12的外圍,且於上核心板140的法線上位於下核心板120與上核心板140之間。As shown in Figure 1, the ridge waveguide 12 further includes a metal layer 12M disposed on the inner wall 12W, and the circuit board 10 further includes a metal paste 160. The metal paste 160 is disposed in the first direction D1 between the upper adhesive layer 150 and the ridge waveguide 12 and electrically connected to the metal layer 12M. In other words, the metal paste 160 is disposed on the periphery of the ridge waveguide 12 and is located between the lower core plate 120 and the upper core plate 140 on the normal of the upper core plate 140.
藉由設置金屬膏160,可電性連接上空腔121的金屬層12M與第一下空腔122及第二下空腔123的金屬層12M,避免電波訊號漏損。此外,由於脊形波導管12為空氣填充式基板集成波導(air-filled substrate integrated waveguide,AFSIW),且其內壁12W設有金屬層12M,搭配槽孔天線11可大幅減少損耗產生。By applying the metal paste 160, the metal layer 12M of the upper cavity 121 can be electrically connected to the metal layers 12M of the first lower cavity 122 and the second lower cavity 123, thus preventing radio signal leakage. In addition, since the ridge waveguide 12 is an air-filled substrate integrated waveguide (AFSIW) and its inner wall 12W is provided with a metal layer 12M, the generation of losses can be greatly reduced when combined with the slot antenna 11.
請繼續參閱圖1,脊形波導管12更包含延伸貫穿下膠層130的第一下連接槽125及第二下連接槽126,第一下連接槽125及第二下連接槽126分別對應並連通第一下空腔122及第二下空腔123。具體而言,於上核心板140的法線上,第一下連接槽125及第二下連接槽126分別與第一下空腔122及第二下空腔123重疊並連接。Please continue referring to Figure 1. The ridge waveguide 12 further includes a first lower connecting groove 125 and a second lower connecting groove 126 extending through the lower adhesive layer 130. The first lower connecting groove 125 and the second lower connecting groove 126 correspond to and connect to the first lower cavity 122 and the second lower cavity 123, respectively. Specifically, on the normal of the upper core plate 140, the first lower connecting groove 125 and the second lower connecting groove 126 overlap with and connect to the first lower cavity 122 and the second lower cavity 123, respectively.
第二下連接槽126於第一方向D1上設置於第一下連接槽125與射頻積體電路20之間。線路結構110更包含頂層線路111,第一下連接槽125及第二下連接槽126分別暴露頂層線路111的第一部分及第二部分,頂層線路111的第二部分具有開槽111S,射頻積體電路20藉由開槽111S饋入電波訊號至脊形波導管12。藉由前述開槽111S的設計,可加大饋入電波訊號的通道,進而改善電性表現。在其他實施例中,第一下連接槽125可不延伸貫穿下膠層130,即不暴露頂層線路111的第一部分。The second lower connector 126 is disposed in the first direction D1 between the first lower connector 125 and the RF integrated circuit 20. The circuit structure 110 further includes a top-layer circuit 111. The first lower connector 125 and the second lower connector 126 expose a first portion and a second portion of the top-layer circuit 111, respectively. The second portion of the top-layer circuit 111 has a slot 111S, through which the RF integrated circuit 20 feeds radio wave signals to the ridge waveguide 12. By designing the aforementioned slot 111S, the channel for feeding radio wave signals can be increased, thereby improving electrical performance. In other embodiments, the first lower connector 125 may not extend through the lower adhesive layer 130, that is, the first portion of the top-layer circuit 111 may not be exposed.
此外,如圖1所示,線路結構110更包含內層線路112,而射頻積體電路20包含接墊20P,接墊20P設置於凹槽13中的開口(圖未標號)並電性連接內層線路112。Furthermore, as shown in Figure 1, the circuit structure 110 further includes an inner layer circuit 112, and the RF integrated circuit 20 includes a pad 20P, which is disposed in an opening (not labeled) in the groove 13 and electrically connected to the inner layer circuit 112.
圖2A到圖2F是本發明至少一實施例的天線模組在不同製程階段的局部剖面圖。請參閱圖2A,提供初始線路結構110’,包含初始頂層線路111’及內層線路112。請參閱圖2B,將初始下膠層130’設置於初始線路結構110’與初始下核心板120’之間。Figures 2A to 2F are partial cross-sectional views of an antenna module of at least one embodiment of the present invention at different process stages. Referring to Figure 2A, an initial circuit structure 110' is provided, including an initial top layer circuit 111' and an inner layer circuit 112. Referring to Figure 2B, an initial lower adhesive layer 130' is disposed between the initial circuit structure 110' and the initial lower core board 120'.
請參閱圖2C,首先,壓合初始下膠層130’、初始線路結構110’及初始下核心板120’。在壓合初始下膠層130’、初始線路結構110’及初始下核心板120’之後,移除部分初始下核心板120’及部分初始下膠層130’,以形成下核心板120、延伸貫穿下核心板120的第一下空腔122及第二下空腔123、下膠層130及延伸貫穿下膠層130的第一下連接槽125及第二下連接槽126,第一下連接槽125及第二下連接槽126分別暴露初始頂層線路111’的第一部分及第二部分。Referring to Figure 2C, firstly, the initial lower adhesive layer 130', the initial wiring structure 110', and the initial lower core plate 120' are pressed together. After pressing the initial lower adhesive layer 130', the initial wiring structure 110', and the initial lower core plate 120', a portion of the initial lower core plate 120' and a portion of the initial lower adhesive layer 130' are removed to form the lower core plate 120, the first lower cavity 122 and the second lower cavity 123 extending through the lower core plate 120, the lower adhesive layer 130, and the first lower connecting groove 125 and the second lower connecting groove 126 extending through the lower adhesive layer 130. The first lower connecting groove 125 and the second lower connecting groove 126 respectively expose the first and second portions of the initial top layer wiring 111'.
在移除部分初始下核心板120’及部分初始下膠層130’之後,形成第一金屬層M1於下核心板120、第一下空腔122的內壁、第二下空腔123的內壁、第一下連接槽125的內壁、第二下連接槽126的內壁及初始頂層線路111’的第一部分及第二部分上。移除部分位於初始頂層線路111’的第二部分上的第一金屬層M1,以形成頂層線路111。After removing a portion of the initial lower core plate 120' and a portion of the initial lower adhesive layer 130', a first metal layer M1 is formed on the lower core plate 120, the inner wall of the first lower cavity 122, the inner wall of the second lower cavity 123, the inner wall of the first lower connecting groove 125, the inner wall of the second lower connecting groove 126, and the first and second portions of the initial top layer circuit 111'. The first metal layer M1 located on the second portion of the initial top layer circuit 111' is removed to form the top layer circuit 111.
如圖2C所示,在移除部分位於初始頂層線路111’的第二部分上的第一金屬層M1形成頂層線路111之後,第一下連接槽125及第二下連接槽126分別暴露頂層線路111的第一部分及第二部分,頂層線路111的第二部分具有開槽111S。As shown in Figure 2C, after removing the first metal layer M1 located on the second part of the initial top layer circuit 111' to form the top layer circuit 111, the first lower connection groove 125 and the second lower connection groove 126 respectively expose the first part and the second part of the top layer circuit 111, and the second part of the top layer circuit 111 has a slot 111S.
然而,在其他實施例中,第一下連接槽125可不延伸貫穿下膠層130,即不暴露頂層線路111的第一部分,且第一金屬層M1也不會形成於初始頂層線路111’的第一部分上。However, in other embodiments, the first lower connector groove 125 may not extend through the lower adhesive layer 130, i.e., the first portion of the top layer circuit 111 is not exposed, and the first metal layer M1 is not formed on the first portion of the initial top layer circuit 111'.
請參閱圖2D,移除部分初始線路結構110’,以形成凹槽13。請參閱圖2E,提供初始上核心板(圖未示)。移除部分初始上核心板,以形成上核心板140、槽孔天線11及上空腔121,槽孔天線11具有開孔11O,上空腔121連通開孔11O以延伸貫穿上核心板140。在形成上核心板140、槽孔天線11及上空腔121之後,形成第二金屬層M2於上核心板140、槽孔天線11、開孔11O的內壁及上空腔121的內壁上。Referring to Figure 2D, a portion of the initial wiring structure 110' is removed to form a groove 13. Referring to Figure 2E, an initial upper core plate (not shown) is provided. A portion of the initial upper core plate is removed to form an upper core plate 140, a slot antenna 11, and an upper cavity 121. The slot antenna 11 has an opening 110, and the upper cavity 121 extends through the opening 110 and through the upper core plate 140. After forming the upper core plate 140, the slot antenna 11, and the upper cavity 121, a second metal layer M2 is formed on the inner walls of the upper core plate 140, the slot antenna 11, the opening 110, and the upper cavity 121.
在一些實施例中,可以機械加工製程來移除部分初始下核心板120’及部分初始下膠層130’、移除部分初始線路結構110’以形成凹槽13、移除部分初始上核心板以形成上空腔121以及移除部分初始頂層線路111’的第二部分以形成頂層線路111的開槽111S,例如銑床製程。此外,可以雷射鑽孔製程來形成凹槽13中暴露內層線路112的開口(圖未標號)以提供接墊20P電性連接線路結構110以及移除部分初始上核心板以形成槽孔天線11的開孔11O。In some embodiments, machining processes can be used to remove portions of the initial lower core plate 120' and the initial lower adhesive layer 130', remove portions of the initial wiring structure 110' to form a groove 13, remove portions of the initial upper core plate to form an upper cavity 121, and remove a second portion of the initial top layer wiring 111' to form a slot 111S for the top layer wiring 111, such as milling. Alternatively, laser drilling processes can be used to form openings (not labeled) in the groove 13 to expose the inner layer wiring 112, providing the pad 20P electrical connection wiring structure 110, and to remove portions of the initial upper core plate to form openings 11O for the slot antenna 11.
藉由於同一道製程形成第二金屬層M2於上核心板140、槽孔天線11、開孔11O的內壁及上空腔121的內壁上,避免因分開形成金屬層而造成後續對位不準的情形,故可提供較佳的電波傳輸路徑,進而改善電性表現。By forming a second metal layer M2 on the inner wall of the upper core plate 140, the slot antenna 11, the opening 11O, and the inner wall of the upper cavity 121 in the same process, the subsequent misalignment caused by forming separate metal layers is avoided, thus providing a better radio wave transmission path and improving electrical performance.
如圖2E所示,提供初始上膠層(圖未示)。移除部分初始上膠層,以形成上膠層150及上連接槽124,上連接槽124延伸貫穿上膠層150並對應上空腔121。形成金屬膏160於位於下核心板120上的第一金屬層M1上。將上膠層150設置於下核心板120與上核心板140之間。As shown in Figure 2E, an initial adhesive layer (not shown) is provided. A portion of the initial adhesive layer is removed to form an adhesive layer 150 and an upper connecting groove 124, which extends through the adhesive layer 150 and corresponds to the upper cavity 121. Metal paste 160 is formed on a first metal layer M1 located on the lower core plate 120. The adhesive layer 150 is disposed between the lower core plate 120 and the upper core plate 140.
請參閱圖2F,在形成金屬膏160之後,壓合上膠層150、下核心板120及上核心板140,第一金屬層M1及第二金屬層M2藉由金屬膏160彼此電性連接以形成金屬層12M,而上空腔121、上連接槽124、第一下空腔122、第二下空腔123、第一下連接槽125及第二下連接槽126形成脊形波導管12,脊形波導管12連接槽孔天線11。請參閱圖1,固設射頻積體電路20於凹槽13中,射頻積體電路20藉由開槽111S饋入電波訊號至脊形波導管12。Please refer to Figure 2F. After forming the metal paste 160, the upper adhesive layer 150, the lower core plate 120, and the upper core plate 140 are pressed together. The first metal layer M1 and the second metal layer M2 are electrically connected to each other by the metal paste 160 to form the metal layer 12M. The upper cavity 121, the upper connecting groove 124, the first lower cavity 122, the second lower cavity 123, the first lower connecting groove 125, and the second lower connecting groove 126 form the ridge waveguide 12. The ridge waveguide 12 is connected to the slot antenna 11. Please refer to Figure 1. The RF integrated circuit 20 is fixed in the groove 13. The RF integrated circuit 20 feeds radio wave signals to the ridge waveguide 12 through the slot 111S.
在一些實施例中,下核心板120及上核心板140可為FR-4樹脂。由於脊形波導管12的內壁12W設有金屬層12M,搭配槽孔天線11形成較佳的電波傳輸路徑,可大幅減少損耗產生,故下核心板120及上核心板140可使用價格較低的樹脂,降低製造成本。In some embodiments, the lower core plate 120 and the upper core plate 140 may be made of FR-4 resin. Since the inner wall 12W of the ridge waveguide 12 is provided with a metal layer 12M, which forms a better radio wave transmission path with the slot antenna 11, the loss can be greatly reduced. Therefore, the lower core plate 120 and the upper core plate 140 can use a lower-priced resin, reducing manufacturing costs.
在一些實施例中,頂層線路111、金屬層12M的第一金屬層M1及第二金屬層M2的材料可包含銅。第一金屬層M1及第二金屬層M2可由電鍍製程形成。此外,金屬膏160的材料可包含銀膏或銅膏。金屬膏160可由印刷製程、烘烤製程及壓合製程形成。In some embodiments, the materials of the top layer circuit 111, the first metal layer M1, and the second metal layer M2 of the metal layer 12M may include copper. The first metal layer M1 and the second metal layer M2 may be formed by an electroplating process. Furthermore, the material of the metal paste 160 may include silver paste or copper paste. The metal paste 160 may be formed by a printing process, a baking process, and a laminating process.
綜上所述,在以上本發明至少一實施例的天線模組及其製造方法,藉由將脊形波導設置於電路板中並連接天線,以及將晶片設置於電路板中,可縮短晶片端至天線端的電波傳送路徑,進而改善電性表現。再者,由於脊形波導的波導寬度較小,可減少天線模組的體積,亦可針對多個通道進行最密設計,應用於多發多收的天線模組,可更進一步減少體積。In summary, the antenna module and its manufacturing method according to at least one embodiment of the present invention, by placing a ridge waveguide in the circuit board and connecting it to the antenna, and by placing the chip in the circuit board, can shorten the radio wave transmission path from the chip end to the antenna end, thereby improving electrical performance. Furthermore, since the ridge waveguide has a smaller waveguide width, the size of the antenna module can be reduced, and the densest design can be carried out for multiple channels. When applied to multi-transmitter and multi-receiver antenna modules, the size can be further reduced.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,所屬技術領域中具有通常知識者,在不脫離本發明精神和範圍內,當可作些許更動與潤飾,因此本發明保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed above with reference to embodiments, it is not intended to limit the present invention. Those skilled in the art may make some modifications and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be determined by the appended patent application.
1:天線模組1: Antenna Module
10:電路板10: Circuit board
11:槽孔天線11: Slotted Antenna
11O:開孔11O: Opening
12:脊形波導管12: Ridge waveguide
12M:金屬層12M: Metal Layer
12W:內壁12W: Inner wall
13:凹槽13: Groove
20:射頻積體電路20: Radio Frequency Integrated Circuit
20P:接墊20P: Pads
110:線路結構110: Line structure
110’:初始線路結構110’: Initial circuit structure
111:頂層線路111: Top-level wiring
111’:初始頂層線路111’: Initial top-level routing
111S:開槽111S: Slotting
112:內層線路112: Inner layer wiring
120:下核心板120: Lower core board
120’:初始下核心板120’: Initial lower core board
121:上空腔121: Upper cavity
122:第一下空腔122: First lower cavity
123:第二下空腔123: Second lower cavity
124:上連接槽124: Upper connecting slot
125:第一下連接槽125: First lower connecting slot
126:第二下連接槽126: Second lower connecting slot
130:下膠層130: Undercoat
130’:初始下膠層130’: Initial underlayer
140:上核心板140: Upgrade to core board
150:上膠層150: Top Coating
160:金屬膏160: Metal Paste
D1:第一方向D1: First Direction
M1:第一金屬層M1: First metal layer
M2:第二金屬層M2: Second metal layer
P:正投影範圍P: Orthographic projection range
S1:第一表面S1: First surface
S2:第二表面S2: Second surface
圖1是本發明至少一實施例的天線模組的局部剖面示意圖。 圖2A到圖2F是本發明至少一實施例的天線模組在不同製程階段的局部剖面圖。Figure 1 is a partial cross-sectional schematic diagram of an antenna module of at least one embodiment of the present invention. Figures 2A to 2F are partial cross-sectional views of the antenna module of at least one embodiment of the present invention at different manufacturing stages.
國內寄存資訊(請依寄存機構、日期、號碼順序註記) 無 國外寄存資訊(請依寄存國家、機構、日期、號碼順序註記) 無Domestic storage information (please record in the order of storage institution, date, and number): None. International storage information (please record in the order of storage country, institution, date, and number): None.
1:天線模組 1: Antenna Module
10:電路板 10: Circuit Board
11:槽孔天線 11: Slotted Antenna
11O:開孔 11O: Opening
12:脊形波導管 12: Ridge waveguide
12M:金屬層 12M: Metal Layer
12W:內壁 12W: Inner Wall
13:凹槽 13: Groove
20:射頻積體電路 20: Radio Frequency Integrated Circuits
20P:接墊 20P: Pads
110:線路結構 110: Line structure
111:頂層線路 111: Top Layer Wiring
111S:開槽 111S: Slotting
112:內層線路 112: Inner Layer Circuits
120:下核心板 120: Lower core board
121:上空腔 121: Upper cavity
122:第一下空腔 122: First lower cavity
123:第二下空腔 123: Second lower cavity
124:上連接槽 124: Upper connecting slot
125:第一下連接槽 125: First lower connecting slot
126:第二下連接槽 126: Second lower connecting slot
130:下膠層 130: Undercoat
140:上核心板 140: Upgrade to core board
150:上膠層 150: Top Coating
160:金屬膏 160: Metal Paste
D1:第一方向 D1: First Direction
P:正投影範圍 P: Orthographic projection range
S1:第一表面 S1: First surface
S2:第二表面 S2: Second surface
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW113106666A TWI906781B (en) | 2024-02-23 | Antenna module and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW113106666A TWI906781B (en) | 2024-02-23 | Antenna module and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202534940A TW202534940A (en) | 2025-09-01 |
| TWI906781B true TWI906781B (en) | 2025-12-01 |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113629020A (en) | 2021-06-25 | 2021-11-09 | 北京大学 | Millimeter wave packaging structure and preparation method thereof |
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113629020A (en) | 2021-06-25 | 2021-11-09 | 北京大学 | Millimeter wave packaging structure and preparation method thereof |
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