TWI839023B - Non-contact testing apparatus with external circulation - Google Patents

Abstract

The present invention provides a non-contact testing apparatus with an external circulation, which includes a testing device, a temperature adjustment device connected to the testing device, and a gas supplying device. The testing device includes two testing chambers and a testing carrier located thereon. The temperature adjustment device includes a temperature controlling mechanism, a pipe unit, and a fan mechanism that is assembled to the pipe unit. The temperature controlling mechanism includes an airflow chamber and a temperature controlling unit arranged therein. The pipe unit connects the airflow chamber and the two testing chambers so as to form a circulation space. The fan mechanism is configured to form a circulation airflow in the circulation space, and the airflow has a predetermined temperature through the temperature controlling unit. The gas supplying device is spatially communicated with the circulation space, and the gas supplying device is configured to input a predetermined gas into the circulation space and enables the circulation space to achieve a predetermined pressure.

Description

External circulation non-contact test equipment

The present invention relates to a testing device, and in particular to an external circulation type non-contact testing device.

When testing an electronic component to be tested, the existing test equipment needs to use a temperature control element to press against the electronic component to make the electronic component to be tested reach the temperature required for the test. However, the contact test method of the existing test equipment has gradually failed to meet the ever-changing changes and needs of the electronics industry.

Therefore, the inventors of the present invention believe that the above defects can be improved, and have conducted intensive research and applied scientific principles to finally propose the present invention which has a reasonable design and effectively improves the above defects.

The present invention provides an external circulation non-contact testing device, which can effectively improve the defects that may be produced by the existing testing equipment.

The embodiment of the present invention discloses an external circulation non-contact test equipment, which includes: a machine body; a test device, which is installed on the machine body, and the test device includes: a first test cavity and a second test cavity, both of which are installed on the machine body; wherein the second test cavity can move relative to the first test cavity along a first direction to form a test space together; and a test carrier, which is arranged in the second test cavity, and the test carrier is used for arranging an electronic component to be tested; a temperature adjustment device, which is installed on the outer side of at least one of the first test cavity and the second test cavity, and is connected to the test space; wherein the temperature adjustment device includes: a temperature control mechanism, including a gas A flow chamber and a temperature control unit arranged in the air flow chamber; a pipeline unit connecting the air flow chamber and the test space so that they are connected to each other and jointly constitute a circulation space; and a fan mechanism installed in the pipeline unit; wherein the fan mechanism can operate to form a circulation airflow flowing in the circulation space and passing through the temperature control unit, and the circulation airflow can have a preset temperature through the temperature control unit; and an air supply device connected to the circulation space; wherein the air supply device is used to introduce a predetermined gas into the circulation space and enable the circulation space to reach a preset air pressure, so that the electronic component to be tested arranged on the test carrier can perform a non-contact test operation in the environment of the preset air pressure and the preset temperature.

In summary, the external circulation non-contact testing equipment disclosed in the embodiment of the present invention adopts the structural combination between multiple devices (such as: the testing device, the temperature regulating device, and the air supply device) so that at least one of the electronic components to be tested can adjust the test parameters (such as: temperature) in a non-contact manner (such as: the circulation space has the preset air pressure and the preset temperature).

To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and do not limit the protection scope of the present invention.

The following is an explanation of the implementation of the "external circulation non-contact test equipment" disclosed in the present invention through specific concrete embodiments. Technical personnel in this field can understand the advantages and effects of the present invention from the contents disclosed in this specification. The present invention can be implemented or applied through other different specific embodiments, and the details in this specification can also be modified and changed in various ways based on different viewpoints and applications without deviating from the concept of the present invention. In addition, the drawings of the present invention are only simple schematic illustrations and are not depicted according to actual sizes. Please note in advance. The following implementation will further explain the relevant technical contents of the present invention in detail, but the disclosed contents are not intended to limit the scope of protection of the present invention.

It should be understood that, although the terms "first", "second", "third", etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are mainly used to distinguish one component from another component, or one signal from another signal. In addition, the term "or" used herein may include any one or more combinations of the associated listed items depending on the actual situation.

[Example 1]

Please refer to Figures 1 to 9, which are the first embodiment of the present invention. As shown in Figures 1 to 6, this embodiment discloses an external circulation type non-contact test device 100, which is used to perform a non-contact test operation on at least one electronic component 200 to be tested. In other words, the external circulation type non-contact test device 100 adjusts the test parameters (such as temperature) of the electronic component 200 to be tested in a non-contact manner. Accordingly, any test device that adjusts the temperature of the electronic component to be tested in a contact manner is different from the external circulation type non-contact test device 100 referred to in this embodiment.

The external circulation non-contact testing equipment 100 in this embodiment includes a machine body 1, a testing device 2 installed on the machine body 1, an exhaust device 3 to assist the operation of the testing device 2, a temperature regulating device 4 installed on the testing device 2, and an air supply device 5 installed on the temperature regulating device 4, but the present invention is not limited thereto.

For example, in other embodiments not shown in the present invention, the external circulation non-contact testing equipment 100 may omit the exhaust device 3; or, the testing device 2 may be used independently (such as sold) or further used in combination with other components in combination with the exhaust device 3; or, the temperature control device 4 may be used independently (such as sold) or further used in combination with other components.

In this embodiment, the test device 2 includes a first test chamber 21, a second test chamber 22 corresponding to the first test chamber 21, a test carrier 23 disposed in the second test chamber 22, two current equalizers 24 installed inside the first test chamber 21, an airtight gasket 25 located between the first test chamber 21 and the second test chamber 22, and a sealing mechanism 26, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the external circulation non-contact test equipment 100 can selectively adopt at least one of the two current equalizers 24, the airtight gasket 25, and the sealing mechanism 26 according to design requirements, or replace them with other components.

As shown in FIGS. 1 to 4 , the first test chamber 21 and the second test chamber 22 are both mounted on the machine body 1, so that the second test chamber 22 can move relative to the first test chamber 21 along a first direction D1 (e.g., the direction of the lead hammer) to form a test space S. It should be noted that the specific structures of the first test chamber 21 and the second test chamber 22 can be adjusted and varied according to design requirements, so the following only describes one feasible aspect.

The first test cavity 21 includes a first accommodating portion 211, a first sealing portion 212 connected to the periphery of the first accommodating portion 211, and a plurality of first reinforcing ribs 213 formed on the outer surface of the first accommodating portion 211 and the outer surface of the first sealing portion 212. In this embodiment, the first accommodating portion 211 is substantially in the form of a rectangular groove and has two through holes 2111 (such as FIG. 7 ) formed on both sides thereof and connected to the test space S, and the positions of the two current equalizing members 24 correspond to the two through holes 2111, respectively, and the first sealing portion 212 is connected to the notch of the first accommodating portion 211 and is in the form of a rectangular ring.

Furthermore, the first accommodating portion 211, the first sealing portion 212, and the first reinforcing ribs 213 together form a plurality of first open compartments 214. Four of the plurality of first open compartments 214 are respectively located at the corners of the first test cavity 21, and the first test cavity 21 is fixed to the machine body 1 by the four first open compartments 214 (that is, the first test cavity 21 will not move relative to the machine body 1 in this embodiment), and the two through holes 2111 (such as FIG. 7) are respectively connected to the other two of the plurality of first open compartments 214.

The second test cavity 22 includes a second accommodating portion 221, a second sealing portion 222 connected to the periphery of the second accommodating portion 221, and a plurality of second reinforcing ribs 223 formed on the outer surfaces of the second accommodating portion 221 and the second sealing portion 222. In this embodiment, the second accommodating portion 221 is substantially rectangular, and the test carrier 23 is disposed in the second accommodating portion 221 for at least one electronic component 200 to be disposed and for electrical testing; the second sealing portion 222 is rectangular and has a plurality of elongated through holes 2221 formed therein, and the second sealing portion 222 has an annular groove 2222 formed therein between the test carrier 23 and the plurality of elongated through holes 2221, so that the airtight gasket 25 is embedded in the annular groove 2222.

Furthermore, the second sealing portion 222 faces the first sealing portion 212 along the first direction D1, and the airtight gasket 25 is located between the first sealing portion 212 and the second sealing portion 222, and the positions of the plurality of second reinforcing ribs 223 correspond to the plurality of first reinforcing ribs 213 approximately along the first direction D1. The second accommodating portion 221, the second sealing portion 222, and the plurality of second reinforcing ribs 223 together form a plurality of second open compartments 224, and the plurality of second open compartments 224 correspond to the plurality of first open compartments 214 along the first direction D1, and each of the elongated through holes 2221 is connected to one of the second open compartments 224.

As described above, the first test cavity 21 and the second test cavity 22 can move relative to each other, so that the first accommodating portion 211 and the second accommodating portion 221 together surround the test space S, and the first sealing portion 212 and the second sealing portion 222 are clamped in the airtight gasket 25 to achieve a pre-fitting operation.

Furthermore, the movement between the first test chamber 21 and the second test chamber 22 is realized by the machine body 1 in this embodiment. The following describes one feasible aspect of the machine body 1, but the present invention is not limited thereto.

As shown in FIGS. 1 to 4 , the machine body 1 includes a rail mechanism 11 (e.g., a linear slide rail) and a lifting mechanism 12 (e.g., a pneumatic cylinder or a hydraulic cylinder) whose position corresponds to the rail mechanism 11. The second test cavity 22 is mounted on the rail mechanism 11 so that the second test cavity 22 can move between a loading position (e.g., FIG. 1 ) and a working position (e.g., FIG. 2 and FIG. 3 ) along a second direction D2 perpendicular to the first direction D1 through the rail mechanism 11.

For example, as shown in FIG. 1 , when the second test chamber 22 is located at the loading position, the second test chamber 22 is staggered relative to the first test chamber 21 so that the test carrier 23 installed in the second test chamber 22 can be used to place at least one electronic component 200 to be tested.

As shown in FIGS. 2 and 3 , when the second test cavity 22 is located at the working position, the second sealing portion 222 faces the first sealing portion 212 along the first direction D1, the position of the lifting mechanism 12 corresponds to the second test cavity 22 located at the working position, and the lifting mechanism 12 can drive the second test cavity 22 located at the working position to move along the first direction D1 to achieve the pre-coupling operation (such as FIG. 4 ).

As shown in FIGS. 1 to 6 , the sealing mechanism 26 includes a driver 261, a plurality of locking parts 262, and a transmission part 263 for transmitting power of the driver 261 to the plurality of locking parts 262. The driver 261 is installed on the machine body 1 and adjacent to the first test chamber 21, and the driver 261 is illustrated as a driving motor in this embodiment, which includes a toothed part 2611 used for power output.

Furthermore, each of the locking members 262 has a linkage end 2621 and a locking end 2622 located at opposite ends, and a plurality of the locking members 262 are rotatably disposed on the first sealing portion 212 of the first test cavity 21. In this embodiment, each of the locking members 262 is disposed in one of the first open compartments 214 and is vertically mounted on the first sealing portion 212 (that is, the rotation axes of the plurality of the linkage ends 2621 are parallel to each other), and the linkage end 2621 and the locking end 2622 of each of the locking members 262 are located at opposite sides of the first sealing portion 212, respectively.

In more detail, the linkage end 2621 of each locking member 262 is a gear, and the toothed portion 2611 and the plurality of linkage ends 2621 are disposed on a plane higher than the first test cavity 21 (that is, on a side of the first test cavity 21 away from the second test cavity 22). In addition, the transmission member 263 connects the driver 261 and the linkage ends 2621 of the plurality of locking members 262; that is, the transmission member 263 is a transmission chain engaged with the toothed portion 2611 and the plurality of linkage ends 2621 in this embodiment, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the cooperation between the transmission member 263 and the multiple linkage ends 2621 can also be achieved by using a belt and multiple friction wheels; or, the driver 261 can be achieved by using a pneumatic cylinder or a hydraulic cylinder in combination with other structures.

Furthermore, the positions and shapes of the plurality of locking ends 2622 correspond to the positions and shapes of the plurality of elongated through holes 2221. Accordingly, after the pre-engagement operation, as shown in FIG6 and FIG7 , the driver 261 can drive the plurality of locking members 262 to rotate synchronously through the transmission member 263 to achieve a locking operation, so that the locking end 2622 of each locking member 262 and the first sealing portion 212 are respectively clamped on opposite sides of the second sealing portion 222. In other words, each locking end 2622 passes through the corresponding elongated through hole 2221 during the pre-engagement operation, and rotates to be misplaced in the corresponding elongated through hole 2221 during the locking operation.

It should be further explained that, after the sealing mechanism 26 performs the locking operation, the test space S of the test device 2 needs to be able to maintain a high-pressure environment for a long time, so the sealing degree of the locking operation of the sealing mechanism 26 is required to be extremely high (for example, the driver 261 must have an extremely large output power to achieve the locking operation), which makes the locking operation difficult to implement.

Accordingly, after the pre-matching operation, as shown in FIGS. 5 to 7 , the external circulation non-contact test equipment 100 in this embodiment further uses the exhaust device 3 (such as a pump) to perform a vacuum operation on the test space S, so that the test space S is in a negative pressure state, and the first sealing portion 212 and the second sealing portion 222 are more tightly abutted (or more tightly clamped The airtight gasket 25 is used to facilitate the sealing mechanism 26 to subsequently perform the locking operation (such as: the driver 261 can achieve the locking operation with a smaller output power), so that the test space S can be maintained in a high-pressure environment for a long time through the sealing mechanism 26.

In more detail, the vacuum device 3 is connected to at least one of the first accommodating portion 211 and the second accommodating portion 221 (e.g., the vacuum device 3 in this embodiment is connected to the first accommodating portion 211 by being connected to the temperature regulating device 4), thereby connecting to the test space S to perform the vacuum operation.

The temperature control device 4 is installed on the outside of at least one of the first test cavity 21 and the second test cavity 22 to be connected to the test space S. In this embodiment, the temperature control device 4 is installed on the outside of the first test cavity 21 and is connected to the test space S through the two through holes 2111, but the present invention is not limited thereto.

Specifically, as shown in FIGS. 6 to 9 , the temperature control device 4 includes a temperature control mechanism 41, a pipe unit 42 connecting the temperature control mechanism 41 and the first test cavity 21, a fan mechanism 43 installed in the pipe unit 42, and a heating lamp 44 located in the test space S. The temperature control device 4 is only shown as being connected to the first test cavity 21 in the drawings of this embodiment, but the temperature control device 4 can also be further fixed to the machine body 1 according to design requirements.

The temperature control mechanism 41 includes an airflow chamber 411 and a temperature control unit 412 disposed in the airflow chamber 411. The airflow chamber 411 is formed with a configuration space 4111 and two inlets and outlets 4112 connected to the configuration space 4111. In this embodiment, the airflow chamber 411 includes N modular tubes 4113 and two external tube bodies 4114, where N is a positive integer greater than 1 (e.g., N=2). The N modular tube bodies 4113 have substantially the same tube diameter and are assembled into a tubular structure, and the two external tube bodies 4114 are respectively installed at the two ends of the tubular structure to jointly surround the configuration space 4111, and each of the external tube bodies 4114 is formed with one of the inlets and outlets 4112.

Furthermore, the temperature control unit 412 is disposed in the configuration space 4111, and the temperature control unit 412 includes at least one of a temperature increaser 4121 (e.g., an electric heater) and a temperature decreaser 4122 (e.g., an evaporator), which is located between the two inlets and outlets 4112. In this embodiment, the temperature control unit 412 includes at least one temperature increaser 4121 and at least one temperature decreaser 4122, and each modular tube body 4113 is configured with at least one temperature increaser 4121 or at least one temperature decreaser 4122, so that the temperature control mechanism 41 can quickly match the required number of temperature increasers 4121 and temperature decreasers 4122 through a plurality of modular tube bodies 4113 according to design requirements.

The pipeline unit 42 connects the airflow chamber 411 and the test space S so that they are connected to each other and together form a circulation space C. The pipeline unit 42 is described in this embodiment as including a bifurcated tube 421 and two connecting tubes 422, but the specific configuration of the pipeline unit 42 can be adjusted and changed according to design requirements, and the present invention is not limited here.

In more detail, the bifurcated tube 421 has a mounting hole 4211 and two air holes 4212 that are interconnected, the fan mechanism 43 is installed in the mounting hole 4211, and the bifurcated tube 421 is connected to one of the inlets and outlets 4112 of the airflow chamber 411 through one of the air holes 4212, and the inner walls of the air holes 4212 and the inlets and outlets 4112 that are connected to each other are aligned with each other.

One end of the two connecting tubes 422 is respectively connected to the two through holes 2111 of the first test cavity 21, and the other end of the two connecting tubes 422 is respectively connected to another one of the airflow holes 4212 of the bifurcated tube 421 and another one of the inlet and outlet 4112 of the airflow chamber 411, so that the airflow chamber 411 (or the configuration space 4111) can be connected to the test space S through the bifurcated tube 421 and the two connecting tubes 422.

Furthermore, at least one of the two connecting tubes 422 is formed with at least one external hole 4221, and the number of at least one external hole 4221 is plural in this embodiment, so that the exhaust device 3 and the air supply device 5 are each connected to at least one external hole 4221 and connected to the circulation space C, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the exhaust device 3 and/or the air supply device 5 can also be connected to the circulation space C through a hole separately opened in the first test cavity 21 or the second test cavity 22 according to design requirements.

The fan mechanism 43 can be operated to form a circulating airflow F flowing in the circulating space C and passing through the temperature control unit 412, and the circulating airflow F can have a preset temperature through the temperature control unit 412. The heating lamp 44 located in the test space S can be used in conjunction with the temperature control unit 412 (such as the temperature increaser 4121) to heat the circulating airflow F, thereby effectively improving the heating efficiency.

Furthermore, the fan mechanism 43 is preferably capable of avoiding affecting the temperature and pressure of the circulating airflow F in the circulating space C. Therefore, the fan mechanism 43 is described in the following content as one feasible embodiment, but the present invention is not limited thereto.

In this embodiment, the fan mechanism 43 includes a frame 431, a motor 432 installed in the frame 431, a barrier layer 433 installed in the frame 431, a shaft 434 rotatably inserted in the barrier layer 433, a blade 435 fixed to the shaft 434, a heat-insulating coupling 436 located in the frame 431, and a housing 437, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the housing 437 may also be omitted or replaced by other components according to design requirements.

In more detail, the frame 431 is generally in the shape of a square tube and one end of the frame 431 is mounted on the pipeline unit 42 (e.g., the mounting hole 4211 of the bifurcated tube 421), the motor 432 is mounted on the other end of the frame 431, and an output shaft 4321 of the motor 432 is located inside the frame 431, while the main body of the motor 432 is located outside the frame 431. Furthermore, the barrier layer 433 is adjacent to the junction of the frame 431 and the bifurcated tube 421 to isolate the temperature and air pressure between the space inside the frame 431 and the circulation space C.

One end of the rotating shaft 434 is located in the frame 431, and the other end of the rotating shaft 434 is located in the circulation space C, and the fan blade 435 is fixed to the other end of the rotating shaft 434. The output shaft 4321 and the rotating shaft 434 are both arranged along a preset axis L, and the heat insulation coupling 436 connects the output shaft 4321 and the one end of the rotating shaft 434. Accordingly, the output shaft 4321 and the rotating shaft 434 can not only rotate synchronously through the heat insulation coupling 436, but also the output shaft 4321 and the rotating shaft 434 can effectively reduce the mutual transfer of heat energy through the heat insulation coupling 436.

It should be further explained that the frame 431 is preferably formed with a disassembly hole 4311 corresponding to the position of the heat-insulating coupling 436, so that the heat-insulating coupling 436 can be installed or removed in the frame 431 through the disassembly hole 4311. Furthermore, the outer shell 437 is installed on the bifurcated tube 421 and covers and seals the frame 431 and the motor 432 (such as the main body) therein, so that the motor 432 and the heat-insulating coupling 436 can be isolated from the external environment through the outer shell 437.

In addition, the correspondence between the bifurcated tube 421 and the fan blade 435 and the rotating shaft 434 can be adjusted and changed according to design requirements, and one feasible embodiment is given below for illustration. The center of one of the airflow holes 4212 of the bifurcated tube 421 is located on the preset axis L and its position corresponds to the fan blade 435, and the center of another of the airflow holes 4212 is located in a radial direction perpendicular to the preset axis L and its position corresponds to the rotating shaft 434. Furthermore, the radius of the fan blade 435 is preferably not less than the maximum inner diameter of the corresponding airflow hole 4212.

As described above, the motor 432 can drive the fan blade 435 to rotate through the output shaft 4321, the heat-insulating coupling 436 and the rotating shaft 434 to form the circulating airflow F flowing through the temperature control unit 412 in the circulating space C. Accordingly, the temperature regulating device 4 in this embodiment passes through the heat-insulating coupling 436 and the barrier layer 433 so that the temperature of the airflow formed by it can be not affected by the motor 432, and thus can be accurately controlled.

It should be noted that the fan blade 435 is a structure that can form airflow by rotating, so the specific structure of the fan blade 435 can be adjusted and changed according to design requirements and is not limited to the structure presented in the figure. For example, in other embodiments not shown in the present invention, the fan blade 435 can be a turbine structure that is conducive to mechanical supercharging.

It should be further explained that after the locking operation is performed, the circulating space C is substantially in a vacuum state, so the external circulation non-contact test equipment 100 can use the gas supply device 5 to introduce a predetermined gas into the circulating space C, and enable the circulating space C to reach a preset air pressure, so that at least one of the electronic components 200 to be tested arranged on the test carrier 23 can perform the non-contact test operation in the environment of the preset air pressure and the preset temperature.

As described above, the external circulation non-contact test equipment 100 in this embodiment is a structure combination between multiple devices, so that at least one of the electronic components 200 to be tested can adjust the test parameters (such as temperature) in a non-contact manner (such as: the circulation space C has the preset air pressure and the preset temperature).

In addition, the predetermined gas output by the gas supply device 5 can be changed according to demand; for example, the predetermined gas can be a dry gas or a gas with a molecular weight greater than that of air (such as carbon dioxide gas), thereby further forming the circulating airflow F with a preset temperature, thereby facilitating the circulating space C to quickly reach the preset air pressure. Furthermore, each of the flow equalizers 24 is formed with a plurality of holes so that the circulating airflow F can be more evenly distributed in the test space S, thereby helping at least one of the electronic components 200 to be tested to reach the temperature required for the test.

[Example 2]

Please refer to FIG. 10 , which is the second embodiment of the present invention. Since this embodiment is similar to the first embodiment, the similarities between the two embodiments will not be described in detail. The difference between this embodiment and the first embodiment mainly lies in: the temperature regulating device 4.

Specifically, the relative positions of the temperature control mechanism 41 and the fan mechanism 43 can be adjusted and changed according to design requirements; for example: in this embodiment, the temperature control unit 412 and the two inlets and outlets 4112 are all located on the preset axis L, and the fan blade 435 is adjacent to one of the inlets and outlets 4112 of the airflow chamber 411, and an airflow flowing into the airflow chamber 411 from one of the inlets and outlets 4112 and flowing out of the airflow chamber 411 from the other inlet and outlet 4112 can pass through the temperature control unit 412 and have a preset temperature.

[Technical Effects of the Embodiments of the Invention]

In summary, the external circulation non-contact testing equipment disclosed in the embodiment of the present invention uses a structure combination between multiple devices so that at least one of the electronic components to be tested can adjust the test parameters (such as temperature) in a non-contact manner (such as: the circulation space has the preset air pressure and the preset temperature).

Furthermore, the external circulation non-contact test equipment disclosed in the embodiment of the present invention further adopts the exhaust device to perform a vacuum operation on the test space, so that the test space is in a negative pressure state, and the first sealing part and the second sealing part are more closely abutted (or more closely clamped The airtight gasket is clamped), which is used to facilitate the sealing mechanism to subsequently implement the locking operation (such as: the driver can achieve the locking operation with a smaller output power), so that the test space can be maintained in a high-pressure environment for a long time through the sealing mechanism.

In addition, the temperature regulating device disclosed in the embodiment of the present invention uses the insulating coupling and the barrier layer so that the temperature of the airflow formed by it is not affected by the motor and can be accurately controlled.

The above disclosed contents are only preferred feasible embodiments of the present invention and are not intended to limit the patent scope of the present invention. Therefore, all equivalent technical changes made by using the contents of the specification and drawings of the present invention are included in the patent scope of the present invention.

100: External circulation non-contact test equipment 1: Machine body 11: Track mechanism 12: Lifting mechanism 2: Test device 21: First test chamber 211: First accommodating part 2111: Through hole 212: First sealing part 213: First reinforcing rib 214: First open compartment 22: Second test chamber 221: Second accommodating part 222: Second sealing part 2221: Long through hole 2222: Annular groove 223: Second reinforcing rib 224: Second open compartment 23: Test carrier 24: Flow equalizer 25: Airtight gasket 26: Sealing mechanism 261: Driver 2611: Toothed part 262: Locking part 2621: Linking end 2622: Locking end 263: Transmission part 3: Exhaust device 4: Temperature control device 41: Temperature control mechanism 411: Airflow chamber 4111: Configuration space 4112: Inlet and outlet 4113: Modular pipe body 4114: External pipe body 412: Temperature control unit 4121: Heater 4122: Cooler 42: Pipe unit 421: Branch pipe 4211: Mounting hole 4212: Airflow hole 422: Connecting pipe 4221: External hole 43: Fan mechanism 431: Frame 4311: Disassembly hole 432: Motor 4321: Output shaft 433: Barrier layer 434: Rotating shaft 435: Fan blade 436: Thermal insulation coupling 437: Housing 44: Heating lamp 5: Air supply device S: Test space C: Circulation space F: Circulating airflow D1: First direction D2: Second direction L: Default axis 200: Electronic component to be tested

FIG1 is a three-dimensional schematic diagram of an external circulation non-contact test device according to Embodiment 1 of the present invention.

FIG. 2 is a three-dimensional schematic diagram of the subsequent action of FIG. 1 .

FIG. 3 is a schematic plan cross-sectional view of FIG. 2 .

FIG. 4 is a three-dimensional cross-sectional schematic diagram of the subsequent action of FIG. 2 .

FIG. 5 is a three-dimensional cross-sectional schematic diagram of the subsequent action of FIG. 4 .

FIG6 is a three-dimensional cross-sectional schematic diagram of the subsequent action of FIG5 to enable the external circulation non-contact test equipment to be in a non-contact test operation.

FIG7 is a schematic plan cross-sectional view of the external circulation non-contact test equipment in the first embodiment of the present invention during the non-contact test operation (I).

FIG8 is a schematic plan cross-sectional view of the external circulation non-contact test equipment in the first embodiment of the present invention during the non-contact test operation (II).

FIG9 is a schematic plan cross-sectional view of the external circulation non-contact test equipment in the first embodiment of the present invention during the non-contact test operation (III).

FIG10 is a schematic three-dimensional cross-sectional view of the temperature regulating device of the first embodiment of the present invention.

100: External circulation non-contact test equipment

1: Machine body

11: Track mechanism

2: Test equipment

21: First test chamber

2111: Through the hole

213: First reinforcement rib

214: First open compartment

22: Second test chamber

23: Test mount

24: Current balancing device

262: Locking parts

4: Temperature control device

41: Temperature control mechanism

411: Airflow chamber

4111:Configuration space

4112: Entrance and exit

4113: Modular tube body

4114: External pipe body

412: Temperature control unit

4121:Heater

4122: Cooler

42: Pipeline unit

421: Bifurcated tube

4211:Mounting hole

4212: Airflow hole

422:Connecting pipe

43: Fan mechanism

431:Frame

432: Motor

4321: Output shaft

433: Barrier layer

434: Rotating axis

435: Fan blades

436: Thermal insulation coupling

437: Shell

S:Testing space

C: Circulation space

F: Circulating airflow

D1: First direction

L: Default axis

200: Electronic components to be tested

Claims (9)

An external circulation non-contact test equipment comprises: a machine body; a test device, which is installed on the machine body, and the test device comprises: a first test cavity and a second test cavity, both of which are installed on the machine body; wherein the second test cavity can move relative to the first test cavity along a first direction to form a test space together; and a test carrier, which is arranged in the second test cavity, and the test carrier is used for arranging an electronic component to be tested; a temperature regulating device The device is installed on the outer side of at least one of the first test cavity and the second test cavity to be connected to the test space; wherein the temperature regulating device comprises: a temperature control mechanism, comprising an airflow chamber and a temperature control unit arranged in the airflow chamber; a pipeline unit, connecting the airflow chamber and the test space to make them communicate with each other and jointly form a circulation space; and a fan mechanism, installed on the pipeline unit; wherein the fan mechanism can operate to form a circulation space in the circulation space. A circulating airflow that moves and passes through the temperature control unit, and the circulating airflow can have a preset temperature through the temperature control unit; and an air supply device connected to the circulating space; wherein the air supply device is used to introduce a predetermined gas into the circulating space and can make the circulating space reach a preset air pressure, so that the electronic component to be tested arranged on the test carrier can perform a non-contact test operation under the environment of the preset air pressure and the preset temperature; Wherein, the first test cavity is formed with two through holes, The airflow chamber is formed with two inlets and outlets, and the pipeline unit includes: a bifurcated pipe having a mounting hole and two airflow holes that are interconnected; the fan mechanism is mounted on the mounting hole, and the bifurcated pipe is connected to one of the inlets and outlets of the airflow chamber through one of the airflow holes; two connecting pipes, one end of which is respectively connected to the two through holes, and the other ends of the two connecting pipes are respectively connected to the other of the airflow holes of the bifurcated pipe and the other of the inlets and outlets of the airflow chamber. As described in claim 1, the external circulation type non-contact test equipment, wherein at least one of the two connecting tubes is formed with at least one external connection hole, and the air supply device is connected to at least one of the external connection holes and connected to the circulation space. As described in claim 1, the external circulation non-contact test equipment, wherein the test device includes two current equalizers, and the two current equalizers are installed inside the first test cavity and their positions correspond to the two through holes respectively. As described in claim 1, the external circulation non-contact test equipment, wherein the temperature adjustment device includes a heating lamp, which is located in the test space and is used in conjunction with the temperature control unit to heat the circulating airflow. The external circulation non-contact test equipment as described in claim 1, wherein the temperature control unit includes at least one temperature riser and at least one temperature reducer, and the airflow chamber includes: N modular tubes, which are assembled into a tubular structure, and N is a positive integer greater than 1; wherein each modular tube is provided with at least one temperature riser or at least one temperature reducer; and two external tubes, each of which is formed with one inlet and outlet, and the two external tubes are respectively installed at two ends of the tubular structure. The external circulation non-contact test equipment as described in claim 1, wherein the first test chamber includes a first accommodating portion and a first sealing portion connected to the periphery of the first accommodating portion; the second test chamber includes a second accommodating portion and a second sealing portion connected to the periphery of the second accommodating portion, and the second sealing portion faces the first sealing portion along the first direction; the test device includes an airtight gasket located between the first sealing portion and the second sealing portion; wherein the first test chamber and the second test chamber can move relative to each other so that the first accommodating portion and the second accommodating portion jointly surround the test space, and the first sealing portion and the second sealing portion are clamped in the airtight gasket to achieve a pre-fitting operation. The external circulation non-contact test equipment as described in claim 6, wherein the test device further includes a sealing mechanism, which includes: a driver mounted on the machine body; a plurality of locking parts rotatably disposed on the first sealing part of the first test cavity, and each of the locking parts has a linkage end and a locking end located at opposite ends; and a transmission part connecting the driver and the linkage ends of the plurality of locking parts; wherein, after the pre-engagement operation, the driver can drive the plurality of locking parts to rotate synchronously through the transmission part to realize a locking operation, so that the locking end of each locking part and the first sealing part are respectively clamped on opposite sides of the second sealing part. As described in claim 7, the external circulation non-contact test equipment further comprises an exhaust device connected to at least one of the first accommodating portion and the second accommodating portion; wherein, after the pre-locking operation, the exhaust device can perform a vacuum operation on the test space to facilitate the subsequent locking operation. The external circulation non-contact test equipment as described in claim 1, wherein the fan mechanism comprises: a frame, one end of which is mounted on the pipeline unit; a motor, which is mounted on the other end of the frame, and an output shaft of the motor is located in the frame; a barrier layer, which is mounted in the frame to isolate the temperature and air pressure between the space in the frame and the circulation space; a rotating shaft, which is rotatably disposed through the barrier layer; wherein one end of the rotating shaft is located in the frame, and the other end of the rotating shaft is located in the circulation space; a fan blade is fixed to the other end of the rotating shaft; and a heat-insulating coupling is connected to the output shaft and the one end of the rotating shaft; wherein the motor can drive the fan blade to rotate through the output shaft, the heat-insulating coupling and the rotating shaft to form the circulating airflow flowing through the temperature control unit.

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