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TWI838865B - Light-emitting diode device - Google Patents

Light-emitting diode device Download PDF

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TWI838865B
TWI838865B TW111134657A TW111134657A TWI838865B TW I838865 B TWI838865 B TW I838865B TW 111134657 A TW111134657 A TW 111134657A TW 111134657 A TW111134657 A TW 111134657A TW I838865 B TWI838865 B TW I838865B
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light
emitting diode
circuit layer
led
die
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TW111134657A
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TW202338772A (en
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郭修邑
王德忠
許國翊
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隆達電子股份有限公司
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Priority to US18/185,531 priority Critical patent/US12444716B2/en
Publication of TW202338772A publication Critical patent/TW202338772A/en
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Publication of TWI838865B publication Critical patent/TWI838865B/en
Priority to US19/336,699 priority patent/US20260018570A1/en

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Abstract

A light-emitting diode device is provided. The light-emitting diode device includes a pixel structure including a first light-emitting diode chip, a second light-emitting diode chip, a third light-emitting diode chip, a passivation layer, a first circuit layer, a second circuit layer, a third circuit layer and a fourth circuit layer. The first light-emitting diode chip and the second light-emitting diode chip are positioned on a top surface of the third light-emitting diode chip, which is opposite to a light emitting surface of the third light-emitting diode chip. A first vertical projection of the first light-emitting diode chip on the top surface and a second vertical projection of the second light-emitting diode chip on the top surface do not overlap each other. A first bonding surface of the first circuit layer and a second first bonding surface of the second circuit layer corresponding to openings of the passivation layer are positioned overlapping the first vertical projection and separated from the second vertical projection. A third bonding surface of the third circuit layer and a fourth bonding surface of the fourth circuit layer corresponding to openings of the passivation layer are positioned overlapping the second vertical projection and separated from the first vertical projection.

Description

發光二極體裝置LED Device

本揭露是關於發光二極體裝置,特別是關於發光二極體裝置的像素結構。The present disclosure relates to a light emitting diode device, and more particularly to a pixel structure of a light emitting diode device.

由於發光二極體具有低耗電的優點,發光二極體(light-emitting diode, LED)顯示螢幕成為顯示技術領域的主流。然而,在發光二極體顯示螢幕製程期間,由紅、綠、藍三原色發光二極體組合而成的像素結構會因為發光二極體本身元件厚度及尺寸無法進一步微縮導致像素結構深寬比過高,增加發光二極體接合製程及佈線製程的複雜度,使現有的發光二極體的像素結構難以達到小間距、大發光面積、高製程良率和低成本的目標。Due to the low power consumption of LEDs, light-emitting diode (LED) displays have become the mainstream in the display technology field. However, during the LED display process, the pixel structure composed of red, green and blue primary color LEDs has a high aspect ratio because the thickness and size of the LED components cannot be further reduced, which increases the complexity of the LED bonding process and wiring process, making it difficult for the existing LED pixel structure to achieve the goals of small pitch, large luminous area, high process yield and low cost.

因此,仍需要進一步改良發光二極體的像素結構,以製造出符合產品需求的顯示裝置。Therefore, there is still a need to further improve the pixel structure of the light-emitting diode to manufacture a display device that meets product requirements.

本揭露一些實施例提供一種發光二極體裝置。發光二極體裝置包括像素結構,像素結構包括第一發光二極體晶粒、第二發光二極體晶粒、第三發光二極體晶粒、保護層、第一線路層、第二線路層、第三線路層和第四線路層。第三發光二極體晶粒具有彼此相對的出光面和頂面,其中第一發光二極體晶粒與第二發光二極體晶粒並排於頂面上,第一發光二極體晶粒於頂面上具有第一垂直投影,第二發光二極體晶粒於頂面上具有第二垂直投影,第一垂直投影與第二垂直投影彼此不互相重疊;保護層覆蓋第一發光二極體晶粒、第二發光二極體晶粒和第三發光二極體晶粒;彼此分離的第一線路層、第二線路層、第三線路層和第四線路層位於第三發光二極體晶粒與保護層之間,保護層具有多個開口,開口分別對應位於第一線路層的第一接合面上、第二線路層的第二接合面上、第三線路層的第三接合面上和第四線路層的第四接合面上,其中第一接合面和第二接合面於頂面上的垂直投影分別與第一垂直投影重疊,且皆與第二垂直投影分隔,第三接合面與第四接合面於頂面上的垂直投影分別與第二垂直投影重疊,且皆與第一垂直投影分隔。Some embodiments of the present disclosure provide a light emitting diode device, which includes a pixel structure, wherein the pixel structure includes a first light emitting diode die, a second light emitting diode die, a third light emitting diode die, a protection layer, a first circuit layer, a second circuit layer, a third circuit layer and a fourth circuit layer. The third LED crystal has a light emitting surface and a top surface facing each other, wherein the first LED crystal and the second LED crystal are arranged side by side on the top surface, the first LED crystal has a first vertical projection on the top surface, the second LED crystal has a second vertical projection on the top surface, and the first vertical projection and the second vertical projection do not overlap each other; the protective layer covers the first LED crystal, the second LED crystal and the third LED crystal; the first circuit layer, the second circuit layer, the third circuit layer and the fourth circuit layer separated from each other The layer is located between the third light-emitting diode crystal grain and the protective layer, and the protective layer has a plurality of openings, and the openings correspond to the first bonding surface of the first circuit layer, the second bonding surface of the second circuit layer, the third bonding surface of the third circuit layer, and the fourth bonding surface of the fourth circuit layer, wherein the vertical projections of the first bonding surface and the second bonding surface on the top surface overlap with the first vertical projection respectively, and are both separated from the second vertical projection, and the vertical projections of the third bonding surface and the fourth bonding surface on the top surface overlap with the second vertical projection respectively, and are both separated from the first vertical projection.

以下參照本發明實施例之圖式以更全面地闡述本揭露。然而,本揭露亦可以各種不同的實施方式實現,而不應限於本文中所述之實施例。圖式中的層與區域的厚度可能會為了清楚起見而放大,並且在各圖式中相同或相似之參考號碼表示相同或相似之元件。The present disclosure is described more fully below with reference to the drawings of the embodiments of the present invention. However, the present disclosure may be implemented in various different embodiments and should not be limited to the embodiments described herein. The thickness of layers and regions in the drawings may be exaggerated for clarity, and the same or similar reference numbers in the drawings represent the same or similar elements.

本揭露實施例提供一種發光二極體裝置。上述發光二極體裝置在一個小型或微型發光二極體晶粒的頂面上並排堆疊兩個小型或微型發光二極體晶粒以形成單一像素結構,並搭配各個發光二極體晶粒的線路層及四個接合面(包括三個發光二極體晶粒各自的陽極接合面和共陰極接合面)配置,使其中兩個陽極接合面位於並排堆疊的發光二極體晶粒的其中一個上方,其中另一個陽極接合面和共陰極接合面位於並排堆疊的發光二極體晶粒的其中另一個上方,且發光二極體裝置的出光面位於下方發光二極體晶粒的頂面的相對側。本揭露實施例的發光二極體裝置可進一步縮小像素結構體積、簡化製程、提升發光面積及降低成本。其中,小型發光二極體晶粒帶有原生基板,而微型發光二極體晶粒則不帶有原生基板。The disclosed embodiment provides a light emitting diode device. The light emitting diode device stacks two small or micro light emitting diode dies side by side on the top surface of a small or micro light emitting diode die to form a single pixel structure, and is configured with a circuit layer and four joint surfaces (including an anode joint surface and a common cathode joint surface of each of the three light emitting diode dies) so that two of the anode joint surfaces are located above one of the light emitting diode dies stacked side by side, another of the anode joint surfaces and the common cathode joint surface are located above another of the light emitting diode dies stacked side by side, and a light emitting surface of the light emitting diode device is located on the opposite side of the top surface of the lower light emitting diode die. The LED device of the disclosed embodiment can further reduce the volume of pixel structure, simplify the manufacturing process, increase the light-emitting area and reduce the cost. Among them, the small LED chip has a native substrate, while the micro LED chip does not have a native substrate.

第1圖為本揭露一些實施例之發光二極體裝置500的立體示意圖。第2圖為本揭露一些實施例之發光二極體裝置500的俯視示意圖。第3A圖為沿第2圖所示的本揭露一些實施例之發光二極體裝置500的像素結構550a的X-X’切線的剖面示意圖。發光二極體裝置500包括像素結構550(包括第3A、3B圖像素結構550a、550b),像素結構550包括第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400和保護層424。為了方便說明,第1圖僅顯示第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400,保護層424和其餘部件可見於第3A圖的剖面示意圖。FIG. 1 is a three-dimensional schematic diagram of a light-emitting diode device 500 according to some embodiments of the present disclosure. FIG. 2 is a top view schematic diagram of a light-emitting diode device 500 according to some embodiments of the present disclosure. FIG. 3A is a cross-sectional schematic diagram of a pixel structure 550a of the light-emitting diode device 500 according to some embodiments of the present disclosure shown in FIG. 2 along the tangent line X-X'. The light-emitting diode device 500 includes a pixel structure 550 (including the pixel structures 550a and 550b of FIGS. 3A and 3B), and the pixel structure 550 includes a first light-emitting diode die 200, a second light-emitting diode die 300, a third light-emitting diode die 400, and a protective layer 424. For the convenience of explanation, FIG. 1 only shows the first light emitting diode die 200 , the second light emitting diode die 300 and the third light emitting diode die 400 , and the protection layer 424 and other components can be seen in the cross-sectional schematic diagram of FIG. 3A .

如第3A圖所示,第三發光二極體晶粒400具有彼此相對的出光面401和頂面403,第一發光二極體晶粒200、第二發光二極體晶粒300並排於第三發光二極體晶粒400的頂面403上。如第2圖所示,第一發光二極體晶粒200於第三發光二極體晶粒400的頂面403上具有第一垂直投影200A,第二發光二極體晶粒300於第三發光二極體晶粒400的頂面403上具有第二垂直投影300A。第一垂直投影200A與第二垂直投影300A彼此不互相重疊。As shown in FIG. 3A, the third LED die 400 has a light emitting surface 401 and a top surface 403 facing each other, and the first LED die 200 and the second LED die 300 are arranged side by side on the top surface 403 of the third LED die 400. As shown in FIG. 2, the first LED die 200 has a first vertical projection 200A on the top surface 403 of the third LED die 400, and the second LED die 300 has a second vertical projection 300A on the top surface 403 of the third LED die 400. The first vertical projection 200A and the second vertical projection 300A do not overlap each other.

如第3A圖所示,第一發光二極體晶粒200包括遠離第三發光二極體晶粒400的頂面403的第一電極210和第二電極212,第二發光二極體晶粒300包括遠離第三發光二極體晶粒400的頂面403的第一電極310和第二電極312,第三發光二極體晶粒400包括遠離出光面401的第一電極410和第二電極412。在一些實施例中,第一電極210、310、410具有相同極性,且與第二電極212、312、412的極性相反。在一些實施例中,第一電極210、310、410和第二電極212、312、412包括鉻(Cr)、鋁(Al)、鎳(Ni)、金(Au)、鉑(Pt)、錫(Sn)、銅(Cu)或上述之組合的導電材料,且可利用例如蒸鍍或電鍍的鍍覆製程及後續的圖案化製程形成。As shown in FIG. 3A , the first LED grain 200 includes a first electrode 210 and a second electrode 212 away from the top surface 403 of the third LED grain 400, the second LED grain 300 includes a first electrode 310 and a second electrode 312 away from the top surface 403 of the third LED grain 400, and the third LED grain 400 includes a first electrode 410 and a second electrode 412 away from the light emitting surface 401. In some embodiments, the first electrodes 210, 310, and 410 have the same polarity and are opposite to the polarity of the second electrodes 212, 312, and 412. In some embodiments, the first electrode 210, 310, 410 and the second electrode 212, 312, 412 include a conductive material such as chromium (Cr), aluminum (Al), nickel (Ni), gold (Au), platinum (Pt), tin (Sn), copper (Cu), or a combination thereof, and can be formed by a coating process such as evaporation or electroplating and a subsequent patterning process.

另外,第一發光二極體晶粒200包括覆蓋其側壁205和部分頂面203的絕緣層206,第二發光二極體晶粒300包括覆蓋其側壁305和部分頂面303的絕緣層306,第三發光二極體晶粒400包括覆蓋其側壁405和部分頂面403的絕緣層406。在一些實施例中,絕緣層206、306、406包括二氧化矽(SiO 2)、氧化鋁(Al 2O 3)、二氧化鈦(TiO 2)等具有良好階梯覆蓋性的絕緣材料,且可利用例如化學氣相沉積(CVD)、原子層沉積(ALD)等沉積製程形成。在一些實施例中,絕緣層206、306、406包括聚醯亞胺(PI)、環氧樹脂(Epoxy)、苯並環丁烯(Benzocyclobutene,BCB)等具有低介電常數以良好及階梯覆蓋性的絕緣材料,且可利用例如旋轉塗佈(spin coating)、噴塗(spray coating) 或其他合適之塗佈製程形成。 In addition, the first LED grain 200 includes an insulating layer 206 covering its sidewalls 205 and a portion of the top surface 203 , the second LED grain 300 includes an insulating layer 306 covering its sidewalls 305 and a portion of the top surface 303 , and the third LED grain 400 includes an insulating layer 406 covering its sidewalls 405 and a portion of the top surface 403 . In some embodiments, the insulating layers 206, 306 , 406 include insulating materials with good step coverage such as silicon dioxide ( SiO2 ), aluminum oxide ( Al2O3 ), titanium dioxide ( TiO2 ), etc., and can be formed by deposition processes such as chemical vapor deposition (CVD) and atomic layer deposition (ALD). In some embodiments, the insulating layers 206, 306, 406 include insulating materials with low dielectric constant and good step coverage, such as polyimide (PI), epoxy, and benzocyclobutene (BCB), and can be formed by, for example, spin coating, spray coating, or other suitable coating processes.

如第2圖所示,第一發光二極體晶粒200具有第一俯視面積(與第一垂直投影200A的形狀及尺寸相同),第二發光二極體晶粒300具有第二俯視面積(與第二垂直投影300A的形狀及尺寸相同),第三發光二極體晶粒具有第三俯視面積400A。在一些實施例中,第一發光二極體晶粒200的第一俯視面積相同於或不同於第二發光二極體晶粒300的第二俯視面積。在一些實施例中,第一俯視面積和第二俯視面積的總和面積小於第三俯視面積400A。As shown in FIG. 2 , the first light-emitting diode die 200 has a first top-view area (the same shape and size as the first vertical projection 200A), the second light-emitting diode die 300 has a second top-view area (the same shape and size as the second vertical projection 300A), and the third light-emitting diode die has a third top-view area 400A. In some embodiments, the first top-view area of the first light-emitting diode die 200 is the same as or different from the second top-view area of the second light-emitting diode die 300. In some embodiments, the sum of the first top-view area and the second top-view area is smaller than the third top-view area 400A.

如第3A圖所示,第一發光二極體晶粒200和第二發光二極體晶粒300的出光面(圖未顯示)均朝向第三發光二極體晶粒400的出光面401,以使第一發光二極體晶粒200和第二發光二極體晶粒300所發出的色光與第三發光二極體晶粒400發出的色光混合出光。在一些實施例中,第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400可發出不同色光(例如紅色光R、綠色光G、藍色光B)。並且舉例來說,第一發光二極體晶粒200可發射第一色光,第二發光二極體晶粒300發射第二色光,第三發光二極體晶粒400發射第三色光,上述第一色光、第二色光和第三色光分別具有不同波長範圍。舉例來說,如第3A圖所示,當第一色光為紅色光(R)、第二色光為藍色光(B)、第三色光為綠色光(G)時,第三色光波長範圍介於該第一色光波長範圍與該第二色光波長範圍之間。舉例來說,當第一色光為紅色光(R)、第二色光為綠色光(G)、第三色光為藍色光(B)時,第二色光波長範圍介於第一色光波長範圍與第三色光波長範圍之間。As shown in FIG. 3A , the light emitting surfaces (not shown) of the first light emitting diode die 200 and the second light emitting diode die 300 are both oriented toward the light emitting surface 401 of the third light emitting diode die 400, so that the color light emitted by the first light emitting diode die 200 and the second light emitting diode die 300 is mixed with the color light emitted by the third light emitting diode die 400. In some embodiments, the first light emitting diode die 200, the second light emitting diode die 300, and the third light emitting diode die 400 can emit different color lights (e.g., red light R, green light G, blue light B). And for example, the first LED crystal grain 200 can emit a first color light, the second LED crystal grain 300 can emit a second color light, and the third LED crystal grain 400 can emit a third color light, and the first color light, the second color light, and the third color light have different wavelength ranges. For example, as shown in FIG. 3A, when the first color light is red light (R), the second color light is blue light (B), and the third color light is green light (G), the wavelength range of the third color light is between the wavelength range of the first color light and the wavelength range of the second color light. For example, when the first color light is red light (R), the second color light is green light (G), and the third color light is blue light (B), the wavelength range of the second color light is between the wavelength range of the first color light and the wavelength range of the third color light.

在一些實施例中,第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400包括小型發光二極體晶粒、微型發光二極體晶粒或其他適合的發光二極體晶粒。舉例來說,第一發光二極體晶粒200和第二發光二極體晶粒300可為微型發光二極體晶粒,第三發光二極體晶粒400可為小型發光二極體晶粒,如同在第3A圖所示之實施例中,第一發光二極體晶粒200和第二發光二極體晶粒300不包括原生基板,而第三發光二極體晶粒400包括接近出光面401的原生基板402。再舉例來說,第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400皆可為微型發光二極體晶粒,於是在其他實施例中,第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400皆不包括原生基板。In some embodiments, the first LED die 200, the second LED die 300 and the third LED die 400 include small LED die, micro LED die or other suitable LED die. For example, the first LED die 200 and the second LED die 300 may be micro LED die, and the third LED die 400 may be a small LED die. As in the embodiment shown in FIG. 3A, the first LED die 200 and the second LED die 300 do not include a native substrate, and the third LED die 400 includes a native substrate 402 close to the light emitting surface 401. For another example, the first LED die 200, the second LED die 300 and the third LED die 400 may all be micro LED die. Thus, in other embodiments, the first LED die 200, the second LED die 300 and the third LED die 400 do not include a native substrate.

如第3A圖所示,發光二極體裝置500的像素結構550a更包括透明接合層414。透明接合層414夾設於第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400之間,且覆蓋絕緣層406。在一些實施例中,透明接合層414包括苯並環丁烯(Benzocyclobutene,BCB)、SU-8環氧樹脂、矽膠(Silicone)、環氧樹脂(Epoxy)、旋塗玻璃(SOG)或上述之組合,且可利用例如旋轉塗佈(spin coating)或其他合適之塗佈製程及後續的圖案化製程形成。 As shown in FIG. 3A , the pixel structure 550a of the LED device 500 further includes a transparent bonding layer 414. The transparent bonding layer 414 is sandwiched between the first LED die 200, the second LED die 300, and the third LED die 400, and covers the insulating layer 406. In some embodiments, the transparent bonding layer 414 includes benzocyclobutene (BCB), SU-8 epoxy, silicone, epoxy, spin-on glass (SOG), or a combination thereof, and can be formed by, for example, spin coating or other suitable coating processes and subsequent patterning processes.

如第3A、3B圖所示,發光二極體裝置500的像素結構550更包括保護層424,覆蓋第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400。在一些實施例中,保護層424包括聚亞醯胺(PI)、苯並環丁烯(Benzocyclobutene,BCB)、聚對二甲苯(Parylene)、萘聚合物(Polynaphthalenes)、氟碳化物(Fluorocarbons)、丙烯酸酯(Acrylates)或上述之組合,且可藉由塗佈或其他合適製程及後續的圖案化製程形成保護層424。 As shown in FIGS. 3A and 3B, the pixel structure 550 of the LED device 500 further includes a protective layer 424 covering the first LED die 200, the second LED die 300, and the third LED die 400. In some embodiments, the protective layer 424 includes polyimide (PI), benzocyclobutene (BCB), parylene, polynaphthalenes, fluorocarbons, acrylates, or a combination thereof, and the protective layer 424 can be formed by coating or other suitable processes and subsequent patterning processes.

如第2、3A圖所示,發光二極體裝置500的像素結構550a更包括彼此分離的第一線路層502、第二線路層504、第三線路層506和第四線路層508,位於第三發光二極體晶粒400與保護層424之間。在一些實施例中,第一線路層502和第二線路層504分別設置於第一發光二極體晶粒200的頂面203上,且遠離於第三發光二極體晶粒400,使第一發光二極體晶粒200夾設於第一線路層 502、第二線路層504和第三發光二極體晶粒400之間。第三線路層506和第四線路層508分別設置於第二發光二極體晶粒300的頂面303上,且遠離於第三發光二極體晶粒400,使第二發光二極體晶粒300夾設於第三線路層506、第四線路層508和第二發光二極體晶粒300。並且,第二線路層504可延伸覆蓋第二發光二極體晶粒300的頂面403,第四線路層508可延伸覆蓋第三發光二極體晶粒400的頂面403且與第二發光二極體300晶粒電性絕緣。 As shown in FIGS. 2 and 3A, the pixel structure 550a of the LED device 500 further includes a first circuit layer 502, a second circuit layer 504, a third circuit layer 506, and a fourth circuit layer 508, which are separated from each other and are located between the third LED die 400 and the protective layer 424. In some embodiments, the first circuit layer 502 and the second circuit layer 504 are respectively disposed on the top surface 203 of the first LED die 200 and are away from the third LED die 400, so that the first LED die 200 is sandwiched between the first circuit layer 502, the second circuit layer 504, and the third LED die 400. The third circuit layer 506 and the fourth circuit layer 508 are respectively disposed on the top surface 303 of the second light-emitting diode die 300 and are far away from the third light-emitting diode die 400, so that the second light-emitting diode die 300 is sandwiched between the third circuit layer 506, the fourth circuit layer 508 and the second light-emitting diode die 300. In addition, the second circuit layer 504 can extend to cover the top surface 403 of the second light-emitting diode die 300, and the fourth circuit layer 508 can extend to cover the top surface 403 of the third light-emitting diode die 400 and be electrically insulated from the second light-emitting diode die 300.

如第3A圖所示,第二線路層504將第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400的第一電極210、310、410同時電性連接起來,而第一線路層502、第三線路層506和第四線路層508分別電性連接第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400的第二電極212、312、412。在一些實施例中,第二線路層504同時電性連接具有相同極性的第一發光二極體晶粒200的第一電極210、第二發光二極體晶粒300的第一電極310和第三發光二極體晶粒400的第一電極410,以使第一發光二極體晶粒200的第一電極210、第二發光二極體晶粒300的第一電極310和第三發光二極體晶粒400的第一電極410彼此電性連接(當第一電極為陰極時,第二線路層504視為共陰極線路層)。並且,具有相同極性的第一發光二極體晶粒200的第二電極212、第二發光二極體晶粒300的第二電極312和第三發光二極體晶粒400的第二電極412分別電性連接第一線路層502、第三線路層506和第四線路層508。在一些實施例中,第一線路層502、第三線路層506和第四線路層508包括鉻(Cr)、鋁(Al)、鎳(Ni)、金(Au)、鉑(Pt)、錫(Sn)、銅(Cu)或上述之組合的導電材料,且可利用例如蒸鍍或電鍍的鍍覆製程及後續的圖案化製程形成。As shown in FIG. 3A , the second circuit layer 504 electrically connects the first electrodes 210, 310, 410 of the first LED die 200, the second LED die 300, and the third LED die 400, while the first circuit layer 502, the third circuit layer 506, and the fourth circuit layer 508 electrically connect the second electrodes 212, 312, 412 of the first LED die 200, the second LED die 300, and the third LED die 400, respectively. In some embodiments, the second circuit layer 504 electrically connects the first electrode 210 of the first light-emitting diode die 200, the first electrode 310 of the second light-emitting diode die 300, and the first electrode 410 of the third light-emitting diode die 400 having the same polarity at the same time, so that the first electrode 210 of the first light-emitting diode die 200, the first electrode 310 of the second light-emitting diode die 300, and the first electrode 410 of the third light-emitting diode die 400 are electrically connected to each other (when the first electrode is a cathode, the second circuit layer 504 is regarded as a common cathode circuit layer). Furthermore, the second electrode 212 of the first LED die 200, the second electrode 312 of the second LED die 300, and the second electrode 412 of the third LED die 400 having the same polarity are respectively electrically connected to the first circuit layer 502, the third circuit layer 506, and the fourth circuit layer 508. In some embodiments, the first circuit layer 502, the third circuit layer 506, and the fourth circuit layer 508 include conductive materials such as chromium (Cr), aluminum (Al), nickel (Ni), gold (Au), platinum (Pt), tin (Sn), copper (Cu), or a combination thereof, and can be formed by a plating process such as evaporation or electroplating and a subsequent patterning process.

保護層424具有多個開口(圖未顯示),上述多個開口分別對應位於第一線路層502的第一接合面502T上、第二線路層504的第二接合面504T上、第三線路層506的第三接合面506T上和第四線路層508的第四接合面508T上。如第2圖所示,第一接合面502T和第二接合面504T於第三發光二極體晶粒400的頂面403上的垂直投影502TA、504TA分別與第一垂直投影200A重疊,且皆與第二垂直投影300A分隔,第三接合面506T與第四接合面508T於第三發光二極體晶粒400的頂面403上的垂直投影506TA、508TA分別與第二垂直投影300A重疊,且皆與第一垂直投影200A分隔。在一些實施例中,第一接合面502T、第二接合面504T、第三接合面506T和第四接合面508T可為自保護層424開口露出的第一線路層502、第三線路層506和第四線路層508的接合面,也可包括在第一接合面502T、第二接合面504T、第三接合面506T和第四接合面508T上再形成的金屬墊(圖未顯示)。在一些實施例中,第一接合面502T、第二接合面504T、第三接合面506T和第四接合面508T實質上為共平面。The protection layer 424 has a plurality of openings (not shown), which are respectively located on the first bonding surface 502T of the first circuit layer 502, the second bonding surface 504T of the second circuit layer 504, the third bonding surface 506T of the third circuit layer 506, and the fourth bonding surface 508T of the fourth circuit layer 508. As shown in FIG. 2 , vertical projections 502TA and 504TA of the first joint surface 502T and the second joint surface 504T on the top surface 403 of the third LED die 400 overlap with the first vertical projection 200A, respectively, and are both separated from the second vertical projection 300A. Vertical projections 506TA and 508TA of the third joint surface 506T and the fourth joint surface 508T on the top surface 403 of the third LED die 400 overlap with the second vertical projection 300A, respectively, and are both separated from the first vertical projection 200A. In some embodiments, the first bonding surface 502T, the second bonding surface 504T, the third bonding surface 506T, and the fourth bonding surface 508T may be the bonding surfaces of the first circuit layer 502, the third circuit layer 506, and the fourth circuit layer 508 exposed from the opening of the protection layer 424, and may also include metal pads (not shown) formed on the first bonding surface 502T, the second bonding surface 504T, the third bonding surface 506T, and the fourth bonding surface 508T. In some embodiments, the first bonding surface 502T, the second bonding surface 504T, the third bonding surface 506T, and the fourth bonding surface 508T are substantially coplanar.

第3B圖為沿第2圖所示的本揭露一些實施例之發光二極體裝置500的像素結構550b的X-X’切線的剖面示意圖,圖中與第1、2、3A圖相同或相似之元件符號表示相同或相似之元件。如第3B圖所示,發光二極體裝置500的像素結構550b與像素結構550a的不同處為像素結構550b進一步包括分散式布拉格反射鏡418,用以增加發光二極體裝置500的發光效率。分散式布拉格反射鏡418可夾設於保護層424與第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400之間。在一些實施例中,分散式布拉格反射鏡順應性覆蓋第一發光二極體晶粒200的側壁205、第二發光二極體晶粒300的側壁305和第三發光二極體晶粒400的側壁405。並且,分散式布拉格反射鏡418覆蓋第一發光二極體晶粒200未被第一電極210和第二電極212覆蓋的部分頂面203,以及第二發光二極體晶粒300未被第一電極310和第二電極312覆蓋的部分頂面303。另外,分散式布拉格反射鏡418接觸第一線路層502、第二線路層504、第三線路層506和第四線路層508。在一些實施例中,分散式布拉格反射鏡418包括由兩種以上具有不同折射率之同質或異質材料之薄膜相互堆疊所構成。舉例來說,分散式布拉格反射鏡418可由二氧化矽(SiO 2)與二氧化鈦(TiO 2)交互堆疊所構成、由二氧化矽(SiO 2)/氧化鋁(Al 2O 3)/二氧化鈦(TiO 2)交互堆疊所構成、或由二氧化鈦(TiO 2)/二氧化矽(SiO 2)/五氧化二鉭(Ta 2O 5)交互堆疊所構成。在一些實施例中,分散式布拉格反射鏡418利用例如蒸鍍、原子層沉積(ALD)、金屬有機氣相化學沉積(MOCVD)等沉積製程及後續的圖案化製程形成。 FIG. 3B is a cross-sectional schematic diagram of the pixel structure 550b of the LED device 500 of some embodiments of the present disclosure along the XX' tangent line shown in FIG. 2, and the same or similar element symbols as those in FIGS. 1, 2, and 3A represent the same or similar elements. As shown in FIG. 3B, the difference between the pixel structure 550b of the LED device 500 and the pixel structure 550a is that the pixel structure 550b further includes a distributed Bragg reflector 418 to increase the light emitting efficiency of the LED device 500. The distributed Bragg reflector 418 can be sandwiched between the protective layer 424 and the first LED die 200, the second LED die 300, and the third LED die 400. In some embodiments, the distributed Bragg reflector conformally covers the sidewall 205 of the first light emitting diode die 200, the sidewall 305 of the second light emitting diode die 300, and the sidewall 405 of the third light emitting diode die 400. In addition, the distributed Bragg reflector 418 covers the portion of the top surface 203 of the first light emitting diode die 200 not covered by the first electrode 210 and the second electrode 212, and the portion of the top surface 303 of the second light emitting diode die 300 not covered by the first electrode 310 and the second electrode 312. In addition, the DBR 418 contacts the first circuit layer 502, the second circuit layer 504, the third circuit layer 506, and the fourth circuit layer 508. In some embodiments, the DBR 418 includes stacked films of two or more homogeneous or heterogeneous materials having different refractive indices. For example, the DBR 418 may be formed by alternate stacking of SiO 2 and TiO 2 , alternate stacking of SiO 2 / Al 2 O 3 / TiO 2 , or alternate stacking of TiO 2 / SiO 2 / Ta 2 O 5 . In some embodiments, the DBR 418 is formed by a deposition process such as evaporation, atomic layer deposition (ALD), metal organic vapor chemical deposition (MOCVD), and a subsequent patterning process.

以下說明發光二極體裝置500的形成方法。第4A、5A、6A、7A圖為形成如第1圖所示的本揭露一些實施例之發光二極體裝置500在不同階段的俯視示意圖。第4B、5B、6B圖分別為沿第4A、5A、6A圖的A-A’切線的剖面示意圖,顯示形成如第1圖所示的本揭露一些實施例之發光二極體裝置500在不同階段的剖面示意圖。第7B圖為第7A圖的像素區域700的放大示意圖,其顯示形成本揭露一些實施例之發光二極體裝置500的中間步驟的像素結構550中第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400的配置。第7C圖為沿第7B圖的X-X’切線的剖面示意圖,顯示形成如第1圖所示的本揭露一些實施例之發光二極體裝置500在不同階段的剖面示意圖。圖中與第1、2、3A、3B圖相同或相似之元件符號表示相同或相似之元件。為了方便說明,第4A、5A、6A、7A圖僅顯示第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400,其餘部件(包括載板250、350、原生基板402、第一電極210、310、410、第二電極212、312、412、轉移裝置252、352、絕緣層406和透明接合層414等)可見於第4B、5B、6B、7C圖的剖面示意圖。The following describes a method for forming the LED device 500. FIGS. 4A, 5A, 6A, and 7A are top-view schematic diagrams of the LED device 500 of some embodiments of the present disclosure as shown in FIG. 1 at different stages. FIGS. 4B, 5B, and 6B are cross-sectional schematic diagrams along the A-A’ tangent line of FIGS. 4A, 5A, and 6A, respectively, showing cross-sectional schematic diagrams of the LED device 500 of some embodiments of the present disclosure as shown in FIG. 1 at different stages. FIG. 7B is an enlarged schematic diagram of the pixel region 700 of FIG. 7A, which shows the configuration of the first LED grain 200, the second LED grain 300, and the third LED grain 400 in the pixel structure 550 in the intermediate step of forming the LED device 500 of some embodiments of the present disclosure. FIG. 7C is a schematic cross-sectional view along the line X-X' of FIG. 7B, showing a schematic cross-sectional view of the LED device 500 of some embodiments of the present disclosure as shown in FIG. 1 at different stages. Component symbols identical or similar to those in FIGS. 1, 2, 3A, and 3B represent identical or similar components. For the sake of convenience, FIGS. 4A, 5A, 6A and 7A only show the first light-emitting diode die 200, the second light-emitting diode die 300 and the third light-emitting diode die 400, and the remaining components (including the carriers 250, 350, the native substrate 402, the first electrodes 210, 310, 410, the second electrodes 212, 312, 412, the transfer devices 252, 352, the insulating layer 406 and the transparent bonding layer 414, etc.) can be seen in the cross-sectional schematic diagrams of FIGS. 4B, 5B, 6B and 7C.

請參考第4A、4B、5A、5B、6A、6B圖,分別提供以陣列方式設置於載板250上的多個第一發光二極體晶粒200、以陣列方式設置於載板350上的多個第二發光二極體晶粒300以及以陣列方式成長於原生基板402上的多個第三發光二極體晶粒400。在一些實施例中,第一發光二極體晶粒200之間的間距、第二發光二極體晶粒300之間的間距、第三發光二極體晶粒400之間的間距可以相同或不同。 Please refer to Figures 4A, 4B, 5A, 5B, 6A, and 6B, which respectively provide a plurality of first LED grains 200 arranged in an array on a carrier 250, a plurality of second LED grains 300 arranged in an array on a carrier 350, and a plurality of third LED grains 400 grown in an array on a native substrate 402. In some embodiments, the spacing between the first LED grains 200, the spacing between the second LED grains 300, and the spacing between the third LED grains 400 can be the same or different.

接著,可利用轉移裝置252、352進行例如印章轉移(stamp transfer)的巨量轉移製程,將選擇的第一發光二極體晶粒200、第二發光二極體晶粒300轉移至第三發光二極體晶粒400的對應位置上。如第4A、4B、5A、5B圖所示,分別對轉移裝置252、352施加向下壓力(如第4B、5B圖向下箭頭所示),利用轉移裝置252、352的轉置頭254、354(例如,聚二甲基矽氧烷(Polydimethylsiloxane,PDMS)轉置頭)選擇性吸附位於載板250、350上之任意數量的第一發光二極體晶粒200和第二發光二極體晶粒300,以轉移至第三發光二極體晶粒400的對應位置上,並接觸透明接合層414完成接著固定。舉例來說,可依據第三發光二極體晶粒400陣列的間距以及第一發光二極體晶粒200和第二發光二極體晶粒300設置於第三發光二極體晶粒400的對應位置來選擇性(例如每隔一個、每隔兩個或其他選擇性方式)吸附第一發光二極體晶粒200和第二發光二極體晶粒300並轉移至第三發光二極體晶粒400的頂面403上,以使在每一個像素區域700中並排設置一個第一發光二極體晶粒200和一個第二發光二極體晶粒300於一個第三發光二極體晶粒400上,如第7A、7B、7C圖所示。Next, the transfer devices 252 and 352 may be used to perform a mass transfer process such as stamp transfer to transfer the selected first LED die 200 and second LED die 300 to the corresponding position of the third LED die 400 . As shown in FIGS. 4A, 4B, 5A, and 5B, downward pressure is applied to the transfer devices 252 and 352 (as indicated by the downward arrows in FIGS. 4B and 5B), and the transfer heads 254 and 354 (e.g., polydimethylsiloxane (PDMS) transfer heads) of the transfer devices 252 and 352 are used to selectively adsorb any number of first LED chips 200 and second LED chips 300 located on the carriers 250 and 350, so as to transfer them to the corresponding positions of the third LED chips 400, and contact the transparent bonding layer 414 to complete the subsequent fixation. For example, the first LED die 200 and the second LED die 300 can be selectively (e.g., every other, every other, or other selective manner) adsorbed and transferred to the top surface 403 of the third LED die 400 according to the spacing of the third LED die 400 array and the corresponding positions of the first LED die 200 and the second LED die 300 arranged on the third LED die 400, so that in each pixel area 700, one first LED die 200 and one second LED die 300 are arranged side by side on one third LED die 400, as shown in FIGS. 7A, 7B, and 7C.

接著,如第8圖所示,進行沉積製程及後續的圖案化製程,於第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400上形成彼此分離的第一線路層502、第二線路層504、第三線路層506和第四線路層508。第一線路層502覆蓋第一發光二極體晶粒200的部分頂面203,且電性連接第一發光二極體晶粒200的第二電極212。第二線路層504從第一發光二極體晶粒200的部分頂面203和側壁205延伸覆蓋第三發光二極體晶粒400的部分頂面403和第二發光二極體晶粒300的部分頂面303和側壁305且同時電性連接第一發光二極體晶粒200的第一電極210、第二發光二極體晶粒300的第一電極310和第三發光二極體晶粒400的第一電極410。第三線路層506電性連接第二發光二極體晶粒300的第二電極312。第四線路層508電性連接第三發光二極體晶粒400的第二電極412,並延伸覆蓋第三發光二極體晶粒400的部分頂面403。Next, as shown in FIG. 8 , a deposition process and a subsequent patterning process are performed to form a first circuit layer 502, a second circuit layer 504, a third circuit layer 506 and a fourth circuit layer 508 separated from each other on the first LED die 200, the second LED die 300 and the third LED die 400. The first circuit layer 502 covers a portion of the top surface 203 of the first LED die 200 and is electrically connected to the second electrode 212 of the first LED die 200. The second circuit layer 504 extends from a portion of the top surface 203 and the side wall 205 of the first LED die 200 to cover a portion of the top surface 403 of the third LED die 400 and a portion of the top surface 303 and the side wall 305 of the second LED die 300 and electrically connects the first electrode 210 of the first LED die 200, the first electrode 310 of the second LED die 300 and the first electrode 410 of the third LED die 400. The third circuit layer 506 electrically connects the second electrode 312 of the second LED die 300. The fourth circuit layer 508 is electrically connected to the second electrode 412 of the third LED die 400 and extends to cover a portion of the top surface 403 of the third LED die 400 .

接著,如第3A圖所示,進行塗佈製程和後續的圖案化製程形成覆蓋第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400的保護層424。保護層424覆蓋部分第一線路層502、第二線路層504、第三線路層506和第四線路層508,且具有多個開口(圖未顯示)以定義第一線路層502的第一接合面502T、第二線路層504的第二接合面504T、第三線路層506的第三接合面506T和第四線路層508的第四接合面508T的位置。經過上述製程之後,形成本揭露一些實施例之包括像素結構550a的發光二極體裝置500形成的陣列。Next, as shown in FIG. 3A , a coating process and a subsequent patterning process are performed to form a protection layer 424 covering the first light-emitting diode die 200, the second light-emitting diode die 300, and the third light-emitting diode die 400. The protection layer 424 covers a portion of the first circuit layer 502, the second circuit layer 504, the third circuit layer 506, and the fourth circuit layer 508, and has a plurality of openings (not shown) to define the positions of the first bonding surface 502T of the first circuit layer 502, the second bonding surface 504T of the second circuit layer 504, the third bonding surface 506T of the third circuit layer 506, and the fourth bonding surface 508T of the fourth circuit layer 508. After the above-mentioned manufacturing process, an array of light-emitting diode devices 500 including pixel structures 550a according to some embodiments of the present disclosure is formed.

在本揭露一些實施例中,在進行類似第7A-7C圖所示的製程之後,如第3B圖所示,進行沉積製程及後續的圖案化製程,在第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400上形成分散式布拉格反射鏡418。分散式布拉格反射鏡418從第三發光二極體晶粒400的側壁405延伸覆蓋上方的第一發光二極體晶粒200的側壁205和部分頂面203,以及第二發光二極體晶粒300的側壁305和部分頂面303,以使第一發光二極體晶粒200的第一電極210和第二電極212和第二發光二極體晶粒300的第一電極310和第二電極212從分散式布拉格反射鏡418暴露出來。在一些實施例中,分散式布拉格反射鏡418可在形成第一線路層502、第二線路層504、第三線路層506和第四線路層508之前形成。在另一些實施例中,分散式布拉格反射鏡418可在形成第一線路層502、第二線路層504、第三線路層506和第四線路層508之後形成。經過上述製程之後,形成本揭露一些實施例之包括像素結構550b的發光二極體裝置500形成的陣列。In some embodiments of the present disclosure, after performing the process similar to that shown in FIGS. 7A-7C , a deposition process and a subsequent patterning process are performed as shown in FIG. 3B to form a distributed Bragg reflector 418 on the first LED die 200 , the second LED die 300 , and the third LED die 400 . The distributed Bragg reflector 418 extends from the sidewall 405 of the third LED die 400 to cover the sidewall 205 and a portion of the top surface 203 of the first LED die 200, and the sidewall 305 and a portion of the top surface 303 of the second LED die 300, so that the first electrode 210 and the second electrode 212 of the first LED die 200 and the first electrode 310 and the second electrode 212 of the second LED die 300 are exposed from the distributed Bragg reflector 418. In some embodiments, the distributed Bragg reflector 418 may be formed before forming the first wiring layer 502, the second wiring layer 504, the third wiring layer 506, and the fourth wiring layer 508. In some other embodiments, the DBR 418 may be formed after forming the first circuit layer 502, the second circuit layer 504, the third circuit layer 506 and the fourth circuit layer 508. After the above processes, an array of LED devices 500 including pixel structures 550b according to some embodiments of the present disclosure is formed.

第9A、9B圖為本揭露一些實施例之發光二極體裝置500的像素結構550a1的俯視示意圖。第9A圖顯示像素結構550a1中第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400與第一線路層502、第二線路層504、第三線路層506和第四線路層508的配置。第9B圖顯示像素結構550a1中第一線路層502的第一接合面502T、第二線路層504的第二接合面504T、第三線路層506的第三接合面506T和第四線路層508的第四接合面508T與保護層424的配置。 Figures 9A and 9B are schematic top views of a pixel structure 550a1 of a light-emitting diode device 500 according to some embodiments of the present disclosure. Figure 9A shows the configuration of the first light-emitting diode die 200, the second light-emitting diode die 300, and the third light-emitting diode die 400 in the pixel structure 550a1 and the first circuit layer 502, the second circuit layer 504, the third circuit layer 506, and the fourth circuit layer 508. Figure 9B shows the configuration of the first junction surface 502T of the first circuit layer 502, the second junction surface 504T of the second circuit layer 504, the third junction surface 506T of the third circuit layer 506, and the fourth junction surface 508T of the fourth circuit layer 508 in the pixel structure 550a1 and the protective layer 424.

如第9A圖所示,在一些實施例中,電性連接第二電極212的第一線路層502和電性連接第一電極210、310、410的第二線路層504分別設置於第一發光二極體晶粒200的頂面203上,且遠離於第三發光二極體晶粒400。並且,第二線路層504延伸覆蓋第二發光二極體晶粒300的頂面303和第三發光二極體晶粒400的頂面403。電性連接第二電極312的第三線路層506和電性連接第二電極412的第四線路層508分別設置於第二發光二極體晶粒300的頂面303上,且遠離於第三發光二極體晶粒400。並且,第四線路層508延伸覆蓋第三發光二極體晶粒400的頂面403。 As shown in FIG. 9A , in some embodiments, the first circuit layer 502 electrically connected to the second electrode 212 and the second circuit layer 504 electrically connected to the first electrodes 210, 310, 410 are respectively disposed on the top surface 203 of the first LED die 200 and away from the third LED die 400. Furthermore, the second circuit layer 504 extends to cover the top surface 303 of the second LED die 300 and the top surface 403 of the third LED die 400. The third circuit layer 506 electrically connected to the second electrode 312 and the fourth circuit layer 508 electrically connected to the second electrode 412 are respectively disposed on the top surface 303 of the second light-emitting diode die 300 and away from the third light-emitting diode die 400. In addition, the fourth circuit layer 508 extends to cover the top surface 403 of the third light-emitting diode die 400.

如第9B圖所示,在一些實施例中,與保護層424的開口對應的第一接合面502T及第二接合面504T的垂直投影502TA、504TA完全位於第一垂直投影200A內,且與保護層424的開口對應的第三接合面506T及第四接合面508T的垂直投影506TA、508TA完全位於第二垂直投影300A內。並且,第一接合面502T、第二接合面504T、第三接合面506T和第四接合面508T分別接近像素結構550a1的四個角落。 As shown in FIG. 9B , in some embodiments, the vertical projections 502TA and 504TA of the first joint surface 502T and the second joint surface 504T corresponding to the opening of the protective layer 424 are completely located in the first vertical projection 200A, and the vertical projections 506TA and 508TA of the third joint surface 506T and the fourth joint surface 508T corresponding to the opening of the protective layer 424 are completely located in the second vertical projection 300A. In addition, the first joint surface 502T, the second joint surface 504T, the third joint surface 506T and the fourth joint surface 508T are respectively close to the four corners of the pixel structure 550a1.

在一些實施例中,由於第三發光二極體晶粒400的半導體磊晶堆疊結構404(請參考第3A圖,包括第一導電類型半導體層、第二導電類型半導體層及發光層(圖未顯示))的第一導電類型半導體層404-1會從側壁405暴露出來,因此可改變共電極線路層504(例如第9A圖的第二線路層(共陰極線路層)504)的連接方式,將第一發光二極體晶粒200的第一電極210和第二發光二極體晶粒300的第一電極310藉由不同的線路層電性連接第三發光二極體晶粒400的第一導電類型半導體層404-1,以取代電性連接第三發光二極體晶粒400的第一電極410。第10A、10B圖為本揭露一些實施例之發光二極體裝置500的像素結構550a2的俯視示意圖。第10A圖顯示像素結構550a2中第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400與第一線路層502、第二線路層504a1、第三線路層506、第四線路層508和第五線路層504a2的配置。第10B圖顯示像素結構550a2中第一線路層502的第一接合面502T、第二線路層504a1的第二接合面504T、第三線路層506的第三接合面506T和第四線路層508的第四接合面508T與保護層424的配置。圖中與第9A、9B圖相同或相似之元件符號表示相同或相似之元件。如第10A圖所示,發光二極體裝置500的像素結構550a2與像素結構550a1的不同處為像素結構550a2使用第二線路層504a1和第五線路層504a2以分別將第一發光二極體晶粒200的第一電極210、第二發光二極體晶粒300的第一電極310電性連接至第三發光二極體晶粒400的半導體磊晶堆疊結構404(請參考第3A圖,其包括第一導電類型半導體層、第二導電類型半導體層及發光層(圖未顯示))的第一導電類型半導體層404-1。在一些實施例中,第五線路層504a2設置於第二發光二極體晶粒300的頂面303上,且延伸覆蓋第二發光二極體晶粒300的側面305和第三發光二極體晶粒400。在一些實施例中,第五線路層504a2電性連接第二發光二極體晶粒300的第一電極310和第三發光二極體晶粒400的第一導電類型半導體層404-1。第二線路層504a1延伸至第一發光二極體晶粒200的側面205和第三發光二極體晶粒400,且電性連接第一發光二極體晶粒200的第一電極210和第三發光二極體晶粒400的第一導電類型半導體層404-1。並且,像素結構550a2的第二接合面504T位於第二線路層504a1上。因此,如第10B圖所示,第一接合面502T、第二接合面504T、第三接合面506T和第四接合面508T仍分別接近像素結構550a2的四個角落。In some embodiments, since the first conductivity type semiconductor layer 404-1 of the semiconductor epitaxial stack structure 404 (refer to FIG. 3A , including the first conductivity type semiconductor layer, the second conductivity type semiconductor layer and the light emitting layer (not shown)) of the third light emitting diode die 400 is exposed from the sidewall 405, the common electrode line layer 504 (for example, the second line layer of FIG. 9A ) can be changed. The first electrode 210 of the first LED die 200 and the first electrode 310 of the second LED die 300 are electrically connected to the first conductive type semiconductor layer 404-1 of the third LED die 400 through different circuit layers, instead of being electrically connected to the first electrode 410 of the third LED die 400. FIGS. 10A and 10B are schematic top views of a pixel structure 550a2 of a LED device 500 according to some embodiments of the present disclosure. FIG. 10A shows the arrangement of the first light-emitting diode die 200, the second light-emitting diode die 300, and the third light-emitting diode die 400 and the first circuit layer 502, the second circuit layer 504a1, the third circuit layer 506, the fourth circuit layer 508, and the fifth circuit layer 504a2 in the pixel structure 550a2. FIG. 10B shows the arrangement of the first junction surface 502T of the first circuit layer 502, the second junction surface 504T of the second circuit layer 504a1, the third junction surface 506T of the third circuit layer 506, and the fourth junction surface 508T of the fourth circuit layer 508 in the pixel structure 550a2, and the protective layer 424. The same or similar element symbols in the figure as those in FIGS. 9A and 9B represent the same or similar elements. As shown in FIG. 10A , the difference between the pixel structure 550a2 of the LED device 500 and the pixel structure 550a1 is that the pixel structure 550a2 uses the second circuit layer 504a1 and the fifth circuit layer 504a2 to electrically connect the first electrode 210 of the first LED die 200 and the first electrode 310 of the second LED die 300 to the first conductive type semiconductor layer 404-1 of the semiconductor epitaxial stack structure 404 (please refer to FIG. 3A , which includes a first conductive type semiconductor layer, a second conductive type semiconductor layer and a light-emitting layer (not shown)) of the third LED die 400. In some embodiments, the fifth circuit layer 504a2 is disposed on the top surface 303 of the second LED die 300 and extends to cover the side surface 305 of the second LED die 300 and the third LED die 400. In some embodiments, the fifth circuit layer 504a2 electrically connects the first electrode 310 of the second LED die 300 and the first conductivity type semiconductor layer 404-1 of the third LED die 400. The second circuit layer 504a1 extends to the side surface 205 of the first light-emitting diode die 200 and the third light-emitting diode die 400, and electrically connects the first electrode 210 of the first light-emitting diode die 200 and the first conductive type semiconductor layer 404-1 of the third light-emitting diode die 400. In addition, the second bonding surface 504T of the pixel structure 550a2 is located on the second circuit layer 504a1. Therefore, as shown in FIG. 10B, the first bonding surface 502T, the second bonding surface 504T, the third bonding surface 506T and the fourth bonding surface 508T are still close to the four corners of the pixel structure 550a2.

在一些實施例中,可根據發光二極體晶粒的第一電極和第二電極的的設置位置,以相應改變發光二極體裝置500的四個接合面的位置。第11A、11B圖為本揭露一些實施例之發光二極體裝置500的像素結構550a3的俯視示意圖。第11A圖顯示像素結構550a3中第一發光二極體晶粒200、第二發光二極體晶粒300和第三發光二極體晶粒400與第一線路層502、第二線路層504b、第三線路層506和第四線路層508a的配置。第11B圖顯示像素結構550a3中第一線路層502的第一接合面502T、第二線路層504b的第二接合面504T、第三線路層506的第三接合面506T和第四線路層508a的第四接合面508T與保護層424的配置。圖中與第9A、9B、10A、10B圖相同或相似之元件符號表示相同或相似之元件。如第11A圖所示,發光二極體裝置500的像素結構550a3與像素結構550a1的不同處為像素結構550a3的第二發光二極體晶粒300的第一電極310與第一發光二極體晶粒200的第一電極210和第三發光二極體400的第一電極410位於沿方向100(實質上垂直於第一發光二極體晶粒200和第一發光二極體晶粒200的長軸方向)並排設置。因此,像素結構550a3的第二線路層504b從第一發光二極體晶粒200的頂面203沿方向100延伸覆蓋第三發光二極體400的頂面403和第二發光二極體晶粒300的頂面303。並且,在如第11A圖所示的俯視圖中,第二線路層504b實質上為長條形,且兩末端分別位於第一發光二極體晶粒200和第二發光二極體晶粒300的末端部分。像素結構550a3的第三線路層506位於第三線路層506的中間部分。像素結構550a3的第四線路層508a從第二發光二極體晶粒300沿方向100延伸覆蓋第三發光二極體400的頂面403和第一發光二極體晶粒200的頂面203。並且,在如第11A圖所示的俯視圖中,第四線路層508a實質上為長條形,且兩末端分別位於第一發光二極體晶粒200和第二發光二極體晶粒300的末端部分。如第11B圖所示,像素結構550a3的第一接合面502T和第三接合面506T分別對應第一發光二極體晶粒200和第二發光二極體晶粒300的的中間部分。像素結構550a3的第二接合面504T和第四接合面508T分別接近像素結構550a3的對角線角落。 In some embodiments, the positions of the four joint surfaces of the LED device 500 can be changed accordingly according to the positions of the first electrode and the second electrode of the LED die. FIGS. 11A and 11B are top view schematic diagrams of the pixel structure 550a3 of the LED device 500 according to some embodiments of the present disclosure. FIG. 11A shows the configuration of the first LED die 200, the second LED die 300, and the third LED die 400 and the first circuit layer 502, the second circuit layer 504b, the third circuit layer 506, and the fourth circuit layer 508a in the pixel structure 550a3. FIG. 11B shows the arrangement of the first bonding surface 502T of the first circuit layer 502, the second bonding surface 504T of the second circuit layer 504b, the third bonding surface 506T of the third circuit layer 506, and the fourth bonding surface 508T of the fourth circuit layer 508a and the protective layer 424 in the pixel structure 550a3. Component symbols identical or similar to those in FIGS. 9A, 9B, 10A, and 10B represent identical or similar components. As shown in FIG. 11A , the pixel structure 550a3 of the LED device 500 is different from the pixel structure 550a1 in that the first electrode 310 of the second LED grain 300 of the pixel structure 550a3 is arranged side by side with the first electrode 210 of the first LED grain 200 and the first electrode 410 of the third LED grain 400 along a direction 100 (substantially perpendicular to the first LED grain 200 and the long axis direction of the first LED grain 200). Therefore, the second circuit layer 504b of the pixel structure 550a3 extends from the top surface 203 of the first LED die 200 along the direction 100 to cover the top surface 403 of the third LED 400 and the top surface 303 of the second LED die 300. Moreover, in the top view shown in FIG. 11A , the second circuit layer 504b is substantially in the shape of a strip, and the two ends are respectively located at the end portions of the first LED die 200 and the second LED die 300. The third circuit layer 506 of the pixel structure 550a3 is located in the middle portion of the third circuit layer 506. The fourth circuit layer 508a of the pixel structure 550a3 extends from the second LED die 300 along the direction 100 to cover the top surface 403 of the third LED die 400 and the top surface 203 of the first LED die 200. Moreover, in the top view shown in FIG. 11A, the fourth circuit layer 508a is substantially in the shape of a strip, and the two ends are respectively located at the end portions of the first LED die 200 and the second LED die 300. As shown in FIG. 11B, the first bonding surface 502T and the third bonding surface 506T of the pixel structure 550a3 correspond to the middle portions of the first LED die 200 and the second LED die 300, respectively. The second bonding surface 504T and the fourth bonding surface 508T of the pixel structure 550a3 are respectively close to the diagonal corners of the pixel structure 550a3.

在一些實施例中,可使用不同尺寸的第一發光二極體晶粒200a和第二發光二極體晶粒300a,並搭配線路層的設計,使四個不同接合面分別接近像素結構的四個角落。第12A、12B圖為本揭露一些實施例之發光二極體裝置500的像素結構550a4的俯視示意圖。第12A圖顯示像素結構550a4中第一發光二極體晶粒200a、第二發光二極體晶粒300a和第三發光二極體晶粒400與第一線路層502、第二線路層504c、第三線路層506和第四線路層508b的配置。第12B圖顯示像素結構550a4中第一線路層502的第一接合面502T、第二線路層504c的第二接合面504T、第三線路層506的第三接合面506T和第四線路層508b的第四接合面508T與保護層424的配置。圖中與第9A、9B、10A、10B、11A、10B圖相同或相似之元件符號表示相同或相似之元件。如第12A圖所示,發光二極體裝置500的像素結構550a4與像素結構550a1的不同處為像素結構550a4的第一發光二極體晶粒200a和第二發光二極體晶粒300a的尺寸分別小於第9A、9B圖所示的第一發光二極體晶粒200和第二發光二極體晶粒300。因此,第二線路層504c與第一電極210、310、410電性連接部分的線寬小於接近像素結構550a4角落部分的線寬。並且,第四線路層508b與第二電極412電性連接部分的線寬小於接近像素結構550a4角落部分的線寬。如第12B圖所示,在一些實施例中,與保護層424的開口對應的第一接合面502T 及第四接合面508T的垂直投影502TA部分位於第一垂直投影200aA內。與保護層424的開口對應的第二接合面504T及第三接合面506T的垂直投影506TA、508TA部分位於第二垂直投影300aA內。位於第一垂直投影200A內的部分第一接合面502T和第四接合面508T與位於第二垂直投影300aA內的部分第二接合面504T和第三接合面506T共平面。並且,第一接合面502T、第二接合面504T、第三接合面506T和第四接合面508T仍分別接近像素結構550a4的四個角落。 In some embodiments, the first LED die 200a and the second LED die 300a of different sizes may be used, and the design of the circuit layer may be combined so that the four different bonding surfaces are close to the four corners of the pixel structure. FIGS. 12A and 12B are top view schematic diagrams of the pixel structure 550a4 of the LED device 500 of some embodiments of the present disclosure. FIG. 12A shows the configuration of the first LED die 200a, the second LED die 300a and the third LED die 400 and the first circuit layer 502, the second circuit layer 504c, the third circuit layer 506 and the fourth circuit layer 508b in the pixel structure 550a4. FIG. 12B shows the arrangement of the first bonding surface 502T of the first circuit layer 502, the second bonding surface 504T of the second circuit layer 504c, the third bonding surface 506T of the third circuit layer 506, and the fourth bonding surface 508T of the fourth circuit layer 508b and the protective layer 424 in the pixel structure 550a4. Component symbols identical or similar to those in FIGS. 9A, 9B, 10A, 10B, 11A, and 10B represent identical or similar components. As shown in FIG. 12A , the difference between the pixel structure 550a4 of the LED device 500 and the pixel structure 550a1 is that the sizes of the first LED die 200a and the second LED die 300a of the pixel structure 550a4 are smaller than the first LED die 200 and the second LED die 300 shown in FIGS. 9A and 9B , respectively. Therefore, the line width of the portion where the second circuit layer 504c is electrically connected to the first electrodes 210, 310, 410 is smaller than the line width near the corner of the pixel structure 550a4. In addition, the line width of the portion where the fourth circuit layer 508b is electrically connected to the second electrode 412 is smaller than the line width near the corner of the pixel structure 550a4. As shown in FIG. 12B, in some embodiments, the vertical projection 502TA of the first joint surface 502T and the fourth joint surface 508T corresponding to the opening of the protective layer 424 is partially located within the first vertical projection 200aA. The vertical projections 506TA and 508TA of the second joint surface 504T and the third joint surface 506T corresponding to the opening of the protective layer 424 are partially located within the second vertical projection 300aA. The first joint surface 502T and the fourth joint surface 508T located within the first vertical projection 200A are coplanar with the second joint surface 504T and the third joint surface 506T located within the second vertical projection 300aA. In addition, the first joint surface 502T, the second joint surface 504T, the third joint surface 506T and the fourth joint surface 508T are still close to the four corners of the pixel structure 550a4, respectively.

第13、14、15圖為本揭露一些實施例之發光二極體裝置500的像素結構550b1、550b2、550b3的俯視示意圖。像素結構550b1、550b2、550b3分別與像素結構550a1、550a2、550a3的不同處為像素結構550b1、550b2、550b3分別進一步包括分散式布拉格反射鏡418a、418b、418c。如第13圖所示,像素結構550b1的分散式布拉格反射鏡418a在形成第一線路層502、第二線路層504、第三線路層506和第四線路層508之後形成。如第14圖所示,像素結構550b2的分散式布拉格反射鏡418b在形成第一線路層502、第二線路層504a1、第三線路層506和第四線路層508和第五線路層504a2之後形成。如第15圖所示,像素結構550b3的分散式布拉格反射鏡418c在形成第一線路層502、第二線路層504b、第三線路層506和第四線路層508a之後形成。 FIG. 13, FIG. 14, and FIG. 15 are top views of pixel structures 550b1, 550b2, and 550b3 of the LED device 500 according to some embodiments of the present disclosure. The pixel structures 550b1, 550b2, and 550b3 are different from the pixel structures 550a1, 550a2, and 550a3 in that the pixel structures 550b1, 550b2, and 550b3 further include distributed Bragg reflectors 418a, 418b, and 418c, respectively. As shown in FIG. 13, the distributed Bragg reflector 418a of the pixel structure 550b1 is formed after the first circuit layer 502, the second circuit layer 504, the third circuit layer 506, and the fourth circuit layer 508 are formed. As shown in FIG. 14, the distributed Bragg reflector 418b of the pixel structure 550b2 is formed after forming the first wiring layer 502, the second wiring layer 504a1, the third wiring layer 506, the fourth wiring layer 508, and the fifth wiring layer 504a2. As shown in FIG. 15, the distributed Bragg reflector 418c of the pixel structure 550b3 is formed after forming the first wiring layer 502, the second wiring layer 504b, the third wiring layer 506, and the fourth wiring layer 508a.

第16圖為本揭露一些實施例之發光二極體裝置500的像素結構550b4的俯視示意圖。像素結構550b4與像素結構550a4的不同處為像素結構550b4進一步包括分散式布拉格反射鏡418d。如第16圖所示,像素結構550b4的分散式布拉格反射鏡418d在形成第一線路層502、第二線路層504c、第三線路層506和第四線路層508b之前形成。FIG. 16 is a schematic top view of a pixel structure 550b4 of a light emitting diode device 500 according to some embodiments of the present disclosure. The difference between the pixel structure 550b4 and the pixel structure 550a4 is that the pixel structure 550b4 further includes a distributed Bragg reflector 418d. As shown in FIG. 16, the distributed Bragg reflector 418d of the pixel structure 550b4 is formed before forming the first wiring layer 502, the second wiring layer 504c, the third wiring layer 506, and the fourth wiring layer 508b.

第17圖為本揭露一些實施例之發光二極體裝置500a的立體示意圖,其顯示帶有原生基板402(第3A圖)的像素結構550與電路基板600和微型控制元件602的接合方式。在一些實施例中,發光二極體裝置500a進一步包括電路基板600以及設置於電路基板600上的微型控制元件602。例如將圖7A中的發光二極體像素結構陣列進行雷射切割(laser cutting)的切割製程(singulation process),分離成多個獨立的像素結構550。接著,可進行取放(pick and place)製程,使用例如頂針的拾取頭(pickup-head)選擇性吸附獨立的像素結構550並設置於電路基板600上,並使像素結構550的第一接合面502T、第二接合面504T、第三接合面506T和第四接合面508T(第2圖)分別電性接觸電路基板600的相應焊墊(圖未顯示),以使微型控制元件602藉由電路基板600的焊墊及線路層(圖未顯示)電性連接像素結構550的第一線路層502、第二線路層504、第三線路層506和第四線路層508,以各別控制不同的像素結構550。FIG. 17 is a three-dimensional schematic diagram of an LED device 500a according to some embodiments of the present disclosure, which shows how a pixel structure 550 with a native substrate 402 (FIG. 3A) is bonded to a circuit substrate 600 and a micro-control element 602. In some embodiments, the LED device 500a further includes a circuit substrate 600 and a micro-control element 602 disposed on the circuit substrate 600. For example, the LED pixel structure array in FIG. 7A is subjected to a laser cutting singulation process to separate the plurality of independent pixel structures 550. Next, a pick and place process may be performed, using a pickup head such as a needle to selectively adsorb the independent pixel structure 550 and place it on the circuit substrate 600, and making the first bonding surface 502T, the second bonding surface 504T, the third bonding surface 506T and the fourth bonding surface 508T (FIG. 2) of the pixel structure 550 electrically contact the corresponding pads (not shown) of the circuit substrate 600, so that the micro-control element 602 is electrically connected to the first circuit layer 502, the second circuit layer 504, the third circuit layer 506 and the fourth circuit layer 508 of the pixel structure 550 through the pads and the circuit layer (not shown) of the circuit substrate 600, so as to control different pixel structures 550 respectively.

第18圖為本揭露一些實施例之包括電路基板600和微型控制元件602的發光二極體裝置500b的立體示意圖,其顯示移除原生基板402(第3A圖)的像素結構550c與電路基板600和微型控制元件602的接合方式。發光二極體裝置500b與發光二極體裝置500a的不同處為發光二極體裝置500b的的第三發光二極體晶粒不包括原生基板。例如將圖7A中的發光二極體像素結構陣列進行雷射剝離(laser lift-off, LLO)的基板移除製程(substrate removal process),移除發光二極體裝置500b的像素結構陣列的原生基板402且分離成多個獨立的像素結構550c,以進一步縮小像素結構550c的尺寸。接著,可進行例如印章轉移(stamp transfer)的巨量轉移製程,使用例如聚二甲基矽氧烷(PDMS)轉置頭選擇性吸附獨立的像素結構550c並設置於電路基板600上,並使像素結構550c的第一接合面502T、第二接合面504T、第三接合面506T和第四接合面508T(第2圖)分別電性接觸電路基板600的相應焊墊(圖未顯示),以使微型控制元件602藉由電路基板600的焊墊及線路層(圖未顯示)電性連接像素結構550c的第一線路層502、第二線路層504、第三線路層506和第四線路層508,以各別控制不同的像素結構550c。FIG. 18 is a three-dimensional schematic diagram of an LED device 500b including a circuit substrate 600 and a micro-control element 602 according to some embodiments of the present disclosure, which shows how a pixel structure 550c with the native substrate 402 ( FIG. 3A ) removed is bonded to the circuit substrate 600 and the micro-control element 602. The difference between the LED device 500b and the LED device 500a is that the third LED die of the LED device 500b does not include a native substrate. For example, the LED pixel structure array in FIG. 7A is subjected to a substrate removal process of laser lift-off (LLO) to remove the native substrate 402 of the pixel structure array of the LED device 500b and separate it into a plurality of independent pixel structures 550c, so as to further reduce the size of the pixel structure 550c. Next, a mass transfer process such as stamp transfer can be performed, using, for example, a polydimethylsiloxane (PDMS) transfer head to selectively adsorb an independent pixel structure 550c and set it on the circuit substrate 600, and make the first bonding surface 502T, the second bonding surface 504T, the third bonding surface 506T and the fourth bonding surface 508T (Figure 2) of the pixel structure 550c electrically contact the corresponding pads (not shown) of the circuit substrate 600, so that the micro-control element 602 is electrically connected to the first circuit layer 502, the second circuit layer 504, the third circuit layer 506 and the fourth circuit layer 508 of the pixel structure 550c through the pads and circuit layers (not shown) of the circuit substrate 600, so as to control different pixel structures 550c respectively.

第19A、19B、19C圖為本揭露一些實施例之發光二極體裝置500c的立體示意圖和剖面示意圖,其顯示像素結構550與薄膜電晶體基板610的接合方式。發光二極體裝置500c與發光二極體裝置500b的不同處為發光二極體裝置500c的像素結構550接合至薄膜電晶體基板610以形成例如發光二極體顯示裝置的發光二極體裝置500c。在一些實施例中,發光二極體裝置500進一步包括設置於像素結構550上的薄膜電晶體基板610。如第19A、19B圖所示,在一些實施例中,形成發光二極體裝置500c的像素結構550陣列後,進行半導體製程,在像素結構550上形成薄膜電晶體基板610。薄膜電晶體基板610包括相應各個像素結構550的多個薄膜電晶體612a、612b、612c及線路(圖未顯示)。薄膜電晶體612a、612b、612c及線路電性連接相應像素結構550的第一線路層502的第一接合面502T、第二線路層504的第二接合面504T、第三線路層506的第三接合面506T和第四線路層508的第四接合面508T(第2、3A圖),以各別控制不同的像素結構550。FIG. 19A, FIG. 19B, and FIG. 19C are three-dimensional schematic diagrams and cross-sectional schematic diagrams of a light-emitting diode device 500c according to some embodiments of the present disclosure, which show the bonding method of the pixel structure 550 and the thin film transistor substrate 610. The difference between the light-emitting diode device 500c and the light-emitting diode device 500b is that the pixel structure 550 of the light-emitting diode device 500c is bonded to the thin film transistor substrate 610 to form the light-emitting diode device 500c of, for example, a light-emitting diode display device. In some embodiments, the light-emitting diode device 500 further includes a thin film transistor substrate 610 disposed on the pixel structure 550. As shown in FIGS. 19A and 19B, in some embodiments, after forming an array of pixel structures 550 of a light-emitting diode device 500c, a semiconductor process is performed to form a thin film transistor substrate 610 on the pixel structures 550. The thin film transistor substrate 610 includes a plurality of thin film transistors 612a, 612b, 612c and circuits (not shown) corresponding to each pixel structure 550. The thin film transistors 612a, 612b, 612c and circuits are electrically connected to the first bonding surface 502T of the first wiring layer 502, the second bonding surface 504T of the second wiring layer 504, the third bonding surface 506T of the third wiring layer 506, and the fourth bonding surface 508T of the fourth wiring layer 508 of the corresponding pixel structure 550 (FIGS. 2 and 3A) to control different pixel structures 550 respectively.

如第19A、19C圖所示,在一些實施例中,可將像素結構550陣列與已製備完成的薄膜電晶體基板610進行接合以形成如發光二極體顯示裝置的發光二極體裝置500c。發光二極體裝置500c的各個像素結構550的第一線路層502的第一接合面502T、第二線路層504的第二接合面504T、第三線路層506的第三接合面506T和第四線路層508的第四接合面508T(第2、3A圖)分別電性連接相應的薄膜電晶體612a、612b、612c及線路(圖未顯示) ,以各別控制不同的像素結構550。As shown in FIGS. 19A and 19C, in some embodiments, the array of pixel structures 550 can be bonded to the prepared thin film transistor substrate 610 to form a light-emitting diode device 500c such as a light-emitting diode display device. The first bonding surface 502T of the first circuit layer 502, the second bonding surface 504T of the second circuit layer 504, the third bonding surface 506T of the third circuit layer 506, and the fourth bonding surface 508T of the fourth circuit layer 508 (FIGS. 2 and 3A) of each pixel structure 550 of the light-emitting diode device 500c are electrically connected to corresponding thin film transistors 612a, 612b, 612c and circuits (not shown) respectively to control different pixel structures 550 respectively.

本揭露實施例提供一種發光二極體裝置。上述發光二極體裝置在一個發光二極體晶粒的頂面上並排堆疊兩個小型或微型發光二極體晶粒以形成單一像素結構,並搭配各個發光二極體晶粒的線路層配置,使三個陽極接合面和共陰極接合面的其中兩個陽極接合面位於並排堆疊發光二極體晶粒的其中一個上方,其中另一個陽極接合面和共陰極接合面位於並排堆疊發光二極體晶粒的其中另一個上方,且發光二極體裝置的出光面位於下方發光二極體晶粒的頂面的相對側。在一些實施例中,發光二極體裝置的像素結構可與設有微型控制元件的電路基板接合,以各別控制不同的像素結構。在一些實施例中,發光二極體裝置的像素結構陣列可與薄膜電晶體基板接合以形成例如發光二極體顯示裝置,其中薄膜電晶體基板的薄膜電晶體各別控制不同的像素結構。本揭露實施例的發光二極體裝置的利用轉移製程將兩個微型發光二極體晶粒並排堆疊在另一個微型或小型發光二極體晶粒上,因此不需進行複雜度高的晶圓接合製程及高深寬比的線路製程,也可對並排堆疊的發光二極體晶粒預先進行分級(binning),可進一步縮小像素結構體積、簡化製程、提升良率和降低成本。在一些實施例中,本揭露實施例的發光二極體裝置將例如紅色及藍色發光二極體晶粒並排堆疊在綠色發光二極體晶粒上,像素結構的亮度由下方的綠色發光二極體晶粒控制,可提升發光面積及亮度。在一些實施例中,可以是三個陽極及一個共陰極的設計。在一些實施例中,也可以將三個發光二極體晶粒的陰極與陽極的極性完全反轉,形成三個陰極及一個共陽極的設計。The disclosed embodiment provides a light emitting diode device. The light emitting diode device stacks two small or micro light emitting diode dies side by side on the top surface of a light emitting diode die to form a single pixel structure, and the circuit layer of each light emitting diode die is configured so that two of the three anode junction surfaces and the common cathode junction surface are located above one of the side-by-side stacked light emitting diode dies, the other anode junction surface and the common cathode junction surface are located above another of the side-by-side stacked light emitting diode dies, and the light emitting surface of the light emitting diode device is located on the opposite side of the top surface of the lower light emitting diode die. In some embodiments, the pixel structure of the LED device can be bonded to a circuit substrate provided with a micro-control element to control different pixel structures separately. In some embodiments, the pixel structure array of the LED device can be bonded to a thin film transistor substrate to form, for example, a LED display device, wherein the thin film transistors of the thin film transistor substrate control different pixel structures separately. The LED device of the disclosed embodiment utilizes a transfer process to stack two micro LED dies side by side on another micro or small LED die, so there is no need to perform a highly complex wafer bonding process and a high aspect ratio circuit process, and the LED dies stacked side by side can also be binned in advance, which can further reduce the size of the pixel structure, simplify the process, improve the yield and reduce the cost. In some embodiments, the LED device of the disclosed embodiment stacks red and blue LED chips side by side on a green LED chip, and the brightness of the pixel structure is controlled by the green LED chip below, which can increase the luminous area and brightness. In some embodiments, it can be a design of three anodes and one common cathode. In some embodiments, the polarity of the cathode and anode of the three LED chips can also be completely reversed to form a design of three cathodes and one common anode.

雖然本揭露以前述之實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可做些許之更動與潤飾。因此本揭露之保護範圍當視後附之申請專利範圍所界定者為準。Although the present disclosure is disclosed in the above embodiments, they are not intended to limit the present invention. Those with ordinary knowledge in the technical field to which the present invention belongs may make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present disclosure shall be subject to the scope defined by the attached patent application.

100:方向 200,200a:第一發光二極體晶粒 203,303,403:頂面 205,305,405:側壁 206,306,406:絕緣層 210,310,410:第一電極 212,312,412:第二電極 250,350:載板 252,352:轉移裝置 300,300a:第二發光二極體晶粒 400:第三發光二極體晶粒 401:出光面 402:原生基板 404-1:第一導電類型半導體層 414:透明接合層 418,418a,418b,418c,418d:分散式布拉格反射鏡 424:保護層 200A,200aA:第一垂直投影 300A,300aA:第二垂直投影 400A:第三俯視面積 500,500a,500b,500c:發光二極體裝置 550,550a,550a1,550a2,550a3,550a4,550b,550b1,550b2,550b3,550b4,550c:像素結構 502:第一線路層 504,504a1,504b,504c:第二線路層 506:第三線路層 508,508a,508b:第四線路層 504a2:第五線路層 502T:第一接合面 504T:第二接合面 506T:第三接合面 508T:第四接合面 502TA,504TA,506TA,508TA:垂直投影 600:電路基板 610:薄膜電晶體基板 602:微型控制元件 700:像素區域 A-A’,X-X’:切線 R:紅色光 G:綠色光 B:藍色光 100: direction 200,200a: first LED die 203,303,403: top surface 205,305,405: side wall 206,306,406: insulating layer 210,310,410: first electrode 212,312,412: second electrode 250,350: carrier 252,352: transfer device 300,300a: second LED die 400: third LED die 401: light emitting surface 402: native substrate 404-1: first conductivity type semiconductor layer 414: transparent bonding layer 418,418a,418b,418c,418d: Distributed Bragg reflector 424: Protective layer 200A,200aA: First vertical projection 300A,300aA: Second vertical projection 400A: Third top view area 500,500a,500b,500c: Light-emitting diode device 550,550a,550a1,550a2,550a3,550a4,550b,550b1,550b2,550b3,550b4,550c: Pixel structure 502: First circuit layer 504,504a1,504b,504c: Second circuit layer 506: Third circuit layer 508,508a,508b: fourth circuit layer 504a2: fifth circuit layer 502T: first joint surface 504T: second joint surface 506T: third joint surface 508T: fourth joint surface 502TA,504TA,506TA,508TA: vertical projection 600: circuit substrate 610: thin film transistor substrate 602: micro control element 700: pixel area A-A’,X-X’: tangent line R: red light G: green light B: blue light

第1圖為本揭露一些實施例之發光二極體裝置的立體示意圖。 第2圖為本揭露一些實施例之發光二極體裝置的俯視示意圖。 第3A圖為沿第2圖所示的本揭露一些實施例之發光二極體裝置的X-X’切線的剖面示意圖。 第3B圖為沿第2圖所示的本揭露一些實施例之發光二極體裝置的X-X’切線的剖面示意圖。 第4A、5A、6A、7A圖為形成如第1圖所示的本揭露一些實施例之發光二極體裝置在不同階段的俯視示意圖。 第4B、5B、6B圖分別為沿第4A、5A、6A圖的A-A’切線的剖面示意圖,顯示形成如第1圖所示的本揭露一些實施例之發光二極體裝置在不同階段的剖面示意圖。 第7B圖為第7A圖的放大示意圖,其顯示形成本揭露一些實施例之發光二極體裝置的中間步驟的像素結構中發光二極體晶粒的配置。 第7C、8圖為沿第7B圖的X-X’切線的剖面示意圖,顯示形成如第1圖所示的本揭露一些實施例之發光二極體裝置在不同階段的剖面示意圖。 第9A、9B圖為本揭露一些實施例之發光二極體裝置的俯視示意圖,其顯示發光二極體裝置中發光二極體晶粒、線路層及其接合面和保護層的配置。 第10A、10B圖為本揭露一些實施例之發光二極體裝置的俯視示意圖,其顯示發光二極體裝置中發光二極體晶粒、線路層及其接合面和保護層的配置。 第11A、11B圖為本揭露一些實施例之發光二極體裝置的俯視示意圖,其顯示發光二極體裝置中發光二極體晶粒、線路層及其接合面和保護層的配置。 第12A、12B圖為本揭露一些實施例之發光二極體裝置的俯視示意圖,其顯示發光二極體裝置中發光二極體晶粒、線路層及其接合面和保護層的配置。 第13、14、15、16圖為本揭露一些實施例之發光二極體裝置的俯視示意圖,其顯示發光二極體裝置中發光二極體晶粒、線路層及分散式布拉格反射鏡的配置。 第17圖為本揭露一些實施例之發光二極體裝置的立體示意圖,其顯示帶有一原生基板之發光二極體裝置的像素結構與微型控制元件和電路基板的接合方式。 第18圖為本揭露一些實施例之發光二極體裝置的立體示意圖,其顯示未帶有一原生基板之發光二極體裝置的像素結構與微型控制元件和電路基板的接合方式。 第19A、19B、19C圖為本揭露一些實施例之發光二極體裝置的立體示意圖和剖面示意圖,其顯示發光二極體裝置的像素結構與薄膜電晶體基板的接合方式。 FIG. 1 is a three-dimensional schematic diagram of a light-emitting diode device according to some embodiments of the present disclosure. FIG. 2 is a top view schematic diagram of a light-emitting diode device according to some embodiments of the present disclosure. FIG. 3A is a cross-sectional schematic diagram along the X-X’ tangent line of the light-emitting diode device according to some embodiments of the present disclosure shown in FIG. 2. FIG. 3B is a cross-sectional schematic diagram along the X-X’ tangent line of the light-emitting diode device according to some embodiments of the present disclosure shown in FIG. 2. FIG. 4A, 5A, 6A, and 7A are top view schematic diagrams of the light-emitting diode device according to some embodiments of the present disclosure shown in FIG. 1 at different stages of formation. Figures 4B, 5B, and 6B are schematic cross-sectional views along the A-A’ tangent line of Figures 4A, 5A, and 6A, respectively, showing schematic cross-sectional views of the light-emitting diode device of some embodiments of the present disclosure as shown in Figure 1 at different stages. Figure 7B is an enlarged schematic view of Figure 7A, which shows the configuration of the light-emitting diode grains in the pixel structure of the intermediate step of forming the light-emitting diode device of some embodiments of the present disclosure. Figures 7C and 8 are schematic cross-sectional views along the X-X’ tangent line of Figure 7B, showing schematic cross-sectional views of the light-emitting diode device of some embodiments of the present disclosure as shown in Figure 1 at different stages. Figures 9A and 9B are schematic top views of the LED device of some embodiments of the present disclosure, which show the configuration of the LED die, circuit layer, and its junction surface and protective layer in the LED device. Figures 10A and 10B are schematic top views of the LED device of some embodiments of the present disclosure, which show the configuration of the LED die, circuit layer, and its junction surface and protective layer in the LED device. Figures 11A and 11B are schematic top views of the LED device of some embodiments of the present disclosure, which show the configuration of the LED die, circuit layer, and its junction surface and protective layer in the LED device. Figures 12A and 12B are schematic top views of LED devices of some embodiments of the present disclosure, which show the configuration of LED dies, circuit layers, their joint surfaces, and protective layers in the LED devices. Figures 13, 14, 15, and 16 are schematic top views of LED devices of some embodiments of the present disclosure, which show the configuration of LED dies, circuit layers, and distributed Bragg reflectors in the LED devices. Figure 17 is a three-dimensional schematic view of LED devices of some embodiments of the present disclosure, which shows the bonding method of the pixel structure of the LED device with a native substrate and the micro-control element and circuit substrate. FIG. 18 is a three-dimensional schematic diagram of a light-emitting diode device according to some embodiments of the present disclosure, which shows the bonding method of the pixel structure of the light-emitting diode device without a native substrate and the micro-control element and the circuit substrate. FIGS. 19A, 19B, and 19C are three-dimensional schematic diagrams and cross-sectional schematic diagrams of the light-emitting diode device according to some embodiments of the present disclosure, which show the bonding method of the pixel structure of the light-emitting diode device and the thin film transistor substrate.

200:第一發光二極體晶粒 200: First light-emitting diode grain

403:頂面 403: Top

300:第二發光二極體晶粒 300: Second light-emitting diode grain

400:第三發光二極體晶粒 400: The third light-emitting diode grain

424:保護層 424: Protective layer

200A:第一垂直投影 200A: First vertical projection

300A:第二垂直投影 300A: Second vertical projection

550a1:像素結構 550a1: Pixel structure

502T:第一接合面 502T: First joint surface

504T:第二接合面 504T: Second joint surface

506T:第三接合面 506T: Third joint surface

508T:第四接合面 508T: Fourth joint surface

502TA,504TA,506TA,508TA:垂直投影 502TA,504TA,506TA,508TA: vertical projection

Claims (17)

一種發光二極體裝置,包括: 一像素結構,包括: 一第一發光二極體晶粒,具有一第一頂面; 一第二發光二極體晶粒,具有一第二頂面; 一第三發光二極體晶粒,具有彼此相對的一出光面和一第三頂面;其中該第一發光二極體晶粒與該第二發光二極體晶粒並排於該第三頂面上,該第一發光二極體晶粒於該第三頂面上具有一第一垂直投影,該第二發光二極體晶粒於該第三頂面上具有一第二垂直投影,該第一垂直投影與該第二垂直投影彼此不互相重疊; 一保護層,覆蓋該第一發光二極體晶粒、該第二發光二極體晶粒和該第三發光二極體晶粒;以及 彼此分離的一第一線路層、一第二線路層、一第三線路層和一第四線路層,位於該第三發光二極體晶粒與該保護層之間;其中該第一線路層具有一第一接合面、該第二線路層具有一第二接合面、該第三線路層具有一第三接合面以及該第四線路層具有一第四接合面,該保護層具有多個開口,該些開口分別對應位於該第一線路層的該第一接合面上、該第二線路層的該第二接合面上、該第三線路層的該第三接合面上和該第四線路層的該第四接合面上;其中該第一接合面和該第二接合面於該第三頂面上的垂直投影分別與該第一垂直投影重疊,且皆與該第二垂直投影分隔,該第三接合面與該第四接合面於該第三頂面上的垂直投影分別與該第二垂直投影重疊,且皆與該第一垂直投影分隔。 A light-emitting diode device comprises: A pixel structure, comprising: A first light-emitting diode crystal, having a first top surface; A second light-emitting diode crystal, having a second top surface; A third light-emitting diode crystal, having a light-emitting surface and a third top surface opposite to each other; wherein the first light-emitting diode crystal and the second light-emitting diode crystal are arranged side by side on the third top surface, the first light-emitting diode crystal has a first vertical projection on the third top surface, the second light-emitting diode crystal has a second vertical projection on the third top surface, and the first vertical projection and the second vertical projection do not overlap each other; A protective layer, covering the first light-emitting diode crystal, the second light-emitting diode crystal and the third light-emitting diode crystal; and A first circuit layer, a second circuit layer, a third circuit layer and a fourth circuit layer separated from each other are located between the third light-emitting diode die and the protective layer; wherein the first circuit layer has a first bonding surface, the second circuit layer has a second bonding surface, the third circuit layer has a third bonding surface and the fourth circuit layer has a fourth bonding surface, and the protective layer has a plurality of openings, which correspond to the first bonding surface of the first circuit layer. , the second bonding surface of the second circuit layer, the third bonding surface of the third circuit layer, and the fourth bonding surface of the fourth circuit layer; wherein the vertical projections of the first bonding surface and the second bonding surface on the third top surface overlap with the first vertical projection respectively, and are both separated from the second vertical projection, and the vertical projections of the third bonding surface and the fourth bonding surface on the third top surface overlap with the second vertical projection respectively, and are both separated from the first vertical projection. 如請求項1之發光二極體裝置,其中該第一發光二極體晶粒具有一第一電極、該第二發光二極體晶粒具有一第一電極以及該第三發光二極體晶粒具有一第一電極;其中該第一發光二極體晶粒的該第一電極、該第二發光二極體晶粒的該第一電極和該第三發光二極體晶粒的該第一電極彼此電性連接。The LED device of claim 1, wherein the first LED grain has a first electrode, the second LED grain has a first electrode, and the third LED grain has a first electrode; wherein the first electrode of the first LED grain, the first electrode of the second LED grain, and the first electrode of the third LED grain are electrically connected to each other. 如請求項1之發光二極體裝置,其中該第一發光二極體晶粒具有一第一電極、該第二發光二極體晶粒具有一第一電極以及該第三發光二極體晶粒具有一第一電極;其中該第二線路層同時電性連接該第一發光二極體晶粒的該第一電極、該第二發光二極體晶粒的該第一電極和該第三發光二極體晶粒的該第一電極;其中,該第一發光二極體晶粒的該第一電極、該第二發光二極體晶粒的該第一電極和該第三發光二極體晶粒的該第一電極具有相同極性。A light-emitting diode device as claimed in claim 1, wherein the first light-emitting diode grain has a first electrode, the second light-emitting diode grain has a first electrode and the third light-emitting diode grain has a first electrode; wherein the second circuit layer electrically connects the first electrode of the first light-emitting diode grain, the first electrode of the second light-emitting diode grain and the first electrode of the third light-emitting diode grain at the same time; wherein the first electrode of the first light-emitting diode grain, the first electrode of the second light-emitting diode grain and the first electrode of the third light-emitting diode grain have the same polarity. 如請求項1之發光二極體裝置,其中該第一線路層和該第二線路層分別設置於該第一發光二極體晶粒遠離於該第三發光二極體晶粒的該第一頂面上;其中該第三線路層和該第四線路層分別設置於該第二發光二極體晶粒遠離於該第三發光二極體晶粒的該第二頂面上。The LED device of claim 1, wherein the first circuit layer and the second circuit layer are respectively disposed on the first top surface of the first LED die away from the third LED die; wherein the third circuit layer and the fourth circuit layer are respectively disposed on the second top surface of the second LED die away from the third LED die. 如請求項1之發光二極體裝置,其中該第二線路層延伸覆蓋該第二發光二極體晶粒的該第二頂面且/或該第四線路層延伸覆蓋該第三發光二極體晶粒的該第三頂面。The LED device of claim 1, wherein the second circuit layer extends to cover the second top surface of the second LED die and/or the fourth circuit layer extends to cover the third top surface of the third LED die. 如請求項1之發光二極體裝置,其中該第四線路層延伸覆蓋該第一發光二極體晶粒的該第一頂面。The LED device of claim 1, wherein the fourth circuit layer extends to cover the first top surface of the first LED die. 如請求項3之發光二極體裝置,其中該第一發光二極體晶粒具有一第二電極、該第二發光二極體晶粒具有一第二電極以及該第三發光二極體晶粒具有一第二電極;其中該第二線路層和該第一線路層分別電性連接至該第一發光二極體晶粒的該第一電極和該第二電極;其中該第三線路層電性連接至該第二發光二極體晶粒的該第二電極;其中該第四線路層電性連接至該第三發光二極體晶粒的該第二電極且與該第二發光二極體晶粒電性絕緣。A light-emitting diode device as claimed in claim 3, wherein the first light-emitting diode die has a second electrode, the second light-emitting diode die has a second electrode, and the third light-emitting diode die has a second electrode; wherein the second circuit layer and the first circuit layer are electrically connected to the first electrode and the second electrode of the first light-emitting diode die, respectively; wherein the third circuit layer is electrically connected to the second electrode of the second light-emitting diode die; wherein the fourth circuit layer is electrically connected to the second electrode of the third light-emitting diode die and is electrically insulated from the second light-emitting diode die. 如請求項3之發光二極體裝置,其中該第一發光二極體晶粒具有一側面,該第二發光二極體晶粒具有一側面,且該第三發光二極體晶粒具有一第一導電類型半導體層,該發光二極體裝置更包括: 一第五線路層,設置於該第二發光二極體晶粒的該第二頂面上,且延伸覆蓋該第二發光二極體晶粒的該側面和該第三發光二極體晶粒;其中該第五線路層電性連接該第二發光二極體晶粒的該第一電極和該第三發光二極體晶粒的該第一導電類型半導體層;其中該第二線路層延伸至該第一發光二極體晶粒的該側面和該第三發光二極體晶粒,且電性連接該第一發光二極體晶粒的該第一電極和該第三發光二極體晶粒的該第一導電類型半導體層。 As in claim 3, the first light-emitting diode device has a side surface, the second light-emitting diode die has a side surface, and the third light-emitting diode die has a first conductive type semiconductor layer, and the light-emitting diode device further includes: A fifth circuit layer is disposed on the second top surface of the second light-emitting diode crystal grain and extends to cover the side surface of the second light-emitting diode crystal grain and the third light-emitting diode crystal grain; wherein the fifth circuit layer electrically connects the first electrode of the second light-emitting diode crystal grain and the first conductive type semiconductor layer of the third light-emitting diode crystal grain; wherein the second circuit layer extends to the side surface of the first light-emitting diode crystal grain and the third light-emitting diode crystal grain, and electrically connects the first electrode of the first light-emitting diode crystal grain and the first conductive type semiconductor layer of the third light-emitting diode crystal grain. 如請求項1之發光二極體裝置,更包括: 一分散式布拉格反射鏡,夾設於該保護層與該第一發光二極體晶粒、該第二發光二極體晶粒和該第三發光二極體晶粒之間,該分散式布拉格反射鏡覆蓋該第一發光二極體晶粒、該第二發光二極體晶粒和該第三發光二極體晶粒的多個側壁。 The LED device of claim 1 further comprises: A distributed Bragg reflector, sandwiched between the protective layer and the first LED crystal, the second LED crystal and the third LED crystal, the distributed Bragg reflector covers multiple side walls of the first LED crystal, the second LED crystal and the third LED crystal. 如請求項1之發光二極體裝置,其中該第一發光二極體晶粒發射一第一色光,該第二發光二極體晶粒發射一第二色光,該第三發光二極體晶粒發射一第三色光,其中該第一色光、該第二色光和該第三色光分別具有不同波長範圍。The LED device of claim 1, wherein the first LED die emits a first color light, the second LED die emits a second color light, and the third LED die emits a third color light, wherein the first color light, the second color light and the third color light have different wavelength ranges respectively. 如請求項10之發光二極體裝置,其中該第三色光波長範圍介於該第一色光波長範圍與該第二色光波長範圍之間。As in claim 10, the light-emitting diode device, wherein the wavelength range of the third color light is between the wavelength range of the first color light and the wavelength range of the second color light. 如請求項10之發光二極體裝置,其中該第二色光波長範圍介於該第一色光波長範圍與該第三色光波長範圍之間。A light-emitting diode device as claimed in claim 10, wherein the wavelength range of the second color light is between the wavelength range of the first color light and the wavelength range of the third color light. 如請求項1之發光二極體裝置,更包括: 一電路基板,用以提供該像素結構設置於其上;以及 一微型控制元件,設置於該電路基板上,且電性連接該第一線路層、該第二線路層、該第三線路層和該第四線路層。 The light-emitting diode device of claim 1 further includes: a circuit substrate for providing the pixel structure thereon; and a micro-control element disposed on the circuit substrate and electrically connected to the first circuit layer, the second circuit layer, the third circuit layer and the fourth circuit layer. 如請求項1之發光二極體裝置,更包括: 一薄膜電晶體基板,設置於該像素結構上,且電性連接該第一線路層、該第二線路層、該第三線路層和該第四線路層。 The light-emitting diode device of claim 1 further includes: A thin film transistor substrate disposed on the pixel structure and electrically connected to the first circuit layer, the second circuit layer, the third circuit layer and the fourth circuit layer. 如請求項1之發光二極體裝置,其中該第一發光二極體晶粒具有一第一俯視面積,該第二發光二極體晶粒具有一第二俯視面積,該第三發光二極體晶粒具有一第三俯視面積;其中該第一俯視面積和該第二俯視面積的總和面積小於該第三俯視面積。The LED device of claim 1, wherein the first LED die has a first top-view area, the second LED die has a second top-view area, and the third LED die has a third top-view area; wherein the sum of the first top-view area and the second top-view area is smaller than the third top-view area. 如請求項1之發光二極體裝置,其中該第一接合面及該第二接合面的垂直投影完全位於該第一垂直投影內,且該第三接合面及該第四接合面的垂直投影完全位於該第二垂直投影內。The LED device of claim 1, wherein the vertical projections of the first joint surface and the second joint surface are completely located within the first vertical projection, and the vertical projections of the third joint surface and the fourth joint surface are completely located within the second vertical projection. 如請求項1之發光二極體裝置,其中該第一接合面及該第二接合面的垂直投影部分位於該第一垂直投影範圍之外,且該第三接合面及該第四接合面的垂直投影部分位於該第二垂直投影範圍之外。The LED device of claim 1, wherein the vertical projection portions of the first joint surface and the second joint surface are located outside the first vertical projection range, and the vertical projection portions of the third joint surface and the fourth joint surface are located outside the second vertical projection range.
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