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TWI801195B - 分析系統、輔助分析設備及分析方法 - Google Patents

分析系統、輔助分析設備及分析方法 Download PDF

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Publication number
TWI801195B
TWI801195B TW111112981A TW111112981A TWI801195B TW I801195 B TWI801195 B TW I801195B TW 111112981 A TW111112981 A TW 111112981A TW 111112981 A TW111112981 A TW 111112981A TW I801195 B TWI801195 B TW I801195B
Authority
TW
Taiwan
Prior art keywords
analysis
auxiliary
equipment
analysis method
analysis system
Prior art date
Application number
TW111112981A
Other languages
English (en)
Other versions
TW202340720A (zh
Inventor
鍾禹德
蔡鄢安
陳弘仁
Original Assignee
閎康科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 閎康科技股份有限公司 filed Critical 閎康科技股份有限公司
Priority to TW111112981A priority Critical patent/TWI801195B/zh
Priority to CN202210387650.0A priority patent/CN116930348B/zh
Priority to US17/852,321 priority patent/US12154775B2/en
Priority to JP2022144535A priority patent/JP7429742B2/ja
Application granted granted Critical
Publication of TWI801195B publication Critical patent/TWI801195B/zh
Publication of TW202340720A publication Critical patent/TW202340720A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0031—Step by step routines describing the use of the apparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/16—Injection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/72—Mass spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/62—Detectors specially adapted therefor
    • G01N30/72—Mass spectrometers
    • G01N30/7206—Mass spectrometers interfaced to gas chromatograph
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/86—Signal analysis
    • G01N30/8651—Recording, data aquisition, archiving and storage
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0468—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N2030/022—Column chromatography characterised by the kind of separation mechanism
    • G01N2030/025—Gas chromatography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G01N2030/126—Preparation by evaporation evaporating sample
    • G01N2030/128—Thermal desorption analysis

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
TW111112981A 2022-04-06 2022-04-06 分析系統、輔助分析設備及分析方法 TWI801195B (zh)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW111112981A TWI801195B (zh) 2022-04-06 2022-04-06 分析系統、輔助分析設備及分析方法
CN202210387650.0A CN116930348B (zh) 2022-04-06 2022-04-13 分析系统、辅助分析设备及分析方法
US17/852,321 US12154775B2 (en) 2022-04-06 2022-06-28 Analysis system, auxiliary analysis apparatus and analysis method
JP2022144535A JP7429742B2 (ja) 2022-04-06 2022-09-12 分析システム、補助分析システム、分析方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW111112981A TWI801195B (zh) 2022-04-06 2022-04-06 分析系統、輔助分析設備及分析方法

Publications (2)

Publication Number Publication Date
TWI801195B true TWI801195B (zh) 2023-05-01
TW202340720A TW202340720A (zh) 2023-10-16

Family

ID=87424248

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111112981A TWI801195B (zh) 2022-04-06 2022-04-06 分析系統、輔助分析設備及分析方法

Country Status (4)

Country Link
US (1) US12154775B2 (zh)
JP (1) JP7429742B2 (zh)
CN (1) CN116930348B (zh)
TW (1) TWI801195B (zh)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201246265A (en) * 2011-05-05 2012-11-16 Univ Nat Sun Yat Sen Electrospray-assisted thermal desorption ionization devices, mass spectrometers, and methods for mass spectrometry
TW201825873A (zh) * 2016-09-28 2018-07-16 美商蘭姆研究公司 在基板處理系統的基板區域中原位偵測氧的系統和方法
US20210003545A1 (en) * 2019-07-04 2021-01-07 IFP Energies Nouvelles System and method for determining the chemical composition of compounds contained in a sample
CN215677965U (zh) * 2021-07-27 2022-01-28 新奥科技发展有限公司 气固热脱附分析平台

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2974395B2 (ja) * 1990-11-14 1999-11-10 株式会社東芝 不純物測定装置
JPH11173962A (ja) * 1997-12-15 1999-07-02 Mitsubishi Electric Corp 試料表面の有機物分析装置及び有機物分析方法
JP3744251B2 (ja) * 1999-04-02 2006-02-08 松下電器産業株式会社 電子部品実装方法
JP2001345271A (ja) * 2000-05-31 2001-12-14 Shibaura Mechatronics Corp ウェハの加熱制御方法
US6598461B2 (en) * 2001-10-29 2003-07-29 Hewlett-Packard Development Company, L.P. Apparatus for, and method of using, gas chromatography inlet system for direct analysis of substances fired from an inkjet pen
JP3846800B2 (ja) * 2003-08-18 2006-11-15 株式会社リガク 発生ガス分析方法とその装置
JP4179251B2 (ja) 2004-09-07 2008-11-12 株式会社日立製作所 中間画像作成装置
JP5072682B2 (ja) * 2008-03-28 2012-11-14 富士フイルム株式会社 質量分析用デバイス、これを用いる質量分析装置および質量分析方法
KR101034504B1 (ko) * 2008-11-27 2011-05-19 세메스 주식회사 리니어 스케일을 이용하는 기판 이송 장치
WO2011070574A1 (en) * 2009-12-07 2011-06-16 S.T.I. Security Technology Integration Ltd. Method and apparatus for inspecting a gas sample
TWI449081B (zh) * 2011-08-31 2014-08-11 Univ Nat Sun Yat Sen 熱脫附游離裝置、質譜系統，及質譜分析方法
US9899198B2 (en) * 2015-11-20 2018-02-20 Hitachi High-Tech Science Corporation Method for analyzing evolved gas and evolved gas analyzer
US11164734B2 (en) * 2019-04-11 2021-11-02 Exum Instruments Laser desorption, ablation, and ionization system for mass spectrometry analysis of samples including organic and inorganic materials
CN114981654B (zh) * 2019-12-13 2024-07-09 斯彼拉创新公司 色谱应用中的异常检测和诊断

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201246265A (en) * 2011-05-05 2012-11-16 Univ Nat Sun Yat Sen Electrospray-assisted thermal desorption ionization devices, mass spectrometers, and methods for mass spectrometry
TW201825873A (zh) * 2016-09-28 2018-07-16 美商蘭姆研究公司 在基板處理系統的基板區域中原位偵測氧的系統和方法
US20210003545A1 (en) * 2019-07-04 2021-01-07 IFP Energies Nouvelles System and method for determining the chemical composition of compounds contained in a sample
CN215677965U (zh) * 2021-07-27 2022-01-28 新奥科技发展有限公司 气固热脱附分析平台

Also Published As

Publication number Publication date
US12154775B2 (en) 2024-11-26
JP2023154375A (ja) 2023-10-19
CN116930348B (zh) 2025-12-09
CN116930348A (zh) 2023-10-24
JP7429742B2 (ja) 2024-02-08
TW202340720A (zh) 2023-10-16
US20230326730A1 (en) 2023-10-12

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