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TWI800721B - 半導體裝置及其製造方法 - Google Patents

半導體裝置及其製造方法 Download PDF

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Publication number
TWI800721B
TWI800721B TW109113835A TW109113835A TWI800721B TW I800721 B TWI800721 B TW I800721B TW 109113835 A TW109113835 A TW 109113835A TW 109113835 A TW109113835 A TW 109113835A TW I800721 B TWI800721 B TW I800721B
Authority
TW
Taiwan
Prior art keywords
manufacturing
same
semiconductor device
semiconductor
Prior art date
Application number
TW109113835A
Other languages
English (en)
Other versions
TW202044630A (zh
Inventor
陳重輝
陳萬得
謝正祥
吳佳典
Original Assignee
台灣積體電路製造股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 台灣積體電路製造股份有限公司 filed Critical 台灣積體電路製造股份有限公司
Publication of TW202044630A publication Critical patent/TW202044630A/zh
Application granted granted Critical
Publication of TWI800721B publication Critical patent/TWI800721B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/80—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors
    • H10D86/85—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple passive components, e.g. resistors, capacitors or inductors characterised by only passive components
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10D1/692—Electrodes
    • H10W20/01—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/40—Resistors
    • H10D1/47—Resistors having no potential barriers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/68—Capacitors having no potential barriers
    • H10P50/71—
    • H10P50/73—
    • H10W20/069—
    • H10W20/43—
    • H10W20/496—
    • H10W20/498—
TW109113835A 2019-05-24 2020-04-24 半導體裝置及其製造方法 TWI800721B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201962852406P 2019-05-24 2019-05-24
US62/852,406 2019-05-24
US16/744,398 US11581298B2 (en) 2019-05-24 2020-01-16 Zero mask high density capacitor
US16/744,398 2020-01-16

Publications (2)

Publication Number Publication Date
TW202044630A TW202044630A (zh) 2020-12-01
TWI800721B true TWI800721B (zh) 2023-05-01

Family

ID=73052568

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109113835A TWI800721B (zh) 2019-05-24 2020-04-24 半導體裝置及其製造方法

Country Status (5)

Country Link
US (3) US11581298B2 (zh)
KR (1) KR102452850B1 (zh)
CN (1) CN111987041B (zh)
DE (1) DE102020101395A1 (zh)
TW (1) TWI800721B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11581298B2 (en) * 2019-05-24 2023-02-14 Taiwan Semiconductor Manufacturing Company Limited Zero mask high density capacitor

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040253783A1 (en) * 2003-03-31 2004-12-16 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method for fabricating the same
US20050082639A1 (en) * 2003-10-17 2005-04-21 Nec Electronics Corporation Semiconductor device having MIM structure resistor
US20070296085A1 (en) * 2006-06-21 2007-12-27 International Business Machines Corporation Mim capacitor and method of making same

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3985919A (en) * 1975-04-30 1976-10-12 Rca Corporation Vapor deposition of cermet layers
US6388285B1 (en) 1999-06-04 2002-05-14 International Business Machines Corporation Feram cell with internal oxygen source and method of oxygen release
JP4261031B2 (ja) * 2000-06-15 2009-04-30 Ｏｋｉセミコンダクタ株式会社 半導体装置及びその製造方法
US7317221B2 (en) * 2003-12-04 2008-01-08 Taiwan Semiconductor Manufacturing Co., Ltd. High density MIM capacitor structure and fabrication process
KR100585115B1 (ko) * 2003-12-10 2006-05-30 삼성전자주식회사 금속-절연체-금속 커패시터를 포함하는 반도체 소자 및 그제조방법
KR20070054225A (ko) 2004-09-28 2007-05-28 코닌클리즈케 필립스 일렉트로닉스 엔.브이. ＳｉＧｅ ＲＦ－ＢｉＣＭＯＳ 기술용 집적형 ＳｉＣｒ 금속박막 저항기
KR101138166B1 (ko) * 2005-07-06 2012-04-23 매그나칩 반도체 유한회사 반도체 소자의 제조방법
US8492897B2 (en) 2011-09-14 2013-07-23 International Business Machines Corporation Microstructure modification in copper interconnect structures
CN104025294A (zh) * 2011-10-07 2014-09-03 英特尔公司 金属互连当中dram电容器的形成
US9601545B1 (en) * 2015-10-15 2017-03-21 Taiwan Semiconductor Manufacturing Co., Ltd. Series MIM structures compatible with RRAM process
CN110199390B (zh) * 2017-01-26 2024-02-27 Hrl实验室有限责任公司 可扩展、可堆叠和beol工艺兼容的集成神经元电路
US20190148370A1 (en) 2017-11-13 2019-05-16 Taiwan Semiconductor Manufacturing Co., Ltd. Device including mim capacitor and resistor
US11581298B2 (en) * 2019-05-24 2023-02-14 Taiwan Semiconductor Manufacturing Company Limited Zero mask high density capacitor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040253783A1 (en) * 2003-03-31 2004-12-16 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method for fabricating the same
US20050082639A1 (en) * 2003-10-17 2005-04-21 Nec Electronics Corporation Semiconductor device having MIM structure resistor
US20070296085A1 (en) * 2006-06-21 2007-12-27 International Business Machines Corporation Mim capacitor and method of making same

Also Published As

Publication number Publication date
US20230170343A1 (en) 2023-06-01
KR20200135719A (ko) 2020-12-03
CN111987041A (zh) 2020-11-24
US12062652B2 (en) 2024-08-13
CN111987041B (zh) 2024-12-20
US20240363614A1 (en) 2024-10-31
US11581298B2 (en) 2023-02-14
TW202044630A (zh) 2020-12-01
DE102020101395A1 (de) 2020-11-26
US20200373290A1 (en) 2020-11-26
KR102452850B1 (ko) 2022-10-07

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