TWI850289B - With abutment blade - Google Patents

Abstract

[Topic] To provide a base-attached insert that can suppress the reduction in yield caused by the overflow of adhesive. [Solution] A cutting blade with a base mounted on a rotating shaft for use, comprising a disc-shaped base and an annular blade, wherein the disc-shaped base has an opening portion formed in the center thereof and extending from a first surface side to a second surface side, the annular blade is fixed to the first surface side of the base, a recess and a contact surface are provided on the first surface side of a substrate, the recess is formed in an annular shape surrounding the opening portion and is provided for applying an adhesive for fixing the blade to the base, the contact surface is closer to the peripheral side of the base than the recess and contacts the blade, and the side surface of the recess located on the peripheral side of the base is inclined relative to the contact surface so that the outer diameter of the recess increases from the bottom surface of the recess toward the edge of the recess.

Description

With abutment blade

Field of the invention The present invention relates to a cutting blade with a base mounted on a main shaft serving as a rotating axis.

Background of the invention Semiconductor wafers formed with electronic circuits such as ICs and LSIs are cut into a plurality of chips, for example, along predetermined cutting lines (cutting paths). Known blades for this cutting include: hub-type blades in which abrasive grains are fixed by a coating material such as nickel, and washer-type blades in which abrasive grains are fixed by a bonding material (adhesive material) such as resin.

The hub-type blade is usually formed integrally with a disk-shaped base made of aluminum or the like, and is mounted on a spindle serving as a rotating shaft through a dedicated mounting seat corresponding to the base. On the other hand, a washer-type blade that is not integrated with the base is mounted on the spindle by being clamped by two clamps.

Therefore, when replacing a hub-type blade with a washer-type blade, for example, the mounting seat fixed to the spindle must be replaced at the same time, resulting in poor workability. In contrast, in recent years, a method of attaching a washer-type blade to a disc-shaped base has been proposed (see, for example, Patent Document 1). Prior Art Documents Patent Documents

Patent document 1: Japanese Patent Publication No. 2012-135833

Summary of the invention Problems that the invention aims to solve However, in the above-mentioned base-attached blade, since the washer-type blade is bonded to the base with an adhesive, there is a situation in which the adhesive overflows from the base and adheres to the blade during its manufacturing. If the adhesive overflows from the base, there may be the following concerns: the appearance deteriorates and the processing accuracy is also affected.

Therefore, when the adhesive overflows from the base, the workers have to remove the overflowed adhesive manually. However, the work of removing the adhesive is complicated and becomes a major factor that reduces productivity. Therefore, there are cases where the base insert with the overflowed adhesive is not shipped but directly discarded.

The present invention is made in view of the above-mentioned problem, and its purpose is to provide a base-attached blade that can suppress the reduction of yield caused by the overflow of adhesive. Means for solving the problem

According to the present invention, a base-attached blade for cutting mounted on a rotating shaft can be provided, wherein the base-attached blade comprises: a disc-shaped base having an opening formed in the center thereof and extending from a first surface side to a second surface side; and an annular blade fixed to the first surface side of the base, and a concave portion and a contact surface are provided on the first surface side of the base, wherein the concave portion and the contact surface are provided. The portion is formed into a ring shape surrounding the opening portion and is used for applying an adhesive to fix the blade to the base. The aforementioned contact surface is closer to the outer peripheral side of the base than the recess and contacts the blade. The side surface of the recess located on the outer peripheral side of the base is inclined relative to the contact surface so that the outer diameter of the recess increases from the bottom surface of the recess toward the edge of the recess.

In the present invention, it is preferred that an anchoring portion for improving the bonding force of the adhesive to the base is provided on the bottom surface of the recess. Furthermore, it is preferred that the surface roughness of the bottom surface of the recess is greater than the surface roughness of the contact surface. Effect of the invention

The base-attached blade of the present invention includes a disc-shaped base, the disc-shaped base having an annular recess for applying an adhesive to fix the blade, and a contact surface that is closer to the outer peripheral side than the recess and contacts the blade, and the side surface of the recess located on the outer peripheral side is inclined relative to the contact surface so that the outer diameter of the recess increases from the bottom surface of the recess toward the edge of the recess.

Therefore, for example, when supplying an amount of adhesive corresponding to the bottom surface of the concave portion, even if the supply amount of adhesive becomes excessive, the excess adhesive can be placed in an area corresponding to the side surface of the concave portion, and the possibility of the adhesive overflowing from the concave portion can be suppressed to a low level. In other words, the reduction in yield caused by the overflow of the adhesive can be suppressed.

Embodiments for implementing the invention The embodiments of the invention are described with reference to the attached drawings. FIG1 is an exploded perspective view showing a configuration example of the abutment blade 2, and FIG2 is a cross-sectional view showing a configuration example of the abutment blade 2. FIG2 shows a cross section of the disc-shaped abutment blade 2 cut in the radial direction.

As shown in Fig. 1 and Fig. 2, the base-attached blade 2 for cutting of this embodiment has a disc-shaped (ring-shaped) base 4 formed of aluminum or the like. The base 4 has a first surface 4a and a second surface 4b that are substantially parallel to each other, and an opening 4c that passes through the base 4 from the first surface 4a to the second surface 4b is formed near the center thereof. The shape of the opening 4c is, for example, circular when viewed from the side of the first surface 4a.

A convex portion 4d protruding from the first surface 4a is provided in a region outside the opening 4c in the radial direction of the base 4. The convex portion 4d is formed, for example, in a ring shape concentric with the opening 4c. That is, when viewed from the first surface 4a side, the convex portion 4d is formed in a manner surrounding the opening 4c.

A recess 4e that is more recessed than the first surface 4a is provided in the area adjacent to the outer side of the protrusion 4d in the radial direction of the base 4. This recess 4e is formed, for example, in a ring shape that is concentric with the opening 4c and the protrusion 4d. That is, when viewed from the first surface 4a side, the recess 4e is formed in a manner surrounding the opening 4c and the protrusion 4d. An adhesive 8 for fixing the blade 6 to the base 4 can be applied in this recess 4e. Furthermore, the adhesive 8 can also be made of any one of a non-conductive material and a conductive material.

A contact surface 4f is provided in the area adjacent to the outer side of the recess 4e in the radial direction of the base 4. The contact surface 4f is configured to be approximately parallel and flat relative to the first surface 4a. Moreover, the contact surface 4f is configured to be annular and concentric with the opening 4c, the convex portion 4d and the recess 4e. That is, when viewed from the side of the first surface 4a, the contact surface 4f is formed in a manner surrounding the opening 4c, the convex portion 4d and the recess 4e.

The blade 6 can be attached to and fixed to the first surface 4a of the base 4. The blade 6 is formed into a disk (ring) shape by mixing abrasive grains such as diamond and CBN (cubic boron nitride) with a binder such as metal, ceramic, resin, etc. However, there is no restriction on the binder or abrasive grains constituting the blade 6, and the binder and abrasive grains can be selected and changed in accordance with the specifications of the base-attached blade 2.

The blade 6 has the first face 6a and the second face 6b which are roughly parallel to each other, and is formed with an opening 6c which connects the blade 6 from the first face 6a to the second face 6b near its center. The shape of the opening 6c is, for example, circular when viewed from the first face 6a side, and its diameter is equal to the outer diameter of the convex portion 4d of the base 4.

In this opening 6c, the convex portion 4d is inserted from the first surface 6a side in a state where the adhesive 8 is applied to the concave portion 4e. In this way, the contact surface 4f of the base 4 can contact a part of the first surface 6a of the blade 6, and the blade 6 can be supported by the contact surface 4f and the convex portion 4d. In addition, the blade 6 can be fixed to the base 4 by the adhesive 8 applied to the concave portion 4e.

Furthermore, the outer diameter of the blade 6 is formed to be larger than the outer diameter of the base 4. Therefore, when the blade 6 is connected and fixed to the base 4, the outer periphery 6d of the blade 6 becomes more outward than the base 4 in the radial direction of the base 4. That is, a part of the outer periphery 6d side of the blade 6 protrudes outward from the base 4.

FIG3 is a cross-sectional view showing the concave portion 4e of the base 4 in an enlarged manner. FIG3 shows a cross section of the base 4 cut in the radial direction. As shown in FIG1, FIG2 and FIG3, the concave portion 4e includes a bottom surface 4g substantially parallel to the contact surface 4f, a side surface 4h located on the inner peripheral side of the base 4 (on the convex portion 4d side), and a side surface 4i located on the outer peripheral side of the base 4 (on the contact surface 4f side).

For example, the adhesive 8 is applied to the recess 4e in accordance with the area of the bottom surface 4g. Although the bottom surface 4g may be formed flat, it is desirable to form it rougher than the contact surface 4f, for example. That is, the surface roughness of the bottom surface 4g of the recess 4e is greater than the surface roughness of the contact surface 4f. In this case, since the contact area between the adhesive 8 and the bottom surface 4g increases, the adhesive force of the adhesive 8 on the base 4 becomes higher.

The inner side surface 4h includes, for example, a region that is substantially perpendicular to the bottom surface 4g and is connected to the outer peripheral surface of the protrusion 4d. In addition, the connection portion between the bottom surface 4g and the side surface 4h is slightly arcuate. However, there is no particular limitation on the shape of the side surface 4h. For example, the connection portion between the bottom surface 4g and the side surface 4h may not necessarily be arcuate.

The outer side surface 4i is inclined, for example, relative to the contact surface 4f or the bottom surface 4g so that the outer diameter of the recess 4e increases from the bottom surface 4g of the recess 4e toward the edge of the recess 4e. That is, the upper end of the side surface 4i is located further on the outer peripheral side of the base 4 than the base end (bottom surface 4g side) of the side surface 4i.

In this way, by making the side surface 4i inclined relative to the contact surface 4f or the bottom surface 4g, when, for example, the adhesive 8 corresponding to the bottom surface 4g is supplied, even if the supply amount of the adhesive 8 becomes excessive, the excess adhesive 8 can still be accommodated in the area corresponding to the side surface 4i. Accordingly, the possibility of the adhesive 8 overflowing from the recessed portion 4e can be suppressed to a low level, and the reduction in the yield of the manufacturing of the base-attached blade 2 can be suppressed.

From the viewpoint of maintaining the concave portion 4e at an appropriate size and suppressing the overflow of the adhesive 8, it is desirable that the angle θ formed by the side surface 4i with respect to the contact surface 4f or the bottom surface 4g in the cross section (FIG. 3) obtained by cutting the base 4 in the radial direction is set to be greater than 10° and less than 45°. FIG. 3 shows a case where the angle θ is about 20°.

Fig. 4 is a perspective view showing a configuration example of a cutting device 12 using a base-attached blade 2. As shown in Fig. 4, the cutting device 12 has a base 14 that supports various structures. A cover 16 covering the base 14 is provided above the base 14. A space is formed inside the cover 16, and a cutting unit 18 including the above-mentioned base-attached blade 2 is accommodated.

The cutting unit 18 is moved in the front-rear direction (Y-axis direction, indexing feed direction) by a cutting unit moving mechanism (not shown). A work clamp 20 for holding the workpiece 11 is provided below the cutting unit 18. The work clamp 20 is moved in the X-axis direction (processing feed direction) by a work clamp moving mechanism (not shown), and is rotated around a rotation axis parallel to the Z-axis direction (vertical direction) by a rotation mechanism (not shown).

The workpiece 11 is typically a disk-shaped wafer formed of a semiconductor material such as silicon. The front surface of the workpiece 11 is divided into a plurality of regions by, for example, arranging predetermined dividing lines (cutting paths) arranged in a grid, and components such as ICs (Integrated Circuits) and MEMS (Micro Electro Mechanical Systems) are formed in each region.

Furthermore, there is no limitation on the material, shape, structure, size, etc. of the object 11 to be processed. For example, a substrate formed of other semiconductor, ceramic, resin, metal, etc. materials may be used as the object 11 to be processed. Similarly, there is no limitation on the type, number, shape, structure, size, arrangement, etc. of the components. There may be a case where no components are formed on the object 11 to be processed.

A cassette support table 22 is provided at a corner of the base 14. A cassette 24 that can accommodate a plurality of workpieces 11 is placed on the upper surface of the cassette support table 22. The height (position in the Z-axis direction) of the cassette support table 22 is controlled by a lifting mechanism (not shown) and the like so that the workpieces 11 can be properly carried in and out.

A touch-type monitor 26 as a user interface is provided on the front surface 16a of the cover 16. The monitor 26 is connected to a control unit (not shown) that controls various parts of the cutting device 12 together with the cutting unit 18, the cutting unit moving mechanism, the work clamp 20, the work clamp moving mechanism, the rotating mechanism, the film magazine support platform 22, the lifting mechanism, etc.

Fig. 5 is a perspective view showing the state where the base-attached blade 2 is mounted on the cutting unit 18, and Fig. 6 is a partial cross-sectional side view schematically showing the cutting unit 18 mounted with the base-attached blade 2. As shown in Figs. 5 and 6, the cutting unit 18 has a main shaft (rotational shaft) 32 that rotates around the Y axis.

The spindle 32 is accommodated in a cylindrical spindle housing 34. The front end (one end) of the spindle 32 is exposed outside the spindle housing 34, and a blade seat 40 is mounted on the front end of the spindle 32 through a washer 36, a bolt 38, etc. On the other hand, a motor (not shown) for rotating the spindle 32 is connected to the other end side (base end side) of the spindle 32.

The blade seat 40 includes a flange portion 42 extending outward in the radial direction, and a convex seat portion 44 protruding from the center of the first surface 42a of the flange portion 42. In the area near the outer periphery of the first surface 42a, a ring-shaped convex portion 42b protruding from the first surface 42a is provided. This convex portion 42b is formed, for example, in a position and shape corresponding to the contact surface 4f of the base-attached blade 2. In addition, the front end surface 42c of the convex portion 42b is formed to be substantially parallel and flat relative to the first surface 42a.

The boss portion 44 is formed in a cylindrical shape, and a thread is provided on the outer peripheral surface 44a of the front end side thereof. The abutment blade 2 can be mounted on the blade holder 40 by passing the boss portion 44 through (engaging with) the opening 4c of the abutment blade 2.

The fixing nut 46 can be fastened to the boss portion 44 when the base-attached blade 2 is mounted (engaged) on the blade seat 40. The fixing nut 46 is formed with a circular opening portion 46a corresponding to the diameter of the boss portion 44. A threaded groove is provided on the inner peripheral surface of the opening portion 46a, and the threaded groove corresponds to the thread teeth formed on the outer peripheral surface 44a of the boss portion 44.

When the fixing nut 46 is fastened to the boss portion 44, the fixing nut 46 contacts the second surface 4b of the base-attached blade 2, and the base-attached blade 2 is pressed against the flange portion 42 of the blade holder 40. As a result, the second surface 6b of the blade 6 contacts the front end surface 42c of the flange portion 42. That is, the blade 6 is formed to be clamped and fixed by the contact surface 4f of the base 4 and the front end surface 42c of the flange portion 42.

As described above, the base-attached blade 2 of the present embodiment includes a disc-shaped base 4, the disc-shaped base 4 having an annular recess 4e for applying an adhesive 8 for fixing the blade 6, and a contact surface 4f that is closer to the periphery than the recess 4e and contacts the blade 6, and a side surface 4i of the recess 4e located on the periphery is inclined relative to the contact surface 4f (or bottom surface 4g) so that the outer diameter of the recess 4e increases from the bottom surface 4g of the recess 4e toward the edge of the recess 4e.

Therefore, for example, when the adhesive 8 is supplied in an amount corresponding to the bottom surface 4g of the recess 4e, even if the supply amount of the adhesive 8 becomes excessive, the excess adhesive 8 can be accommodated in the area corresponding to the side surface 4i of the recess 4e, and the possibility of the adhesive 8 overflowing from the recess 4e can be suppressed to a low level. In other words, the reduction in yield caused by the overflow of the adhesive 8 can be suppressed.

Furthermore, in the base-attached insert 2 of the present embodiment, since the insert 6 is clamped and fixed by the contact surface 4f of the base 4 and the front end surface 42c of the insert seat 40 (flange portion 42), vibration of the insert 6 can be suppressed and processing accuracy can be maintained at a higher level.

Furthermore, the present invention is not limited to the above-mentioned embodiments, and can be implemented with various modifications. For example, a structure that can improve the bonding force of the adhesive to the base can be provided on the bottom surface of the recessed portion of the base constituting the base-attached blade. FIG. 7 is a cross-sectional view showing a configuration example of a base-attached blade of a modified example.

The basic structure of the abutment blade of this modification is the same as that of the abutment blade 2 of the above-mentioned embodiment. Therefore, the same reference numerals are attached to the parts in FIG. 7 that are common to FIG. 3 and the like, and only the differences are described here.

As shown in Fig. 7, a groove (anchoring portion) 4j is provided on the bottom surface 4g of the concave portion 4e of the base 4 constituting the base-attached blade of the modification. By filling the groove 4j with the adhesive 8, the adhesive 8 filled in the groove 4j functions as an anchor, thereby improving the bonding force of the adhesive 8 to the base 4.

The groove 4j of this modification is formed in a ring shape along the recess 4e. In addition, the side surface of the groove 4j is substantially perpendicular to the bottom surface of the groove 4j. With such a groove 4j, the bonding force of the adhesive 8 to the base 4 can be sufficiently improved. However, there is no limitation on the specific shape and arrangement of the groove formed in the recess.

In addition, the structures, methods, etc. of the above-mentioned embodiments may be appropriately modified and implemented without departing from the scope of the purpose of the present invention.

2: Blade with base 4, 14: Base 4a, 6a, 42a: 1st surface 4b, 6b: 2nd surface 4c, 6c, 46a: Opening 4d, 42b: Protrusion 4e: Concave 4f: Contact surface 4g: Bottom surface 4h, 4i: Side surface 4j: Groove (anchoring part) 6: Blade 2d, 6d: Outer periphery 12: Cutting device 16: Cover 16a: Front surface Surface 18: Cutting unit 20: Work clamp 22: Sheet support 24: Sheet 26: Monitor 32: Spindle (rotating axis) 34: Spindle housing 36: Washer 38: Bolt 40: Blade seat 42: Flange 42c: Front end surface 44: Boss 44a: Outer surface 46: Fixing nut 11: Workpiece θ: Angle X, Y, Z: Direction

FIG1 is an exploded perspective view showing a configuration example of an abutment blade. FIG2 is a cross-sectional view showing a configuration example of an abutment blade. FIG3 is a cross-sectional view showing a portion of the abutment in an enlarged manner. FIG4 is a perspective view showing a configuration example of a cutting device using an abutment blade. FIG5 is a perspective view showing a state where an abutment blade is mounted on a cutting unit. FIG6 is a partial cross-sectional side view showing a cutting unit equipped with an abutment blade. FIG7 is a cross-sectional view showing a configuration example of an abutment blade of a modified example.

2: With abutment blade

4: Base

4a: Page 1

4b: Side 2

4c: Opening

4d: convex part

4e: concave part

4f: Contact surface

4g: bottom surface

4h: Side

4i: Side

6: Blade

6a: Page 1

6b: Side 2

6c: Opening

6d: Periphery

Claims (3)

A base-attached blade is a base-attached blade for cutting mounted on a rotating shaft, and is characterized in that it comprises: a disc-shaped base having an opening formed in the center thereof and extending from a first surface side to a second surface side; and an annular blade fixed to the first surface side of the base, and a recess and a contact surface are provided on the first surface side of the base, wherein the recess is formed in an annular shape surrounding the opening and is provided for applying an adhesive for fixing the blade to the base, and the contact surface is The annular side surface of the recess located on the outer peripheral side of the base is closer to the base and contacts the blade. The diameter of the side surface increases from the bottom surface of the recess toward the edge of the recess. The bottom surface of the recess is roughly parallel to the contact surface. The angle formed by the side surface of the recess relative to the contact surface and the bottom surface of the recess is greater than 10° and less than 45°. The adhesive is supplied in an amount corresponding to the bottom surface of the recess. For example, the base-attached blade of claim 1 has an anchoring portion provided on the bottom surface of the recessed portion to enhance the bonding force of the bonding agent to the base. As in claim 1, the surface roughness of the bottom surface of the recess is greater than the surface roughness of the contact surface.

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