TWI897775B - Transparent display device and tiled display device - Google Patents
Transparent display device and tiled display deviceInfo
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- TWI897775B TWI897775B TW113150383A TW113150383A TWI897775B TW I897775 B TWI897775 B TW I897775B TW 113150383 A TW113150383 A TW 113150383A TW 113150383 A TW113150383 A TW 113150383A TW I897775 B TWI897775 B TW I897775B
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/80—Constructional details
- H10H29/85—Packages
- H10H29/852—Encapsulations
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/30—Active-matrix LED displays
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/30—Active-matrix LED displays
- H10H29/45—Active-matrix LED displays comprising two substrates, each having active devices thereon, e.g. displays comprising LED arrays and driving circuitry on different substrates
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Abstract
Description
本發明是有關於一種透明顯示裝置及拼接顯示裝置。 The present invention relates to a transparent display device and a spliced display device.
發光二極體(light emitting diode,LED)顯示裝置是一種高效能的光源技術,廣泛應用於顯示器、照明與多媒體設備。其結構通常包括多個微型發光二極體(micro LED)排成的陣列,並藉由驅動電路控制每個微型發光二極體的發光狀態,以呈現高解析度和高亮度的顯示效果。為了提升裝置的穩定性與壽命,通常會使用封裝技術來隔絕外部環境中的水氣與雜質。 Light-emitting diode (LED) displays are a high-efficiency light source technology widely used in displays, lighting, and multimedia devices. Their structure typically consists of an array of multiple micro-LEDs (micro-LEDs), with each micro-LED controlled by a driver circuit to produce high-resolution and high-brightness displays. To enhance device stability and lifespan, packaging technology is often used to isolate the device from moisture and impurities in the external environment.
然而,當顯示裝置受到水氣侵入時,可能導致多種問題,例如金屬電極的腐蝕以及發光效率降低等。這些問題不僅會影響顯示品質,還可能縮短裝置的使用壽命。因此,水氣屏蔽技術成為關鍵設計考量。 However, when moisture intrudes into display devices, it can cause a variety of problems, such as corrosion of metal electrodes and reduced luminous efficiency. These issues not only affect display quality but can also shorten the lifespan of the device. Therefore, moisture barrier technology has become a key design consideration.
本發明提供一種透明顯示裝置及拼接顯示裝置。 The present invention provides a transparent display device and a spliced display device.
本發明的至少一實施例提供一種透明顯示裝置,其包括電路基板、微型發光二極體、保護層以及阻水結構。電路基板具有穿透區以及非穿透區。微型發光二極體設置於非穿透區上,且接合至電路基板。保護層設置於非穿透區上,且覆蓋微型發光二極體的頂面以及側壁。微型發光二極體與阻水結構被保護層隔開,且阻水結構包括重疊於微型發光二極體的頂面的開口。 At least one embodiment of the present invention provides a transparent display device comprising a circuit substrate, a micro-LED, a protective layer, and a water-blocking structure. The circuit substrate has a transmissive region and a non-transmissive region. The micro-LED is disposed on the non-transmissive region and bonded to the circuit substrate. The protective layer is disposed on the non-transmissive region and covers the top surface and sidewalls of the micro-LED. The micro-LED is separated from the water-blocking structure by the protective layer, and the water-blocking structure includes an opening overlapping the top surface of the micro-LED.
本發明的至少一實施例提供一種拼接顯示裝置,其包括兩個以上的透明顯示裝置拼接在一起。 At least one embodiment of the present invention provides a spliced display device comprising two or more transparent display devices spliced together.
10A,10B,10C,10D,10E:透明顯示裝置 10A, 10B, 10C, 10D, 10E: Transparent display device
100:電路基板 100: Circuit board
110:透明基板 110:Transparent substrate
112:緩衝層 112: Buffer layer
113:第一絕緣層 113: First Insulation Layer
114:第二絕緣層 114: Second insulation layer
115:第一緩衝層 115: First buffer layer
116:第二緩衝層 116: Second buffer layer
117:第三緩衝層 117: Third buffer layer
118:第四緩衝層 118: Fourth buffer layer
119:鈍化層 119: Passivation layer
120:半導體層 120: Semiconductor layer
130:第一導電圖案層 130: First conductive pattern layer
131:閘極 131: Gate
132:導電特徵 132: Conductive characteristics
140:第二導電圖案層 140: Second conductive pattern layer
150:第三導電圖案層 150: Third conductive pattern layer
151:第一源極/汲極 151: First source/drain
152:第二源極/汲極 152: Second source/drain
153:導電特徵 153: Conductive characteristics
160:第四導電圖案層 160: Fourth conductive pattern layer
170:第五導電圖案層 170: Fifth conductive pattern layer
180:第六導電圖案層 180: Sixth conductive pattern layer
181,182:接墊 181,182: Pad
191:第三絕緣層 191: The third insulating layer
192:第四絕緣層 192: Fourth Insulation Layer
193:第五絕緣層 193: Fifth Insulation Layer
200:微型發光二極體 200: Micro LED
200s,300s:側壁 200s, 300s: Sidewall
200t,300t:頂面 200t, 300t: Top
210:接點 210: Contact
300:保護層 300: Protective layer
400:阻水結構 400: Water-blocking structure
400H:開口 400H: Open
410:氧化物層 410: Oxide layer
420:氮化物層 420: Nitride layer
500:封裝層 500: Packaging layer
600:導電層 600: Conductive layer
600H:通孔 600H: Through hole
BM:黑矩陣 BM: Black Matrix
S1,S2,S3,S4,S5,S6:步驟 S1, S2, S3, S4, S5, S6: Steps
T:主動元件 T: Active element
TR:穿透區 TR: Penetration Zone
NTR:非穿透區 NTR: Non-penetrating zone
圖1是依照本發明的一實施例的一種透明顯示裝置的局部剖面示意圖。 Figure 1 is a partial cross-sectional schematic diagram of a transparent display device according to an embodiment of the present invention.
圖2是依照本發明的一實施例的一種透明顯示裝置的局部剖面示意圖。 Figure 2 is a partial cross-sectional schematic diagram of a transparent display device according to an embodiment of the present invention.
圖3是依照本發明的一實施例的一種透明顯示裝置的局部剖面示意圖。 Figure 3 is a partial cross-sectional schematic diagram of a transparent display device according to an embodiment of the present invention.
圖4A至圖4C是製造圖1的透明顯示裝置的製造方法的一些階段的剖面示意圖。 Figures 4A to 4C are schematic cross-sectional views of some stages of a method for manufacturing the transparent display device of Figure 1.
圖5是依照本發明的一實施例的一種透明顯示裝置的局部剖面示意圖。 Figure 5 is a partial cross-sectional schematic diagram of a transparent display device according to an embodiment of the present invention.
圖6是依照本發明的一實施例的一種透明顯示裝置的局部剖 面示意圖。 Figure 6 is a partial cross-sectional schematic diagram of a transparent display device according to an embodiment of the present invention.
圖7是依照本發明的一實施例的一種透明顯示裝置的微型發光二極體與導電層的上視示意圖。 Figure 7 is a top-down schematic diagram of a micro-LED and a conductive layer of a transparent display device according to an embodiment of the present invention.
圖8依照本發明的一實施例的一種透明顯示裝置的微型發光二極體與導電層的上視示意圖。 Figure 8 is a top-down schematic diagram of a micro-LED and a conductive layer of a transparent display device according to an embodiment of the present invention.
圖9是本發明的一些實施例的透明顯示裝置的製造方法的流程圖。 Figure 9 is a flow chart of a method for manufacturing a transparent display device according to some embodiments of the present invention.
圖10A是本發明的一實施例的拼接顯示裝置的上視示意圖。 Figure 10A is a top view schematic diagram of a spliced display device according to one embodiment of the present invention.
圖10B是沿著圖10A的線A-A’的剖面示意圖。 Figure 10B is a schematic cross-sectional view taken along line A-A' of Figure 10A.
圖1是依照本發明的一實施例的一種透明顯示裝置10A的局部剖面示意圖。請參考圖1,透明顯示裝置10A包括電路基板100、微型發光二極體200、保護層300、阻水結構400以及封裝層500。 FIG1 is a partial cross-sectional schematic diagram of a transparent display device 10A according to an embodiment of the present invention. Referring to FIG1 , the transparent display device 10A includes a circuit substrate 100, a micro-LED 200, a protective layer 300, a water-blocking structure 400, and an encapsulation layer 500.
電路基板100具有穿透區TR以及非穿透區NTR。在一些實施例中,電路基板100的穿透區TR由透明材料構成,使得光線能夠穿過電路基板100的穿透區TR;而電路基板100的非穿透區NTR包含非透明的材料(例如金屬材料、半導體材料等)。 The circuit substrate 100 has a transmissive region TR and a non-transmissive region NTR. In some embodiments, the transmissive region TR of the circuit substrate 100 is made of a transparent material, allowing light to pass through the transmissive region TR; while the non-transmissive region NTR of the circuit substrate 100 includes a non-transmissive material (e.g., a metal material, a semiconductor material, etc.).
在一些實施例中,電路基板100包括透明基板110。透 明基板110的材料包括玻璃、有機材料或其他合適的材料。透明基板110可為硬質基板、可撓式基板或可拉伸基板。在一些實施例中,緩衝層112設置於透明基板110的表面。 In some embodiments, circuit substrate 100 includes a transparent substrate 110. Transparent substrate 110 may be made of glass, organic materials, or other suitable materials. Transparent substrate 110 may be a rigid substrate, a flexible substrate, or a stretchable substrate. In some embodiments, a buffer layer 112 is disposed on a surface of transparent substrate 110.
在本實施例中,電路基板100包含多層導電圖案層以及多層絕緣層。舉例來說,電路基板100包含半導體層120、第一絕緣層113、第一導電圖案層130、第二絕緣層114、第二導電圖案層140、第三絕緣層191、第三導電圖案層150、第四絕緣層192、第一緩衝層115、第四導電圖案層160、第五絕緣層193、第二緩衝層116、第五導電圖案層170、第三緩衝層117、黑矩陣BM、第四緩衝層118、第六導電圖案層180以及鈍化層119。在一些實施例中,電路基板100中的半導體層導電圖案層、絕緣層以及緩衝層的數量可以依照需求而進行調整。 In this embodiment, the circuit substrate 100 includes multiple conductive pattern layers and multiple insulating layers. For example, the circuit substrate 100 includes a semiconductor layer 120, a first insulating layer 113, a first conductive pattern layer 130, a second insulating layer 114, a second conductive pattern layer 140, a third insulating layer 191, a third conductive pattern layer 150, a fourth insulating layer 192, a first buffer layer 115, a fourth conductive pattern layer 160, a fifth insulating layer 193, a second buffer layer 116, a fifth conductive pattern layer 170, a third buffer layer 117, a black matrix (BM), a fourth buffer layer 118, a sixth conductive pattern layer 180, and a passivation layer 119. In some embodiments, the number of semiconductor layers, conductive pattern layers, insulation layers, and buffer layers in the circuit substrate 100 can be adjusted as needed.
半導體層120位於緩衝層112上。在一些實施例中,半導體層120為單層或多層結構,其包含非晶矽、多晶矽、微晶矽、單晶矽、有機半導體材料、氧化物半導體材料(例如:銦鋅氧化物、銦鎵鋅氧化物或是其他合適的材料、或上述材料之組合)或其他合適的材料或上述材料之組合。在本實施例中,半導體層120包含通道區以及位於通道區兩側的摻雜區。在一些實施例中,摻雜區包括輕摻雜區以及重摻雜區。 Semiconductor layer 120 is located on buffer layer 112. In some embodiments, semiconductor layer 120 is a single-layer or multi-layer structure, and includes amorphous silicon, polycrystalline silicon, microcrystalline silicon, single-crystalline silicon, an organic semiconductor material, an oxide semiconductor material (e.g., indium zinc oxide, indium gallium zinc oxide, or other suitable materials or combinations thereof), or other suitable materials or combinations thereof. In this embodiment, semiconductor layer 120 includes a channel region and doped regions located on both sides of the channel region. In some embodiments, the doped regions include lightly doped regions and heavily doped regions.
第一絕緣層113位於半導體層120上。 The first insulating layer 113 is located on the semiconductor layer 120.
第一導電圖案層130位於第一絕緣層113上,且包括閘極131以及導電特徵132。閘極131重疊於半導體層120的通道 區。導電特徵132例如為訊號線或其他導電結構。 The first conductive pattern layer 130 is located on the first insulating layer 113 and includes a gate 131 and a conductive feature 132. The gate 131 overlaps the channel region of the semiconductor layer 120. The conductive feature 132 is, for example, a signal line or other conductive structure.
第二絕緣層114位於第一導電圖案層130上。第二導電圖案層140位於第二絕緣層114上。第二導電圖案層140例如包括訊號線或其他導電結構。在一些實施例中,第二絕緣層114以及第二導電圖案層140可以被省略。 The second insulating layer 114 is located on the first conductive pattern layer 130. The second conductive pattern layer 140 is located on the second insulating layer 114. The second conductive pattern layer 140 may include, for example, signal lines or other conductive structures. In some embodiments, the second insulating layer 114 and the second conductive pattern layer 140 may be omitted.
第三絕緣層191位於第二導電圖案層140以及第二絕緣層114上。在一些實施例中,第三絕緣層191也可以稱為層間介電層。 The third insulating layer 191 is located on the second conductive pattern layer 140 and the second insulating layer 114. In some embodiments, the third insulating layer 191 may also be referred to as an interlayer dielectric layer.
第三導電圖案層150位於第三絕緣層191上,且包括第一源極/汲極151、第二源極/汲極152以及導電特徵153。第一源極/汲極151以及第二源極/汲極152穿過第三絕緣層191、第二絕緣層114以及第一絕緣層113,並連接至半導體層120的摻雜區。導電特徵153例如為訊號線或其他導電結構。 The third conductive pattern layer 150 is located on the third insulating layer 191 and includes a first source/drain 151, a second source/drain 152, and a conductive feature 153. The first source/drain 151 and the second source/drain 152 pass through the third insulating layer 191, the second insulating layer 114, and the first insulating layer 113 and connect to the doped region of the semiconductor layer 120. The conductive feature 153 is, for example, a signal line or other conductive structure.
在本實施例中,主動元件T位於透明基板110之上,且包括半導體層120、閘極131、第一源極/汲極151以及第二源極/汲極152。在本實施例中,主動元件T是以頂部閘極型的薄膜電晶體為例,但本發明不以此為限。在其他實施例中,主動元件T也可以是底部閘極型薄膜電晶體、雙閘極型或其他類型的薄膜電晶體。 In this embodiment, the active device T is located on the transparent substrate 110 and includes a semiconductor layer 120, a gate 131, a first source/drain 151, and a second source/drain 152. In this embodiment, the active device T is exemplified by a top-gate thin-film transistor, but the present invention is not limited thereto. In other embodiments, the active device T may also be a bottom-gate thin-film transistor, a double-gate thin-film transistor, or other types of thin-film transistors.
第四絕緣層192位於第三導電圖案層150上。在一些實施例中,第四絕緣層192也可以稱為平坦化層。 The fourth insulating layer 192 is located on the third conductive pattern layer 150. In some embodiments, the fourth insulating layer 192 may also be referred to as a planarization layer.
第一緩衝層115位於第四絕緣層192上。第四導電圖案 層160位於第一緩衝層115上。部分的第四導電圖案層160形成穿過第四絕緣層192並連接至第三導電圖案層150的導電通孔。在本實施例中,第一緩衝層115僅位於第四絕緣層192的頂面上,且位於第四絕緣層192的頂面與第四導電圖案層160之間。在其他實施例中,第一緩衝層115除了位於第四絕緣層192的頂面上以外,還會填入第四絕緣層192的通孔中,並橫向的環繞第四導電圖案層160連接至第三導電圖案層150的導電通孔。 First buffer layer 115 is located on fourth insulating layer 192. Fourth conductive pattern layer 160 is located on first buffer layer 115. Portions of fourth conductive pattern layer 160 form conductive vias that penetrate fourth insulating layer 192 and connect to third conductive pattern layer 150. In this embodiment, first buffer layer 115 is located only on the top surface of fourth insulating layer 192 and between the top surface of fourth insulating layer 192 and fourth conductive pattern layer 160. In other embodiments, in addition to being located on the top surface of the fourth insulating layer 192, the first buffer layer 115 also fills the through holes of the fourth insulating layer 192 and laterally surrounds the fourth conductive pattern layer 160 to connect to the conductive vias of the third conductive pattern layer 150.
第五絕緣層193位於第四導電圖案層160上。在一些實施例中,第五絕緣層193也可以稱為平坦化層。 The fifth insulating layer 193 is located on the fourth conductive pattern layer 160. In some embodiments, the fifth insulating layer 193 may also be referred to as a planarization layer.
第二緩衝層116位於第五絕緣層193上。第五導電圖案層170位於第二緩衝層116上。部分的第五導電圖案層170形成穿過第五絕緣層193並連接至第四導電圖案層160的導電通孔。在本實施例中,第二緩衝層116僅位於第五絕緣層193的頂面上,且位於第五絕緣層193的頂面與第五導電圖案層170之間。在其他實施例中,第二緩衝層116除了位於第五絕緣層193的頂面上以外,還會填入第五絕緣層193的通孔中,並橫向的環繞第五導電圖案層170連接至第四導電圖案層160的導電通孔。 The second buffer layer 116 is located on the fifth insulating layer 193. The fifth conductive pattern layer 170 is located on the second buffer layer 116. A portion of the fifth conductive pattern layer 170 forms a conductive via that passes through the fifth insulating layer 193 and connects to the fourth conductive pattern layer 160. In this embodiment, the second buffer layer 116 is located only on the top surface of the fifth insulating layer 193 and between the top surface of the fifth insulating layer 193 and the fifth conductive pattern layer 170. In other embodiments, in addition to being located on the top surface of the fifth insulating layer 193, the second buffer layer 116 also fills the through holes of the fifth insulating layer 193 and laterally surrounds the fifth conductive pattern layer 170 to connect to the conductive vias of the fourth conductive pattern layer 160.
第三緩衝層117位於第五導電圖案層170上。黑矩陣BM位於第三緩衝層117上。 The third buffer layer 117 is located on the fifth conductive pattern layer 170. The black matrix BM is located on the third buffer layer 117.
第四緩衝層118位於黑矩陣BM上。第六導電圖案層180位於第四緩衝層118上,且包括多個接墊181,182。在本實施例中,接墊181通過第五導電圖案層170以及第四導電圖案層 160而電性連接至主動元件T的第一源極/汲極151。 The fourth buffer layer 118 is located on the black matrix BM. The sixth conductive pattern layer 180 is located on the fourth buffer layer 118 and includes a plurality of pads 181 and 182. In this embodiment, the pad 181 is electrically connected to the first source/drain 151 of the active device T via the fifth conductive pattern layer 170 and the fourth conductive pattern layer 160.
鈍化層119上覆於接墊181,182。在一些實施例中,鈍化層119的材料包括氧化矽、氮化矽、氮氧化矽或其他合適的絕緣材料。 The passivation layer 119 overlies the pads 181 and 182. In some embodiments, the material of the passivation layer 119 includes silicon oxide, silicon nitride, silicon oxynitride, or other suitable insulating materials.
在本實施例中,半導體層120、第一導電圖案層130、第二導電圖案層140、第三導電圖案層150、第四導電圖案層160、第五導電圖案層170、黑矩陣BM以及第六導電圖案層180分布於電路基板100的非穿透區NTR中。第一絕緣層113、第二絕緣層114、第三絕緣層191、第四絕緣層192、第一緩衝層115、第五絕緣層193、第二緩衝層116、第三緩衝層117、第四緩衝層118以及鈍化層119設置於非穿透區NTR中,且這些層中的至少一部份從非穿透區NTR延伸至穿透區TR。舉例來說,第一絕緣層113、第二絕緣層114、第三絕緣層191、第四絕緣層192、第五絕緣層193、第三緩衝層117、第四緩衝層118以及鈍化層119從非穿透區NTR延伸至穿透區TR,而第一緩衝層115以及第二緩衝層116僅設置於非穿透區NTR而未延伸至穿透區TR。通過移除穿透區TR中的第一緩衝層115以及第二緩衝層116,可以提升穿透區TR的穿透率。 In this embodiment, the semiconductor layer 120 , the first conductive pattern layer 130 , the second conductive pattern layer 140 , the third conductive pattern layer 150 , the fourth conductive pattern layer 160 , the fifth conductive pattern layer 170 , the black matrix BM, and the sixth conductive pattern layer 180 are distributed in the non-transmitting region NTR of the circuit substrate 100 . The first insulating layer 113, the second insulating layer 114, the third insulating layer 191, the fourth insulating layer 192, the first buffer layer 115, the fifth insulating layer 193, the second buffer layer 116, the third buffer layer 117, the fourth buffer layer 118, and the passivation layer 119 are disposed in the non-transmitting region NTR, and at least a portion of these layers extends from the non-transmitting region NTR to the transmitting region TR. For example, the first insulating layer 113, the second insulating layer 114, the third insulating layer 191, the fourth insulating layer 192, the fifth insulating layer 193, the third buffer layer 117, the fourth buffer layer 118, and the passivation layer 119 extend from the non-transmitting region NTR to the transmitting region TR, while the first buffer layer 115 and the second buffer layer 116 are only provided in the non-transmitting region NTR and do not extend to the transmitting region TR. By removing the first buffer layer 115 and the second buffer layer 116 from the transmitting region TR, the transmittance of the transmitting region TR can be improved.
微型發光二極體200設置於電路基板100的非穿透區NTR上。在本實施例中,微型發光二極體200包含水平式發光二極體,但本揭露不以此為限。在其他實施例中,微型發光二極體200包含垂直式發光二極體或其他類型的發光二極體。黑矩陣 BM位於透明基板110上方,且位於微型發光二極體200周圍。在一些實施例中,黑矩陣BM不重疊於微型發光二極體200。 The micro-LEDs 200 are disposed on the non-transmissive region NTR of the circuit substrate 100. In this embodiment, the micro-LEDs 200 include horizontal LEDs, but the present disclosure is not limited thereto. In other embodiments, the micro-LEDs 200 include vertical LEDs or other types of LEDs. The black matrix (BM) is located above the transparent substrate 110 and surrounds the micro-LEDs 200. In some embodiments, the black matrix (BM) does not overlap the micro-LEDs 200.
微型發光二極體200接合至電路基板100。舉例來說,微型發光二極體200接合至接墊181,182,且微型發光二極體200與接墊181,182之間的接點210包括焊料、導電膠或其他合適的導電結構。接點210穿過鈍化層119,且鈍化層119環繞接點210。 The microLED 200 is bonded to the circuit substrate 100. For example, the microLED 200 is bonded to the pads 181 and 182, and the joints 210 between the microLED 200 and the pads 181 and 182 include solder, conductive glue, or other suitable conductive structures. The joints 210 pass through the passivation layer 119, and the passivation layer 119 surrounds the joints 210.
保護層300設置於電路基板100的非穿透區NTR上,且覆蓋微型發光二極體的頂面200t以及側壁200s。在一些實施例中,保護層300形成於鈍化層119上,並填入微型發光二極體200與鈍化層119之間。在一些實施例中,保護層300環繞微型發光二極體200以及微型發光二極體200和接墊181,182之間的接點210,以保護微型發光二極體200與接點210。在一些實施例中,保護層300包括光阻、透明光學膠或其他合適的材料,且具有上窄下寬的結構。 The protective layer 300 is disposed on the non-transmitting region NTR of the circuit substrate 100 and covers the top surface 200t and sidewalls 200s of the micro-LED. In some embodiments, the protective layer 300 is formed on the passivation layer 119 and fills the gap between the micro-LED 200 and the passivation layer 119. In some embodiments, the protective layer 300 surrounds the micro-LED 200 and the contacts 210 between the micro-LED 200 and the pads 181 and 182 to protect the micro-LED 200 and the contacts 210. In some embodiments, the protective layer 300 includes photoresist, transparent optical adhesive, or other suitable materials and has a structure that is narrow at the top and wide at the bottom.
阻水結構400位於保護層300上,且微型發光二極體200與阻水結構400被保護層300隔開。阻水結構400從保護層300的頂面300t沿著保護層300的側壁300s延伸至鈍化層119,並覆蓋保護層300與鈍化層119之間的邊界,避免水氣從保護層300與鈍化層119之間的介面擴散至微型發光二極體200。 The water-blocking structure 400 is located on the protective layer 300, and the micro-LED 200 is separated from the water-blocking structure 400 by the protective layer 300. The water-blocking structure 400 extends from the top surface 300t of the protective layer 300 along the sidewalls 300s of the protective layer 300 to the passivation layer 119, covering the boundary between the protective layer 300 and the passivation layer 119, preventing moisture from diffusing from the interface between the protective layer 300 and the passivation layer 119 to the micro-LED 200.
在一些實施例中,阻水結構400包括多層結構,例如包括氧化物層410(例如包括氧化矽或其他合適的氧化物)以及重 疊於氧化物層410的氮化物層420(例如包括氮化矽或其他合適的氮化物)。在一些實施例中,阻水結構400還可以包括更多的絕緣層。 In some embodiments, water-blocking structure 400 includes a multi-layer structure, such as an oxide layer 410 (e.g., comprising silicon oxide or other suitable oxides) and a nitride layer 420 (e.g., comprising silicon nitride or other suitable nitrides) overlapping oxide layer 410. In some embodiments, water-blocking structure 400 may further include more insulating layers.
阻水結構400包括重疊於微型發光二極體200的頂面200t的開口400H,藉此減少阻水結構400對微型發光二極體200發出的光線造成干擾(例如折射)。在本實施例中,氧化物層410與氮化物層420的形狀是利用相同的罩幕圖案定義的,因此,氧化物層410於透明基板110上的垂直投影形狀實質上等於氮化物層420於透明基板110上的垂直投影形狀,且氧化物層410的側壁與氮化物層420的側壁對齊。然而,在其他實施例中,氧化物層410與氮化物層420的形狀也可以由不同的罩幕圖案定義,使氧化物層410於透明基板110上的垂直投影形狀不等於氮化物層420於透明基板110上的垂直投影形狀,如圖2的透明顯示裝置10B所示。在透明顯示裝置10B中,氮化物層420可覆蓋氧化物層410的側壁。 The water-blocking structure 400 includes an opening 400H that overlaps the top surface 200t of the micro-LED 200, thereby reducing interference (e.g., refraction) caused by the water-blocking structure 400 with light emitted by the micro-LED 200. In this embodiment, the shapes of the oxide layer 410 and the nitride layer 420 are defined using the same mask pattern. Therefore, the vertical projection of the oxide layer 410 on the transparent substrate 110 is substantially equal to the vertical projection of the nitride layer 420 on the transparent substrate 110, and the sidewalls of the oxide layer 410 and the sidewalls of the nitride layer 420 are aligned. However, in other embodiments, the shapes of the oxide layer 410 and the nitride layer 420 may be defined by different mask patterns, such that the vertical projection of the oxide layer 410 on the transparent substrate 110 is different from the vertical projection of the nitride layer 420 on the transparent substrate 110, as shown in the transparent display device 10B of FIG. 2 . In the transparent display device 10B, the nitride layer 420 may cover the sidewalls of the oxide layer 410.
回到圖1,在本實施例中,阻水結構400設置於非穿透區NTR上,且不重疊於穿透區TR,藉此增加穿透區TR的穿透率。然而,在其他實施例中,阻水結構400重疊於穿透區TR,如圖3的透明顯示裝置10C所示。 Returning to Figure 1 , in this embodiment, the water-blocking structure 400 is disposed on the non-transmission region NTR and does not overlap the transmission region TR, thereby increasing the transmittance of the transmission region TR. However, in other embodiments, the water-blocking structure 400 overlaps the transmission region TR, as shown in the transparent display device 10C of Figure 3 .
回到圖1,封裝層500覆蓋阻水結構400以及保護層300。在本實施例中,封裝層500填入阻水結構400的開口400H,並通過的開口400H接觸保護層300。在一些實施例中, 封裝層500的材料包括透明樹脂、透明膠、透明矽氧烷或其他合適的材料。 Returning to Figure 1 , encapsulation layer 500 covers water-blocking structure 400 and protective layer 300 . In this embodiment, encapsulation layer 500 fills opening 400H in water-blocking structure 400 and contacts protective layer 300 through opening 400H. In some embodiments, encapsulation layer 500 is made of transparent resin, transparent adhesive, transparent silicone, or other suitable materials.
圖4A至圖4C是製造圖1的透明顯示裝置10A的製造方法的一些階段的剖面示意圖。請參考圖4A,將微型發光二極體200接合至電路基板100的接墊181,182。舉例來說,通過巨量轉移製程將微型發光二極體200從生長基板或中介基板轉移至電路基板100上,接著通過焊料、導電膠或其他連接結構將微型發光二極體200連接至電路基板100。 Figures 4A to 4C are cross-sectional schematic diagrams illustrating certain stages of a method for manufacturing the transparent display device 10A of Figure 1 . Referring to Figure 4A , a micro-LED 200 is bonded to pads 181 and 182 of a circuit substrate 100 . For example, the micro-LED 200 is transferred from a growth substrate or an interposer to the circuit substrate 100 via a mass transfer process. The micro-LED 200 is then connected to the circuit substrate 100 via solder, conductive adhesive, or other connecting structures.
請參考圖4B,於微型發光二極體200上形成保護層300。舉例來說,將光阻材料塗佈於電路基板100上,接著通過曝光製程與顯影製程形成包覆微型發光二極體200的保護層300。在一些實施例中,每個保護層300覆蓋一個或多個微型發光二極體200。 Referring to FIG. 4B , a protective layer 300 is formed on the micro-LEDs 200 . For example, a photoresist material is coated on the circuit substrate 100 , and then an exposure process and a development process are performed to form the protective layer 300 covering the micro-LEDs 200 . In some embodiments, each protective layer 300 covers one or more micro-LEDs 200 .
請參考圖4C,形成阻水結構400於保護層300上。舉例來說,依序沉積氧化物材料層以及氮化物材料層,接著以遮罩圖案蝕刻前述積氧化物材料層以及氮化物材料層,以形成氧化物層410以及氮化物層420。由於氧化物層410與氮化物層420是利用同一個遮罩圖案定義出來的,氧化物層410與氮化物層420具有相同的垂直投影形狀,且氧化物層410的側壁對齊於氮化物層420的側壁。 Referring to Figure 4C , a water-blocking structure 400 is formed on the protective layer 300 . For example, an oxide material layer and a nitride material layer are sequentially deposited, and then etched using a mask pattern to form an oxide layer 410 and a nitride layer 420 . Because the oxide layer 410 and the nitride layer 420 are defined using the same mask pattern, the oxide layer 410 and the nitride layer 420 have the same vertical projection shape, and the sidewalls of the oxide layer 410 are aligned with the sidewalls of the nitride layer 420 .
在其他實施例中,氧化物材料層以及氮化物材料層也可分別利用不同的遮罩圖案定義。舉例來說,在沉積氧化物材料層 後,先利用第一個遮罩圖案蝕刻氧化物材料層以獲得氧化物層410。接著在氧化物層410上沉積氮化物材料層。然後利用第二個遮罩圖案蝕刻氮化物材料層以獲得氮化物層420,獲得如圖2所示的阻水結構400。 In other embodiments, the oxide material layer and the nitride material layer may be defined using different mask patterns. For example, after depositing the oxide material layer, the oxide material layer is etched using a first mask pattern to obtain an oxide layer 410. A nitride material layer is then deposited on the oxide layer 410. A second mask pattern is then used to etch the nitride material layer to obtain a nitride layer 420, resulting in the water-blocking structure 400 shown in FIG. 2 .
最後,形成封裝層500於阻水結構400以及保護層300上,如圖1所示。 Finally, a packaging layer 500 is formed on the water-blocking structure 400 and the protective layer 300, as shown in Figure 1.
圖5是依照本發明的一實施例的一種透明顯示裝置10D的局部剖面示意圖。在此必須說明的是,圖5的實施例沿用圖1的實施例的元件標號與部分內容,其中採用相同或近似的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,在此不贅述。 Figure 5 is a partial cross-sectional schematic diagram of a transparent display device 10D according to an embodiment of the present invention. It should be noted that the embodiment of Figure 5 retains the same component numbers and some details as the embodiment of Figure 1 , with identical or similar reference numbers used to represent identical or similar components, and descriptions of identical technical details omitted. For descriptions of omitted sections, please refer to the aforementioned embodiments and will not be repeated here.
圖5的透明顯示裝置10D與圖1的顯示裝置圖10A的差異在於:透明顯示裝置10D更包括導電層600。 The difference between the transparent display device 10D in FIG5 and the display device 10A in FIG1 is that the transparent display device 10D further includes a conductive layer 600.
導電層600夾在保護層300與阻水結構400之間,且位於微型發光二極體200的側壁200s與阻水結構400之間。導電層600從保護層300的頂面300t沿著保護層300的側壁300s延伸至鈍化層119。在一些實施例中,形成導電層600的方式包括蒸鍍、塗佈、化學氣象沉積、物理氣象沉積、原子層沉積或其他合適的製程。 The conductive layer 600 is sandwiched between the protective layer 300 and the water-blocking structure 400 and is located between the sidewalls 200s of the micro-LED 200 and the water-blocking structure 400. The conductive layer 600 extends from the top surface 300t of the protective layer 300 along the sidewalls 300s of the protective layer 300 to the passivation layer 119. In some embodiments, the conductive layer 600 is formed by evaporation, coating, chemical vapor deposition, physical vapor deposition, atomic layer deposition, or other suitable processes.
在本實施例中,導電層600位於非穿透區NTR上,且不重疊於穿透區TR。導電層600可做為抗靜電結構,用於減少靜電對元件造成的傷害。由於將抗靜電結構設置在微型發光二極 體200周圍,可以不用在透明顯示裝置10D的周邊區另外設置其他抗靜電結構(例如抗靜電環),因此,可以減少透明顯示裝置10D的邊框尺寸。在一些實施例中,導電層600連接至接地電壓或其他直流電壓。 In this embodiment, the conductive layer 600 is located on the non-transmitting region NTR and does not overlap the transmitting region TR. The conductive layer 600 serves as an anti-static structure, reducing damage to components caused by static electricity. Because the anti-static structure is positioned around the micro-LEDs 200, it is unnecessary to provide additional anti-static structures (such as anti-static rings) around the perimeter of the transparent display device 10D. This reduces the size of the bezel of the transparent display device 10D. In some embodiments, the conductive layer 600 is connected to ground or another DC voltage.
在一些實施例中,導電層600包括透明導電材料,例如銦錫氧化物、銦鋅氧化物、鋁錫氧化物、鋁鋅氧化物、銦鎵鋅氧化物或其他合適的材料。在導電層600包括透明導電材料的實施例中,導電層600可以從非穿透區NTR延伸至穿透區TR,並重疊於穿透區TR。 In some embodiments, the conductive layer 600 includes a transparent conductive material, such as indium tin oxide, indium zinc oxide, aluminum tin oxide, aluminum zinc oxide, indium gallium zinc oxide, or other suitable materials. In embodiments where the conductive layer 600 includes a transparent conductive material, the conductive layer 600 may extend from the non-transmitting region NTR to the transmitting region TR and overlap the transmitting region TR.
在一些實施例中,導電層600具有重疊於微型發光二極體200的頂面200t的通孔600H。在本實施例中,導電層600以及阻水結構400的氧化物層410與氮化物層420是利用同一個遮罩圖案定義出來的,因此導電層600、氧化物層410與氮化物層420於透明基板110上具有相同的垂直投影形狀,且通孔600H的側壁對齊於開口400H的側壁。然而,在其他實施例中,導電層600可以與阻水結構400利用不同的遮罩圖案來定義。舉例來說,先利用遮罩圖案蝕刻導電材料層以獲得包含通孔600H的導電層600。接著才在導電層600上形成阻水結構400。在這種情況下,導電層600於透明基板110上的垂直投影形狀可以不同於氧化物層410於透明基板110上的垂直投影形狀以及氮化物層420於透明基板110上的垂直投影形狀,如圖6的透明顯示裝置10E所示。 In some embodiments, the conductive layer 600 has a through hole 600H that overlaps the top surface 200t of the micro-LED 200. In this embodiment, the conductive layer 600 and the oxide layer 410 and nitride layer 420 of the water-blocking structure 400 are defined using the same mask pattern. Therefore, the conductive layer 600, the oxide layer 410, and the nitride layer 420 have the same vertical projection shape on the transparent substrate 110, and the sidewalls of the through hole 600H are aligned with the sidewalls of the opening 400H. However, in other embodiments, the conductive layer 600 and the water-blocking structure 400 can be defined using different mask patterns. For example, a conductive material layer is first etched using a mask pattern to obtain a conductive layer 600 including a through-hole 600H. The water-blocking structure 400 is then formed on the conductive layer 600. In this case, the vertical projection of the conductive layer 600 on the transparent substrate 110 can be different from the vertical projection of the oxide layer 410 on the transparent substrate 110 and the vertical projection of the nitride layer 420 on the transparent substrate 110, as shown in the transparent display device 10E of FIG6 .
封裝層500覆蓋阻水結構400以及保護層300,且填入阻水結構400的開口400H以及遮蔽結構600的通孔600H,並接觸保護層300。 The encapsulation layer 500 covers the water-blocking structure 400 and the protective layer 300 , fills the opening 400H of the water-blocking structure 400 and the through-hole 600H of the shielding structure 600 , and contacts the protective layer 300 .
圖7是依照本發明的一實施例的一種透明顯示裝置的微型發光二極體200與導電層600的上視示意圖。在此必須說明的是,圖7的實施例沿用圖6的實施例的元件標號與部分內容,其中採用相同或近似的標號來表示相同或近似的元件,並且省略了相同技術內容的說明。關於省略部分的說明可參考前述實施例,在此不贅述。 Figure 7 is a top-down schematic diagram of a micro-LED 200 and a conductive layer 600 in a transparent display device according to an embodiment of the present invention. It should be noted that the embodiment of Figure 7 retains the same component numbers and some details as the embodiment of Figure 6 , with identical or similar reference numbers used to represent identical or similar components, and descriptions of identical technical details omitted. For descriptions of omitted sections, please refer to the aforementioned embodiments and will not be repeated here.
請參考圖7,在本實施例中,每個畫素包括多個微型發光二極體200。舉例來說,相鄰的三個微型發光二極體200構成一個畫素,且分別為紅色微型發光二極體、綠色微型發光二極體以及藍色微型發光二極體。微型發光二極體200接合至接墊181,182。 Referring to FIG. 7 , in this embodiment, each pixel includes a plurality of micro-LEDs 200. For example, three adjacent micro-LEDs 200 constitute a pixel, and are respectively a red micro-LED, a green micro-LED, and a blue micro-LED. The micro-LEDs 200 are bonded to pads 181 and 182.
導電層600在上視圖中包括網狀結構610以及遮蔽結構620。網狀結構610重疊於非穿透區NTR,且網狀結構610下方包括黑矩陣、多條訊號線以及其他導電特徵(圖7未顯示,請參考圖5)。遮蔽結構620從網狀結構610往微型發光二極體200延伸,且具有重疊於微型發光二極體200的頂面的通孔600H。阻水結構400(圖7未顯示,請參考圖5)形成於遮蔽結構620上,且遮蔽結構620的通孔600H重疊於阻水結構400的開口400H。 The conductive layer 600, as seen from above, includes a mesh structure 610 and a shielding structure 620. The mesh structure 610 overlaps the non-transmitting region NTR, and beneath the mesh structure 610 are a black matrix, multiple signal lines, and other conductive features (not shown in FIG7 , see FIG5 ). The shielding structure 620 extends from the mesh structure 610 toward the micro-LEDs 200 and has through-holes 600H that overlap the top surfaces of the micro-LEDs 200. The water-blocking structure 400 (not shown in FIG7 , see FIG5 ) is formed on the shielding structure 620, with the through-holes 600H of the shielding structure 620 overlapping the openings 400H of the water-blocking structure 400.
在本實施例中,每個遮蔽結構620重疊於一個微型發光二極體200,但本揭露不以此為限。在其他實施例中,單一個微型發光二極體200重疊於多個微型發光二極體200,如圖8所示。 In this embodiment, each shielding structure 620 is stacked on one micro-LED 200, but the present disclosure is not limited thereto. In other embodiments, a single micro-LED 200 is stacked on multiple micro-LEDs 200, as shown in FIG8 .
圖9是本發明的一些實施例的透明顯示裝置的製造方法的流程圖。請參考圖9,在步驟S1,將微型發光二極體接合至電路基板,如圖4A所示。 FIG9 is a flow chart of a method for manufacturing a transparent display device according to some embodiments of the present invention. Referring to FIG9 , in step S1, a micro-LED is bonded to a circuit substrate, as shown in FIG4A .
可選地,在步驟S2,測試微型發光二極體,並對故障的微型發光二極體進行修復。 Optionally, in step S2, the micro-LEDs are tested and any faulty micro-LEDs are repaired.
在步驟S3,形成保護層以覆蓋微型發光二極體,如圖4B所示。在一些實施例中,保護層覆蓋的微型發光二極體可以是修復後的微型發光二極體或未經修復的微型發光二極體。 In step S3, a protective layer is formed to cover the micro-LEDs, as shown in FIG4B . In some embodiments, the micro-LEDs covered by the protective layer may be repaired micro-LEDs or unrepaired micro-LEDs.
可選地,在步驟S4,形成導電層。包含導電層的透明顯示裝置如圖5或圖6所示。 Optionally, in step S4, a conductive layer is formed. The transparent display device including the conductive layer is shown in FIG5 or FIG6.
在步驟S5,形成阻水結構,如圖4C所示。 In step S5, a water-blocking structure is formed, as shown in FIG4C .
最後,在步驟S6,形成封裝層,如圖1所示。 Finally, in step S6, a packaging layer is formed, as shown in Figure 1.
圖10A是本發明的一實施例的拼接顯示裝置的上視示意圖。圖10B是沿著圖10A的線A-A’的剖面示意圖。請參考圖10A與圖10B,在本實施例中,兩個以上的透明顯示裝置10A拼接在一起以構成拼接顯示裝置。在本實施例中,以圖1以及其相關段落所描述的透明顯示裝置10A為例,但本發明不以此為限。在其他實施例中,將多個其他實施例所描述的透明顯示裝置拼接 在一起以構成拼接顯示裝置。 Figure 10A is a schematic top view of a spliced display device according to one embodiment of the present invention. Figure 10B is a schematic cross-sectional view taken along line A-A' in Figure 10A. Referring to Figures 10A and 10B, in this embodiment, two or more transparent display devices 10A are spliced together to form a spliced display device. In this embodiment, the transparent display device 10A described in Figure 1 and the related paragraphs is used as an example, but the present invention is not limited thereto. In other embodiments, multiple transparent display devices described in other embodiments are spliced together to form a spliced display device.
在本實施例中,藉由保護層300以及阻水結構400的設置,可以防止從透明顯示裝置10A的邊緣進入的水氣對微型發光二極體200造成損害。因此,可以將微型發光二極體200設置在距離透明顯示裝置10A的邊緣很近的位置,藉此達成窄邊框或無縫拼接的目的。 In this embodiment, the protective layer 300 and the water-blocking structure 400 prevent moisture from entering from the edge of the transparent display device 10A and damaging the micro-LEDs 200. Therefore, the micro-LEDs 200 can be placed very close to the edge of the transparent display device 10A, thereby achieving a narrow bezel or seamless splicing.
10A:透明顯示裝置 10A: Transparent display device
100:電路基板 100: Circuit board
110:透明基板 110:Transparent substrate
112:緩衝層 112: Buffer layer
113:第一絕緣層 113: First Insulation Layer
114:第二絕緣層 114: Second insulation layer
115:第一緩衝層 115: First buffer layer
116:第二緩衝層 116: Second buffer layer
117:第三緩衝層 117: Third buffer layer
118:第四緩衝層 118: Fourth buffer layer
119:鈍化層 119: Passivation layer
120:半導體層 120: Semiconductor layer
130:第一導電圖案層 130: First conductive pattern layer
131:閘極 131: Gate
132:導電特徵 132: Conductive characteristics
140:第二導電圖案層 140: Second conductive pattern layer
150:第三導電圖案層 150: Third conductive pattern layer
151:第一源極/汲極 151: First source/drain
152:第二源極/汲極 152: Second source/drain
153:導電特徵 153: Conductive characteristics
160:第四導電圖案層 160: Fourth conductive pattern layer
170:第五導電圖案層 170: Fifth conductive pattern layer
180:第六導電圖案層 180: Sixth conductive pattern layer
181,182:接墊 181,182: Pad
191:第三絕緣層 191: The third insulating layer
192:第四絕緣層 192: Fourth Insulation Layer
193:第五絕緣層 193: Fifth Insulation Layer
200:微型發光二極體 200: Micro LED
200s,300s:側壁 200s, 300s: Sidewall
200t,300t:頂面 200t, 300t: Top
210:接點 210: Contact
300:保護層 300: Protective layer
400:阻水結構 400: Water-blocking structure
400H:開口 400H: Open
410:氧化物層 410: Oxide layer
420:氮化物層 420: Nitride layer
500:封裝層 500: Packaging layer
BM:黑矩陣 BM: Black Matrix
T:主動元件 T: Active element
TR:穿透區 TR: Penetration Zone
NTR:非穿透區 NTR: Non-penetrating zone
Claims (10)
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| TW113150383A TWI897775B (en) | 2024-12-24 | 2024-12-24 | Transparent display device and tiled display device |
| CN202510697848.2A CN120548006A (en) | 2024-12-24 | 2025-05-28 | Transparent display device and spliced display device |
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| TW113150383A TWI897775B (en) | 2024-12-24 | 2024-12-24 | Transparent display device and tiled display device |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104376789A (en) * | 2013-08-14 | 2015-02-25 | 天津顺保科技有限公司 | Novel LED (light emitting diode) advertising window |
| CN207852220U (en) * | 2018-01-09 | 2018-09-11 | 上海得倍电子技术有限公司 | A kind of LED transparent display screens structure |
| CN114999333A (en) * | 2022-06-02 | 2022-09-02 | 武汉华星光电半导体显示技术有限公司 | Spliced display panel |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104376789A (en) * | 2013-08-14 | 2015-02-25 | 天津顺保科技有限公司 | Novel LED (light emitting diode) advertising window |
| CN207852220U (en) * | 2018-01-09 | 2018-09-11 | 上海得倍电子技术有限公司 | A kind of LED transparent display screens structure |
| CN114999333A (en) * | 2022-06-02 | 2022-09-02 | 武汉华星光电半导体显示技术有限公司 | Spliced display panel |
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