TWI897695B - Substrate container with gas diffusion device for ingress of fluids - Google Patents

Abstract

A substrate container includes a housing and at least one gas diffusion device. The housing includes a housing, and at least one holding assembly having a top wall, a bottom wall, and a connecting wall connected between the top wall and the bottom wall, the housing being formed with a receiving space, and at least one air inlet, the receiving space having a front opening, the holding assembly being disposed on the connecting wall of the housing and being disposed in the receiving space, the holding assembly having two side arms. The gas diffusion device is disposed in the receiving space and includes a support frame having a frame body clamped by the side arms, and a connecting portion connected to the air inlet. Through the side arms, the frame bodies, the connecting portions and the air inlet vias, the gas diffusion devices can be stably assembled to the outer casing and the convenience of assembly and disassembly is enhanced.

Description

Substrate container with gas diffusion device for fluid entry

The present invention relates to a substrate container, and more particularly to a substrate container having a fluid gas diffusion device.

Substrates used in semiconductor manufacturing processes (e.g., semiconductor crystal wafers, often referred to as wafers) must be kept in a high-purity environment. Therefore, substrate containers used to transport or store substrates must not only be collision-resistant but also protect them from external air contamination.

In today's semiconductor industry, to maintain substrate cleanliness and prevent contamination from airborne particles, moisture, or other impurities, multiple gas diffusers are often installed within a substrate container housing. These diffusers are used to evenly distribute clean, dry air (CDA) into the housing, replacing the air within. The housing has a bottom for the diffusers to sit on, and multiple annular sidewalls extending downward from the bottom and adjacent to the diffusers. Each annular sidewall and an air intake module for CDA to enter together define an air chamber, which can be connected to the outside and the interior of the corresponding gas diffusion device through the air intake module. A base is assembled on the bottom of the housing to retain the air intake module in the installation space.

However, when assembled within the housing, these gas diffusion devices present problems such as wobbling and instability, inconvenient assembly and disassembly, and easy separation from the housing during operation. Furthermore, in existing technologies, each air intake module requires numerous mounting components, making assembly difficult, resulting in unstable air density after the CDA enters the air chamber, and easily damaged parts. Furthermore, the assembly method between the annular sidewall of the housing, the air intake module, and the chassis makes the entire substrate container thick and bulky, which easily takes up space. Furthermore, the chassis, which must be simultaneously coordinated with the air intake modules, is bulky and consumes manufacturing materials, thereby increasing the manufacturing cost of the substrate container.

Therefore, one of the objects of the present invention is to provide a substrate container that can overcome at least one disadvantage of the prior art.

Therefore, the substrate container of the present invention comprises an outer housing and at least one gas diffusion device. The outer housing comprises a shell and at least one retaining assembly. The shell has a top wall, a bottom wall, and a connecting wall connecting the top and bottom walls. The shell defines a receiving space and at least one gas inlet. The receiving space has a front opening. The retaining assembly is disposed on the connecting wall of the shell and located within the receiving space. The retaining assembly has two side arms. The gas diffusion device is disposed within the receiving space and comprises a bracket. The bracket comprises a frame held by the side arms and a connecting portion connected to the gas inlet.

In some embodiments, the retaining assembly further comprises a first latch located between the side arms, and the bracket further comprises at least a second latch that is latched to the first latch.

In some embodiments, the first latch has a latch arm that blocks the frame, and the first latch has at least one groove formed on the rear side of the latch arm. The second latch has an arm that rests on the top of the latch arm, and a rear hook protruding from the rear end of the arm, and the rear hook is embedded in the groove and latched to the latch arm.

In some embodiments, the buckle arm has a front bevel, and the rear hook has a rear bevel for contacting the front bevel, and the front bevel is configured to push the rear bevel to cause the arm to bend and deform so that the rear hook can be buckled on the buckle arm.

In some embodiments, the frame has a bottom wall and a top wall opposite to the bottom wall, and the bracket further has at least one elastic top abutment disposed on the top wall and abutting against the housing.

In some embodiments, each of the side arms has a side arm portion that blocks one side of the frame, and a front hook portion that protrudes from a front end of the side arm portion and is snapped onto the frame.

In some embodiments, the retaining assembly further comprises a connecting frame and a retaining frame, wherein the connecting frame is integrally connected to the connecting wall of the housing, the retaining frame comprises the side arms, and a back frame connected to the side arms, the back frame being connected to the connecting frame.

In some embodiments, the frame has a bottom wall and a top wall opposite to the bottom wall, and the connecting portion is a surrounding wall that protrudes downward from the bottom wall of the frame and is inserted into the air inlet.

In some embodiments, the frame has a bottom wall and a top wall opposite to the bottom wall, and the connecting portion is a surrounding wall that protrudes upward from the bottom wall of the housing and is inserted into the bottom wall of the frame.

In some embodiments, the gas diffusion device further includes an elastic sealing ring sleeved on the surrounding wall and clamped by the housing and the bottom wall of the frame.

In some embodiments, the elastic top abutment has a convex top arm protruding upward from the top wall of the frame, and an elastic top abutment arm formed at the top end of the convex top arm and abutting against the housing.

In some embodiments, the elastic top abutment arm has an elastic arm section extending laterally from the top end of the convex top arm, and a top abutment section protruding upward from the top end of the elastic arm section and abutting against the housing.

In some embodiments, the bracket further has a limiting protrusion extending upward from the bottom wall of the frame, and the gas diffusion device further includes a porous tube arranged between the bottom wall of the frame and the top wall of the frame, and the porous tube is engaged with the limiting protrusion.

In some embodiments, the bracket further has a buckle provided on the top wall of the frame, and the porous tube is buckled by the buckle.

In some embodiments, the bracket is a single component manufactured in an integral molding manner.

In some embodiments, the frame has a front shell and a rear shell connected to the rear side of the front shell, the front shell forms a plurality of front air outlets, and the rear shell forms a plurality of rear air outlets. The gas diffusion device also includes a front filter membrane arranged on the inner side of the front shell and corresponding to the front air outlets, and a rear filter membrane arranged on the inner side of the rear shell and corresponding to the rear air outlets.

In some embodiments, the retaining assembly further has a connecting frame and a retaining frame, the connecting frame is integrally connected to the connecting wall of the shell, the retaining frame has the side arms, and a back frame connected to the side arms, the back frame is connected to the connecting frame, and the angle between the surface formed by the front end edges of the side arms and the surface of the connecting wall for the connecting frame to be connected is a specific angle so that the gas diffusion device is oriented toward the center of the accommodating space.

In some embodiments, the bracket is a single component manufactured in an integral molding manner.

Another object of the present invention is to provide a substrate container that can overcome at least one disadvantage of the prior art.

Therefore, the substrate container of the present invention comprises an outer housing and at least one gas diffusion device. The outer housing comprises a shell and at least one retaining assembly. The shell has a top wall, a bottom wall, and a connecting wall connecting the top and bottom walls. The shell defines a receiving space and at least one gas inlet. The receiving space has a front opening. The retaining assembly is disposed within the shell and located within the receiving space. The retaining assembly has a first latch. The gas diffusion device, disposed within the receiving space, comprises a bracket having a connecting portion connected to the gas inlet and at least one second latch that latches onto the first latch.

Another object of the present invention is to provide a substrate container that can overcome at least one disadvantage of the prior art.

The substrate container of the present invention comprises a housing, at least one outer cover, and at least one air intake valve module. The housing has a top wall, a bottom wall, and a connecting wall connecting the top and bottom walls. The housing defines a housing space with a front opening. The bottom wall is inwardly recessed to form at least one groove, and the bottom wall defines at least one air intake hole connected to the groove. The outer cover is joined to the bottom wall and, together with the bottom wall, defines an air chamber connected to the air intake hole. The outer cover also defines an air intake hole connected to the air chamber. The air intake valve module is disposed on the outer cover and corresponds to the air intake hole, and air is introduced into the air chamber through the air intake hole.

In some embodiments, the bottom wall has an outer wall surface, an inward-contracted surrounding wall body connected to the outer wall surface and surrounding the outer cover, and an inner wall body connected to an end of the inward-contracted surrounding wall body opposite to the outer wall surface and spaced apart from the outer wall surface. The inner wall body is formed with the air inlet hole, the outer cover is spaced apart from the inner wall body, and the position of the air inlet hole vertically projected onto the inner wall body does not overlap with the position of the air inlet hole.

In some embodiments, the housing is a single component formed in one piece.

In some embodiments, the bottom wall has an outer wall surface, an inward-retracted surrounding wall body connected to the outer wall surface and surrounding the outer cover, and an inner wall body connected to an end of the inward-retracted surrounding wall body opposite to the outer wall surface and spaced apart from the outer wall surface. The inward-retracted surrounding wall body and the inner wall body jointly define the groove, and the inner wall body forms the air inlet.

In some embodiments, the substrate container further includes a sealing ring located between the bottom wall and the outer cover.

In some embodiments, the bottom wall has an outer wall surface and an inwardly contracted surrounding wall body connected to the outer wall surface and surrounding the outer cover, and the sealing ring is disposed in the groove.

In some embodiments, the inwardly contracted surrounding wall has an annular shoulder surface for the sealing ring to abut against, and the annular shoulder surface and the outer cover together clamp the sealing ring.

In some embodiments, the inwardly contracted surrounding wall further comprises an annular surrounding surface connected between the outer wall surface and the annular shoulder surface and surrounding the outer cover.

In some embodiments, the outer cover has a cover plate surrounded by the inwardly contracted surrounding wall and defining the air inlet, and an annular pressing rib protruding from one side of the cover plate and surrounding the air inlet, wherein the annular pressing rib is in tight contact with the sealing ring.

In some embodiments, a plurality of screw holes are formed on the annular shoulder surface, and the substrate container further includes a plurality of screws passing through the outer cover and the sealing ring and screwed into the screw holes respectively.

In some embodiments, the bottom wall has an outer wall surface, the outer wall surface is recessed inward to form the groove, the outer cover has an outer cover surface, and the outer cover surface and the outer wall surface of the bottom wall are in the same plane.

In some embodiments, the at least one intake valve module includes a check valve.

In some embodiments, the at least one intake valve module further includes a through pipe connected to the outer cover, and a base assembled on the through pipe, and the check valve is installed in the base.

In some embodiments, the at least one intake valve module further includes a through-tube connected to the outer cover, and a base assembled on the through-tube, and the check valve is installed in the through-tube.

The present invention has the following effects: by the side arms of the retaining assembly of the housing mating with the frame of the bracket of the gas diffusion device, and by the air inlet of the housing mating with the connecting portion of the bracket, the gas diffusion device can be stably assembled to the housing, and the convenience of assembling and disassembling the gas diffusion device can be improved. In addition, by the first fastener of the retaining assembly of the housing mating with the second fastener of the bracket of the gas diffusion device, and by the air inlet of the housing mating with the connecting portion of the bracket, the gas diffusion device can be stably assembled to the housing, and the convenience of assembling and disassembling the gas diffusion device can be improved. Furthermore, by virtue of the grooves, the air inlet holes, the outer covers, the air inlet holes, and the air inlet valve modules, the air chambers can be located within the bottom wall, thereby reducing installation complexity, improving the stability of the air density, and extending the service life. Furthermore, the air chambers can be defined without the need for an additional bottom plate, thereby reducing the volume of the substrate container and lowering the manufacturing cost of the substrate container.

Before the present invention is described in detail, it should be noted that similar elements are denoted by the same reference numerals in the following description.

Referring to Figures 1, 2, and 3, a first embodiment of a substrate container 100 of the present invention is shown. The substrate container 100 is a front-opening wafer unpacking pod (FOUP). The substrate container 100 includes a housing 10, two gas diffusion devices 20, two sealing rings 4, two outer covers 6, a plurality of screws 7, and two inlet valve modules 8.

The housing 10 includes a housing 1 and two retaining assemblies 2. The housing 1 has a top wall 11, a bottom wall 13, and a connecting wall 12 connecting the top wall 11 and the bottom wall 13. The top wall 11, the bottom wall 13, and the connecting wall 12 collectively define a receiving space 14. The bottom wall 13 is formed with two air inlet holes 139 extending therethrough. The receiving space 14 has a front opening 141.

Referring to FIG. 4 , the bottom wall 13 is recessed inward to form two grooves 132. Two air inlet holes 139 are formed in the bottom wall 13, each connected to the grooves 132. Specifically, the bottom wall 13 comprises an outer wall 131, two inwardly contracted surrounding walls 134 connected to the outer wall 131, and two inner walls 135 connected to one end of the inwardly contracted surrounding walls 134 opposite the outer wall 131 and spaced apart from the outer wall 131. Each inner wall 135 is formed with a corresponding air inlet hole 139. Each inwardly contracted surrounding wall 134 and its corresponding inner wall 135 together define a corresponding groove 132.

Each of the inwardly contracted surrounding walls 134 has an annular shoulder surface 136 and an annular surrounding surface 137 connected between the outer wall surface 131 and the annular shoulder surface 136. Each of the annular shoulder surfaces 136 is formed with a plurality of screw holes 138.

Referring to Figures 1 and 4 , the housing 1 is a single component manufactured using a one-piece molding method. The housing 1 is made of plastic using a one-piece molding method, such as injection molding. Specifically, the top wall 11, the connecting wall 12, and the bottom wall 13 (the bottom wall 13 includes the outer wall surface 131, the indented surrounding walls 134, and the inner wall portions 135) are a single component manufactured using a one-piece molding method.

Referring to Figures 2, 5 and 6, each of the retaining components 2 is arranged on the connecting wall 12 of the housing 1 and is located in the accommodating space 14. Each of the retaining components 2 has a connecting frame 21 and a retaining frame 22. In this first embodiment, the connecting frame 21 and the housing 1 are molded together, for example, by injection molding. The connecting frame 21 is formed with an annular groove 211. The retaining frame 22 has two side arms 23, a first fastener 24 located between the side arms 23, and a back frame body 25 connected to the side arms 23 and the first fastener 24. The back frame body 25 has a back plate 251 and an annular peripheral wall 252. The back plate 251 is connected between the side arms 23 and the first fastener 24. The annular peripheral wall 252 protrudes from the back of the back plate 251 and fits into the annular groove 211. The annular peripheral wall 252 of the back frame body 25 is fixedly connected to the connecting frame 21, for example, by ultrasonic welding. In other embodiments, each annular peripheral wall 252 can also be removably fitted into the corresponding annular groove 211, allowing the retaining frame 22 to be removably mounted on the corresponding connecting frame 21.

Each side arm 23 has a side arm portion 231 connected to the back plate 251 and a front hook portion 232 protruding from the front end of the side arm portion 231. The first latch 24 has a connecting plate 240, a protruding arm 241, and a locking arm 242. The connecting plate 240 is integrally connected to the front end of the back plate 251 and is aligned with the top of the back plate 251. The protruding arm 241 protrudes forward from the front end of the connecting plate 240. The locking arm 242 is connected to the front end of the protruding arm 241 and protrudes from the left and right sides of the protruding arm 241. The connecting plate 240 of the first latch 24, the protruding arm 241 and the latch arm 242 together form two grooves 243 located at the rear side of the latch arm 242 and spaced apart from each other. The latch arm 242 has a front inclined surface 244.

1 , 7 and 8 , each of the gas diffusion devices 20 is disposed in the accommodating space 14 and includes a bracket 3 , an elastic sealing ring 321 , and a porous tube 5 .

Referring to Figures 5, 6, 8, and 9, the bracket 3 is a single component manufactured, for example, through an integral injection molding process. The bracket 3 comprises a frame 31 for being clamped by the side arms 23, a connecting portion 32 for connecting to the corresponding air inlet 139, two spaced apart second latching members 33 for snapping onto the corresponding first latching members 24, two elastic abutting members 34, a stopper protrusion 35, and two hooks 36.

The frame 31 has a frame 310, a bottom wall 311 connected to the bottom end of the frame 310, and a top wall 312 connected to the top end of the frame 310 and opposite to the bottom wall 311. The connecting portion 32 is a surrounding wall that protrudes downward from the bottom surface of the bottom wall 311 and is inserted into the corresponding air inlet 139.

Each second latching member 33 has an arm portion 331 for abutting against the top end of the corresponding latching arm 242, and a rear hook portion 332 protruding from the rear end of the arm portion 331. The rear hook portion 332 is configured to engage with the corresponding groove 243 to latch onto the corresponding latching arm 242. The rear hook portion 332 has a rear bevel 333 for contacting the corresponding front bevel 244.

6 , 8 , and 10 , the elastic top abutments 34 are spaced apart and disposed on the top wall 312 and abut against the top wall 11 of the housing 1 . Each elastic top abutment 34 includes a protruding top arm 341 extending upward from the top wall 312 , and an elastic top abutment arm 342 formed at the top end of the protruding top arm 341 and abutting against the top wall 11 of the housing 1 . The elastic top abutment arm 342 includes an elastic arm section 343 extending horizontally from the top end of the convex top arm 341, and a top abutment section 344 protruding upward from the top end of the elastic arm section 343 and abutting against the top wall 11 of the housing 1.

The limiting protrusion 35 extends upward from the top of the bottom wall 311. The hooks 36 are spaced apart on the top wall 312. The top wall 312 of the frame 31 has a front edge 315. Each hook 36 is formed with two slits 316 recessed inward from the front edge 315 and located on either side of the hook 36. These slits allow the hooks 36 to be resiliently connected to the top wall 312 and engage the porous tube 5. The design of the slits 316 allows the hooks 36 to be resiliently connected to the top wall 312 without protruding from the top wall 312. In this way, the buckle 36 can be prevented from blocking the movement path of the corresponding elastic top member 34 when it is compressed and deformed.

Referring to Figures 9 and 11 , the elastic sealing ring 321 is an O-ring made of an elastic material, such as rubber or silicone. The elastic sealing ring 321 is fitted over the connection portion 32 of the bracket 3 and is held between the bottom wall 13 of the housing 1 and the bottom wall 311 of the bracket 31. This maintains an airtight seal between the bottom wall 13 and the bracket 3 to prevent gas leakage.

Referring to Figure 4 , each sealing ring 4 is made of an elastic material such as rubber or silicone and is in the form of a ring. Each sealing ring 4 is positioned within a corresponding groove 132 and abuts against a corresponding annular shoulder 136 . Each sealing ring 4 has a plurality of through-holes 41 formed therein, each of which is connected to the threaded holes 138 .

Referring to Figures 7 and 8 , the porous tube 5 is positioned between the bottom wall 311 and the top wall 312 of the frame 31. The porous tube 5 engages with the retaining protrusion 35 of the bracket 3 and is secured by the hooks 36, allowing the porous tube 5 to be securely assembled and fixed to the bracket 3. To assemble the porous tube 5 to the bracket 3, the user first tilts the porous tube 5 and engages the retaining protrusion 35. Then, the user pulls up each of the hooks 36, bending and deforming it upward to build up a restoring force. The user then rotates the porous tube 5 toward the frame 310, moving it below the top wall 312. Finally, each hook 36 is released, allowing it to automatically snap onto the front end of the porous tube 5 due to the accumulated restoring force, thus completing the assembly of the porous tube 5. To remove the porous tube 5 from the corresponding bracket 3, the user simply pulls the hooks 36 upward to disengage the porous tube 5, then rotates the upper end of the porous tube 5 forward to move it away from the top wall 312. Finally, the porous tube 5 is moved upward to separate from the retaining protrusion 35, completing the removal of the porous tube 5. This improves the convenience of assembling and disassembling the porous tube 5.

The angle between the surface formed by the front ends of the front hooks 232 of the side arms 23 and the surface of the connecting wall 12 for connecting the connecting frame 21 is a specific angle, so that the gas diffusion device 20 faces the center of the accommodating space 14. Specifically, the specific angle is 0° to 45°, more preferably 5° to 30°, and most preferably 7° to 20°. The angle between the surface formed by the front end edges of the front hooks 232 and the surface of the connecting wall 12 for connecting the connecting frame 21 is between 7° and 20°, so that the frame 31 clamped by the side arms 23 is rotated 7° to 20° toward the center of the accommodating space 14 relative to the surface of the connecting wall 12 for connecting the connecting frame 21, thereby making the diffusion surface of the porous tube 5 engaged with the bracket 3 face the center of the accommodating space 14, so as to evenly diffuse clean dry air (CDA) into the accommodating space 14.

It should be noted that the connecting portion 32 can also be a surrounding wall that protrudes upward from the bottom wall 13 of the shell 1 and is inserted into an air hole (not shown) on the bottom wall 311 of the frame 31. The surrounding wall defines the air inlet 139. As long as the CDA can enter the corresponding porous tube 5 through the connecting portion 32, the position where the connecting portion 32 is connected is not limited to this embodiment.

Referring to Figures 4, 12, and 13, each outer cover 6 is joined to the bottom wall 13, with at least a portion embedded in the corresponding groove 132. Each outer cover 6 and the bottom wall 13 jointly define an air chamber 133 connected to the corresponding air inlet hole 139, and each outer cover 6 is formed with an air inlet hole 61 connected to the corresponding air chamber 133. Specifically, each outer cover 6 is surrounded by the annular surrounding surface 137 of the corresponding inwardly contracted surrounding wall 134 and is spaced apart from the corresponding inner wall 135. Each outer cover 6 has a cover plate 62 and an annular pressing rib 63. The cover plate 62 has a plate body 621 and a cylindrical body 622 forming the plate body 621. The plate 621 has an inner cover surface 623 and an outer cover surface 624 opposite the inner cover surface 623. The cylinder 622 has a surrounding wall 625 connected to the plate 621 and protruding from the inner cover surface 623 and the outer cover surface 624, and an end wall 626 connected to the inner end of the surrounding wall 625 and located on the inner side of the inner cover surface 623. The surrounding wall 625 is formed with a screw hole 627. The end wall 626 is formed with the air inlet hole 61 connected to the screw hole 627. The position of the air inlet hole 61 vertically projected onto the corresponding inner wall 135 does not overlap with the position of the air inlet hole 139, so that the air inlet hole 61 is offset from the air inlet hole 139. The plate 621 is formed with a plurality of through holes 628 extending between the inner cover surface 623 and the outer cover surface 624 . The through holes 628 are respectively connected to the through holes 41 .

Each annular pressing rib 63 is protruding from the inner cover surface 623 of the corresponding cover plate 62 and surrounds the air inlet 61. The annular pressing rib 63 presses against the corresponding sealing ring 4. Thus, each outer cover 6 and the corresponding annular shoulder surface 136 jointly clamp the corresponding sealing ring 4.

Referring to FIG. 4 , each screw 7 is inserted through a corresponding through-hole 628 of the outer cover 6 and a corresponding through-hole 41 of the sealing ring 4 and is screwed into a corresponding screw hole 138, thereby securing the outer cover 6 and the sealing ring 4 to the annular shoulder 136 of the bottom wall 13. Each outer cover 6 is in close contact with the corresponding sealing ring 4 via the annular locking rib 63, maintaining a good seal between each outer cover 6 and the corresponding annular shoulder 136, thereby preventing the CDA within the air chamber 133 from leaking through the gap between the bottom wall 13 and the outer cover 6. By screwing the corresponding outer cover 6 and the corresponding sealing ring 4 onto the corresponding annular shoulder surface 136 with the screw 7, a sealing effect can be achieved, thereby reducing the complexity of assembling the outer covers 6.

It should be noted that the fixing method of the outer covers 6 and the bottom wall 13 is not limited to this embodiment. The outer covers 6 and the bottom wall 13 can also be joined together using ultrasonic fusion. This embodiment does not require the screws 7 and the sealing rings 4.

1 and 13 , by recessing the bottom wall 13 to form the groove 132 and at least partially embedding the outer cover 6 within the groove 132, the overall thickness of the outer cover 6 after being assembled to the bottom wall 13 can be reduced. Specifically, in this embodiment, the outer cover surface 624 of each outer cover 6 is coplanar with the outer wall surface 131 of the bottom wall 13, effectively reducing the overall thickness of the outer cover 6 after being assembled to the bottom wall 13.

4 and 13 , each of the porous tubes 5 is located within the accommodating space 14 . Each of the porous tubes 5 includes a connecting portion 32 that is plugged into the corresponding air inlet 139 . Each of the porous tubes 5 is connected between the accommodating space 14 and the corresponding air chamber 133 .

Referring to Figures 13 and 14 , each intake valve module 8 is mounted on the corresponding outer cover 6 and corresponds to the intake hole 61, allowing air to enter the corresponding air chamber 133 through the intake hole 61. Specifically, each intake valve module 8 includes a check valve 82, a through-tube 81 threaded into the corresponding threaded hole 627 of the outer cover 6, and a base 83 assembled with the through-tube 81. The check valve 82 is mounted within the base 83. The base 83 is, but is not limited to, an elastic member. A docking hole 831 is formed in the base 83. The docking port 831 is connected to a fluid delivery device (not shown), such as, but not limited to, the FOUP Load Port Smart SELOP-7-N series, that supplies CDA. The CDA generated by the fluid delivery device flows into the air chamber 133 via the check valve 82, the through-tube 81, and the air inlet 61. By ensuring that the vertical projection of the air inlet 61 on each outer cover 6 onto the corresponding inner wall 135 does not overlap with the position of the corresponding air inlet 139, the CDA can flow evenly through the air chambers 133 before entering the porous tubes 5, thereby preventing unstable airflow into the porous tubes 5. Each porous tube 5 allows the CDA to enter the accommodating space 14 uniformly, resulting in a uniform distribution of the CDA within the accommodating space 14.

Referring to Figures 6, 9, 10, and 11, when the user wishes to assemble each gas diffusion device 20 into the housing 10, they first obliquely insert the connecting portion 32, fitted with the corresponding elastic sealing ring 321, into the corresponding air inlet 139. Subsequently, the gas diffusion device 20 is rotated toward the corresponding retaining frame 22 of the retaining assembly 2. Since the front bevel 244 of each latch arm 242 is configured to push the corresponding rear bevel 333 of the second latch part 33 to cause the corresponding arm portion 331 to bend and deform so that the rear hook portion 332 can be latched to the latch arm 242, therefore, when the front bevel 244 of each latch arm 242 contacts the corresponding rear bevel 333 of the second latch part 33, the component force applied by the front bevel 244 to the rear bevel 333 will cause the arm portion 331 to bend and deform upward and accumulate a restoring elastic force. When the rear hook portion 332 of each second fastener 33 passes over the fastener arm 242 and aligns with the corresponding groove 243, the elastic force accumulated in the arm 331 will rebound the rear hook portion 332, so that the arm 331 stops at the top of the fastener arm 242, and the rear hook portion 332 is embedded in the corresponding groove 243 and fastened to the corresponding fastener arm 242, so that each second fastener 33 is fastened to the corresponding first fastener 24.

At this time, the snap arm 242 blocks the frame 310 of the frame 31 to prevent the gas diffusion device 20 from moving backward. The side arm portion 231 of each side arm 23 blocks one side of the frame 310 of the frame 31, so that the side arm portions 231 of the side arms 23 collectively clamp the frame 310 to prevent the gas diffusion device 20 from shaking left and right. The front hook portion 232 of each side arm 23 snaps onto the front end of the frame 310 of the frame 31 to prevent the gas diffusion device 20 from moving forward. The top abutment section 344 of each elastic abutment member 34 contacts the bottom surface of the top wall 11 of the housing 1 and is squeezed by the top wall 11, causing the elastic arm section 343 to bend and deform downward relative to the protruding top arm 341, accumulating a restoring elastic force. Consequently, the top abutment section 344 of each elastic abutment member 34 can elastically abut against the bottom surface of the top wall 11, causing the bottom wall 311 of the frame 31 to press the elastic sealing ring 321 toward the bottom wall 13 of the housing 1. The bottom wall 311 and the bottom wall 13 can then tightly clamp the elastic sealing ring 321 to maintain a good airtight state. Therefore, each gas diffusion device 20 can be stably assembled on the housing 10.

To disassemble each gas diffusion device 20, the user first pulls the front hook 232 of the corresponding side arm 23 outward to separate it from the frame 310 of the frame 31. Then, the rear hooks 332 are lifted upward via the frame 310 to move them away from the grooves 243. This allows the bracket 3 to be removed from the housing 10. Finally, the porous tube 5 is removed from the bracket 3 in the same manner as described above. This improves the ease of assembly and disassembly of the gas diffusion device 20.

When using the substrate container 100, the user connects the fluid delivery device to the intake valve modules 8 and turns on the fluid delivery device. The fluid delivery device continuously delivers CDA from the intake valve modules 8 to the air chambers 133. The CDA flows evenly in the air chambers 133 and smoothly enters the porous tubes 5 through the connecting portions 32. The CDA then diffuses evenly into the accommodating space 14 through the porous tubes 5.

15 , in some other embodiments of the first embodiment, the check valve 82 is installed in the through pipe 81 .

In other embodiments of the first embodiment, each of the inwardly contracted surrounding walls 134 does not have the annular shoulder surface 136 and the annular surrounding surface 137. Instead, the inwardly contracted surrounding wall 134 is recessed from the outer wall surface 131 and directly connected to the inner wall 135. Each of the cover plates 62 has an abutment wall (not shown) protruding from the periphery of the inner cover surface 623 toward the corresponding inner wall 135. The through holes 628 extend from the outer cover surface 624 through the plate 621 and the abutment wall, and the screws 7 are long enough to be screwed from the outer cover surface 624 into the screw holes 138, respectively. The position of the air inlet hole 61 vertically projected onto the corresponding inner wall 135 does not overlap with the position of the air inlet hole 139 .

Referring to FIG. 16 , a second embodiment of a substrate container 100 of the present invention has an overall structure substantially similar to the first embodiment, differing in that each gas diffusion device 20 further includes a front filter 51 and a rear filter 52. The frame 31 of the holder 3 has a front housing 313 and a rear housing 314 coupled to the rear side of the front housing 313. The front housing 313 is formed with a plurality of front air outlets 317. The rear housing 314 is formed with a plurality of rear air outlets 318. The front filter 51 is disposed on the inner side of the corresponding front housing 313, corresponding to the front air outlets 317. The rear filter 52 is disposed on the inner side of the corresponding rear housing 314, corresponding to the rear air outlets 318. The front shell 313 and the rear shell 314 jointly define the bottom wall 311 and the top wall 312 .

Referring to FIG. 17 , a third embodiment of the substrate container 100 of the present invention has an overall structure substantially similar to that of the first embodiment, with the difference being that the cover plate 62 of each outer cover 6 partially protrudes beyond the outer wall surface 131 of the bottom wall 13 , the outer cover surface 624 of each outer cover 6 is not aligned with the outer wall surface 131 of the bottom wall 13 , and the screws 7 are long enough to be screwed from the outer cover surface 624 to the screw holes 138 , respectively.

18 , in some other embodiments of the third embodiment, the check valve 82 is installed in the through pipe 81 .

In other embodiments of the third embodiment, each of the inwardly contracted surrounding walls 134 lacks the annular shoulder surface 136 and the annular surrounding surface 137. Instead, the inwardly contracted surrounding wall 134 is recessed from the outer wall 131 and directly connected to the inner wall 135. Each of the plates 621 is directly connected to the outer wall 131 around the corresponding groove 132. The outer cover 6 and the outer wall 131 jointly retain the corresponding sealing ring 4. Each of the screw holes 138 is formed in the outer wall 131 at a location corresponding to the through hole 628. Specifically, the plates 621 and the annular retaining rib 63 of the outer cover 6, together with the outer wall 131, retain the corresponding sealing ring 4.

In other embodiments of the third embodiment, each of the inwardly contracted surrounding walls 134 lacks the annular shoulder surface 136 and the annular surrounding surface 137. Instead, the inwardly contracted surrounding wall 134 is recessed from the outer wall 131 and directly connected to the inner wall 135. Each of the cover plates 62 has an abutment wall (not shown) protruding from the periphery of the inner cover surface 623 toward the corresponding inner wall 135. The through holes 628 extend from the outer cover surface 624 through the plate 621 and the abutment wall. The vertical projection of the air inlet 61 onto the corresponding inner wall 135 does not overlap with the position of the air inlet hole 139.

It should be emphasized again that the fixing method of the outer covers 6 and the bottom wall 13 of the present invention is not limited to the above-mentioned embodiment. The outer covers 6 and the bottom wall 13 can also be joined together using ultrasonic fusion. This embodiment does not require the screws 7 and the sealing rings 4.

In summary, by cooperating with the side arms 23 of the retaining assembly 2 of the housing 10 and the frame 31 of the bracket 3 of the gas diffusion device 20, and by cooperating with the air inlet 139 of the housing 10 and the connecting portion 32 of the bracket 3, the gas diffusion device 20 can be stably assembled to the housing 10, and the convenience of assembling and disassembling the gas diffusion device 20 can be improved, thereby effectively achieving the purpose of the present invention. In addition, by cooperating between the first fastener 24 of the retaining assembly 2 of the housing 10 and the second fastener 33 of the bracket 3 of the gas diffusion device 20, and by cooperating between the air inlet 139 of the housing 10 and the connecting portion 32 of the bracket 3, the gas diffusion device 20 can be stably assembled to the housing 10, and the convenience of assembling and disassembling the gas diffusion device 20 can be improved. Furthermore, by means of the grooves 132, the air inlet holes 139, the outer covers 6, the air inlet holes 61, and the air inlet valve modules 8, the air chambers 133 can be located within the bottom wall 13, thereby reducing installation complexity, improving the stability of the air density, and extending the service life. Furthermore, the air chambers 133 can be defined without the need for an additional bottom plate (not shown), thereby reducing the volume of the substrate container 100 and lowering the manufacturing cost of the substrate container 100.

However, the above description is merely an example of the present invention and should not be used to limit the scope of the present invention. All simple equivalent changes and modifications made according to the scope of the patent application and the content of the patent specification of the present invention are still within the scope of the present patent.

100: Substrate container 10: Outer housing 1: Housing 11: Top wall 12: Connecting wall 13: Bottom wall 131: Outer wall 132: Groove 133: Air chamber 134: Indented wall 135: Inner wall 136: Annular shoulder 137: Annular surrounding surface 138: Screw hole 139: Air inlet 14: Accommodation space 141: Front opening 2: Retaining assembly 21: Connecting frame 211: Annular groove 22: Retaining frame 23: Side arm 231: Side arm portion 232: Front hook 24: First latch 240: Connecting plate 241: Extending arm 242: Snap arm 243: Groove 244: Front bevel 25: Back frame 251: Back plate 252: Annular wall 20: Gas diffuser 3: Bracket 31: Frame 310: Frame 311: Bottom wall 312: Top wall 313: Front shell 314: Rear shell 315: Front edge 316: Slit 317: Front air outlet 318: Rear air outlet 32: Connecting portion 321: Elastic sealing ring 33: Second snap member 331: Arm 332: Rear hook 333: Rear bevel 34: Elastic top abutment 341: Raised top arm 342: Elastic top abutment arm 343: Elastic arm segment 344: Top abutment segment 35: Positioning protrusion 36: Hook 4: Sealing ring 41: Perforation 5: Porous tube 51: Front filter membrane 52: Rear filter membrane 6: Outer cover 61: Air inlet 62: Cover plate 621: Plate 622: Cylinder 623: Inner cover surface 624: Outer cover surface 625: Enclosure wall 626: End wall 627: Screw hole 628: Through hole 63: Annular locking rib 7: Screw 8: Inlet valve module 81: Center-through fitting 82: Check valve 83: Base 831: Docking hole

Other features and functions of the present invention are clearly illustrated in the accompanying drawings, including: Figure 1 is a perspective view of a first embodiment of a substrate container of the present invention; Figure 2 is a perspective exploded view illustrating the assembly relationship between two gas diffusion devices and a housing of the first embodiment; Figure 3 is a partial exploded view illustrating one of the two air inlet valve modules, four of the eight screws, one of the two outer covers, and one of the two sealing rings of the first embodiment assembled to a bottom wall of a housing; Figure 4 is another partial exploded view illustrating the bottom wall of the first embodiment being recessed to form two grooves and two air inlet holes; Figure 5 is a partially exploded perspective view illustrating the assembly relationship between the housing, a retaining assembly, a bracket, and a porous tube of the first embodiment; Figure 6 is a partially exploded perspective view illustrating the assembly relationship between the bracket and a retaining frame of the first embodiment; Figure 7 is a perspective view of one of the gas diffusion devices of the first embodiment; Figure 8 is a partially exploded perspective view of the gas diffusion device of the first embodiment illustrating the assembly relationship between the porous tube and the bracket; Figure 9 is a partially exploded perspective view illustrating the assembly relationship between a connecting portion, an elastic sealing ring, and one of the air inlet holes of the first embodiment; Figure 10 is a partial cross-sectional view illustrating the two elastic abutments of the bracket of the first embodiment abutting against a top wall of the housing, and the two second latches of the gas diffuser device latching onto a first latch of the retaining assembly; Figure 11 is a partial cross-sectional view of the first embodiment; Figure 12 is a partial exploded view from another angle illustrating that each outer cover of the first embodiment has an annular locking rib; Figure 13 is a partial cross-sectional view illustrating that one of the intake valve modules of the first embodiment is assembled to the corresponding outer cover, and that the outer cover and the corresponding sealing ring are assembled to the bottom wall; Figure 14 is a three-dimensional exploded view illustrating the components of one of the intake valve modules of the first embodiment; Figure 15 is a partial cross-sectional view of another embodiment of the first embodiment; Figure 16 is a perspective exploded view of the gas diffusion device of a second embodiment of the substrate container of the present invention; Figure 17 is a partial cross-sectional view of a third embodiment of the substrate container of the present invention; and Figure 18 is a partial cross-sectional view of another embodiment of the third embodiment.

100:Substrate container

10: Shell

1: Shell

11: Top wall

12: Connecting wall

13: Bottom wall

14: Storage space

141:Front opening

20: Gas diffusion device

4: Sealing ring

5: Porous tube

6: Outer cover

7: Screws

8: Intake valve module

Claims (33)

A substrate container comprises: An outer casing comprising a housing and at least one retaining assembly. The housing has a top wall, a bottom wall, and a connecting wall connecting the top and bottom walls. The housing defines a receiving space and at least one air inlet. The receiving space has a front opening. The retaining assembly is disposed on the connecting wall of the housing and located within the receiving space. The retaining assembly has two side arms. At least one gas diffusion device is disposed in the receiving space and includes a bracket. The bracket has a frame held by the side arms and a connecting portion connected to the air inlet. The substrate container of claim 1 , wherein the holding assembly further comprises a first latch located between the side arms, and the bracket further comprises at least a second latch latched to the first latch. A substrate container as described in claim 2, wherein the first latch has a latch arm that blocks the frame, the first latch is formed with at least one groove located on the rear side of the latch arm, the second latch has an arm portion that rests on the top end of the latch arm, and a rear hook portion protruding from the rear end of the arm portion, the rear hook portion is embedded in the groove and latched to the latch arm. As described in claim 3, the substrate container, wherein the locking arm has a front bevel, the rear hook has a rear bevel for contacting the front bevel, and the front bevel is configured to push the rear bevel to cause the arm to bend and deform so that the rear hook can be locked to the locking arm. The substrate container of claim 1, wherein the frame has a bottom wall and a top wall opposite to the bottom wall, and the support further has at least one elastic top abutment disposed on the top wall and abutting against the shell. The substrate container according to claim 1, wherein each of the side arms has a side arm portion that blocks one side of the frame, and a front hook portion that protrudes from a front end of the side arm portion and is locked to the frame. The substrate container of claim 1, wherein the holding assembly further comprises a connecting frame and a holding frame, wherein the connecting frame is integrally connected to the connecting wall of the housing, the holding frame comprises the side arms, and a back frame connected to the side arms, the back frame being connected to the connecting frame. The substrate container as described in claim 1, wherein the frame has a bottom wall and a top wall opposite to the bottom wall, and the connecting portion is a surrounding wall protruding downward from the bottom wall of the frame and inserted into the air inlet. The substrate container of claim 1, wherein the frame has a bottom wall and a top wall opposite to the bottom wall, and the connecting portion is a surrounding wall that protrudes upward from the bottom wall of the shell and is inserted into the bottom wall of the frame. The substrate container as described in any one of claim 8 or 9, wherein the gas diffusion device further includes an elastic sealing ring mounted on the surrounding wall and clamped by the shell and the bottom wall of the frame. The substrate container as described in claim 5, wherein the elastic top abutment has a protruding top arm protruding upward from the top wall of the frame, and an elastic top abutment arm formed at a top end of the protruding top arm and abutting against the shell. The substrate container as described in claim 11, wherein the elastic top abutment arm has an elastic arm section extending laterally from the top end of the protruding top arm, and a top abutment section protruding upward from the top end of the elastic arm section and abutting against the shell. A substrate container as described in any one of claim 8 or 9, wherein the bracket further has a limiting protrusion extending upward from the bottom wall of the bracket, and the gas diffusion device further includes a porous tube arranged between the bottom wall of the bracket and the top wall of the bracket, and the porous tube is engaged with the limiting protrusion. The substrate container as described in claim 13, wherein the bracket further has a hook provided on the top wall of the frame, and the porous tube is hooked by the hook. The substrate container of claim 12, wherein the bracket is a single component manufactured by an integral molding method. The substrate container of claim 1, wherein the frame has a front shell and a rear shell connected to the rear side of the front shell, the front shell forming a plurality of front air outlets, and the rear shell forming a plurality of rear air outlets, the gas diffusion device further including a front filter disposed on the inner side of the front shell and corresponding to the front air outlets, and a rear filter disposed on the inner side of the rear shell and corresponding to the rear air outlets. The substrate container as described in claim 1, wherein the holding assembly further comprises a connecting frame and a holding frame, the connecting frame being integrally connected to the connecting wall of the housing, the holding frame comprising the side arms and a back frame connected to the side arms, the back frame being connected to the connecting frame, and the angle between a surface formed by connecting front edges of the side arms and a surface of the connecting wall to which the connecting frame is connected being a specific angle so that the gas diffusion device is oriented toward the center of the accommodating space. The substrate container of claim 13, wherein the bracket is a single component manufactured by an integral molding method. A substrate container comprises: A housing comprising a shell and at least one retaining assembly, the shell having a top wall, a bottom wall, and a connecting wall connecting the top and bottom walls; the shell defining a receiving space and at least one air inlet; the receiving space having a front opening; the retaining assembly disposed within the shell and located within the receiving space; the retaining assembly having a first latch; and At least one gas diffusion device disposed within the receiving space and comprising a bracket having a connecting portion connected to the air inlet and at least one second latch that latches onto the first latch. A substrate container comprises: A housing having a top wall, a bottom wall, and a connecting wall connecting the top and bottom walls. The housing defines a storage space having a front opening. The bottom wall is inwardly recessed to form at least one groove, and the bottom wall defines at least one air inlet hole connected to the groove; At least one outer cover is coupled to the bottom wall and, together with the bottom wall, defines an air chamber connected to the air inlet hole. The outer cover defines an air inlet hole connected to the air chamber; and At least one air inlet valve module is disposed on the outer cover, corresponding to the air inlet hole, and allows air to enter the air chamber through the air inlet hole. A substrate container as described in claim 20, wherein the bottom wall has an outer wall surface, an inwardly contracted surrounding wall body connected to the outer wall surface and surrounding the outer cover, and an inner wall body connected to an end of the inwardly contracted surrounding wall body opposite to the outer wall surface and spaced apart from the outer wall surface, the air inlet hole being formed in the inner wall body, the outer cover being spaced apart from the inner wall body, and the position of the air inlet hole when vertically projected onto the inner wall body not overlapping with the position of the air inlet hole. The substrate container as described in claim 20, wherein the shell is a single component manufactured by an integral molding method. As described in claim 20, the substrate container, wherein the bottom wall has an outer wall surface, an inwardly contracted surrounding wall body connected to the outer wall surface and surrounding the outer cover, and an inner wall body connected to an end of the inwardly contracted surrounding wall body opposite to the outer wall surface and spaced apart from the outer wall surface, the inwardly contracted surrounding wall body and the inner wall body jointly define the groove, and the inner wall body forms the air inlet hole. The substrate container of claim 20 further comprises a sealing ring located between the bottom wall and the outer cover. In the substrate container of claim 24, the bottom wall has an outer wall surface and an inwardly contracted surrounding wall body connected to the outer wall surface and surrounding the outer cover, and the sealing ring is disposed in the groove. In the substrate container of claim 25, the inwardly contracted surrounding wall has an annular shoulder surface for the sealing ring to abut against, and the annular shoulder surface and the outer cover jointly clamp the sealing ring. The substrate container of claim 26, wherein the inwardly contracted surrounding wall further comprises an annular surrounding surface connected between the outer wall surface and the annular shoulder surface and surrounding the outer cover. The substrate container as described in claim 25, wherein the outer cover has a cover plate surrounded by the inwardly contracted surrounding wall and defining the air inlet hole, and an annular pressing rib protruding from one side of the cover plate and surrounding the air inlet hole, wherein the annular pressing rib is in pressing contact with the sealing ring. In the substrate container as described in claim 26, a plurality of screw holes are formed on the annular shoulder surface, and the substrate container further includes a plurality of screws passing through the outer cover and the sealing ring and screwed into the screw holes respectively. The substrate container as described in claim 20, wherein the bottom wall has an outer wall surface, the outer wall surface is recessed inward to form the groove, and the outer cover has an outer cover surface, and the outer cover surface and the outer wall surface of the bottom wall are coplanar. The substrate container of claim 20, wherein the at least one air inlet valve module comprises a check valve. The substrate container as described in claim 31, wherein the at least one air inlet valve module further includes a central tube connected to the outer cover, and a base assembled on the central tube, and the check valve is installed in the base. The substrate container as described in claim 31, wherein the at least one air inlet valve module further includes a central tube connected to the outer cover, and a base assembled on the central tube, and the check valve is installed in the central tube.