JP2003170969A - Storing container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a storing container preventing a dirty fluid from being brought into direct contact with articles in the container, and having little possibility to cause another rising dust even in the case where a large quantity of fluids flow into the container at a time through a filter. <P>SOLUTION: The storing container is composed of a container main body 1 for storing precise base sheets W in an aligned state, a detachable lid 10 which is fitted to and closes an open front surface of the container main body 1 with the aid of gaskets 11, a filter 20 mounted in a through hole 2 provided to a forward portion of a bottom of the container main body 1, and a control member 30 interposed between the filter 20 and the precise base sheet W placed at the lowermost position. The stream of air including dust, which has passed through the filter 20, impinges against the control member 30 to be blocked and dispersed, and diffuses to a lower portion on an inner back surface side of the container main body 1 while decreasing a flow rate. The scattering of the dust is controlled by the decreased flow rate of the air stream, and the dust is deposited on an inner face of the container main body 1 without being deposited on the precise base sheets W. <P>COPYRIGHT: (C)2003,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a storage container for storing, storing and carrying a precision substrate or the like made of semiconductor wafers or mask glass, and more specifically, a control body for blocking and diffusing an air flow from a filter of the storage container. It is about.

[0002]

2. Description of the Related Art As shown in FIG. 9, a conventional container which is a precision substrate container is a front open box type container body 1 for vertically accommodating a plurality of precision substrates W, and this container body 1 It is composed of a detachable lid body 10 that is fitted and closed on the front side of the opening via a gasket 11.

By the way, the storage container is used for transporting the precision substrate W in an environment where the ambient pressure and temperature change. At this time, an air stream containing dust (see the arrow in FIG. 9) flows in, There is a problem that the precision substrate W is contaminated with dust. For example, the external pressure of the storage container may become higher than the internal pressure due to a sudden pressure change when the storage container is transported by an aircraft or at a high speed, or a temperature change during transportation or storage. In this case, the contaminated airflow outside the storage container will flow into the storage container. When the air in the storage container is replaced with nitrogen, inert gas, dry air, or the like, dust will also flow into the storage container when the gas or air is injected.

As described above, in the prior art, there is a possibility that the precision substrate W may be contaminated due to the inflow of an air flow containing dust into the storage container. Then, JP-A-11-59778
In the gazette, a through hole 2 is bored on the bottom opening side of the container body 1 and a filter 20 is fitted into the through hole 2 to remove dust in the inflowing air flow with the filter 20 to generate a clean air flow. We have proposed a storage container with an internal pressure adjustment mechanism for inflow.

[0005]

The conventional storage container removes dust in the air flow by the filter 20 as described above, but the performance of the filter 20 and the cleanliness of the filter 20 itself are not always perfect. At 20, the dust in the airflow cannot be completely removed. Further, since it is extremely difficult to completely remove dust from the inner surface of the container body 1, when the air flow comes in, the dust remaining in the container body 1 is rolled up by the air flow, and this dirty air flow is transferred to the precision substrate W. There is a big problem of directly spraying and polluting. Furthermore, when a large amount of airflow flows into the filter 20 at once, there is a possibility that the airflow collides with the precision substrate W directly and vibrates, and new dust or particles are generated.

The present invention has been made in view of the above, and suppresses a dirty fluid from directly contacting an article, and even if a large amount of fluid flows into the filter at one time, dust is unlikely to be newly generated. The purpose is to provide a storage container.

[0007]

In order to achieve the above object, in the invention according to claim 1, an opening of a container body for accommodating an article is fitted and closed by a detachable lid body, A filter attached to at least one of the container body and the lid, and a control body interposed between the filter and an article in the container body, and passing through the filter into the container body. It is characterized in that the flow of the inflowing fluid is changed by the control body so that the fluid is guided below the container body.

The control body may be formed in a substantially plate shape, and ribs, irregularities, or an adsorbent layer may be provided on the facing surface facing the filter. Further, a through hole is provided at the bottom of the container body, and a storage cylinder for the filter is attached to the through hole, the control body is formed in a substantially cylindrical shape, and the control cylinder is connected to an upper portion of the storage cylinder. An outlet can be formed in the side wall of the body.

Here, the articles in the claims include at least one precision substrate made of at least a semiconductor wafer or a mask glass, mechanical, electrical, electronic, semiconductor manufacturing,
Materials used in the fields of chemistry and sundries are included. The container body is mainly a front open box type, but may be a top open box type or the like. Also,
The filter and the control body may be singular or plural. The control body can be formed in an I-shape, a J-shape, an L-shape, a U-shape, etc., and can be provided in a horizontal, vertical, or inclined state. When this control body is configured to be removable, it is preferable to form a plurality of locking portions. The fluid contains at least gas such as air, nitrogen, inert gas, or dry air. Furthermore, when the filter storage cylinder is attached to the through hole of the container body, it can be attached directly or indirectly.

According to the present invention, the fluid flows into the interior of the container body closed by the lid while the foreign matter such as dust is partially removed by the filter, but the rest of the foreign matter is not removed. However, the fluid containing the foreign matter collides with the control body and diffuses in a direction that does not adversely affect the article. As a result, the foreign matter is suppressed from scattering and adheres to the inside of the container body, and the contamination of the article is suppressed. Further, since the velocity of the fluid is reduced, the amount of foreign matter remaining in the container body is reduced.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. A storage container which is a precision substrate storage container in the present embodiment has a plurality of precision substrates as shown in FIG. A container body 1 for accommodating W, a detachable lid 10 for fitting and closing a front surface of the opening of the container body 1 in a sealed state through an endless gasket 11, a filter 20 attached to the container body 1, The control body 30 interposed between the filter 20 and the precision substrate W, and the air flow that has passed through the filter 20 and flowed into the container body 1.
The flow of (see arrow) is changed by the control body 30 toward the inner rear side of the container body 1 so that the airflow is guided to the lower side of the container body 1.

The container body 1 is made of, for example, polycarbonate,
Molded into a front open box type using thermoplastic resins such as polyetherimide, polyetheretherketone, and cyclic olefin resin, multiple sheets (for example,
Twenty-five or twenty-six precision substrates W are arranged side by side and housed. This container body 1 has a plurality of single round through holes 2 for adjusting the atmospheric pressure formed on the front side of the bottom portion (also on the opening side of the bottom portion), and the front side of the opening is bulged to form a wide rim portion 3.
A plurality of recessed holes (not shown) are bored at predetermined intervals above and below the inner circumference of the rim portion 3.

The lid 10 is made of a thermoplastic resin such as polycarbonate, polyetherimide, polyetheretherketone, or cyclic olefin resin, and is formed in a hollow structure having a substantially rectangular front surface. The lid 10 has a locking / unlocking locking mechanism (not shown) built therein, and a plurality of locking claws constituting this locking mechanism are formed in the recessed holes of the container body 1 based on an operation from the outside. By fitting and locking, the container body 1 is firmly locked in a fitted and closed state, and the container body 1 and the outside are shut off.

The filter 20 is, for example, HEPA,
A filter for removing dust such as ULPA and various chemical filters (for example, activated carbon, anion filter, cation filter) and the like are used, and one kind or a plurality of kinds are used. The filter 20 is formed in a thin disk shape and has a container body 1
It is removably fitted in the through hole 2 and functions to equalize the internal and external pressures of the storage container. Although the disk-shaped filter 20 is shown in the present embodiment, the size and external dimensions of the filter 20 are not particularly limited and may be changed according to the size and external dimension of the through hole 2.

The control body 30 is formed into a linear plate shape by using a predetermined material, and is horizontally mounted on the lid body 10. When the lid body 10 is fitted and closed, the control body 30 and the lowermost filter 20 are placed at the lowest position. It intervenes between the front part of the precision substrate W located at. The material of the control body 30 is transparent or colored PE,
Polyolefin such as PP, ABS, PS, PC, PBT
And the like, and thermoplastic elastomers such as polyester-based, polyolefin-based, polystyrene and the like are used.

The control body 30 is formed to have an area at least equal to or larger than the opening area of the filter 20, preferably three times or more, and is supported by the lower portion of the inner surface of the lid 10 in a detachable or fixed state, and is connected to the filter 20. Between 1 to 30 mm
Form an interval of. The lower surface of the control body 30, in other words, the facing surface 31 facing the filter 20 is usually formed as a flat surface, but if necessary, a plurality of ribs, unevenness, or an adsorbent layer made of activated carbon, ceramics, or the like is used. Are formed appropriately. In this embodiment, the linear plate-shaped control body 3 is used.
It shows 0, but is not limited thereto. For example, the control body 30 may be formed in a corrugated shape or a porous shape in which dust is easily trapped.

In the above structure, when the external pressure of the storage container becomes higher than the internal pressure, the air flow passes through the filter 20 and flows into the container main body 1 at high speed to keep the internal and external atmospheric pressures constant. At this time, a part of the dust is removed by the filter 20, but the airflow flows into the container body 1 without removing the rest of the dust.

However, the air flow containing the dust collides with the control body 30 directly above and is blocked and evenly dispersed, so that the precision substrate W is not adversely affected. In other words, below the inner rear surface side of the container body 1. Is diffused and guided while reducing the flow velocity. Due to the decrease in the flow velocity of the airflow, dust is prevented from being scattered and adhered to the inner surface of the container body 1 without adhering to the precision substrate W, and the contamination of the precision substrate W is extremely effectively suppressed and prevented. Further, since the flow velocity of the air flow is reduced, dust remaining in the container body 1 is not rolled up by the air flow, and there is no possibility that the dirty air flow is directly blown onto the precision substrate W to contaminate it. Further, even if a large amount of airflow flows into the filter 20 at one time, it is blocked and deflected by the control body 30, so that the precision substrate W above the control body 30 does not vibrate and new dust such as particles is generated. There is no danger of it occurring.

According to the above structure, it is possible to very effectively suppress and prevent the air flow contaminated by the control body 30 from directly blowing on the precision substrate W. Thereby, the contamination of the precision substrate W can be reduced by 75 to 85% under certain conditions. Further, even if a large amount of airflow flows into the filter 20 at one time, dust is unlikely to be newly generated. Further, if the control body 30 is formed with ribs, continuous irregularities, or an adsorbent layer, or if the control body 30 is formed in a corrugated or porous shape, dust can be captured by electrostatic force or the like.
Explaining this point in detail, although depending on the size of the dust particles, when the airflow collides with the control body 30, the dust can be captured on the surface of the control body 30 by electrostatic force or the like. Therefore, if the control body 30 is formed with ribs, concavities and convexities, or an adsorbent layer, or if the control body 30 is formed in a corrugated or porous shape, the trapping effect can be obtained.

Next, FIG. 2 shows a second embodiment of the present invention. In this case, a plurality of through holes 2 are formed on the back surface of the bottom of the container body 1, and the through holes 2 are formed. Filter 2
0 is detachably fitted, and below the inner rear surface of the container body 1, the lower filter 20 and the precision substrate W located at the lowest position.
The plate-shaped control body 30 interposed between the rear part and the rear part is supported substantially horizontally. The other parts are the same as those in the above-described embodiment, and thus the description thereof is omitted. In this embodiment, the same effect as the above embodiment can be expected, and moreover, since the airflow is guided to the lower side of the inner front side of the container body 1, there is a problem in guiding the airflow to the lower side of the inner back side of the container body 1. Is significant, or it is difficult to support the control body 30 on the lid body 10, and the like.

Next, FIG. 3 shows a third embodiment of the present invention. In this case, a plurality of through holes 2 are formed in the lid body 10, and the filter 20 is attached to and detached from the through holes 2. A control body 30 having a substantially inverted L-shaped cross section is integrally formed on the upper inner surface of the lid body 10 and is interposed between the filter 20 and the front portion of the precision substrate W located above. There is. The other parts are the same as those in the above-described embodiment, and thus the description thereof is omitted. In this embodiment, the same effect as the above embodiment can be expected, and moreover, since the airflow is guided to the lower side of the inner front side of the container body 1, there is a problem in guiding the airflow to the lower side of the inner back side of the container body 1. Or the container body 1
This is convenient when, for example, it is difficult to support the control body 30.

Next, FIGS. 4 to 8 show a fourth embodiment of the present invention. In this case, through holes 2 are formed on both the front and rear sides of the bottom of the container body 1, respectively. 2, a storage cylinder 43 that stores the filter 20 is tightly screwed through an O-ring 45 for sealing, and a pair of filters 20 located in the front are used for air flow inflow, and a pair of filters located in the rear. The filter 20 is used for outflow, and the control body 3
0 is formed in a tubular shape and integrally formed on the upper part of each of the front storage cylinders 43, and the outlet 32 which is the opening of each control body 30 is expanded into a substantially trumpet shape so that the inner rear surface side of the container body 1 is closed. I am trying to point it downward.

As shown in FIG. 8, a cylindrical joint 41 is tightly fitted from below into each cylindrical through hole 2 of the container body 1, and the female screw 4 is formed on the inner peripheral surface of the joint 41.
2 is threaded, and the female screw 42 of this joint 41
The storage cylinder 43 is screwed onto the male screw 44 via the male screw 44. Each storage cylinder 43 is formed in a cylindrical shape longer than the joint 41, and the thin disk-shaped filter 20 is fitted to the upper part of the opening through the holding collar 46. Flanges 47 and 48 are formed on the inside and outside of the upper peripheral surface of the storage cylinder 43 so as to project in the radial direction, and the inner flange 47 and the upper portion of the holding collar 46 are provided with an O-ring 45A for sealing the filter 20. The outer flange 48 is locked to the upper peripheral edge of the through hole 2.

Each holding collar 46 is formed into a ring shorter than the storage cylinder 43. An upper portion of the holding collar 46 is formed to have a reduced diameter, an O-ring 45A that is pressed against the inner peripheral surface of the storage cylinder 43 is fitted to the step portion, and a plurality of locking projections 49 are formed on the lower outer peripheral surface. Are projectingly formed at predetermined intervals in the circumferential direction, and the respective locking projections 49 are fitted and locked in the locking recesses 50 formed on the inner peripheral surface of the housing cylinder 43.

The control body 30 is basically formed into a hollow cylindrical shape, one end of which is connected to the housing cylinder 43, and the outlet 32 portion provided above is formed into a substantially flat funnel shape. The outlet 32 of the control body 30 controls the flow of the airflow flowing through the filter 20 to the inner wall of the cavity of the control body 30,
In particular, since the air flow is bent by about 90 ° and discharged while being applied to the top surface, it is formed on the peripheral wall of the control body 30. Outlet 32
Is preferably expanded at an angle of 1 ° to 180 °, preferably 60 ° to 90 ° from the center.

The materials of the joint 41, the housing cylinder 43, the holding collar 46, and the control body 30 are thermoplastic resins such as polyethylene, polypropylene, ABS, polystyrene, polycarbonate, polybutylene terephthalate, polyester, polyolefin, polystyrene. A thermoplastic elastomer such as is used. The other parts are the same as those in the above-described embodiment, and thus the description thereof is omitted.

In the above structure, when the external pressure of the storage container becomes higher than the internal pressure, the air flow is filtered by the air flow inflow filter 20.
And flows into the container body 1 at a high speed through the passage to try to adjust the atmospheric pressure inside and outside to be constant. At this time, part of the dust in the airflow is removed by the airflow inflow filter 20,
The remaining dust flows into the container body 1 without being removed.

However, the air flow containing dust collides with the control body 30 which is a duct, is blocked and dispersed, and has a flow velocity in a direction that does not adversely affect the precision substrate W, that is, below the inner rear surface side of the container body 1. While being lowered, it is diffused and guided.
Due to this decrease in the flow velocity, dust is prevented from being scattered and prevented from adhering to the precision substrate W and the filter 20 for flowing out the air flow.
The air in the container body 1 is efficiently replaced in a short time, while the contamination of the precision substrate W is prevented and prevented from flowing out to the outside of the container body 1 through the passage.

Further, since the flow velocity of the air flow is reduced, dust slightly remaining in the container body 1 is not rolled up by the air flow, and there is no possibility that the dirty air flow is directly blown onto the precision substrate W to contaminate it. Further, even if a large amount of airflow flows into the filter 20 at one time, it is blocked and deflected by the control body 30, so that the precision substrate W above the control body 30 does not vibrate and new dust may be generated. Absent.

In this embodiment as well, the same effect as the above embodiment can be expected, and the through hole 2 of the container body 1 is also expected.
Since the storage cylinder 43 is attached to the joint 41 via the joint 41 instead of directly, and the storage cylinder 43 is attached to the joint 41 via a screw, it is not necessary to screw the through hole 2 with a screw. Therefore, great improvement in productivity of the container body 1 can be expected. Further, since the filter 20 is fitted into the storage cylinder 43 not directly but through the holding collar 46, the fall of the filter 20 can be effectively suppressed and prevented. Further, since the holding collar 46 is not simply fitted to the storage cylinder 43 but is attached by the concave-convex friction fitting of the locking convex portion 49, firm fitting of the holding collar 46 can be expected greatly.

In the above embodiment, the filter 20 and the control body 30 are provided on either one of the container body 1 and the lid body 10. However, the present invention is not limited to this. For example, the container body 1 and the lid body 10 have a filter 20 and a control body 30.
And may be provided respectively. Further, since the control body 30 is also effective when the inside of the storage container is replaced with an inert gas, dry air, or the like, gas is injected from the outside through the lower opening of the control body 30, and the inside of the storage container is injected. It is also possible to generate a flow of the replacement gas that is directed in a certain direction through the duct, and circulate the flow of the replacement gas inside the storage container by a rectifying plate or the like to sequentially exhaust the gas inside from the exhaust hole.
In this case, the gas replacement can be efficiently performed in a short time without contaminating the precision substrate W. Furthermore, the control body 3
The position and the number of 0 and exhaust holes are not particularly limited and can be changed as appropriate.
It is preferable to install it in a portion other than the projection portion on the bottom surface.

[0032]

As described above, according to the present invention, it is possible to effectively prevent a dirty fluid from directly contacting an article, and dust is newly generated even if a large amount of fluid flows into the filter at once. The effect is that there is little fear.

[Brief description of drawings]

FIG. 1 is a cross-sectional side view showing an embodiment of a storage container according to the present invention.

FIG. 2 is a sectional side view showing a second embodiment of the storage container according to the present invention.

FIG. 3 is a sectional side view showing a third embodiment of the storage container according to the present invention.

FIG. 4 is a sectional plan view showing a fourth embodiment of a storage container according to the present invention.

FIG. 5 is a sectional side view showing a fourth embodiment of the storage container according to the present invention.

FIG. 6 is a main part plan view showing a fourth embodiment of a storage container according to the present invention.

FIG. 7 is a main part front view showing a fourth embodiment of the storage container according to the present invention.

FIG. 8 is an enlarged sectional view of an essential part showing a fourth embodiment of the storage container according to the present invention.

FIG. 9 is a sectional side view showing a conventional storage container.

[Explanation of symbols]

1 container body 2 through holes 10 Lid 11 gasket 20 filters 30 control body 31 Opposing surface 32 Outlet (opening) 41 joint 43 Storage tube 46 holding color W Precision substrate (article)

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3E067 AA12 AA13 AB40 AB41 AB99                       AC03 BA02A BB14A BB30A                       BC06A BC07A CA30 EA32                       EC36 EE29 EE60 GB02 GD10                 3E096 AA06 BA15 BA16 BA17 BA20                       BA24 BB03 BB04 BB05 CA02                       CA08 CB03 DA03 DA17 DA26                       DA30 DB06 DC02 EA02X                       EA02Y EA10Y EA20Y FA03                       FA15 FA40 GA04 GA05 GA07                       GA20                 5F031 CA02 CA05 DA08 EA02 EA14                       EA18 NA02 NA04 NA16

Claims (3)

[Claims] 1. A storage container in which an opening of a container main body for storing articles is fitted and closed by a removable lid, and a filter attached to at least one of the container main body and the lid, A control body interposed between the filter and the article in the container body, the flow of the fluid passing through the filter and flowing into the container body is changed by the control body, and the control body is provided below the container body. A storage container which is configured to guide the fluid. 2. The storage container according to claim 1, wherein the control body is formed in a substantially plate shape, and ribs, irregularities, or an adsorbent layer is provided on an opposing surface facing the filter. 3. A through hole is provided in the bottom of the container body, and a storage cylinder for the filter is attached to the through hole, the control body is formed in a substantially cylindrical shape, and is connected to an upper portion of the storage cylinder. ,
The storage container according to claim 1, wherein an outlet is formed on a side wall of the control body.